CN115095520A - Roots vacuum pump rotor capable of inhibiting radial leakage, vacuum pump and working method of vacuum pump - Google Patents

Roots vacuum pump rotor capable of inhibiting radial leakage, vacuum pump and working method of vacuum pump Download PDF

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Publication number
CN115095520A
CN115095520A CN202210856075.4A CN202210856075A CN115095520A CN 115095520 A CN115095520 A CN 115095520A CN 202210856075 A CN202210856075 A CN 202210856075A CN 115095520 A CN115095520 A CN 115095520A
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China
Prior art keywords
rotor
vacuum pump
pump
roots vacuum
blade top
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CN202210856075.4A
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CN115095520B (en
Inventor
雷晓宏
魏民
雷晓波
王伟超
史磊
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Beijing Tongjia Hongrui Technology Co ltd
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Beijing Tongjia Hongrui Technology Co ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/084Toothed wheels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00Geometry
    • F04C2250/20Geometry of the rotor

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention relates to a Roots vacuum pump rotor for inhibiting radial leakage, a vacuum pump and a working method of the Roots vacuum pump rotor. The roots vacuum pump rotor includes: the section of the left rotor and the section of the right rotor, which is vertical to the rotation axis, are in a 8-shaped blade profile, the two opposite vertex positions of the 8-shaped blade are provided with blade top steps, when one rotor is vertically arranged, the other rotor is horizontally arranged, and when the rotors rotate, the blade top steps of each rotor, which are far away from the other rotor, form a seal with the inner side wall of the Roots vacuum pump. The invention is beneficial to the early closing and delayed opening of the suction cavity, prolongs the compression process in the pump cavity, can obviously improve the gas flow condition in the rotor channel, effectively inhibits the clearance leakage flow between the rotor and between the rotor and the pump shell caused by the pressure difference in the pump, promotes the flow speed in the rotor, increases the pressure difference in the conveying process in the pump and improves the integral pumping speed.

