CN114910496A - Crystal automatic orientation measuring device and measuring method - Google Patents
Crystal automatic orientation measuring device and measuring method Download PDFInfo
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- CN114910496A CN114910496A CN202210565668.5A CN202210565668A CN114910496A CN 114910496 A CN114910496 A CN 114910496A CN 202210565668 A CN202210565668 A CN 202210565668A CN 114910496 A CN114910496 A CN 114910496A
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- 239000013078 crystal Substances 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims description 15
- 238000005259 measurement Methods 0.000 claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 19
- 238000004846 x-ray emission Methods 0.000 claims abstract description 5
- 239000000523 sample Substances 0.000 claims description 35
- 230000033001 locomotion Effects 0.000 claims description 19
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000001360 synchronised effect Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 abstract description 12
- 238000000691 measurement method Methods 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/604—Specific applications or type of materials monocrystal
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- General Health & Medical Sciences (AREA)
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Abstract
The invention belongs to the field of crystal orientation measurement, and provides an automatic crystal orientation measurement device and a measurement method, wherein the device comprises a bottom plate, an arc-shaped guide rail, an X-ray emission assembly, a receiving assembly, a transmission mechanism, a control system and a position recording device, and is characterized in that: the arc guide rail is installed on the bottom plate and is arranged symmetrically on the left side and the right side of the bottom plate, the X-ray transmitting assembly and the receiving assembly can slide on the arc guide rail along the arc direction through the transmission mechanism, the X-ray transmitting assembly is provided with an X-ray transmitter, the receiving assembly is provided with a receiver, the control system controls the transmission mechanism to move, and the position recording device can record the position information of the X-ray transmitter and the receiver.
Description
Technical Field
The invention is mainly applied to the field of automatic directional measurement of crystals, and particularly relates to an automatic directional measuring instrument and a measuring and bonding multifunctional integrated machine instrument for single crystals such as sapphire, silicon single crystals, gallium arsenide, silicon carbide and the like.
Background
In the crystal processing process, the orientation measurement is an essential important process. The accuracy and stability of the directional measurement result are directly related to the efficiency of the subsequent processing of the crystal and the quality of the finished crystal product. The orientation measurement of a portion of the crystals directly guides subsequent manufacturing processes. The beat and the speed of the directional measurement are closely related to the economic benefit of the enterprise. Therefore, the orientation measurement work of the crystal is an important link of crystal processing enterprises, and the function of the orientation measurement work is self-evident.
The existing orientation measuring device basically adopts an X-ray emitter and a receiver to carry out matching measurement, except a part of orientation instruments adopting a manual measuring mode, the existing automatic orientation measuring equipment mostly adopts the following measuring modes: the X-ray emitter is fixed, the signal receiver is manually adjusted, and the motor drives the crystal face of the measured crystal to rotate. Although the method achieves the purpose of automatic measurement, the method has small applicable crystal range, cannot give consideration to the crystal with size change, cannot give consideration to the measurement of a wafer crystal bar, and has the problems of system measurement deviation and poor accuracy when a signal receiver is manually adjusted when other types of crystals are replaced.
Disclosure of Invention
The invention mainly aims to provide an automatic crystal orientation measuring device, namely an automatic peak-seeking automatic measuring device.
The utility model provides a crystal automatic orientation measuring device, has bottom plate, arc guide rail, X ray emission subassembly, receiving assembly, drive mechanism, control system and position recorder, its characterized in that: the arc guide rail is installed on the bottom plate and is arranged symmetrically on the left side and the right side of the bottom plate, the X-ray transmitting assembly and the receiving assembly can slide on the arc guide rail along the arc direction through the transmission mechanism, the X-ray transmitting assembly is provided with an X-ray transmitter, the receiving assembly is provided with a receiver, the control system controls the transmission mechanism to move, and the position recording device can record the position information of the X-ray transmitter and the receiver.
The X-ray emitter and the receiver can move along the arc-shaped guide rail respectively or cooperatively under the control of the transmission mechanism and the control system, can measure the crystal workpiece at the center of the arc-shaped guide rail, and can automatically find the peak and automatically measure by combining the position information of the X-ray emitter and the receiver recorded by the position recording device, thereby realizing the automatic directional measurement of the crystal.
