CN115057232A - Clamping device for photomask - Google Patents
Clamping device for photomask Download PDFInfo
- Publication number
- CN115057232A CN115057232A CN202210562897.1A CN202210562897A CN115057232A CN 115057232 A CN115057232 A CN 115057232A CN 202210562897 A CN202210562897 A CN 202210562897A CN 115057232 A CN115057232 A CN 115057232A
- Authority
- CN
- China
- Prior art keywords
- clamping
- plate
- photomask plate
- clamping block
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003780 insertion Methods 0.000 claims description 17
- 230000037431 insertion Effects 0.000 claims description 17
- 230000000712 assembly Effects 0.000 claims description 10
- 238000000429 assembly Methods 0.000 claims description 10
- 239000011521 glass Substances 0.000 abstract description 11
- 230000003287 optical effect Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 229930040373 Paraformaldehyde Natural products 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- -1 Polyoxymethylene Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The invention discloses a clamping device for a photomask plate, which is used for clamping the photomask plate and comprises: the clamping block is used for clamping the side edge of the photomask plate; the locking piece acts on the clamping block so that the clamping block clamps the photomask plate. The clamping blocks are used for clamping the photomask plate, and the locking pieces are used for acting on the clamping blocks, so that the photomask plate is clamped by the clamping blocks, the photomask plate can be prevented from accidentally sliding down, and the photomask plate is prevented from being broken and scrapped. The operating personnel can avoid both hands to directly contact the photomask plate by clamping the device through the photomask plate, thereby avoiding the photomask plate from leaving fingerprints, avoiding causing the glass pollution of the photomask plate and also avoiding the glass of the photomask plate from hurting the hands of the operating personnel.
Description
Technical Field
The invention relates to the field of electronic equipment manufacturing, in particular to a light shield clamping device.
Background
Flat Panel Displays (FPDs) and Touch Screens (TPs) are important electronic components. In the manufacture of flat panel displays and touch screens, there is typically an exposure station. The exposure station is provided with a photomask plate. Reticle plates are often subject to replacement, turnaround, or movement. The operator can directly grasp both ends of the reticle glass with both hands and then operate the reticle. During the operation, the operator is very likely to hurt hands. Meanwhile, the hands of the operator are easy to leave fingerprints at the two ends of the photomask plate, and the fingerprints can cause pollution of the glass plate of the photomask plate. In addition, the operator directly takes off the photomask plate with both hands, which easily causes the photomask plate to slide off, and the photomask plate has the risk of being broken and scrapped.
Disclosure of Invention
The invention aims to overcome the defect that an operator directly grasps a photomask plate by two hands in the prior art and the photomask plate is easy to slip, and provides a photomask plate clamping device.
The invention solves the technical problems through the following technical scheme:
a light cover plate clamping device is used for clamping a light cover plate, and comprises:
the clamping block is used for clamping the side edge of the photomask plate;
the retaining member acts on the clamping block so that the clamping block can clamp the photomask plate.
In this scheme, through structure more than adopting, utilize the clamp splice to clip the light shield version to utilize retaining member effect clamp splice, thereby make the clamp splice clip the light shield version, can avoid the unexpected landing of light shield version, and then avoid the light shield version to break into pieces and scrap. The operating personnel can avoid both hands to directly contact the photomask plate by clamping the device through the photomask plate, thereby avoiding the photomask plate from leaving fingerprints, avoiding causing the glass pollution of the photomask plate and also avoiding the glass of the photomask plate from hurting the hands of the operating personnel.
Preferably, the clamp splice includes two clamping pieces that relative interval set up, two form the storage tank between the clamping piece, the side of light cover version is inserted and is located the storage tank, the retaining member acts on the clamping piece, so that two the clamping piece is carried the light cover version.
In this scheme, through structure more than adopting, utilize two clamping pieces to carry the light cover version to it is fixed to utilize the retaining member, simple structure, convenient to use.
