CN114894236A - Calibration system of temperature and humidity sensor - Google Patents
Calibration system of temperature and humidity sensor Download PDFInfo
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- CN114894236A CN114894236A CN202111664659.3A CN202111664659A CN114894236A CN 114894236 A CN114894236 A CN 114894236A CN 202111664659 A CN202111664659 A CN 202111664659A CN 114894236 A CN114894236 A CN 114894236A
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 158
- 238000001514 detection method Methods 0.000 claims description 70
- 238000003780 insertion Methods 0.000 claims description 19
- 230000037431 insertion Effects 0.000 claims description 19
- 238000005192 partition Methods 0.000 claims description 19
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 7
- 238000002955 isolation Methods 0.000 claims description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 238000013461 design Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D22/00—Control of humidity
- G05D22/02—Control of humidity characterised by the use of electric means
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A40/00—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
- Y02A40/10—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in agriculture
- Y02A40/25—Greenhouse technology, e.g. cooling systems therefor
Abstract
The invention discloses a calibration system of a temperature and humidity sensor, which comprises a controller, a temperature control module and a humidity control module; the controller is electrically connected to the temperature control module and the humidity control module. The temperature control module is provided with a plurality of independent water tanks, the temperature of the pipeline is close to the temperature of the water tanks by draining water, and then the environment is kept constant by water. And the humidity control module detects one station and feeds and discharges materials on the other station according to the principle of double-station design. The invention has the beneficial effects that: the calibration space of presetting temperature and humidity can be provided, simple structure, and is with low costs, efficient, convenient to use's advantage.
Description
Technical Field
The invention relates to the technical field of ocean temperature and humidity chip detection equipment.
Background
The current ocean humiture chip detection process has slow working efficiency because of the harsh humidity condition, and the process of adjusting the humidity environment requires a long time, so the working efficiency is unfavorable because of the large number of chips and the undesirable excessive purchasing funds.
The ocean humiture chip of high accuracy needs stricter detection conditions, and traditional check out test set all leads to the performance of evaluation ocean humiture chip that can not be fine inadequately because the detection precision, and consequently the level of shipment is not high, and unstable. Therefore, improvement needs to be carried out in the ocean temperature and humidity chip detection equipment to improve the temperature control precision of the temperature control module and reduce the problem of inaccurate detection caused by large temperature errors.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a calibration system of a temperature and humidity sensor, which can provide a calibration space for presetting temperature and humidity and has the advantages of simple structure, low cost, high efficiency and convenient use.
The technical scheme adopted by the invention is as follows:
the calibration system of the temperature and humidity sensor comprises a controller, a temperature control module and a humidity control module; the controllers are electrically connected to the temperature control module and the humidity control module;
wherein, the temperature control module includes:
a housing having a first space therein; the first space is provided with four small spaces which are sequentially arranged from bottom to top; the partition plates are arranged between two adjacent small spaces, and are totally three partition plates which are respectively a first partition plate, a second partition plate and a third partition plate from bottom to top; a first vacuum cavity is arranged inside each lattice force plate; the four small spaces are respectively a small space I, a small space II and a small space three-level small space IV; the controller is fixedly arranged on the shell;
the first water tank is arranged in the small space I and arranged on the first isolation plate; a first cavity is arranged in the first water tank, and a second vacuum cavity is arranged in the side wall of the first water tank;
the first heater is fixedly arranged in the first water tank and is electrically connected with the controller;
the first temperature sensor is fixedly arranged in the first water tank and is electrically connected with the controller;
one end of the first inserting pipe is arranged in the first water tank, and the other end of the first inserting pipe is arranged outside the first water tank;
the first water pump is communicated with the other end of the first insertion pipe and is electrically connected with the controller;
one end of the first connecting pipe is communicated with the first water pump;
one end of the first electromagnetic valve is communicated with the other end of the first connecting pipe and is electrically connected with the controller;
one end of the first branch pipe is communicated with the other end of the first electromagnetic valve;
