CN115076495A - Pipeline fool-proof device and semiconductor equipment - Google Patents
Pipeline fool-proof device and semiconductor equipment Download PDFInfo
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- CN115076495A CN115076495A CN202210600483.3A CN202210600483A CN115076495A CN 115076495 A CN115076495 A CN 115076495A CN 202210600483 A CN202210600483 A CN 202210600483A CN 115076495 A CN115076495 A CN 115076495A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 claims description 63
- 230000002093 peripheral effect Effects 0.000 claims description 29
- 238000001816 cooling Methods 0.000 claims description 17
- 238000007789 sealing Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 229920006351 engineering plastic Polymers 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 239000000110 cooling liquid Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000005489 elastic deformation Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- Condensed Matter Physics & Semiconductors (AREA)
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
Abstract
The invention provides a fool-proof device of a pipeline and semiconductor equipment, wherein a first fool-proof piece and a second fool-proof piece of the fool-proof device are respectively arranged on a first pipe fitting and a second pipe fitting which are detachably connected with the pipeline; the structural characteristics of the first fool-proof piece are matched with the structural characteristics of a second fool-proof piece of a second pipe fitting correspondingly connected with the first pipe fitting, but are not matched with the structural characteristics of a second fool-proof piece of a second pipe fitting which is not correspondingly connected with the first pipe fitting; first fool-proof piece and the second fool-proof piece that the structural feature cooperation set up can assemble, and the first fool-proof piece and the second fool-proof piece that the non-cooperation of structural feature set up can't assemble to can prevent through first fool-proof piece and second fool-proof piece whether can assemble, judge whether first pipe fitting and second pipe fitting are for corresponding the connection. The fool-proof device of the pipeline and the semiconductor equipment have the fool-proof function on pipeline connection, prevent the pipeline from being connected by mistake, and have the advantages of strong reliability of the fool-proof function, wide application range and long service life.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to a fool-proof device of a pipeline and the semiconductor equipment.
Background
In a semiconductor apparatus, a very large number of lines (e.g., a plurality of gas lines for supplying different process gases, a plurality of liquid lines for supplying cooling liquids to different devices, etc.) are generally provided. Because of the compact structure of the semiconductor equipment, the space utilization is required to be high, and in order to facilitate the disassembly and assembly maintenance of the pipelines, the pipelines are usually arranged into a plurality of pipes, and each pipe is provided with a joint so as to connect the plurality of pipes into one pipeline through the joint. In order to avoid the connection error of a plurality of pipes, the prior art fixes a paper label on the end part of each pipe for connecting with another pipe by using a binding tape, wherein the paper label is provided with a mark, and the mark on the paper label is checked so as to connect a plurality of correct pipes into a pipeline.
However, because the space that the pipeline was located is less, therefore, the size of paper label is also less usually, the staff need carefully check the code on the paper label, just can avoid the tube coupling mistake, it is great to cause the degree of difficulty that the pipeline correctly connects, and after the tube coupling is good, the staff of being not convenient for inspects, the tube coupling mistake appears easily, the reliability is lower, simultaneously, the mode of fixing the paper label on the pipe fitting with the ribbon is unreliable, the paper label drops easily, and, the life of paper label is shorter, service environment has great limitation, can't be at high temperature, use in the environment that has the chemical attack.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides a fool-proof device for a pipeline and a semiconductor device, wherein the fool-proof device has a fool-proof function for the connection of the pipeline, avoids the wrong connection of the pipeline, and has the advantages of strong reliability, wide application range and long service life.
The invention provides a fool-proof device of a pipeline, which aims to realize the aim of the invention, wherein the pipeline comprises a first pipe fitting and a second pipe fitting which are detachably connected, the fool-proof device comprises a first fool-proof piece and a second fool-proof piece, the first fool-proof piece is arranged on the first pipe fitting, and the second fool-proof piece is arranged on the second pipe fitting;
the structural feature of the first fool-proof piece is matched with the structural feature of the second fool-proof piece of the second pipe fitting correspondingly connected with the first pipe fitting, but is not matched with the structural feature of the second fool-proof piece of the second pipe fitting non-correspondingly connected with the first pipe fitting;
structural feature cooperation sets up first prevent slow-witted piece with the second prevents slow-witted piece can assemble, and the non-cooperation of structural feature sets up first prevent slow-witted piece with the second prevents slow-witted unable assembly to can pass through first prevent slow-witted piece with whether the second prevents slow-witted piece can assemble, judges first pipe fitting with whether the second pipe fitting is for corresponding the connection.
Optionally, the first fool-proof piece includes a first sleeve, the second fool-proof piece includes a second sleeve, an inner diameter of one of the first sleeve and the second sleeve is larger than an outer diameter of the other, the first sleeve is sleeved on the first pipe, a first groove is arranged on an inner peripheral wall or an outer peripheral wall of the first sleeve, and an extending direction of the first groove is parallel to an axial direction of the first sleeve;
the second sleeve is sleeved on the second pipe fitting, a second groove is formed in the inner peripheral wall or the outer peripheral wall of the second sleeve, and the extending direction of the second groove is parallel to the axial direction of the second sleeve;
the radial dimension of the first groove is matched with the radial dimension of the second groove of the second sleeve of the second pipe fitting correspondingly connected with the first pipe fitting, and is not matched with the radial dimension of the second groove of the second sleeve of the second pipe fitting not correspondingly connected with the first pipe fitting;
the first sleeve and the second sleeve can be arranged through the cooperation of the radial size, the first groove and the second groove are sleeved, and the first groove and the second groove are sleeved and cannot be arranged through the non-cooperation of the radial size.
Optionally, the inner diameter of the second sleeve is larger than the outer diameter of the first sleeve, and a first limit convex part is arranged on the outer peripheral wall of the first sleeve, and the first limit convex part is annular and arranged along the circumferential direction of the first sleeve;
the inner peripheral wall of the second sleeve is provided with a second limiting convex part which is annular and is arranged along the circumferential direction of the second sleeve;
the first limiting convex part and the second limiting convex part are arranged on the outer side of the first sleeve in a sleeved mode, and the first sleeve and the second sleeve are axially clamped and limited mutually.
