CN114892122A - Surface diffusion method for improving nano-scale component matrix strength - Google Patents
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- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
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- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
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- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
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- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
- C23C8/38—Treatment of ferrous surfaces
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Abstract
A surface diffusion method for improving the matrix strength of nanoscale parts belongs to the technical field of metal material strength improvement, and can solve the problems of difficult micro-machining of nanoscale parts and high mechanical property requirement of finished products. Through tests, the surface diffusion technology adopted by the invention greatly improves the surface performance and the overall mechanical performance of the nanoscale part, and obtains higher bearing capacity and fatigue life. The surface diffusion method provided by the invention provides a new idea for machining nanoscale parts.
Description
Technical Field
The invention belongs to the technical field of metal material strength improvement, and particularly relates to a surface diffusion method for improving the matrix strength of a nanoscale part.
Background
In general, the strength of the alloy is improved by integral alloying of metal materials or heat treatment after forming metal parts, and the process is complex and high in cost.
Nanoscale means, in essence, that at least one dimension of a feature is on the order of micrometers to millimeters. The nano-component comprises a micro-component with the characteristic size of 1 mm-10 mm and a micro-component with the characteristic size of 1 micron-1 mm. Thin steel plates as thin as 10 microns, titanium balls as small as several microns to several hundred microns in diameter, and strikers, punches, tie rods, etc. as large as several tens microns in diameter are nanoscale metal parts. With the improvement of machining precision and the rapid development of micro machines, the demands of various micro machine parts such as thin plates, micro hinges, micro connecting rods, micro gears and the like are greatly increased. Due to the great difficulty of micro-machining, the available materials to be machined are limited, for example, the hardness cannot be too high, so that the mechanical properties of the machined product are limited.
The traditional surface diffusion technology can improve the hardness and the wear resistance of the metal surface and can also improve the corrosion resistance.
Disclosure of Invention
The invention provides a surface diffusion method for improving the matrix strength of a nanoscale part aiming at the problems of difficult micro-machining of the nanoscale part and high mechanical property requirement of a finished product. The improved surface diffusion technology is adopted to improve the surface performance of the nano-scale metal part, improve the overall mechanical performance, and obtain higher bearing capacity and fatigue life.
The invention adopts the following technical scheme:
the characteristic size of the used nanoscale part is less than or equal to 10mm, the nanoscale part is treated by adopting the traditional ion nitriding pretreatment process, the nanoscale part is placed in a vacuum furnace after a clean surface is obtained, and the vacuum is pumped to the limit vacuum, and the biggest improvement of the traditional diffusion treatment process is that the concentration ratio of diffusion elements is strictly controlled in the diffusion treatment process and is not more than the maximum solid solubility of the diffusion elements in matrix metal; the holding time is determined according to the diffusion Arrhenius formula to ensure that the alloy infiltration layer thickness is greater than 1/6 of the characteristic scale. And after the diffusion treatment is finished, cooling to room temperature along with the furnace, and taking out.
The temperature T is determined according to the diffusion Arrhenius formula D = D0exp (-Q/RT), where D is the diffusion coefficient, D0 is the diffusion constant, Q is the diffusion activation energy, and R is the molar gas constant to ensure that the alloy infiltrated layer thickness is greater than 1/6 of the characteristic dimension.
A surface diffusion method for increasing the matrix strength of a nanoscale component, comprising the steps of:
firstly, preparing a nanoscale part, and cleaning a sample to obtain a sample;
secondly, performing ion bombardment or polishing ultrasonic cleaning pretreatment on the sample obtained in the first step;
thirdly, carrying out diffusion and permeation treatment on the sample pretreated in the second step, and diffusing interstitial alloying elements into the surface of the nanoscale part to form a continuous and compact surface alloy permeation layer;
and fourthly, cooling to room temperature along with the furnace after the diffusion treatment is finished, and taking out.
Further, the characteristic size of the matrix of the micro-scale part in the first step is less than or equal to 10 mm.
Further, in the first step the nanoscale component substrate comprises any one of iron, tantalum, and titanium.
Further, the diffusion treatment method in the third step includes ion diffusion or gas diffusion.
Further, in the third step, the intermittent alloying element comprises any one of carbon, nitrogen, oxygen and boron, and the concentration ratio of the alloying element is not more than the maximum solid solubility of the alloying element in the base metal.
Further, the alloy infiltrated layer in the third step has a thickness greater than 1/6 a of the characteristic dimension.
The invention has the following beneficial effects:
1. the invention adopts the improved surface diffusion technology to improve the surface performance of the nano-scale metal part, simultaneously improves the overall mechanical performance, and obtains higher bearing capacity and fatigue life.
2. The surface of the nano-scale component substrate is subjected to diffusion treatment without intermediate treatment.
3. The hardness and wear resistance of the nano-scale sheet part treated by the method can be obviously improved, the performance of the sheet material in the aspects of strength, texture, deformation and the like is also greatly improved, the product has a good application prospect in the field of semiconductors, and meanwhile, the method can also be used for ion nitriding or ion carbonizing of various nano-scale parts.
Drawings
FIG. 1 is a graph showing a comparison between a three-point bending test of a sample obtained in example 1 of the present invention and an original sample.
FIG. 2 is a graph showing a comparison between a three-point bending test of a sample obtained in example 2 of the present invention and an original sample.
FIG. 3 is a graph of the rate of diffusion of diffusing elements in a matrix as a function of thickness.
