CN115079519A - Composite glass substrate and manufacturing method - Google Patents

Composite glass substrate and manufacturing method Download PDF

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Publication number
CN115079519A
CN115079519A CN202210760671.2A CN202210760671A CN115079519A CN 115079519 A CN115079519 A CN 115079519A CN 202210760671 A CN202210760671 A CN 202210760671A CN 115079519 A CN115079519 A CN 115079519A
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CN
China
Prior art keywords
glass substrate
pattern
glue
bonding glue
composite
Prior art date
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Pending
Application number
CN202210760671.2A
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Chinese (zh)
Inventor
雷玫
罗妮
侯洋昆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huatian Huichuang Technology Xi'an Co ltd
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Huatian Huichuang Technology Xi'an Co ltd
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Publication date
Application filed by Huatian Huichuang Technology Xi'an Co ltd filed Critical Huatian Huichuang Technology Xi'an Co ltd
Priority to CN202210760671.2A priority Critical patent/CN115079519A/en
Publication of CN115079519A publication Critical patent/CN115079519A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2032—Simultaneous exposure of the front side and the backside
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Abstract

The invention discloses a composite glass substrate and a manufacturing method, comprising an intermediate glass substrate; a first glass substrate and a second glass substrate are respectively arranged on two sides of the middle glass substrate; a first pattern is arranged on the first glass substrate; a second pattern is arranged on the second glass substrate; a first bonding glue is arranged between the first glass substrate and the middle glass substrate for connection; and a second bonding glue is arranged between the second glass substrate and the middle glass substrate for connection. The double-sided patterns with the thickness exceeding the substrate range of the single-sided projection exposure machine are divided into three parts, the substrate thicknesses of the first glass substrate and the second glass substrate where the upper patterns and the lower patterns are located meet the substrate thickness range of the exposure machine, the single-sided patterns can be prepared by the single-sided projection exposure machine in a double-sided high-resolution mode, and the resolution of the single-sided patterns is improved. The alignment of double-sided patterns and the preparation of an integral structure are completed by the bonding of the middle glue, so that the cost of the double-sided photoetching process is reduced.

