CN115077421A - Measurement method for multi-template combination - Google Patents

Measurement method for multi-template combination Download PDF

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Publication number
CN115077421A
CN115077421A CN202210893730.3A CN202210893730A CN115077421A CN 115077421 A CN115077421 A CN 115077421A CN 202210893730 A CN202210893730 A CN 202210893730A CN 115077421 A CN115077421 A CN 115077421A
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China
Prior art keywords
measurement
template
templates
measured
measuring
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CN202210893730.3A
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Chinese (zh)
Inventor
张和君
卢坤宙
刘毛毛
熊俊
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Chotest Technology Inc
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Chotest Technology Inc
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Priority to CN202210893730.3A priority Critical patent/CN115077421A/en
Publication of CN115077421A publication Critical patent/CN115077421A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques

Abstract

The present disclosure describes a multi-template-bound measurement method, comprising: creating a plurality of first templates for measuring at least one measuring surface of an object to be measured, wherein the first templates comprise measuring conditions when the object to be measured is measured, at least one geometric feature matched with the object to be measured and a first operation size for representing the relation of the at least one geometric feature in the first templates; creating a second template for measuring at least one measurement face of the test object, the second template including second operational dimensions for characterizing a relationship of geometric features across the plurality of first templates; obtaining a binding template based on the plurality of first templates and the second template; and measuring the analyte based on the binding template to obtain a comparison of the binding template and the analyte. According to the present disclosure, a multi-template combination measuring method capable of improving the measurement efficiency when measuring an object to be measured can be provided.

Description

Measurement method for multi-template combination
Technical Field
The invention relates to an intelligent manufacturing equipment industry, in particular to a multi-template combined measuring method.
Background
In an automated production process, in order to detect the machining accuracy of a workpiece, a measuring instrument is generally used to measure the workpiece to obtain measurement information of the workpiece, and the measurement information of the workpiece is obtained to determine whether the machining accuracy of the workpiece is qualified.
In general, a workpiece is measured based on a measurement template to acquire measurement information of the workpiece in a surveying instrument. However, due to the limitations of the measurement principle and the internal structure of the conventional measurement instrument, the measurement template (referred to as the existing template) in the prior art can only perform measurement on a single measurement area of a certain measurement surface of a workpiece, and if it is necessary to measure multiple measurement areas of a certain measurement surface (for example, the measurement surface is measured by using different measurement lenses), or if it is necessary to measure multiple measurement surfaces of a workpiece, multiple existing templates need to be manufactured to meet the measurement requirements.
Since the existing templates are independent of each other, when the workpiece needs to be measured by using the existing templates to completely obtain the measurement information of the workpiece, the existing templates need to be manually switched to achieve the measurement purpose, and the efficiency is low. Meanwhile, the measurement results of the existing templates cannot be summarized and output, and data integration is additionally performed on the measurement results of each existing template to obtain complete measurement information. Therefore, it is desirable to provide a metrology template or a metrology method that can improve the efficiency of metrology of a workpiece.
Disclosure of Invention
The present invention has been made in view of the above-described conventional circumstances, and an object thereof is to provide a multi-template binding measurement method capable of improving measurement efficiency when measuring an analyte.
The invention provides a multi-template combined measuring method, which is a measuring method for measuring an object to be measured based on a plurality of templates with geometrical characteristics matched with the object to be measured, and comprises the following steps: creating a plurality of first templates for measuring at least one measuring surface of the object to be measured, wherein the first templates comprise measuring conditions when the object to be measured is measured, at least one geometric feature matched with the object to be measured, and a first operation size for representing the relation of the at least one geometric feature in the first templates; creating a second template for measuring at least one measurement face of the test object, the second template including second operational dimensions for characterizing a relationship of geometric features across a plurality of the first templates; obtaining a binding template based on the plurality of first templates and the second template; and measuring the analyte based on the binding template to obtain a comparison of the binding template and the analyte.
According to the multi-template combined measuring method, the plurality of measuring templates are combined into one combined template, the measuring information of the object to be measured can be rapidly and comprehensively obtained on the basis of the combined template, the measuring information of the object to be measured can be more accurately measured by setting the operation sizes (including the first operation size and the second operation size) among the plurality of first templates, and whether the processing of the object to be measured meets the requirement or not can be rapidly judged on the basis of the measurement of the combined template on the object to be measured.
In addition, in the multi-template combination measuring method according to the present invention, optionally, the number of the first templates is not less than the number of the measuring surfaces. In this case, by creating a plurality of first templates that match the measurement surfaces, the measurement information of each measurement surface can be acquired more accurately, and at the same time, the measurement information of the measurement surface can be acquired completely.