a junction pipe communicating with the first branch pipe;
the second water tank is arranged in the second small space and is arranged on the second isolation plate; a second cavity is formed in the second water tank, and a third vacuum cavity is formed in the side wall of the second water tank;
the second heater is fixedly arranged in the second water tank and is electrically connected with the controller;
the second temperature sensor is fixedly arranged in the second water tank and is electrically connected with the controller;
one end of the second inserting pipe is arranged in the second water tank, and the other end of the second inserting pipe is arranged outside the second water tank;
the second water pump is communicated with the other end of the second insertion pipe and is electrically connected with the controller;
one end of the second connecting pipe is communicated with the second water pump;
one end of the second electromagnetic valve is communicated with the other end of the second connecting pipe and is electrically connected with the controller;
one end of the second branch pipe is communicated with the other end of the second electromagnetic valve; the first branch pipe is communicated with the confluence pipe;
the third water tank is arranged in the third small space and is arranged on the third partition plate; a third cavity is formed in the third water tank, and a third vacuum cavity is formed in the side wall of the third water tank;
the third heater is fixedly arranged in the third water tank and is electrically connected with the controller;
the third temperature sensor is fixedly arranged in the third water tank and is electrically connected with the controller;
one end of the third insertion pipe is arranged in the third water tank, and the other end of the third insertion pipe is arranged outside the third water tank;
the third water pump is communicated with the other end of the first cannula and is electrically connected with the controller;
one end of the third connecting pipe is communicated with the third water pump;
one end of the third electromagnetic valve is communicated with the other end of the third connecting pipe and is electrically connected with the controller;
one end of the third branch pipe is communicated with the other end of the third electromagnetic valve; the third branch pipe is communicated with the confluence pipe;
the fourth water tank is arranged in the small space IV and arranged at the bottom of the shell; a fourth cavity is formed in the fourth water tank, and a fourth vacuum cavity is formed in the side wall of the fourth water tank;
the fourth heater is fixedly arranged in the fourth water tank and is electrically connected with the controller;
the fourth temperature sensor is fixedly arranged in the fourth water tank and is electrically connected with the controller;
one end of the fourth inserting pipe is arranged inside the fourth water tank, and the other end of the fourth inserting pipe is arranged outside the fourth water tank;
the fourth water pump is communicated with the other end of the fourth insertion pipe and is electrically connected with the controller;
one end of the fourth connecting pipe is communicated with the fourth water pump;
one end of the fourth electromagnetic valve is communicated with the other end of the fourth connecting pipe and is electrically connected with the controller;
one end of the fourth branch pipe is communicated with the other end of the fourth electromagnetic valve; the fourth branch pipe is communicated with the confluence pipe;
a header pipe, one end of which is communicated with the confluence pipe;
one end of the fifth electromagnetic valve is communicated with the other end of the main pipe;
the three-way joint is provided with a first interface, a second interface and a third interface; one port of the three-way joint is communicated with the other end of the fifth electromagnetic valve; a second joint of the three-way joint is connected with a second water drainage pipe; a third joint of the three-way valve is connected with a sixth electromagnetic valve; the fifth electromagnetic valve and the sixth electromagnetic valve are both electrically connected to the controller;
one end of the water inlet pipe is communicated with the other end of the sixth electromagnetic valve;
the detection cavity is internally provided with a workpiece placing space, and a fifth vacuum cavity is arranged inside the side wall of the detection cavity; the fifth vacuum cavity is communicated with the other end of the water inlet pipe;
one end of the first water drainage pipe is communicated with the fifth vacuum cavity;
wherein, the humidity control module includes:
a frame;
the first motor is fixedly arranged on the rack and is electrically connected with the controller;
the rotary table is in transmission connection with the first motor;
the first detection shell is internally provided with a first workpiece placing space; a vacuum structure is arranged inside the side wall of the vacuum tube;
the first filter screen is cylindrical, and a plurality of first air holes are formed in the side wall of the first filter screen;
the second motor is fixedly arranged at the upper end of the first detection shell, is in transmission connection with the first filter screen and is electrically connected with the controller;
the first humidity sensor is electrically connected with the controller, arranged in the first workpiece placing space and fixedly arranged on the first detection shell;
