CN114942068A - Integrated spectrometer based on super-structure surface - Google Patents
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
- G01J2003/425—Reflectance
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Abstract
The invention relates to the technical field of spectrometers, in particular to an integrated spectrometer based on a super-structure surface, which comprises a first light reflection module and a second light reflection module which are oppositely arranged and used for reflecting light, wherein the first light reflection module is provided with a collimating reflector, a focusing grating and a linear array CCD (charge coupled device), the second light reflection module is provided with a diaphragm used for passing incident light, the collimating reflector and the diaphragm are oppositely arranged and positioned on an emergent light path of the incident light, the focusing grating and the linear array CCD are positioned on the emergent light path of the second light reflection module, the spectrometer can be suitable for detecting different wave band ranges by reasonably designing a nano micro-structure array, the space size of the spectrometer can be greatly reduced by utilizing a reflection type off-axis folding light path design, and a plurality of optical elements are integrated on the same substrate by etching, the high-precision alignment process in the assembly is omitted, and the anti-interference capacity of the system is improved.
Description
Technical Field
The invention relates to the technical field of spectrometers, in particular to an integrated spectrometer based on a super-structured surface.
Background
The spectrometer can separate and detect the complex color light, and is the most basic detection instrument for spectroscopy application. The conventional spectrometer is large in size, high in requirement on alignment accuracy of optical elements, and poor in interference resistance due to the fact that the spatial separation of polychromatic light can be effectively realized only by long transmission distance because the grating or the prism has different light splitting angles for different wavelengths.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to solve the problems of large volume, high requirement on the alignment precision of optical elements and poor interference resistance of the traditional spectrometer, an integrated spectrometer based on a super-structure surface is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: an integrated spectrometer based on a super-structured surface comprises a first light reflection module and a second light reflection module which are oppositely arranged and used for reflecting light, wherein a collimation reflector, a focusing grating and a linear array CCD are arranged on the first light reflection module;
when the linear array CCD light source is used, incident light irradiates to the collimating reflector through the diaphragm, the collimating reflector performs phase modulation on the incident light and reflects the incident light to the second light reflecting module, the incident light is reflected to the focusing grating through the second light reflecting module, the focusing grating modulates the light into light with different wavelengths and reflects the light to the second light reflecting module at different diffraction angles, then the light is reflected between the first light reflecting module and the second light reflecting module, and finally the light is focused at different positions of the linear array CCD. Compared with the prior art, the design of the off-axis folding light path of this scheme utilization reflective, the space size that can greatly reduced spectrum appearance, spectrum appearance in this scheme have characteristics such as miniaturization, lightweight, interference killing feature are strong.
In order to improve the anti-interference capability and the integration level of the system, further, the first light reflecting module is a first optical chip, and the collimating reflector is a first microstructure array etched on the first optical chip. The first microstructure array is integrated on the first optical chip by etching, so that a high-precision alignment process in assembly is omitted.
In order to improve the anti-interference capability and the integration level of the system, further, the focusing grating is a second microstructure array etched on the first optical chip. The second microstructure array is integrated on the first optical chip by etching, so that a high-precision alignment process in assembly is omitted.
In order to improve the anti-interference capability and the integration level of the system, further, the second light reflection module is a second optical chip, and the diaphragm is a through hole etched on the second optical chip. The diaphragm is integrated on the second optical chip by etching, and a high-precision alignment process in assembly is omitted.
Furthermore, the collimating mirror and the diaphragm are on an x-y plane, the centers of the collimating mirror and the diaphragm are aligned with each other, the distance between the first light ray reflecting module and the second light ray reflecting module is g, the diameter of the diaphragm is D, the divergence angle of the incident light after passing through the diaphragm is θ, and the diameter of the collimating mirror is D +2g tan θ.
Further, the phase space distribution corresponding to the collimating mirror is:
wherein λ 0 Is the central wavelength of the spectrometer, and alpha is the reflection angle of the light modulated by the collimating mirror.
Further, the phase space distribution corresponding to the focusing grating is:
wherein λ 0 F is the central wavelength of the spectrometer, f is 2n g is the focal length of the focusing grating (4) (n is 1, 2, 3.), and beta is the reflection angle of the central wavelength modulated by the focusing grating.
Further, the center distance between the collimating reflector and the focusing grating isL 1 2g tan alpha, and the center distance between the focusing grating and the linear array CCD is L 2 ＝2ng tanβ。
Further, the first microstructure array and the second microstructure array are respectively composed of a transparent substrate, a metal coating film, a transparent dielectric film and a plurality of etched dielectric nanocylinders which are sequentially stacked.
