CN115096284A - On-chip integrated triaxial gyro assembly based on lithium niobate film - Google Patents
On-chip integrated triaxial gyro assembly based on lithium niobate film Download PDFInfo
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- CN115096284A CN115096284A CN202210927142.7A CN202210927142A CN115096284A CN 115096284 A CN115096284 A CN 115096284A CN 202210927142 A CN202210927142 A CN 202210927142A CN 115096284 A CN115096284 A CN 115096284A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
- G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
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Abstract
The application relates to the technical field of sensors, in particular to an on-chip integrated triaxial gyro assembly based on a lithium niobate film, which comprises a light-emitting unit, a lithium niobate film chip and a tail fiber unit; the light-emitting unit is coupled with the lithium niobate thin film chip, and the lithium niobate thin film chip is coupled with the tail fiber unit; the light emitting unit is used for emitting light waves; the lithium niobate thin film chip is used for splitting, modulating and detecting the light wave; the tail fiber unit is used for the optical wave propagation. This application has the effect that reduces the volume of triaxial top.
Description
Technical Field
The application relates to the technical field of sensors, in particular to an on-chip integrated triaxial gyro assembly based on a lithium niobate thin film.
Background
The fiber optic gyroscope is a fiber optic sensor used for inertial navigation, and the working principle of the fiber optic gyroscope is based on the Sagnac effect. The fiber-optic gyroscope has the advantages of full solid state, no rotating part and friction part, long service life, large dynamic range, instant start, simple structure, small size and light weight.
In the related technology, the optical path part of the three-axis fiber-optic gyroscope adopts a one-to-three mode, the three-axis fiber-optic gyroscope comprises a plurality of devices, and the plurality of devices comprise a light source and a first coupler, three second couplers, three Y waveguides, three fiber rings and three detectors. The light source is coupled to a first coupler, which is coupled to three second couplers, each second coupler being connected to one detector and each second coupler being coupled to one Y-waveguide, each waveguide being connected to one fiber ring. The first coupler is used for splitting the light wave into three light waves, the three light waves enter the Y waveguide through the second coupler respectively, and finally the light waves enter the optical fiber ring. The light waves return after entering the optical fiber ring and enter the detector after passing through the Y waveguide and the second coupler.
In the related art, each coupler, the Y waveguide, and the detector are coupled and connected, and a plurality of devices are coupled and connected, so that the function of the three-axis gyroscope is realized. However, the three-axis gyroscope in the related art is assembled by coupling and connecting a plurality of devices, so that the three-axis gyroscope is large in size.
Disclosure of Invention
In order to reduce the volume of the triaxial gyro, the application provides an on-chip integrated triaxial gyro assembly based on a lithium niobate thin film.
The application provides an on-chip integrated triaxial gyro assembly based on lithium niobate film adopts following technical scheme:
an on-chip integrated triaxial gyro assembly based on a lithium niobate film comprises a light-emitting unit, a lithium niobate film chip and a tail fiber unit; the light-emitting unit is coupled with the lithium niobate thin film chip, and the lithium niobate thin film chip is coupled with the tail fiber unit;
the light emitting unit is used for emitting light waves;
the lithium niobate thin film chip is used for splitting, modulating and detecting the light wave;
the tail fiber unit is used for the light wave propagation.
By adopting the technical scheme, the light-emitting unit emits light waves, the light waves are processed by the lithium niobate thin film chip and enter the optical fiber ring, and then the returned light waves are processed by the lithium niobate thin film chip. The lithium niobate thin film chip is integrated and has corresponding functions, and compared with the prior art that corresponding functions can be realized only after all devices are manually connected, the lithium niobate thin film chip reduces the occupied space, namely the volume, and the volume of the corresponding triaxial gyroscope can be reduced. The process of manually connecting devices is omitted, labor cost is reduced, the device assembling process with complex process is omitted, and production cost is reduced. The weight can be reduced by reducing the connection part between the devices.