the first nozzle is arranged in the first workpiece placing space, is fixedly arranged on the first detection shell and is arranged outside the first filter screen, and a first space is formed inside the first filter screen;
the second nozzle is arranged in the first workpiece placing space, is fixedly arranged on the first detection shell and is arranged outside the first filter screen;
one end of the first conveying pipe is communicated with the first nozzle;
one end of the second conveying pipe is communicated with the second nozzle;
one end of the first evacuation pipe is communicated with a first workpiece detection space in the first detection shell;
the vacuum pumping pump is communicated with the other end of the first vacuumizing pipe and is electrically connected with the controller;
the high-pressure pump is communicated with the other end of the first conveying pipe and the other end of the second conveying pipe;
the second detection shell is internally provided with a second workpiece placing space; a vacuum structure is arranged inside the side wall of the vacuum tube;
the second filter screen is cylindrical, and a plurality of second air holes are formed in the side wall of the second filter screen;
the third motor is fixedly arranged at the upper end of the second detection shell, is in transmission connection with the second filter screen, and is electrically connected with the controller;
the second humidity sensor is electrically connected with the controller, is arranged in the second workpiece placing space and is fixedly arranged on the second detection shell;
the third nozzle is arranged in the second workpiece placing space, is fixedly arranged on the second detection shell, is arranged outside the second filter screen, and is internally provided with a second space;
the fourth nozzle is arranged in the second workpiece placing space, is fixedly arranged on the second detection shell and is arranged outside the second filter screen;
one end of the third conveying pipe is communicated with the third nozzle;
one end of the fourth conveying pipe is communicated with the fourth nozzle;
one end of the second evacuation pipe is communicated with a second workpiece detection space in the second detection shell; the vacuum pump is communicated with the other end of the second evacuation pipe.
The rotary table is a circular rotary table.
That is to say through the design that adopts the duplex position for when a detection casing is detecting, can take out the chip that has detected, the chip that will prepare to detect simultaneously is put into equipment inside and is detected, and the filter screen is inside to be the position space that the detection chip was placed, has improved detection speed greatly. The controller controls the high-pressure pump to spray water to the workpiece detection space through the nozzle, the controller controls the second motor/the third motor to rotate, the first filter screen/the second filter screen rotates, the nozzle is prevented from being directly sprayed to the chip, the effect of further dispersing moisture is achieved, and the filter screen is in the rotating process, so that the moisture distribution is more uniform. The controller is used for pumping out the humidity of the workpiece detection space by controlling the pumping pump. The controller detects the internal humidity value through the humidity sensor.
Further, because the lateral wall in first work piece detection space/second work piece detection space all adopts vacuum structure, because do not receive the influence of outside temperature, the condition that moisture liquefaction influences inside humidity just also can not appear.
The controller heats the water in the first water tank through the first heater, and the controller detects the temperature in the first water tank through the first temperature sensor. The controller controls the first water pump to work, water in the first water tank is extracted, the water sequentially passes through the first insertion pipe, the first water pump, the first connecting pipe, the first electromagnetic valve, the first branch pipe, the junction pipe, the header pipe, the fifth electromagnetic valve and the second joint of the three-way joint, certain water is discharged in advance, and the temperature of the whole pipeline is closer to the temperature in the first water tank; that is, drainage is earlier the certain time, and then the controller control seventh solenoid valve closes, and water just can not be followed drain pipe two and discharged, and control sixth solenoid valve opens simultaneously for inside water gets into the detection cavity from the inlet tube, at last through the outflow of drain pipe one.
Furthermore, the other end of the drain pipe is communicated with an eighth electromagnetic valve, and the controller controls the opening and closing of the eighth electromagnetic valve to realize whether to continue draining.
The second water tank, the third water tank and the fourth water tank all adopt the same mode to work, and the temperature in different water tanks can be set for.
The controller is also electrically connected with a display screen and an input module.
The invention has the beneficial effects that: the calibration space of presetting temperature and humidity can be provided, simple structure, and is with low costs, efficient, convenient to use's advantage.
Drawings
FIG. 1 is a schematic diagram of the principles of the present invention;
FIG. 2 is a schematic diagram of the humidity control module of the present invention;
FIG. 3 is a schematic diagram of a temperature control module of the present invention.