Description

Roots vacuum pump rotor capable of inhibiting radial leakage, vacuum pump and working method of vacuum pump
Technical Field
The invention relates to the technical field of vacuum pumps, in particular to a Roots vacuum pump rotor for inhibiting radial leakage, a vacuum pump and a working method of the Roots vacuum pump rotor.
Background
The roots vacuum pump has the characteristics of simple structure, flexible and changeable installation mode, no need of internal lubrication, high volumetric efficiency and the like, and is widely applied to various fields of national economy such as petrochemical industry, semiconductors, energy, light industrial food and the like.
Prior art CN110741165A discloses a roots vacuum pump, includes: two cooperating rotors configured to rotate in opposite directions about parallel axes of rotation; a stator including a stator bore, the rotor being mounted for rotation in the stator bore. The stator bore includes a central portion between the two axes of rotation and an outer portion outside the two axes, the rotors being configured with dimensions to cooperate with the stator bore such that an outer edge of each rotor distal from the other rotor seals with the stator bore when rotating in at least a portion of the outer portion. In a roots vacuum pump, gaps exist between a rotor and the rotor, between the rotor and a pump shell, and between the rotor and front and rear cover plates, when the roots rotor rotates for many times in the operation process of the pump, the pressure of an outlet area begins to accumulate to form a high-pressure area, leakage gas flows back to a low-pressure area through the gaps, the leaked gas is in a high-temperature state, the inflowing gas is heated, the volume of inlet gas is increased, the volume efficiency is reduced, and therefore the mass flow of the pump is reduced. The leakage flow is an important factor influencing the operation efficiency of the vacuum pump, so how to improve the sealing performance of the vacuum pump is of great significance to the development of the roots vacuum pump. Based on the problems of small area utilization coefficient and small flow rate of the existing common arc-shaped Roots rotor, students at home and abroad also provide various rotor profile design methods for reducing the clearance leakage of the rotor in the rotating process, such as a more typical arc-involute-arc type rotor profile. But is currently limited by the machining accuracy and the contact between the rotor and the pump casing caused by thermal deformation during the operation of the rotor. The pumping speed of the roots vacuum pump cannot be further increased.
How to overcome the defects of the prior art schemes, how to provide a roots vacuum pump for inhibiting radial leakage, which is a problem to be solved urgently in the technical field, is to perform a modification design on the basis of the original arc-involute-arc rotor profile, further improve the pumping speed of the vacuum pump, and simultaneously reduce the requirement on the machining precision.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a Roots vacuum pump rotor for inhibiting radial leakage, a vacuum pump and a working method thereof, and the following technical scheme is adopted:
a roots vacuum pump rotor that suppresses radial leakage, the roots vacuum pump rotor comprising: a left rotor, a right rotor;
the left rotor and the right rotor respectively rotate around respective rotating shafts in opposite directions; the axes of the rotating shafts of the left rotor and the right rotor are arranged in parallel;
the cross section of the left rotor and the right rotor perpendicular to the rotation axis is in an 8-shaped blade profile, two opposite vertex positions of the 8-shaped blade are provided with blade top steps, when one rotor is vertically arranged, the other rotor is horizontally arranged, and when the rotors rotate, the blade top step of each rotor far away from the other rotor forms a seal with the inner side wall of the Roots vacuum pump.
Furthermore, the left rotor and the right rotor are made of high-nickel alloy materials.
Further, the center of gravity points of the left rotor and the right rotor are determined on the sections of the left rotor and the right rotor, and the intersection point of the center line of the section passing through the center of gravity points and the arc molded lines of the two opposite vertexes of the 8-shaped blade shape of the left rotor and the right rotor is used as the center point of the blade top step;
rotating the center line by 3 degrees towards two sides of the center point of the blade top step by taking the gravity center point as an axis, wherein intersection points of the rotated center line and the 8-shaped blade-shaped arc molded lines of the left rotor and the right rotor are respectively used as end points of the blade top steps of the left rotor and the right rotor;
the top end molded lines of the blade top steps of the left rotor and the right rotor are parallel to the 8-shaped blade top arc molded lines of the left rotor and the right rotor at the positions of the top end molded lines.
Further, the height of the blade top step is 0.6 mm.
Furthermore, the blade top step is not in contact with the inner side wall, and the distance between the blade top step and the inner side wall is 0.1-0.3 mm.
A roots vacuum pump employing the roots vacuum pump rotor with suppressed radial leakage as described above, the roots vacuum pump further comprising a pump housing;
an air inlet is formed in the upper side wall of the pump shell, and an air outlet is formed in the lower side wall of the pump shell;
when the left rotor and the right rotor rotate, the blade top step of each rotor far away from the other rotor forms a seal with the inner side wall of the pump shell.
Further, the pump shell is made of high-nickel alloy material.