Optionally, the lithium niobate thin film chip includes a first lithium niobate thin film waveguide, a second lithium niobate thin film waveguide, a polarization waveguide, a Y waveguide, a grating, and a detector; the first lithium niobate thin film waveguide comprises a main path and three branches, the main path is coupled with the light emitting unit, the three branches are all connected with the main path, one polarization waveguide and one Y waveguide are arranged in each branch, each polarization waveguide is connected with one second lithium niobate thin film waveguide, one grating is arranged in each second lithium niobate thin film waveguide, and one detector is arranged at the output end of each second lithium niobate thin film waveguide.
By adopting the technical scheme, the first lithium niobate thin film waveguide divides the light wave emitted by the light emitting unit into three beams and respectively enters the three polarization waveguides, the light wave enters the Y waveguide after passing through the polarization waveguides, the Y waveguide divides the light wave into two beams and then enters the optical fiber ring, so that the light wave returned by the optical fiber ring enters the detector through the second lithium niobate thin film waveguide after passing through the Y waveguide and the polarization waveguides, the grating changes the size of the mode spot of the light wave, the coupling efficiency of the waveguide and the detector is improved, and each component is integrated on the lithium niobate thin film chip, so that the beam splitting, modulation and detection of the light wave are completed.
Optionally, the light emitting unit includes a superluminescent diode and a lens subunit, the superluminescent diode faces the input surface of the lens subunit, and the output surface of the lens subunit faces the lithium niobate thin film chip.
By adopting the technical scheme, the superradiation diode is used as a light source to emit light waves, and the lens subunit is used for processing the light waves emitted by the superradiation diode, so that the light waves are better received by the lithium niobate thin-film chip.
Optionally, the lens subunit includes a collimating lens, a reflecting mirror, and a converging lens, an input surface of the collimating lens faces the superluminescent diode, the collimating lens, the reflecting mirror, and the converging lens are integrally disposed, and an output surface of the converging lens faces the lithium niobate thin film chip.
By adopting the technical scheme, the collimating lens converts the light wave emitted by the superradiation diode into parallel light, then the reflector changes the propagation direction of the parallel light, and finally the converging lens converges the parallel light, so that the parallel light is better received by the lithium niobate thin film chip.
Optionally, the lighting device further comprises a heat sink, a TEC refrigerator, and a housing, wherein the lighting unit and the lithium niobate thin film chip are both disposed on the heat sink, the heat sink is disposed on the TEC refrigerator, and the TEC refrigerator is disposed in the housing and in contact with the housing.
By adopting the technical scheme, the heat emitted by the light-emitting unit and the lithium niobate film chip is transferred to the heat sink, the refrigerating surface of the TEC refrigerator is neutralized with the heat of the heat sink, and the heat emitting surface of the TEC refrigerator is in contact with the shell, so that the heat is emitted to the outside through the shell, the heat dissipation of the light-emitting unit and the lithium niobate film chip is realized, and the possibility of performance reduction of the light-emitting unit and the lithium niobate film chip caused by high temperature is further reduced.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the light emitting unit emits light waves, the light waves are processed by the lithium niobate thin film chip and enter the optical fiber ring, and then the returned light waves are processed by the lithium niobate thin film chip. The lithium niobate thin film chip is integrated and has corresponding functions, and compared with the prior art that corresponding functions can be realized only after all devices are manually connected, the lithium niobate thin film chip reduces the occupied space, namely the volume, and the volume of the corresponding triaxial gyroscope can be reduced. The process of manually connecting devices is omitted, the labor cost is reduced, the device assembling process with complex process is omitted, and the production cost is reduced;
2. the heat that luminescence unit and lithium niobate film chip distribute is transferred to the heat sink, and the refrigeration face of TEC refrigerator and the heat of heat sink neutralize, thereby the exothermic face of TEC refrigerator and shell contact make the heat distribute to the external world through the shell to the realization is to luminescence unit and lithium niobate film chip heat dissipation, and then reduces the possibility that the luminescence unit and lithium niobate film chip performance reduce because the temperature is high.
