CN114922994A - Novel air-driven type sealing vacuum valve - Google Patents
Novel air-driven type sealing vacuum valve Download PDFInfo
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- CN114922994A CN114922994A CN202210769447.XA CN202210769447A CN114922994A CN 114922994 A CN114922994 A CN 114922994A CN 202210769447 A CN202210769447 A CN 202210769447A CN 114922994 A CN114922994 A CN 114922994A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/10—Internal combustion engine [ICE] based vehicles
- Y02T10/12—Improving ICE efficiencies
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
Abstract
The invention provides a novel air-driven sealed vacuum valve which comprises an air cylinder, a large spring arranged in the air cylinder, a sliding block arranged in the air cylinder in a sliding mode, a connecting rod, a ventilation flange, a connecting shell, a valve cover, a sealed valve plate, a sealing ring, a top ring, a fixing flange arranged on the valve cover and a small spring axially embedded on the fixing flange, wherein an air groove is formed in one end, facing the ventilation flange, of the sliding block, an outer air inlet and an outer air outlet are formed in the outer side of the ventilation flange, an inner air inlet and an inner air outlet are formed in the end face, facing the air groove, of the ventilation flange, the outer air inlet is communicated with the inner air outlet, the inner air inlet is communicated with the outer air outlet, a valve cover air cavity and a valve cover air port are formed in the inner wall of the valve cover, and the valve cover air port is communicated with the valve cover air cavity. The invention has compact structure, simple and efficient driving mode and good sealing effect.
Description
Technical Field
The invention relates to the field of vacuum valves, in particular to a novel air-driven sealing vacuum valve.
Background
With the rapid development of semiconductors in China, the variety and diversity of products are more and more shown, the competition among the semiconductor industries is more and more intense, the selection of semiconductor equipment is particularly important, and particularly, a valve for controlling the vacuum state in the semiconductor equipment is more critical. The vacuum valve is a vacuum system element used for changing the direction of air flow, adjusting the magnitude of air flow and cutting off or connecting a pipeline in a vacuum system. The operating speed and sealing performance of the vacuum valve directly affect the efficiency and quality of semiconductor product production. The running speed and the sealing performance of the vacuum valve are improved, so that enterprises can gain advantages in competition. Therefore, a new technical solution is needed to solve the above problems.
Disclosure of Invention
The invention aims to provide a novel air-driven type sealing vacuum valve which is more stable, has a simpler driving mode and reduces the manufacturing cost on the premise of not reducing the efficiency and the performance.
In order to achieve the technical purpose and achieve the technical requirements, the invention adopts the technical scheme that: a novel air-driven sealed vacuum valve comprises an air cylinder, a large spring arranged in the air cylinder, a sliding block, a connecting rod, a ventilation flange, a connecting shell, a valve cover, a sealing valve plate, a sealing ring, a top ring, a fixing flange arranged on the valve cover, and a small spring axially embedded on the fixing flange, wherein the sliding block, the connecting rod, the ventilation flange, the connecting shell, the valve cover, the sealing valve plate, the sealing ring and the top ring are arranged in the valve cover in sequence and axially, the air cylinder is connected with the sliding block in a sealing manner, the air cylinder is connected with the ventilation flange in a sealing manner, the ventilation flange is connected with the connecting shell, the lower end of the connecting shell is connected with the valve cover in a sealing manner, the top ring, the sealing valve plate and the sealing ring are arranged in sequence and axially, the sealing valve plate is connected with the lower end of the connecting rod, the upper end of the connecting rod is connected with the sliding block, the large spring is arranged between the air cylinder and the sliding block, one end of the sliding block facing the ventilation flange is provided with an air groove, the outer side of the ventilation flange is provided with an outer air inlet and an outer air outlet, the end face, facing the air groove, of the ventilation flange is provided with an inner air inlet and an inner air outlet, the outer air inlet is communicated with the inner air outlet, the inner air inlet is communicated with the outer air outlet, the inner wall of the valve cover is provided with a valve cover air cavity and a valve cover air port, the valve cover air port is communicated with the valve cover air cavity, the valve cover air port faces the end, away from the small spring, of the top ring, the outer air port is communicated with the valve cover air port through an air pipe, the top ring is arranged in the valve cover air cavity and is in sealing connection with the valve cover, the small spring is arranged between the fixed flange and the top ring, the connecting rod is in sealing connection with the ventilation flange, the connecting rod is in sealing connection with the upper end of the connecting shell, the fixed flange is in sealing connection with the valve cover, and the sealing ring is in sealing connection with the sealing valve plate.
According to the preferable technical scheme, one end, away from the ventilating flange, of the air cylinder is provided with a limiting cover in a sealing mode, a limiting column is arranged on the limiting cover, and the large spring is sleeved on the limiting column.