Further, the opening area of the air inlet is larger than or equal to that of the air outlet;
the air inlet is close to the front side of the pump shell;
the exhaust port is adjacent to a rear side of the pump housing.
Furthermore, the roots vacuum pump is a single-stage pump or a multi-stage pump.
A method of operating a roots vacuum pump with radial leakage suppression as described above, the method performing the following steps cyclically:
s1, the left rotor and the right rotor are driven by respective rotating shafts to rotate in opposite directions, so that the volume of a working cavity adjacent to the air inlet is increased, and the blade top step prevents air from flowing from a high-pressure side to a low-pressure side along a gap between any two of a pump shell, the left rotor and the right rotor;
s2, gas flows in from the gas inlet;
s3, the left rotor and the right rotor continue to rotate under the drive of respective rotating shafts, so that the volume of a working cavity adjacent to the exhaust port is reduced, and the blade top step prevents gas from flowing from a high-pressure side to a low-pressure side along a gap between any two of the pump shell, the left rotor and the right rotor; (ii) a
And S4, discharging gas from the exhaust port.
The technical scheme of the invention obtains the following beneficial effects: through processing on the molded lines at roots's rotor, use reasonable step shape design not only to be favorable to inhaling the early closing and delay opening of chamber, the compression process in the extension pump chamber, can obviously improve the gas flow condition in the rotor passageway moreover, effectively restrain in the pump by the clearance leakage flow of rotor and rotor, rotor and pump case that pressure differential leads to, promote the velocity of flow in the rotor, increase the pressure differential among the delivery process in the pump, improve whole pumping speed.
Drawings
FIG. 1 is a schematic view of a Roots vacuum pump of the present invention with radial leakage suppressed.
Fig. 2 is a plan view of the roots vacuum pump with radial leakage suppressed according to the present invention.
Fig. 3 is a sectional view taken along the plane B-B in fig. 2.
Fig. 4 is a sectional view taken along the plane a-a in fig. 2.
FIG. 5 is a schematic view of the structure of the tip step of the present invention.
FIG. 6 is an enlarged partial view of the tip step of the present invention.
Fig. 7 is a cloud of pressure distributions for the gas flow channels of fig. 4.
Fig. 8 is a velocity vector profile for the airflow path of fig. 4.
FIG. 9 is a velocity vector profile at the clearance of the rotor and casing of FIG. 5.
FIG. 10 is a velocity vector distribution plot at the rotor-to-rotor gap of FIG. 5.
FIG. 11 is a graph comparing instantaneous pumping rates with and without a top step.
Detailed Description
The invention is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby. It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present application. As used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise. The terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like refer to orientations or positional relationships illustrated in the drawings, merely for convenience of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be constructed in a particular manner of operation, and are not to be construed as limiting the present invention.
As shown in fig. 1 to 3, the roots vacuum pump for suppressing radial leakage according to the present invention includes a pump housing 1, a left rotor 2, and a right rotor 3, wherein the left rotor 2 and the right rotor 3 respectively rotate around their respective rotation axes in opposite directions; the axes of the rotating shafts of the left rotor 2 and the right rotor 3 are arranged in parallel.
The cross sections of the left rotor 2 and the right rotor 3, which are perpendicular to the rotation axis, are in a 8-shaped blade profile, blade top steps 6 are arranged at two opposite vertex positions of the 8-shaped blade, when one rotor is vertically arranged, the other rotor is horizontally arranged, and when the rotors rotate, the blade top step 6 of each rotor, which is far away from the other rotor, forms a seal with the inner side wall of the Roots vacuum pump.
As shown in fig. 3, an air inlet is formed in the upper side wall of the pump casing 1, and an air outlet is formed in the lower side wall. The opening area of the air inlet is larger than or equal to that of the air outlet, the air inlet is close to the front side of the pump shell 1, and the air outlet is close to the rear side of the pump shell 1.
The pump shell 1, the left rotor 2 and the right rotor 3 are made of high nickel alloy materials.
The blade top step of the invention is shown in figures 5 and 6. Two blade top steps are respectively arranged at the top of each rotor profile. The step design comprises the step position determination, the position of the molded line of the Roots pump rotor shown in the attached drawing 1 is taken as a reference, the left rotor 2 is placed along the vertical direction, and the right rotor 3 is placed along the horizontal direction.
And determining the gravity center points of the left rotor 2 and the right rotor 3 on the sections of the left rotor 2 and the right rotor 3, and taking the intersection point of the center line of the section passing through the gravity center point and the arc molded lines of two opposite vertexes of the 8-shaped blade shape of the left rotor 2 and the right rotor 3 as the central point 9 of the blade top step.
And rotating the central line by 3 degrees towards two sides of the central point of the blade top step by taking the gravity center point as an axis, wherein intersection points of the rotated central line and the 8-shaped blade-shaped arc molded lines of the left rotor 2 and the right rotor 3 are respectively used as end points of the blade top steps of the left rotor 2 and the right rotor 3.