Drawings
FIG. 1 is a schematic diagram of the optical path and device position in an embodiment of the present application.
Fig. 2 is an assembly view of the device as a whole according to the embodiment of the present application.
Fig. 3 is an assembly view showing a heat dissipation part according to an embodiment of the present application.
Description of reference numerals: 1. a light emitting unit; 11. a superluminescent diode; 12. a lens subunit; 121. a collimating lens; 122. a mirror; 123. a converging lens; 2. a lithium niobate thin film chip; 21. a first lithium niobate thin film waveguide; 211. a main road; 212. a branch circuit; 22. a second lithium niobate thin film waveguide; 23. a polarizing waveguide; 24. a Y waveguide; 25. a grating; 26. a detector; 3. a housing; 31. a pipe shell; 32. a cover plate; 4. a heat sink; 5. and a TEC refrigerator.
Detailed Description
The present application will be described in further detail below with reference to the accompanying fig. 1-3 and examples. It should be understood that the specific embodiments described herein are merely illustrative of and not restrictive on the broad application.
The embodiment of the application discloses an on-chip integrated triaxial gyro assembly based on a lithium niobate thin film. Referring to fig. 1 and 2, the on-chip integrated triaxial gyro assembly based on the lithium niobate thin film comprises a light-emitting unit 1, a lithium niobate thin film chip 2, a tail fiber unit and a shell 3, wherein the light-emitting unit 1 is coupled with the lithium niobate thin film chip 2, the lithium niobate thin film chip 2 is coupled with the tail fiber unit, and the light-emitting unit 1 and the lithium niobate thin film chip 2 are both arranged inside the shell 3.
The lithium niobate thin film chip 2 comprises a first lithium niobate thin film waveguide 21, a second lithium niobate thin film waveguide 22 and a polarization waveguide 23, the first lithium niobate thin film waveguide 21 comprises a main path 211 and three branch paths 212, one end of the main path 211 is coupled with the light emitting unit 1, the other end of the main path 211 is connected with the three branch paths 212, each branch path 212 is internally provided with a polarization waveguide 23, one side of each polarization waveguide 23 far away from the main path 211 is provided with a Y waveguide 24, each polarization waveguide 23 is further connected with a lithium niobate thin film waveguide, each second lithium niobate thin film waveguide 22 is internally provided with a grating 25, the grating 25 is positioned on one side of each second lithium niobate thin film waveguide 22 close to the output end, the output end of each second lithium niobate thin film waveguide 22 is provided with a detector 26, and the detector 26 is coupled with the second lithium niobate thin film waveguide 22.
The light emitting unit 1 outputs light waves, the first lithium niobate thin film waveguide 21 in the lithium niobate thin film chip 2 divides the light waves into three beams, one of the three beams is described here by taking one light wave as an example, one of the light waves sequentially passes through the polarization waveguide 23 and the Y waveguide 24 and then enters the tail fiber unit, the tail fiber unit is used for being externally connected with an optical fiber ring, the light waves enter the optical fiber ring through the tail fiber unit, and then the light waves sequentially pass through the Y waveguide 24, the polarization waveguide 23, the second lithium niobate thin film waveguide 22 after returning from the optical fiber ring and finally enter the detector 26. The integration of the lithium niobate thin-film waveguide, the polarization waveguide 23, the Y waveguide 24 and the detector 26 is realized by using the lithium niobate thin-film chip 2, and compared with the assembly of a plurality of devices in the related art, the volume of the triaxial gyro can be reduced, and compared with the case of a large number of devices in the related art, the cost can also be reduced. The process of connecting devices in the related technology is omitted, so that the production process is simplified, and the production cost is reduced. And the installation process can be simplified by adopting the integration mode of the lithium niobate thin film chip 2, and the installation difficulty is reduced. The reduction of the connecting portion also enables weight reduction and cost reduction.
Wherein the detector 26 is coupled in the manner of a patch.
