CN114924350B - On-chip wavelength beam splitter based on folding superlens combination - Google Patents
On-chip wavelength beam splitter based on folding superlens combination Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
Abstract
The invention provides an on-chip wavelength beam splitter based on a folded superlens combination, which comprises an input waveguide, a folded superlens combination and an output waveguide array which are positioned on a waveguide layer, wherein the folded superlens combination is formed by sequentially and rotatably arranging N single superlenses at an included angle theta, and N is a positive integer not less than 2. By adopting the technical scheme of the invention, the folding super lens is utilized to realize continuous turning of the light beam, and the chromatic aberration effect of the lens is amplified; high resolution wavelength splitting is achieved in a compact on-chip size using chromatic aberration accumulation of the N-stage lens. The design scheme is simple, the device size is small, the wavelength resolution is high, and the device is expected to be used in imaging, optical calculation, on-chip spectrometers and other applications.
Description
Technical Field
The invention belongs to the technical field of on-chip photonic devices, and particularly relates to an on-chip wavelength beam splitter based on a folding superlens combination.
Background
With the rapid growth of network traffic caused by the rapid development of the current 5G big data service, the Photonic Integrated Circuit (PIC) has the unique advantages of small volume, easy integration and the like, and the photonic communication characteristics of large bandwidth, ultra-high speed and low energy consumption, and has wide research and application in optical communication and interconnection systems. The operating bandwidth of modulators and detectors commonly used today for on-chip optical communication devices is limited, and the speed of device performance increases have far from meeting the rapidly growing data traffic demands. Therefore, on-chip multiplexing is a common method for improving the communication capacity of a single channel, and wavelength division multiplexing is one of the most widely studied and developed multiplexing technologies. Wavelength division multiplexing is to transmit multiple signals simultaneously using different wavelengths on the same transmission waveguide, and can be classified into Coarse Wavelength Division Multiplexing (CWDM) and Dense Wavelength Division Multiplexing (DWDM) according to channel wavelength intervals. The wavelength interval of the coarse wavelength division multiplexing is usually 20nm and above, and the number of channels in the usual optical communication band is 4 or 8. The wavelength interval of dense wavelength division multiplexing is typically 0.8nm, and the wavelength interval is small, and can support tens or hundreds of channels. Currently, various structures of on-chip wavelength division multiplexing/demultiplexing devices are proposed, such as: array Waveguide Gratings (AWGs) and ladder blazed gratings (EDGs) based on diffraction principles have been commercially available wavelength division multiplexing chips, but the size is relatively large, and the size of the array waveguide gratings adopting a reflection structure can only be reduced by half; micro Ring Resonator (MRR) is also a commonly used wavelength division multiplexer structure, and the principle of multi-beam interference generates a spectrum with higher quality factor in the resonator, but the number of wavelength channels is limited by Free Spectral Range (FSR), the spectral bandwidth is narrow, and the system wavelength drift is very sensitive; the multistage cascade Mach-Zehnder interferometer (MZI) structure can also realize wavelength beam splitting, but the device size is larger because of the precise phase regulation and power control of a large number of MZI device units, the wavelength interval based on the MZI cascade structure is usually larger, the device is suitable for coarse wavelength division multiplexing, and the channel crosstalk of the device is larger; bragg grating structures can achieve wavelength splitting with low crosstalk, but require a large length to achieve full resonance to suppress reflection of the wavelength channels. Chinese patent CN113885137a mentions a wavelength demultiplexing device based on an on-chip superlens structure, in which the superlens is composed of a slot waveguide, the designable parameters are limited, the device size is large, and only one lens has a chromatic dispersion effect, and the wavelength splitting capability is limited. In summary, the various on-chip wavelength splitters used in wavelength division multiplexing systems have respective advantages and disadvantages. Most critical is that it be difficult to achieve both small device size and high wavelength channel resolution.
Disclosure of Invention
Aiming at the technical problems, the invention discloses an on-chip wavelength beam splitter based on a folding superlens combination, which solves the problem that the small device size and the high wavelength channel resolution of the existing on-chip wavelength beam splitter cannot be achieved. Wherein, folding means that the lenses are distributed at a certain included angle.