In addition, in the multi-template combination measuring method according to the present invention, optionally, after the plurality of first templates are created, the method further includes adjusting an order of the plurality of first templates, where the order of the plurality of first templates is related to a measuring order of the measuring surface. This makes it possible to sequentially perform measurement of the measurement surface in the order of the set first templates.
In addition, in the multi-template combined measurement method according to the present invention, the measurement plane may optionally include measurement planes obtained by different observation directions or observation positions. Therefore, the object to be measured can be more comprehensively measured.
In addition, in the multi-template combination measuring method according to the present invention, optionally, the measurement condition includes at least one of a photographing lens, a light source, an exposure time, and a Z-axis position. Thus, different measurement conditions can be provided for the respective first templates by setting different photographing lenses, light sources, exposure times, and Z-axis positions.
In addition, in the multi-template combination measuring method according to the present invention, optionally, the plurality of first templates are obtained based on one of a plurality of objects to be measured or obtained based on a design drawing matched with the object to be measured. In this case, the geometric features included in the same first template can be adapted to the same measurement conditions, and all the contour features matched with the first template in the object to be measured can be obtained based on the same measurement conditions, so that the subsequent measurement efficiency can be improved conveniently.
In addition, in the method for measuring multi-template binding according to the present invention, optionally, a measurement behavior when the binding template measures the object to be measured is further included, and the binding template performs measurement of the plurality of first templates and the second templates according to the measurement order based on the measurement behavior to obtain a measurement report of the object to be measured. Under the condition, when the object to be measured is measured, the measurement of each first template and/or second template can be automatically completed by setting the measurement behavior of the combined template in the measurement process, and compared with the manual operation of manually switching or loading each first template and/or second template by an operator, the measurement efficiency can be improved while convenience is brought.
In addition, in the multi-template combination measuring method according to the present invention, optionally, the measurement of the plurality of first templates is performed first, and then the measurement of the second template is performed to obtain the measurement report of the object. In this case, all the preliminary measurement information of the object to be measured can be obtained by measuring the object to be measured through the plurality of first templates, and then the preliminary measurement information can be integrated and calculated through the second template to obtain all the complete profile information of the object to be measured, so that incompleteness of measurement can be reduced.
In addition, in the multi-template combination measuring method according to the present invention, optionally, the measurement report includes a plurality of sets of first reports matching the plurality of first templates and a second report matching the second template, and the comparison result between the combination template and the object is obtained based on the first report and the second report. Therefore, the measurement information corresponding to each first template can be quickly acquired through the plurality of groups of first measurement reports, and the measurement information corresponding to the second template, namely the measurement information corresponding to the spanning characteristics, can be quickly acquired through the second measurement report.
In addition, in the multi-template combination measuring method according to the present invention, optionally, the comparison result is a processing error of the object to be measured, and if the processing error is within a preset range, it is determined that the processing precision of the object to be measured meets the requirement. Therefore, whether the machining precision of the machined object to be measured is qualified or not can be judged quickly.
According to the present invention, a multi-template combination measurement method capable of improving measurement efficiency when measuring an object to be measured can be provided.
Drawings
The invention will now be explained in further detail by way of example only with reference to the accompanying drawings.
Fig. 1 is a schematic perspective view showing an analyte according to the present embodiment.
Fig. 2 is a flowchart showing a measurement method according to the present embodiment.
Fig. 3 is a schematic perspective view showing a measurement system according to the present embodiment.
Fig. 4 is a block diagram showing the configuration of the measurement system according to the present embodiment.
Fig. 5 is a schematic diagram showing the measurement surface and the edge profile corresponding to the measurement surface according to the present embodiment.
Fig. 6 is a flowchart showing the acquisition of the first template according to the present embodiment.
Fig. 7 is a flowchart showing another example of obtaining the first template according to the present embodiment.
Fig. 8 is a schematic diagram showing the cross-over feature according to the present embodiment.
Fig. 9 is a flowchart showing the comparison result obtained based on the combination template according to the present embodiment.
Detailed Description
Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and redundant description thereof is omitted. The drawings are schematic and the ratio of the dimensions of the components and the shapes of the components may be different from the actual ones.
It is noted that the terms "comprises," "comprising," and "having," and any variations thereof, in this disclosure, for example, a process, method, system, article, or apparatus that comprises or has a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include or have other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In addition, the headings and the like referred to in the following description of the present disclosure are not intended to limit the content or scope of the present disclosure, but merely serve as a reminder for reading. Such a subtitle should neither be understood as a content for segmenting an article, nor should the content under the subtitle be limited to only the scope of the subtitle.
A first aspect of an embodiment of the present disclosure relates to a multi-template combination measuring method, which can combine a plurality of measuring templates into one combination template, and can quickly and comprehensively obtain measurement information of an object to be measured based on the combination template, and can quickly determine whether processing of the object to be measured meets requirements based on measurement of the object to be measured by the combination template. The multi-template combination measuring method according to the present embodiment can improve the efficiency of measuring an object to be measured.
