CN114962398A - Rotation regulation type gas uniform distribution device, gas distributor and oxidation furnace - Google Patents

Rotation regulation type gas uniform distribution device, gas distributor and oxidation furnace Download PDF

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Publication number
CN114962398A
CN114962398A CN202210412580.XA CN202210412580A CN114962398A CN 114962398 A CN114962398 A CN 114962398A CN 202210412580 A CN202210412580 A CN 202210412580A CN 114962398 A CN114962398 A CN 114962398A
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China
Prior art keywords
gas
air
flow
structures
flow guide
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Pending
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CN202210412580.XA
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Chinese (zh)
Inventor
谈源
曹飞
刘庆君
朱天宇
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Xinchuang Carbon Valley Holding Co ltd
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Xinchuang Carbon Valley Holding Co ltd
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Priority to CN202210412580.XA priority Critical patent/CN114962398A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15DFLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00Influencing flow of fluids
    • DTEXTILES; PAPER
    • D01NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01DMECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
    • D01D10/00Physical treatment of artificial filaments or the like during manufacture, i.e. during a continuous production process before the filaments have been collected
    • D01D10/02Heat treatment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02WCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W10/00Technologies for wastewater treatment
    • Y02W10/10Biological treatment of water, waste water, or sewage

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Textile Engineering (AREA)
  • Fluid Mechanics (AREA)
  • General Engineering & Computer Science (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

The invention relates to the technical field of oxidation furnaces, in particular to a rotary adjusting type gas uniform distribution device which comprises a plurality of flow guide structures arranged in parallel along a first linear direction, wherein a space between every two adjacent flow guide structures is used for air flow to pass through; the flow guide structure is rotationally arranged around a set axis, and the set axis is vertical to the first straight line direction; the power transmission device is used for transmitting the power to the diversion structures and keeping the current angles of the diversion structures after the power output is finished. The invention provides the gas uniform distribution device which can adjust the direction of the actually flowing gas flow aiming at the use of gas distributors with different structures, so that the deviation between the direction of the gas flow from the gas distributors and the direction of the precursor is compensated, namely, the gas flow is matched with the gas distributors through different rotation angles, and the gas flow with the same direction as the precursor is finally output. Meanwhile, the invention also claims a gas distributor and an oxidation furnace.

Description

Rotation regulation type gas uniform distribution device, gas distributor and oxidation furnace
Technical Field
The invention relates to the technical field of oxidation furnaces, in particular to a rotary adjusting type gas uniform distribution device, a gas distributor and an oxidation furnace.
Background
The oxidation chamber is arranged in the existing oxidation furnace to allow the precursor to pass through, hot air flowing to the other end is blown in from one end of the oxidation chamber through control, and the precursor is blown by the hot air in the flowing process, so that the pre-oxidation process of the precursor is realized.
The optimal state of the airflow blown into the oxidation chamber is that the wind direction is along the trend of the protofilament, and in the actual structure of the oxidation furnace, the airflow needs to be uniformly distributed by the air distributor and enters the oxidation chamber, but for the air distributors with different structures, the actual flowing-out airflow direction may deviate from the designed direction to different degrees.
How to compensate the deviation becomes a problem to be solved urgently by those skilled in the art. In view of the above problems, the present inventors have conducted research and innovation based on practical experience and professional knowledge that is abundant over many years in engineering application of such products and by using the theory, and have designed a rotary regulating type gas distribution device, and a gas distributor and an oxidation furnace using the rotary regulating type gas distribution device.
The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
Disclosure of Invention
The invention provides a rotary adjusting type gas uniform distribution device, a gas distributor and an oxidation furnace, which can effectively solve the problems in the background technology.
