CN114964642A - Detection device and helium detection method for workpiece - Google Patents

Detection device and helium detection method for workpiece Download PDF

Info

Publication number
CN114964642A
CN114964642A CN202110197373.2A CN202110197373A CN114964642A CN 114964642 A CN114964642 A CN 114964642A CN 202110197373 A CN202110197373 A CN 202110197373A CN 114964642 A CN114964642 A CN 114964642A
Authority
CN
China
Prior art keywords
head
sealing head
sealing
workpiece
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110197373.2A
Other languages
Chinese (zh)
Inventor
不公告发明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hangzhou Aoke Meirui Technology Co ltd
Original Assignee
Hangzhou Aoke Meirui Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hangzhou Aoke Meirui Technology Co ltd filed Critical Hangzhou Aoke Meirui Technology Co ltd
Priority to CN202110197373.2A priority Critical patent/CN114964642A/en
Publication of CN114964642A publication Critical patent/CN114964642A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

The invention discloses a detection device and a helium detection method of a workpiece, which comprise a box body, a first cylinder, a tool, a positioning piece and more than two ejector rods, the tooling, the positioning piece and the ejector rods are positioned in the box body, the positioning piece is fixed with the more than two ejector rods, the first air cylinder can drive the ejector rods to move, the detection device comprises sealing heads matched with the ejector rods, each ejector rod is limited in the length direction of the ejector rod by the sealing head matched with the ejector rod, each ejector rod is movably connected with the sealing head matched with the ejector rod, the sealing head having a top port, a portion of the mandrel being located at the top port of the sealing head, the part of the ejector rod, which is positioned on the sealing head, is provided with a peripheral wall, and the peripheral wall along the length direction of the ejector rod is arranged in a gap with the sealing head, so that the detection device has good sealing property.

