CN114950581A - Multi-track spiral micro-fluidic chip and manufacturing method thereof - Google Patents

Multi-track spiral micro-fluidic chip and manufacturing method thereof Download PDF

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Publication number
CN114950581A
CN114950581A CN202210353905.1A CN202210353905A CN114950581A CN 114950581 A CN114950581 A CN 114950581A CN 202210353905 A CN202210353905 A CN 202210353905A CN 114950581 A CN114950581 A CN 114950581A
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track
micro
bottom plate
panel
positioning hole
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CN202210353905.1A
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CN114950581B (en
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万宇
项楠
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Southeast University
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Southeast University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0861Configuration of multiple channels and/or chambers in a single devices

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)

Abstract

The invention discloses a multi-track spiral micro-fluidic chip and a manufacturing method thereof, wherein the manufacturing method comprises the following steps: the cover plate, the inner track panel and the bottom plate. The inner track panel is provided with a complete linear micro-channel, a channel inlet and two channel outlets, and the linear track is made into a spiral track through rotation after installation is completed; the bottom plate and other plates are provided with positioning holes. The manufacturing method comprises the following steps: laser cutting and forming of the plate; a microfluidic chip assembly and packaging method. The micro-fluidic chip has the advantages of novel structure, small occupied space and volume and low manufacturing cost, and is suitable for large-flow commercial detection.

