Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a method for assembling a quadrupole mass analyzer, which can accurately control the assembling position of a quadrupole and can ensure that the field-diameter ratio is within a desired range.
In order to overcome the defects of the prior art, the invention also aims to provide a quadrupole mass analyzer assembling device which can accurately control the assembling position of the quadrupole and can ensure that the field-diameter ratio is within a desired range.
One of the purposes of the invention is realized by adopting the following technical scheme:
a quadrupole mass analyser assembly method comprising the steps of:
device construction: fixing four limiting seats to a rack, installing an elastic limiting structure in each limiting seat, fixing a mandrel to the rack, surrounding the mandrel by the four limiting seats and being symmetrical relative to the mandrel, and installing an adjusting piece on each limiting seat;
pre-placing an electrode rod: uniformly placing four electrode rods around the mandrel, wherein each electrode rod is abutted against the elastic limiting structure of the corresponding limiting seat;
measuring and adjusting the position of an electrode rod: measuring the position of each electrode rod through an instrument, and adjusting the position of each electrode rod through the adjusting piece to enable the position precision of each electrode rod to meet the assembly requirement;
installing a ceramic ring: respectively installing two ceramic rings at two ends of four electrode rods, and enabling the mandrel and the four electrode rods to extend into the ceramic rings;
fixing the ceramic ring: fixing the ceramic ring and the four electrode rods;
disassembling the device: and the four limiting seats are removed along the radial direction of the quadrupole rods, and the ceramic ring and the four electrode rods are pulled down from the mandrel.
Further, in the ceramic ring fixing step, the inner diameter of the ceramic ring is slightly larger than the circumscribed circles of the four electrode rods, and glue is filled in gaps between the electrode rods and the ceramic ring for fixing.
Further, in the ceramic ring fixing step, a fixing column is installed on the ceramic ring and fixed with the electrode rod.
Further, in the electrode rod pre-placing step, the electrode rod is abutted against a pressing plate of an elastic limiting structure, and an elastic piece of the elastic limiting structure applies elasticity to the pressing plate to enable the position of the electrode rod to be adjusted.
Furthermore, in the device building step, the number of the elastic limiting structures in each limiting seat is two, and the elastic directions of the two elastic limiting structures are vertical.
The second purpose of the invention is realized by adopting the following technical scheme:
the utility model provides a quadrupole rod mass analyzer assembly quality, includes a plurality of spacing seats, mandrel, a plurality of elasticity limit structure and a plurality of regulating part, and is a plurality of spacing seat and the mandrel is fixed in the frame, and is a plurality of spacing seat encircles the mandrel is relative the mandrel symmetry, each an at least elasticity limit structure of installation in the spacing seat, elasticity limit structure includes elastic component and clamp plate, the elastic component both ends respectively with the elastic component and the clamp plate is contradicted, the elastic component to the clamp plate provides elasticity and makes the clamp plate supports the electrode pole and presses on the mandrel, the regulating part install in spacing seat, the regulating part is contradicted the position of electrode pole in order to adjust the electrode pole.
Furthermore, each of the limiting seats comprises a first side plate, a second side plate and a third side plate, the first side plate, the second side plate and the third side plate enclose an accommodating space with an opening, the opening faces the mandrel, and the electrode rod part is located in the accommodating space and abuts against the mandrel.
Furthermore, the first side plate is parallel to the third side plate, two ends of the second side plate are respectively connected with the first side plate and the third side plate, the second side plate is perpendicular to the first side plate, the first side plate and the second side plate are respectively provided with an elastic limiting structure, and two pressing plates of the elastic limiting structures are mutually perpendicular.
Further, the adjusting part is a screw, the screw is rotatably installed on the third side plate and is abutted against the electrode rod, and the screw rotates relative to the third side plate to adjust the position of the electrode rod.
Further, quadrupole rod mass analysis ware assembly quality still includes the touch panel, the touch panel install in the screw tip, the screw passes through the touch panel is contradicted with the electrode pole.
