CN114980468A

CN114980468A - Plasma gun

Info

Publication number: CN114980468A
Application number: CN202210685425.5A
Authority: CN
Inventors: 程芝峰; 田野
Original assignee: Huazhong University of Science and Technology
Current assignee: Huazhong University of Science and Technology
Priority date: 2022-06-15
Filing date: 2022-06-15
Publication date: 2022-08-30

Abstract

The invention relates to a plasma gun, and belongs to the technical field of plasma treatment. A plasma gun, comprising: the rifle shell, one end in the rifle shell is provided with the negative pole, and the other end is provided with the positive pole, the negative pole with be equipped with annular discharge structure between the positive pole, the rifle shell is close to the one end external connection of negative pole has first flange board, first flange board go up the ring to be provided with a plurality of with the first vacuum electrode of negative pole electricity connection and a plurality of with the second vacuum electrode of positive pole electricity connection, be connected with the second flange board on the first flange board, it is provided with a plurality of main air inlets to go up to the ring direction on the second flange board, main air inlet passes through the trachea intercommunication inside the rifle shell. Has the advantages that: the multichannel gas injection can improve the homogeneity of the internal gas of rifle body, and the annular discharge structure can evenly discharge electric field distribution in the passageway, helps the gas arc blowing effect, is favorable to the emergence and the stability of long distance electric arc.

Description

Plasma gun

Technical Field

The invention belongs to the technical field of plasma treatment, and particularly relates to a plasma gun.

Background

Most plasmas generated by the existing plasma gun have the problem of low density; the high-performance parameters of the existing plasma gun are derived from the miniature structure, and if the size of the structure is increased, the parameters such as the density of the plasma can be reduced, so that the plasma gun can only be applied to occasions requiring a small amount of plasma to be injected quickly; finally, the ionization rate is low.

Disclosure of Invention

The invention provides a plasma gun for solving the technical problems, wherein the uniformity of gas in the gun body can be improved by multi-path gas injection, the electric field distribution in a discharge channel can be uniform by an annular discharge structure, the gas arc blowing effect is facilitated, the generation and the stability of long-distance electric arcs are facilitated, the density of generated plasma is high, the requirement of rapid injection of a large amount of plasma can be met, and the ionization rate is high.

The technical scheme for solving the technical problems is as follows: the plasma gun includes: the rifle shell, one end in the rifle shell is provided with the negative pole, and the other end is provided with the positive pole, the negative pole with be equipped with annular discharge structure between the positive pole, the rifle shell is close to the one end external connection of negative pole has first flange board, first flange board go up the ring to be provided with a plurality of with the first vacuum electrode of negative pole electricity connection and a plurality of with the second vacuum electrode of positive pole electricity connection, be connected with the second flange board on the first flange board, it is provided with a plurality of main air inlets to go up to the ring direction on the second flange board, main air inlet passes through the trachea intercommunication inside the rifle shell.

Has the advantages that: the multichannel gas injection can improve the gaseous homogeneity of the internal portion of rifle, and the annular discharge structure can evenly discharge electric field distribution in the passageway, helps the gas blowoff effect, is favorable to the emergence and the stability of long distance electric arc, and the plasma density that produces is big, can satisfy a large amount of plasmas and pour into fast, and the ionization rate is high.

On the basis of the technical scheme, the invention can be further improved as follows.

Furthermore, a bias voltage electrode guide pipe is arranged in the middle of the gun shell, one end of the bias voltage electrode guide pipe sequentially penetrates through the gun shell, the first flange plate and the second flange plate to be connected with a third vacuum electrode, the other end of the bias voltage electrode guide pipe is connected with a bias voltage electrode, and the bias voltage electrode is fixed on the gun shell.

The beneficial effect of adopting the further scheme is that: the bias electrode is applied to an FRC device in the field of nuclear fusion, can be used for adjusting the potential characteristic of plasma, and can play a role in inhibiting the development of FRC rotational instability; the third vacuum electrode powers the bias electrode.

Further, a first insulating tube, a sleeve and a bias electrode protection cover are sequentially sleeved on the bias electrode guide tube from inside to outside.

The beneficial effect of adopting the further scheme is that: the first insulating tube improves the insulating effect, and the sleeve mainly supports inlayer packing ring group, and bias voltage electrode safety cover is convenient for install inlayer packing ring group.