Optionally, the first pipe fitting includes a first pipe section and a first joint, the second pipe fitting includes a second pipe section and a second joint, one end of the first pipe section is connected to the first joint, one end of the second pipe section is connected to the second joint, the first joint is detachably connected to the second joint, the first sleeve is sleeved on the first pipe section, the first joint or between the first pipe section and the first joint, and the second sleeve is sleeved on the second pipe section, the second joint or between the second pipe section and the second joint.
Optionally, one end part of the first pipe section, which is connected with the first joint, is provided with a step surface facing the first joint, one end of the first sleeve is provided with a first clamping part, the first clamping part is annular and is provided with a first through hole, the radial size of the first through hole is larger than that of the end part of the first pipe section, which is connected with the first joint, and is smaller than that of the step surface and the maximum radial size of the first joint, so that the first clamping part can be clamped between the step surface and the first joint when the first joint is connected with one end of the first pipe section.
Optionally, a second clamping portion is arranged at one end of the second sleeve, the second clamping portion is annular and is provided with a second through hole, and the radial size of the second through hole is larger than that of the second pipe section and smaller than the maximum radial size of the second joint, so that the second clamping portion can be clamped by the second joint.
Optionally, the first fool-proof piece and the second fool-proof piece, which are cooperatively arranged by the structural features, have the same color features.
Optionally, the first fool-proof piece and the second fool-proof piece, which are cooperatively arranged by the structural features, have the same identification feature.
Optionally, the identification feature includes a first mark and a second mark, the first mark includes a code of a module to which the first pipe and the second pipe belong, and the second mark includes a code of the first pipe and the second pipe in the module.
Optionally, the material of the first fool-proof piece and the second fool-proof piece includes engineering plastics with at least one of chemical corrosion resistance, high temperature resistance and oxidation resistance.
The invention also provides semiconductor equipment, wherein at least one equipment part of the semiconductor equipment is communicated with a pipeline, and the fool-proof device provided by the invention is arranged on at least one pipeline.
Optionally, the device component includes a furnace body, a process chamber, a supporting plate, a cooling ring, an upper fixing ring, a lower fixing ring and a process door, wherein the process chamber is disposed in the furnace body, the furnace body is used for providing a heat source to heat the process chamber, the process chamber is used for providing a process environment for a semiconductor process, the supporting plate is disposed at the bottom of the furnace body and surrounds the process chamber to support the furnace body and fix the process chamber and protect the device component below the process chamber, the cooling ring is disposed at the bottom of the supporting plate, the upper fixing ring and the lower fixing ring are respectively disposed at two sides of the bottom of the process chamber and connected with the bottom of the process chamber to fix the process chamber, and a sealing gasket is disposed between the upper fixing ring and the lower fixing ring, the process door is arranged at the bottom of the process chamber and used for sealing an opening at the bottom of the process chamber;
at least one among the cooling ring, the upper fixing ring, the lower fixing ring and the process door is communicated with the pipeline, and at least one of the pipelines is provided with the fool-proof device.
The invention has the following beneficial effects:
the invention provides a fool-proofing device for pipelines, which is characterized in that a first fool-proofing piece is arranged on a first pipe, a second fool-proofing piece is arranged on a second pipe, the structural characteristic of the first fool-proofing piece is matched with the structural characteristic of the second fool-proofing piece of the second pipe correspondingly connected with the first pipe, but is not matched with the structural characteristic of the second fool-proofing piece of the second pipe correspondingly connected with the first pipe, the first fool-proofing piece and the second fool-proofing piece which are matched with the structural characteristic can be assembled, the first fool-proofing piece and the second fool-proofing piece which are not matched with the structural characteristic can not be assembled, thus after the first pipe and the second pipe are connected, whether the first pipe and the second pipe are correspondingly connected can be judged through whether the first fool-proofing piece on the first pipe and the second pipe can be assembled, if the first pipe and the second pipe on the first pipe and the second pipe are connected can be assembled, the first pipe fitting and the second pipe fitting can be judged to be correspondingly connected (namely correctly connected), if the first fool-proof piece and the second fool-proof piece on the connected first pipe fitting and the second pipe fitting cannot be assembled, the first pipe fitting and the second pipe fitting can be judged to be non-correspondingly connected (namely wrongly connected), so that the fool-proof function is achieved on the connection of the pipelines, the wrong connection of the pipelines caused by the wrong connection of the first pipe fitting and the second pipe fitting is avoided, and compared with the existing paper label mode, if the first fool-proof piece and the second fool-proof piece cannot be assembled, the first pipe fitting and the second pipe fitting can be judged to be wrongly connected, the condition that the pipeline is wrongly connected due to the fact that workers know the mistakes subjectively is avoided, the connected pipelines are convenient to be checked, and for paper, the first fool-proof piece and the second fool-proof piece with certain structures can be more suitable for high temperature, The fool-proof device of the pipeline provided by the embodiment of the invention has the advantages of strong reliability of the fool-proof function, larger application range and longer service life.
According to the semiconductor equipment provided by the invention, the fool-proof device provided by the invention is arranged on at least one pipeline communicated with the equipment components, so that the fool-proof function can be realized on the connection of the pipelines, the reliability of the fool-proof function is stronger, the application range is wider, and the service life is longer.