Compared with the prior art, the assembling method of the quadrupole rod mass analyzer has the following beneficial effects:
(1) the quadrupole mass analyzer assembly method enables the quadrupole field circle accuracy to be completely dependent on the mandrel machining accuracy, and reduces the size chain. And the mandrel is shorter than the electrode rod, the material selection range is wide, the processing difficulty is low, and the submicron grade is easy to realize.
(2) The assembly process difficulty is reduced, and the position adjustment of the electrode rod in the process is simpler. The traditional quadrupole rod still needs to infer the direction that the ceramic ring ground according to the distance data after the pole interval has been measured to the ceramic ring is for artifical the repairment and is ground, and the precision of dysmorphism curved surface is extremely difficult to control, and the technology degree of difficulty is high. In the assembly method provided by the patent, because each electrode rod is tightly attached to the outer surface of the mandrel, the freedom of movement is reduced, and variable parameters only have angles. The adjustment of single parameter only needs an adjusting screw to realize, and is simple and accurate.
(3) The field diameter ratio of the quadrupole rods is controlled more accurately, the tolerance zone of the diameters of the electrode rod groups is widened, the process difficulty is reduced, and the yield is improved. Traditional quadrupole pole is because need constantly measure the size and repair and grind ceramic ring until the assembly precision is up to standard, and the in-process is difficult to control with ceramic internal diameter easily, leads to quadrupole pole circumscribed circle radius R not easy to control. The processing of pole rod needs to guarantee cylindricity, and the rod diameter r is also difficult to control accurately. And field circle radius r 0 Coupled with their two parameters, r 0 Overall, R-2R makes the field-to-diameter ratio poorly controllable. The method can decouple two parameters of the radius of the field circle, the diameter of the rod and the diameter of the circumscribed circle of the quadrupole rod, and is oneThe constant value depends only on the diameter of the mandrel.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present, secured by intervening elements. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly disposed on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Fig. 1 to 4 are schematic views illustrating an assembling method of a quadrupole mass analyzer, the assembling method including
A quadrupole mass analyser assembly method comprising the steps of:
device construction: fixing four limiting seats 10 on a rack, wherein an elastic limiting structure 20 is installed in each limiting seat 10, a mandrel 50 is fixed on the rack, the four limiting seats 10 surround the mandrel 50 and are symmetrical relative to the mandrel 50, and an adjusting piece 30 is installed on each limiting seat 10;
electrode rod 200 pre-placement: the four electrode rods 200 are uniformly arranged around the mandrel 50, and each electrode rod 200 is abutted against the elastic limiting structure 20 of the corresponding limiting seat 10;
electrode rod 200 position measurement and adjustment: the position of each electrode rod 200 is measured by an instrument, and the position of the electrode rod 200 is adjusted by the adjusting piece 30 so that the position precision of the electrode rod 200 meets the assembly requirement;
mounting the ceramic ring 300: respectively installing two ceramic rings 300 at two ends of the four electrode rods 200, and extending the mandrel 50 and the four electrode rods 200 into the ceramic rings 300;
fixing the ceramic ring 300: the ceramic ring 300 is fixed with the four electrode rods 200;
disassembling the device: the four stoppers 10 are removed in the radial direction, and the ceramic rings 300 and the four electrode rods 200 are withdrawn from the mandrel 50.
Specifically, in the step of fixing the ceramic ring 300, the inner diameter of the ceramic ring 300 is slightly larger than the circumscribed circles of the four electrode rods 200, and the gap between the electrode rods 200 and the ceramic ring 300 is filled with glue for fixation. The glue is epoxy resin glue. The other fixing mode is as follows: in the ceramic ring 300 fixing step, the fixing posts 400 are mounted on the ceramic ring 300 and fixed with the electrode rod 200. At the electrode rod 200In the pre-placing step, the electrode rod 200 abuts against the pressing plate 22 of the elastic limiting structure 20, and the elastic member 21 of the elastic limiting structure 20 applies an elastic force to the pressing plate 22 to adjust the position of the electrode rod 200. In the device building step, the number of the elastic limiting structures 20 in each limiting seat 10 is two, and the elastic directions of the two elastic limiting structures 20 are perpendicular. The mandrel 50 is strictly cylindrical and requires precise dimensional accuracy and shape accuracy, and the dimensions are designed according to the diameter of the electrode rod 200, such as the commonly used rod diameter of 9.4mm and 12mm, according to the field diameter ratio r/r 0 The corresponding mandrel 50 diameter should be designed 8.326mm, 10.629mm for an 1.129 design. The applicable electrode rods 200 have diameters ranging from 9.392-9.408 and 11.990-12.010, and the processing tolerance zones of the two electrode rods 200 can be set to 16 μm and 20 μm. The assembly apparatus takes 1/3-1/2 of the length of the electrode rods 200, and the mandrel 50 can be fixed with an external frame through the gaps among the four electrode rods 200.