The top end molded lines of the blade top steps of the left rotor 2 and the right rotor 3 are parallel to the 8-shaped blade top arc molded lines of the left rotor 2 and the right rotor 3 at the positions of the top end molded lines.
The height of the blade top step is 0.6mm, the blade top step is not in contact with the inner side wall, the distance between the blade top step and the inner side wall is 0.1-0.3mm, and the rotor is prevented from being scratched and rubbed with a pump shell after the blade top step is added. The axial length of the step is the same as the axial length of the rotor, namely, the blade top step covers along the full axial direction of the rotor blade top.
When the left rotor 2 and the right rotor 3 rotate, the blade top step of each rotor far away from the other rotor forms a seal with the inner side wall of the pump shell 1.
The gas transportation is realized by rotating the left rotor and the right rotor in opposite directions. Fig. 4 is a cross-sectional view taken along line a-a of fig. 2. As shown in fig. 4, the air flow channel 4 in the pump is a hollow area in fig. 4. When the left rotor and the right rotor are not provided with blade top steps, after the pump is started to operate, gas flows in from the gas inlet, is conveyed by the rotors and is discharged from the gas outlet. In the process of high-speed movement of the rotor, the gaps 5 between the rotor and between the rotor and the pump shell cause fluid to flow from the high-pressure side to the low-pressure side along the gaps under the action of pressure difference (as shown in the left drawing of fig. 7), as shown in the left drawing of fig. 8 and the left drawing of fig. 9, gas in the pump is caused to flow back, the gas flow is blocked, and the pumping speed of the pump is reduced.
After the blade top steps are additionally arranged, the invention is not only beneficial to early closing and delayed opening of the suction cavity and prolonging the compression process in the pump cavity, but also effectively inhibits leakage flow between the rotor and the rotor (as shown in figure 10) and between the rotor and the pump shell (as shown in figure 9), improves the flow state in the pump, improves the flow speed in the rotor (as shown in figure 8), reduces the air inlet volume, increases the volume efficiency (as shown in figure 7), obviously increases the mass flow (as shown in figure 11), and improves the average pumping speed by 60.49 percent, thereby meeting the requirements of higher pumping speed and ultimate vacuum degree.
The working method of the roots vacuum pump for inhibiting the radial leakage circularly executes the following steps:
s1, a left rotor 2 and a right rotor 3 are driven by respective rotating shafts to rotate in opposite directions, so that the volume of a working cavity adjacent to the air inlet is increased, and the blade top step prevents air from flowing from a high-pressure side to a low-pressure side along a gap between any two of a pump shell 1, the left rotor 2 and the right rotor 3;
s2, gas flows in from the gas inlet;
s3, the left rotor 2 and the right rotor 3 are driven by respective rotating shafts to continuously rotate, so that the volume of a working cavity adjacent to the exhaust port is reduced, and the blade top step prevents gas from flowing from a high-pressure side to a low-pressure side along a gap between any two of the pump shell 1, the left rotor 2 and the right rotor 3;
and S4, discharging gas from the exhaust port.
The unsteady numerical simulation research of the Roots vacuum pump rotor for inhibiting the radial leakage is carried out on a single-stage two-blade Roots vacuum model pump, and the implementation process is as follows: (1) generating a grid of gas channels and a rotor region; (2) and carrying out full three-dimensional numerical calculation on the generated numerical calculation grid, and configuring inlet and outlet pressure, rated rotating speed, fluid medium type and the like. The time step of transient calculation is 2 × 10 -5 s, the dynamic grid preview shows that the time step is updated in the computational domain to ensure that the dynamic grid is updatedNo negative grid appears during rotation. In addition, because the inner wall and the rotor surface of the roots pump are both formed by curved surfaces, fluid can generate rotary flow in the pump, and an appropriate turbulence model is selected in order to well process the flow with high strain rate and large streamline bending degree. The PISO algorithm is adopted in a pressure and speed coupling mode, is often used for solving the unsteady state compressible flow problem, can remarkably reduce the number of iteration steps required for achieving convergence, and has good adaptability to a highly inclined grid. (3) The research result shows that: after the blade top step is additionally arranged, the suction cavity can be closed and opened in a delayed mode in an early stage, the compression process in the pump cavity is prolonged, leakage flow between the rotor and between the rotor and the pump shell is effectively inhibited, the flow state in the pump is improved, the flow speed in the rotor is improved, the air inlet volume is reduced, the volume efficiency is increased, the instantaneous mass flow is obviously increased, the average pumping speed is improved by 60.49 percent, namely the radial leakage of the Roots vacuum pump can be effectively inhibited by additionally arranging the blade top step, and the pumping speed of the pump is improved.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, it is possible to make various improvements and modifications without departing from the technical principle of the present invention, and those improvements and modifications should be considered as the protection scope of the present invention.