Description

Detection device and helium detection method for workpiece
Technical Field
The invention belongs to the field of automation equipment.
Background
For some products for fluids, such as valves or containers, helium detection is usually performed by using a detection device, and the purpose of the helium detection is to screen whether a workpiece to be detected leaks. In an automatic detection device, helium is filled into a product after the product is sealed, and then helium detection is carried out, so that the sealing of the product is a key factor for whether leakage detection can be carried out.
Disclosure of Invention
The invention aims to provide a detection device for a product to be detected with good sealing performance and a helium detection method for a workpiece.
In order to realize the purpose, the following technical scheme is adopted:
the utility model provides a detection device, includes box and first cylinder, still includes frock, setting element and two above ejector pins, setting element, ejector pin are located the box, the frock is located when detecting the box, first cylinder can drive the ejector pin removes, detection device include with ejector pin matched with seals the head, every the ejector pin with ejector pin matched with seals the head and is in the spacing setting of ejector pin length direction, every the ejector pin be with ejector pin matched with seals first swing joint, sealed head has the top port, the part of ejector pin is located seal the top port of head, the ejector pin is located seal the part of head has the perisporium, along ejector pin length direction, the perisporium with sealed first clearance sets up.
In order to realize the purpose, the following technical scheme is adopted:
a helium detection method for a workpiece comprises the following steps:
providing the detection device according to the above technical solution;
placing a workpiece to be detected on a tool;
feeding the tool with the workpiece to be detected into a box body, and closing a box door of the box body;
starting a first air cylinder, wherein the first air cylinder can push a positioning piece to move downwards, and the positioning piece pushes each sealing head to approach a workpiece to be detected;
when each sealing head is contacted with the workpiece to be detected, each sealing head can move in the radial direction of the sealing head relative to the ejector rod, at least two sealing heads are aligned to the port of the workpiece to be detected, and each sealing head is contacted and sealed with the surface of the workpiece to be detected;
filling helium into a workpiece to be detected, and detecting whether the workpiece to be detected leaks;
and recovering helium in the workpiece to be detected.
According to the technical scheme, the ejector rods and the sealing heads are limited in the length direction of the ejector rods, each ejector rod is movably connected with the sealing head matched with the ejector rod, the part, located on the sealing head, of the ejector rod is provided with the peripheral wall, and the peripheral wall in the length direction of the ejector rod is arranged in a gap mode with the sealing head.
Drawings
FIG. 1 is a simplified schematic illustration of a portion of one embodiment of the present invention;
FIG. 2 is a simplified schematic illustration of a portion of another embodiment of the present invention;
FIG. 3 is a schematic partial perspective view of an embodiment of the present invention;
FIG. 4 is a simplified exploded perspective view of a portion of one embodiment of the present invention;
FIG. 5 is a schematic sectional view of a portion of a positioning member and a carrier rod according to still another embodiment of the present invention;
FIG. 6 is a simplified schematic diagram of a portion of another embodiment of the present invention;
FIG. 7 is a schematic structural view of the ejector rod and the sealing head after being connected;
FIG. 8 is a schematic cross-sectional view of the attachment of the carrier rod and the sealing head;
FIG. 9 is a schematic structural view of a sealing head;
FIG. 10 is a cross-sectional schematic view of the sealing head of FIG. 9;
FIG. 11 is a schematic cross-sectional view of an alternative ram and sealing head connection.
Detailed Description
Referring to fig. 1-10, a detection device comprises an evacuation system, a leak detection system, a helium filling recovery system, a helium cleaning system, an electric control system and the like, wherein the leak detection system comprises a helium detector, a detection part 100, a pipeline and the like, the detection part 100 comprises a box body 1, a tool 2, a positioning part 3 and a first air cylinder 41, the positioning part 3 is positioned inside the box body 1, the tool 2 is positioned inside the box body 1 during detection, the box body 1 is provided with a box door, the box door is positioned on the front side of the box body, the tool is in telescopic connection with the bottom of the box body, the tool can extend out of the front side of the box body, and the tool 2 can move relative to the bottom of the box body 1. When the box door is closed, the box body 1 is relatively sealed, the space of the box body 1 can be vacuumized to form a relatively vacuum space, when the workpiece 10 to be detected leaks in the box body 1, the workpiece is placed in the corresponding position of the box body, the box door is closed, the space of the box body 1 is vacuumized, helium is filled in the workpiece to be detected, and whether the workpiece 10 to be detected has the leakage condition can be determined by detecting the concentration of the helium in the vacuum box body 1.
The structure of the detection section 100 will be described in detail below, and others such as an evacuation system and a leak detection system will not be described in detail.
The detection part 100 further comprises more than two ejector rods 5 and more than two sealing heads 6, and the ejector rods 5 can be driven by the positioning piece 3 to move.
The movable end of the first cylinder 41 is fixed to the positioning member 3, and the first cylinder 41 can drive the positioning member 3 to move a certain distance in the direction of the tool 2, wherein the moving distance can be properly adjusted and can also be relatively fixed.
Hereinafter, for convenience of describing the moving direction, referring to the direction shown in fig. 1, "downward" appearing hereinafter refers to the D direction in fig. 1, and "upward" refers to the U direction in fig. 1.
The structure of ejector rod 5, seal head 6 refers to fig. 7, fig. 8, can drive more than two ejector rods 5 when setting element 3 moves, detection device includes the seal head 6 with ejector rod 5 matched with, every ejector rod 5 is the spacing setting of seal head 6 with ejector rod 5 matched with at ejector rod 5 length direction L, every ejector rod 5 and the seal head 6 swing joint with ejector rod 5 matched with, the expansion end of first cylinder 41 can drive ejector rod 5 to move, every ejector rod 5 drives every seal head 6 with this ejector rod 5 swing joint and moves, seal head 6 has top port 68b, the part of ejector rod 5 is located seal head 6's top port 68b, the part that ejector rod 5 is located seal head 6 has perisporium 57, perisporium 57 along ejector rod 5 length direction L and seal head 6 clearance setting.
The mandrel 5 has an end portion 51, the end portion 51 is located at the sealing head 6, the end portion 51 has a root portion 515 and a flange portion 512, the flange portion protrudes in the radial direction of the mandrel 5 relative to the root portion 515, the end portion 51 has a peripheral wall 57, the peripheral wall of the root portion 515 in the length direction of the mandrel is arranged in a gap with the sealing head 6, the flange portion is arranged in a gap between the peripheral wall of the length direction of the mandrel and the sealing head, so that the mandrel 5 and the sealing head have a gap in the radial direction of the mandrel, and the sealing head can slightly deviate in the radial direction relative to the mandrel 5.
Herein, the term "the first cylinder 41 can drive the push rod 5 to move" includes that the push rod 5 and the driving rod of the first cylinder 41 are fixed and directly driven; other structures are arranged between the ejector rod 5 and the first air cylinder 41, for example, the first air cylinder 41 drives the positioning part 3 to move, and the positioning part 3 drives the ejector rod 5 to move; the push rod 5 is used as a driving rod of the first air cylinder 41 and is driven by the first air cylinder 41 to move.
Herein, the term "movably connected" means that the sealing head 6 and the ejector rod 5 are not in a fixed connection relationship, the ejector rod 5 can drive the sealing head 6 to move in the length direction L of the ejector rod 5 and in a limit relationship between the sealing head 6 and the ejector rod 5, and the sealing head 6 has a small-amplitude position offset relative to the ejector rod 5 in other directions perpendicular to the length direction L.