The measurement method of multi-template binding according to the present embodiment may also be referred to as, for example, an automatic measurement method based on multi-templates, an automatic matching method based on multi-templates, or the like. The names are for showing the measurement method of the multi-template binding according to the present embodiment, and should not be construed as limiting.
In the automatic production process, the processed object to be measured needs to be measured to determine whether the processing precision of the object to be measured is qualified. The present embodiment is directed to a multi-template combined measurement method (hereinafter, may be simply referred to as a measurement method) to realize rapid measurement of an object to be measured. Specifically, the measurement method according to the present embodiment can produce a bonded template having a plurality of templates, and can realize rapid measurement of an analyte based on the bonded template. Meanwhile, the measuring method related by the embodiment can also realize batch measurement of a plurality of objects to be measured, and improves the measuring efficiency.
In this embodiment, the measurement method may be a method of measuring the object based on a plurality of templates. In some examples, the plurality of templates may include geometric features that match the test object. Under the condition, the object to be measured is measured through the geometric features in each template to obtain the profile features matched with the geometric features, and whether the processing precision of the object to be measured meets the requirement or not is judged based on the information of the profile features and the geometric features, so that the object to be measured can be quickly measured.
Fig. 1 is a schematic perspective view showing an object 1 to be measured according to the present embodiment.
In some examples, the object 1 may be a workpiece having at least one measuring surface. In some examples, the object 1 may have a workpiece with a regular structure, for example, a square, a rectangular, or a rectangle. In some examples, the object 1 may be a workpiece having an irregular structure. Referring to fig. 1, in some examples, the object 1 may be a workpiece formed by splicing a plurality of regular and/or irregular structures. The object 1 to be measured shown in fig. 1 may be an integrally formed workpiece.
Fig. 2 is a flowchart showing a measurement method according to the present embodiment.
The first aspect of the present embodiment discloses a method for measuring multi-template binding, and referring to fig. 2, the method for measuring may include creating a plurality of first templates (step S200), creating a second template (step S400), obtaining a binding template based on the plurality of first templates and the second template (step S600), and obtaining a comparison result based on the binding template (step S800).
Fig. 3 is a perspective view schematically showing the measurement system 2 according to the present embodiment.
The second aspect of the present embodiment discloses a multi-template combined measurement system 2 (hereinafter may be simply referred to as a measurement system 2). In some examples, the measurement method may be a method applied to the measurement system 2 to implement multi-mode bonding and measure the object 1 based on the bonding template.
In some examples, measurement system 2 may be any system that relies on computer screen measurement technology and has spatial geometry calculation functionality. In particular, the measurement system 2 may be applied to any system for the purpose of two-dimensional planar measurements. For example, the measurement system 2 may be a flash meter as shown in fig. 3. However, the present embodiment is not limited to this, and the measurement system 2 may be any system for measuring the two-dimensional size of the object 1. For example, the measurement instrument may be a video measurement instrument, a profile measurement instrument, or the like. In other examples, the measurement system 2 may also be applied to any system that aims at three-dimensional planar measurements. For example, the measuring instrument can be a micro-topography measuring instrument, a confocal microscope and the like.
Fig. 4 is a block diagram showing the configuration of the measurement system 2 according to the present embodiment.
Referring to fig. 4, in some examples, the measurement system 2 may include a processing device 20 and a measurement device 30. Wherein the processing means 20 may be adapted to retrieve the binding template. The measuring device 30 can measure the analyte 1 based on the binding template.
In the present embodiment, the measuring device 30 may include an adjustment module 310 and a photographing module 320. The adjusting module 310 can be used for adjusting a measurement condition (described later) when measuring the object 1. The photographing module 320 may photograph the object 1 a plurality of times to obtain a plurality of photographed images matched with the plurality of first templates included in the combination template. In some examples, the photographing module 320 may include a plurality of photographing lenses. The plurality of photographing lenses may have different photographing effects, and may have different functions such as a large field of view or high precision. In the measuring process, different shooting lenses can be selected according to actual needs to obtain a better measuring effect. In other examples, measurement information of a plurality of photographing lenses may be integrated to improve measurement effect.
In this embodiment, the measuring device 30 may further include a carrying module 330. The carrying module 330 can be used for carrying the object 1 to be tested. In some examples, the carrier module 330 may be movable. For example, the two-dimensional movement may be performed on a plane perpendicular to the photographing direction of the photographing module 320. Thereby, the photographing module 320 can photograph a plurality of photographed images on the same measuring plane.
In some examples, the measurement method according to the present embodiment can measure a plurality of objects 1 at a time. For example, a plurality of objects 1 may be placed on the carrier module 330 at a time, and then the plurality of objects 1 may be measured based on the binding template.