As a preferable technical scheme, the inner air outlet is in an annular groove structure.
As a preferred technical scheme, the top ring comprises a ring body and a plurality of top columns, the circumferences of the top columns are uniformly arranged at a short distance from the outer edge of the ring body, and the top columns are connected with the sealing ring.
As a preferred technical scheme, a clamping groove is formed in one end, facing the top column, of the sealing ring, and the top column is arranged in the clamping groove.
As a preferable technical scheme, one end of the vent flange facing the sliding block is provided with a second boss, and the outer edge of the second boss is provided with a slope.
As a preferred technical scheme, a convex ring is arranged at one end, facing the fixed flange, of the valve cover, and the fixed flange and the top ring are sleeved on the convex ring.
According to the preferable technical scheme, a sliding hole is formed in the center of the ventilating flange, the annular groove is formed in the periphery of the sliding hole, and the connecting rod is inserted into the sliding hole in a sliding mode.
As preferred technical scheme, the fore-set includes top, spliced pole, support column, sealed post, top, spliced pole, support column, sealed post are connected according to the preface, the diameter of top and support column all is greater than the spliced pole, draw-in groove on the sealing ring and the structure phase-match of fore-set, sealed post and valve gap sealing connection.
According to the preferable technical scheme, a threaded hole is formed in one end, connected with the sliding block, of the connecting rod, a bolt is arranged in the center of the sliding block, and the bolt penetrates through the center hole to be in threaded connection with the threaded hole.
The invention has the beneficial effects that:
1) the outer air inlet is filled with gas, the gas can enter the inner air inlet from the outer air inlet due to the large elasticity of the large spring and then flows into the valve cover air cavity from the outer air inlet through a pipeline, the gas pushes the top ring to move towards the fixed flange and compresses the spring, so that the sealing ring is driven to be far away from the sealing valve plate, when the gas is filled to a certain amount, the gas tank generates enough pressure to push the sliding block to be far away from the ventilating flange and compress the large spring, the connecting rod moves along with the sliding block to drive the sealing valve plate to move towards the connecting shell, so that the vacuum valve can be opened to adjust and achieve the purpose of adjusting the gas flow, when the sealing valve needs to be closed, the gas filling is stopped, the gas in the air cavity of the cylinder is firstly removed, the large spring pushes the sliding block back to the ventilating flange, the sealing valve plate enters the valve cover from the connecting shell, then the gas in the valve cover is removed, the small spring pushes the top ring to drive the sealing ring to abut against the sealing valve plate to form sealing, the vacuum valve is closed, the whole structure is simple and compact, the driving mode is simple, the sealing performance is good, the operation is more stable, and the manufacturing cost is reduced on the premise of not reducing the efficiency and the performance;
2) preferably, the sliding block abuts against the limiting column to prevent the sliding block from exceeding the range;
3) preferably, the annular groove has better air outlet effect;
4) preferably, the top pillar is connected with the sealing ring, the structure is simple, the sealing ring can be propped against the sealing ring by matching with the small spring, so that the sealing ring is matched with the sealing valve plate to form sealing, and further preferably, the clamping groove is matched with the top pillar to clamp the top pillar;
5) preferably, the second boss improves the air outlet height, the matching effect with the sliding block is better, and the inclined plane of the second boss is matched with the inner wall of the air cylinder and used for installing a sealing ring and improving the sealing performance;
6) preferably, the convex ring is connected with the fixed flange in a sealing manner, so that the sealing performance is improved, and the top ring is sleeved on the convex ring to have a guiding function;
7) preferably, the top column is simple in structure and easy to mount and dismount, and the assembly efficiency is improved;
8) preferably, the bolt connection is easy to install and dismantle, and the assembly efficiency is improved.