In order to achieve the purpose, the invention adopts the technical scheme that:
a rotary adjusting type gas uniform distribution device comprises a plurality of flow guide structures which are arranged in parallel along a first straight line direction, and a space between every two adjacent flow guide structures is used for air flow to pass through;
the flow guide structure is arranged around a set axis in a rotating mode, and the set axis is perpendicular to the first straight line direction;
the power transmission device is used for transmitting the power to the diversion structures and keeping the current angles of the diversion structures after the power output is finished.
Further, the adjusting device transmits the power to each flow guiding structure synchronously.
Further, the adjusting device transmits a plurality of groups of power to each flow guide structure.
Further, the flow guide structure comprises a flow guide plate and a rotating shaft;
the guide plate is fixedly connected with the rotating shaft, and the rotating shaft rotates around the set axis;
the guide plate is bent along a curve from the connecting position of the guide plate and the rotating shaft, is inwards concave in the windward direction and outwards convex in the leeward direction.
Furthermore, the thickness of the guide plate is uniformly arranged.
Further, the water conservancy diversion structure still includes two deep bead boards, set up respectively in the guide plate is in set for the both sides of axis direction, with the guide plate encloses jointly and establishes into the cell body structure.
A gas distributor, comprising:
the rotary adjusting type gas uniform distribution device is characterized in that the rotary adjusting type gas uniform distribution device is arranged on the upper part of the rotary adjusting type gas uniform distribution device;
and, an end distributor box;
the end distribution box comprises a plurality of partition plates arranged at intervals, a second air inlet end, a circulation channel and an air outlet end are sequentially formed between every two adjacent partition plates, and the air outlet ends formed among the partition plates are uniformly distributed along the first straight line direction; each second air inlet end is connected with air to enter and conveys the air to the rotary adjusting type air uniform distribution device.
Furthermore, the number of the flow guide structures corresponding to each air outlet end is equal.
Further, still include:
the middle distribution box comprises a box body, two partition plates, at least one first air inlet end and a plurality of air outlet holes which are uniformly distributed, the two partition plates are arranged in the box body in a V shape, one side of a sharp corner of the V shape faces the first air inlet end, a circulation channel with the gradually reduced cross section in the air circulation direction is formed between the two partition plates and two parallel side walls of the box body respectively, the air outlet holes are uniformly distributed on the two parallel side walls relatively, and the air entering from the first air inlet end is uniformly distributed in the opposite direction;
the end distribution boxes and the middle distribution boxes are correspondingly arranged in two, the end distribution boxes and the middle distribution boxes are arranged at two ends of the middle distribution box in the second installation direction, and each first air inlet end and each second air inlet end meet the air inlet in the same direction;
the first mounting direction, the second mounting direction and the direction of gas entry are disposed along the X, Y and Z axes, respectively.
An oxidation oven comprising:
a frame structure having an oxidation chamber;
and at least two layers of gas distributors as described above;
the gas distributors are uniformly distributed along the first installation direction, and a gap between every two adjacent layers of the gas distributors is used for allowing protofilaments in the oxidation cavity to pass through; the gas distributors are used for supplying gas to the oxidation cavities on two sides of the protofilament in the second installation direction and the space between two adjacent layers of the gas distributors.