Compared with the related technology which adopts the lithium niobate crystal material, the volume of the lithium niobate thin film chip 2 is smaller, and the bandwidth and the modulation efficiency can be improved.
Specifically, the tail optical fiber unit comprises a connecting block and six optical fibers, the connecting block is provided with an array groove, the six optical fibers are correspondingly fixed in the array groove of the connecting block, the connecting block is connected with the lithium niobate thin film chip 2, the six optical fibers are respectively aligned with six output ends of the three Y waveguides 24, and the end parts, far away from the lithium niobate thin film chip 2, of the six optical fibers are used for being connected with an optical fiber ring. The shell is provided with a through hole, and the six optical fibers penetrate through the through hole.
Specifically, in this embodiment, the lithium niobate thin film is formed by using an ion implantation technique and a wafer bonding technique, and the single crystal lithium niobate thin film is combined with a silicon dioxide layer deposited on a silicon substrate to form a si-based lithium niobate thin film, where the si-based lithium niobate thin film is referred to as a lithium niobate thin film for short, and an equivalent refractive index difference of the lithium niobate thin film is 0.67, which is higher than a refractive index difference of a substrate in an optical modulator in the related art.
The difference in the equivalent refractive index of the lithium niobate thin film is, for example, 0.67, but is not limited to this value.
Because the lithium niobate thin film cannot polarize the optical wave, in the embodiment, the polarization waveguide 23 is arranged in the branch of the first lithium niobate waveguide, the polarization waveguide 23 is manufactured based on the Bragg grating, the polarization waveguide 23 with the ultrahigh extinction ratio is realized by utilizing the inclined Bragg grating in the related technology, the extinction ratio can reach 46dB, and the manufacturing process of the polarization waveguide 23 based on the Bragg grating is simple and only needs one exposure etching. The extinction ratio can be improved by increasing the number of periods of the Bragg grating, so that the extinction ratio of the polarization waveguide 23 on the lithium niobate thin film meets the precision requirement of the triaxial gyroscope.
In this embodiment, the detector 26 is an InP/InGaAs-based photodetector, which has a PIN structure and is mesa-shaped, and has the characteristics of simple manufacturing process and high response speed. The mesa-type detector is also divided into a front-surface incidence detector and a back-surface incidence detector, and because the detector material is different from the lithium niobate thin film chip material, the detector 26 is integrated on the lithium niobate thin film chip 2, which belongs to heterogeneous integration, so that the back-surface incidence detector is selected, and is better coupled with the lithium niobate thin film chip 2, and the performance is improved.
Referring to fig. 1, the lighting unit 1 includes a lighting unit 1 including a superluminescent diode 11 and a lens subunit 12, the lens subunit 12 includes a collimating lens 121, a reflecting mirror 122 and a converging lens 123, and the collimating lens 121, the reflecting mirror 122 and the converging lens 123 are sequentially integrated, so as to reduce the occupied space. The input surface of the collimating lens 121 faces the superluminescent diode 11, and the output surface of the converging lens 123 faces the main path 211 of the first lithium niobate thin-film waveguide 21 in the lithium niobate thin-film chip 2.
The collimating lens 121 is used for converting the light wave emitted by the superluminescent diode 11 into parallel light, the parallel light is reflected by the reflector 122 by ninety degrees, then the parallel light is converged by the converging lens 123 and then enters the main path 211 of the first lithium niobate thin-film waveguide 21, the reflector 122 is used for converting the parallel light into the propagation direction, so that the superluminescent diode 11 and the collimating lens 121 are not in a straight line with the converging lens 123, the internal space of the shell 3 is reasonably utilized, and the volume of the three-week gyroscope is reasonably controlled.
The super-radiation diode 11 has the characteristics of wide spectrum, high output power, high reliability and good stability. And compared with the common light-emitting diode, the cavity has less reflection, and a feedback mechanism cannot be formed. Compared with a solid laser, a fiber laser and the like, the superradiation diode 11 is used as a light source, the electro-optic conversion efficiency can reach fifty percent, but half of the electric energy is converted into heat energy, so that the temperature is increased.