Fig. 5 is a schematic diagram showing a measurement surface and an edge profile corresponding to the measurement surface according to the present embodiment.
As described above, the measurement method may include creating a plurality of first templates (step S200). In some examples, the plurality of first templates may be templates for measuring the object 1. The measurement information of the object 1 to be measured can be obtained entirely based on the measurement of the plurality of first templates. In other words, in step S200, a plurality of first templates for measuring the object 1 may be created. In some examples, a plurality of first templates may be used to measure at least one measurement face of the test object 1. This enables measurement of the object 1 based on the plurality of first templates. In the present embodiment, the measurement surface may be the same plane with respect to the object 1. For example, if the object 1 is a cube, each surface of the cube can be a measurement surface.
In some examples, the measurement planes may include measurement planes acquired through different viewing directions or viewing positions. This enables the object 1 to be measured more comprehensively. Referring to fig. 5, fig. 5 shows three measurement surfaces of the object 1 of fig. 1 according to the present embodiment, namely, a measurement surface x, a measurement surface y, and a measurement surface z. However, the present embodiment is not limited to this, and any angle view of the object 1 may be used as one measurement plane.
Referring to fig. 4, in the present embodiment, the processing device 20 may include a template creation module 210 and a template combination module 220. The template creation module 210 may be configured to create a plurality of first templates. The template binding module 220 may be used to bind a plurality of first templates.
As described above, a plurality of first templates may be created at the template creation module 210. In some examples, a plurality of first templates may be obtained based on one test object 1 of the plurality of test objects 1. Specifically, in the process of automatic production, a workpiece (i.e., a plurality of objects 1) produced in a batch manner needs to be measured, and at this time, one of the objects 1 may be used to fabricate the first template. For convenience of description, the object 1 to be tested for fabricating the template may be referred to as a template workpiece later. In some examples, the template workpiece may be any one of a plurality of objects 1. In this case, making the first template by the same batch of template workpieces enables the geometric features included in the first template to more accurately reflect the specific information of the object 1.
Fig. 6 is a flowchart showing the acquisition of the first template according to the present embodiment.
Referring to fig. 6, in some examples, obtaining a plurality of first templates based on a template workpiece may include obtaining a template workpiece (step S220), obtaining a plurality of template images (step S240), obtaining a plurality of first templates based on the plurality of template images (step S260).
Specifically, in step S220, one of the plurality of objects 1 to be detected may be arbitrarily selected as the template workpiece.
In step S240, a plurality of template images may be obtained. In some examples, multiple measurements may be taken of the template workpiece to obtain multiple template images. Specifically, a plurality of photographing may be performed on a plurality of measurement surfaces of the template workpiece based on the photographing module 320 to obtain a plurality of template images.
In step S260, a plurality of first templates may be obtained based on the plurality of template images. In some examples, the first template may include at least one geometric feature that matches the test object 1. In this case, when the object 1 is measured by the first template, the contour feature matching the at least one geometric feature can be accurately identified and measured.
In some examples, at least one contour feature may be selected in each template image according to a predetermined rule as a geometric feature (hereinafter, simply referred to as a template feature) included in a first template corresponding to the template image.
In some examples, photographing the measurement plane x of the template workpiece may obtain a template image (edge profile) as shown in fig. 5, and then at least one profile feature in the template image may be selected as the template feature. For example, all contour features may be selected as template features. In other words, the first template corresponding to the template image may include all template features corresponding to all contour features. Thereby, a plurality of first templates can be obtained based on a plurality of template images.
In some examples, the above operations may be repeated for each measurement face to obtain at least one first template for measuring each measurement face. Therefore, each measuring surface of the object to be measured can be conveniently measured subsequently.
In this embodiment, a plurality of blank first templates may be created in advance, and at least one contour feature may be assigned to each first template as a geometric feature after a plurality of template images are subsequently obtained. In some examples, a plurality of blank first templates may be created after obtaining a plurality of template images, and at least one contour feature may be assigned to each first template as a geometric feature.
In some examples, in assigning the outline features to the respective first templates as the geometric features, standard information of the respective geometric features may also be set. In some examples, the standard information may be information of a design drawing matched with the object 1, such as information of a size, a tolerance, and the like of the contour feature at the time of design. When the object 1 to be measured is measured subsequently, the standard information can be used as a comparison standard to judge whether the processing of the object 1 to be measured meets the requirements. In this case, standard information of the respective geometric features can be flexibly set by creating the first template based on the template workpiece.