Drawings
Fig. 1 is a schematic structural diagram of a pipeline fool-proofing device according to an embodiment of the present invention when the fool-proofing device is not connected;
FIG. 2 is a schematic structural diagram of a fool-proof device for a pipeline according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first fool-proof member of the fool-proof device for pipelines according to the embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a second fool-proof member of the fool-proof device of a pipeline according to an embodiment of the present invention;
FIG. 5 is a schematic cross-sectional view of a pipeline fool-proofing device according to an embodiment of the present invention;
FIG. 6 is an enlarged schematic view of the structure at A in FIG. 5;
FIG. 7 is an enlarged view of the structure at B in FIG. 5;
FIG. 8 is an enlarged view of the structure at C in FIG. 5;
fig. 9 is a schematic structural diagram of a fool-proof device of a pipeline and a semiconductor apparatus according to an embodiment of the invention;
description of the reference numerals:
11-a first tubular member; 111-a first tube section; 1111-a first pipe portion; 1112-a second pipe portion;
1113-step surface; 112-a first joint; 12-a second tubular member; 121-a second tube section; 122-a second joint; 13-a first sleeve; 131-a first groove; 132-a first limit projection; 133-a first snap-in part; 1331-a first via; 14-a second sleeve; 141-a second groove; 142-a second limit projection; 143-a second snap-in part; 15-identifying a feature; 151-first mark; 152-a second marker; 2-a semiconductor device; 21-furnace body; 22-a process chamber; 23-a support plate; 24-a cooling ring; 25-upper fixing ring; 26-lower fixed ring; 27-a process gate; 28-pipeline.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the fool-proofing device of pipeline and the semiconductor device provided by the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1 and fig. 2, an embodiment of the present invention provides a fool-proof device for a pipeline, where the pipeline includes a first pipe 11 and a second pipe 12 that are detachably connected, the fool-proof device includes a first fool-proof member and a second fool-proof member, the first fool-proof member is disposed on the first pipe 11, and the second fool-proof member is disposed on the second pipe 12; the structural characteristics of the first fool-proof piece are matched with the structural characteristics of a second fool-proof piece of a second pipe fitting 12 correspondingly connected with the first pipe fitting 11, but are not matched with the structural characteristics of a second fool-proof piece of a second pipe fitting 12 non-correspondingly connected with the first pipe fitting 11; first fool-proof piece and the second that the structural feature cooperation set up can assemble, and the first fool-proof piece and the second that the non-cooperation of structural feature set up prevent that the piece can't assemble to prevent through first fool-proof piece and second whether can assemble, judge first pipe fitting 11 and second pipe fitting 12 whether for corresponding the connection.
In the foolproof device for pipelines provided by the embodiment of the invention, the first foolproof piece is arranged on the first pipe fitting 11, the second foolproof piece is arranged on the second pipe fitting 12, the structural characteristic of the first foolproof piece is matched with the structural characteristic of the second foolproof piece of the second pipe fitting 12 correspondingly connected with the first pipe fitting 11, but the structural characteristic of the second foolproof piece of the second pipe fitting 12 correspondingly connected with the first pipe fitting 11 is not matched, the first foolproof piece and the second foolproof piece which are matched with the structural characteristic can be assembled, and the first foolproof piece and the second foolproof piece which are not matched with the structural characteristic can not be assembled, so that after the first pipe fitting 11 and the second pipe fitting 12 are connected, whether the first pipe fitting 11 and the second pipe fitting 12 are correspondingly connected can be judged, if the first fool-proof piece and the second fool-proof piece on the connected first pipe fitting 11 and the second pipe fitting 12 can be assembled, it can be determined that the first pipe fitting 11 and the second pipe fitting 12 are correspondingly connected (i.e. correctly connected), if the first fool-proof piece and the second fool-proof piece on the first pipe fitting 11 and the second pipe fitting 12 cannot be assembled, it can be determined that the first pipe fitting 11 and the second pipe fitting 12 are non-correspondingly connected (i.e. wrongly connected), so that the fool-proof function is provided for the connection of the pipeline, the wrong connection of the pipeline caused by the wrong connection of the first pipe fitting 11 and the second pipe fitting 12 is avoided, and compared with the existing paper label way, if the first fool-proof piece and the second fool-proof piece cannot be assembled, the wrong connection of the first pipe fitting 11 and the second pipe fitting 12 can be determined, the condition that the pipeline connection is wrongly connected due to subjective understanding of workers is avoided, and the inspection of the connected pipeline is facilitated, compared with paper, the first fool-proof piece and the second fool-proof piece with certain structures can be more suitable for environments with high temperature, chemical corrosion and oxidation, and therefore the fool-proof device of the pipeline provided by the embodiment of the invention has the advantages of stronger reliability of the fool-proof function, larger application range and longer service life.
In practical application, after connecting the first pipe fitting 11 and the second pipe fitting 12, the first fool-proof piece on the first pipe fitting 11 and the second fool-proof piece on the second pipe fitting 12 can be assembled, because only the first fool-proof piece and the second fool-proof piece which are arranged in a structure characteristic matching manner can be assembled, the first fool-proof structure and the second fool-proof structure which are arranged in a structure characteristic non-matching manner cannot be assembled, and the structure characteristic of the first fool-proof piece is only arranged in a structure characteristic matching manner with the second fool-proof piece of the second pipe fitting 12 corresponding to and connected with the first pipe fitting 11, and the structure characteristic of the second fool-proof piece of the second pipe fitting 12 corresponding to and connected with the first pipe fitting 11 is arranged in a structure characteristic non-matching manner, therefore, if the first fool-proof piece and the second fool-proof piece can be assembled, the structure characteristic of the first fool-proof piece and the second fool-proof piece can be judged to be arranged in a matching manner, thereby judging that the first pipe fitting 11 provided with the first fool-proof piece and the second pipe fitting 12 provided with the second pipe fitting are correctly connected with the second pipe fitting 12 If the first fool-proof piece and the second fool-proof piece cannot be assembled, the structural characteristics of the first fool-proof piece and the second fool-proof piece can be judged to be non-matched, so that the first pipe fitting 11 provided with the first fool-proof piece and the second pipe fitting 12 provided with the second fool-proof piece can be judged to be in error connection.
Therefore, the first fool-proof piece and the second fool-proof piece can have the fool-proof function on the connection of the pipelines, the wrong connection of the pipelines caused by the wrong connection of the first pipe fitting 11 and the second pipe fitting 12 is avoided, moreover, compared with the existing paper label mode, if the first fool-proof piece and the second fool-proof piece can not be assembled, the first pipe fitting 11 and the second pipe fitting 12 can be judged to be in wrong connection, thereby avoiding the situation that the pipeline is in wrong connection due to the fact that workers know the wrong conditions subjectively, and is convenient for checking the connected pipelines, and compared with paper, the first fool-proof piece and the second fool-proof piece with certain structures can be more suitable for the environment with high temperature, chemical corrosion and oxidation, therefore, the fool-proof device of the pipeline provided by the embodiment of the invention has the advantages of stronger reliability of the fool-proof function, larger application range and longer service life.