Preferably, the retaining member is arranged in two through holes of the clamping pieces, and the retaining member is used for adjusting the distance between the two clamping pieces so that the clamping pieces clamp or loosen the photomask plate.
In this scheme, through structure more than adopting, the retaining member is through the distance between two clamping pieces of adjustment for the effort that the clamping piece was applyed to the light shield version changes, thereby can clip or loosen the light shield version, and the device is got to the operation light shield version clamp of being convenient for.
Preferably, the distance between the inserting position of the locking member and the end of the clamping piece is L, the depth of the accommodating groove is H, and the ratio of L to H ranges from 1/3 to 3/5.
In this scheme, through adopting above structure, the scope of the ratio of L and H sets up to 1/3-3/5 for the distance between the retaining member can nimble, quick adjustment clamping piece, can guarantee again that sufficient area of contact has between clamping piece and the light cover version, can improve the stability of light cover version.
Preferably, the clamping piece is provided with a groove which is inwards sunken from the outer side surface of the clamping piece;
and/or the ratio between the depth of the groove and the thickness of the clip ranges from 1/2 to 4/5;
and/or the distance between the groove and the bottom of the containing groove is A, the depth of the containing groove is H, and the range of the ratio of A to H is 1/6-1/4.
In this scheme, through adopting above structure, the clamping piece can swing relative to the recess to adjust the distance between two clamping pieces in a flexible way.
The ratio of the depth of the groove to the thickness of the clamping piece is set to be 1/2-4/5, so that the clamping piece can be prevented from being broken at the groove, and the power for driving the clamping piece to swing can be reduced.
The ratio of a to H is set in the range of 1/6-1/4 so that the distance between the jaws is not too large or too small during the swinging of the two jaws. In other words, the clip can be made to have an appropriate swing range.
Preferably, the light shield plate clamping device further comprises an anti-slip piece, the anti-slip piece is arranged between the clamping piece and the clamping block, and the anti-slip piece is attached to the inner side surface of the clamping piece.
In this scheme, through adopting above structure, the antiskid piece can improve the stability and the reliability that the clamp splice cliied the light shield version, can avoid the unexpected landing of light shield version, also can avoid the clamping piece to too big effort that the light shield version was applyed, causes the light shield version to break.
Preferably, the length of the anti-slip piece along the depth direction of the accommodating groove is B, the depth of the accommodating groove is H, and the ratio of B to H ranges from 1/5 to 1/4;
and/or the length of the anti-skid piece along the depth direction of the accommodating groove is not more than 40 mm.
In the scheme, by adopting the structure, the range of the ratio of B to H is set to be 1/5-1/4, so that the phenomenon that the anti-skidding piece is too large and the engraving pattern part in the photomask plate is easily pressed by the too-large anti-skidding piece can be avoided; and the situation that the anti-skid piece is too small to provide enough friction force can be avoided, and the light shield plate is easy to drop accidentally.
The length of the anti-skid piece along the depth direction of the accommodating groove is not more than 40mm, and the anti-skid piece cannot press the engraving pattern part in the photomask plate.
Preferably, the light shield plate clamping and taking device further comprises a holding piece, wherein the holding piece penetrates through the clamping block, and the clamping block is moved through the holding piece.
In this scheme, through adopting above structure, remove the clamp splice through the gripping member, convenient operation.
Preferably, the clamping block is provided with an insertion hole, and the holding piece penetrates through the clamping block through the insertion hole;
and/or the cross section of the jack is one of a triangle, a quadrangle or a pentagon, and the outer side surface of the holding piece is attached to the inner side surface of the jack;
and/or the distance between the center of the insertion hole and the inner side surfaces of the two clamping pieces of the clamping block is equal.
In this scheme, through structure more than adopting, the grip wears to locate the clamp splice through the jack, the installation grip of being convenient for.
The cross section of jack is one kind of triangle-shaped, quadrangle or pentagon, and the lateral surface of gripping member laminates mutually with the medial surface of jack, can avoid the gripping member to rotate for the clamp splice.