Description

Composite glass substrate and manufacturing method
Technical Field
The invention belongs to the field of optical glass, and particularly belongs to a composite glass substrate and a manufacturing method thereof.
Background
In the prior art, the surface of the optical glass is processed with a double-sided structure pattern, and photoetching and etching technologies are required to be applied. When the first surface pattern is processed, the processing steps comprise: cleaning, gluing, prebaking, exposing, developing, postbaking, etching and removing glue. When the second surface pattern is processed, the processing steps are basically consistent, and a contraposition process is added before exposure, so that the alignment mark on the second surface pattern mask is aligned with the mark formed on the glass substrate by the first surface pattern mask. Aiming at the condition that the thickness of the glass substrate is more than 2mm, the thickness of the substrate exceeds the thickness range of the substrate of the projection exposure machine, the single-side exposure process cannot be completed by the projection exposure machine, and only a proximity type or contact type exposure machine can be used. The proximity or contact type exposure machine has a lower resolution than the projection type exposure machine and cannot satisfy the high resolution pattern design requirement. When the second surface pattern is exposed, the alignment lens light of the single-surface exposure machine needs to penetrate through the glass substrate to identify the alignment mark, and is influenced by light refraction, the position of the alignment mark is distorted, and the alignment precision is influenced. The double-side alignment process requires the use of a special double-side exposure machine. And when processing the second face pattern, still need to protect first face pattern not damaged when the second face is processed, the technical difficulty is big.
Disclosure of Invention
In order to solve the problems in the prior art, the present invention provides a composite glass substrate and a manufacturing method thereof, which are used for solving the problems.
In order to achieve the purpose, the invention provides the following technical scheme:
a composite glass substrate comprising an intermediate glass substrate;
a first glass substrate and a second glass substrate are respectively arranged on two sides of the middle glass substrate;
a first pattern is arranged on the first glass substrate; a second pattern is arranged on the second glass substrate;
a first bonding glue is arranged between the first glass substrate and the middle glass substrate for connection; and a second bonding glue is arranged between the second glass substrate and the middle glass substrate for connection.
Preferably, the light transmittance of the first bonding glue and the second bonding glue at the working wavelength is greater than that of the middle glass substrate, the first glass substrate and the second glass substrate at the working wavelength.
Preferably, the first pattern and the second pattern are formed by photoresist or by removing photoresist by etching.
Preferably, the thickness ranges of the intermediate glass substrate, the first glass substrate and the second glass substrate are 100-2000 um.
Preferably, the thickness range of the first bonding glue and the second bonding glue is 10-1000 um.
Preferably, the refractive indexes of the first bonding glue, the second bonding glue, the middle glass substrate, the first glass substrate and the second glass substrate are the same.
A method for manufacturing a composite glass substrate includes the steps of,
step 1, exposing left and right alignment mark positions on a first pattern corresponding to a mask on one surface of a first glass substrate, exposing left and right alignment mark positions on a second pattern corresponding to the mask on one surface of a second glass substrate, and leaving left and right alignment marks with the same positions on the first pattern and the second pattern;
step 2, connecting the other surface of the first glass substrate and one surface of the middle glass substrate by adopting first bonding glue;
and 3, connecting the other surface of the middle glass substrate with the other surface of the second glass substrate by adopting second bonding glue.
Preferably, in step 1, the first pattern and the second pattern are exposed through the reticle by a projection exposure machine or a contact exposure machine.
Preferably, in the step 2, the middle glass substrate is vacuum-adsorbed on a vacuum fixer, the first glass substrate is vacuum-adsorbed on a vacuum fixing sucker, and the surface of the first pattern on the first glass substrate faces downwards;
and (3) pre-setting ultraviolet curing glue on the plane of the first glass substrate, stamping the glue by a stamping device, and curing the glue by ultraviolet light to finish the first bonding glue.
Preferably, in the step 3, the second glass substrate is vacuum-adsorbed on the vacuum fixer, the surface of the second pattern on the second glass substrate faces upwards, the second bonding glue structure is arranged on the vacuum fixing sucker, and the surface of the first pattern faces downwards; ultraviolet curing glue is preset on the plane of the middle glass substrate;
adjusting the position of the vacuum fixing sucker to enable the left and right alignment marks of the first pattern to be aligned with the left and right alignment marks of the second pattern respectively;
and (4) stamping the glue by stamping equipment, and curing the glue by ultraviolet light to finish the first bonding glue.
Compared with the prior art, the invention has the following beneficial technical effects:
the invention provides a composite glass substrate, wherein double-sided patterns with the thickness exceeding the range of a single-sided projection type exposure machine substrate are divided into three parts, the thicknesses of a first glass substrate and a second glass substrate where upper and lower patterns are located meet the range of the thickness of the exposure machine substrate, the single-sided patterns can respectively complete double-sided high-resolution pattern preparation by using the single-sided projection type exposure machine, and the resolution of the single-sided patterns is improved. The alignment of double-sided patterns and the preparation of an integral structure are completed by the bonding of the middle glue, so that the cost of the double-sided photoetching process is reduced.