Detailed Description
As shown in fig. 1, 2 and 3, the calibration system of the temperature and humidity sensor of the present invention includes a controller, a temperature control module and a humidity control module; the controllers are electrically connected to the temperature control module and the humidity control module;
wherein, the temperature control module includes:
a housing having a first space therein; the first space is provided with four small spaces which are sequentially arranged from bottom to top; the partition plates are arranged between two adjacent small spaces, and are totally three partition plates which are respectively a first partition plate, a second partition plate and a third partition plate from bottom to top; a first vacuum cavity is arranged in each lattice force plate; the four small spaces are respectively a small space I, a small space II and a small space three-level small space IV; the controller is fixedly arranged on the shell;
the first water tank is arranged in the first small space and arranged on the first partition plate; a first cavity is arranged in the first water tank, and a second vacuum cavity is arranged in the side wall of the first water tank;
the first heater is fixedly arranged in the first water tank and is electrically connected with the controller;
the first temperature sensor is fixedly arranged in the first water tank and is electrically connected with the controller;
one end of the first inserting pipe is arranged in the first water tank, and the other end of the first inserting pipe is arranged outside the first water tank;
the first water pump is communicated with the other end of the first insertion pipe and is electrically connected with the controller;
one end of the first connecting pipe is communicated with the first water pump;
one end of the first electromagnetic valve is communicated with the other end of the first connecting pipe and is electrically connected with the controller;
one end of the first branch pipe is communicated with the other end of the first electromagnetic valve;
a junction pipe communicating with the first branch pipe;
the second water tank is arranged in the second small space and is arranged on the second isolation plate; a second cavity is formed in the second water tank, and a third vacuum cavity is formed in the side wall of the second water tank;
the second heater is fixedly arranged in the second water tank and is electrically connected with the controller;
the second temperature sensor is fixedly arranged in the second water tank and is electrically connected with the controller;
one end of the second inserting pipe is arranged in the second water tank, and the other end of the second inserting pipe is arranged outside the second water tank;
the second water pump is communicated with the other end of the second insertion pipe and is electrically connected with the controller;
one end of the second connecting pipe is communicated with the second water pump;
one end of the second electromagnetic valve is communicated with the other end of the second connecting pipe and is electrically connected with the controller;
one end of the second branch pipe is communicated with the other end of the second electromagnetic valve; the first branch pipe is communicated with the confluence pipe;
the third water tank is arranged in the third small space and is arranged on the third partition plate; a third cavity is formed in the third water tank, and a third vacuum cavity is formed in the side wall of the third water tank;
the third heater is fixedly arranged in the third water tank and is electrically connected with the controller;
the third temperature sensor is fixedly arranged in the third water tank and is electrically connected with the controller;
one end of the third insertion pipe is arranged in the third water tank, and the other end of the third insertion pipe is arranged outside the third water tank;
the third water pump is communicated with the other end of the first insertion pipe and is electrically connected with the controller;
one end of the third connecting pipe is communicated with the third water pump;
one end of the third electromagnetic valve is communicated with the other end of the third connecting pipe and is electrically connected with the controller;
one end of the third branch pipe is communicated with the other end of the third electromagnetic valve; the third branch pipe is communicated with the confluence pipe;
the fourth water tank is arranged in the small space IV and arranged at the bottom of the shell; a fourth cavity is formed in the fourth water tank, and a fourth vacuum cavity is formed in the side wall of the fourth water tank;
the fourth heater is fixedly arranged in the fourth water tank and is electrically connected with the controller;
the fourth temperature sensor is fixedly arranged in the fourth water tank and is electrically connected with the controller;
one end of the fourth inserting pipe is arranged in the fourth water tank, and the other end of the fourth inserting pipe is arranged outside the fourth water tank;
the fourth water pump is communicated with the other end of the fourth insertion pipe and is electrically connected with the controller;
one end of the fourth connecting pipe is communicated with the fourth water pump;
one end of the fourth electromagnetic valve is communicated with the other end of the fourth connecting pipe and is electrically connected with the controller;
one end of the fourth branch pipe is communicated with the other end of the fourth electromagnetic valve; the fourth branch pipe is communicated with the confluence pipe;