In the present embodiment, the first template may include a measurement condition when the object 1 is measured. In some examples, the preset rule may be to assign profile features that need to clearly present the edge profile under the same measurement condition to the same first template. The measurement conditions of the respective first templates may be different. In this case, the geometric features included in the same first template can be adapted to the same measurement conditions, and all the profile features of the object 1 to be measured that are matched with those in the first template can be obtained based on the same measurement conditions, thereby facilitating subsequent improvement of the measurement efficiency.
In some examples, step S260 may also include setting measurement conditions. It should be noted that setting the measurement conditions may facilitate obtaining the measurement information of the object 1 to be measured more accurately when the object 1 to be measured (i.e., all the workpieces except the template workpiece) is subsequently measured. Thus, the overall measurement accuracy of the measurement system 2 can be improved, and a more accurate comparison result can be obtained.
In some examples, the measurement conditions may include at least one of a photographing lens, a light source, an exposure time, and a Z-axis position. Thus, different measurement conditions can be provided for the respective first templates by setting different photographing lenses, light sources, exposure times, and Z-axis positions.
In some examples, the light source may include various types of bottom light, surface light, on-axis light, and zero-degree light. Different measurement conditions can be obtained by providing different types of light sources. In other examples, different measurement conditions may be obtained by adjusting the intensity or exposure time of the same type of light source. For example, different measurement conditions can be obtained by adjusting the intensity of the bottom light or the exposure intensity.
In some examples, the Z-axis position may be a height position of the photographing lens with respect to the object 1 when the object 1 is measured. The height position of the shooting lens relative to the object 1 to be measured can be adjusted by adjusting the Z-axis position. Thereby, the environmental parameter can be changed.
Fig. 7 is a flowchart showing another example of obtaining the first template according to the present embodiment.
In some examples, the plurality of first templates may be obtained based on a design drawing matched with the test object 1. Specifically, the geometric features included in the design drawing may be assigned to each first template according to a preset rule. In this case, by directly assigning the geometric features of the design drawing to each of the first templates, the rapid assignment of the plurality of geometric features can be realized, and thus, the manufacturing efficiency of the plurality of first templates can be improved.
Referring to fig. 7, in some examples, obtaining a plurality of first templates based on a design drawing matched with the test object 1 may include importing a design drawing (step S230), obtaining a plurality of first templates (step S250), and assigning at least one geometric feature to the first templates (step S270).
In step S230, the design drawing may be imported into the template creation module 210. The design drawing may be a drawing matched with the object 1 to be measured. In other words, the test object 1 is processed based on the design drawing. The template creation module 210 may then extract geometric features in the design drawing.
In step S250, a plurality of first templates may be obtained. Specifically, in the template creation module 210, a first template of a plurality of blanks can be established. In some examples, the measurement conditions of a plurality of first templates may be set (as the measurement conditions are set to be the same in step S260, which is not described herein again).
In step S270, at least one geometric feature may be assigned to the blank first template. In some examples, the geometric features may be assigned to the respective first templates based on preset rules (the preset rules may be as described above and are not described herein). In some examples, a single geometric feature may be assigned to one first template. In other examples, a single geometric feature may be assigned to multiple first templates. In this case, the geometric features can be directly assigned to the plurality of blank first templates based on the design drawing to obtain the first template including at least one geometric feature matching the object 1, whereby the manufacturing efficiency of the first template can be improved.
In some examples, the plurality of first measurement templates may be created based on an external module and then imported into the processing device 20 according to the present embodiment.
In the present embodiment, the number of the first templates may be not less than the number of the measurement faces. Since the same measuring plane may comprise different types of contour features, each type of contour feature needs to be under specific measuring conditions to present a clear edge contour, and the same type of contour features may be assigned to the same first template. Therefore, the same measurement surface can be measured based on a plurality of first templates to completely acquire measurement information of the measurement surface. In this case, by establishing a plurality of first templates that match the measurement surfaces, the measurement information of each measurement surface can be acquired more accurately, and at the same time, the measurement information of the measurement surface can be acquired completely.
In this embodiment, step S200 may further include adjusting the order of the respective first templates. Specifically, after the plurality of first templates are created, the method further comprises adjusting the order of the plurality of first templates. In some examples, the order of the plurality of first templates may be related to a measurement order of the measurement planes. This makes it possible to sequentially perform measurement of the measurement surface in the order of the set first templates.
In this embodiment, the first template may further include a first operation size. In some examples, step S200 may further include creating a first operation size. The first operation size may be used to characterize a relationship of at least one geometric feature. In particular, it may be used to characterize the relationship of at least one geometric feature within the first template. For example, if a first template includes geometric feature a, geometric feature b, and geometric feature c, the first operation feature may be used to characterize the operation relationship such as the sum, difference, product, angle, etc. between geometric feature a, geometric feature b, or geometric feature c. The predetermined constraint may be satisfied by a plurality of geometric features in the first template based on the first operational relationship (for example, the predetermined constraint may be that a difference between the geometric feature a and the geometric feature b, a sum, or an angle between the geometric features a and b satisfies a design requirement). When the object 1 to be measured is measured subsequently, the preset constraint condition can be taken into account to obtain a more accurate comparison result. In other examples, the first template may not include the first operation size. The user can autonomously select whether to create the first operation size according to actual measurement requirements. For example, whether geometric features within the first template require an operational relationship to be established.