In this regard, the invention adopts the following technical scheme:
the on-chip wavelength beam splitter based on the folded superlens combination comprises an input waveguide, a folded superlens combination and an output waveguide array which are positioned on a waveguide layer, wherein the folded superlens combination is formed by sequentially combining N single superlenses in a rotating mode at an included angle theta, and N is a positive integer not smaller than 2.
The input waveguide is used for introducing an on-chip light beam, the folded super-lens combination can realize continuous turning of the light beam by utilizing a plurality of layers of folded lenses, and the chromatic aberration effect of the lenses is amplified; the output waveguide array is used for receiving focused light beams with different wavelengths. By adopting the technical scheme, the chromatic aberration accumulation of the N-level lens can be utilized to realize high-resolution wavelength beam splitting in a compact on-chip size.
As a further improvement of the present invention, the included angle θ satisfies: 0 ° < θ <180 °, and 0 ° < θ×n <360 °.
The product of the number N of the folded superlens combinations and the included angle theta is proportional to the wavelength resolution, and the larger the theta is, the higher the wavelength resolution is.
As a further improvement of the present invention, the width w of the single superlens is not greater than the operating wavelength, and the width w satisfies: w (w)>λ/n eff Wherein λ is the operating wavelength, n eff Is the effective refractive index of the waveguide.
Further, the length l and the focal length f of the single superlens are customized according to design targets: l >0 and f >0.
As a further improvement of the present invention, the length l and focal length f of the single superlens are customized according to design goals: l >0 and f >0.
As a further improvement of the present invention, the single superlens consists of a sub-wavelength digital nanopore structure with a large phase gradient. The adoption of the sub-wavelength digital nano-pore structure based on reverse design greatly expands the adjustable parameter space, can manipulate the light field on the nano level, fully utilizes the existing high-precision manufacturing process and high-performance computing capability, shows great potential for simultaneously realizing small-size and high-performance devices, and provides a new thought for the optimal design of the on-chip wavelength beam splitter.
As a further improvement of the present invention, the inner diameter of the nanopore is 50-200nm. Further, the shape of the nanopore may be circular, rectangular, or any preparable shape.
As a further improvement of the present invention, the material of the nano-pore structure is air or a waveguide. Furthermore, the materials of the nano-pore structure are designed and distributed by an automatic optimization algorithm.
As a further improvement of the present invention, the input waveguide includes a single-mode waveguide and a tapered waveguide, the input waveguide being distributed along a normal direction of the folded superlens combination near the 1 st lens of the input waveguide.
As a further improvement of the present invention, the output waveguide array is disposed at a focal position of an nth lens of the folded superlens combination. The N-th lens is the last lens of N single superlenses of the folded superlens combination, which are combined according to clockwise or anticlockwise rotation.
As a further improvement of the present invention, the output waveguide array includes M output waveguides, each of which includes a single-mode waveguide and a tapered waveguide, where M is a positive integer.
As a further improvement of the present invention, the material of the on-chip wavelength beam splitter based on the folded superlens combination is a silicon-on-insulator (SOI), a III-V material or a polymer.
Further, the on-chip wavelength beam splitter based on the folded superlens combination comprises a waveguide layer, a buried layer and a substrate layer.
Compared with the prior art, the invention has the beneficial effects that:
by adopting the technical scheme of the invention, the folding super lens is utilized to realize continuous turning of the light beam, and the chromatic aberration effect of the lens is amplified; the structure utilizes chromatic aberration accumulation of the N-level lens to realize high-resolution wavelength beam splitting in a compact on-chip size. The design scheme is simple, the device size is small, the wavelength resolution is high, and the device is expected to be used in imaging, optical calculation, on-chip spectrometers and other applications.
Drawings
Fig. 1 is a three-dimensional schematic diagram of an 8-channel on-chip wavelength beam splitter based on a 2-layer folded superlens combination according to embodiment 1 of the present invention.
Fig. 2 is a schematic plan view of a single superlens according to embodiment 1 of the present invention.
