CN115032165A - Photoacoustic spectroscopy insulating oil dissolved gas detection system based on MEMS technology - Google Patents
Photoacoustic spectroscopy insulating oil dissolved gas detection system based on MEMS technology Download PDFInfo
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- CN115032165A CN115032165A CN202210504605.9A CN202210504605A CN115032165A CN 115032165 A CN115032165 A CN 115032165A CN 202210504605 A CN202210504605 A CN 202210504605A CN 115032165 A CN115032165 A CN 115032165A
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- gas
- photoacoustic
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- 238000004867 photoacoustic spectroscopy Methods 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 238000005516 engineering process Methods 0.000 title claims abstract description 25
- 239000007789 gas Substances 0.000 claims abstract description 125
- 238000004868 gas analysis Methods 0.000 claims abstract description 22
- 238000000926 separation method Methods 0.000 claims abstract description 20
- 238000005070 sampling Methods 0.000 claims abstract description 19
- 238000012544 monitoring process Methods 0.000 claims abstract description 18
- 238000010521 absorption reaction Methods 0.000 claims abstract description 15
- 238000004817 gas chromatography Methods 0.000 claims abstract description 14
- 238000012360 testing method Methods 0.000 claims abstract description 11
- 230000005855 radiation Effects 0.000 claims abstract description 10
- 230000035945 sensitivity Effects 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 42
- 238000007872 degassing Methods 0.000 claims description 13
- 238000004458 analytical method Methods 0.000 claims description 10
- 238000011160 research Methods 0.000 claims description 9
- 230000000737 periodic effect Effects 0.000 claims description 8
- 238000004090 dissolution Methods 0.000 claims description 7
- 238000002474 experimental method Methods 0.000 claims description 7
- 238000004445 quantitative analysis Methods 0.000 claims description 7
- 238000001228 spectrum Methods 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 3
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 claims description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 3
- 239000005977 Ethylene Substances 0.000 claims description 3
- 238000000862 absorption spectrum Methods 0.000 claims description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 3
- 238000013461 design Methods 0.000 claims description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000011835 investigation Methods 0.000 claims description 3
- 238000001834 photoacoustic spectrum Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 8
- 239000012159 carrier gas Substances 0.000 abstract description 8
- 238000012423 maintenance Methods 0.000 abstract description 7
- 238000003745 diagnosis Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 230000003449 preventive effect Effects 0.000 abstract description 2
- 239000003921 oil Substances 0.000 description 54
- 239000010408 film Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
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- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
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- 239000012466 permeate Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
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- 239000010959 steel Substances 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
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- 230000006872 improvement Effects 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 239000010729 system oil Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210504605.9A CN115032165A (en) | 2022-05-10 | 2022-05-10 | Photoacoustic spectroscopy insulating oil dissolved gas detection system based on MEMS technology |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210504605.9A CN115032165A (en) | 2022-05-10 | 2022-05-10 | Photoacoustic spectroscopy insulating oil dissolved gas detection system based on MEMS technology |
Publications (1)
Publication Number | Publication Date |
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CN115032165A true CN115032165A (en) | 2022-09-09 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210504605.9A Pending CN115032165A (en) | 2022-05-10 | 2022-05-10 | Photoacoustic spectroscopy insulating oil dissolved gas detection system based on MEMS technology |
Country Status (1)
Country | Link |
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CN (1) | CN115032165A (en) |
-
2022
- 2022-05-10 CN CN202210504605.9A patent/CN115032165A/en active Pending
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20230324 Address after: 510006 Wushan Road, Tianhe District, Guangzhou City, Guangdong Province Applicant after: SOUTH CHINA University OF TECHNOLOGY Applicant after: NANJING CLEVER INTELLIGENT TECHNOLOGY CO.,LTD. Address before: 210000 rooms 306 and 307, floor 3, building A3, Hongfeng Science Park, Kechuang Road, Nanjing Economic and Technological Development Zone, Nanjing, Jiangsu Province Applicant before: NANJING CLEVER INTELLIGENT TECHNOLOGY CO.,LTD. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20240322 Address after: 210000 rooms 306 and 307, floor 3, building A3, Hongfeng Science Park, Kechuang Road, Nanjing Economic and Technological Development Zone, Jiangsu Province Applicant after: NANJING CLEVER INTELLIGENT TECHNOLOGY CO.,LTD. Country or region after: China Address before: 510006 Wushan Road, Tianhe District, Guangzhou City, Guangdong Province Applicant before: SOUTH CHINA University OF TECHNOLOGY Country or region before: China Applicant before: NANJING CLEVER INTELLIGENT TECHNOLOGY CO.,LTD. |
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TA01 | Transfer of patent application right |