a header pipe, one end of which is communicated with the confluence pipe;
one end of the fifth electromagnetic valve is communicated with the other end of the main pipe;
the three-way joint is provided with a first interface, a second interface and a third interface; one port of the three-way joint is communicated with the other end of the fifth electromagnetic valve; a second joint of the three-way joint is connected with a second water drainage pipe; a third joint of the three-way valve is connected with a sixth electromagnetic valve; the fifth electromagnetic valve and the sixth electromagnetic valve are both electrically connected to the controller;
one end of the water inlet pipe is communicated with the other end of the sixth electromagnetic valve;
the detection cavity is internally provided with a workpiece placing space, and the side wall of the detection cavity is internally provided with a fifth vacuum cavity; the fifth vacuum cavity is communicated with the other end of the water inlet pipe;
one end of the first water drainage pipe is communicated with the fifth vacuum cavity;
wherein, the humidity control module includes:
a frame;
the first motor is fixedly arranged on the rack and is electrically connected with the controller;
the rotary table is in transmission connection with the first motor;
the first detection shell is internally provided with a first workpiece placing space; a vacuum structure is arranged inside the side wall of the vacuum tube;
the first filter screen is cylindrical, and a plurality of first air holes are formed in the side wall of the first filter screen;
the second motor is fixedly arranged at the upper end of the first detection shell, is in transmission connection with the first filter screen and is electrically connected with the controller;
the first humidity sensor is electrically connected with the controller, arranged in the first workpiece placing space and fixedly arranged on the first detection shell;
the first nozzle is arranged in the first workpiece placing space, is fixedly arranged on the first detection shell and is arranged outside the first filter screen, and a first space is formed inside the first filter screen;
the second nozzle is arranged in the first workpiece placing space, is fixedly arranged on the first detection shell and is arranged outside the first filter screen;
one end of the first conveying pipe is communicated with the first nozzle;
one end of the second conveying pipe is communicated with the second nozzle;
one end of the first evacuation pipe is communicated with a first workpiece detection space in the first detection shell;
the vacuum pumping pump is communicated with the other end of the first vacuumizing pipe and is electrically connected with the controller;
the high-pressure pump is communicated with the other end of the first conveying pipe and the other end of the second conveying pipe;
the second detection shell is internally provided with a second workpiece placing space; a vacuum structure is arranged inside the side wall of the vacuum tube;
the second filter screen is cylindrical, and a plurality of second air holes are formed in the side wall of the second filter screen;
the third motor is fixedly arranged at the upper end of the second detection shell, is in transmission connection with the second filter screen, and is electrically connected with the controller;
the second humidity sensor is electrically connected with the controller, is arranged in the second workpiece placing space and is fixedly arranged on the second detection shell;
the third nozzle is arranged in the second workpiece placing space, is fixedly arranged on the second detection shell, is arranged outside the second filter screen, and is internally provided with a second space;
the fourth nozzle is arranged in the second workpiece placing space, is fixedly arranged on the second detection shell and is arranged outside the second filter screen;
one end of the third conveying pipe is communicated with the third nozzle;
one end of the fourth conveying pipe is communicated with the fourth nozzle;
one end of the second evacuation pipe is communicated with a second workpiece detection space in the second detection shell; the vacuum pump is communicated with the other end of the second evacuation pipe.
The rotary table is a circular rotary table.
That is to say through the design that adopts the duplex position for when a detection casing is detecting, can take out the chip that has detected, the chip that will prepare to detect simultaneously is put into equipment inside and is detected, and the filter screen is inside to be the position space that the detection chip was placed, has improved detection speed greatly. The controller controls the high-pressure pump to spray water to the workpiece detection space through the nozzle, the controller controls the second motor/the third motor to rotate, the first filter screen/the second filter screen rotates, the nozzle is prevented from being directly sprayed to the chip, the effect of further dispersing moisture is achieved, and the filter screen is in the rotating process, so that the moisture distribution is more uniform. The controller is used for pumping out the humidity of the workpiece detection space by controlling the pumping pump. The controller detects the internal humidity value through the humidity sensor.
Further, because the lateral wall in first work piece detection space/second work piece detection space all adopts vacuum structure, because do not receive the influence of outside temperature, the condition that moisture liquefaction influences inside humidity just also can not appear.