Drawings
FIG. 1 is a three-dimensional view of the present invention;
FIG. 2 is an exploded view of the present invention;
FIG. 3 is a cross-sectional view of the closed state of the present invention;
FIG. 4 is a cross-sectional view of the seal ring of the present invention disengaged from the seal valve plate;
FIG. 5 is an enlarged view of detail C of FIG. 4;
FIG. 6 is another cross-sectional view of the present invention;
FIG. 7 is a top view of the vent flange;
FIG. 8 is a sectional view taken along line A-A of FIG. 7;
FIG. 9 is a cross-sectional view of the valve cover;
FIG. 10 is a cross-sectional view of the slider;
FIG. 11 is a cross-sectional view of the top ring;
FIG. 12 is a cross-sectional view of the seal ring;
FIG. 13 is a cross-sectional view B-B of FIG. 12;
FIG. 14 is an internal view of the open position of the present invention;
in fig. 1-14, 1, cylinder; 101. a cylinder air cavity; 102. a limiting cover; 1021. a first boss; 103. a limiting post; 2. a large spring; 3. a slider; 301. an air tank; 302. a central bore; 4. a connecting rod; 401. a threaded hole; 5. a vent flange; 501. an outer air inlet; 502. an inner air outlet; 503. an inner air inlet; 504. an outer air outlet; 505. a slide hole; 506. a second boss; 6. a connecting shell; 7. a valve cover; 701. a valve cover air port; 702. a valve cover air cavity; 703. a convex ring; 8. a top ring; 801. a ring body; 8011. a first ring body; 8012. a second ring body; 80121. a spring slot; 802. a top pillar; 8021. ejecting the head; 8022. connecting columns; 8023. a support pillar; 8024. sealing the column; 9. a seal ring; 901. a card slot; 9011. a straight line segment; 9012. a circular arc section; 10. a sealing valve plate; 11. fixing the flange; 12. a pipeline; 13. a small spring; 14. a hexagon socket head cap screw.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1-14, the invention provides a novel air-driven sealed vacuum valve, which comprises an air cylinder 1, a large spring 2 arranged in the air cylinder 1, a sliding block 3 arranged in the air cylinder 1 in a sliding manner, a connecting rod 4, a ventilation flange 5, a connecting shell 6, a valve cover 7, a sealed valve plate 10, a sealing ring 9, a top ring 8, a fixed flange 11 arranged on the valve cover 7, and a small spring 13 embedded on the fixed flange 11 in an axial direction, wherein an air cylinder air cavity 101 is arranged in the air cylinder 1, the air cylinder 1 is connected with the sliding block 3 in a sealing manner, the air cylinder 1 is connected with the ventilation flange 5 in a sealing manner, the ventilation flange 5 is connected with the connecting shell 6, the lower end of the connecting shell 6 is connected with the valve cover 7 in a sealing manner, the top ring 8, the sealing ring 9 and the sealed valve plate 10 are arranged in the valve cover 7 in an axial manner, the top ring 8 is connected with the sealing ring 9, the sealed valve plate 10 is connected with the lower end of the connecting rod 4, the upper end of the connecting rod 4 is connected with a slide block 3, the big spring 2 is arranged between the cylinder 1 and the slide block 3, one end of the slide block 3 facing the ventilating flange 5 is provided with an air groove 301, the outer side of the ventilating flange 5 is provided with an outer air inlet 501 and an outer air outlet 504, the end surface of the ventilating flange 5 facing the air groove 301 is provided with an inner air inlet 503 and an inner air outlet 502, the outer air inlet 501 is communicated with the inner air outlet 502, the inner air inlet 503 is communicated with the outer air outlet 504, the inner wall of the valve cover 7 is provided with a valve cover air cavity 702 and a valve cover air port 701, the valve cover air port 701 is communicated with the valve cover air cavity 702, the valve cover air port 701 is facing one end of the top ring 8 deviating from the small spring 13, the outer air outlet 504 is communicated with the valve cover air port 701 through an air pipe, the top ring 8 is arranged in the valve cover 702 and is hermetically connected with the valve cover 7, and the small spring 13 is arranged between the fixed flange 11 and the top ring 8, the connecting rod 4 is connected with the ventilating flange 5 in a sealing mode, the connecting rod 4 is connected with the upper end of the connecting shell 6 in a sealing mode, the fixed flange 11 is connected with the valve cover 7 in a sealing mode, and the sealing ring 9 is connected with the sealing valve plate 10 in a sealing mode;
in practical application, an electromagnetic valve is arranged at an outer air inlet 501 for controlling the inflow of air in an air cylinder 1, the electromagnetic valve is opened, the outer air inlet 501 is communicated with an inner air outlet 502 to form a first air path, the air flows from the outer air inlet 501 to the inner air outlet 502 and then enters an air groove 301, the flow direction of the air has a priority because the elastic force of a large spring 2 is larger than that of a small spring 13, the inner air inlet 503 is communicated with an outer air outlet 504 to form a second air path, a valve cover air port 701 is communicated with a pipeline 12 through a third air path, when the amount of the introduced air is insufficient, the air in the air groove 301 enters the outer air outlet 504 from the inner air inlet 503 and then enters a valve cover air chamber 702 through a flow valve cover air port 701 through the pipeline 12, the air cover 701 faces a top ring 8, so that the air pushes the top ring 8 to move towards a fixed flange 11 and compresses the small spring 13, and the top ring 8 is connected with a sealing ring 9, the sealing ring 9 moves towards the fixed flange 11 along with the top ring 8 so as to be far away from the sealing valve plate 10, when enough gas exists in the gas groove 301, the gas can push the sliding block 3 to be far away from the ventilating flange 5, the connecting rod 4 moves along with the sliding block 3 so as to drive the sealing valve plate 10 to move towards the connecting shell 6, the sealing valve plate 10 enters the connecting shell 6, the height of the sealing valve plate 10 is adjusted by adjusting the flow of the gas, so as to adjust the flow of the vacuum valve, when the vacuum valve needs to be closed, gas intake is stopped, the gas in the cylinder gas cavity 101 can be preferentially discharged, the large spring 2 pushes the sliding block 3 to the ventilating flange 5, the sealing valve plate 10 enters the valve cover 7 from the connecting shell 6, after the gas in the cylinder gas cavity 101 is discharged, the gas in the valve cover gas cavity 702 begins to be discharged, the small spring 13 pushes the top ring 8, so as to drive the sealing ring 9 to abut against the sealing valve plate 10 to form sealing, and thus the good sealing performance is achieved after the vacuum valve is closed, the vacuum valve disclosed by the invention has the advantages of simple and compact structure, small occupied space in the axial direction, simple and stable driving mode, high efficiency, easiness in manufacturing of each part, simplicity in assembly and capability of greatly reducing the manufacturing cost on the premise of ensuring good sealing performance.