Furthermore, the device also comprises a positioning assembly, the positioning assembly can accurately position the crystal, and the positioning assembly positions the measuring workpiece surface and the rotation center of the arc rail to be coincident, so that automatic accurate measurement of multiple crystals at multiple angles is facilitated. Wherein the positioning assembly comprises a non-contact sensing positioner and/or a contact elastic probe positioner. The positioning component can be selected to be replaced by a non-contact sensing positioner or a contact elastic probe positioner according to the property of the workpiece.
Further, contact elastic probe locator contains casing, probe, elastomeric element and displacement sensor, and elastomeric element sets up inside the casing, and the probe is connected with elastomeric element to stretch out from casing one end, when the probe top pressurized, give elastomeric element with pressure transfer, make elastomeric element compress, thereby make the probe top that links to each other with elastomeric element retract, displacement sensor can feed back probe top position in real time.
Further, the non-contact sensing locator is characterized in that a laser range finder is fixedly arranged on the bottom plate through a support.
Furthermore, a non-contact sensing positioner and a contact elastic probe positioner are configured for the automatic crystal orientation measuring device, and a positioning component can be selected to be replaced by the non-contact sensing positioner or the contact elastic probe positioner according to the property of the workpiece.
Further, the position recording device accurately records the positions of the X-ray transmitter and receiver by the magnetic grid head. The position recording device is provided with a magnetic grid head and an arc-shaped magnetic grid strip; the arc-shaped magnetic grid bars are fixed on the bottom plate, correspond to the arc-shaped guide rails and have the same circle center with the arc-shaped guide rails, the magnetic grid heads can move along with the movement of the X-ray emitter and the receiver, and the position and angle information of the X-ray emitter and the receiver can be accurately recorded through the matching of the magnetic grid heads and the arc-shaped magnetic grid bars.
Further, the position recording device may also be a grating sensor system, or any position recording system capable of recording the moving position and moving state of the X-ray emitter and receiver.
The invention also provides a method for measuring the crystal orientation of the crystal by using the automatic crystal orientation measuring device, which comprises the following steps:
step 1: the workpiece is adjusted in place through the positioning assembly, so that the measured surface of the workpiece is superposed with the circle center of the arc-shaped guide rail;
step 2: the motor drives the X-ray emitter and the receiver to move on the arc-shaped guide rail;
and step 3: when the X-ray emitter emits X-rays to the surface of a workpiece during movement, the receiver receives corresponding diffraction signals and measures the intensity of the received diffraction signals;
and 4, step 4: when the intensity of the diffraction signal is maximum, the position recording device records the position information of the X-ray transmitter and the receiver;
and 5: and when the intensity of the diffraction signal is maximum, the system calculates the angle value of the movement of the X-ray emitter and the receiver, and finally obtains the crystal orientation angle of the workpiece.
Further, the positioning component in step 1 is a non-contact sensing positioner or a contact elastic probe positioner.
Further, the position recording device in step 4 is a magnetic grid system comprising a magnetic grid head and arc-shaped magnetic grid bars, or a grating system, or any position recording system capable of recording the position and angle information of the X-ray emitter and receiver.
The invention adopts the arc guide rail to control the concentric movement of the X-ray emitter and the receiver, adopts the high-precision magnetic grid bars to respectively calculate the moving distance of the X-ray emitter and the receiver, and calculates the measured crystal orientation value through the feedback information and the control system.
The invention has the following beneficial effects: 1. the X-ray emitter and the receiver have larger movement range, can move respectively and also can move in a coordinated manner, can meet the requirements of most of crystal diffraction angles, and realize variable angle measurement and deflection angle measurement. 2. The device has the function of measuring the crystal orientation angle, and can automatically complete measurement as long as relevant parameters are input. 3. The measuring point corresponds to the circle center position of the arc-shaped guide rail, and the position cannot be occupied or shielded before measurement, namely the measuring point does not have any object, so that space is reserved for subsequent processing, the measuring point can be conveniently integrated with other equipment for crystal processing, and the multifunctional integrated machine is favorably realized. 4. The positioning device can play a role in accurate positioning, and ensures that the workpiece is positioned at the position of the circle center, thereby ensuring the accuracy and reliability of the measurement position. The positioning device can improve the applicability of the measuring system according to different flexible principles of workpiece materials. 5. The magnetic grid ruler directly measures the motion data, eliminates the error caused by a transmission mechanism and improves the measurement precision.