Further, the annular discharge structure includes an inner gasket group and an outer gasket group, the inner gasket group includes a first gasket and a second gasket, the first gasket and the second gasket are alternately disposed on the bias electrode shield, an outer diameter of the first gasket is greater than an outer diameter of the second gasket, the outer gasket group includes a third gasket and a fourth gasket, the third gasket and the fourth gasket are alternately disposed on an inner wall of the gun case, an inner diameter of the third gasket is greater than an inner diameter of the fourth gasket, the first gasket and the fourth gasket and the second gasket and the third gasket are disposed in one-to-one correspondence, and the first gasket, the second gasket, the third gasket and the fourth gasket form an annular discharge channel.

The beneficial effect of adopting the further scheme is that: the inner and outer gasket groups are of a multilayer stacked structure, a circumferential discharge channel is formed, electric field distribution in the uniform discharge channel is facilitated, electrons can be adsorbed because a discharge area is suspended, the potential of a cathode can be unfocused, the potential of the gasket stacked in the middle is reduced, negative potential is close to an anode, and the problem that direct current discharge is concentrated in the cathode area can be solved.

Further, the gun shell comprises a second insulating tube, a third insulating tube and a fourth insulating tube, the second insulating tube is connected with the first flange plate through a connecting cylinder, the air pipe is arranged in the connecting cylinder, an air inlet cavity is fixedly formed in the second insulating tube, an air guide hole communicated with the air pipe is formed in the air inlet cavity in the axial direction, the fourth insulating tube is fixedly sleeved with the anode, the third insulating tube is arranged between the second insulating tube and the fourth insulating tube, a fixing sleeve is arranged in the third insulating tube, and the outer gasket group is fixed to the inner wall of the fixing sleeve.

The beneficial effect of adopting the further scheme is that: the insulating sleeve can be electrically isolated, and the mechanical strength is ensured not to generate the problems of abrasion, fracture and the like.

Furthermore, a plurality of annular blocking pieces are stacked on the inner wall of the middle part of the air inlet cavity, the inner diameters of the annular blocking pieces are larger than different, and an air vent is annularly arranged at one end, close to the annular discharge structure, of the air inlet cavity.

The beneficial effect of adopting the further scheme is that: the annular barrier sheet can reduce the gas speed, effectively improve the uniformity of gas injection and solve the problem of non-uniformity of plasma generated in actual discharge.

Furthermore, the third vacuum electrode is of a hollow structure and is provided with an auxiliary air inlet, and the bias electrode is provided with an auxiliary air through hole.

The beneficial effect of adopting the further scheme is that: the gas injected into the anode through the auxiliary gas through holes does not undergo a discharge process or only briefly undergoes a discharge, and the purpose is to cool the plasma generated by the plasma gun, reduce the temperature and increase the density.

Furthermore, a fixing plate is arranged outside the fourth insulating pipe, and the connecting cylinder is fixed with the fixing plate through a plurality of screw rods arranged annularly.

The beneficial effect of adopting the further scheme is that: the fixing effect is good, and the assembly and the disassembly are convenient.

Furthermore, 8 third flange plates are arranged on the first flange plate at intervals in the circumferential direction, 4 third flange plates are provided with the first vacuum electrodes, 4 third flange plates are provided with the second vacuum electrodes, and the first vacuum electrodes and the second vacuum electrodes are arranged in a staggered mode.

The beneficial effect of adopting the above further scheme is: 4 for anode supply and 4 for cathode supply.

Further, the first vacuum electrode and the cathode, and the second vacuum electrode and the anode are connected through a copper bar.

The beneficial effect of adopting the further scheme is that: the connection is stable and the operation is convenient.

Drawings

FIG. 1 is a cross-sectional view of the present invention;

FIG. 2 is a schematic view of the external structure of the present invention;

FIG. 3 is a schematic view of the structure of the air intake chamber;

FIG. 4 is a schematic structural view of a cathode;

FIG. 5 is a schematic structural view of an anode;

FIG. 6 is a schematic structural view of a second insulating tube;

FIG. 7 is a schematic structural view of a fourth insulating tube;

in the drawings, the components represented by the respective reference numerals are listed below:

1. a gun housing; 2. a first flange plate; 3. a third flange plate; 4. a second flange plate; 5. a primary air inlet; 6. a third vacuum electrode; 7. an auxiliary air inlet; 8. a connecting cylinder; 9. an air inlet cavity; 10. a cathode; 11. an anode; 12. a biasing electrode catheter; 13. a second insulating tube; 14. a third insulating tube; 15. a fourth insulating tube; 16. a bias electrode; 17. a first insulating tube; 18. a sleeve; 19. a bias electrode shield; 20. a first gasket; 21. a second gasket; 22. a third gasket; 23. a fourth gasket; 25. a vent hole; 26. a buffer plate; 27. fixing the sleeve; 28. copper bars; 29. a fixing plate; 30. a screw.