Referring to fig. 3, in order to reduce the temperature and thereby reduce the influence of the temperature increase on the performance of the lithium niobate thin film chip 2 and the superradiation diode 11, the embodiment employs a refrigeration heat dissipation manner of a TEC refrigerator with small volume and high reliability, the on-chip integrated triaxial gyro assembly based on a lithium niobate thin film further includes a heat sink 4 and a TEC refrigerator 5, the lithium niobate thin film chip 2 and the superradiation diode 11 are both disposed on the heat sink 4, the heat sink 4 is fixed on the TEC refrigerator 5, and the TEC refrigerator 5 is fixed on the inner surface of the housing 3. The refrigerating surface of the TEC refrigerator 5 is contacted with the heat sink 4, and the heat releasing surface of the TEC refrigerator 5 is contacted with the shell 3. In this embodiment, the case 3 is made of kovar alloy, so that the heat of the TEC refrigerator 5 can be better transferred to the outside of the case 3 under the condition that the strength of the case 3 is ensured, thereby ensuring the reliability of heat dissipation.
Referring to fig. 2 and 3, the case 3 includes a tube case 31 and a cover plate 32, the tube case 31 is a main part, the TEC refrigerator 5 is fixed in the tube case 31, and after the devices in the tube case 31 are mounted, the package is performed by using a parallel sealing process. The material of the housing 3 is not limited to kovar alloy, and other materials can be selected.
In order to increase the reliability of the triaxial gyroscope, the package of the triaxial gyroscope needs to have high air tightness, and the air tightness welding package process after the optical fiber metallization adopted in the embodiment is mature and can be directly used for packaging, so that the air tightness of the triaxial gyroscope is ensured.
Compared with the connection of all devices in the related technology, the three-axis gyroscope has the advantages that the light-emitting unit, the waveguide, the grating and other devices are integrated on the lithium niobate thin film chip 2, the precision of the three-axis gyroscope is guaranteed, and the size and the installation difficulty of the three-axis gyroscope are reduced. And because of the integrated design, the integrated part can be directly manufactured during production, and the process of manually connecting each device in the related technology is reduced, thereby reducing the labor cost.
The implementation principle of the on-chip integrated triaxial gyro assembly based on the lithium niobate thin film in the embodiment of the application is as follows: the superradiation diode 11 is used as a light source to emit a light wave, the light wave sequentially passes through the total reflection mirror 122 and the converging lens 123 to be transmitted to the main path 211 of the first lithium niobate thin film waveguide 21, then the light wave is divided into three light waves and respectively enters the three branches 212 of the first lithium niobate thin film waveguide 21, since the lithium niobate thin film waveguide cannot polarize the light wave, the light wave is polarized by the polarization waveguide 23 based on Bragg, then the light wave is divided into two light waves by the Y waveguide 24 to enter the optical fiber fixed on the connection block, and the light wave is transmitted into the optical fiber ring by using the optical fiber. Then, the light wave returns from the optical fiber ring, passes through the Y waveguide 24 and the polarization waveguide 23, enters the second lithium niobate thin film waveguide 22, and finally reaches the detector 26, and the detector 26 converts the light wave into an electrical signal, thereby realizing the function of the detector 26.
The lithium niobate thin film waveguide, the polarization waveguide 23, the Y waveguide 24, the grating 25 and the detector 26 are integrated on the lithium niobate thin film chip 2, and the occupied space of all devices in the related technology after connection is reduced by adopting an integration mode, so that the purpose of reducing the volume of the triaxial gyroscope is achieved. In addition, the process of manually connecting devices is reduced by adopting an integrated mode, the installation process of the three-axis gyroscope is simplified, and the labor cost is also reduced.