The distance between the center of the jack and the inner side surfaces of the two clamping pieces of the clamping block is equal, so that the photomask plate is symmetrically distributed relative to the center of the jack, and the photomask plate can be more stable in moving.
Preferably, the clamping assembly is composed of one clamping block and one locking member, the optical mask plate clamping device comprises a plurality of clamping assemblies, the holding member penetrates through the clamping assemblies, and the plurality of clamping assemblies are arranged at intervals.
In this scheme, through adopting above structure, the light shield version is got a plurality of clamps of device and is got the subassembly and can carry the light shield version at the interval to can further improve the stability and the reliability of centre gripping light shield version, avoid the light shield version to drop by accident.
On the basis of the common knowledge in the field, the above preferred conditions can be combined randomly to obtain the preferred embodiments of the invention.
The positive progress effects of the invention are as follows:
the clamping blocks are used for clamping the photomask plate, and the locking pieces are used for acting on the clamping blocks, so that the clamping blocks clamp the photomask plate, the photomask plate can be prevented from accidentally sliding down, and the photomask plate is prevented from being broken and scrapped. The operating personnel can avoid both hands to directly contact the photomask plate by clamping the device through the photomask plate, thereby avoiding the photomask plate from leaving fingerprints, avoiding causing the glass pollution of the photomask plate and also avoiding the glass of the photomask plate from hurting the hands of the operating personnel.
Drawings
Fig. 1 is a schematic structural view of a reticle clamping device clamping a reticle according to an embodiment of the present invention.
Fig. 2 is a schematic side view of a part of the reticle clamping device of fig. 1.
Fig. 3 is a schematic side view of a clamping block assembly in the reticle clamping apparatus of fig. 1.
Description of reference numerals:
Clamping block 20
Clamping piece 21
Fixing hole 25
Retaining member 30
Detailed Description
The present invention will be more clearly and completely described below by way of examples in conjunction with the accompanying drawings, but the present invention is not limited thereto.
As shown in fig. 1 to 3, the present embodiment is a reticle clamping device 100 for clamping a reticle plate 90, the reticle clamping device 100 comprising: the clamping block 20 and the locking member 30, wherein the clamping block 20 is used for clamping the side edge of the photomask plate 90; retaining member 30 acts on clamp blocks 20 to cause clamp blocks 20 to clamp reticle plate 90. The clamping blocks 20 are used for clamping the photomask plate, and the locking pieces 30 are used for acting on the clamping blocks 20, so that the photomask plate is clamped by the clamping blocks 20, the photomask plate can be prevented from accidentally sliding down, and the photomask plate is prevented from being broken and scrapped. The operating personnel can avoid both hands to directly contact the photomask plate by clamping the device 100 through the photomask plate, thereby avoiding the photomask plate from leaving fingerprints, avoiding causing the glass pollution of the photomask plate and also avoiding the glass of the photomask plate from hurting the hands of the operating personnel.
In other embodiments, reticle 90 may also be other components, such as plates, sheets, strips, and the like, and specifically may be glass plates, steel plates, and the like.
As an embodiment, the weight of the reticle plate 90 that can be stably clamped by the reticle plate clamping device 100 may reach 13kg, the size of the reticle plate 90 may reach 700mm by 800mm, and the thickness may reach 7.8 to 8.0 mm. The reticle 90 may also have dimensions of 455mm 550mm and a thickness in the range of 4.8mm to 5 mm. The mask plate 90 is heavy and large in size, and the common clamping method is difficult to apply.
As shown in fig. 2, the clamping block 20 includes two clamping pieces 21 disposed at an interval, a receiving groove 22 is formed between the two clamping pieces 21, a side of the mask plate 90 is inserted into the receiving groove 22, and the locking member 30 acts on the clamping pieces 21 to enable the two clamping pieces 21 to clamp the mask plate 90. The two clamping pieces 21 are used for clamping the photomask plate 90 and are fixed by the locking piece 30, the structure is simple, and the use is convenient.