FIG. 3 is a simulated optical field distribution of an 8-channel on-chip wavelength beam splitter based on a 2-layer folded superlens combination of example 1 of the present invention.
Fig. 4 is a simulated transmission spectrum of an 8-channel on-chip wavelength beam splitter based on a 2-layer folded superlens combination of example 1 of the present invention.
Fig. 5 is a schematic plan view of a 32-channel on-chip wavelength beam splitter based on a 5-layer folded superlens assembly according to embodiment 2 of the present invention.
FIG. 6 is a simulated transmission spectrum of a 32 channel on-chip wavelength beam splitter based on a 5-layer folded superlens combination of example 2 of the present invention
Fig. 7 is a schematic plan view of an 8-channel on-chip wavelength beam splitter based on a 7-layer folded superlens assembly according to embodiment 3 of the present invention.
The reference numerals include:
a 1-silicon substrate layer, a 2-silicon dioxide buried layer, a 3-silicon waveguide layer, a 4-input waveguide, a 5-output waveguide array, a 6-folded superlens combination, a 7-first superlens and an 8-second superlens;
11-first superlens, 12-second superlens, 13-third superlens, 14-fourth superlens, 15-fifth superlens;
21 first superlens, 22-second superlens, 23-third superlens, 24-fourth superlens, 25-fifth superlens, 26-sixth superlens, 27-seventh superlens.
Detailed Description
Preferred embodiments of the present invention are described in further detail below.
Example 1
As shown in fig. 1, an 8-channel on-chip wavelength beam splitter based on a 2-layer folded superlens combination is designed on a silicon-on-insulator (SOI) material with 220nm top silicon, which has a three-layer structure: a silicon substrate layer 1, a silicon dioxide buried layer 2 and a silicon waveguide layer 3. The main body structure of the 8-channel on-chip wavelength beam splitter based on the 2-layer folded superlens combination is arranged on a silicon waveguide layer 3 and comprises an input waveguide 4, a folded superlens combination 6 and an output waveguide array 5 which are sequentially arranged. The folded superlens combination 6 comprises 2 layers of folded cascade superlenses, namely a first superlens 7 and a second superlens 8, wherein the included angle theta of the 2 folded superlenses is 90 degrees, and the theta can be customized according to design targets: 0 ° < θ <180 °.
In the embodiment of the invention, the number N of the superlenses is 2.N can be customized according to design goals: n=2, 3 ….
The input waveguide 4 is formed by interconnecting a single-mode waveguide and a tapered waveguide, wherein the width of the single-mode waveguide is 0.45 μm, the widths of two ends of the tapered waveguide are 0.45 μm and 1 μm respectively, the length of the tapered waveguide is 2 μm, and the input waveguide 4 is distributed in the normal direction of the first superlens 7.
The output waveguide array 5 is composed of 8 output waveguides, the number M of the output waveguide arrays is selected according to the design target definition (M is a positive integer), and the output waveguide array 5 is distributed at the focus position of the second superlens 8.
In an embodiment, 8 output waveguides are formed by interconnecting a single-mode output waveguide and a tapered output waveguide. Wherein the width of the single-mode output waveguide is 0.45 μm, the widths of the two ends of the conical output waveguide are respectively 0.45 μm and 0.6 μm, and the length of the conical output waveguide is 1 μm.
In an embodiment, the body size of the 8-channel on-chip wavelength beam splitter based on a 2-layer folded superlens combination is only 24 μm by 48 μm.
In this embodiment, as shown in fig. 2, the widths w of the first superlens 7 and the second superlens 8 are 1.44 μm, the operating wavelength λ of the device is 1.55 μm, and the effective refractive index n of the slab silicon waveguide is eff =2.4, the width w of the superlens satisfies w>λ/n eff 。
The lengths l=24 μm and the focal lengths f=20 μm of the first and second superlenses 7 and 8 may be customized according to design targets.
Further, the first superlens 7 and the second superlens 8 are composed of sub-wavelength digital square nano-pore structures with large phase gradient, and the shape of the nano-pore can be defined as a round shape, a rectangular shape or any preparable shape; the material of the nano-pore structure is air or silicon material, and the design distribution is carried out by an automatic optimization algorithm.