The detection device can be used for detecting the sealing performance of workpieces such as valve bodies, pressing blocks with fluid channels, containers with fluid communication interfaces and the like. Because the workpiece 10 to be detected has a certain manufacturing tolerance in the manufacturing process, when the workpiece 10 to be detected has more than two ports to be sealed, the sealing of the more than two ports is required to have consistency, and the sealing difficulty is increased. The sealing head 6 and the ejector rod 5 of the detection device are movably connected, the part of the ejector rod 5 is positioned at the top port 68b of the sealing head 6, the sealing head 6 is hung at the lower part of the ejector rod 5, the part of the ejector rod 5 positioned at the sealing head 6 is provided with the peripheral wall 57, the peripheral wall 57 and the sealing head 6 along the length direction L of the ejector rod 5 are arranged in a clearance mode, so that the sealing head 6 and the ejector rod 5 are limited in the length direction L of the ejector rod 5, when the sealing head 6 enters the port of a workpiece 10 to be detected, the sealing head 6 can have certain action in the radial direction under the force application of the workpiece 10 to be detected to the sealing head 6, so that the sealing head 6 can better enter the port and is sealed with the workpiece 10 to be detected, the risk of damage to the workpiece 10 to be detected caused by inaccurate positioning of the problems such as tolerance and the like between the sealing head 6 and the workpiece 10 to be detected is reduced, or the risk of damage to the sealing head 6 is reduced, and the sealing performance of the detection device on the workpiece 10 to be detected is improved, the service time of the detection device is prolonged.
The detection device comprises a limiting column 7, the limiting column 7 is fixed with the positioning piece 3, the limiting column 7 protrudes downwards, and when the movable end of the first air cylinder 41 drives the positioning piece 3 to move towards the tool 2, the limiting column 7 can abut against the tool 2.
As another embodiment, the position-limiting post may be fixed to the tool, and when the positioning member 3 moves downward, the position-limiting post abuts against the positioning member 3.
The limiting column 7 can be used as a mechanical limiting point for the movement of the first cylinder 41, and when the first cylinder 41 drives the positioning part 3 to move, the first cylinder 41 is prevented from being electrically controlled to be in overvoltage by the pressing of the limiting column 7, so that the workpiece 10 to be detected is protected.
The detection device comprises a guide rod 8, the guide rod 8 and the positioning part 3 are fixedly arranged, the tool 2 is provided with a positioning hole 21, and the positioning hole 21 corresponds to the guide rod 8 in position.
When the expansion end of first cylinder 41 drives setting element 3 downstream, guide bar 8 moves down along with setting element 3, guide bar 8 gets into the locating hole 21 of frock 2, when having the frock 2 of waiting to examine work piece 10 when there is slight deviation in the position of box 1, through the location of guide bar 8 to frock 2, make the position of frock 2 more accurate, help follow-up sealed head 6 treat the sealed of examining work piece 10, do one step of guiding orientation for sealed head 6 gets into the port of examining work piece 10, help follow-up accurate sealed.
In addition, the guide rod 8 can also serve as the limiting column 7 to position the tool 2, and can also serve as a mechanical limiting point of the first cylinder 41.
A helium detection method for a workpiece comprises the following steps:
providing the detection device;
placing a workpiece to be detected on a tool;
feeding the tool with the workpiece to be detected into a box body, and closing a box door of the box body;
starting a first air cylinder, pushing a positioning piece to move downwards by the first air cylinder, and pushing each sealing head to approach a workpiece to be detected by the positioning piece;
when each sealing head is contacted with the workpiece to be detected, each sealing head can move in the radial direction of the sealing head relative to the ejector rod, the sealing head is aligned with the port of the workpiece to be detected, and each sealing head is contacted and sealed with the surface of the workpiece to be detected;
filling helium into a workpiece to be detected, and detecting whether the workpiece to be detected leaks; recovering helium in the workpiece to be detected;
the first cylinder retracts to pull the positioning piece to move upwards.
As an embodiment, referring to fig. 5, a part of the ram 5 is located in the positioning member 3, the ram 5 is capable of moving in the length direction L of the ram 5 relative to the positioning member 3, the detection device has a first cavity 8a and a second cavity 8b, the first cavity 8a is not communicated with the second cavity 8b, and the ram 5 is capable of sliding along the length direction L of the ram 5 under the pressure of the gas in the first cavity 8a or the second cavity 8b, so as to change the sizes of the first cavity 8a and the second cavity 8 b.
The detection device is provided with a first action point and a second action point, at the first action point, the pressure in the first cavity 8a is greater than the pressure in the second cavity 8b, the gas in the first cavity 8a pushes the mandril 5 to move downwards, and the second cavity 8b is compressed; at the second action point, the pressure in the second cavity 8b is larger than the pressure in the first cavity 8a, and the gas in the second cavity 8b pushes the mandril 5 to move upwards.
Through the setting of first chamber 8a, second chamber 8b for ejector pin 5 can be relatively waited workpiece 10 and moved, easy operation.
The positioning piece 3 comprises a box main body, a first connecting piece 32 and a second connecting piece 33, the box main body comprises at least three plate parts 31, adjacent plate parts 31 are welded and fixed or are relatively sealed and fixed through a sealing material, the ejector rod 5 is arranged in a sliding and sealing manner with one of the first connecting piece 32 and the second connecting piece 33, the ejector rod 5 is arranged in a fixed or limiting manner with the other one of the first connecting piece 32 and the second connecting piece 33, the first connecting piece 32 is in sealing fit with the box main body, the second connecting piece 33 is in sealing fit with the box main body, and the second cavity 8b is positioned between the first connecting piece 32 and the second connecting piece 33; the first connector 32 cooperates with the ram 5 to separate the first chamber 8a from the second chamber 8 b.
Herein, the fixing arrangement of the push rod 5 and the other one of the first connecting piece 32 and the second connecting piece 33 includes that the main body part of the push rod is fixed with the first connecting piece 32 and the second connecting piece 33 through threads and the like, and the main body part of the push rod is integrally formed with the first connecting piece 32 and the second connecting piece 33 or formed by machining materials.
In an exemplary case, the first connecting member and the second connecting member are in a structure with a hole in the middle, the push rod 5 passes through the first connecting member 32 and the second connecting member 33, the push rod 31 is fixedly arranged with the first connecting member 32, the outer periphery of the first connecting member 32 is provided with a structure similar to a sealing ring or a sealing gasket, and the outer wall of the first connecting member 32 is in sliding seal with the box main body; the ejector rod 31 and the second connecting piece 33 are in sliding sealing, and the second connecting piece 33 is limited on the box main body or the second connecting piece 33 and the box main body are fixed through gluing or other modes. Of course, the push rod 5 may not completely penetrate through the first connecting member 32, and a part of the push rod 5 is located in the first connecting member 32 and fixed with the first connecting member 32, or the push rod and a main body portion of the first connecting member may be an integrated structure and directly formed by integral molding or machining, and the structure of the seal ring and the like may be additionally assembled.
The positioning part 3 is driven by the first air cylinder 41 to move downwards, the two ejector rods 5 can move along with the movement of the first air cylinder 41, and the two ejector rods 5 approach to the workpiece 10 to be detected under the action of the first air cylinder 41. At least two plate portions 31 may have a plurality of flow channel grooves (not shown), the plate portions 31 having the flow channel grooves are pressed with the adjacent other plate portions 31, to a certain extent, the positioning member 3 has a plurality of flow channels, each of the push rods 5 corresponds to one of the sealing heads 6, and each of the push rods 5 corresponds to one of the first and second cavities 8a and 8 b.
The detection device is provided with a first air supply flow path 9a and a second air supply flow path 9b, the first air supply flow path 9a is communicated with each first cavity 8a, the second air supply flow path 9b is communicated with each second cavity 8b, the box body is provided with a flow channel communicated with the first air supply flow path and the first cavity at a position relatively close to the first air cylinder, and the box body is provided with a flow channel communicated with the second air supply flow path and the second cavity at a position relatively far away from the first air cylinder.