The locking member 30 is disposed through the two clamping members 21, and the locking member 30 is used for adjusting a distance between the two clamping members 21, so that the clamping members 21 clamp or release the mask plate 90. The locking member 30 changes the acting force applied by the clamping pieces 21 to the photomask plate 90 by adjusting the distance between the two clamping pieces 21, so that the photomask plate 90 can be clamped or loosened, and the photomask plate clamping device 100 can be operated conveniently.
The distance between the inserting position of the locking member 30 and the end portion of the clamping piece 21 is L, the depth of the accommodating groove 22 is H, and the ratio of L to H ranges from 1/3 to 3/5. The range of the ratio of L to H is set to 1/3-3/5, so that the locking member 30 can flexibly and rapidly adjust the distance between the clamping pieces 21, and can ensure that the clamping pieces 21 and the photomask plate 90 have enough contact area, thereby improving the stability of the photomask plate 90.
As an embodiment, the cross-section of the receiving groove 22 may be shaped as a U-shaped groove. In other embodiments, the shape of the receiving groove 22 may be other shapes.
In this embodiment, the locking member 30 may be a bolt, one of the clamping pieces 21 is provided with a through hole, the other clamping piece 21 is provided with a threaded hole, the bolt penetrates through the two clamping pieces 21 through the through hole and the threaded hole, and the distance between the clamping pieces 21 can be adjusted by turning the bolt. The end part of the bolt can be further provided with a nut, and the nut can further avoid the accidental falling of the bolt.
In other embodiments, the locking member 30 may be a tension spring, a clamp, or the like, and the tension spring and the clamp can adjust the distance between the two clamping pieces 21 by applying force to the clamping pieces 21.
The clamping piece 21 is provided with a groove 23, and the groove 23 is inwards sunken from the outer side surface of the clamping piece 21; the clamping pieces 21 can swing relative to the grooves 23, so that the distance between the two clamping pieces 21 can be flexibly adjusted.
The ratio of the depth of the groove 23 to the thickness of the clip 21 ranges from 1/2 to 4/5; the ratio of the depth of the groove 23 to the thickness of the clamping piece 21 is set to be 1/2-4/5, so that the clamping piece 21 can be prevented from being broken at the groove 23, and the power for driving the clamping piece 21 to swing can be reduced.
The distance between the groove 23 and the bottom of the accommodating groove 22 is A, the depth of the accommodating groove 22 is H, and the ratio of A to H ranges from 1/6 to 1/4. The ratio of a to H is set in the range of 1/6-1/4 so that the distance between the jaws 21 is not too large or too small during the swinging of the jaws 21. In other words, clip 21 can be made to have an appropriate swing range.
In this embodiment, a groove 23 is formed on the outer side surface of one clip 21. In other embodiments, a plurality of grooves 23 may be further disposed on the outer side surface of one clip 21, and the depth of the plurality of grooves 23 may be different. Along the direction of inserting the mask plate 90 into the receiving groove 22, the depth of the plurality of grooves 23 may gradually increase, may also gradually decrease, or may first increase and then decrease.
In a specific embodiment, the clamping block 20 may be a rectangular block as a whole, and the clamping piece 21 may be a rectangular block. The material of the clamping block 20 may be a soft metal, such as copper and copper alloy. The clamp block 20 may also be made of hard metal, such as spring steel 65Mn, and the surface of the clamp block 20 may be heat treated, and the treated surface hardness may be HRC 35-45.
The light cover clamping device 100 further comprises an anti-slip member 11, the anti-slip member 11 is arranged between the clamping piece 21 and the clamping block 20, and the anti-slip member 11 is attached to the inner side surface of the clamping piece 21. The anti-slip piece 11 can improve the stability and reliability of the clamping block 20 for clamping the photomask plate 90, can prevent the photomask plate 90 from accidentally slipping, and can also prevent the photomask plate 90 from being cracked due to overlarge acting force applied to the photomask plate 90 by the clamping piece 21.