Claims (10)

1. A roots vacuum pump rotor for suppressing radial leakage, comprising: a left rotor (2) and a right rotor (3);
the left rotor (2) and the right rotor (3) respectively rotate around respective rotating shafts along opposite directions; the axes of the rotating shafts of the left rotor (2) and the right rotor (3) are arranged in parallel;
the sections of the left rotor (2) and the right rotor (3) perpendicular to the rotation axis are in a 8-shaped blade profile, blade top steps (6) are arranged at two opposite vertex positions of the 8-shaped blade, when one rotor is vertically arranged, the other rotor is horizontally arranged, and when the rotors rotate, the blade top steps (6) of each rotor far away from the other rotor form a seal with the inner side wall of the Roots vacuum pump.
2. A roots vacuum pump rotor for inhibiting radial leakage according to claim 1, characterized in that the left rotor (2) and the right rotor (3) are made of high nickel alloy material.
3. A roots vacuum pump for suppressing radial leakage according to claim 1, wherein the center of gravity point of the left rotor (2) and the right rotor (3) is determined on the section plane of the left rotor (2) and the right rotor (3), and the intersection point of the center line of the section plane passing through the center of gravity point and the circular arc molded line of the two opposite vertexes of the 8-shaped vane of the left rotor (2) and the right rotor (3) is taken as the center point of the vane top step (6);
rotating the center line by 3 degrees towards two sides of the central point of the blade top step (6) by taking the gravity center point as an axis, wherein intersection points of the rotated center line and 8-shaped blade-shaped arc molded lines of the left rotor (2) and the right rotor (3) are respectively used as end points of the blade top step (6) of the left rotor (2) and the right rotor (3);
the top end molded lines of the blade top steps (6) of the left rotor (2) and the right rotor (3) are parallel to the 8-shaped blade top arc molded lines of the left rotor (2) and the right rotor (3) at the positions of the top end molded lines.
4. A roots vacuum pump for suppressing radial leakage according to claim 3, characterized in that the height of the tip step (6) is 0.6 mm.
5. A roots vacuum pump with inhibited radial leakage according to claim 3, characterized in that the tip step (6) is free from contact with the inner sidewall, the distance between the tip step (6) and the inner sidewall being 0.1-0.3 mm.
6. A roots vacuum pump employing a roots vacuum pump rotor for suppressing radial leakage according to any one of claims 1-5, characterized in that the roots vacuum pump further comprises a pump housing (1);
an air inlet is formed in the upper side wall of the pump shell (1), and an air outlet is formed in the lower side wall of the pump shell;
when the left rotor (2) and the right rotor (3) rotate, the blade top step (6) of each rotor, which is far away from the other rotor, forms a seal with the inner side wall of the pump shell (1).
7. A Roots vacuum pump with suppressed radial leakage according to claim 6, characterised in that the pump housing (1) is of a high nickel alloy material.
8. A roots vacuum pump with suppressed radial leakage as claimed in claim 6, wherein the opening area of the inlet port is greater than or equal to the opening area of the outlet port;
the air inlet is close to the front side of the pump shell (1);
the exhaust port is close to the rear side of the pump housing (1).
9. A roots vacuum pump with inhibited radial leakage according to claim 8, characterized in that the roots vacuum pump is a single stage pump or a multi-stage pump.
10. A method of operating a roots vacuum pump with radial leakage suppression as claimed in any one of claims 6 to 9, wherein the method performs the following steps cyclically:
s1, the left rotor (2) and the right rotor (3) are driven by respective rotating shafts to rotate in opposite directions, so that the volume of a working cavity adjacent to the air inlet is increased, and the blade top step (6) prevents air from flowing from a high-pressure side to a low-pressure side along a gap between any two of the pump shell (1), the left rotor (2) and the right rotor (3);
s2, gas flows in from the gas inlet;
s3, the left rotor (2) and the right rotor (3) are driven by respective rotating shafts to continuously rotate, so that the volume of a working cavity adjacent to the exhaust port is reduced, and the blade top step (6) prevents gas from flowing from a high-pressure side to a low-pressure side along a gap between any two of the pump shell (1), the left rotor (2) and the right rotor (3); (ii) a
And S4, discharging gas from the exhaust port.
CN202210856075.4A 2022-07-20 2022-07-20 Roots vacuum pump rotor capable of inhibiting radial leakage, vacuum pump and working method of vacuum pump Active CN115095520B (en)