Detailed Description

The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.

As shown in fig. 1-7, the present embodiment provides a plasma gun, which includes a gun housing 1, a cathode 10 is disposed at one end inside the gun housing 1, as shown in fig. 4, 36 small tip electrodes are annularly distributed on the cathode 10, and are uniformly distributed on an annular discharge channel. These tip electrodes can effectively increase the local electric field strength and thus reduce the breakdown voltage at the time of actual discharge. The other end is provided with an anode 11, an annular discharge structure is arranged between the cathode 10 and the anode 11, one end of the gun shell 1 close to the cathode 10 is externally connected with a first flange plate 2, 8 third flange plates 3 are arranged on the first flange plate 2 at intervals in the circumferential direction, 4 third flange plates 3 are provided with the first vacuum electrodes, 4 third flange plates 3 are provided with the second vacuum electrodes, the first vacuum electrodes and the second vacuum electrodes are arranged in a staggered manner, and the use of a single-pole power supply scheme can cause the uneven local electric field, finally cause the high density and temperature of partial plasma close to a power supply connector and the low density and temperature of partial plasma far away from the power supply connector, so that the use of the circumferential uniform multi-pole power supply scheme can ensure uniform power supply, 8M 6 vacuum electrodes are used for power supply, 4 are connected with the cathode, and 4 are connected with the anode, first vacuum electrode with negative pole 10 and second vacuum electrode with positive pole 11 all is connected through copper bar 28, can guarantee the homogeneity of electric field intensity, be connected with second flange board 4 on the first flange board 2, it is provided with a plurality of main air inlets 5 to go up to the annular on the second flange board 4, main air inlet 5 passes through the trachea intercommunication gun shell 1 is inside, third vacuum electrode 6 is hollow structure, and is provided with supplementary air inlet 7 on, be provided with the auxiliary gas through-hole on the bias voltage electrode 16.

Further, a bias electrode guide tube 12 is arranged in the middle of the gun housing 1, one end of the bias electrode guide tube 12 sequentially penetrates through the gun housing 1, the first flange plate 2 and the second flange plate 4 to be connected with a third vacuum electrode 6, the other end of the bias electrode guide tube 12 is connected with a bias electrode 16, and the bias electrode 16 is fixed on the gun housing 1.

The plasma gun uses multiple gas injection to improve the uniformity of the gas inside the gun body, wherein the biased electrode conduit 12 is used for gas injection in the anode region, and the annular four medium primary gas inlets 5 are used for cathode gas injection. The two gas injection modes have different purposes, the cathode gas injection is the main gas injection mode, and the gas entering the cathode region can directly generate plasma through discharge; the anode gas injection is an auxiliary gas injection mode, and the gas injected into the anode does not pass through a discharge process or only passes through discharge for a short time, so that the purpose of the gas is to cool plasma generated by a plasma gun, reduce the temperature and improve the density.

Further, a first insulating pipe 17, a sleeve 18 and a bias electrode protecting cover 19 are sequentially sleeved on the bias electrode guide pipe 12 from inside to outside, the front end of the first insulating pipe 17 is connected with the air inlet cavity 9, an inner layer stainless steel sleeve 18 is sleeved on the first insulating pipe 17 and used for supporting an inner layer gasket set, and finally, after the bias electrode protecting cover 19 is sleeved for isolation, the inner layer gasket set is nested on the bias electrode protecting cover 19.