When the first operating point is reached, the second gas supply flow path 9b is evacuated, the first gas supply flow path 9a is filled with gas of a certain pressure, for example, 3MPa, and the gas introduced from the first gas supply flow path 9a enters the two or more first chambers 8a, thereby pushing the lift pins 5 to move downward. Because every ejector pin 5 all receives 3 MPa's pressure, in ejector pin 5 drives sealed head 6 downstream process, can stop downstream when sealed head 6 receives great resistance, this pressure can make each sealed head 6 with the port seal setting of waiting to examine work piece 10 that corresponds separately, the leakproofness problem that just can the leak hunting meet when having more than two ports need seal because waiting to examine work piece 10 has, this is because the structural design of waiting to examine work piece 10 more than two may have the height difference, the size is different the condition, if control ejector pin 5 for through displacement control this moment, the port that causes very easily is effectively sealed, and some probably because the stroke does not arrive, lead to the leakproofness relatively poor. And through setting up more than two first chambeies 8a and second chamber 8b at setting element 3, through the extrusion pressure between sealing head 6 and the work piece 10 of examining to control final sealing state, sealed validity is higher.
When the first operation point is reached, the first gas supply flow path 9a is vacuumized, the second gas supply flow path 9b is filled with gas with certain pressure, for example, 2MPa, the gas entering the second gas supply flow path 9b enters the two or more second cavities 8b, and the ejector rod 5 is pulled to move upwards, so that the sealing head 6 is pulled out of the workpiece 10 to be detected.
At least two sealing heads 6 have coupling part 63 and the portion 64 that stretches into, coupling part 63 and ejector pin 5 swing joint, and coupling part 63 has the convex part 65 that protrudes in the portion 64 that stretches into in sealing head 6 radial direction on the axial cross section of sealing head, first groove 66 is located convex part 65 and the portion 64 that stretches into, and first sealing washer 67 part is located first groove 66, and the expansion end drive setting element 3 of first cylinder 41 removes to frock 2, then when sealing head 6 is located the port of waiting to examine work piece 10, first sealing washer 67 can be supported with the work piece 10 surface that waits to press and realize pressure seal control.
At least two the part of stretching into of sealing head has second groove 66 'and second sealing washer 67', second sealing washer 67 'part is located second groove 66', the second sealing washer is located stretch into week side or the downside of part, the gaseous drive of first intracavity the ejector pin moves down, the second groove with the second sealing washer stretches into wait to examine the port of examining the work piece, the second sealing washer with wait to examine the work piece contact and support and press.
Through the cooperation of first sealing washer and second sealing washer for sealed head has end face seal and radial seal dual mode with waiting to examine the work piece, helps promoting sealed head and waits to examine the leakproofness of work piece.
A helium detection method for a workpiece comprises the following steps:
there is provided the detecting device of the above-mentioned embodiment,
placing a workpiece 10 to be detected in a tool;
feeding the tool with the workpiece to be detected into a box body, and closing a box door of the box body;
starting the first air cylinder 41, wherein the movable end of the first air cylinder 41 pushes the positioning part 3 to move downwards, and the positioning part 3 pushes each sealing head 6 to approach to the workpiece 10 to be detected;
the positioning piece 3 drives the guide rod 8 to enter the positioning hole 21 of the tool 2 for guiding and positioning;
each sealing head 6 stays above the port of the workpiece 10 to be detected;
filling relatively high-pressure gas into a first cavity 8a of the positioning part 3, pushing each ejector rod 5 to approach a workpiece 10 to be detected by the relatively high-pressure gas, enabling each sealing head 6 to enter a port of the workpiece 10 to be detected, and enabling each sealing head 6 to be in contact sealing with the surface of the workpiece 10 to be detected;
helium is filled into the workpiece 10 to be detected, and whether the workpiece to be detected leaks is detected; recovering helium in the workpiece to be detected;
vacuumizing the first cavity 8a, filling relatively high-pressure gas into the second cavity 8b of the positioning piece 3, pushing the ejector rod 5 to move towards the direction away from the workpiece 10 to be detected by the relatively high-pressure gas in the second cavity 8b, and enabling each sealing head 6 to leave the port of the workpiece 10 to be detected;
the first cylinder 41 retracts to pull the retainer 3 upward.
Before the second cavity is filled with relatively high-pressure gas, the first cavity can be exhausted, or the first cavity can be vacuumized after being exhausted, or the first cavity is directly vacuumized.
The positioning part 3 in the above embodiment may be in the form of a cylinder box, and the ejector rod part is located in the cylinder box and is in sliding fit with the cylinder box.
Referring to fig. 2, the first cylinder 41 of the detection apparatus shown in fig. 2 is located inside the case 1.
As another embodiment, the detection device includes a second cylinder, the first cylinder 41 is a low-pressure cylinder, the second cylinder is a high-pressure cylinder, the second cylinder is fixedly disposed with the push rod 5, the second cylinder can drive the push rod 5 to move, and the second cylinder is fixedly disposed with the positioning element 3.
First cylinder 41 is fixed with setting element 3, and first cylinder 41 is used for the application of force to setting element 3 for setting element 3 drives and moves towards waiting to examine work piece 10 with the ejector pin 5 that setting element 3 is fixed, and the second cylinder is used for the application of force to ejector pin 5.
The stroke of the first air cylinder 41 is larger than that of the second air cylinder, so that the first air cylinder 41 can move as the primary position of the mandril 5, and the sealing head 6 movably connected with the mandril 5 is further matched with the port of the workpiece 10 to be detected in a guiding way by the driving of the second air cylinder. Through the joint cooperation of first cylinder 41 and second cylinder, promoted the reliability of the sealed of two above sealing head 6 and port, promoted the degree of accuracy of the location of sealing head 6 and port, prolonged sealing head 6 life.
The second cylinder is matched with the ejector rod 5 in quantity, every second cylinder drive and the ejector rod 5 that this second cylinder is fixed mutually, and at least two sealing heads 6 have coupling part 63 and stretch into part 64, coupling part 63 and ejector rod 5 swing joint, coupling part 63 have in the convex part 65 of sealing head 6 radial direction protrusion in stretching into part 64 on the axial cross section of sealing head, first groove 66 is located between convex part 65 and the part 64 that stretches into, and first sealing washer 67 part is located first groove 66, and when sealing head 6 was located the port of examining examination work piece 10, first sealing washer 67 can be supported and is pressed with examining the surface of examining the work piece 10. With first sealing washer 67 with wait to examine the work piece 10 surface and flatten through the high pressure for the sealed demand of device is satisfied to the mechanical dead point of ejector pin 5, and overall structure is simple, the operation of being convenient for.
A helium detection method for a workpiece comprises the following steps:
providing the detection device;
placing a workpiece 10 to be detected in a tool;
feeding the tool with the workpiece to be detected into a box body, and closing a box door of the box body;
starting the first air cylinder 41, wherein the movable end of the first air cylinder 41 pushes the positioning part 3 to move downwards, and the positioning part 3 pushes each sealing head 6 to approach to the workpiece 10 to be detected;
the positioning piece 3 drives the guide rod 8 to enter the positioning hole 21 of the tool 2 for guiding and positioning;
each sealing head 6 stays above the port of the workpiece 10 to be detected;
starting each second cylinder, wherein the movable end of each second cylinder pushes each ejector rod 5 to approach to a workpiece 10 to be detected, each sealing head 6 enters the port of the workpiece 10 to be detected, and each sealing head 6 is in contact sealing with the surface of the workpiece 10 to be detected;
filling helium into the workpiece to be detected 10, and detecting whether the workpiece to be detected leaks; recovering helium from the workpiece to be detected;
the movable end of the second cylinder is withdrawn to pull the mandril 5 to move upwards;
the movable end of the first cylinder 41 is retracted to pull the positioning piece 3 upwards.
The locating piece 3 can be in the form of a cylinder box, the second cylinder is fixed on the cylinder box, the first cylinder 41 drives the locating piece 3 to move, and the first cylinder 41 drives the cylinder box to move equivalently. The second cylinder is accommodated in the cylinder box, so that the overall structure of the detection device is simple, and the equipment is more compact.
In one form, a detection device having two ejector pins 5 and two sealing heads 6 is used to detect a workpiece 10 to be inspected having two ports;
as another form, a detection device having four carrier rods 5 and four sealing heads 6 is used for detecting a workpiece to be inspected 10 having four ports;
as another form, a detecting device having five carrier rods 5 and five seal heads 6 is used for detecting a workpiece to be inspected 10 having five ports;