The invention provides a manufacturing method of a composite glass substrate, which overcomes the difficulty that a single-sided projection type exposure machine cannot expose a substrate with a thickness exceeding a range. Firstly, a single-side projection type exposure machine is used for completing preparation of high-resolution patterns on two sides, then, the transparent characteristics of glue and glass are used for completing two-time bonding and one-time alignment, and the single-side exposure machine is used for completing the processes of double-side pattern exposure and alignment of bonding equipment. And the patterns on one side are prevented from being contacted and damaged when the second side is prepared. And in the bonding alignment process, when the alignment mark is identified, the light of the alignment lens passes through the thick glass substrate and is influenced by light refraction, the position of the alignment mark is distorted, and the alignment precision is improved.
Drawings
FIG. 1 is a schematic structural diagram of a double-sided patterned composite glass substrate;
FIG. 2 is a flow chart of a double-sided patterned composite glass substrate fabrication process;
FIG. 3 is a schematic view of bonding a first pattern to a first glass substrate;
FIG. 4 is a schematic view of bonding a second pattern to a second glass substrate;
in the drawings: a first pattern 1; a first glass substrate 2; first bonding glue 3; an intermediate glass substrate 4; a second pattern 5; a second glass substrate 6; second bonding glue 7; a vacuum holder 8; the suction cup 9 is vacuum fixed.
Detailed Description
The present invention will now be described in further detail with reference to specific examples, which are intended to be illustrative, but not limiting, of the invention.
As shown in fig. 1, the composite glass substrate structure with double-sided patterns of the present invention comprises a first glass substrate 2 and a first pattern 1 on the upper layer, a first bonding glue 3, an intermediate glass substrate 4, a second bonding glue 7, a second glass substrate 6 and a second pattern 5 on the upper layer. The first pattern 1 and the second pattern 5 may be patterns formed by photoresist, or patterns formed by etching and removing photoresist. The thickness ranges of the first glass substrate 2, the second glass substrate 6 and the middle glass substrate 4 are 100-2000um, and the thickness ranges of the first bonding glue 3 and the second bonding glue 7 are 10-1000 um. The refractive indices of first bonding glue 3 and second bonding glue 7 may or may not be identical to the refractive index of the glass. Optical path 1 for ensuring light transmission through glass: (glass thickness glass refractive index) and optical path through the composite structure 2: under the precondition of (h1+ h + h2) glass refractive index + (t1+ t2) bonding glue refractive index), the single-layer structures can be combined randomly within the thickness range. The thickness of the composite structure is 320-.
As shown in fig. 2, the method for manufacturing a composite glass substrate structure with double-sided patterns according to the present invention includes a step 1 of providing a first glass substrate 2, a second glass substrate 6, a first pattern 1 and a second pattern 5, wherein the positions of the first pattern 1 and the second pattern 5 corresponding to the left and right alignment marks on the mask are the same, and the exposure process is performed by a projection exposure machine or a contact exposure machine.
And 2, bonding the first bonding glue 3, the first glass substrate 2, the first pattern 1 and the middle glass substrate 4, wherein the imprinting equipment and the polymer glue are utilized in the bonding process, and the integral thickness uniformity of the upper surface of the first pattern 1 and the lower surface of the middle glass substrate 4 is +/-3 mu m.
And 3, bonding the second bonding glue 7, the second glass substrate 6 and the second pattern 5 with the combined structure in the step 2, adding a first pattern 1 alignment mark and a second pattern 5 alignment mark alignment process in the bonding process, wherein other bonding processes are consistent with those in the step 2. The overall thickness uniformity of the upper surface of the first pattern 1 and the lower surface of the second pattern 5 is +/-3 um.
According to the first bonding glue 3 and the second bonding glue 7, the ultraviolet curing glue is used as an adhesive, the stamping device is used as a bonding device, and the glue thickness control, alignment and glue curing processes are completed. Wherein the light transmittance of the glue at the operating wavelength is required to be greater than that of the glass. The transparent property of the glass substrate and the property of ultraviolet curing glue capable of replacing part of the optical path of the glass are fully utilized. The double-sided alignment precision in the imprinting equipment is 1 um.
As shown in fig. 3, the intermediate glass substrate 4 is vacuum-sucked on the vacuum holder 8, the first glass substrate 2 and the first pattern 1 are vacuum-sucked on the vacuum fixing chuck 9, and the first pattern 1 faces downward. Ultraviolet curing glue with preset quality is dotted on the first glass substrate plane 2. And the glue is stamped by the stamping equipment at the next step, the area of the glue is consistent with that of the first glass substrate 2, and the thickness of the glue meets the preset requirement. And finally, ultraviolet light is used for curing the glue to finish the first bonding glue 3.
As shown in fig. 4, the second glass substrate 6 and the second pattern 5 are vacuum-sucked on the vacuum holder 8, the second pattern 5 faces upward, the left and right alignment marks on the second pattern 5 can be clearly recognized after the lower left and right objective lenses are focused, and the left and right alignment marks are stored on the display screen. The second bonding glue 7 structure is placed on the vacuum fixing chuck 9 with the first pattern 1 facing downwards. And then the ultraviolet curing glue with preset quality is dotted on the plane of the second glass substrate 6. And next, adjusting the X, Y and angle of the vacuum fixed suction cups to enable the left and right alignment marks of the first pattern 1 to be clear in the display screen and to be respectively aligned with the left and right marks of the second pattern 5. And the glue is stamped by the stamping equipment at the next step, the area of the glue is consistent with that of the second glass substrate 6, and the thickness of the glue meets the preset requirement. And finally, ultraviolet light is used for curing the glue to finish the second bonding glue 7.