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Publication number Priority date Publication date Assignee Title
CN115773243A (en) * 2022-12-08 2023-03-10 西安交通大学 Roots hydrogen pump applied to fuel cell automobile system
CN116292281A (en) * 2023-03-31 2023-06-23 北京通嘉宏瑞科技有限公司 Roots vacuum pump rotor with wavy bionic structure and Roots vacuum pump

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US5335640A (en) * 1992-06-19 1994-08-09 Feuling Engineering, Inc. Rotor to casing seals for roots type superchargers
JP2002130165A (en) * 2000-10-19 2002-05-09 Tochigi Fuji Ind Co Ltd Fluid machine
JP2002130164A (en) * 2000-10-19 2002-05-09 Tochigi Fuji Ind Co Ltd Fluid machine
JP2003161277A (en) * 2001-11-28 2003-06-06 Aisin Seiki Co Ltd Multi-stage dry vacuum pump
CN201218201Y (en) * 2008-07-07 2009-04-08 青岛德固特机械制造有限公司 Black pigment charging pump
CN203756530U (en) * 2014-04-01 2014-08-06 重庆市帅腾机械有限公司 Rotor-case inner wall seal structure of roots blower
CN110821828A (en) * 2019-11-29 2020-02-21 宿迁学院 Hyperbolic rotor for Roots pump
CN211422908U (en) * 2019-11-29 2020-09-04 宿迁学院 Outer straight rotor for high-energy Roots pump
CN217712955U (en) * 2022-07-20 2022-11-01 北京通嘉宏瑞科技有限公司 Roots vacuum pump rotor and vacuum pump for inhibiting radial leakage

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5335640A (en) * 1992-06-19 1994-08-09 Feuling Engineering, Inc. Rotor to casing seals for roots type superchargers
JP2002130165A (en) * 2000-10-19 2002-05-09 Tochigi Fuji Ind Co Ltd Fluid machine
JP2002130164A (en) * 2000-10-19 2002-05-09 Tochigi Fuji Ind Co Ltd Fluid machine
JP2003161277A (en) * 2001-11-28 2003-06-06 Aisin Seiki Co Ltd Multi-stage dry vacuum pump
CN201218201Y (en) * 2008-07-07 2009-04-08 青岛德固特机械制造有限公司 Black pigment charging pump
CN203756530U (en) * 2014-04-01 2014-08-06 重庆市帅腾机械有限公司 Rotor-case inner wall seal structure of roots blower
CN110821828A (en) * 2019-11-29 2020-02-21 宿迁学院 Hyperbolic rotor for Roots pump
CN211422908U (en) * 2019-11-29 2020-09-04 宿迁学院 Outer straight rotor for high-energy Roots pump
CN217712955U (en) * 2022-07-20 2022-11-01 北京通嘉宏瑞科技有限公司 Roots vacuum pump rotor and vacuum pump for inhibiting radial leakage

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115773243A (en) * 2022-12-08 2023-03-10 西安交通大学 Roots hydrogen pump applied to fuel cell automobile system
CN115773243B (en) * 2022-12-08 2023-10-24 西安交通大学 Roots hydrogen pump applied to fuel cell automobile system
CN116292281A (en) * 2023-03-31 2023-06-23 北京通嘉宏瑞科技有限公司 Roots vacuum pump rotor with wavy bionic structure and Roots vacuum pump
CN116292281B (en) * 2023-03-31 2023-10-03 北京通嘉宏瑞科技有限公司 Roots vacuum pump rotor with wavy bionic structure and Roots vacuum pump

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