Through the technical scheme of the invention, the following technical effects can be realized:
the invention provides an air uniform distribution device which can adjust the direction of actually flowing air flow aiming at the use of air distributors with different structures, so that the deviation between the direction of the air flow from the air distributor and the trend of precursor filaments is compensated, namely, the air flow is matched with the air distributor through different rotation angles, and finally, the air flow which is the same as and uniform with the trend of the precursor filaments is output; the gas distributor adopting the gas uniform distribution device can effectively solve the problems of turbulence and non-uniformity of gas flow when the gas flow enters the main chamber, thereby effectively ensuring the effect of protofilament oxidation.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and it is also possible for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
FIG. 1 is a schematic view showing the distribution of two adjacent flow-guiding structures and the air flow passing between the two flow-guiding structures;
FIG. 2 is a schematic view (including a partial enlargement) of a plurality of flow directing structures and an adjustment device after installation;
FIG. 3 is a schematic view of the structure of FIG. 2 with two layers, so as to obtain in the middle a gap for the filaments to pass through;
FIG. 4 is a schematic view of a plurality of flow directing structures mounted with another adjustment device;
FIG. 5 is an enlarged view of a portion of FIG. 4 at D;
FIG. 6 is a schematic view of a plurality of flow guide structures arranged along a set axis direction, and the rotating shafts of the flow guide structures are fixedly connected and adjusted by a same force application part;
FIG. 7 is a schematic view of an optimized flow guide structure;
FIG. 8 is a schematic view of the use of the gas distributor;
FIG. 9 is a schematic view of the construction of the center distributor box;
FIG. 10 is a schematic diagram of a gas distributor;
reference numerals:
A. a first linear direction; B. running the raw silk; C. a rotary regulating type gas uniform distribution device; 1. a flow guide structure; 11. a baffle; 12. a rotating shaft; 13. a wind deflector; 2. setting an axis; 3. an adjustment device; 31. a gear; 32. a rack; 33. a force application part; 4. a middle distribution box; 41. a box body; 42. a first air inlet end; 43. an air outlet; 44. a partition plate; 5. an end distributor box; 51. a partition plate; 52. a second air inlet end; 53. a flow-through channel; 54. an air outlet end; 6. a fan.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The first embodiment is as follows:
as shown in fig. 1 and 2, a rotary adjustment type gas uniform distribution device comprises a plurality of flow guide structures 1 arranged in parallel along a first linear direction a, and a space between every two adjacent flow guide structures 1 is used for air flow to pass through; the flow guide structure 1 is arranged around a set axis 2 in a rotating mode, and the set axis 2 is perpendicular to the first straight line direction A; the device also comprises an adjusting device 3 which outputs power for rotating the diversion structures 1, transmits the power to each diversion structure 1 and keeps the current angle of the diversion structure 1 after the power output is finished.
In the embodiment, an air uniform distribution device capable of adjusting the direction of actually flowing air flow for different air distributors is provided, so that the deviation between the direction of the air flow from the air distributors and the direction of the precursor flow B is compensated, namely, the air flow matched with the air distributors is realized through different rotation angles, and the air flow with the same direction of the precursor flow B is finally output; the gas distributor adopting the gas uniform distribution device can effectively solve the problems of turbulence and non-uniformity of gas flow when the gas flow enters the main chamber, thereby effectively ensuring the effect of protofilament oxidation.
In the specific implementation process, the adjusting device 3 is used as a control end to perform the angle adjustment, and when the single angle adjustment is completed to the next angle adjustment, the set angle of the diversion structure 1 is maintained by controlling the adjusting device 3, so that the stable working state is maintained.
As an optimization, the adjusting device 3 transmits power to each flow guiding structure 1 synchronously; after power is output, the synchronous rotation of the diversion structures 1 is kept, so that the integral adjustment of airflow distribution in the oxidation chamber can be effectively realized, and the adjustment difficulty is reduced.
As shown in fig. 2, an adjusting device 3 capable of achieving the above synchronous adjustment is provided, which includes gears 31 corresponding to the diversion structures 1 one by one and fixedly arranged relatively, and axes of the gears 31 coincide with the set axis 2; the flow guide structure further comprises a rack 32, the rack moves along the first linear direction A in the set plane and is meshed with the gears 31, and the gears 31 synchronously rotate through adjusting the position of the rack 32, so that the flow guide structures 1 are driven to synchronously rotate. Of course, the above embodiment is only a specific embodiment, and other structures capable of achieving the above technical objects are also within the scope of the present invention.