As shown in fig. 1 to 4, in a preferred embodiment of the present invention, the first fool-proof member may include a first sleeve 13, the second fool-proof member may include a second sleeve 14, an inner diameter of one of the first sleeve 13 and the second sleeve 14 is larger than an outer diameter of the other, the first sleeve 13 is sleeved on the first pipe 11, a first groove 131 is disposed on an inner circumferential wall or an outer circumferential wall of the first sleeve 13, and an extending direction of the first groove 131 is parallel to an axial direction of the first sleeve 13; the second sleeve 14 is sleeved on the second pipe 12, a second groove 141 is formed in the inner peripheral wall or the outer peripheral wall of the second sleeve 14, and the extending direction of the second groove 141 is parallel to the axial direction of the second sleeve 14; the radial dimensions of the first groove 131 are arranged in cooperation with the radial dimensions of the second groove 141 of the second sleeve 14 of the second tubular element 12 connected in correspondence with the first tubular element 11 and in non-cooperation with the radial dimensions of the second groove 141 of the second sleeve 14 of the second tubular element 12 connected in non-correspondence with the first tubular element 11; the first sleeve 13 and the second sleeve 14 can be sleeved by the first groove 131 and the second groove 141 which are cooperatively arranged in the radial dimension, but cannot be sleeved by the first groove 131 and the second groove 141 which are not cooperatively arranged in the radial dimension.
For example, the inner diameter of the second sleeve 14 is larger than the outer diameter of the first sleeve 13, the outer circumferential wall of the first sleeve 13 is provided with a first groove 131, that is, the first recess 131 is recessed in a direction close to the axis of the first sleeve 13 with respect to the outer peripheral wall of the first sleeve 13, the second recess 141 is provided on the outer peripheral wall of the second sleeve 14, that is, the second groove 141 is recessed toward the direction close to the axis of the second sleeve 14 with respect to the outer peripheral wall of the second sleeve 14, by having the second groove 141 of the first groove 131 and the second groove 141 cooperatively dimensioned to fit outside the first groove 131, so that the second sleeve 14 can be sleeved outside the first sleeve 13 by the sleeving of the first groove 131 and the second groove 141 which are matched in radial size, and the first groove 131 and the second groove 141 which are arranged in a non-matching way in the radial dimension can not be sleeved with each other, so that the fool-proof function is realized.
That is to say, after the first pipe fitting 11 and the second pipe fitting 12 are connected, the first sleeve 13 on the first pipe fitting 11 and the second sleeve 14 on the second pipe fitting 12 can be sleeved, in the process of sleeving the first sleeve 13 and the second sleeve 14, if the second groove 141 can be sleeved outside the first groove 131, and the second sleeve 14 can be sleeved outside the first sleeve 13 through the sleeving of the first groove 131 and the second groove 141, it can be determined that the connected first pipe fitting 11 and the second pipe fitting 12 are correctly connected, if the second groove 141 cannot be sleeved outside the first groove 131, and the second sleeve 14 cannot be sleeved outside the first sleeve 13, it can be determined that the first pipe fitting 11 and the second pipe fitting 12 are incorrectly connected.
Further, by providing the first recess 131 on the outer peripheral wall of the first sleeve 13 and the second recess 141 on the outer peripheral wall of the second sleeve 14, the outer space of the first sleeve 13 and the second sleeve 14 occupied by the first recess 131 and the second recess 141 can be reduced, thereby being capable of adapting to the design of a semiconductor device whose space is inherently small.
Alternatively, the radial dimension of the first groove 131 may include the groove width and the groove depth of the first groove 131.
Alternatively, the radial dimension of the second groove 141 may include the groove width and the groove depth of the second groove 141.
However, the first groove 131 of the fool-proof device of the pipeline provided by the embodiment of the present invention is not limited to be provided on the outer peripheral wall of the first sleeve 13, and the second groove 141 is not limited to be provided on the outer peripheral wall of the second sleeve 14, for example, the first groove 131 may be provided on the inner peripheral wall of the first sleeve 13, that is, the first groove 131 is recessed in a direction away from the axis of the first sleeve 13 with respect to the peripheral wall of the first sleeve 13, and the second groove 141 may be provided on the inner peripheral wall of the second sleeve 14, that is, the second groove 141 is recessed in a direction away from the axis of the second sleeve 14 with respect to the peripheral wall of the second sleeve 14. Moreover, the fool-proofing device for a pipeline provided by the embodiment of the present invention is not limited that the inner diameter of the second sleeve 14 is larger than the outer diameter of the first sleeve 13, for example, the inner diameter of the first sleeve 13 may be larger than the outer diameter of the second sleeve 14, in this case, the first groove 131 of the first groove 131 and the second groove 141 that are cooperatively arranged in the radial dimension can be sleeved outside the second groove 141, the first sleeve 13 can be sleeved outside the second sleeve 14 by the first groove 131 and the second groove 141 that are cooperatively arranged in the radial dimension, the first groove 131 and the second groove 141 that are non-cooperatively arranged in the radial dimension cannot be sleeved each other, and the first sleeve 13 cannot be sleeved outside the second sleeve 14 by the first groove 131 and the second groove 141 that are non-cooperatively arranged in the radial dimension.
As shown in fig. 3-6, in a preferred embodiment of the present invention, the inner diameter of the second sleeve 14 is larger than the outer diameter of the first sleeve 13, and a first limit protrusion 132 may be disposed on the outer peripheral wall of the first sleeve 13, wherein the first limit protrusion 132 is annular and disposed along the circumferential direction of the first sleeve 13; the inner peripheral wall of the second sleeve 14 may be provided with a second limit protrusion 142, and the second limit protrusion 142 is annular and is arranged along the circumferential direction of the second sleeve 14; when the second sleeve 14 is sleeved outside the first sleeve 13, the first limit convex portion 132 and the second limit convex portion 142 are clamped and limited in the axial direction of the first sleeve 13 and the second sleeve 14.