The length of the anti-skid piece 11 along the depth direction of the accommodating groove 22 is B, the depth of the accommodating groove 22 is H, and the ratio of B to H ranges from 1/5 to 1/4; the range of the ratio of B to H is set to be 1/5-1/4, so that the phenomenon that the anti-skidding piece 11 is too large and the excessively large anti-skidding piece 11 is easy to press the engraving pattern part in the photomask plate can be avoided; the situation that the anti-slip piece 11 is too small and the anti-slip piece 11 with the too small size is difficult to provide enough friction force, so that the photomask plate is easy to fall off accidentally can be avoided.
The length of the anti-skid member 11 along the depth direction of the accommodating groove 22 is not more than 40 mm. The length of the anti-skid piece 11 along the depth direction of the accommodating groove 22 is not more than 40mm, and the anti-skid piece 11 cannot press the engraving pattern part in the photomask plate.
As an embodiment, the anti-slip means 11 may be embodied as a rectangular plate. The material of the anti-slip member 11 may be rubber, silica gel, or Polyoxymethylene (POM).
The device 100 for clamping and taking the photomask plate further comprises a holding part 12, wherein the holding part 12 penetrates through the clamping block 20, and the clamping block 20 is moved through the holding part 12. The clamping block 20 is moved by the holding part 12, and the operation is convenient.
The clamping block 20 is provided with an insertion hole 24, and the holding piece 12 penetrates through the clamping block 20 through the insertion hole 24; the holding member 12 is inserted through the insertion hole 24 of the clamping block 20 to facilitate installation of the holding member 12.
The cross section of the insertion hole 24 is triangular, quadrangular or pentagonal, and the outer side surface of the holding piece 12 is attached to the inner side surface of the insertion hole 24; the cross section of the insertion hole 24 is triangular, quadrangular or pentagonal, the outer side surface of the holding piece 12 is attached to the inner side surface of the insertion hole 24, and the holding piece 12 can be prevented from rotating relative to the clamping block 20.
The center of the insertion hole 24 is equidistant from the inner side surfaces of the two clamping pieces 21 of the clamping block 20. The distance between the center of the insertion hole 24 and the inner side surfaces of the two clamping pieces 21 of the clamping block 20 is equal, so that the mask plates 90 are symmetrically distributed relative to the center of the insertion hole 24, and the mask plates 90 can be more stable in movement.
After the holding member 12 is inserted into the insertion hole 24 of the clamping block 20, the holding member can be further fixed by screws through the fixing holes 25, so that the clamping block 20 is prevented from sliding on the holding member 12.
As an embodiment, the holding member 12 may be a holding rod, and the holding rod is disposed through the insertion hole 24. The two ends of the holding rod can be provided with grains which can improve the holding friction. The material of the holding rod can be aluminum alloy or stainless steel. In other embodiments, the grip 12 may have other configurations, such as a chain, a cord, etc. connected to the clamp block 20.
The clamping assembly 13 is composed of a clamping block 20 and a locking member 30, the optical mask clamp taking device 100 comprises a plurality of clamping assemblies 13, the holding member 12 penetrates through the clamping assemblies 13, and the plurality of clamping assemblies 13 are arranged at intervals. The plurality of clamping components 13 of the optical mask plate clamping device 100 can clamp the optical mask plate 90 at intervals, so that the stability and reliability of clamping the optical mask plate 90 can be further improved, and the optical mask plate 90 is prevented from falling off accidentally. In this embodiment, one reticle plate clamping device 100 may include 4 clamping assemblies 13, and the 4 clamping assemblies 13 are spaced apart from each other on one side of the reticle plate 90.