The controller heats the water in the first water tank through the first heater, and the controller detects the temperature in the first water tank through the first temperature sensor. The controller controls the first water pump to work, water in the first water tank is extracted, the water sequentially passes through the first insertion pipe, the first water pump, the first connecting pipe, the first electromagnetic valve, the first branch pipe, the junction pipe, the header pipe, the fifth electromagnetic valve and the second joint of the three-way joint, certain water is discharged in advance, and the temperature of the whole pipeline is closer to the temperature in the first water tank; that is, drainage is earlier the certain time, and then the controller control seventh solenoid valve closes, and water just can not be followed drain pipe two and discharged, and control sixth solenoid valve opens simultaneously for inside water gets into the detection cavity from the inlet tube, at last through the outflow of drain pipe one.
Furthermore, the other end of the drain pipe is communicated with an eighth electromagnetic valve, and the controller controls the opening and closing of the eighth electromagnetic valve to realize whether to continue draining.
The second water tank, the third water tank and the fourth water tank all adopt the same mode to work, and the temperature in different water tanks can be set for.
The controller is also electrically connected with a display screen and an input module.
The beneficial effects of the invention are: the calibration space of presetting temperature and humidity can be provided, simple structure, and is with low costs, efficient, convenient to use's advantage.
Claims (1)
1. The calibration system of the temperature and humidity sensor is characterized by comprising a controller, a temperature control module and a humidity control module; the controllers are electrically connected to the temperature control module and the humidity control module;
wherein, the temperature control module includes:
a housing having a first space therein; the first space is provided with four small spaces which are sequentially arranged from bottom to top; the partition plates are arranged between two adjacent small spaces, and are totally three partition plates which are respectively a first partition plate, a second partition plate and a third partition plate from bottom to top; a first vacuum cavity is arranged in each lattice force plate; the four small spaces are respectively a small space I, a small space II and a small space three-level small space IV; the controller is fixedly arranged on the shell;
the first water tank is arranged in the small space I and arranged on the first isolation plate; a first cavity is arranged in the first water tank, and a second vacuum cavity is arranged in the side wall of the first water tank;
the first heater is fixedly arranged in the first water tank and is electrically connected with the controller;
the first temperature sensor is fixedly arranged in the first water tank and is electrically connected with the controller;
one end of the first inserting pipe is arranged in the first water tank, and the other end of the first inserting pipe is arranged outside the first water tank;
the first water pump is communicated with the other end of the first insertion pipe and is electrically connected with the controller;
one end of the first connecting pipe is communicated with the first water pump;
one end of the first electromagnetic valve is communicated with the other end of the first connecting pipe and is electrically connected with the controller;
one end of the first branch pipe is communicated with the other end of the first electromagnetic valve;
a junction pipe communicating with the first branch pipe;
the second water tank is arranged in the second small space and is arranged on the second isolation plate; a second cavity is formed in the second water tank, and a third vacuum cavity is formed in the side wall of the second water tank;
the second heater is fixedly arranged in the second water tank and is electrically connected with the controller;
the second temperature sensor is fixedly arranged in the second water tank and is electrically connected with the controller;
one end of the second inserting pipe is arranged in the second water tank, and the other end of the second inserting pipe is arranged outside the second water tank;
the second water pump is communicated with the other end of the second insertion pipe and is electrically connected with the controller;
one end of the second connecting pipe is communicated with the second water pump;
one end of the second electromagnetic valve is communicated with the other end of the second connecting pipe and is electrically connected with the controller;
one end of the second branch pipe is communicated with the other end of the second electromagnetic valve; the first branch pipe is communicated with the confluence pipe;
the third water tank is arranged in the third small space and is arranged on the third partition plate; a third cavity is formed in the third water tank, and a third vacuum cavity is formed in the side wall of the third water tank;
the third heater is fixedly arranged in the third water tank and is electrically connected with the controller;
the third temperature sensor is fixedly arranged in the third water tank and is electrically connected with the controller;
one end of the third insertion pipe is arranged in the third water tank, and the other end of the third insertion pipe is arranged outside the third water tank;
the third water pump is communicated with the other end of the first insertion pipe and is electrically connected with the controller;
one end of the third connecting pipe is communicated with the third water pump;