In the process of sleeving the second sleeve 14 on the outer side of the first sleeve 13, the first limit protrusion 132 on the outer peripheral wall of the first sleeve 13 enters the inside of the second sleeve 14 and gradually approaches towards the second limit protrusion 142 on the inner peripheral wall of the second sleeve 14, since the first sleeve 13 and the second sleeve 14 can be made of engineering materials with certain elasticity, and the first limit protrusion 132 and the second limit protrusion 142 can also be made of engineering materials with certain elasticity, when the first limit protrusion 132 approaches to be attached to the second limit protrusion 142, by applying opposite force to the first sleeve 13 and the second sleeve 14, the first limit protrusion 132 and the second limit protrusion 142 can be pressed against each other to generate elastic deformation, so that the first limit protrusion 132 can pass through the annular second limit protrusion 142, and after the first limit protrusion 132 passes through the annular second limit protrusion 142, elastic deformation of first spacing convex part 132 and second spacing convex part 142 disappears, resume to the state before the elastic deformation, then make first spacing convex part 132 and the spacing convex part 142 of second can be in the axial of first sleeve 13 and second sleeve 14, and it is spacing in first sleeve 13 and the mutual joint of second sleeve 14 mutual separation direction, thereby it is spacing to first sleeve 13 and second sleeve 14 joint, avoid first sleeve 13 and second sleeve 14 separation to drop, so as to have stronger reliability, and be convenient for subsequent inspection.
However, the fool-proofing device for a pipeline according to the embodiment of the present invention is not limited to the case where the inner diameter of the second sleeve 14 is larger than the outer diameter of the first sleeve 13, and for example, the inner diameter of the first sleeve 13 may be larger than the outer diameter of the second sleeve 14, in which case, the first limit projection 132, which is annular and provided along the circumferential direction of the first sleeve 13, is provided on the inner circumferential wall of the first sleeve 13, and the second limit projection 142, which is annular and provided along the circumferential direction of the second sleeve 14, is provided on the outer circumferential wall of the second sleeve 14.
As shown in fig. 1 and 5, in a preferred embodiment of the present invention, the first pipe 11 may include a first pipe section 111 and a first joint 112, the second pipe 12 may include a second pipe section 121 and a second joint 122, one end of the first pipe section 111 is connected to the first joint 112, one end of the second pipe section 121 is connected to the second joint 122, the first joint 112 and the second joint 122 are detachably connected, the first sleeve 13 may be fitted over the first pipe section 111, the first joint 112 or between the first pipe section 111 and the first joint 112, and the second sleeve 14 may be fitted over the second pipe section 121, the second joint 122 or between the second pipe section 121 and the second joint 122.
The first pipe section 111 can be connected to the second pipe section 121 by connecting the first joint 112 to the second joint 122, and the first pipe section 111 can be detached from the second pipe section 121 by detaching the first joint 112 from the second joint 122, that is, the detachable connection of the first pipe 11 and the second pipe 12 can be achieved by the detachable connection of the first joint 112 and the second joint 122.
Alternatively, the first connector 112 may comprise a first quick connector, the second connector 122 may comprise a second quick connector, and the first quick connector and the second quick connector may be quickly disassembled without tools and only manually by a worker.
As shown in fig. 5 and 7, in a preferred embodiment of the present invention, an end of the first pipe section 111 connected to the first joint 112 may have a step surface 1113 facing the first joint 112, one end of the first sleeve 13 may be provided with a first catching portion 133, the first catching portion 133 may have a ring shape and have a first through hole 1331, and a radial dimension of the first through hole 1331 is greater than a radial dimension of the end of the first pipe section 111 connected to the first joint 112 and is smaller than a radial dimension of the step surface 1113 and a maximum radial dimension of the first joint 112, so that the first catching portion 133 can be caught between the step surface 1113 and the first joint 112 when the first joint 112 is connected to the end of the first pipe section 111.
By providing the first engaging portion 133 at one end of the first sleeve 13, and making the radial dimension of the first through hole 1331 of the first engaging portion 133 larger than the radial dimension of the end portion of the first pipe section 111 connected to the first joint 112, the end portion of the first pipe section 111 connected to the first joint 112 can pass through the first through hole 1331, so that the first sleeve 13 can be sleeved on the end portion of the first pipe section 111 connected to the first joint 112, by making the radial dimension of the first through hole 1331 of the first engaging portion 133 smaller than the radial dimension of the step surface 1113, the step surface 1113 can not pass through the first through hole 1331, so that the step surface 1113 can block the first engaging portion 133 from one side of the first engaging portion 133, and by making the radial dimension of the first through hole 1331 of the first engaging portion 133 smaller than the maximum radial dimension of the first joint 112, the maximum radial portion of the first joint 112 can not pass through the second through hole, so that the biggest radial part of first joint 112 can be followed another face of first joint portion 133 and blockked first joint portion 133, thereby make the biggest radial part of step 1113 and first joint 112 can block first joint portion 133 from the two sides of first joint portion 133 respectively, then make first joint portion 133 when first joint 112 is connected with the one end of first pipeline section 111, can the joint between step 1113 and first joint 112, avoid first sleeve 13 to drop from first pipe fitting 11, and then have stronger reliability.
As shown in fig. 1, 5 and 7, alternatively, an end portion of the first pipe section 111 connected to the first joint 112 includes a first pipe portion 1111 and a second pipe portion 1112, the second pipe portion 1112 is connected to an end of the first pipe portion 1111, the second pipe portion 1112 is connected to the first joint 112, and the first pipe portion 1111 has a radial dimension larger than that of the second pipe portion 1112, so that an end surface of the first pipe portion 1111 connected to the second pipe portion 1112, a portion larger than the second pipe portion 1112 may be a step surface 1113 of the end portion of the first pipe section 111 connected to the first joint 112, and the step surface 1113 may be directed toward the first joint 112.
As shown in fig. 5 and 8, in a preferred embodiment of the present invention, one end of the second sleeve 14 may be provided with a second catching portion 143, and the second catching portion 143 is annular and has a second through hole, and a radial dimension of the second through hole is larger than a radial dimension of the second pipe section 121 and smaller than a maximum radial dimension of the second joint 122, so that the second catching portion 143 can be caught by the second joint 122.