The foregoing is a preferred embodiment of the present application and is not intended to limit the scope of the application in any way, and any features disclosed in this specification (including the abstract and drawings) may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
Claims (5)
1. The utility model provides an on-chip integration triaxial top subassembly based on lithium niobate film which characterized in that: the device comprises a light-emitting unit (1), a lithium niobate thin film chip (2) and a tail fiber unit; the light-emitting unit (1) is coupled with the lithium niobate thin-film chip (2), and the lithium niobate thin-film chip (2) is coupled with the tail fiber unit;
the light emitting unit (1) is used for emitting light waves;
the lithium niobate thin film chip (2) is used for splitting, modulating and detecting the light wave;
the tail fiber unit is used for the optical wave propagation.
2. The lithium niobate thin film based on-chip integrated triaxial gyro assembly of claim 1, wherein: the lithium niobate thin film chip (2) comprises a first lithium niobate thin film waveguide (21), a second lithium niobate thin film waveguide (22), a polarization waveguide (23), a Y waveguide (24), a grating (25) and a detector (26); the first lithium niobate thin film waveguide (21) comprises a main path (211) and three branches (212), the main path (211) is coupled with the light-emitting unit (1), the three branches (212) are all connected with the main path (211), one polarization waveguide (23) and one Y waveguide (24) are arranged in each branch (212), each polarization waveguide (23) is connected with one second lithium niobate thin film waveguide (22), one grating (25) is arranged in each second lithium niobate thin film waveguide (22), and one detector (26) is arranged at the output end of each second lithium niobate thin film waveguide (22).
3. The lithium niobate thin film based on-chip integrated triaxial gyro assembly of claim 1 or 2, wherein: the light-emitting unit (1) comprises a superluminescent diode (11) and a lens subunit (12), the superluminescent diode (11) is over against the input surface of the mirror-transparent unit (12), and the output surface of the lens subunit (12) faces the lithium niobate thin-film chip (2).
4. The lithium niobate thin-film based on-chip integrated triaxial gyro assembly of claim 3, wherein: the lens subunit (12) comprises a collimating lens (121), a reflecting mirror (122) and a converging lens (123), the input surface of the collimating lens (121) is right opposite to the superradiation diode (11), the collimating lens (121), the reflecting mirror (122) and the converging lens (123) are integrally arranged, and the output surface of the converging lens (123) faces towards the lithium niobate thin-film chip (2).
5. The lithium niobate thin film based on-chip integrated triaxial gyro assembly of claim 1, wherein: the LED lamp is characterized by further comprising a heat sink (4), a TEC refrigerator (5) and a shell (3), wherein the light emitting unit (1) and the lithium niobate thin film chip (2) are arranged on the heat sink (4), the heat sink (4) is arranged on the TEC refrigerator (5), and the TEC refrigerator (5) is arranged in the shell (3) and is in contact with the shell (3).
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| CN202210927142.7A CN115096284A (en) | 2022-08-03 | 2022-08-03 | On-chip integrated triaxial gyro assembly based on lithium niobate film |
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| CN202210927142.7A CN115096284A (en) | 2022-08-03 | 2022-08-03 | On-chip integrated triaxial gyro assembly based on lithium niobate film |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116007605A (en) * | 2023-03-30 | 2023-04-25 | 中国船舶集团有限公司第七〇七研究所 | Interference type integrated optical gyroscope and optical fiber coupling method thereof |
| CN116482883A (en) * | 2023-04-27 | 2023-07-25 | 电子科技大学 | Electro-optical tunable filter based on lithium niobate thin film sidewall grating |
-
2022
- 2022-08-03 CN CN202210927142.7A patent/CN115096284A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116007605A (en) * | 2023-03-30 | 2023-04-25 | 中国船舶集团有限公司第七〇七研究所 | Interference type integrated optical gyroscope and optical fiber coupling method thereof |
| CN116482883A (en) * | 2023-04-27 | 2023-07-25 | 电子科技大学 | Electro-optical tunable filter based on lithium niobate thin film sidewall grating |
| CN116482883B (en) * | 2023-04-27 | 2023-12-05 | 电子科技大学 | Electro-optical tunable filter based on lithium niobate thin film sidewall grating |
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