In the process of pre-oxidizing the precursor, in order to improve the production efficiency, the precursor often enters the oxidation cavity in a multi-layer distribution manner, so that correspondingly, the rotation-adjusting-type gas distribution device in the present invention also has multiple layers to match the number of layers of the precursor, and the synchronization can be realized not only for a single layer in the above embodiment, but also for multiple layers as shown in fig. 3, and in the above embodiment, when each rack 32 realizes the linear motion of synchronization through linkage, the synchronous rotation of all the flow guiding structures 1 in the multi-layer distribution device can be realized.
Alternatively, as another optimization, the adjusting device 3 transmits several sets of power to each flow guiding structure 1. As shown in fig. 4 and 5, a specific way of independently inputting power to the air guiding structure 1 is shown, in this way, the adjusting device 3 includes a plurality of force applying portions 33 which are arranged in one-to-one correspondence with the set axis 2, and the rotation of the air guiding structure 1 around the set axis 2 can be realized by the rotation of the force applying portions 33; similarly, the above embodiment is merely a specific embodiment, and other structures capable of achieving the above technical objects are also within the scope of the present invention.
In fig. 4 and 5, the specific number of the groups corresponds to the number of the flow guide structures 1 one by one, and each flow guide structure 1 can realize independent angle adjustment; when the linkage between any two or more force application parts 33 is needed to be realized to reduce the number of groups, the linkage of rotation can be realized only by the existing structure. Similarly, when performing the simultaneous pre-oxidation of multiple layers of precursor, the force application portion 33 in the present invention can synchronously perform the synchronous angle adjustment of the corresponding flow guiding structures 1 in multiple layers, as shown in fig. 6, only needs to establish the relative fixation of the rotating shaft 12 of the corresponding flow guiding structure 1 in multiple layers.
In the above specific embodiment, no matter the rack 32 or the force application part 33 is used, a corresponding fixing structure needs to be arranged in the adjusting device 3 to fix the position after the adjustment is completed, in the process of using the uniform distribution device, the adjusting device 3 is preferably arranged outside a chamber for installing the flow guide structure 1, and the chamber is formed by enclosing a shell structure, so as to avoid the influence on the air flow circulation, and for the fixing structure, the installation can be realized on the shell structure, so as to obtain the position corresponding to the rack 32 or the force application part 33, and the like, so as to realize any fixing mode such as clamping fixing, bolt fixing, clamping fixing, and the like.
The mode of each water conservancy diversion structure 1 simultaneous movement or independent motion above can be selected according to different gas distributor, and when the gas distribution effect that gas distributor realized is more excellent, more be fit for adopting the implementation mode of the simultaneous movement of being convenient for control more, and when gas distributor is limited to the evenly distributed effect of air current, be fit for more adopting the independent control mode that can carry out independent compensation to different positions to further promote the homogeneity behind the gaseous entering oxidation chamber.
As a preference of the above embodiment, the flow guiding structure 1 includes a flow guiding plate 11 and a rotating shaft 12; the guide plate 11 is fixedly connected with a rotating shaft 12, and the rotating shaft 12 rotates around the set axis 2; the guide plate 11 is curved from the connection position with the rotating shaft 12, and is inwardly recessed in the windward direction and outwardly protruding in the leeward direction.
In the preferred scheme, the flow guide structure 1 with the curved main body is protected, so that the purpose of changing the direction of airflow is achieved, the change of the direction is softer, and the flow guide structure can enter an oxidation chamber more stably in compliance with the trend of the curved surface.
In order to reduce the difficulty of processing, the thickness of guide plate 11 evenly sets up to can directly form through even plate body bending, certainly, need reduce the thickness of plate body as far as, thereby make the influence degree of plate body thickness itself to the air current reduce to minimumly.
As a preferable example of the above embodiment, referring to fig. 4 to 7, the flow guiding structure 1 further includes two wind shielding plates 13 respectively disposed on two sides of the flow guiding plate 11 in the direction of the set axis 2, and enclosing with the flow guiding plate 11 to form a trough structure. Through the setting of deep bead 13 for 11 shapes of the guide plate of bending state are more stable, and the effectual effect that has played the structure reinforcing, on the other hand has also realized gaseous relative concentration, avoids overflowing from the edge etc. and cause the air current inhomogeneity in the oxidation chamber and the impact to the precursor.