As shown in fig. 1 to 14, the contact surface between the slider 3 and the cylinder 1, the contact surface between the vent flange 5 and the connecting rod 4, the contact surface between the connecting shell 6 and the valve cover 7, the contact surface between the top ring 8 and the valve cover 7, and the contact surface between the fixing flange 11 and the valve cover 7, and the contact surface between the sealing ring 9 and the sealing valve plate 10 are sealed by adopting a manner of matching a sealing groove and a sealing ring.
As shown in fig. 1 to 14, a limiting cover 102 is arranged at one end of the air cylinder 1 away from the vent flange 5, the limiting cover 102 is connected with the air cylinder 1 in a sealing manner, a limiting post 103 is arranged on the limiting cover 102, and the spring is sleeved on the limiting post 103; slider 3 moves spacing post 103 department, spacing post 103 offsets with slider 3 and forms spacingly, prevent that slider 3 from exceeding, avoid connecting rod 4 to draw in sealed valve plate 10 in cylinder 1, it is further, the quantity of spacing post 103 is 2, 2 the vertical setting of spacing post 103 symmetry is at spacing lid 102 towards the terminal surface of slider 3, the quantity of big spring 2 is 2, the cover is equipped with 1 big spring 2 on every spacing post 103, make slider 3 move more stably, 2 big spring 2's elasticity is bigger, make the gas flow direction more reasonable, it is further, spacing lid 102 is equipped with first boss 1021 towards the one end of big spring 2, the outward flange of first boss 1021 is equipped with the inclined plane, the upper end of 1 inner wall of cylinder forms the dovetail groove structure with the outward flange of first boss 1021, sealing performance is better after the installation sealing washer.
As shown in fig. 1-14, the inner air outlet 502 is in a ring-shaped groove structure, and the ring-shaped groove forms a ring-shaped air flow, so that the air outlet effect is better.
As shown in fig. 1-14, the top ring 8 includes a ring body 801 and a plurality of top pillars 802, the top pillars 802 are uniformly arranged on the outer edge of the ring body 801 at a short distance, the top pillars 802 are connected to a sealing ring 9, each top pillar 802 is correspondingly provided with 1 small spring 13, the small spring 13 is abutted against one end of the top ring 8 facing the fixing flange 11, so that 1 small spring 13 corresponds to 1 top pillar 802 and can better push the top ring 8, further, one end of the sealing ring 9 facing the top pillar 802 is provided with a clamping groove 901, the top pillars 802 are arranged in the clamping groove 901, further, the top pillars 802 include a top head 8021, a connecting pillar 8022, a supporting pillar 8023 and a sealing pillar 8024, the top head 8021, the connecting pillar 8022, the supporting pillar 8023 and the sealing pillar 8024 are sequentially connected, the diameters of the top head 8021 and the supporting pillar 8023 are both larger than the connecting pillar 8022, and the clamping groove 901 on the sealing ring 9 is matched with the structure of the top pillars 802, a sealing ring is sleeved on the sealing column 8024, and a sealing ring is sleeved on the supporting column 8023, so that the top ring 8 is in sealing connection with the inner wall of the valve cover 7, air leakage cannot occur when air is fed into the second air cavity, and the sealing performance is better; the clamping groove 901 comprises a straight line section 9011 and a circular arc section 9012 which are sequentially connected, the circular arc section 9012 is matched with the top head 8021, the top head 8021 enters from the circular arc section 9012, the straight line section 9011 clamps the top head 8021, the connecting column 8022 moves in the straight line section 9011, and during assembly, the top ring 8 and the sealing ring 9 can be connected only by rotating, the structure is simple and practical, the installation and the disassembly are easy, the assembly efficiency is high, the plurality of top posts 802 are uniformly provided with the reinforced connection effect to prevent the dropping, the sealing ring 9 is more stable and more advanced when being pulled, the first ring body 8011 and the second ring body 8012 are arranged on the ring body 801 at intervals, the top post 802 is arranged at one end of the first ring body 8011 facing the sealing ring 9, the first ring 8011 and the second ring 8012 are connected by a sealing post 8024, therefore, a sealing ring on the sealing column 8024 is arranged between the first ring body 8011 and the second ring body 8012, so that the limiting effect is better, and the sealing performance is better; the second ring body 8012 is provided with a spring groove 80121 towards one end of the fixing flange 11, each spring groove 80121 is arranged corresponding to the supporting column 802, the small spring 13 extends into the spring groove 80121, the spring groove 80121 has a limiting function, the small spring 13 is arranged corresponding to the supporting column 802, the first ring body 8011 and the second ring body 8012 are arranged at intervals, and therefore a space with a sealing groove is formed in installation.