By arranging the second clamping portion 143 at one end of the second sleeve 14, and making the radial dimension of the second through hole of the second clamping portion 143 be greater than the radial dimension of the second pipe section 121, the second pipe section 121 can pass through the second through hole, so that the second sleeve 14 can be sleeved on the second pipe section 121, and by making the radial dimension of the second through hole of the second clamping portion 143 be smaller than the radial dimension of the second joint 122, the maximum radial portion of the second joint 122 can not pass through the second through hole, so that the maximum radial portion of the second joint 122 can block the second clamping portion 143 from one side of the second clamping portion 143, thereby preventing the second sleeve 14 from falling off from one side of the second joint 122, and because the length of the second pipe section 121 is longer, the second sleeve 14 generally cannot fall off from one side of the second pipe section 121, and further has stronger reliability.
In a preferred embodiment of the present invention, the first fool-proof piece and the second fool-proof piece which are cooperatively arranged by the structural features may have the same color features, and the first fool-proof piece and the second fool-proof piece which are not cooperatively arranged by the structural features may have different color features.
Thus, in practical applications, after the first pipe 11 and the second pipe 12 are connected, the color feature of the first fool-proof member on the first pipe 11 and the color feature of the second fool-proof member on the second pipe 12 can be observed first, if the color feature of the first fool-proof member on the first pipe 11 is the same as the color feature of the second fool-proof member on the second pipe 12, the first fool-proof member on the first pipe 11 and the second fool-proof member on the second pipe 12 can be assembled, if the first fool-proof member on the first pipe 11 and the second fool-proof member on the second pipe 12 can be assembled, the first pipe 11 and the second pipe 12 can be judged to be correctly connected, if the color feature of the first fool-proof member on the first pipe 11 is different from the color feature of the second fool-proof member on the second pipe 12, the first pipe 11 and the second pipe 12 can be judged to be incorrectly connected, so that the assembly of the first fool-proof member on the first pipe 11 and the second pipe 12 is not required, just can judge that first pipe fitting 11 and second pipe fitting 12 are the misconnection, then make to judge that the pipeline misconnection is more simple and convenient, improve the efficiency of judging the pipeline misconnection, and then can improve the efficiency that the pipeline correctly connected.
Moreover, after the first pipe fitting 11 and the second pipe fitting 12 are correctly connected, when the connection of the first pipe fitting 11 and the second pipe fitting 12 is checked, the connection of the first pipe fitting 11 and the second pipe fitting 12 can be checked by observing the color characteristics of the first fool-proof piece and the color characteristics of the second fool-proof piece, so that the connection of the first pipe fitting 11 and the second pipe fitting is very convenient to check.
Alternatively, the color feature may comprise a single color or a combination of colors.
Optionally, when the first pipe 11 and the second pipe 12 are made of engineering plastics, the coloring may be performed by adding a color additive.
In a preferred embodiment of the present invention, as shown in fig. 3 and 4, the first fool-proof piece and the second fool-proof piece with the matched structural features may have the same identification feature 15, and the first fool-proof piece and the second fool-proof piece with the un-matched structural features may have different identification features 15.
Thus, in practical applications, after the first pipe 11 and the second pipe 12 are connected, the identification feature 15 of the first fool-proof member on the first pipe 11 and the identification feature 15 of the second fool-proof member on the second pipe 12 can be observed first, if the identification feature 15 of the first fool-proof member on the first pipe 11 is the same as the identification feature 15 of the second fool-proof member on the second pipe 12, the first fool-proof member on the first pipe 11 and the second fool-proof member on the second pipe 12 can be assembled, if the first fool-proof member on the first pipe 11 and the second fool-proof member on the second pipe 12 can be assembled, the first pipe 11 and the second pipe 12 can be judged to be correctly connected, if the identification feature 15 of the first fool-proof member on the first pipe 11 is different from the identification feature 15 of the second fool-proof member on the second pipe 12, the first pipe 11 and the second pipe 12 can be judged to be incorrectly connected, thereby need not to assemble the first fool-proofing piece on the first pipe fitting 11 and the second fool-proofing piece on the second pipe fitting 12, just can judge that first pipe fitting 11 and second pipe fitting 12 are the misconnection, then make the wrong connection of judgement pipeline more simple and convenient, improve the efficiency of judging the wrong connection of pipeline, and then can improve the efficiency that the pipeline correctly connects.
Moreover, after the first pipe fitting 11 and the second pipe fitting 12 are correctly connected, when the connection of the first pipe fitting 11 and the second pipe fitting 12 is checked, the connection of the first pipe fitting 11 and the second pipe fitting 12 can be checked by observing the identification feature 15 of the first fool-proof piece and the identification feature 15 of the second fool-proof piece, so that the connection of the first pipe fitting 11 and the second pipe fitting 12 can be checked very conveniently.
In practical applications, optionally, when the first pipe 11 and the second pipe 12 are connected, the first joint 112 may be connected to one end of the first pipe section 111, the second joint 122 may be connected to one end of the second pipe section 121, and then the first joint 112 and the second joint 122 are connected, and then, by observing the color characteristics of the first fool-proof member on the first pipe 11 and the color characteristics of the second fool-proof member on the second pipe 12, if the color characteristics of the first fool-proof member on the first pipe 11 and the color characteristics of the second fool-proof member on the second pipe 12 are different, the first pipe 11 and the second pipe 12 are connected incorrectly, and the first pipe 11 or the second pipe 12 needs to be replaced, and if the color characteristics of the first fool-proof member on the first pipe 11 and the color characteristics of the second fool-proof member on the second pipe 12 are the same, the feature 15 of the identifier of the first fool-proof member on the first pipe 11 and the feature 15 of the identifier on the second pipe 12 can be observed, if the identification feature 15 of the first fool-proof piece on the first pipe 11 is different from the identification feature 15 of the second fool-proof piece on the second pipe 12, the first pipe 11 and the second pipe 12 are connected incorrectly, and the first pipe 11 or the second pipe 12 needs to be replaced, if the identification feature 15 of the first fool-proof piece on the first pipe 11 is the same as the identification feature 15 of the second fool-proof piece on the second pipe 12, the first fool-proof piece on the first pipe 11 and the second fool-proof piece on the second pipe 12 can be assembled, if the first fool-proof piece on the first pipe 11 and the second fool-proof piece on the second pipe 12 cannot be assembled, the first pipe 11 and the second pipe 12 are connected incorrectly, and the first pipe 11 or the second pipe 12 needs to be replaced, and if the first fool-proof piece on the first pipe 11 and the second fool-proof piece on the second pipe 12 can be assembled, the first pipe 11 and the second pipe 12 are connected correctly, therefore, the fool-proof function is realized for the connection of the pipelines.