In this embodiment, the square nano-pore structures of the first superlens 7 and the second superlens 8 have dimensions of 120nm×120nm, and the side length dimension of the directional nano-pore is selected in the range of 50-200nm.
Fig. 3 shows the simulated optical field distribution of the on-chip wavelength beam splitter of this embodiment, and shows that the broadband light source exits from the input waveguide 4, diverges in the slab waveguide and propagates forward, and the diverged wavefront of the light beam passes through the first superlens 7, is collimated and deflected to propagate in the direction of the second superlens 82, and the light beam passes through the second superlens 8, is deflected and focused again to the output waveguide array 5. Due to the dispersion effect of the superlens, light beams with different wavelengths of the broadband light source can be focused to different output waveguides so as to realize wavelength beam splitting.
Fig. 4 is an analog transmission spectrum of an on-chip wavelength division multiplexer according to the technical scheme of the embodiment, the simulation wavelength interval of the device is 24nm, the number of channels is 8, the transmission loss is about 4dB, and the channel crosstalk is less than-15 dB. The device achieves high wavelength channel resolution at small dimensions.
Example 2
On the basis of example 1, as shown in fig. 5, a 32-channel on-chip wavelength beam splitter based on a 5-layer folded superlens combination, which is designed on the silicon-on-insulator material, includes a silicon substrate layer 1, a silicon dioxide buried layer 2, and a silicon waveguide layer 3. The main structure of the device is arranged on a silicon waveguide layer 3 and comprises an input waveguide 4, a folded superlens combination 6 and an output waveguide array 5. The folded superlens combination 6 comprises 5 layers of superlenses which are folded and cascaded, namely a first superlens 11, a second superlens 12, a third superlens 13, a fourth superlens 14 and a fifth superlens 15 in sequence, wherein the first superlens 11, the second superlens 12, the third superlens 13, the fourth superlens 14 and the fifth superlens 15 are arranged in sequence in a rotating mode at a center point, and included angles between the first superlens 11 and the second superlens 12, between the second superlens 12 and the third superlens 13, between the third superlens 13 and the fourth superlens 14 and between the fourth superlens 14 and the fifth superlens 15 are 45 degrees.
The number of the input waveguides 4 is two, the input waveguides 4 are formed by interconnecting a single-mode waveguide and a tapered waveguide, wherein the width of the single-mode waveguide is 0.45 μm, the widths of two ends of the tapered waveguide are 0.45 μm and 1 μm respectively, the length of the tapered waveguide is 2 μm, and the two input waveguides 4 are distributed in the normal direction of the first superlens 11.
The output waveguide array 5 is composed of 32 output waveguides, and the output waveguide array 5 is distributed at the focal position of the fifth superlens 15.
In this embodiment, 32 output waveguides are formed by interconnecting a single-mode output waveguide and a tapered output waveguide. Wherein the width of the single-mode output waveguide is 0.45 μm, the widths of the two ends of the conical output waveguide are respectively 0.45 μm and 0.6 μm, and the length of the conical output waveguide is 1 μm.
In this embodiment, the main body size of the 8-channel on-chip wavelength beam splitter based on the four-layer folded superlens combination is only 100 μm×50 μm.
In this embodiment, the widths w of the first superlens 11, the second superlens 12, the third superlens 13, the fourth superlens 14 and the fifth superlens 15 are 50 μm, the operating wavelength λ of the device is 1.55 μm, and the effective refractive index n of the slab silicon waveguide is eff =2.4, the width w of the superlens satisfies w>λ/n eff 。
The lengths l and focal lengths f of the first superlens 11, the second superlens 12, the third superlens 13, the fourth superlens 14, and the fifth superlens 15 may be customized according to design goals.
Further, the first superlens 11, the second superlens 12, the third superlens 13, the fourth superlens 14 and the fifth superlens 15 are composed of a sub-wavelength digital square nano-pore structure with a large phase gradient, and the shape of the nano-pore can be defined as a round shape, a rectangular shape or any preparable shape; the material of the nano-pore structure is air or silicon material, and the design distribution is carried out by an automatic optimization algorithm.