In addition to the objects, features and advantages described above, other objects, features and advantages of the present invention are also provided. The present invention will be described in further detail below with reference to the drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic perspective view of an automatic crystal orientation measuring apparatus according to the present invention;
FIG. 2 shows a front view of the crystal automatic orientation measuring device of FIG. 1;
FIG. 3 shows a top view of the crystal automatic orientation measurement device of FIG. 1;
FIG. 4 shows a schematic view of the direction A-A of FIG. 2;
fig. 5 shows a schematic view of the direction B-B of fig. 2.
FIG. 6 shows a schematic view of a touch spring probe locator.
1. Arc guide rail, 2, bottom plate, 3, slide block, 4, emitter connecting plate, 5, receiver connecting plate, 6, motor, 7, synchronous belt wheel, 8, magnetic grid head bracket, 9, magnetic grid head, 10, magnetic grid strip, 11, toothed belt, 12, X-ray emitter, 13, receiver, 14, contact type elastic probe locator, 15, bracket
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An automatic crystal orientation measuring device comprises a bottom plate, an arc-shaped guide rail, an X-ray emitting assembly, a receiving assembly, a transmission mechanism, a control system and a position recording device. The arc guide rail is installed on the bottom plate and is arranged symmetrically on the left side and the right side of the bottom plate, the X-ray transmitting assembly and the receiving assembly can slide on the arc guide rail along the arc direction through the transmission mechanism, the X-ray transmitting assembly is provided with an X-ray transmitter, the receiving assembly is provided with a receiver, the control system controls the transmission mechanism to move, and the position recording device can record the position information of the X-ray transmitter and the receiver.
The X-ray emitter and the receiver can move along the arc-shaped guide rail respectively or cooperatively under the control of the transmission mechanism and the control system, can measure a crystal workpiece at the center of the arc-shaped guide rail, and can automatically find the peak and automatically measure by combining the position information of the X-ray emitter and the receiver recorded by the position recording device, thereby realizing the automatic directional measurement of the crystal.
Furthermore, the device also comprises a positioning assembly, the positioning assembly can accurately position the crystal, and the positioning position enables the surface of the measuring workpiece to coincide with the rotation center of the arc-shaped rail, so that automatic accurate measurement of multiple crystals at multiple angles is facilitated. The positioning component can be selected to be replaced by a non-contact sensing positioner or a contact elastic probe positioner according to the property of the workpiece.
Referring to fig. 1-5, an arcuate guide rail 1 is mounted on a base plate 2, an X-ray emitting assembly has an emitter link plate 4, a receiving assembly has a receiver link plate 5, and the emitter link plate 4 and the receiver link plate 5 are slidably movable in an arcuate direction on the arcuate guide rail 1 by a transmission mechanism. The arc-shaped guide rails 1 are respectively arranged on the left side and the right side of the bottom plate 2. The emitter connecting plate 4 is provided with a motor 6, a synchronous belt wheel 7 and a magnetic grid head bracket 8, and a magnetic grid head 9 is arranged on the magnetic grid head bracket 8. The receiver connecting plate 5 is also provided with a motor 6, a synchronous belt wheel 7 and a magnetic grid head bracket 8, and a magnetic grid head 9 is also arranged on the magnetic grid head bracket 8. The arc-shaped magnetic grid bars 10 are fixed on the bottom plate, and the arc-shaped magnetic grid bars 10 correspond to the arc-shaped guide rails 1 and have the same circle centers as the arc-shaped guide rails 1. The magnetic grid head 9 reads the information of the magnetic grid strip 10 arranged on the bottom plate 2, records the arc length distance of the movement of the X-ray emitter 12 and the receiver 13, obtains the value of the movement angle of the X-ray emitter 12 and the receiver 13 through calculation, and obtains the crystal orientation angle of the measured crystal through calculation of a feedback system and a control system.
It should be noted that the magnetic grid system including the arc-shaped magnetic grid bars and the magnetic grid heads is only one preferred position recording device, and the main function of the magnetic grid system is to record the movement position and angle information of the X-ray emitter and receiver, and other position recording systems capable of recording the movement position and angle information, such as a grating system, can be replaced.