Fig. 8 is a schematic diagram showing the cross-over feature according to the present embodiment.
In this embodiment, the measurement method may further include creating a second template (step S400).
In some examples, the second template may be a template obtained based on the plurality of first templates and used to link geometric features between the plurality of first templates. In the present embodiment, the second template may be a template for measuring at least one measurement surface of the object 1.
In some examples, geometric features that span multiple first templates may be considered spanning features. In other words, the spanning feature may be an incomplete geometric feature in a single first template.
Referring to fig. 8, in some examples, the same geometric feature within a single measurement plane may be assigned to different first templates. For example, taking the outline feature P (the bold portion in fig. 8) in the measurement plane x in the template workpiece as an example, the outline feature P may be divided into an outline feature P1, an outline feature P2 and an outline feature P3, and then the outline feature P1, the outline feature P2 and the outline feature P3 may be respectively allocated to the three first templates, that is, each of the three first templates may include a partial feature of the outline feature P. The geometric features corresponding to the profile features P described above may then be used as cross-over features when creating the template. In this case, when the information to be measured of the object 1 is relatively complicated, more accurate measurement information can be obtained by assigning partial features of the same profile feature to different first templates and measuring the partial features by using the measurement conditions of the different first templates.
In some examples, if the size of the object 1 is large and measurement information of a single contour feature cannot be completely reflected in a single first template, the geometric feature corresponding to the contour feature may also be used as the cross feature in the above manner. When the first template is manufactured, the spanning features may be distributed into a plurality of first templates, and then the object 1 is measured based on the plurality of first templates to calculate the measurement information matching the spanning features.
In some examples, the second template may include a second operation size. The second operation size may be used to characterize a relationship between the plurality of first templates. In particular, it is used to characterize the relationship between a plurality of first templates across features. In other words, the second template may include a second operation size for characterizing a relationship of geometric features across the plurality of first templates. For example, the contour feature P1, the contour feature P2, and the contour feature P3 may be linked by the second operation size to obtain the contour feature P. In this case, when the object 1 is measured subsequently, the profile features matched with the cross-over features in the plurality of captured images matched with the plurality of first measurement templates can be combined through the second calculation size to completely obtain the measurement information of the profile features, so that the comprehensive measurement accuracy of the measurement system 2 can be improved.
In summary, the second template may be based on an operational relationship between the plurality of first templates across the features. In some examples, after each first template is created, relationships between each spanning feature among the plurality of first templates may be established based on the second operational feature to obtain a second template. In other examples, the second template may be treated as a virtual template, the second template spanning the operational information of the feature.
In some examples, the measurement method may also not include creating a second template (step S400). For example, when the size of the object 1 is small or the information of the object 1 is simple, the measurement requirements can be satisfied by the plurality of first templates.
As described above, the measurement method may further include obtaining a binding template based on the plurality of first templates and the second template (step S600). In some examples, after the plurality of first templates are created, the plurality of first templates and the second template may be combined to obtain a combined template. If the second template is not needed, step S600 may be to obtain a combined template based on the plurality of first templates.
In some examples, the binding template may be a template including a plurality of first templates and/or second templates as described above. In some examples, the combination template may further include a measurement order of the plurality of first templates.
In this embodiment, step S600 may further include setting an attribute of the binding template. In some examples, setting the property of the binding template may include setting a measurement behavior of the binding template when measuring the object 1. For example, it may be provided that the measurement of the plurality of first templates and/or second templates is performed in connection with whether the template is according to the function of "auto-switching" and/or "auto-loading". In some examples, the joining template may perform measurements of the plurality of first templates and/or the second template in a measurement order based on the measuring behavior. In this case, when the object 1 to be measured is measured, the measurement of each first template and/or second template can be automatically completed by setting the measurement behavior of the combined template in the measurement process, and compared with the manual operation of manually switching or loading each first template and/or second template by an operator, the measurement efficiency can be improved while convenience is brought.
In the measurement method according to the present embodiment, the comparison result may be obtained based on the binding template (step S800). In some examples, the analyte 1 may be measured based on the binding template, and then a comparison result may be obtained based on the measurement information and the binding template.