Further, the annular discharge structure includes inside packing ring group and outside packing ring group, inside packing ring group includes the first packing ring 20 of molybdenum material and the second packing ring 21 of boron nitride ceramic material, first packing ring 20 with the thickness of second packing ring 21 is 5mm, first packing ring 20 with second packing ring 21 all staggers the setting and is in on the biasing electrode safety cover 19, the external diameter of first packing ring 20 is 190mm, the external diameter 170mm of second packing ring 21, the internal diameter is the same 120mm that is, and molybdenum packing ring external diameter is 190mm and defines the internal diameter of annular discharge channel. The outer gasket group comprises third gaskets 22 made of boron nitride ceramic pads and fourth gaskets 23 made of molybdenum, the thicknesses of the third gaskets 22 and the fourth gaskets 23 are both 5mm, the third gaskets 22 and the fourth gaskets 23 are arranged on the inner wall of the gun shell 1 in a staggered mode, the inner diameter of each third gasket 22 is larger than 230mm, the inner diameter of each fourth gasket 23 is 210mm, and the inner diameter of each molybdenum gasket is 210mm and defines the outer diameter of an annular discharge channel. The inner and outer gasket sets are stacked together to form an overall annular discharge channel of 190mm to 210mm diameter and 180mm length, the sufficiently long discharge channel facilitating ohmic heating of the plasma in the channel for a longer period of time. The inner diameter of the outer layer molybdenum gasket and the outer diameter of the inner layer molybdenum gasket can be properly changed by adjusting the size of the annular discharge channel. The boron oxide ceramic gasket is used for the isolation of the molybdenum gasket, and the molybdenum gasket has the function of homogenizing the internal electric field distribution, simultaneously contributes to the gas arc blowing effect and contributes to the generation and the stabilization of long-distance electric arcs. Without the stacked structure, the dc discharge would typically be concentrated in the cathode region. If a stacking structure is adopted, electrons can be absorbed because the discharge area of the device is suspended, so that the potential of the cathode is not concentrated, the potential of the gasket stacked in the middle part is reduced, the negative potential is close to the anode, and the problem that direct current discharge is concentrated in the cathode area can be solved.

The inner and outer gasket stacks can also determine the size of the annular discharge channel, the outer diameter of the inner metal molybdenum gasket determines the inner diameter of the annular discharge channel, and the inner diameter of the outer metal molybdenum gasket determines the outer diameter of the annular discharge channel.

Further, the gun housing 1 includes a second insulating tube 13, a third insulating tube 14 and a fourth insulating tube 15 made of alumina ceramics, the second insulating tube 13 is connected to the first flange plate 2 through a connecting cylinder 8, the gas pipe is disposed in the connecting cylinder 8, a gas inlet cavity 9 is fixedly disposed in the second insulating tube 13, a plurality of annular blocking pieces 24 are stacked on an inner wall of the middle portion of the gas inlet cavity 9, inner diameters of the plurality of annular blocking pieces 24 are larger than different, a vent hole 25 is annularly disposed at one end of the gas inlet cavity 9 close to the annular discharge structure, a gas guide hole communicated with the gas pipe is circumferentially disposed on the gas inlet cavity 9, buffer plates 26 are circumferentially disposed at intervals outside the gas inlet cavity 9, the vent hole 25 is disposed between the two buffer plates 26, the anode 11 is fixedly disposed on the fourth insulating tube 15, the third insulating tube 14 is disposed between the second insulating tube 13 and the fourth insulating tube 15, a boron nitride ceramic fixing sleeve 27 is arranged in the third insulating tube 14, and the outer gasket set is fixed on the inner wall of the fixing sleeve 27.

The cathode gas is injected into the cathode region through a plurality of annular barrier sheets 24 and then through the annular vent holes 25, so that the gas speed is reduced, the uniformity of gas injection can be effectively improved, and the problem of non-uniformity of generated plasma in actual discharge is solved.

Further, the third vacuum electrode 6 is a hollow structure and is provided with an auxiliary gas inlet 7, the bias electrode 16 is provided with an auxiliary gas through hole, and gas injected into the anode through the auxiliary gas through hole does not pass through a discharge process or only passes through discharge for a short time, so that the purpose of the third vacuum electrode is to cool plasma generated by the plasma gun, reduce the temperature and improve the density.

Further, a fixing plate 29 is arranged outside the fourth insulating tube 15, and the connecting cylinder 8 and the fixing plate 29 are fixed by 8 screw rods 30 arranged annularly.

In the description of the present invention, it is to be understood that the terms "center", "length", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "inner", "outer", "peripheral side", "circumferential", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.