Furthermore, the dielectric substance nanocylinders are arranged in a hexagonal grid, the heights of the dielectric substance nanocylinders are the same and smaller than the half-center wavelength, and the diameters of the dielectric substance nanocylinders are different. The dielectric substance nanocylinders with different diameters have different modulation phases to the local field, and can realize random modulation of an incident light field, so that the wave front of reflected light can be controlled.
The invention has the beneficial effects that: when the integrated spectrometer based on the super-structure surface is used, through reasonable design of the nano-micro structure array, the spectrometer can be suitable for detection in different wave band ranges, the space size of the spectrometer can be greatly reduced by utilizing the design of a reflective off-axis folding light path, and a plurality of optical elements are integrated on the same substrate by etching, thereby avoiding the alignment process with high precision in assembly, increasing the anti-interference capability of the system, meeting the requirements of traditional spectrum detection such as environment monitoring, food and medicine detection, optical communication and the like, meanwhile, the spectrum detection requirements in some extreme environments, such as miniaturization, light weight, severe vibration or twisting, high-speed motion and the like can be met, the application range of the spectrometer is improved, and the problems of large volume, high requirement on the alignment precision of the optical element and poor interference resistance of the traditional spectrometer are solved.
Drawings
The invention is further illustrated by the following examples in conjunction with the drawings.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of an etching structure of a second light reflecting module according to the present invention;
FIG. 3 is a schematic diagram of an etching structure of a first light reflecting module according to the present invention;
FIG. 4 is a first schematic diagram of a microstructure array of a collimating mirror and a focusing grating on a first light reflecting module according to the present invention;
fig. 5 is a second schematic diagram of a microstructure array of a collimating mirror and a focusing grating on the first light reflecting module according to the present invention.
In the figure: 1. the device comprises a first light reflecting module, a second light reflecting module, a collimating reflector, a focusing grating, a linear array CCD (charge coupled device), a diaphragm, a transparent substrate, a metal coating film, a transparent dielectric film, a dielectric nanocylinder, a first light reflecting module, a second light reflecting module, a collimating reflector, a second light reflecting module, a focusing grating, a second light reflecting module, a third light reflecting module, a fourth light reflecting module, a focusing grating, a fourth light reflecting module, a linear array CCD, a fifth light reflecting module, a sixth light reflecting module, a fifth light reflecting module, a fourth light reflecting module, a focusing grating, a fourth light reflecting module, a transparent substrate, a linear array CCD, a transparent substrate, a linear array CCD, a transparent substrate, a 6, a linear array CCD, a 6, a transparent substrate, a linear array CCD, a transparent substrate, a 6, a transparent substrate, a.
Detailed Description
The invention is described in more detail below with reference to the following examples:
the present invention is not limited to the following embodiments, and those skilled in the art can implement the present invention in other embodiments according to the disclosure of the present invention, or make simple changes or modifications on the design structure and idea of the present invention, and fall into the protection scope of the present invention. It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate a number of the indicated technical features. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
As shown in fig. 1-2, an integrated spectrometer based on a super-structured surface includes a first light reflection module 1 and a second light reflection module 2 which are oppositely disposed and used for reflecting light, a collimating mirror 3, a focusing grating 4 and a linear array CCD5 are disposed on the first light reflection module 1, a diaphragm 6 for passing incident light is disposed on the second light reflection module 2, the collimating mirror 3 and the diaphragm 6 are oppositely disposed and located on an emergent light path of the incident light, and the focusing grating 4 and the linear array CCD5 are both located on an emergent light path of the second light reflection module 2;
when the linear array CCD imager is used, incident light irradiates to a collimating reflector 3 through a diaphragm 6, the collimating reflector 3 performs phase modulation on the incident light and reflects the incident light to a second light reflecting module 2, the incident light is reflected to a focusing grating 4 through the second light reflecting module 2, the focusing grating 4 modulates the light into light with different wavelengths and reflects the light to the second light reflecting module 2 at different diffraction angles, then the light is reflected between a first light reflecting module 1 and the second light reflecting module 2, and finally the light is focused at different positions of a linear array CCD5 through the second light reflecting module 2.
The first light reflecting module 1 is a first optical chip, and the collimating reflector 3 is a first microstructure array etched on the first optical chip.
The focusing grating 4 is a second microstructure array etched on the first optical chip.
The second light reflection module 2 is a second optical chip, and the diaphragm 6 is a through hole etched on the second optical chip.
The collimating mirror 3 and the diaphragm 6 are on an x-y plane, centers of the collimating mirror 3 and the diaphragm 6 are aligned with each other, a distance between the first light reflecting module 1 and the second light reflecting module 2 is g, where g is in μm, a diameter of the diaphragm 6 is D, where D is in μm, a divergence angle of the incident light after passing through the diaphragm 6 is θ, where θ is in rad, and a diameter of the collimating mirror 3 is D +2g tan θ, where D is in μm.