one end of the third electromagnetic valve is communicated with the other end of the third connecting pipe and is electrically connected with the controller;
one end of the third branch pipe is communicated with the other end of the third electromagnetic valve; the third branch pipe is communicated with the confluence pipe;
the fourth water tank is arranged in the small space IV and arranged at the bottom of the shell; a fourth cavity is formed in the fourth water tank, and a fourth vacuum cavity is formed in the side wall of the fourth water tank;
the fourth heater is fixedly arranged in the fourth water tank and is electrically connected with the controller;
the fourth temperature sensor is fixedly arranged in the fourth water tank and is electrically connected with the controller;
one end of the fourth inserting pipe is arranged in the fourth water tank, and the other end of the fourth inserting pipe is arranged outside the fourth water tank;
the fourth water pump is communicated with the other end of the fourth insertion pipe and is electrically connected with the controller;
one end of the fourth connecting pipe is communicated with the fourth water pump;
one end of the fourth electromagnetic valve is communicated with the other end of the fourth connecting pipe and is electrically connected with the controller;
one end of the fourth branch pipe is communicated with the other end of the fourth electromagnetic valve; the fourth branch pipe is communicated with the confluence pipe;
a header pipe, one end of which is communicated with the confluence pipe;
one end of the fifth electromagnetic valve is communicated with the other end of the main pipe;
the three-way joint is provided with a first interface, a second interface and a third interface; one port of the three-way joint is communicated with the other end of the fifth electromagnetic valve; a second joint of the three-way joint is connected with a second water drainage pipe; a third joint of the three-way valve is connected with a sixth electromagnetic valve; the fifth electromagnetic valve and the sixth electromagnetic valve are both electrically connected to the controller;
one end of the water inlet pipe is communicated with the other end of the sixth electromagnetic valve;
the detection cavity is internally provided with a workpiece placing space, and a fifth vacuum cavity is arranged inside the side wall of the detection cavity; the fifth vacuum cavity is communicated with the other end of the water inlet pipe;
one end of the first water drainage pipe is communicated with the fifth vacuum cavity;
wherein, the humidity control module includes:
a frame;
the first motor is fixedly arranged on the rack and is electrically connected with the controller;
the rotary table is in transmission connection with the first motor;
the first detection shell is internally provided with a first workpiece placing space; a vacuum structure is arranged inside the side wall of the vacuum tube;
the first filter screen is cylindrical, and a plurality of first air holes are formed in the side wall of the first filter screen;
the second motor is fixedly arranged at the upper end of the first detection shell, is in transmission connection with the first filter screen and is electrically connected with the controller;
the first humidity sensor is electrically connected with the controller, arranged in the first workpiece placing space and fixedly arranged on the first detection shell;
the first nozzle is arranged in the first workpiece placing space, is fixedly arranged on the first detection shell and is arranged outside the first filter screen, and a first space is formed inside the first filter screen;
the second nozzle is arranged in the first workpiece placing space, is fixedly arranged on the first detection shell and is arranged outside the first filter screen;
one end of the first conveying pipe is communicated with the first nozzle;
one end of the second conveying pipe is communicated with the second nozzle;
one end of the first evacuation pipe is communicated with a first workpiece detection space in the first detection shell;
the vacuum pumping pump is communicated with the other end of the first vacuumizing pipe and is electrically connected with the controller;
the high-pressure pump is communicated with the other end of the first conveying pipe and the other end of the second conveying pipe;
the second detection shell is internally provided with a second workpiece placing space; a vacuum structure is arranged inside the side wall of the vacuum tube;
the second filter screen is cylindrical, and a plurality of second air holes are formed in the side wall of the second filter screen;
the third motor is fixedly arranged at the upper end of the second detection shell, is in transmission connection with the second filter screen, and is electrically connected with the controller;
the second humidity sensor is electrically connected with the controller, is arranged in the second workpiece placing space and is fixedly arranged on the second detection shell;
the third nozzle is arranged in the second workpiece placing space, is fixedly arranged on the second detection shell, is arranged outside the second filter screen, and is internally provided with a second space;
the fourth nozzle is arranged in the second workpiece placing space, is fixedly arranged on the second detection shell and is arranged outside the second filter screen;
one end of the third conveying pipe is communicated with the third nozzle;
one end of the fourth conveying pipe is communicated with the fourth nozzle;
one end of the second evacuation pipe is communicated with a second workpiece detection space in the second detection shell; the vacuum pump is communicated with the other end of the second evacuation pipe.
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