As shown in fig. 3 and 4, in a preferred embodiment of the present invention, the identification feature 15 may include a first mark 151 and a second mark 152, the first mark 151 may include a code of a module (e.g., a physical vapor deposition chamber, a chemical vapor deposition chamber, a vertical furnace, a horizontal furnace, etc.) to which the first pipe 11 and the second pipe 12 belong in the semiconductor equipment, and the second mark 152 may include a code of the first pipe 11 and the second pipe 12 in the module.
As shown in fig. 3 and 4, the identifying feature 15 may be identified in the form of an "X-X", where the front "X" may be a first mark 151 and the rear "X" may be a second mark 152.
Alternatively, the second indicia 152 may comprise the code of the first connector 112 and the second connector 122 in the module.
In a preferred embodiment of the present invention, the material of the first fool-proof member and the second fool-proof member may include engineering plastics with at least one of chemical resistance, high temperature resistance and oxidation resistance.
Can make first prevent slow-witted piece and second prevent slow-witted piece and have chemical corrosion resistance, high temperature resistant and anti-oxidation in at least one kind of characteristic like this to can make the application scope of first prevent slow-witted piece and second prevent slow-witted piece great, life is longer, and then make prevent slow-witted function application scope great, life is longer.
Optionally, the engineering plastic comprises polytetrafluoroethylene.
As shown in fig. 9, the embodiment of the present invention further provides a semiconductor device 2, at least one device component of the semiconductor device 2 is communicated with a pipeline 28, and the fool-proof device provided in the embodiment of the present invention is disposed on at least one pipeline 28.
According to the semiconductor device 2 provided by the embodiment of the invention, the fool-proof device provided by the embodiment of the invention is arranged on at least one of the pipelines 28 communicated with the device components, so that the fool-proof function can be realized on the correct connection of the pipelines 28, the reliability of the fool-proof function is strong, the application range is wide, and the service life is long.
As shown in fig. 9, taking a semiconductor vertical furnace as an example for illustration, the apparatus components may include a furnace body 21, a process chamber 22, a support plate 23, a cooling ring 24, an upper fixing ring 25, a lower fixing ring 26 and a process door 27, wherein the process chamber 22 is disposed in the furnace body 21, the furnace body 21 is used for providing a heat source to heat the process chamber 22, the process chamber 22 is used for providing a process environment for a semiconductor process, and the material of the process chamber 22 may be quartz, the support plate 23 is disposed at the bottom of the furnace body 21 and surrounds the process chamber 22 to support the furnace body 21 and fix the process chamber 22 and protect the apparatus components below the process chamber 22, the cooling ring 24 is disposed at the bottom of the support plate 23, the upper fixing ring 25 and the lower fixing ring 26 are respectively disposed at the upper side and the lower side of the bottom of the process chamber 22 and connected to the bottom of the process chamber 22 to fix the process chamber 22, a sealing gasket is arranged between the upper fixing ring 25 and the lower fixing ring 26, and the process door 27 is arranged at the bottom of the process chamber 22 and used for sealing an opening at the bottom of the process chamber 22; at least one of the cooling ring 24, the upper fixing ring 25, the lower fixing ring 26 and the process door 27 is communicated with a pipeline 28, and a fool-proof device is arranged on at least one pipeline 28.
Optionally, the upper fixing ring 25 may be made of metal.
Optionally, the material of the lower fixing ring 26 may be metal.
Alternatively, the process chamber 22 may be made of quartz.
Alternatively, the line 28 may be a cooling line, and the line 28 is used for introducing a cooling liquid into the cooling ring 24 to reduce the heat radiated from the furnace body 21 to the lower equipment component by cooling the cooling ring 24. The upper fixing ring 25 and the lower fixing ring 26 fix the process chamber 22 through bolts, the sealing gasket between the upper fixing ring 25 and the lower fixing ring 26 is used for sealing and protecting quartz of the process chamber 22, the pipeline 28 can be a cooling pipeline, and the pipeline 28 is respectively used for introducing cooling liquid into the upper fixing ring 25 and the lower fixing ring 26 to cool the sealing gasket, so that the sealing gasket is prevented from being heated and melted to influence a semiconductor process. The process door 27 is provided with heat-labile components, and the pipeline 28 may be a cooling pipeline, and the pipeline 28 is used for introducing cooling liquid into the process door 27 to cool the process door 27.
The semiconductor vertical furnace is provided with four pipelines 28, and because the structure of the semiconductor vertical furnace is compact, the requirement on space utilization rate is high, and in order to facilitate the disassembly and the assembly and the maintenance of each pipeline 28, each pipeline 28 can be disassembled into two pipe sections, and eight joints are required for connection, if the fool-proof device provided by the embodiment of the invention is not adopted, the connection error is very easy to occur, and because the fool-proof device of the pipeline provided by the embodiment of the invention has the fool-proof function, the wrong connection of the pipelines 28 can be avoided, and the fool-proof function has strong reliability, a large application range and a long service life.
In summary, the fool-proof device for pipelines and the semiconductor device 2 provided by the embodiment of the invention have the fool-proof function for pipeline connection, thereby avoiding the wrong connection of the pipelines, and the fool-proof function has strong reliability, a large application range and a long service life.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention, and these changes and modifications are to be considered as within the scope of the invention.