When a workpiece to be positioned can be subjected to contact measurement, in a certain embodiment, the positioning assembly is selected to be a contact type elastic probe positioner 14, the contact type elastic probe positioner 14 comprises a shell, a probe, an elastic part and a displacement sensor, the elastic part is arranged inside the shell, the probe is connected with the elastic part and extends out of one end of the shell, when the top end of the probe is pressed, the pressure is transmitted to the elastic part, the elastic part is compressed, the top end of the probe connected with the elastic part retracts, and the position of the top end of the probe can be fed back by the displacement sensor in real time. Specifically, when the workpiece is positioned, the workpiece moves towards the top end of the probe, the speed is reduced when the workpiece is close to the probe, the workpiece is slowly moved until the workpiece contacts the top end of the probe, the top end of the probe continuously retracts along with the continuous advance of the workpiece, the position of the top end of the probe is fed back corresponding to the displacement sensor until the position is the same as the position of a central point, and at the moment, the workpiece is adjusted in place;
when a workpiece to be positioned is a precise fragile piece, in order to avoid contact damage, in a certain embodiment, a positioning assembly is selected to be positioned in a non-contact sensing manner, specifically, a laser range finder is installed and fixed on a bottom plate through a support, the position of the range finder away from a circle center point is a preset fixed value, when the workpiece is positioned, the workpiece can slowly move towards the position of the circle center point, laser emitted by the range finder irradiates the end face of the workpiece, the distance between the range finder and the workpiece is the same as the preset fixed value by finely adjusting the position of the workpiece, and at the moment, the workpiece is stated to be adjusted in place;
the light paths of the X-ray emitter 12 and the receiver 13 pass through the circle center of the arc-shaped guide rail 1, so that the position of a measuring point is fixed and unchanged when the peak is found in automatic measurement, and the accuracy of a measuring result is ensured. The arc-shaped surface for installing the magnetic grid bars is formed by one-time processing, and the requirement of concentricity of motion tracks on two sides is met. The displacement sensor/distance meter of the positioning device is arranged on the bottom plate through a bracket, and the central point (X-ray diffraction measuring point) of the arc-shaped guide rail is determined to fall on the surface of the measured crystal through the displacement sensor/distance meter. During installation, the heights of the X-ray emitter, the signal receiver, the displacement sensor/the distance meter are required to be guaranteed.
Further, the sliding block 3 on the arc-shaped guide rail 1 on one side is fixed with the emitter connecting plate 4. And the slide block 3 on the arc-shaped guide rail at the other side is fixed with the receiver connecting plate 5. The motor 6 on the emitter connecting plate 4 drives the synchronous belt wheel 7 to rotate, and the emitter connecting plate 4 and the sliding block 3 move along the direction of the arc-shaped guide rail 1 due to the meshing of the toothed belt 11 and the synchronous belt wheel 7. The X-ray emitter 12 is mounted on the emitter connection plate 4, so that the movement of the X-ray emitter 12 along the curved guide rail 1 is realized. Similarly, the receiver 13 is driven by the motor 6 to move along the arc-shaped guide rail 1.
The two tensioning rollers are arranged for the toothed belt driving mechanism, the toothed belt penetrates through the tensioning rollers and is wound on the driving gear, the toothed belt is in an omega shape, one end of each tensioning roller is fixed on the emitter connecting plate, the position of each tensioning roller on the connecting plate can be adjusted, so that the distance between each tensioning roller and the driving gear can be finely adjusted, the tensioning of the toothed belt can be realized by adjusting the position of each tensioning roller even under the condition that the toothed belt is slightly worn after running for a long time, the toothed belt is prevented from loosening, for example, a connecting hole of each tensioning roller on the connecting plate can be a waist-shaped hole, and the position can be finely adjusted.
In addition, the invention also provides a method for measuring the crystal orientation of the crystal by using the automatic crystal orientation measuring device, which comprises the following steps:
step 1: the workpiece is adjusted in place through the positioning assembly, so that the measured surface of the workpiece is superposed with the circle center of the arc-shaped guide rail;
step 2: the motor drives the X-ray emitter and the receiver to move on the arc-shaped guide rail;
and step 3: when the X-ray emitter emits X-rays to the surface of a workpiece during movement, the receiver receives corresponding diffraction signals and measures the intensity of the received diffraction signals;
and 4, step 4: when the intensity of the diffraction signal is maximum, the position recording device records the position information of the X-ray transmitter and the receiver;
and 5: and when the intensity of the diffraction signal is maximum, the system calculates the angle value of the movement of the X-ray emitter and the receiver, and finally obtains the crystal orientation angle of the workpiece.