since the above-described detection apparatus enables a plurality of sealing heads 6 to be accurately positioned when sealing ports of the workpiece 10 to be inspected, the detection apparatus can also be used to detect workpieces 10 to be inspected having more ports.
As another embodiment, referring to fig. 2, a detection portion 200 of a detection device includes a box 1, a fixture 2, a positioning element 3, and a first cylinder 41, wherein a movable end of the first cylinder 41 is fixed to the positioning element 3, and the movable end of the first cylinder 41 can drive the positioning element 3 to move a certain distance toward the fixture 2, and the moving distance can be adjusted appropriately or fixed relatively; the setting element 3 can drive more than two ejector pins 5 when removing, detection device includes the sealed head 6 with ejector pin 5 matched with, every ejector pin 5 is the spacing setting in ejector pin 5 length direction L of sealed head 6 with ejector pin 5 matched with, every ejector pin 5 and the sealed head 6 swing joint with ejector pin 5 matched with, the expansion end of first cylinder 41 can drive ejector pin 5 and remove, every ejector pin 5 drives every and the sealed head 6 of this ejector pin 5 swing joint and removes, sealed head 6 has top port 68b, the part of ejector pin 5 is located the top port 68b of sealed head 6, the part that ejector pin 5 is located sealed head 6 has perisporium 57, perisporium 57 along ejector pin 5 length direction L sets up with sealed head 6 clearance.
Structure of the push rod 5, etc. referring to fig. 7 and 8, the push rod 5 has an end part 51, the end part 51 is located in the seal, 6, the end part 51 has a root part 515 and a flange part 512, the flange part protrudes relative to the root part 515 in the radial direction of the push rod 5, the end part 51 has a peripheral wall 57, the root part 515 is arranged along the peripheral wall of the length direction of the push rod and the gap of the seal head, the flange part 512 is arranged along the peripheral wall of the length direction of the push rod and the gap of the seal head, thus, the push rod 5 and the seal head have a gap in the radial direction of the push rod, and the seal head can slightly deviate in the radial direction relative to the push rod 5.
At least two sealing heads 6 have connecting portion 63 and stretch into part 64, connecting portion 63 and ejector pin 5 swing joint, connecting portion 63 has and protrudes in the convex part 65 that stretches into part 64 in sealing head 6 radial direction on the axial cross section of sealing head, first groove 66 is located convex part 65 and stretches into between the part 64, first sealing washer 67 part is located first groove 66, when only first cylinder 41 drives, detection device also can fix a position frock 2 through guide bar 8, the power of first cylinder 41 is 3MPA for example, the expansion end of first cylinder 41 can drive setting element 3 and remove to frock 2, then when sealing head 6 is located the port of waiting to examine work piece 10, make sealing head 6 paste in waiting to examine the work piece 10 surface, first sealing washer 67 can with wait to examine the work piece 10 surface and support the pressure and realize pressure seal control. The mechanical stop of the first cylinder 41 is achieved by the contact pressure of the sealing head 6 with the surface of the workpiece 10 to be examined.
As another embodiment, referring to fig. 6, a detection portion 300 of a detection device includes a box 1, a fixture 2, a positioning member 3, and first cylinders 41, where the first cylinders 41 are fixed to the positioning member 3, the detection device includes two or more ejector rods 5 and a sealing head 6, the number of the ejector rods 5 is two or more, the number of the first cylinders 41 is two or more, the ejector rods 5 are fixed to a movable end of the first cylinders 41, and each first cylinder 41 can drive the ejector rod 5 fixed to the movable end of the first cylinder 41 to move.
The detection device comprises sealing heads 6 matched with the push rods 5, each push rod 5 is movably connected with the sealing head 6 matched with the push rod 5, the sealing head 6 is provided with a top port 68b, part of the push rod 5 is positioned at the top port 68b of the sealing head 6, the part of the push rod 5 positioned at the sealing head 6 is provided with a peripheral wall 57, and the peripheral wall 57 along the length direction L of the push rod 5 is arranged in a clearance with the sealing head 6.
Structure of the carrier rod 5 referring to fig. 7 and 8, the carrier rod 5 has an end portion 51, the end portion 51 is located at the seal head, the end portion 51 has a root portion 515 and a flange portion 512, the flange portion protrudes in the radial direction of the carrier rod 5 relative to the root portion 515, the end portion 51 has a peripheral wall 57, the root portion 515 is disposed along the gap between the peripheral wall in the longitudinal direction of the carrier rod and the seal head, and the flange portion is disposed along the gap between the peripheral wall in the longitudinal direction of the carrier rod and the seal head, so that the carrier rod 5 and the seal head have a gap in the radial direction of the carrier rod, and the seal head can be slightly offset in the radial direction relative to the carrier rod 5.
At least two sealing heads 6 have the connecting portion 63 and stretch into the part 64, connecting portion 63 and ejector pin 5 swing joint, connecting portion 63 has the convex part 65 that protrudes in stretch into part 64 in sealing head 6 radial direction on the axial cross section of sealing head, first groove 66 is located between convex part 65 and the stretch into part 64, first sealing washer 67 part is located first groove 66, every ejector pin 5 is driven through the first cylinder 41 with this ejector pin 5 complex, the power of first cylinder 41 is 3MPA for example, first cylinder 41 can drive sealing head 6 and move to frock 2 direction, then when sealing head 6 is located the port of examining work piece 10, make sealing head 6 paste in examining the work piece 10 surface, first sealing washer 67 can be pressed with the work piece 10 surface of examining and realize pressure seal control. The mechanical stop of the first cylinder 41 is achieved by the contact pressure of the sealing head 6 with the surface of the workpiece 10 to be examined. By controlling each sealing head 6 individually, the sealing of the sealing head 6 with the workpiece 10 to be inspected is facilitated.
Because the sealing head 6 needs frequent high-pressure matching with the workpiece 10 to be detected in the detection device, the first sealing ring 67 of the sealing head 6 structure is easy to wear, if the surface of the workpiece 10 to be detected has burrs, embossing or other flaws due to processing reasons, the service life of the first sealing ring 67 is shortened, and therefore the connection between the sealing head 6 and the ejector rod 5 can be a structure convenient for disassembly and assembly.
In one embodiment, referring to fig. 7-10, the seal head 6 has a peripheral side port 68a and a top port 68b, the seal head 6 has a step groove 69, one side of the step groove 69 is the peripheral side port 68a, the other side of the step groove 69 is the top port 68b, a portion of the lift pin 5 is located in the step groove 69, and the lift pin 5 is disposed in contact with a step wall 693 corresponding to the step groove 69.
Herein, one side of the step groove 69 is a peripheral side port 68a, and the other side of the step groove 69 is a top port 68b, which means that the step groove 69 communicates with the outside at the peripheral side and the top, so that the one side and the other side are used herein to mean the side of the step groove communicating with the outside, and the structure of the step groove is similar to an L shape.
The step groove 69 has a first area 691 and a second area 692, the first area 691 and the second area 692 have different widths W in the radial direction of the seal head 6 in a cross section through the center of the seal head, the width of the first area 691 is smaller than the width of the second area 692, the lift pin 5 has an end portion 51, the outer diameter of the end portion 51 of the lift pin 5 is smaller than the second area 692, the outer diameter of the end portion 51 of the lift pin 5 is larger than the first area 691, and the top portion 511 of the end portion 51 of the lift pin 5 contacts the step wall 693.
Herein, the term "radial direction of the sealing head 6" refers to a vertical direction of the sealing head 6 opposite to the length direction L of the carrier rod 5 after being assembled to the carrier rod 5, and generally, the outer shape of the structure of the sealing head 6 is partially circular, but a special structure other than circular is not excluded.
The sealing head 6 has a protruding portion 64 and a connecting portion 63, the connecting portion 63 is movably connected with the ejector 5, the connecting portion 63 is provided with a step groove 69, the connecting portion 63 has a first groove 66 for accommodating a first sealing ring 67, the first groove 66 is positioned on the periphery of the protruding portion 64, the connecting portion 63 has a convex portion 65 protruding from the protruding portion 64 in the radial direction of the sealing head 6, in the axial cross section of the sealing head, the first groove 66 is positioned between the convex portion 65 and the protruding portion 64, and the first sealing ring 67 and the convex portion 65 can be used for sealing the periphery of the port of the workpiece 10 to be detected.