The application also comprises a quadrupole mass analyzer assembling device for implementing the quadrupole mass analyzer assembling method, wherein the quadrupole mass analyzer assembling device comprises a plurality of limiting seats 10, a plurality of elastic limiting structures 20, a plurality of adjusting pieces 30, a plurality of touch plates 40 and a mandrel 50.
The limiting seat 10 is fixed on the frame. The number of the limiting seats 10 is four, the mandrel 50 is located in the middle of the four limiting seats 10, and the four limiting seats 10 are symmetrical about the mandrel 50. Specifically, each stopper base 10 includes a first side plate 11, a second side plate 12, and a third side plate 13. The first side plate 11 is parallel to the third side plate 13. The two ends of the second side plate 12 are respectively connected with the first side plate 11 and the third side plate 13, and the second side plate 12 is perpendicular to the first side plate 11 and the third side plate 13. The first side panel 11, the second side panel 12 and the third side panel 13 form a U-shaped structure. The stopper base 10 is provided with an opening facing the spindle 50. The four limiting seats 10 are distributed in a cross shape.
Each elastic limiting structure 20 includes an elastic member 21 and a pressing plate 22. The elastic member 21 is fixed on the inner wall of the stopper base 10, and the pressing plate 22 is fixed on the other end of the elastic member 21. Specifically, the elastic member 21 is a spring. The first side plate 11 and the second side plate 12 of each limiting seat 10 are respectively provided with an elastic limiting structure 20. The elastic force provided by the elastic members 21 of the two elastic limit structures 20 is perpendicular to each other.
The number of the adjusting pieces 30 is the same as that of the spacing blocks 10. Specifically, the number of the regulating members 30 is four. Each adjusting member 30 is mounted on the third side plate 13 of the spacing block 10. Specifically, the adjusting member 30 is a screw, the screw is rotatably mounted on the third side plate 13, and the screw can adjust the distance that the end portion extends into the limiting seat 10, that is, the position of the end portion of the screw, by rotating, so as to adjust the position of the electrode rod 200.
The contact plate 40 is mounted on the end of the adjustment member 30, and the contact plate 40 moves with the end of the adjustment member 30 and abuts against the surface of the electrode rod 200. The contact plate 40 enables adjustment of the position of the electrode rod 200 and avoids damage to the electrode rod 200.
The mandrel 50 is fixed to the frame, and the four stopper bases 10 are symmetrical with respect to the mandrel 50.
The spindle 50 is secured to an external frame when the device is assembled using a quadrupole mass analyser. Firstly, four electrode rods 200 are approximately and uniformly arranged around a mandrel 50, the electrode rods 200 are continuously pressed on the mandrel 50 by an elastic piece 21 and a pressing plate 22, the electrode rods 200 are abutted against a contact plate 40 by the elastic piece 21 and the pressing plate 22, the position of the contact plate 40 is controlled by an adjusting piece 30, 4 limiting seats 10 are fixed on a machine frame, and the positions of the 4 electrode rods 200 can be controlled by 4 adjusting screws. The position of each electrode rod 200 is measured by a tool microscope or an image dimension measuring instrument along the axial direction of the quadrupole rod, for example, the position measuring precision can reach 0.7 mu m by an LM series image dimension measuring instrument of KEYENCE, and the assembling requirement of the quadrupole rod is met. The on-line measurement can be used and the corresponding adjustment made manually in real time according to the result until the electrode rod 200 is in the desired position, as shown in figure 2. After the precise position adjustment of each electrode rod 200 is completed, the ceramic rings 300 are sleeved into the two ends of the quadrupole rod, and two bonding methods can be adopted, one is that the inner diameter of the ceramic ring 300 is slightly larger than the circumscribed circle of the quadrupole rod, and as shown in fig. 3, epoxy resin is filled in the gap between the electrode rod 200 and the ceramic ring 300. Alternatively, the fixing post 400 may be screwed on the electrode rod 200, the fixing post 400 passes through a through hole in the ceramic ring 300, and the gap between the ceramic ring 300 and the fixing post 400 is filled with epoxy resin, as shown in fig. 4. In either way, the ceramic ring 300 need not be precisely positioned.