Further, the positioning component in step 1 is a non-contact sensing positioner or a contact elastic probe positioner.
Further, the position recording device in step 4 is a magnetic grid system comprising a magnetic grid head and arc-shaped magnetic grid bars, or a grating system, or any position recording system capable of recording the movement position and movement state of the X-ray emitter and receiver
It should be noted that the terms "comprises" and "comprising," and any variations thereof, in the description and claims of this invention and the above-described drawings are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc. are usually based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and in the case of not making a reverse description, these orientation words do not indicate and imply that the device or element being referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be considered as limiting the scope of the present invention; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a crystal automatic orientation measuring device, has bottom plate, arc guide rail, X ray emission subassembly, receiving assembly, drive mechanism, control system and position recorder, its characterized in that: the arc guide rail is installed on the bottom plate, and both sides symmetrical arrangement about the bottom plate, X ray emission subassembly and receiving assembly passes through drive mechanism can slide along the circular arc direction on the arc guide rail, X ray emission subassembly has the X ray transmitter, receiving assembly has the receiver, control system control drive mechanism moves, position recorder can take notes the X ray transmitter and the positional information of receiver.
2. The automatic crystal orientation measurement device of claim 1, wherein: also included is a positioning assembly, wherein the positioning assembly comprises a non-contact sensing positioner and/or a contact spring probe positioner.
3. The automatic crystal orientation measuring device of claim 2, wherein: the contact type elastic probe positioner comprises a shell, a probe, an elastic part and a displacement sensor, wherein the elastic part is arranged inside the shell, the probe is connected with the elastic part and extends out of one end of the shell, when the top end of the probe is pressed, the pressure is transmitted to the elastic part, so that the elastic part is compressed, the top end of the probe connected with the elastic part retracts, and the displacement sensor can feed back the position of the top end of the probe in real time.
4. The automatic crystal orientation measuring device of claim 2, wherein: the non-contact sensing positioner is a laser range finder which is fixedly arranged on the bottom plate through a support.
5. The automatic crystal orientation measurement device of claim 1, wherein: the position recording means is a magnetic grating system or a grating system.
6. The automatic crystal orientation measurement device of claim 5, wherein: the magnetic grid system comprises a magnetic grid head and an arc-shaped magnetic grid strip; the arc-shaped magnetic grid strip is fixed on the bottom plate, corresponds to the arc-shaped guide rail and has the same circle center with the arc-shaped guide rail, the magnetic grid head can move along with the movement of the X-ray emitter and the receiver, and the position information of the X-ray emitter and the receiver can be accurately recorded through the matching of the magnetic grid head and the arc-shaped magnetic grid strip.
7. The automatic crystal orientation measurement device of claim 1, wherein: drive mechanism has the toothed belt and rather than complex synchronous pulley, synchronous pulley connects driving motor, the toothed belt both ends are fixed unmovable end, drive mechanism still includes two tensioning rollers, the toothed belt passes the tensioning roller is around establishing on drive gear, the toothed belt with the tensioning roller the position of drive gear contact presents "omega" shape, the tensioning roller with synchronous pulley installs on common support.
8. The automatic crystal orientation measuring method applied to the automatic crystal orientation measuring device of claims 1-7 is characterized in that a workpiece is adjusted in place through the positioning assembly, so that the measured surface of the workpiece coincides with the center of the arc-shaped guide rail;
the motor drives the X-ray emitter and the receiver to move on the arc-shaped guide rail;
the X-ray emitter emits X-rays to the surface of the workpiece during movement, and the receiver receives corresponding diffraction signals and measures the intensity of the received diffraction signals;
when the intensity of the diffraction signal is maximum, the position recording device records the position information of the X-ray emitter and the receiver;
and when the intensity of diffraction information is maximum, the system calculates the angle value of the movement of the X-ray emitter and the receiver, and finally obtains the crystal orientation angle of the workpiece.
9. The method of claim 8, wherein the positioning assembly is a non-contact sensing positioner or a contact spring probe positioner.
10. The method of claim 8, wherein the position recording device is a magnetic grating system or a grating system.
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| CN202210565668.5A CN114910496B (en) | 2022-05-23 | 2022-05-23 | Crystal automatic orientation measurement device and measurement method |
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| CN202210565668.5A CN114910496B (en) | 2022-05-23 | 2022-05-23 | Crystal automatic orientation measurement device and measurement method |
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