In some examples, the measurement device 30 may measure the analyte 1 based on the binding template. As described above, the measuring apparatus 30 may include the adjusting module 310 and the photographing module 320. The adjusting module 310 can be used to adjust the measuring environment of the object 1. In some examples, the adjusting module 310 may adjust the measurement environment of the object 1 based on the measurement condition of the first template so that the measurement environment may correspond to the measurement condition one to one. The photographing module 320 may be configured to photograph a plurality of photographed images corresponding to the plurality of first templates one to one. In this case, since the measurement environment when the object 1 is photographed corresponds to the measurement condition of the first template, the edge profile matching the geometric feature included in the first template in the obtained photographed image can be clearly presented, and thus the measurement accuracy when the object 1 is measured can be improved.
In the present embodiment, the measurement report can be obtained by photographing the object 1 based on the combination template. In some examples, performing measurements of a plurality of first templates and/or second templates based on measurement behavior in conjunction with a template may obtain a measurement report. The measurement report may be a report including all measurement information of the object 1, such as information of dimensions, form and position tolerances, angles, burrs, and the like.
In some examples, the measurement of the plurality of first templates may be performed first, and then the measurement of the plurality of second templates may be performed to obtain a measurement report of the object 1. In this case, all the preliminary measurement information of the object 1 can be obtained by measuring the object 1 using the plurality of first templates, and then the preliminary measurement information can be integrated based on the second template to obtain all the complete contour information of the object 1, whereby incompleteness of measurement can be reduced.
In some examples, the measurement report may include a plurality of sets of first measurement reports matching a plurality of first templates. Therefore, the measurement information corresponding to each first template can be quickly acquired through the plurality of groups of first measurement reports.
In some examples, the measurement report may include a second report matching the second template. Therefore, the measurement information corresponding to the second template, namely the measurement information corresponding to the spanning features, can be quickly acquired through the second measurement report.
In this embodiment, the measurement report may further include a comparison result between the combination template and the analyte 1. In some examples, the comparison result between the binding template and the analyte 1 can be obtained based on the first report and the second report.
In some examples, the processing device 20 may also include a comparison module 230. The comparison module 230 may be used to obtain a comparison result. Specifically, the captured image and the binding template may be compared to obtain a comparison result.
In some examples, the first measurement report may include measurement information of the captured image that matches the first template.
Fig. 9 is a flowchart showing the comparison result obtained based on the combination template according to the present embodiment.
Referring to fig. 9, the step of obtaining the comparison result based on the combined template in step S800 may include loading the combined template (step S820), sequentially executing each of the first templates and/or the second template to obtain a plurality of photographed images matched with the plurality of first templates and measurement information matched with the second template (step S840), and obtaining the comparison result based on each of the first templates, each of the photographed images matched with each of the first templates, the second template, and the measurement information matched with the second template (step S860).
In step S820, a binding template may be loaded. In some examples, the processing device 20 and the measurement device 30 may include respective modules that are in signal connection. After the operation of loading the binding template is performed, the processing device 20 may receive the loading signal and perform the measurement on the object 1 according to the loading signal.
In step S840, the processing device 20, after receiving the loading signal, may execute the first templates in order of measurement to obtain various captured images matching the first templates and measurement information matching the second templates. Specifically, in some examples, assuming that the combination template includes three first measurement templates, namely a first measurement template 1, a first measurement template 2 and a first measurement template 3, if the measurement sequence set in step S200 is to execute the first measurement template 2 first, then execute the first measurement template 1, and finally execute the first measurement template 3, the adjusting module 310 first adjusts the measurement environment of the object 1 based on the measurement condition of the first measurement template 2, and then the shooting module 320 shoots the object 1 to obtain a shot image matched with the first measurement template 2; then, automatically switching and executing the measurement of the first measurement template 1, adjusting the measurement environment of the object 1 to be measured based on the measurement condition of the first measurement template 1, and then shooting the object 1 to be measured by the shooting module 320 to obtain a shot image matched with the first measurement template 1; finally, the measurement of the first measurement template 3 is automatically switched and performed to obtain a captured image matching the first measurement template 3.
In some examples, the measurement device 30 may perform measurements of the respective measurement planes in sequence based on the combined templates. In an example, after the measurement of the object 1 is performed by the plurality of first templates, the measurement of the second template may be performed to obtain measurement information matched with the second template, that is, measurement information of the cross-feature.
In step S860, a comparison result may be obtained based on the respective first templates, the respective photographed images matched with the respective first templates, the second template, and the measurement information matched with the second template.
In some examples, the processing device 20 may also include an identification module 240. The recognition module 240 may be configured to recognize contour features in each captured image that correspond to each first template. The comparison module 230 may then be used to compare the measured information of the contour features with the standard information of the geometric features to obtain a comparison result based on the first template. In some examples, the comparison results for each first template may be output in a first report corresponding to each first template.