As shown in fig. 1 to 14, the end of the vent flange 5 facing the slider 3 is provided with a second boss 506, which increases the height of the outlet air, and if the second boss 506 is not provided, the air is easy to diffuse around the bottom end of the cylinder 1, the second boss 506 forms a step shape, which slows down the diffusion of the air around the bottom end of the cylinder 1, the outer edge of the second boss 506 is provided with an inclined surface, the bottom end of the inner wall of the cylinder 1 and the inclined surface of the second boss 506 form a trapezoidal groove structure, and the sealing performance is better after the sealing ring is installed.
As shown in fig. 1 to 14, a protruding ring 703 is disposed at one end of the valve cover 7 facing the fixing flange 11, the fixing flange 11 and the top ring 8 are sleeved on the protruding ring 703, the fixing flange 11 is connected with the protruding ring 703 in a sealing manner, the protruding ring 703 is connected with the fixing flange 11 in a sealing manner, so that the sealing performance is improved, and the top ring 8 is sleeved on the protruding ring 703 to have a guiding function.
As shown in fig. 1 to 14, the vent flange 5 is centrally provided with a slide hole 505, the annular groove is provided around the slide hole 505, and the connecting rod 4 is slidably inserted into the slide hole 505 so that the connecting rod 4 slides in the slide hole 505.
As shown in fig. 1 to 14, a threaded hole 401 is formed in one end of the connecting rod 4, which is connected to the slider 3, a bolt is arranged in the center of the slider 3, the bolt penetrates through the central hole 302 and is in threaded connection with the threaded hole 401, and the bolt is an inner hexagon bolt 14, so that the mounting and dismounting are convenient, and the fixing effect is good.
Examples
A novel air-driven sealed vacuum valve comprises an air cylinder 1, a large spring 2 arranged in the air cylinder 1, a sliding block 3 arranged in the air cylinder 1 in a sliding mode, a connecting rod 4, a ventilating flange 5, a connecting shell 6, a valve cover 7, a sealed valve plate 10, a sealing ring 9, a top ring 8, a fixing flange 11 arranged on the valve cover 7 and a small spring 13 axially embedded on the fixing flange 11, wherein the air cylinder 1 is connected with the sliding block 3 in a sealing mode, the air cylinder 1 is connected with the ventilating flange 5 in a sealing mode, the ventilating flange 5 is connected with the connecting shell 6, the lower end of the connecting shell 6 is connected with the valve cover 7 in a sealing mode, the top ring 8, the sealing ring 9 and the sealed valve plate 10 are sequentially and axially arranged in the valve cover 7, the top ring 8 is connected with the sealing ring 9, the sealed valve plate 10 is connected with the lower end of the connecting rod 4, the upper end of the connecting rod 4 is connected with the sliding block 3, the large spring 2 is arranged between the air cylinder 1 and the sliding block 3, one end, facing the ventilating flange 5, of the sliding block 3 is provided with an air groove 301, an outer air inlet 501 and an outer air outlet 504 are arranged on the outer side of the ventilation flange 5, an inner air inlet 503 and an inner air outlet 502 are arranged on the end face, facing the air groove 301, of the ventilation flange 5, the outer air inlet 501 is communicated with the inner air outlet 502, the inner air inlet 503 is communicated with the outer air outlet 504, a valve cover air cavity 702 and a valve cover air cavity 701 are arranged on the inner wall of the valve cover 7, the valve cover air cavity 701 is communicated with the valve cover air cavity 702, the valve cover air cavity 701 faces one end, away from the small spring 13, of the top ring 8, the outer air outlet 504 is communicated with the valve cover air cavity 701 through an air pipe, the top ring 8 is arranged in the valve cover air cavity 702 and is in sealing connection with the valve cover 7, the small spring 13 is arranged between the fixed flange 11 and the top ring 8, the connecting rod 4 is in sealing connection with the ventilation flange 5, the connecting rod 4 is in sealing connection with the upper end of the connecting shell 6, the fixed flange 11 is in sealing connection with the valve cover 7, the sealing ring 9 is in sealing connection with the sealing valve plate 10, a limit cover 102 is arranged on the end, of the cylinder 1, which is in sealing connection with the ventilation flange 5, the limiting cover 102 is provided with a limiting column 103, the large spring 2 is sleeved on the limiting column 103, the inner air outlet 502 is of an annular groove structure, the top ring 8 comprises a ring body 801 and a plurality of top columns 802, the circumference of each top column 802 is uniformly arranged at a position short of the outer edge of the ring body 801, the top columns 802 are connected with the sealing ring 