The phase space distribution corresponding to the collimating mirror 3 is as follows:
wherein λ 0 For the center wavelength of spectrometer operation, xy is the spatial coordinate of the horizontal plane, where x, y, λ 0 Is in units of μm and alpha is the reflection angle of the light modulated by the collimating mirror 3, wherein alpha is in units of rad, phase r The unit of (x, y) is rad.
Because the aperture size D of the spectrometer is far smaller than the size D and the transmission distance g of the collimating reflector, the phase distribution of light entering the collimating reflector through the aperture is as follows:
wherein phase ri Has the unit of rad, lambda 0 In μm, g in μm;
after the collimating reflector lens performs phase modulation on incident light, emergent light is parallel light with a reflection angle alpha, namely the phase distribution of the emergent light is as follows:
phase ro ＝2πx sinα/λ 0
wherein phase ro Has the unit of rad, lambda 0 The unit of (b) is μm, the unit of g is μm;
the phase of the collimating mirror that needs to be compensated for is therefore:
the phase space distribution corresponding to the focusing grating 4 is as follows:
wherein λ 0 F is the central wavelength of the spectrometer, and f is 2n g is the focal length n of the focusing grating (4) is 1, 2, 3 0 Has the unit of mum and beta as the reflection angle, phas, of the central wavelength modulated by the focusing grating 4 f The unit of (x, y) is rad. After the light is modulated by the focusing grating 4, the light with different wavelengths is reflected at different diffraction angles and focused at different spatial positions, the diameter of the second microstructure array is larger than that of the first microstructure array, and the diameter of the second microstructure array is in direct proportion to the working wavelength range of the spectrometer.
The light is reflected by the collimating reflector to form an oblique incidence plane light, and after being reflected by the parallel mirror surfaces on the two surfaces, the light irradiates the focusing grating 4 to form phase distribution as follows:
phase fi ＝phase ro ＝2πx sinα/λ 0 ；
wherein phase fi Has the unit of rad, lambda 0 The unit of (2) is mum, the oblique incidence plane light is modulated by a focusing grating 4, the function of the focusing grating 4 is equivalent to that of a blazed grating with a focusing function, the diffraction angle of the central wavelength is beta, and the focal length of the central wavelength is as follows:
f＝2n·g，n＝1，2，3...；
wherein the unit of f is mum, the unit of g is mum, and the phase distribution of the emergent light with the central wavelength after being modulated by the focusing grating 4 is as follows:
wherein phas fo Has the unit of rad, lambda 0 In μm, so the phase that the collimating mirror needs to compensate for is:
phas f the unit of (x, y) is rad, the central distance between the collimating mirror 3 and the focusing grating 4 is L 1 2gtan α, wherein L 1 In μm, g in μm, the focusing grating 4 and the line CCD5
Has a central distance L 2 2ngtan beta, wherein L 2 The unit of (b) is μm, and the unit of g is μm.
The first microstructure array and the second microstructure array are composed of a transparent substrate 7, a metal coating film 8, a transparent dielectric film 9 and a plurality of etched dielectric nanocylinders 10 which are sequentially stacked. The transparent substrate 7 is made of quartz, silicon nitride, or Sapphire (SiO) 2 Or Si 3 N 4 Or Al 2 O 3 ) The metal plating film 8 is made of gold, silver, or aluminum (Au, Ag, or Al), and the transparent dielectric film 9 is made of silicon dioxide or magnesium fluoride (SiO) 2 Or MgF 2 ) The dielectric nanocylinder 10 is made of silicon, titanium dioxide, gallium nitride (Si or TiO) 2 Or GaN), and the like.
The dielectric substance nanocylinders 10 are arranged in a hexagonal grid, that is, the center position of each dielectric substance nanocylinder 10 is arranged in a hexagonal grid, the period of the grid is less than the working wavelength, the heights of the dielectric substance nanocylinders 10 are the same and less than the half-center wavelength, and the diameters of the dielectric substance nanocylinders 10 are different. The dielectric nanocylinders 10 with different diameters have different modulation phases on the local field, and can realize arbitrary modulation on an incident light field in a subwavelength scale, so that the wave front of reflected light can be controlled, each dielectric nanocylinder 10 is equivalent to a local phase modulator, the dielectric nanocylinders 10 with different diameters can realize arbitrary modulation on the local field phase within a range of 0-2 pi, and for example, when the diameter of each dielectric nanocylinder 10 changes within a range of 0.1 lambda-0.4 lambda, the phase modulation of 0-2 pi can be realized at the local position of each hexagonal grid size. The dimensions of the dielectric nanocylinders 10 and the thickness of the transparent dielectric film 9 can be obtained by FDTD simulation from the operating wavelength range of the spectrometer. The spatial distribution of the dielectric nanocylinders 10 size can be designed to achieve the desired phase modulation in a plane, such as the desired phase distribution in the first microstructure array and the second microstructure array.