In some examples, a second template may be used to compute measurement information for profile features that match the spanning features, and a second template-based comparison may be obtained based on the criteria information for the spanning features and the measurement information for the profile features that match the spanning features. The comparison result of the second template may be output in a second report.
In this embodiment, since the combination template may include a plurality of first templates and a plurality of second templates, a plurality of sets of first reports matching the plurality of first templates and a measurement report matching the second template may be summarized and output to the measurement report. In other words, the measurement report may include measurement information, comparison results, and correlation between all templates. Therefore, the convenience of calculation can be improved.
In some examples, the comparison result may be a processing error of the object 1, and if the processing error is within a preset range, it may be determined that the processing precision of the object 1 meets the requirement. Thus, it is possible to quickly determine whether or not the machining accuracy of the machined specimen 1 is acceptable.
In some examples, the comparison result may be whether the output is qualified directly in text form.
In this embodiment, the processing device 20 may further include a display module. The display module can be used for displaying the interface information of the rest modules. An operator can operate the measurement system according to the present embodiment through the display module to implement the measurement method. In other examples, processing device 20 may not include a display module. The operator can operate the measurement system 2 based on the built-in code layer.
The present disclosure also relates to a computer device, which may comprise a memory storing a computer program and a processor implementing any of the above-mentioned measurement methods when the processor executes the computer program.
The present disclosure also relates to a computer-readable storage medium that may store at least one instruction that may be executed by a processor to implement the above-described computing method. Those of ordinary skill in the art will appreciate that all or part of the steps in the computing methods in the above examples may be performed by associated hardware as instructed by a program (instructions) that may be stored in a computer-readable memory (storage medium) that may include: flash disks, Read-Only memories (ROMs), Random Access Memories (RAMs), magnetic or optical disks, and the like.
According to the multi-template combined measuring method disclosed by the present disclosure, a plurality of measuring templates are combined into one combined template, the measuring information of the object 1 to be measured can be quickly and comprehensively obtained based on the combined template, the information to be measured of the object 1 to be measured can be more accurately measured by setting the operation sizes (including the first operation size and the second operation size) between the plurality of first templates, and whether the processing of the object 1 to be measured meets the requirement can be quickly judged based on the measurement of the combined template on the object 1 to be measured.
While the present disclosure has been described in detail in connection with the drawings and examples, it should be understood that the above description is not intended to limit the disclosure in any way. Those skilled in the art can make modifications and variations to the present disclosure as needed without departing from the true spirit and scope of the disclosure, which fall within the scope of the disclosure.

Claims (10)

1. A multi-template combined measurement method for measuring an object to be measured based on a plurality of templates including geometric features matching the object to be measured, the measurement method comprising: creating a plurality of first templates for measuring at least one measuring surface of the object to be measured, wherein the first templates comprise measuring conditions when the object to be measured is measured, at least one geometric feature matched with the object to be measured, and a first operation size for representing the relation of the at least one geometric feature in the first templates; creating a second template for measuring at least one measurement face of the test object, the second template including second operational dimensions for characterizing a relationship of geometric features across a plurality of the first templates; obtaining a binding template based on the plurality of first templates and the second template; and measuring the analyte based on the binding template to obtain a comparison of the binding template and the analyte.
2. The measuring method according to claim 1, wherein the number of the first templates is not less than the number of the measuring faces.
3. The measurement method according to claim 1 or 2, wherein after creating the plurality of first templates, further comprising adjusting an order of the plurality of first templates, the order of the plurality of first templates being related to a measurement order of the measurement plane.
4. The measurement method according to claim 1, wherein the measurement plane includes measurement planes acquired by different observation directions or observation positions.
5. The measurement method according to claim 1, wherein the measurement condition includes at least one of a photographing lens, a light source, an exposure time, and a Z-axis position.
6. The measurement method according to claim 1, wherein the plurality of first templates are obtained based on one of a plurality of objects to be measured or obtained based on a design drawing matched with the object to be measured.
7. The measurement method according to claim 3, further comprising setting a measurement behavior when the binding template measures the object, the binding template performing the measurement of the plurality of first templates and the second template in the measurement order based on the measurement behavior to obtain a measurement report of the object.
8. The method according to claim 7, wherein the measurement of the first templates is performed first, and then the measurement of the second template is performed to obtain the measurement report of the dut.
9. The measurement method according to claim 7, wherein the measurement report includes a plurality of sets of first reports matching the plurality of first templates and a second report matching the second template, and the comparison result between the combination template and the object is obtained based on the first report and the second report.
10. The measuring method according to claim 1 or 9, wherein the comparison result is a processing error of the object, and if the processing error is within a preset range, it is determined that the processing precision of the object meets the requirement.
CN202210893730.3A 2022-07-27 2022-07-27 Measurement method for multi-template combination Pending CN115077421A (en)

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