9, one end of the sealing ring 9 facing the top columns 802 is provided with a clamping groove 901, the top columns 802 are arranged in the clamping groove 901, one end of the ventilating flange 5 facing the sliding block 3 is provided with a second boss 506, the outer edge of the second boss 506 is provided with an inclined plane, one end of the valve cover 7 facing the fixing flange 11 is provided with a convex ring 703, the fixing flange 11 and the top ring 8 are sleeved on the convex ring 703, the center of the ventilating flange 5 is provided with a sliding hole 505, the annular groove is arranged around the sliding hole 505, the connecting rod 4 is slidably inserted in the sliding hole 505, the top columns 802 comprise top heads 8021, connecting columns 802, 8022, supporting columns 8023, sealing columns 8024, 8021, 8022, 8023, 8024, 8021, 21, 2, The sealing columns 8024 are connected in sequence, the diameters of the top head 8021 and the supporting column 8023 are both larger than that of the connecting column 8022, the clamping groove 901 on the sealing ring 9 is matched with the structure of the top column 802, the sealing column 8024 is connected with the valve cover 7 in a sealing mode, a threaded hole 401 is formed in one end, connected with the sliding block 3, of the connecting rod 4, the inner hexagonal bolt 14 is arranged in the center of the sliding block 3, and the inner hexagonal bolt 14 penetrates through the center hole 302 to be in threaded connection with the threaded hole 401.
And (4) performance testing:
the leakage rate of the vacuum valve of the embodiment is tested by GB/T34878- - 9 mbar/s -1 Therefore, the vacuum valve of the embodiment has excellent sealing performance, can achieve the sealing performance of the vacuum valve with a complex structure on the market, is simple and compact in structure, simple and stable in driving mode, and is highly suitable for semiconductor equipment.
The foregoing examples are given solely for the purpose of illustrating the invention and are not to be construed as limiting the embodiments, and other variations and modifications in form thereof will be suggested to those skilled in the art upon reading the foregoing description, and it is not necessary or necessary to exhaustively enumerate all embodiments and all such obvious variations and modifications are deemed to be within the scope of the invention.
Claims (10)
1. A novel air-driven sealed vacuum valve is characterized by comprising a hollow air cylinder, a large spring arranged in the air cylinder, a sliding block, a connecting rod, a ventilation flange, a connecting shell, a valve cover, a sealed valve plate, a sealing ring, a top ring, a fixing flange arranged on the valve cover and a small spring axially embedded on the fixing flange, wherein the sliding block, the connecting rod, the ventilation flange, the connecting shell, the valve cover, the sealing ring, the top ring and the sealed valve plate are axially arranged in the valve cover in sequence, the air cylinder is hermetically connected with the sliding block, the air cylinder is hermetically connected with the ventilation flange, the ventilation flange is connected with the connecting shell, the lower end of the connecting shell is hermetically connected with the valve cover, the top ring, the sealing ring and the sealed valve plate are axially arranged in the valve cover in sequence, the top ring is connected with the sealing ring, the sealed valve plate is connected with the lower end of the connecting rod, the upper end of the connecting rod is connected with the sliding block, the large spring is arranged between the air cylinder and the sliding block, and one end of the sliding block, which faces the ventilation flange, is provided with an air groove, the outer side of the ventilation flange is provided with an outer air inlet and an outer air outlet, the end face, facing the air groove, of the ventilation flange is provided with an inner air inlet and an inner air outlet, the outer air inlet is communicated with the inner air outlet, the inner air inlet is communicated with the outer air outlet, the inner wall of the valve cover is provided with a valve cover air cavity and a valve cover air opening, the valve cover air opening is communicated with the valve cover air cavity, the valve cover air opening faces to one end, deviating from the small spring, of the top ring, the outer air outlet is communicated with the valve cover air opening through an air pipe, the top ring is arranged in the valve cover air cavity and is in sealing connection with the valve cover, the small spring is arranged between the fixed flange and the top ring, the connecting rod is in sealing connection with the ventilation flange, the connecting rod is in sealing connection with the upper end of the connecting shell, the fixed flange is in sealing connection with the valve cover, and the sealing ring is in sealing connection with the sealing valve plate.