When the integrated spectrometer based on the super-structure surface is used, the incident light enters through the diaphragm 6 on the second optical reflection module, and irradiates onto a first microstructure array on a first light reflection module 1 with a divergence angle theta, the first microstructure array collimates the divergent light penetrating through a diaphragm 6 and reflects onto a second optical reflection module with an inclination angle alpha, the second optical reflection module reflects onto a second microstructure array, the second microstructure array has the same effect as a reflective blazed grating and a reflective spherical mirror, the incident lights with different wavelengths are reflected by the second microstructure array and then have different diffraction angles, and all have approximately equal focal length, and then are reflected for multiple times by the first light reflection module 1 and the second optical reflection module, therefore, the light can be focused on different positions of the linear array CCD5 after being transmitted for a certain distance, and the function of an integrated spectrometer is realized.
In light of the foregoing description of the preferred embodiment of the present invention, it is to be understood that numerous changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. An integrated spectrometer based on a nanostructured surface, characterized by: the device comprises a first light reflection module (1) and a second light reflection module (2) which are oppositely arranged and used for reflecting light, wherein a collimation reflector (3), a focusing grating (4) and a linear array CCD (5) are arranged on the first light reflection module (1), a diaphragm (6) used for passing incident light is arranged on the second light reflection module (2), the collimation reflector (3) and the diaphragm (6) are oppositely arranged and are positioned on an emergent light path of the incident light, and the focusing grating (4) and the linear array CCD (5) are both positioned on the emergent light path of the second light reflection module (2);
when the CCD linear array is used, incident light irradiates to a collimating reflector (3) through a diaphragm (6), the collimating reflector (3) performs phase modulation on the incident light and reflects the incident light to a second light reflection module (2), the incident light is reflected to a focusing grating (4) through the second light reflection module (2), the focusing grating (4) modulates the light into light with different wavelengths and reflects the light to the second light reflection module (2) at different diffraction angles, then the light is reflected between the first light reflection module (1) and the second light reflection module (2), and finally the light with different wavelengths is focused at different positions of the CCD linear array (5).
2. The integrated spectrometer based on a nanostructured surface according to claim 1, characterized in that: the first light reflecting module (1) is a first optical chip, and the collimating reflector (3) is a first microstructure array etched on the first optical chip.
3. The integrated spectrometer based on a nanostructured surface according to claim 2, characterized in that: the focusing grating (4) is a second microstructure array etched on the first optical chip.
4. The integrated spectrometer based on a nanostructured surface according to claim 3, characterized in that: the second light reflection module (2) is a second optical chip, and the diaphragm (6) is a through hole etched on the second optical chip.
5. The integrated spectrometer based on a nanostructured surface according to claim 1, characterized in that: the collimating mirror (3) and the diaphragm (6) are located on an x-y plane, the centers of the collimating mirror and the diaphragm are aligned with each other, the distance between the first light ray reflecting module (1) and the second light ray reflecting module (2) is g, the diameter of the diaphragm (6) is D, the divergence angle of incident light after passing through the diaphragm (6) is theta, and the diameter of the collimating mirror (3) is D +2gtan theta.
6. The integrated spectrometer based on a nanostructured surface according to claim 5, characterized in that: the phase space distribution corresponding to the collimating reflector (3) is as follows:
wherein λ 0 Is the central wavelength of the spectrometer work, and alpha is the reflection angle of the light modulated by the collimating reflector (3).
7. The integrated spectrometer based on a nanostructured surface according to claim 6, characterized in that: the phase space distribution corresponding to the focusing grating (4) is as follows:
wherein λ 0 F is the central wavelength of the spectrometer, f is 2n g is the focal length of the focusing grating (4) (n is 1, 2, 3.), and beta is the reflection angle of the central wavelength modulated by the focusing grating (4).
8. The integrated spectrometer based on a nanostructured surface according to claim 7, characterized in that: the central distance between the collimating reflector (3) and the focusing grating (4) is L 1 2g tan alpha, and the central distance between the focusing grating (4) and the linear array CCD (5) is L 2 ＝2ng tanβ。
9. The integrated spectrometer based on a nanostructured surface according to claim 3, characterized in that: the first microstructure array and the second microstructure array are respectively composed of a transparent substrate (7), a metal coating (8), a transparent dielectric film (9) and a plurality of etched dielectric nano cylinders (10) which are sequentially stacked.
10. The integrated spectrometer based on a nanostructured surface according to claim 9, characterized in that: the dielectric substance nanocylinders (10) are arranged in a hexagonal grid, the heights of the dielectric substance nanocylinders (10) are the same and smaller than the half-center wavelength, and the diameters of the dielectric substance nanocylinders (10) are different.
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