In this embodiment, the square nano-pore structure has a size of 120nm×120nm, and the side length of the direction nano-pore is selected in a range of 50-200nm.
Fig. 6 shows the analog transmission spectrum of the on-chip wavelength division multiplexer of embodiment 2 according to the technical scheme of the present embodiment, wherein the peak efficiency ranges of different wavelength channels are-8 dB to-9.2 dB. Losses are mainly due to disordered reflection and diffraction from the multilayer lens. The wavelength channel spacing was estimated to be 1nm. Due to the dense pitch (0.6 μm) of the output waveguides, the crosstalk of the device is large.
Comparing this example with the prior art disclosed photonic crystal beam splitter (see Gao, boshen, zhimin Shi, and Robert w.boyd. "Design of flat-band superprism structures for on-chip electro-scope." Optics Express 23.5 (2015): 6491-6496.), the prior art disclosed photonic crystal beam splitter has a size of 135 μm by 42 μm and a resolution of 11nm, whereas the main size of this example has a size of 100 μm by 50 μm and a wavelength channel spacing of 1nm, it can be seen by comparison that the photonic crystal beam splitter of this example is almost the same size but has a higher wavelength resolution.
This example was compared with the arrayed waveguide grating beam splitter disclosed in the prior art (see Akca, b.iman, and Christopher r. Doerr. "Interleaved silicon nitride AWG electrometer." IEEE Photonics Technology Letters 31.1.1 (2018): 90-93.), which has a size of 4cm x 3.5cm, a resolution of 1nm, whereas the bulk size of this example was 100 μm x 50 μm, the wavelength channel spacing was estimated to be 1nm, and the size of this example was smaller with the same wavelength resolution as seen by comparison.
Example 3
On the basis of example 1, as shown in fig. 7, an 8-channel on-chip wavelength beam splitter based on a 7-layer folded superlens combination, which is designed on the silicon-on-insulator material, includes a silicon substrate layer 1, a silicon dioxide buried layer 2, and a silicon waveguide layer 3. The main structure of the device is arranged on a silicon waveguide layer 3 and comprises an input waveguide 4, a folded superlens combination 6 and an output waveguide array 5. The folded superlens combination 6 comprises 7 layers of superlenses which are folded and cascaded, namely a first superlens 21, a second superlens 22, a third superlens 23, a fourth superlens 24, a fifth superlens 25, a sixth superlens 26 and a seventh superlens 27, wherein the first superlens 21, the second superlens 22, the third superlens 23, the fourth superlens 24, the fifth superlens 25, the sixth superlens 26 and the seventh superlens 27 are sequentially arranged in a rotating mode around a central point, and the included angles between the first superlens 21 and the second superlens 22, between the second superlens 22 and the third superlens 23, between the third superlens 23 and the fourth superlens 24, between the fourth superlens 24 and the fifth superlens 25, between the fifth superlens 25 and the sixth superlens 26 and between the sixth superlens 26 and the seventh superlens 27 are 45 degrees.
The number of the input waveguides 4 is two, the input waveguides 4 are formed by interconnecting a single-mode waveguide and a tapered waveguide, wherein the width of the single-mode waveguide is 0.45 μm, the widths of two ends of the tapered waveguide are 0.45 μm and 1 μm respectively, the length of the tapered waveguide is 2 μm, and the two input waveguides 4 are distributed in the normal direction of the first superlens 21.
The output waveguide array 5 is composed of 8 output waveguides, and the output waveguide array 5 is distributed at the focal position of the seventh superlens 27.
In this embodiment, 8 output waveguides are formed by interconnecting a single-mode output waveguide and a tapered output waveguide. Wherein the width of the single-mode output waveguide is 0.45 μm, the widths of the two ends of the conical output waveguide are respectively 0.45 μm and 0.6 μm, and the length of the conical output waveguide is 1 μm.
In this embodiment, the main body size of the 8-channel on-chip wavelength beam splitter based on the four-layer folded superlens combination is only 50 μm×50 μm.