The sealing head 6 has a guide portion 641, and the guide portion 641 is located at the bottom of the sealing head 6, and when the sealing head 6 is inserted into the corresponding port, the guide portion 641 helps to adjust the position of the sealing head to smoothly enter the corresponding port.
The carrier rod 5 has an end part 51, an intermediate part 52 and a body part 53, the intermediate part 52 connects the end part 51 and the body part 53, the end part 51 is located at the sealing head, the end part 51 has a root part 515 and a flange part 512, the flange part protrudes in the radial direction of the carrier rod 5 relative to the root part 515, the end part 51 has a peripheral wall 57, the root part 515 is arranged along the peripheral wall of the carrier rod length direction and the sealing head gap, the flange part is arranged along the peripheral wall of the carrier rod length direction and the sealing head gap, thus, the carrier rod 5 and the sealing head have a gap in the carrier rod radial direction, and the sealing head can slightly deviate in the radial direction relative to the carrier rod 5. Here, the slight radial offset of the sealing head relative to the carrier rod 5 includes an offset of the sealing head relative to the carrier rod at an oblique angle.
The flange part 512 protrudes in the radial direction of the ram 5 relative to the intermediate part 52, the outer diameter of the flange part 512 is larger than the top port 68b of the seal head 6, and the seal head 6 is hung on the top 511 of the flange part 512; the flange portion 512 has an outer diameter smaller than the width of the second region 692, the flange portion 512 has an outer diameter larger than the width of the first region 691, and the height of the flange portion 512 is smaller than the height of the second region 692 with the extending direction of the length of the jack 5 being the height direction. The sealing head further comprises a gasket 60, the gasket 60 is located at the second area, the bottom of the end portion 51 can be in contact with the gasket 60, the axial limiting of the ejector rod and the sealing head is facilitated, the hardness of the gasket 60 is smaller than that of the sealing head, the hardness of the gasket 60 is smaller than that of the ejector rod, and due to the fact that the hardness of the sealing head is smaller than that of the ejector rod, the abrasion of the sealing head can be reduced through the arrangement of the gasket 60.
Here, the width of the first region and the second region refers to a width direction W in the cross section shown in fig. 11.
Herein, the term "the intermediate portion 52 connects the end portion 51 and the main body portion 53" includes a case where the intermediate portion 52, the end portion 51, and the main body portion 53 are assembled by separate parts, and also includes a case where the carrier rod 5 is integrally molded, and the intermediate portion 52 is located between the end portion 51 and the main body portion 53.
The portion of the intermediate portion 52 located at the top port 68b, and the portion of the intermediate portion 52 located at the seal head 6 and the wall portion corresponding to the step groove 69 have a certain clearance in the longitudinal direction L of the carrier rod 5. Ejector pin 5 relative step groove 69 wall portion can move slightly like this, when helping the sealed head 6 to seal the port of waiting to examine work piece 10, has certain self-adaptation guide effect, and is sealed more accurate.
The first sealing ring 67 structure is arranged on the sealing head 6, when the sealing head 6 is sealed and plugged with each workpiece 10 to be detected for a long time, the first sealing ring 67 structure arranged on the sealing head 6 is easy to wear, so that the replacement is needed, and the ejector rod 5 and the sealing head 6 are movably connected, so that the disassembly and the assembly are convenient.
The jack 5 has a sleeve 54 and a spring 55, the spring 55 is located between the intermediate portion 52 and the sleeve 54, the sleeve 54 is sleeved outside the intermediate portion 52 and the main portion 53, the sleeve 54 is movable relative to the main portion 53 along the length direction L of the jack 5, and the spring 55 gives a resilient force to the sleeve 54, so that the sleeve 54 can return to the initial position after displacement.
The end 542 of the sleeve 54 can contact and abut against the top 611 of the sealing head 6, so as to further ensure the limit connection between the push rod 5 and the sealing head 6 along the length direction L of the push rod 5, so that the limit connection between the two is more reliable. In this way, the sleeve 54 abuts against the sealing head 6 under the action of the spring 55, which abuts against the top 51 of the carrier rod 5, thus advantageously ensuring a positive connection between the carrier rod 5 and the sealing head 6, the sealing head 6 being movable up and down with the carrier rod 5.
The sealing head 6 has a protrusion 62, the protrusion 62 protrudes from the top 611 of the sealing head 6, the protrusion 62 is located in the sleeve 54, and a gap is provided between the inner wall of the sleeve 54 and the protrusion 62, so that the sealing head 6 can move radially relative to the sleeve 54 within the gap between the inner wall of the sleeve 54 and the protrusion 62.
The end portion 51 has a top portion 511 and a bottom portion 513, the top portion 511 being in contact with the stepped wall of the sealing head 6, the bottom portion 513 being spaced apart from the wall portion corresponding to the peripheral side port 68a of the sealing head 6.
In the up-and-down movement process of the ejector rod 5, the sealing head is in limit fit with the top of the ejector rod through the limit fit of the sleeve and the sealing head, so that the sealing head moves up and down along with the ejector rod. When the sealing head part stretches into the port of waiting to examine the work piece, sealed head can move at the radial direction at the ejector pin relatively for sealed head still can aim at the port of waiting to examine the work piece well when waiting to examine the work piece and have slight deviation, rather than sealed cooperation.
The sleeve 54 is slidably engaged with the body portion 53, when not mounted, the sleeve 54 is downwardly suspended by the force of the spring 55, when it is desired to mount the sealing head 6, the sleeve 54 is moved upwardly, the sealing head 6 is then placed in contact with the end 51 of the ram 5, and the sleeve 54 is then lowered by the force of the spring 55 onto the top 511 of the sealing head 6, such that the sleeve 54 is located outside the projection of the top of the sealing head in contact with the top of the sealing head, further serving to secure the connection of the sealing head 6.
When the sealing head 6 needs to be installed, the end part 51 of the ejector rod 5 extends from the peripheral side port 68a of the sealing head 6, the end part 51 of the ejector rod 5 firstly extends from the second region 692, after the end part 51 extends, because the outer diameter of the flange part 512 of the end part 51 of the ejector rod 5 is larger than the top port 68b of the sealing head 6, the end part 51 of the ejector rod 5 cannot be separated from the top port 68b of the sealing head 6 in the length extension direction of the ejector rod 5, the sealing head 6 is hung on the top 511 of the flange part 512, the sealing head 6 is in contact with the ejector rod 5 for limiting, and the sealing head 6 can move under the driving of the ejector rod 5.
When it is necessary to remove the seal head 6, the carrier rod 5 can be pulled out from the peripheral side port 68a because the flange portion 512 is smaller than the width of the second region 692.
Specifically, as an embodiment, the outer diameter of the middle portion 52 is smaller than the main body portion 53 and the flange portion 512, the spring 55 is located between the middle portion 52 and the inner wall of the sleeve 54, the inner wall of the sleeve 54 is provided with a protrusion 541, one end of the spring 55 abuts against the main body portion 53, the other end of the spring 55 abuts against the protrusion 541 of the inner wall of the sleeve 54, the ejector rod 5 further includes a snap spring 56, a part of the snap spring 56 abuts against the spring 55, and the other part of the snap spring 56 is limited to the middle portion 52, so that the spring 55 is prevented from falling off.
As another embodiment, referring to fig. 11, the outer diameter of the middle portion 52 is smaller than the main portion 53 and the flange portion 512, the spring 55 is located between the middle portion 52 and the inner wall of the sleeve 54, the bottom portion 513 of the sleeve 54 has an annular bottom portion 542, one end of the spring 55 abuts against the main portion 53, and the other end of the spring 55 abuts against the annular bottom portion 542, so that the sleeve 54 can receive the force of the spring 55 after sliding, and the sleeve 54 can abut against the top portion of the seal head 6 in a contact manner.
It should be noted that: although the present invention has been described in detail with reference to the above embodiments, those skilled in the art will appreciate that various combinations, modifications and equivalents of the present invention can be made by those skilled in the art, and all technical solutions and modifications thereof without departing from the spirit and scope of the present invention are encompassed by the claims of the present invention.