Description

Multi-track spiral micro-fluidic chip and manufacturing method thereof
Technical Field
The invention relates to the technical field of microfluidics, in particular to a multi-track spiral microfluidic chip and a manufacturing method thereof.
Background
The micro-fluidic chip can be copied in large batch by a molding method and a hot pressing method, so that the manufacturing efficiency is greatly improved, and the manufacturing cost is reduced. The photoresist structure is used as a mold, polydimethylsiloxane is used as a chip material, and the molding method is adopted to manufacture the microfluidic chip, so that the cost is low and the manufacturing period is short.
At present, due to the self structure of the existing microfluidic chip, the sorting and enrichment rate of the existing microfluidic chip is low, so that the large-scale use requirement cannot be met, and the rate is increased by simply stacking the number of layers, so that the occupied volume of the chip is too large, and the efficiency and the portability cannot be achieved. Meanwhile, the enrichment and separation efficiency is improved by the number of superimposed layers, and the flow velocity of each flow channel cannot be controlled, so that the enrichment and separation accuracy is reduced.
Disclosure of Invention
The invention aims to provide a multi-track spiral micro-fluidic chip and a manufacturing method thereof aiming at the defects of the prior art, so that the problem that the sorting and enrichment efficiency and the chip portability cannot be achieved at the same time is solved, the efficiency is improved, the accuracy is ensured, and the micro-fluidic chip is small in size, high in sorting and enrichment efficiency, low in manufacturing process cost and suitable for large-flow commercial detection.
In order to solve the technical problems, the invention provides the following technical scheme:
a multi-track spiral micro-fluidic chip is characterized in that: including fold in proper order and press apron, interior track panel and the bottom plate that sets up, apron, interior track panel and bottom plate bend into helical structure as a whole, and the both ends of track panel are provided with flow channel entry and runner export in, and the middle part of track panel is provided with a plurality of miniflow channels in, pass through between flow channel entry and the runner export the miniflow channel communicates each other.
Furthermore, the number of the micro flow channels is n, n is larger than 3, the micro flow channels are arranged on the inner track panel in parallel, and the flow channel inlets are communicated with the micro flow channels through tree-shaped branched flow channels.
Furthermore, a partition plate is arranged at the flow channel outlet, the partition plate divides the flow channel outlet into a first flow channel outlet and a second flow channel outlet, and the first flow channel outlet and the second flow channel outlet are respectively positioned on two sides of the inner track panel.
Furthermore, the cover plate, the inner track panel and the bottom plate are sequentially arranged on the spiral structure from outside to inside.
Furthermore, the cover plate, the inner track panel and the bottom plate are respectively provided with a first positioning hole, a second positioning hole and a third positioning hole, and the first positioning hole, the second positioning hole and the third positioning hole are mutually connected.
The manufacturing method of the multi-track spiral micro-fluidic chip comprises the following steps:
step 1: etching and exposing by using a laser micro-machining technology and an ultraviolet laser cutting or PDMS soft lithography technology, manufacturing a cover plate, an inner track panel and a bottom plate, and placing the bottom plate in a tool;
step 2: bonding the inner track panel to the base plate;
and step 3: bonding the cover plate with the inner track panel to complete chip packaging to form a complete flow channel inlet, n linear micro flow channels, a first flow channel outlet and a second flow channel outlet;
and 4, step 4: and (3) rotating and bending the whole chip to form the final multi-track spiral micro-fluidic chip.
Compared with the prior art, the invention has the beneficial effects that: 1. the multi-track spiral microfluidic chip provided by the invention utilizes the manufacturing precision of the soft lithography technology, compared with the superposition of multiple chips, the distance between the tracks is greatly reduced, so that the whole chip volume is reduced, the multi-track simultaneous separation and enrichment can be realized, and the detection efficiency is greatly improved. 2. The flow dividing technology applied in the invention solves the problem of non-uniform flow velocity among the flow channels, the flow velocity of each flow channel can be controlled uniformly through the tree-shaped branched flow channels, the flow velocity of the micro flow channel is directly controlled by controlling the flow velocity of the inlet of the flow channel, the enrichment sorting accuracy is improved, the enrichment sorting operation is easier to control, and the detection accuracy is improved compared with a superposed chip. 3. The linear chip is manufactured firstly, and then the spiral is bent after lamination, so that compared with the method of directly manufacturing the spiral chip, the photoetching difficulty is greatly reduced, and the manufacturing period is shortened. 4. The number n (n >3) of the flow channels of the chip can be determined according to the requirements, so that the chip is more flexible to manufacture, and more possible requirements are met.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional structure of a multi-track spiral microfluidic chip according to the present invention;
FIG. 2 is a top view of a multi-track spiral microfluidic chip according to the present invention;
fig. 3 is a schematic view of a planar unfolding structure of the multi-track spiral microfluidic chip before being bent into a spiral shape according to the present invention;
FIG. 4 is a schematic diagram of the exploded structure of FIG. 3;
fig. 5 is a schematic structural view of the inner rail panel in fig. 4 on a side close to the bottom plate.
Fig. 6 is a schematic structural view of a side of the inner rail panel of fig. 4 close to the cover plate.
Wherein: 1-cover plate, 2-inner track panel, 3-bottom plate, 4-channel inlet, 5-micro channel, 6-tree-shaped branched channel, 7-clapboard, 8-first channel outlet, 9-second channel outlet, 10-first positioning hole, 11-second positioning hole, 12-third positioning hole.
Detailed Description
For the understanding of the present invention, the following detailed description will be made with reference to the accompanying drawings, which are provided for the purpose of illustration only and are not intended to limit the scope of the present invention.
Fig. 1 to 6 show a specific embodiment of a multi-track spiral microfluidic chip, which includes a cover plate 1, an inner track panel 2 and a bottom plate 3 stacked in sequence, the cover plate 1, the inner track panel 2 and the bottom plate 3 are bent into a spiral structure as a whole, a flow channel inlet 4 and a flow channel outlet are arranged at two ends of the inner track panel 2, a plurality of micro flow channels 5 are arranged in the middle of the inner track panel 2, and the flow channel inlet 4 and the flow channel outlet are communicated with each other through the micro flow channels 5.
Preferably, there are 4 microchannels 5, each microchannel 5 is arranged on the inner track panel 2 in parallel, the channel inlets 4 and the microchannels 5 are communicated through tree-shaped branched channels 6, and 1 channel inlet 4 is branched into 4 parallel microchannels 5 through tree-shaped branched channels 6. The flow velocity of each micro-channel 5 is consistent, the flow velocity of each micro-channel 5 is directly controlled by controlling the flow velocity of the channel inlet 4, so that the enrichment sorting accuracy is improved, the enrichment sorting operation is easier to control, and the detection accuracy is improved compared with that of a stacked chip. The flow channel outlet is provided with a partition plate 7, the partition plate 7 divides the flow channel outlet into a first flow channel outlet 8 and a second flow channel outlet 9, the first flow channel outlet 8 and the second flow channel outlet 9 are respectively positioned at two sides of the inner track panel 2, the first flow channel outlet 8 is positioned at one side of the cover plate 1, and the second flow channel outlet 9 is positioned at one side of the bottom plate 3. The cover plate 1, the inner track panel 2 and the bottom plate 3 are sequentially arranged on the spiral structure from outside to inside. The cover plate 1, the inner rail panel 2 and the bottom plate 3 are respectively provided with a first positioning hole 10, a second positioning hole 11 and a third positioning hole 12, and the first positioning hole 10, the second positioning hole 11 and the third positioning hole 12 are connected with each other.
The manufacturing method of the above embodiment adopts the following steps:
step 1: etching and exposing by using a laser micro-machining technology and an ultraviolet laser cutting or PDMS soft lithography technology, manufacturing a cover plate 1, an inner track panel 2 and a bottom plate 3, and placing the bottom plate 3 in a tool;
step 2: accurately bonding the inner rail panel 2 to the bottom plate 3 according to the positions of the second positioning hole 11 and the third positioning hole 12;
and step 3: bonding the cover plate 1 and the inner track panel 2 according to the positions of the first positioning hole 10 and the second positioning hole 11 to complete chip packaging, and forming a complete flow channel inlet 4, 4 linear micro-flow channels 5, a first flow channel outlet 8 and a second flow channel outlet 9;
and 4, step 4: and (3) carrying out rotary bending on the whole chip to form the final multi-track spiral microfluidic core.
The above embodiments are merely illustrative of the technical concept and structural features of the present invention, and are intended to be implemented by those skilled in the art, but the present invention is not limited thereto, and any equivalent changes or modifications made according to the spirit of the present invention should fall within the scope of the present invention.