Example two:
as shown in fig. 8 to 10, a gas distributor comprises: the rotary regulating type gas uniform distribution device C as described in the first embodiment; and an end distributor box 5.
The end distribution box 5 comprises a plurality of partition plates 51 arranged at intervals, a second air inlet end 52, a circulation channel 53 and an air outlet end 54 are sequentially formed between every two adjacent partition plates 51, the air outlet ends 54 formed among the partition plates 51 are uniformly distributed along a first straight line direction A, and the second air inlet ends 52 meet the air inlet and convey the air to a rotary regulation type air uniform distribution device C.
The rotation adjusting type gas uniform distribution device C is matched with the end distribution box 5 for use, so that the entering gas is guided and changed in direction to enter in a specified direction, meanwhile, each partition plate 51 can also pre-distribute the gas, so that the gas can reach the rotation adjusting type gas uniform distribution device C in a relatively uniform state, and the uniformity of the subsequent gas after direction readjustment is ensured.
Since each partition plate 51 needs to adjust the direction of the entering gas, when a plurality of partition plates are arranged, the shapes of the inside and the outside of one end where the gas enters are different from each other, and the direction of the gas flowing out is deviated to a certain extent, so that the problem is solved by adopting a rotary adjusting type gas uniform distribution device C; through the cooperation of above two structures use for the gas that finally flows out can all obtain the promotion of certain degree from direction homogeneity and distribution uniformity etc..
Wherein, the number of the flow guiding structures 1 corresponding to each air outlet end 54 is equal. Thereby ensuring uniformity.
As a preference of the above embodiment, the gas distributor further comprises: the middle distribution box 4 comprises a box body 41, two partition plates 44, at least one first air inlet end 42 and a plurality of air outlet holes 43 which are uniformly distributed, wherein the two partition plates 44 are arranged in the box body 41 in a V shape, one side of a sharp corner of the V shape faces the first air inlet end 42, a flow channel with a gradually reduced section in the air flow direction is respectively formed between the two parallel side walls of the two partition plates 44 and the box body 41, the air outlet holes 43 are relatively uniformly distributed on the two parallel side walls, and the air entering from the air inlet ends is uniformly distributed in the opposite direction; the end distribution boxes 5 are arranged corresponding to each middle distribution box 4, and are arranged at two ends of the middle distribution box 4 in the second installation direction, and each first air inlet end 42 and each second air inlet end 52 meet the air inlet in the same direction; the first mounting direction, the second mounting direction, and the direction of gas entry are disposed along the X, Y and Z axes, respectively.
In operation, in the X direction, i.e. the direction of the outlet holes 43, the gas for heating the filaments passing between two adjacent gas distributors is supplied, while in the Y direction, i.e. the direction of the outlet of the end distributor box 5, the gas for heating the filaments entering the oxidation chamber is supplied to both sides, while in the Z direction, i.e. the direction of the inlet of the gas, the supply of gas is mainly performed for the end distributor box 5 and the middle distributor box 4.
In the working process, the distribution of the inlet gas in different directions is realized by the middle distribution box 4 and the end distribution box 5, and the distribution uniformity is effectively ensured by the uniformly arranged gas outlet holes 43 and the flow guide structures 1; so that the strands are heated relatively uniformly throughout the transfer.
Example three:
an oxidation oven comprising a frame structure having an oxidation chamber, and at least two layers of gas distributors as described in example two, each gas distributor being uniformly distributed along a first installation direction, and gaps between adjacent layers of gas distributors being provided for filaments within the oxidation chamber, the gas distributors being adapted to provide gas supply to the filaments within the oxidation chamber on both sides of a second installation direction, and between adjacent layers of gas distributors.
The operation of the oxidation furnace in this embodiment is described in the above embodiment, and will not be described herein.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are given by way of illustration of the principles of the present invention, but that various changes and modifications may be made without departing from the spirit and scope of the invention, and such changes and modifications are within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (10)

1. A rotary adjustment type gas uniform distribution device is characterized by comprising a plurality of flow guide structures which are arranged in parallel along a first straight line direction, wherein a space between every two adjacent flow guide structures is used for air flow to pass through;
the flow guide structure is rotationally arranged around a set axis, and the set axis is perpendicular to the first straight line direction;
the power transmission device is used for transmitting the power to the diversion structures and keeping the current angles of the diversion structures after the power output is finished.
2. The rotary regulated gas sparger assembly of claim 1 wherein said regulator means simultaneously transfers said power to each of said flow directing structures.
3. The rotary regulated gas distribution apparatus according to claim 1, wherein said regulating means provides a plurality of sets of power transmission to each of said flow directing structures.
4. The rotary regulating gas uniform distribution device according to any one of claims 1 to 3, wherein the flow guide structure comprises a flow guide plate and a rotating shaft;
the guide plate is fixedly connected with the rotating shaft, and the rotating shaft rotates around the set axis;
the guide plate is bent along a curve from the connecting position of the guide plate and the rotating shaft, is inwards concave in the windward direction and outwards convex in the leeward direction.
5. The rotary regulated gas distribution apparatus according to claim 4, wherein said baffle is of uniform thickness.
6. The rotation-regulated gas uniform distribution device according to claim 4, wherein the flow guide structure further comprises two wind baffles, which are respectively arranged on two sides of the flow guide plate in the set axis direction and jointly enclose with the flow guide plate to form a groove structure.
7. A gas distributor, comprising:
a rotary regulated gas distribution apparatus as set forth in claim 1;
and, an end distributor box;
the end distribution box comprises a plurality of partition plates arranged at intervals, a second air inlet end, a circulation channel and an air outlet end are sequentially formed between every two adjacent partition plates, and the air outlet ends formed among the partition plates are uniformly distributed along the first straight line direction; each second air inlet end is connected with air to enter and conveys the air to the rotary adjusting type air uniform distribution device.
8. The gas distributor of claim 7, wherein the number of flow directing structures corresponding to each gas outlet end is equal.
9. The gas distributor of claim 7, further comprising:
the middle distribution box comprises a box body, two partition plates, at least one first air inlet end and a plurality of air outlet holes which are uniformly distributed, the two partition plates are arranged in the box body in a V shape, one side of a sharp corner of the V shape faces the first air inlet end, a circulation channel with the gradually-reduced cross section in the air circulation direction is formed between the two partition plates and two parallel side walls of the box body respectively, the air outlet holes are relatively uniformly distributed on the two parallel side walls, and the air entering from the first air inlet end is uniformly distributed in the opposite direction;
the end distribution boxes and the middle distribution boxes are correspondingly arranged in two, the end distribution boxes and the middle distribution boxes are arranged at two ends of the middle distribution box in the second installation direction, and each first air inlet end and each second air inlet end meet the air inlet in the same direction;
the first mounting direction, the second mounting direction and the direction of gas entry are disposed along the X, Y and Z axes, respectively.
10. An oxidation furnace, comprising:
a frame structure having an oxidation chamber;
and at least two layers of the gas distributor of claim 9;
the gas distributors are uniformly distributed along the first installation direction, and a gap between every two adjacent layers of the gas distributors is used for allowing protofilaments in the oxidation cavity to pass through; the gas distributor is used for supplying gas to the oxidation cavities of the two sides of the protofilament in the second installation direction and the space between two adjacent layers of the gas distributor.
CN202210412580.XA 2022-04-19 2022-04-19 Rotation regulation type gas uniform distribution device, gas distributor and oxidation furnace Pending CN114962398A (en)

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Application publication date: 20220830