2. The novel air-driven sealing vacuum valve as claimed in claim 1, wherein a limit cap is hermetically provided at an end of the air cylinder facing away from the vent flange, a limit post is provided on the limit cap, and the large spring is sleeved on the limit post.
3. The new gas actuated sealed vacuum valve as claimed in claim 1, wherein the inner outlet is an annular groove structure.
4. The novel air-driven sealing vacuum valve as claimed in claim 1, wherein the top ring comprises a ring body and a plurality of top pillars, the circumference of the top pillars is uniformly arranged at a short distance from the outer edge of the ring body, the top pillars are connected with the sealing ring, and the top pillars are connected with the valve cover in a sealing manner.
5. The novel air-actuated sealing vacuum valve as claimed in claim 4, wherein the end of the sealing ring facing the top pillar is provided with a slot, and the top pillar is provided with a slot.
6. The novel air-actuated sealing vacuum valve as claimed in claim 1, wherein the end of the vent flange facing the slider is provided with a second boss, and the outer edge of the second boss is provided with a slope.
7. The novel air-actuated sealing vacuum valve as claimed in claim 1, wherein the end of the valve cover facing the fixing flange is provided with a convex ring, and the fixing flange and the top ring are sleeved on the convex ring.
8. The novel air-actuated sealing vacuum valve as claimed in claim 3, wherein the vent flange is provided with a sliding hole at the center, the annular groove is provided around the sliding hole, and the connecting rod is slidably inserted into the sliding hole.
9. The novel gas-driven sealing vacuum valve as claimed in claim 4, wherein the top column comprises a top head, a connecting column, a supporting column and a sealing column, the top head, the connecting column, the supporting column and the sealing column are sequentially connected, the diameters of the top head and the supporting column are larger than those of the connecting column, the clamping groove on the sealing ring is matched with the structure of the top column, and the sealing column is hermetically connected with the valve cover.
10. The novel air-actuated sealed vacuum valve as claimed in claim 8, wherein the connecting rod has a threaded hole at one end connected to the slider, and a bolt is provided at the center of the slider and is threaded through the central hole to the threaded hole.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210769447.XA CN114922994B (en) | 2022-06-30 | 2022-06-30 | Air-driven type sealing vacuum valve |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210769447.XA CN114922994B (en) | 2022-06-30 | 2022-06-30 | Air-driven type sealing vacuum valve |
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| CN114922994A true CN114922994A (en) | 2022-08-19 |
| CN114922994B CN114922994B (en) | 2023-09-15 |
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| CN202210769447.XA Active CN114922994B (en) | 2022-06-30 | 2022-06-30 | Air-driven type sealing vacuum valve |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115264096A (en) * | 2022-09-02 | 2022-11-01 | 靖江佳佳精密机械科技有限公司 | Air-driven vacuum valve with support |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1327595A (en) * | 1962-07-03 | 1963-05-17 | High Voltage Engineering Corp | Gate valve for high vacuum |
| US3972507A (en) * | 1975-06-09 | 1976-08-03 | M & J Valve Company | Valve construction |
| FR2325866A1 (en) * | 1975-09-26 | 1977-04-22 | Sofrem | High temp. gate valve - has sliding element sealed by inflatable annular tubes in slots of housing flanges |
| JPS542822U (en) * | 1977-06-10 | 1979-01-10 | ||
| EP0114278A1 (en) * | 1982-12-27 | 1984-08-01 | Bühler-MIAG GmbH | Shut-of device for pneumatic transporting systems for the transport of pourable bulk materials |