Claims (6)

1. A multi-track spiral micro-fluidic chip is characterized in that: including fold in proper order and press apron (1), interior track panel (2) and bottom plate (3) that set up, apron (1), interior track panel (2) and bottom plate (3) bend into helical structure as a whole, and the both ends of track panel (2) are provided with runner entry (4) and runner export in, and the middle part of track panel (2) is provided with a plurality of miniflow channels (5) including, pass through between runner entry (4) and the runner export miniflow channels (5) communicate each other.
2. The multi-track spiral microfluidic chip of claim 1, wherein: the micro-channel (5) is provided with n, n is greater than 3, the n is arranged on the inner track panel (2) in parallel, and the channel inlet (4) is communicated with the micro-channel (5) through a tree-shaped branched channel (6).
3. The multi-track spiral microfluidic chip of claim 2, wherein: the runner outlet is provided with a partition plate (7), the partition plate (7) divides the runner outlet into a first runner outlet (8) and a second runner outlet (9), and the first runner outlet (8) and the second runner outlet (9) are respectively positioned at two sides of the inner track panel (2).
4. The multi-track spiral microfluidic chip of claim 3, wherein: the cover plate (1), the inner track panel (2) and the bottom plate (3) are sequentially arranged on the spiral structure from outside to inside.
5. The multi-track spiral microfluidic chip of claim 4, wherein: the cover plate (1), the inner rail panel (2) and the bottom plate (3) are respectively provided with a first positioning hole (10), a second positioning hole (11) and a third positioning hole (12), and the first positioning hole (10), the second positioning hole (11) and the third positioning hole (12) are connected with one another.
6. A method for manufacturing a multi-track spiral microfluidic chip according to claim 4 or 5, comprising the steps of:
step 1: etching and exposing by using a laser micro-machining technology and an ultraviolet laser cutting or PDMS soft lithography technology, manufacturing a cover plate (1), an inner track panel (2) and a bottom plate (3), and placing the bottom plate (3) in a tool;
step 2: bonding the inner track panel (2) to the base plate (3);
and step 3: the cover plate (1) is bonded with the inner track panel (2) to complete chip packaging, and a complete flow channel inlet (4), n linear micro flow channels (5), a first flow channel outlet (8) and a second flow channel outlet (9) are formed;
and 4, step 4: and (3) carrying out rotary bending on the whole chip to form the final multi-track spiral microfluidic core.
CN202210353905.1A 2022-04-06 2022-04-06 Multi-track spiral microfluidic chip and manufacturing method thereof Active CN114950581B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10106008A1 (en) * 2000-02-11 2001-09-06 Agilent Technologies Inc Microreactor for performing polymerase chain reactions, requires only very small sample and is made of material stable during temperature cycling
CN103127971A (en) * 2011-12-02 2013-06-05 国家纳米科学中心 Micro-flow pipe and preparation method
CN103394384A (en) * 2013-08-12 2013-11-20 广东顺德西安交通大学研究院 Paper-based microfluidic chip and preparation method thereof
US20190284517A1 (en) * 2016-11-10 2019-09-19 The Asan Foundation Microfluidic chip, three-dimensional channel structure, cell culture method using same, and activity evaluation method of bioactive substance using same
CN212417987U (en) * 2020-06-23 2021-01-29 华北科技学院 Liquid metal micro-fluidic mixing arrangement

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10106008A1 (en) * 2000-02-11 2001-09-06 Agilent Technologies Inc Microreactor for performing polymerase chain reactions, requires only very small sample and is made of material stable during temperature cycling
CN103127971A (en) * 2011-12-02 2013-06-05 国家纳米科学中心 Micro-flow pipe and preparation method
CN103394384A (en) * 2013-08-12 2013-11-20 广东顺德西安交通大学研究院 Paper-based microfluidic chip and preparation method thereof
US20190284517A1 (en) * 2016-11-10 2019-09-19 The Asan Foundation Microfluidic chip, three-dimensional channel structure, cell culture method using same, and activity evaluation method of bioactive substance using same
CN212417987U (en) * 2020-06-23 2021-01-29 华北科技学院 Liquid metal micro-fluidic mixing arrangement

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