Claims (12)

1. The utility model provides a detection device, includes box and first cylinder, its characterized in that still includes frock, setting element and two above ejector pins, setting element, ejector pin are located the box, the frock is located when detecting the box, first cylinder can drive the ejector pin removes, detection device include with ejector pin matched with seals the head, every the ejector pin be with ejector pin matched with seals the head and is in the spacing setting of ejector pin length direction, every the ejector pin be with ejector pin matched with seals first swing joint, sealed head has the top port, the part of ejector pin is located the top port of sealed head, the ejector pin is located the part of sealed head has the perisporium, follows ejector pin length direction's perisporium with sealed first clearance sets up.
2. The detecting device according to claim 1, wherein the jack has an end portion located at the seal head, the end portion having a root portion and a flange portion, the flange portion projecting in a radial direction of the jack with respect to the root portion, the end portion having the peripheral wall, the root portion being disposed along the peripheral wall in the length direction of the jack with a gap from the seal head, and the flange portion being disposed along the peripheral wall in the length direction of the jack with a gap from the seal head.
3. The detection device according to claim 1 or 2, wherein a part of the ejector rod is located in the positioning member, the ejector rod can move in the length direction of the ejector rod relative to the positioning member, the detection device has a first cavity and a second cavity, the first cavity is not communicated with the second cavity, and the ejector rod can slide in the length direction of the ejector rod under the pressure of gas in the first cavity or the second cavity.
4. The detection device according to claim 3, wherein the positioning member comprises a box body, a first connecting member and a second connecting member, the box body comprises at least three plate portions, adjacent plate portions are welded and fixed or sealed and fixed relatively through a sealing material, the ejector rod is arranged in a sliding and sealing manner with one of the first connecting member and the second connecting member, the ejector rod is arranged in a fixed or limiting manner with the other one of the first connecting member and the second connecting member, the first connecting member is in sealing fit with the box body, the second connecting member is in sealing fit with the box body, and the second cavity is located between the first connecting member and the second connecting member;
the detection device is provided with a first action point and a second action point, at the first action point, the pressure in the first cavity is greater than the pressure in the second cavity, and the gas in the first cavity pushes the ejector rod to move downwards; at the second action point, the pressure in the second cavity is greater than the pressure in the first cavity, and the gas in the second cavity pushes the ejector rod to move upwards.
5. The detection device according to claim 1, 2 or 3, wherein the detection device comprises a second cylinder, the first cylinder and the positioning member are fixed, the first cylinder can drive the positioning member to move towards the tool, the second cylinder is fixedly arranged with the ejector rod, the second cylinder can drive the ejector rod to move, and the second cylinder is fixedly arranged with the positioning member.
6. The detection device according to any one of claims 1 to 5, wherein the detection device comprises a limiting column, the limiting column is fixed with the positioning piece, the limiting column protrudes towards the tool, and when the first cylinder drives the positioning piece to move towards the tool, the limiting column can abut against the tool; or the limiting column is fixed with the tool, and when the positioning piece moves downwards, the limiting column abuts against the cylinder box;
and/or the detection device comprises a guide rod, the guide rod is fixed with the positioning piece, the guide rod protrudes downwards, and when the positioning piece moves downwards, the first air cylinder drives the guide rod to be located in the positioning hole of the tool.
7. The detection device according to claim 1, 2 or 3, wherein at least two of the sealing heads have a connection part and an extending part, the connection part is movably connected with the ejector rod, the connection part has a convex part protruding from the extending part in the radial direction of the sealing head, the connection part has a first groove and a first seal ring, the first seal ring is partially located in the first groove, on the axial cross section of the sealing head, the first groove is located between the convex part and the extending part, the first cylinder can drive the positioning part to move towards the tool, and when the sealing head is located at the port of the workpiece to be detected, the first seal ring can be abutted against the surface of the workpiece to be detected.
8. The detection device according to claim 1, 2 or 3, wherein the number of the first cylinders is more than two, the ejector rods are fixed to the movable ends of the first cylinders, and each first cylinder drives the ejector rod fixed to the movable end of the first cylinder to move;
at least two sealed head has the coupling part and stretches into the part, coupling part with ejector pin swing joint, coupling part has sealed head radial direction protrusion in stretch into partial convex part the coupling part has first groove and first sealing washer, first sealing washer part is located the first groove on the axial cross section of sealed head, first groove is located the convex part with stretch into between the part, work as sealed head is located when examining the port of examining the work piece, first sealing washer can with examine the work piece surface and support and press.
9. The detecting device according to claim 1, 2 or 3, wherein the jack has an end portion, an intermediate portion and a main portion, the intermediate portion connecting the end portion and the main portion, the end portion having a flange portion in a jack radial direction with respect to the intermediate portion, the flange portion having an outer diameter larger than a top port of the sealing head, the sealing head being hung on a top of the flange portion;
the sealing head has a step groove, the step groove has a first area and a second area, on the cross section of the penetrating center of the sealing head, the first area and the second area are different in width in the radial direction of the sealing head, the width of the first area is smaller than the width of the second area, the outer diameter of the flange portion is larger than the width of the first area, the extending direction of the length of the ejector rod is the height direction, and the height of the flange portion is smaller than the height of the second area.
10. The detection apparatus according to claim 1, 2 or 3,
the ejector rod is provided with an end part, an intermediate part and a main body part, the intermediate part is connected with the end part and the main body part, the ejector rod is provided with a sleeve, the sleeve is sleeved outside the intermediate part and the main body part, and the sleeve can move along the length direction of the ejector rod relative to the main body part;
the sealing head is provided with a bulge, the bulge of the sealing head protrudes out of the top of the sealing head, the bulge can be located in the sleeve, the inner wall of the sleeve is arranged with a gap between the bulges, and the end part of the sleeve is contacted with the top of the sealing head to be abutted against the top of the sealing head.
11. The detection device according to claim 1, 2 or 3, wherein the box body is provided with a box door, the tool is telescopically connected with the bottom of the box body, and the tool can move relative to the bottom of the box body.
12. A helium detection method for a workpiece comprises the following steps:
providing a detection device according to any one of claims 1-11;
placing a workpiece to be detected in a tool;
feeding the tool with the workpiece to be detected into a box body, and closing a box door of the box body;
starting a first air cylinder, wherein the first air cylinder can push a positioning piece to move downwards, and the positioning piece pushes each sealing head to approach a workpiece to be detected;
when each sealing head is contacted with the workpiece to be detected, each sealing head can move in the radial direction of the sealing head relative to the ejector rod, at least two sealing heads are aligned to the port of the workpiece to be detected, and each sealing head is contacted and sealed with the surface of the workpiece to be detected;
filling helium into a workpiece to be detected, and detecting whether the workpiece to be detected leaks;
and recovering helium in the workpiece to be detected.
CN202110197373.2A 2021-02-22 2021-02-22 Detection device and helium detection method for workpiece Pending CN114964642A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110197373.2A CN114964642A (en) 2021-02-22 2021-02-22 Detection device and helium detection method for workpiece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110197373.2A CN114964642A (en) 2021-02-22 2021-02-22 Detection device and helium detection method for workpiece