| US20040164264A1 (en) * | 2003-02-20 | 2004-08-26 | Lucas Paul D | Seal ring for pendulum valve assembly |
| CN203453514U (en) * | 2013-09-18 | 2014-02-26 | 北京星光沃特传动研究所 | Novel pneumatic minimum flow rate valve |
| CN106949253A (en) * | 2017-04-27 | 2017-07-14 | 沈阳真空技术研究所 | Inflate piston seal vacuum gate valve |
| CN206786022U (en) * | 2017-06-12 | 2017-12-22 | 齐权丞 | A kind of vacuum valve |
| CN208138507U (en) * | 2018-04-12 | 2018-11-23 | 浙江锐步流体控制设备有限公司 | A kind of dress pot ball valve |
| CN209743635U (en) * | 2019-04-02 | 2019-12-06 | 韦斯贝尔(厦门)阀门有限公司 | Gate valve |
| CN110822115A (en) * | 2019-11-19 | 2020-02-21 | 中国能源建设集团湖南省电力设计院有限公司 | Gate valve with reliable sealing performance |
| CN111594659A (en) * | 2020-06-22 | 2020-08-28 | 川北真空科技(北京)有限公司 | Vacuum isolation valve and vacuum system with same |
| CN113246279A (en) * | 2021-05-27 | 2021-08-13 | 南京精益义齿有限公司 | Anti-bubble die tooth production and processing mechanism |
| CN214008132U (en) * | 2020-12-31 | 2021-08-20 | 扬州三水水务设备有限公司 | Pneumatic gate valve of stainless steel filter |
| CN114542736A (en) * | 2022-01-22 | 2022-05-27 | 方正阀门集团股份有限公司 | Large-caliber double-sealing vacuum gate valve |
| CN114562617A (en) * | 2022-01-29 | 2022-05-31 | 靖江佳佳精密机械科技有限公司 | Anti-vibration vacuum clamp |
| CN216643131U (en) * | 2021-12-29 | 2022-05-31 | 中港疏浚有限公司 | Knife gate valve sealing structure |
-
2022
- 2022-06-30 CN CN202210769447.XA patent/CN114922994B/en active Active
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1327595A (en) * | 1962-07-03 | 1963-05-17 | High Voltage Engineering Corp | Gate valve for high vacuum |
| US3972507A (en) * | 1975-06-09 | 1976-08-03 | M & J Valve Company | Valve construction |
| FR2325866A1 (en) * | 1975-09-26 | 1977-04-22 | Sofrem | High temp. gate valve - has sliding element sealed by inflatable annular tubes in slots of housing flanges |
| JPS542822U (en) * | 1977-06-10 | 1979-01-10 | ||
| EP0114278A1 (en) * | 1982-12-27 | 1984-08-01 | Bühler-MIAG GmbH | Shut-of device for pneumatic transporting systems for the transport of pourable bulk materials |
| US20040164264A1 (en) * | 2003-02-20 | 2004-08-26 | Lucas Paul D | Seal ring for pendulum valve assembly |
| CN203453514U (en) * | 2013-09-18 | 2014-02-26 | 北京星光沃特传动研究所 | Novel pneumatic minimum flow rate valve |
| CN106949253A (en) * | 2017-04-27 | 2017-07-14 | 沈阳真空技术研究所 | Inflate piston seal vacuum gate valve |
| CN206786022U (en) * | 2017-06-12 | 2017-12-22 | 齐权丞 | A kind of vacuum valve |
| CN208138507U (en) * | 2018-04-12 | 2018-11-23 | 浙江锐步流体控制设备有限公司 | A kind of dress pot ball valve |
| CN209743635U (en) * | 2019-04-02 | 2019-12-06 | 韦斯贝尔(厦门)阀门有限公司 | Gate valve |
| CN110822115A (en) * | 2019-11-19 | 2020-02-21 | 中国能源建设集团湖南省电力设计院有限公司 | Gate valve with reliable sealing performance |
| CN111594659A (en) * | 2020-06-22 | 2020-08-28 | 川北真空科技(北京)有限公司 | Vacuum isolation valve and vacuum system with same |
| CN214008132U (en) * | 2020-12-31 | 2021-08-20 | 扬州三水水务设备有限公司 | Pneumatic gate valve of stainless steel filter |
| CN113246279A (en) * | 2021-05-27 | 2021-08-13 | 南京精益义齿有限公司 | Anti-bubble die tooth production and processing mechanism |
| CN216643131U (en) * | 2021-12-29 | 2022-05-31 | 中港疏浚有限公司 | Knife gate valve sealing structure |
| CN114542736A (en) * | 2022-01-22 | 2022-05-27 | 方正阀门集团股份有限公司 | Large-caliber double-sealing vacuum gate valve |
| CN114562617A (en) * | 2022-01-29 | 2022-05-31 | 靖江佳佳精密机械科技有限公司 | Anti-vibration vacuum clamp |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115264096A (en) * | 2022-09-02 | 2022-11-01 | 靖江佳佳精密机械科技有限公司 | Air-driven vacuum valve with support |
| CN115264096B (en) * | 2022-09-02 | 2023-09-22 | 靖江佳佳精密机械科技有限公司 | Air-driven vacuum valve device with support |
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|---|---|
| CN114922994B (en) | 2023-09-15 |
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