As an embodiment, the mask plate 90 is specifically a mask plate, and the clamping blocks 20 may be first clamped on the side edges of the mask plate, and the depth of the mask plate penetrating into the accommodating groove 22 does not exceed the length B of the anti-slip member 11 along the depth direction of the accommodating groove 22. The plurality of blocks 20 are arranged at intervals. The locking member 30 may be a bolt, and the bolt is inserted through the two opposite clamping pieces 21 and tightened to reduce the distance between the two clamping pieces 21, so that the clamping pieces 21 press the mask plate through the anti-slip member 11. The holding member 12 may be a holding rod, and the movement of the mask plate is realized by holding both ends of the holding rod.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that this is by way of example only, and that the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the spirit and scope of the invention, and these changes and modifications are within the scope of the invention.
Claims (10)
1. The utility model provides a light cover version presss from both sides gets device for press from both sides light cover version, its characterized in that, light cover version presss from both sides gets the device and includes:
the clamping block is used for clamping the side edge of the photomask plate;
the retaining member acts on the clamping block so that the clamping block can clamp the photomask plate.
2. The apparatus as claimed in claim 1, wherein the clamping block comprises two clamping pieces spaced apart from each other, a receiving slot is formed between the two clamping pieces, the side of the reticle is inserted into the receiving slot, and the locking member acts on the clamping pieces to clamp the reticle.
3. The device for clamping and taking out a photomask plate according to claim 2, wherein the locking member penetrates through the two clamping pieces, and the locking member is used for adjusting the distance between the two clamping pieces so that the clamping pieces clamp or loosen the photomask plate.
4. The device for clipping/taking out photomask blank of claim 3, wherein the distance between the inserting position of the locking member and the end of the clip is L, the depth of the receiving groove is H, and the ratio of L to H is 1/3-3/5.
5. The reticle plate clamping device according to claim 2, wherein the clip is provided with a groove which is recessed from an outer side surface of the clip;
and/or the ratio between the depth of the groove and the thickness of the clip ranges from 1/2 to 4/5;
and/or the distance between the groove and the bottom of the containing groove is A, the depth of the containing groove edge is H, and the range of the ratio of A to H is 1/6-1/4.
6. The reticle stage clamping device according to claim 2, further comprising an anti-slip member, wherein the anti-slip member is disposed between the clamping piece and the clamping block, and the anti-slip member is attached to an inner side surface of the clamping piece.
7. The reticle plate clamping device according to claim 6, wherein the length of the anti-slip member in the depth direction of the accommodating groove is B, the depth of the accommodating groove is H, and the ratio of B to H is in the range of 1/5-1/4;
and/or the length of the anti-skid piece along the depth direction of the accommodating groove is not more than 40 mm.
8. The apparatus of any one of claims 1-7, further comprising a holder, the holder being disposed through the clamping block, the holder moving the clamping block.
9. The apparatus as claimed in claim 8, wherein the clamping block has an insertion hole through which the holder passes;
and/or the cross section of the jack is one of a triangle, a quadrangle or a pentagon, and the outer side surface of the holding piece is attached to the inner side surface of the jack;
and/or the distance between the center of the insertion hole and the inner side surfaces of the two clamping pieces of the clamping block is equal.
10. The apparatus of claim 8, wherein the clamping assembly comprises a clamping block and a locking member, the clamping assembly comprises a plurality of clamping assemblies, the holding member is disposed through the clamping assembly, and the plurality of clamping assemblies are spaced apart from each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210562897.1A CN115057232A (en) | 2022-05-23 | 2022-05-23 | Clamping device for photomask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210562897.1A CN115057232A (en) | 2022-05-23 | 2022-05-23 | Clamping device for photomask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115057232A true CN115057232A (en) | 2022-09-16 |
Family
ID=83198575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210562897.1A Pending CN115057232A (en) | 2022-05-23 | 2022-05-23 | Clamping device for photomask |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115057232A (en) |
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| CN213201080U (en) * | 2020-08-19 | 2021-05-14 | 宿迁市创元装饰材料有限公司 | Plywood transport auxiliary device |
| CN213567922U (en) * | 2020-09-16 | 2021-06-29 | 中国一冶集团有限公司 | Steel plate portable clamp |
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Application publication date: 20220916 |