Compared with the method for assembling the quadrupole rod mass analyzer, the method has the following beneficial effects:
(1) the quadrupole mass analyser assembly method makes the quadrupole field circular accuracy fully dependent on the machining accuracy of the mandrel 50, reducing the dimensional chain. The mandrel 50 is shorter than the electrode rod 200, the material selection range is wide, the processing difficulty is low, and the submicron level is easy to realize.
(2) The difficulty of the assembly process is reduced, and the position adjustment of the electrode rod 200 in the process becomes simpler. After the distance between the four-pole rods is measured, the grinding direction of the ceramic ring 300 needs to be inferred according to distance data, the ceramic ring 300 is manually repaired and ground, the precision of the special-shaped curved surface is extremely difficult to control, and the process difficulty is high. In the assembly method proposed in this patent, since each electrode rod 200 is closely attached to the outer surface of the mandrel 50, the freedom of movement is reduced and the variable parameters are only angular. The adjustment of single parameter only needs an adjusting screw to realize, and is simple and accurate.
(3) The field diameter ratio of the quadrupole rods becomes more accurate to control, the tolerance zone of the rod diameter of the electrode rod 200 is widened, the process difficulty is reduced, and the yield is improved. Because the dimension of the traditional quadrupole rod needs to be measured continuously and the ceramic ring 300 needs to be repaired and ground until the assembly precision reaches the standard, the inner diameter of the ceramic ring 300 is difficult to control in the process, and the circumscribed circle radius R of the quadrupole rod is difficult to control. The processing of pole rod needs to guarantee cylindricity, and the rod diameter r is also difficult to control accurately. And field circle radius r 0 Coupled with their two parameters, r 0 Overall, R-2R makes the field-to-diameter ratio poorly controllable. The method provided by the patent can decouple two parameters, namely the radius of the field circle, the diameter of the rod and the diameter of the circumcircle of the quadrupole rod, is a fixed value and only depends on the diameter of the mandrel 50.
For comparison, an assembly method using a circumscribed circle or a circumscribed square to control the position of the electrode rod 200 will be used as a control group (the method mentioned above, and superior to the current assembly method of commercial quadrupole rods). Taking a commonly used rod diameter of 9.4mm as an example, the diameter of the circumscribed circle is designed to be 2R-27.126 mm, and when the tolerance band of the actually processed rod diameter is e-10 μm, the radius of the field circle is R 0 =R2r +/-e is between 4.153 and 4.173, and the ratio of the field to the diameter r/r is 0 Will be between 1.1257 and 1.1323, outside of the ideal range. The radius of the mandrel 50, i.e., the radius of the field circle, designed according to the method of this patent is r, for the same tolerances of the rod diameters 0 The assembled quadrupole rod field diameter ratio is between 1.1284 and 1.1296, within an ideal range of 4.163 mm. As mentioned above, the field diameter ratio is 1.128-1.130 corresponding to the practically allowable tolerance band of the processing of the rod diameter of 16 μm, which greatly widens the selectable range of the rod diameter of the electrode rod 200, improves the yield of the processing of the electrode rod 200 and saves the cost.
The above examples only show some embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, variations and modifications can be made without departing from the spirit of the invention, and equivalent modifications and changes can be made to the above embodiments according to the essential technology of the invention, and these are all within the scope of the invention.