In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims

1. The utility model provides a plasma gun, its characterized in that, includes gun shell (1), one end in gun shell (1) is provided with negative pole (10), and the other end is provided with positive pole (11), negative pole (10) with be equipped with the annular structure of discharging between positive pole (11), gun shell (1) is close to the one end external connection of negative pole (10) has first flange board (2), first flange board (2) go up the ring to be provided with a plurality of with the first vacuum electrode of negative pole (10) electricity connection and a plurality of with the second vacuum electrode of positive pole (11) electricity connection, be connected with second flange board (4) on first flange board (2), the ring is gone up to second flange board (4) and is provided with a plurality of main air inlets (5), main air inlet (5) are through the trachea intercommunication inside gun shell (1).

2. The plasma gun according to claim 1, characterized in that a bias electrode guide tube (12) is arranged in the middle of the gun housing (1), one end of the bias electrode guide tube (12) passes through the gun housing (1), the first flange plate (2) and the second flange plate (4) in sequence to be connected with a third vacuum electrode (6), the other end is connected with a bias electrode (16), and the bias electrode (16) is fixed on the gun housing (1).

3. Plasma gun according to claim 2, characterized in that the biased electrode guide tube (12) is sheathed with a first insulating tube (17), a sleeve (18) and a biased electrode shield (19) in order from the inside outwards.

4. The plasma gun according to claim 3, wherein the annular discharge structure comprises an inner washer set and an outer washer set, the inner washer set comprising a first washer (20) and a second washer (21), the first washer (20) and the second washer (21) each being alternately disposed on the bias electrode shield (19), an outer diameter of the first washer (20) being larger than an outer diameter of the second washer (21), the outer washer set comprising a third washer (22) and a fourth washer (23), the third washer (22) and the fourth washer (23) each being alternately disposed on an inner wall of the gun housing (1), an inner diameter of the third washer (22) being larger than an inner diameter of the fourth washer (23), the first washer (20) and the fourth washer (23) and the second washer (21) and the third washer (22) being disposed in one-to-one correspondence, the first gasket (20), the second gasket (21), the third gasket (22), and the fourth gasket (23) form an annular discharge channel.

5. Plasma gun according to claim 4, characterized in that the gun housing (1) comprises a second insulating tube (13), a third insulating tube (14) and a fourth insulating tube (15), the second insulating pipe (13) is connected with the first flange plate (2) through a connecting cylinder (8), the air pipe is arranged in the connecting cylinder (8), an air inlet cavity (9) is fixedly arranged in the second insulating pipe (13), the air inlet cavity (9) is provided with air guide holes which are communicated with the air pipe in the circumferential direction, the fourth insulating pipe (15) is fixedly sleeved with the anode (11), the third insulating pipe (14) is arranged between the second insulating pipe (13) and the fourth insulating pipe (15), a fixing sleeve (27) is arranged in the third insulating pipe (14), and the outer-layer gasket group is fixed on the inner wall of the fixing sleeve (27).

6. The plasma gun according to claim 5, wherein a plurality of annular blocking sheets (24) are stacked on the inner wall of the middle part of the gas inlet cavity (9), the inner diameters of the annular blocking sheets (24) are larger than different, and a vent hole (25) is annularly arranged at one end of the gas inlet cavity (9) close to the annular discharge structure.

7. The plasma gun in accordance with claim 5, wherein the third vacuum electrode (6) is a hollow structure and is provided with an auxiliary gas inlet (7), and the bias electrode (16) is provided with an auxiliary gas through hole.

8. The plasma gun according to claim 5, wherein a fixing plate (29) is arranged outside the fourth insulating tube (15), and the connecting cylinder (8) and the fixing plate (29) are fixed through a plurality of screw rods (30) arranged annularly.

9. The plasma gun according to any of the claims 1 to 7, wherein 8 third flange plates (3) are arranged on the first flange plate (2) at intervals in the circumferential direction, wherein the first vacuum electrode is arranged on 4 third flange plates (3), the second vacuum electrode is arranged on 4 third flange plates (3), and the first vacuum electrode and the second vacuum electrode are arranged in a staggered manner.

10. The plasma gun according to any of the claims 1 to 7, characterized in that the first vacuum electrode and the cathode (10) and the second vacuum electrode and the anode (11) are connected by a copper bar (28).