Claims (10)

1. A composite glass substrate, characterized by comprising an intermediate glass substrate (4);
a first glass substrate (2) and a second glass substrate (6) are respectively arranged on two sides of the middle glass substrate (4);
a first pattern (1) is arranged on the first glass substrate (2); a second pattern (5) is arranged on the second glass substrate (6);
a first bonding glue (3) is arranged between the first glass substrate (2) and the middle glass substrate (4) for connection; and a second bonding glue (7) is arranged between the second glass substrate (6) and the middle glass substrate (4) for connection.
2. A composite glass substrate according to claim 1, characterised in that the light transmission of the first bonding glue (3) and the second bonding glue (7) at the operating wavelength is greater than the light transmission of the intermediate glass substrate (4), the first glass substrate (2) and the second glass substrate (6) at the operating wavelength.
3. A composite glass substrate according to claim 1, characterised in that the first pattern (1) and the second pattern (5) are formed by photoresist formation or by etching away the photoresist.
4. The composite glass substrate according to claim 1, wherein the thickness of the intermediate glass substrate (4), the first glass substrate (2) and the second glass substrate (6) is in the range of 100-2000 μm.
5. A composite glass substrate according to claim 1, characterised in that the thickness of the first bonding glue (3) and the second bonding glue (7) is in the range 10-1000 um.
6. A composite glass substrate according to claim 1, characterised in that the refractive indices of the first bonding glue (3), the second bonding glue (7), the intermediate glass substrate (4), the first glass substrate (2) and the second glass substrate (6) are the same.
7. A method for manufacturing a composite glass substrate, comprising the steps of,
step 1, exposing positions of a first pattern (1) corresponding to left and right alignment marks on a mask on one surface of a first glass substrate (2), exposing positions of a second pattern (5) corresponding to left and right alignment marks on the mask on one surface of a second glass substrate (6), and leaving left and right alignment marks with the same positions on the first pattern (1) and the second pattern (2);
step 2, connecting the other surface of the first glass substrate (2) with one surface of the middle glass substrate (4) by adopting first bonding glue (3);
and 3, connecting the other surface of the middle glass substrate (4) with the other surface of the second glass substrate (6) by adopting second bonding glue (7).
8. A method for manufacturing a composite glass substrate according to claim 7, wherein in step 1, the first pattern (1) and the second pattern (2) are exposed through a reticle by a projection exposure machine or a contact exposure machine.
9. A manufacturing method of a composite glass substrate according to claim 7, characterized in that in step 2, the intermediate glass substrate (4) is vacuum-sucked on the vacuum holder (8), the first glass substrate (2) is vacuum-sucked on the vacuum fixing suction cup (9), the first pattern (1) on the first glass substrate (2) is located face down;
and (3) pre-setting ultraviolet curing glue on the plane of the first glass substrate (2), stamping the glue by a stamping device, and curing the glue by ultraviolet light to finish the first bonding glue (3).
10. A method for manufacturing a composite glass substrate according to claim 7, characterized in that in step 3, a second glass substrate (6) is vacuum-sucked on the vacuum holder (8), the second glass substrate (6) is provided with the second pattern (5) facing upwards, the second bonding glue (7) structure is provided on the vacuum holding suction cup (9), and the first pattern (1) is provided facing downwards; ultraviolet curing glue is preset on the plane of the middle glass substrate (4);
adjusting the position of a vacuum fixed sucker (9) to enable the left and right alignment marks of the first pattern (1) to be respectively aligned with the left and right alignment marks of the second pattern (5);
and (4) stamping the glue by stamping equipment, and curing the glue by ultraviolet light to finish the first bonding glue (3).
CN202210760671.2A 2022-06-30 2022-06-30 Composite glass substrate and manufacturing method Pending CN115079519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210760671.2A CN115079519A (en) 2022-06-30 2022-06-30 Composite glass substrate and manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210760671.2A CN115079519A (en) 2022-06-30 2022-06-30 Composite glass substrate and manufacturing method

Publications (1)

Publication Number Publication Date
CN115079519A true CN115079519A (en) 2022-09-20

Family

ID=83256097

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210760671.2A Pending CN115079519A (en) 2022-06-30 2022-06-30 Composite glass substrate and manufacturing method

Country Status (1)

Country Link
CN (1) CN115079519A (en)

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