Claims (12)
1. A fool-proof device of a pipeline comprises a first pipe fitting and a second pipe fitting which are detachably connected, and is characterized by comprising a first fool-proof piece and a second fool-proof piece, wherein the first fool-proof piece is arranged on the first pipe fitting, and the second fool-proof piece is arranged on the second pipe fitting;
the structural feature of the first fool-proof piece is matched with the structural feature of the second fool-proof piece of the second pipe fitting correspondingly connected with the first pipe fitting, but is not matched with the structural feature of the second fool-proof piece of the second pipe fitting non-correspondingly connected with the first pipe fitting;
structural feature cooperation sets up first prevent slow-witted piece with the second prevents slow-witted piece can assemble, and the non-cooperation of structural feature sets up first prevent slow-witted piece with the second prevents slow-witted unable assembly to through first prevent slow-witted piece with whether the second prevents slow-witted piece can assemble, judge first pipe fitting with whether the second pipe fitting is for corresponding the connection.
2. The fool-proofing device of the pipeline according to claim 1, wherein the first fool-proofing member comprises a first sleeve, the second fool-proofing member comprises a second sleeve, the inner diameter of one of the first sleeve and the second sleeve is larger than the outer diameter of the other one of the first sleeve and the second sleeve, the first sleeve is sleeved on the first pipe, a first groove is arranged on the inner peripheral wall or the outer peripheral wall of the first sleeve, and the extending direction of the first groove is parallel to the axial direction of the first sleeve;
the second sleeve is sleeved on the second pipe fitting, a second groove is formed in the inner peripheral wall or the outer peripheral wall of the second sleeve, and the extending direction of the second groove is parallel to the axial direction of the second sleeve;
the radial dimension of the first groove is matched with the radial dimension of the second groove of the second sleeve of the second pipe fitting correspondingly connected with the first pipe fitting, and is not matched with the radial dimension of the second groove of the second sleeve of the second pipe fitting not correspondingly connected with the first pipe fitting;
the first sleeve and the second sleeve can be arranged through the cooperation of the radial size, the first groove and the second groove are sleeved, and the first groove and the second groove are sleeved and cannot be arranged through the non-cooperation of the radial size.
3. The fool-proofing device for pipelines according to claim 2, wherein the inner diameter of the second sleeve is larger than the outer diameter of the first sleeve, a first limiting convex part is arranged on the outer peripheral wall of the first sleeve, and the first limiting convex part is annular and arranged along the circumferential direction of the first sleeve;
the inner peripheral wall of the second sleeve is provided with a second limiting convex part which is annular and is arranged along the circumferential direction of the second sleeve;
the first limiting convex part and the second limiting convex part are arranged on the outer side of the first sleeve in a sleeved mode, and the first sleeve and the second sleeve are axially clamped and limited mutually.
4. The foolproof device of pipeline of claim 2, wherein said first tubular member comprises a first tubular segment and a first fitting, said second tubular member comprises a second tubular segment and a second fitting, one end of said first tubular segment is connected to said first fitting, one end of said second tubular segment is connected to said second fitting, said first fitting is detachably connected to said second fitting, said first sleeve is sleeved on said first tubular segment, on said first fitting, or between said first tubular segment and said first fitting, said second sleeve is sleeved on said second tubular segment, on said second fitting, or between said second tubular segment and said second fitting.
5. The fool-proofing device for pipelines according to claim 4, wherein one end of the first pipe section connected with the first joint is provided with a step surface facing the first joint, one end of the first sleeve is provided with a first clamping portion, the first clamping portion is annular and is provided with a first through hole, and the radial dimension of the first through hole is larger than that of one end of the first pipe section connected with the first joint and smaller than that of the step surface and the maximum radial dimension of the first joint, so that the first clamping portion can be clamped between the step surface and the first joint when the first joint is connected with one end of the first pipe section.
6. The fool-proofing device of pipeline as claimed in claim 4, wherein one end of said second sleeve is provided with a second clamping portion, said second clamping portion is ring-shaped and has a second through hole, the radial dimension of said second through hole is larger than the radial dimension of the second pipe section and smaller than the maximum radial dimension of said second joint, so that said second clamping portion can be clamped by said second joint.
7. The fool-proofing device of pipeline of claim 1, wherein said first fool-proofing piece and said second fool-proofing piece, whose structural features are cooperatively arranged, have the same color characteristics.
8. The fool-proofing device of pipeline according to claim 1 or 7, characterized in that said first fool-proofing piece and said second fool-proofing piece, which are provided with a matching structural feature, have the same identification feature.
9. The fool-proofing device of a pipeline of claim 8, wherein the identification feature comprises a first mark comprising a code of a module to which the first and second pipes belong and a second mark comprising a code of the first and second pipes in the module.
10. The fool-proofing device of pipeline according to claim 1 or 7, wherein the material of said first and second fool-proofing pieces comprises engineering plastic with at least one of chemical resistance, high temperature resistance and oxidation resistance.
11. A semiconductor device, characterized in that at least one device component of the semiconductor device is connected to a conduit, at least one of the conduits being provided with a foolproof device as defined in any of claims 1-10.
12. The semiconductor device according to claim 11, wherein the device parts comprise a furnace body, a process chamber, a supporting plate, a cooling ring, an upper fixing ring, a lower fixing ring and a process door, wherein the process chamber is disposed in the furnace body, the furnace body is used for providing a heat source to heat the process chamber, the process chamber is used for providing a process environment, the supporting plate is disposed at the bottom of the furnace body and surrounds the process chamber to support the furnace body and fix the process chamber and protect the device parts below the process chamber, the cooling ring is disposed at the bottom of the supporting plate, the upper fixing ring and the lower fixing ring are respectively disposed at the upper side and the lower side of the bottom of the process chamber and connected with the bottom of the process chamber to fix the process chamber, a sealing gasket is arranged between the upper fixing ring and the lower fixing ring, and the process door is arranged at the bottom of the process chamber and used for sealing an opening at the bottom of the process chamber;
at least one of the cooling ring, the upper fixing ring, the lower fixing ring and the process door is communicated with the pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210600483.3A CN115076495A (en) | 2022-05-30 | 2022-05-30 | Pipeline fool-proof device and semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210600483.3A CN115076495A (en) | 2022-05-30 | 2022-05-30 | Pipeline fool-proof device and semiconductor equipment |
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| Publication Number | Publication Date |
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| CN115076495A true CN115076495A (en) | 2022-09-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210600483.3A Pending CN115076495A (en) | 2022-05-30 | 2022-05-30 | Pipeline fool-proof device and semiconductor equipment |
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| CN (1) | CN115076495A (en) |
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