Publications (1)

Publication Number Publication Date
CN114964642A true CN114964642A (en) 2022-08-30

Family

ID=82954620

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110197373.2A Pending CN114964642A (en) 2021-02-22 2021-02-22 Detection device and helium detection method for workpiece

Country Status (1)

Country Link
CN (1) CN114964642A (en)

Similar Documents

Publication Publication Date Title
US6024354A (en) Clamping apparatus
CN113310644B (en) Canned food gas tightness detection device
CN209979143U (en) Airtightness testing device
CN114608752A (en) Air tightness detection device and detection method
CN111001538B (en) Oil injection device
CN114383792B (en) Refrigerant processing gas leakage detection device
CN210240543U (en) Sealing device for air tightness detection
CN102914434A (en) Rapid pluggable sealing inflation mechanism
CN114964642A (en) Detection device and helium detection method for workpiece
CN114964641A (en) Detection device and helium detection method for workpiece
CN116698310B (en) Semiconductor gas valve detection device and detection method
CN110548799B (en) Device and method for ultrahigh-pressure water expansion and vacuum auxiliary forming of clamping and pressing type pipe fitting
CN117213745A (en) Air tightness detection device for groove pipe fitting
CN112108948A (en) Full-automatic ball bearing internal grinding machine
CN116147853A (en) Detection device and helium detection method for workpiece
CN217786442U (en) Automatic positioning device for air tightness test of battery pack
CN213770493U (en) Vacuum adsorption type conveying production line
CN110216441B (en) Natural gas pipe fitting assembly and detection equipment
CN108709692B (en) A aerating device for pipeline gas tightness detects
CN107814186B (en) Sample feeding mechanism for air tightness detection equipment
CN109029870B (en) End cover of ball valve
CN113188729A (en) Air tightness test fixture
CN219570843U (en) Multi-cavity flexible holding clamp sealing device
CN111238347A (en) Workpiece surface pit inspection device
CN108591022B (en) Automatic seal nitrogen machine

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination