CN114951217A - MOS chip etching waste recycling apparatus - Google Patents
MOS chip etching waste recycling apparatus Download PDFInfo
- Publication number
- CN114951217A CN114951217A CN202210542378.9A CN202210542378A CN114951217A CN 114951217 A CN114951217 A CN 114951217A CN 202210542378 A CN202210542378 A CN 202210542378A CN 114951217 A CN114951217 A CN 114951217A
- Authority
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- Prior art keywords
- pipe
- mos chip
- etching waste
- waste recycling
- chip etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000004064 recycling Methods 0.000 title claims abstract description 45
- 239000002699 waste material Substances 0.000 title claims abstract description 35
- 238000005530 etching Methods 0.000 title claims abstract description 23
- 239000000428 dust Substances 0.000 claims abstract description 33
- 238000001914 filtration Methods 0.000 claims abstract description 33
- 238000011084 recovery Methods 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 abstract description 9
- 238000005498 polishing Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
- B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
- B09B3/00—Destroying solid waste or transforming solid waste into something useful or harmless
- B09B3/30—Destroying solid waste or transforming solid waste into something useful or harmless involving mechanical treatment
- B09B3/35—Shredding, crushing or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
- B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
- B09B5/00—Operations not covered by a single other subclass or by a single other group in this subclass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention discloses a MOS chip etching waste recycling device, and relates to the technical field of MOS chip processing. The invention comprises a recovery box, filtering components, a combined frame, a pipe conveying component and an air pump, wherein three chambers are arranged in the recovery box, a group of filtering components which are arranged side by side is placed in each chamber, the top of each chamber is matched with a detachable sealing cover, one side of the recovery box is detachably connected with the combined frame through screws, and a dust hood is arranged on the combined frame and is communicated with each filtering component through the pipe conveying component. The recovery box is provided with three chambers, the three chambers work independently without influence, each chamber only recovers constant time, timed and quantitative recovery is realized, workers do not need to constantly observe whether the chamber is fully collected, recovery and reutilization are very convenient, the three chambers are recycled, unloading and recovery are not influenced mutually, recovery efficiency is improved, a large amount of waste is prevented from being lost in the MOS chip etching process, and pollution is reduced.
Description
Technical Field
The invention belongs to the technical field of MOS chip processing, and particularly relates to a MOS chip etching waste recycling device.
Background
In the production process of the MOS chip, materials are removed by using a chemical reaction or a physical impact effect through an etching mode, the current main etching process comprises the following processing modes, namely laser etching processing, electrolytic etching processing, chemical etching processing and the like, and although the processing modes are various, the MOS chip has the following problems in the etching process:
1. in the existing MOS chip etching process, wastes are removed in a physical polishing mode, and in the process, a large amount of wastes are lost, so that materials are wasted, and pollution is caused;
2. the recycling device on the market at present adopts a dust collection mode, but the existing dust collection type recycling device is inconvenient for regular and quantitative recycling, needs workers to often observe whether the collection is full, is inconvenient for recycling, and has low efficiency because the recycling and the discharging are mutually influenced;
3. the existing recycling device is inconvenient to adjust and use according to use requirements, and has weak adjustability and functionality.
Therefore, there is a strong need in the market for improved techniques to solve the above problems.
Disclosure of Invention
The invention aims to provide a MOS chip etching waste recycling device, which solves the problems that the existing recycling device is inconvenient to recycle at regular time and quantity, needs workers to frequently observe whether the existing recycling device is fully collected, is inconvenient to recycle, and influences between recycling and discharging are low, is inconvenient to adjust and use according to use requirements, is not strong in adjustability and is not strong in functionality.
In order to solve the technical problems, the invention is realized by the following technical scheme:
the invention relates to a MOS chip etching waste recycling device, which comprises a recycling box, a filtering component, a combined frame, a dust hood, a conveying pipe component, a three-way connecting pipe and an air pump, wherein three chambers are arranged in the recycling box, a group of filtering components arranged side by side are placed in each chamber, the top of each chamber is matched with a detachable sealing cover, one side of the recycling box is detachably connected with the combined frame through a screw, the combined frame comprises a supporting frame, a base, a time control switch, an electric telescopic rod, a top frame, an electric push rod, a connecting seat, a connecting plate and a bolt, the base is welded at the bottom of the supporting frame, the time control switch is fixed on the outer side surface of the base, the time control switch is electrically connected with the electric telescopic rod, the electric push rod, the electromagnetic valve and the air pump, the top of the supporting frame is connected with the top frame through two symmetrical electric telescopic rods, the top frame is connected with the connecting seat through the electric push rod, the connecting seat is connected with the connecting plate through the bolts, a dust hood is installed on the combined frame and is communicated with the filtering assemblies through the hose conveying assembly, the hose conveying assembly comprises a tee main hose, a hose branch hose and an electromagnetic valve, each branch connecting port of the tee main hose is connected with the outer end of one hose branch hose through one electromagnetic valve, the inner end of one hose branch hose extends into a corresponding mesh bag through a corresponding pipe hole, an output hole is formed in the bottom side of one side face, away from the combined frame, of the recovery box, and the air pump is connected with the output holes of the three bins through tee connecting pipes respectively.
Furthermore, the top surfaces of the two inner side walls of the recycling box are provided with a set of uniformly distributed bearing grooves, and the top side of one side surface of the recycling box is provided with a set of uniformly distributed pipe grooves.
Further, the filter assembly comprises a sealing plate and a filter bag, and the bottom of the sealing plate is detachably connected with the filter bag.
Furthermore, the two sides of the sealing plate are welded with the butt straps, and the center of the sealing plate is provided with the pipe hole.
Furthermore, the filter bag comprises an annular edge plate and a mesh bag, and the mesh bag is fixed at the bottom of the annular edge plate.
Further, the top surface of ring sideboard is fixed with the buckle of a set of equipartition, the draw-in groove of a set of equipartition is seted up to the bottom surface of shrouding, the buckle with the draw-in groove one-to-one, the size of buckle with the size phase-match of draw-in groove, the buckle with the draw-in groove forms the block structure, split filtering component that can be simple and easy.
Further, each of two inside walls of collection box hold and take groove one-to-one, hold the size of taking the groove with the size phase-match of taking the board.
Furthermore, the connecting end of the dust hood transversely penetrates through the mounting hole in the connecting plate to be in threaded connection with the main connecting port of the tee main pipe, and the soft branch pipe penetrates through the corresponding pipe groove to extend into the recovery box.
The invention has the following beneficial effects:
1. the recovery box is provided with three chambers, the three chambers work independently without influencing each other, each chamber only recovers constant time, timed and quantitative recovery is realized, workers do not need to often observe whether the collection is full, and the recovery box is very convenient to recover and recycle.
2. The invention is provided with three chambers for recycling, so that the unloading and the recovery are not influenced mutually, the recovery efficiency is improved, a large amount of wastes are not lost in the MOS chip etching process, and the pollution is reduced.
3. When the dust hood is used, the using angle, the using height and the horizontal position of the dust hood can be adjusted according to the using requirements, the adjustability is strong, the applicability is enhanced, the functionality of the device is enhanced, the adjusting mode is simple, and the dust hood is convenient to operate and use.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the structure of the present invention;
FIG. 2 is a schematic view of the interior of the recycling bin of FIG. 1 according to the present invention;
FIG. 3 is a schematic view of the overall structure of the filter assembly, the assembly frame, the suction hood and the duct assembly of the present invention;
FIG. 4 is a schematic view of the recycling bin of the present invention;
FIG. 5 is a schematic view of the filter assembly of the present invention;
FIG. 6 is a schematic view of the closure plate of FIG. 5 in accordance with the present invention;
FIG. 7 is a schematic view of the construction of the filter bag of FIG. 5 according to the present invention;
FIG. 8 is an assembled view of the connection portion of the suction hood and the duct assembly according to the present invention;
FIG. 9 is a schematic structural view of the assembled rack of the present invention;
FIG. 10 is a schematic view of the connection between the duct assembly and the suction hood according to the present invention.
In the drawings, the reference numbers indicate the following list of parts:
1. a recycling bin; 11. an output aperture; 12. a carrying groove; 13. a pipe groove; 2. a filter assembly; 21. closing the plate; 211. a butt strap; 212. a tube hole; 22. a filter bag; 221. a ring edge plate; 222. a mesh bag; 201. a card slot; 202. buckling; 3. a combined rack; 31. a support frame; 32. a base; 33. a time control switch; 34. an electric telescopic rod; 35. a top frame; 36. an electric push rod; 37. a connecting seat; 38. a connecting plate; 39. a bolt; 4. a dust hood; 5. a delivery pipe assembly; 51. a tee main pipe; 52. a flexible branch pipe; 53. an electromagnetic valve; 6. a three-way connecting pipe; 7. an air pump.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Referring to fig. 1 to 7, the invention is a MOS chip etching waste recycling device, including a recycling tank 1, a filtering assembly 2, a combined frame 3, a dust hood 4, a pipe transmission assembly 5, a three-way connecting pipe 6 and an air pump 7, wherein an output hole 11 is formed at a bottom side of a side surface of the recycling tank 1 away from the combined frame 3, the air pump 7 is respectively connected with the output holes 11 of three chambers through the three-way connecting pipe 6, the type of the air pump 7 is a common type on the market, and not described much, a set of uniformly distributed carrying grooves 12 are formed at top surfaces of two inner side walls of the recycling tank 1, three chambers are arranged inside the recycling tank 1, a set of the filtering assemblies 2 arranged side by side is placed in each chamber, a detachable sealing cover is matched at the top of each chamber, a set of uniformly distributed pipe grooves 13 is formed at a top side surface of the recycling tank 1, the filtering assembly 2 includes a sealing plate 21 and a filtering bag 22, the bottom of the closing plate 21 is detachably connected with a filter bag 22, the two sides of the closing plate 21 are welded with butt straps 211, the center of the closing plate 21 is provided with a pipe hole 212, the filter bag 22 comprises an annular side plate 221 and a mesh bag 222, the bottom of the annular side plate 221 is fixed with the mesh bag 222, the two inner side walls of the recycling box 1 are in one-to-one correspondence with each of the lap grooves 12, and the size of each of the lap grooves 12 is matched with that of the butt straps 211;
the specific application of the above setting is as follows: when the filter component 2 is installed, the access boards 211 at two sides of the filter component 2 are directly placed in a group of corresponding access grooves 12 at two inner side walls of the recovery box 1 one by one, so that the filter component 2 is placed in the recovery box 1, and the assembly operation of the filter component 2 is completed;
when the filter assembly 2 needs to be taken out, the filter assembly 2 is directly taken out.
As shown in fig. 5 to 7, a set of fasteners 202 are uniformly distributed and fixed on the top surface of the annular side plate 221, a set of clamping slots 201 are uniformly distributed and formed on the bottom surface of the closing plate 21, the fasteners 202 correspond to the clamping slots 201 one to one, the sizes of the fasteners 202 are matched with the sizes of the clamping slots 201, and the fasteners 202 and the clamping slots 201 form a clamping structure.
The specific application of the above setting is as follows: when the filter assembly 2 needs to be assembled, the fastener 202 of the annular edge plate 221 of the filter bag 22 is directly vertically clamped into the vertical groove of the clamping groove 201 on the bottom surface of the sealing plate 21, and then the annular edge plate 221 of the filter bag 22 is rotated in the forward direction, so that the fastener 202 is clamped into the innermost end of the arc-shaped groove of the clamping groove 201 on the bottom surface of the sealing plate 21, and then the assembly operation of the filter assembly 2 can be completed;
when the filter assembly 2 needs to be disassembled, the annular side plate 221 of the filter bag 22 is firstly rotated reversely, so that the buckle 202 slides into the vertical groove of the clamping groove 201 from the innermost end of the arc-shaped groove of the clamping groove 201, and then the buckle 202 is pulled away from the vertical groove of the clamping groove 201, and the disassembling operation of the filter assembly 2 can be completed.
As shown in fig. 1 and 8 to 10, one side of the recycling bin 1 is detachably connected with a combined rack 3 through screws, the combined rack 3 comprises a support frame 31, a base 32, a time switch 33, an electric telescopic rod 34, a top frame 35, an electric push rod 36, a connecting seat 37, a connecting plate 38 and bolts 39, the base 32 is welded at the bottom of the support frame 31, the time switch 33 is fixed on the outer side surface of the base 32, the type of the time switch 33 is a common type in the market, which is not described in more detail, the top of the support frame 31 is connected with the top frame 35 through two symmetrical electric telescopic rods 34, the type of the electric telescopic rod 34 is a common type in the market, which is not described in more detail, the top frame 35 is connected with the connecting seat 37 through the electric push rod 36, the type of the electric push rod 36 is a common type in the market, which is not described in more detail, the connecting seat 37 is connected with the connecting plate 38 through the bolts 39, the connecting end of the dust hood 4 traverses the mounting hole on the connecting plate 38 and is in threaded connection with the main connecting port of the three-way main pipe 51.
The specific application of the above setting is as follows: when the using angle of the dust hood 4 is adjusted, the bolt 39 is loosened, the connecting part between the connecting seat 37 and the connecting plate 38 is loosened, then the dust hood 4 is pulled off by external force, the dust hood 4 is adjusted to a proper angle for use, after the angle is adjusted, the bolt 39 is locked immediately, so that the connecting part between the connecting seat 37 and the connecting plate 38 is locked, and the adjusting operation of the using angle of the dust hood 4 can be completed;
when the use height of the dust hood 4 is adjusted, the electric telescopic rod 34 is started through the time control switch 33, and the top frame 35, the electric push rod 36, the connecting seat 37, the connecting plate 38 and the bolt 39 are driven to integrally move up or down through the action of the electric telescopic rod 34, so that the dust hood 4 is moved up or down, and the adjustment operation of the use height of the dust hood 4 can be completed;
when the horizontal position of the dust hood 4 during use is adjusted, the electric push rod 36 is started through the time control switch 33, the connecting seat 37, the connecting plate 38 and the bolt 39 are driven to integrally move inwards or outwards through the action of the electric push rod 36, so that the dust hood 4 is moved inwards or outwards, and the operation of adjusting the horizontal position of the dust hood 4 during use can be completed.
As shown in fig. 1 to 3 and fig. 8 to 10, a dust hood 4 is installed on the assembly rack 3, the dust hood 4 is communicated with each filter assembly 2 through a duct assembly 5, the duct assembly 5 includes a main tee pipe 51, a soft branch pipe 52 and an electromagnetic valve 53, each branch connection port of the main tee pipe 51 is connected with the outer end of one soft branch pipe 52 through one electromagnetic valve 53, the type of the electromagnetic valve 53 is a common type in the market, and not described herein, the inner end of one soft branch pipe 52 extends into a corresponding mesh bag 222 through a corresponding pipe hole 212, the connection end of the dust hood 4 traverses through a mounting hole on the connection plate 38 to be in threaded connection with the main connection port of the main tee pipe 51, and the soft branch pipe 52 extends into the recovery box 1 through a corresponding pipe groove 13.
The specific application of the above setting is as follows: before waste recovery, the use angle, the use height and the horizontal position of the dust hood 4 during use are adjusted according to requirements, so that the dust hood 4 is over against a polishing part during polishing treatment in the MOS chip etching process;
when the waste is recovered, the electromagnetic valve 53 at the leftmost side is opened through the time control switch 33, the soft branch pipe 52 at the leftmost side is normally used at the moment, the soft branch pipe 52 at the middle part and the soft branch pipe 52 at the rightmost side are not used, the air pump 7 is started through the time control switch 33 at the moment, the waste is sucked from the dust hood 4 through the action of the air pump 7 and then enters the filter component 2 at the leftmost side in the recovery box 1 through the soft branch pipe 52 at the leftmost side, the waste can be recovered into the mesh bag 222 of the filter component 2 through the filtering action of the filter component 2 at the leftmost side at the moment, and the filtered waste gas is discharged through the three-way connecting pipe 6 and the air pump 7;
after a preset period of time, a proper amount of waste materials are collected in the mesh bag 222 of the leftmost filtering component 2, at the moment, the middle electromagnetic valve 53 is immediately opened under the action of the time control switch 33, the middle soft branch pipe 52 is normally used, the leftmost soft branch pipe 52 and the rightmost soft branch pipe 52 are not used, at the moment, the air pump 7 is started through the time control switch 33, the waste materials are sucked from the dust hood 4 under the action of the air pump 7 and then enter the middle filtering component 2 in the recycling box 1 through the middle soft branch pipe 52, at the moment, the waste materials can be recycled into the mesh bag 222 of the filtering component 2 under the filtering action of the middle filtering component 2, and the filtered waste gases are discharged through the three-way connecting pipe 6 and the air pump 7;
after the leftmost filtering component 2 finishes working, when the middle filtering component 2 is recovering waste materials, at this time, a worker can open the leftmost bin, take out the filtering component 2 in the leftmost bin, then disassemble the filtering component 2, pour out and collect the waste materials in the mesh bag 222 for subsequent re-treatment and utilization;
after a preset period of time, collecting a proper amount of waste in the mesh bag 222 of the middle filtering component 2, immediately opening the electromagnetic valve 53 on the rightmost side under the action of the time control switch 33, enabling the soft branch pipe 52 on the rightmost side to be normally used, enabling the soft branch pipe 52 on the leftmost side and the soft branch pipe 52 in the middle to be unused, starting the air pump 7 through the time control switch 33, enabling the waste to be sucked from the dust hood 4 under the action of the air pump 7, enabling the waste to enter the filtering component 2 on the rightmost side in the recycling box 1 through the soft branch pipe 52 on the rightmost side, recycling the waste into the mesh bag 222 of the filtering component 2 under the filtering action of the filtering component 2 on the rightmost side, and discharging the filtered waste gas through the three-way connecting pipe 6 and the air pump 7;
after the middle filtering component 2 finishes working, when the rightmost filtering component 2 recovers waste materials, at the moment, a worker can open the middle bin, take out the filtering component 2 in the middle bin, disassemble the filtering component 2, pour out and collect the waste materials in the mesh bag 222 for subsequent re-treatment and utilization;
and then, the operation is carried out in sequence and circularly, so that the waste generated during polishing in the MOS chip etching process can be continuously recycled.
The present invention is not limited to the above embodiments, and any modifications, equivalent substitutions and improvements of some technical features, which are made to the technical solutions described in the above embodiments, are all within the scope of the present invention.
Claims (8)
1. The utility model provides a MOS chip etching waste recycling apparatus, includes collection box (1), filtering component (2), built-up frame (3), defeated tub of subassembly (5) and air pump (7), its characterized in that: the recycling bin (1) is internally provided with three bins, a group of side-by-side filtering components (2) are placed in each bin, the top of each bin is matched with a detachable sealing cover, one side of the recycling bin (1) is detachably connected with the combined frame (3) through screws, a dust hood (4) is installed on the combined frame (3), and the dust hood (4) is communicated with the filtering components (2) through the conveying pipe component (5);
the combined rack (3) comprises a support frame (31), a base (32), a time control switch (33), an electric telescopic rod (34), a top frame (35), an electric push rod (36), a connecting seat (37), a connecting plate (38) and a bolt (39), wherein the base (32) is welded at the bottom of the support frame (31), the time control switch (33) is fixed on the outer side surface of the base (32), the top of the support frame (31) is connected with the top frame (35) through the two symmetrical electric telescopic rods (34), the top frame (35) is connected with the connecting seat (37) through the electric push rod (36), and the connecting seat (37) is connected with the connecting plate (38) through the bolt (39);
the pipe conveying assembly (5) comprises a three-way main pipe (51), soft branch pipes (52) and electromagnetic valves (53), each branch connecting port of the three-way main pipe (51) is connected with the outer end of one soft branch pipe (52) through one electromagnetic valve (53), and the inner end of one soft branch pipe (52) extends into the corresponding mesh bag (222) through the corresponding pipe hole (212);
an output hole (11) is formed in the bottom side of one side face of the recovery box (1) far away from the combined frame (3), and the air pump (7) is connected with the output holes (11) of the three chambers through a three-way connecting pipe (6).
2. The MOS chip etching waste recycling apparatus according to claim 1, wherein: the top surface of two inside walls of collection box (1) all sets up the groove (12) of taking up of a set of equipartition, tub (13) of a set of equipartition are seted up to the top side of collection box (1) one side.
3. The MOS chip etching waste recycling device of claim 2, wherein: the filter assembly (2) comprises a sealing plate (21) and a filter bag (22), wherein the bottom of the sealing plate (21) is detachably connected with the filter bag (22).
4. The MOS chip etching waste recycling device of claim 3, wherein: the two sides of the sealing plate (21) are welded with butt straps (211), and the center of the sealing plate (21) is provided with the pipe hole (212).
5. The MOS chip etching waste recycling device of claim 4, wherein: the filter bag (22) comprises an annular edge plate (221) and a mesh bag (222), and the mesh bag (222) is fixed at the bottom of the annular edge plate (221).
6. The MOS chip etching waste recycling device of claim 5, wherein: a group of evenly distributed buckles (202) is fixed on the top surface of the annular side plate (221), and a group of evenly distributed clamping grooves (201) is formed in the bottom surface of the sealing plate (21);
the clamping buckles (202) correspond to the clamping grooves (201) one by one, the sizes of the clamping buckles (202) are matched with the sizes of the clamping grooves (201), and the clamping buckles (202) and the clamping grooves (201) form clamping structures.
7. The MOS chip etching waste recycling device of claim 6, wherein: each of two inside walls of collection box (1) hold and take groove (12) one-to-one, hold the size of taking groove (12) with the size phase-match of take board (211).
8. The MOS chip etching waste recycling device of claim 7, wherein: the connecting end of the dust hood (4) transversely penetrates through a mounting hole in the connecting plate (38) and is in threaded connection with a main connecting port of the three-way main pipe (51), and the soft branch pipe (52) penetrates through the corresponding pipe groove (13) and extends into the recovery box (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210542378.9A CN114951217A (en) | 2022-05-17 | 2022-05-17 | MOS chip etching waste recycling apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210542378.9A CN114951217A (en) | 2022-05-17 | 2022-05-17 | MOS chip etching waste recycling apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114951217A true CN114951217A (en) | 2022-08-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210542378.9A Pending CN114951217A (en) | 2022-05-17 | 2022-05-17 | MOS chip etching waste recycling apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN114951217A (en) |
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| CN210435028U (en) * | 2019-06-12 | 2020-05-01 | 东莞市金泰环保设备有限公司 | Boiler purifies environmental protection dust collecting equipment |
| CN212711688U (en) * | 2020-06-06 | 2021-03-16 | 南京豪骏电器科技有限公司 | Automatic change powder recovery unit |
| CN215997994U (en) * | 2021-09-06 | 2022-03-11 | 秦皇岛广厦重型装备有限公司 | Welding fume absorbing device |
-
2022
- 2022-05-17 CN CN202210542378.9A patent/CN114951217A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3246456A (en) * | 1963-04-29 | 1966-04-19 | Farr Co | Air filter assembly with removable filter elements |
| CN209006379U (en) * | 2018-08-24 | 2019-06-21 | 万年(吉安)实业有限公司 | A kind of moveable tailoring garbage collection equipment |
| CN209465343U (en) * | 2019-01-14 | 2019-10-08 | 陕西盛泰浩景建材有限公司 | A kind of aggregate screening device |
| CN210435028U (en) * | 2019-06-12 | 2020-05-01 | 东莞市金泰环保设备有限公司 | Boiler purifies environmental protection dust collecting equipment |
| CN110899286A (en) * | 2019-11-15 | 2020-03-24 | 张斌 | Industrial ventilation dust collecting equipment with regulatory function |
| CN212711688U (en) * | 2020-06-06 | 2021-03-16 | 南京豪骏电器科技有限公司 | Automatic change powder recovery unit |
| CN215997994U (en) * | 2021-09-06 | 2022-03-11 | 秦皇岛广厦重型装备有限公司 | Welding fume absorbing device |
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Application publication date: 20220830 |