In the present embodiment, the widths w of the first superlens 21, the second superlens 22, the third superlens 23, the fourth superlens 24, the fifth superlens 25, the sixth superlens 26 and the seventh superlens 27 are 1.44 μm, the operating wavelength λ of the device is 1.55 μm, the effective refractive index n of the slab silicon waveguide is eff =2.4, the width w of the superlens satisfies w>λ/n eff 。
The lengths l and focal lengths f of the first superlens 21, the second superlens 22, the third superlens 23, the fourth superlens 24, the fifth superlens 25, the sixth superlens 26, and the seventh superlens 27 may be customized according to design goals.
Further, the first superlens 21, the second superlens 22, the third superlens 23, the fourth superlens 24, the fifth superlens 25, the sixth superlens 26 and the seventh superlens 27 are composed of a sub-wavelength digital square nano-pore structure with a large phase gradient, and the shape of the nano-pore can be defined as a circle, a rectangle or any preparable shape; the material of the nano-pore structure is air or silicon material, and the design distribution is carried out by an automatic optimization algorithm.
In this embodiment, the square nano-pore structure has a size of 120nm×120nm, and the side length of the direction nano-pore is selected in a range of 50-200nm.
In embodiments 2 and 3, the number N of folded lenses and the included angle θ can be customized according to the design target, and the product of the number N of folded superlens combinations and the included angle θ is proportional to the wavelength resolution, and the larger θ×n, the higher the wavelength resolution. Taking example 2 as an example, this example obtained an average resolution of 1nm from the 1532-1564 nm band with 5 folded lenses of 50um width and 32 output waveguides.
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.
Claims (5)
1. An on-chip wavelength beam splitter based on a folded superlens combination, characterized in that: the folded super-lens combination is formed by sequentially and rotatably arranging N single super-lenses at an included angle theta, wherein N is a positive integer not less than 2;
the included angle theta satisfies the following conditions: 0 ° < θ <180 °, and 0 ° < θ×n <360 °;
width of the single superlenswNot greater than the working wavelength, widthwThe method meets the following conditions:w>λ/n eff wherein, the method comprises the steps of, wherein,λfor the operating wavelength to be a function of,n eff is the effective refractive index of the waveguide;
the input waveguide comprises a single-mode waveguide and a conical waveguide, and the input waveguide is distributed along the normal direction of a first lens, close to the input waveguide, of the folded superlens combination;
the output waveguide array is arranged at the focal position of the N lens of the folded superlens combination; the output waveguide array comprises M output waveguides, each output waveguide comprises a single-mode waveguide and a taper waveguide, wherein M is a positive integer.
2. The folded superlens combination based on-chip wavelength beam splitter of claim 1, wherein: the single superlens consists of a sub-wavelength digital nano-pore structure with a phase gradient.
3. The folded superlens combination based on-chip wavelength beam splitter of claim 2, wherein: the inner diameter of the nano-pore is 50-200nm.
4. An on-chip wavelength beam splitter based on a folded superlens combination according to claim 3, characterized in that: the material of the nano-pore structure is air or a waveguide.
5. The folded superlens combination-based on-chip wavelength beam splitter according to any one of claims 1-4, wherein: the material of the on-chip wavelength beam splitter based on the folding superlens combination is silicon on insulator, III-V material or polymer.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113885137A (en) * | 2021-09-17 | 2022-01-04 | 上海交通大学 | Wavelength demultiplexing device based on-chip super lens structure |
| CN114236680A (en) * | 2021-11-29 | 2022-03-25 | 武汉大学 | Multifunctional on-chip super surface and design method and application thereof |
| CN114325963A (en) * | 2020-09-30 | 2022-04-12 | 采钰科技股份有限公司 | Optical communication device |
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| CN113885137A (en) * | 2021-09-17 | 2022-01-04 | 上海交通大学 | Wavelength demultiplexing device based on-chip super lens structure |
| CN114236680A (en) * | 2021-11-29 | 2022-03-25 | 武汉大学 | Multifunctional on-chip super surface and design method and application thereof |
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| CN114924350A (en) | 2022-08-19 |
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