FIG. 4 is a schematic drawing showing the diffusion of alloying elements into a thin plate substrate of a nanoscale part, X 1 And X 2 Y is the thickness of the middle portion in terms of the diffusion layer thickness.
FIG. 5 is a schematic drawing showing diffusion of alloying elements of a nanoscale rod, X 1 Is the thickness of the diffusion layer.
Detailed Description
The present invention is further illustrated by the following examples, which are not to be construed as limiting the invention.
An ion carbonization process of sheet metal parts, the characteristic dimension of the part is 1mm, the sheet is placed on a carbonization furnace, then the sheet and the carbonization furnace are placed together on a cathode disc of an ion nitriding furnace and close to an auxiliary cathode, ion bombardment is firstly carried out, and then ion carbonization treatment is carried out; the ion bombardment is carried out at the preset temperature of 700-850 ℃, the pre-vacuumizing is carried out to below 2Pa, the duty ratio of a given cathode power supply is 60.1%, the ion bombardment is carried out for 30-40min, the voltage is given as 401-435V, the argon flow is 92.4mL/min, the working pressure is 65Pa, the used source electrode material is a carbon target, and the heat preservation time is 3-6 hours with the electrode spacing of 1.2-1.5 cm. After testing, the hardness of the material is greatly improved.
Example 1, a nano-scale sheet of pure titanium material was subjected to ion carbonization, the process steps being as follows:
ion carbonization pretreatment:
(1) preparing a titanium material into a test sample, processing the test sample into a specification of 12 x 15 x 0.1mm, and then cleaning the test sample to obtain a sample A;
(2) and (3) putting the sample A into an ion carburizing furnace, flatly placing the sample A on a cathode disc of the carburizing furnace and approaching to an auxiliary cathode, and vertically putting the treated titanium material on a tool for ion bombardment, wherein the ion bombardment is used for removing dirt on the surface of the sample to obtain a sample B.
An ion carbonization process:
(3) and carrying out ion carbonization treatment on the sample B after ion bombardment, wherein the process parameters comprise that the source electrode voltage is 735V, the source electrode current is 4-4.5A, the cathode voltage is 401-435V, the cathode current is 0.6A, the argon flow is 92.4ml/min, the working pressure is 88-110Pa, the temperature is 900 ℃, and the furnace is opened after the heat preservation time is 3 hours.
(4) The sample obtained after carbonization is subjected to a three-point bending test, as shown in fig. 1, the curve relation of the pressure head force along with the displacement change of the test piece in the experimental loading process is shown, and the bending strength of the test piece is greatly improved.
Example 2, a pure titanium sheet with a thickness of 0.3mm was subjected to ion carbonization, and the process steps were as follows:
ion carbonization pretreatment:
(1) preparing a titanium material into a test sample, processing the test sample into a specification of 12 x 15 x 0.3mm, and then cleaning the test sample to obtain a sample A;
(2) and (3) putting the sample A into an ion carburizing furnace, flatly placing the sample A on a cathode disc of the carburizing furnace and approaching to an auxiliary cathode, and vertically putting the treated titanium material on a tool for ion bombardment, wherein the ion bombardment is used for removing dirt on the surface of the sample to obtain a sample B.
An ion carbonization process:
(3) and (3) carrying out ion carbonization treatment on the sample B after ion bombardment, wherein the process parameters comprise source voltage of 735V, source current of 4-4.5A, cathode voltage of 401-435V, cathode current of 0.6A, argon flow of 92.4ml/min, working pressure of 88-110Pa, temperature of 910 ℃, and furnace opening after heat preservation time of 3 hours.
(4) The sample obtained after ion carbonization is subjected to a three-point bending test, as shown in fig. 2, the curve relation of the pressure head force along with the displacement change of the test piece in the experimental loading process is shown, and the bending strength of the test piece is greatly improved.
Example 3, a tantalum sheet with a thickness of 0.18mm was subjected to ion nitriding treatment, which comprises the following process steps:
ion nitriding pretreatment:
(1) the experimental material is an ultrathin material made of tantalum and is processed into a wafer with the size of phi 18mm multiplied by 0.18 mm.
(2) Before nitriding, the sample is polished by using diamond metallographic polishing paste with the thickness of 5 mu m, washed by deionized water, ultrasonically cleaned in absolute ethyl alcohol for 10 minutes, and dried for later use.
An ion nitriding process:
(3) carrying out ion nitriding treatment on the sample, wherein the process parameters are as follows: the voltage is 8075V, the source current is 0.6A, the argon flow is 150 ml/min, the temperature is 700 ℃, and the furnace is opened after the heat preservation time is 2 hours.
As shown in FIG. 3, the rate of change of the diffusion rate of the diffusing element in the matrix according to the thickness is lower as the distance from the center of the work piece is closer.
FIG. 4 is a schematic drawing showing the diffusion of alloying elements into the nanoscale part sheet matrix, X 1 And X 2 The closer to the core, the lower the diffusion rate is, in order to increase the thickness of the diffusion layer. The thickness y of the intermediate portion is free of diffusing elements.
FIG. 5 is a schematic drawing showing the diffusion of the alloying elements of the nanoscale rods, X 1 The closer to the core, the thickness of the diffusion layer, the lower its diffusivity.
After oxygen, boron, carbon, nitrogen and other elements are diffused on the nano-scale component substrate, the substrate strength is greatly improved.
Claims (6)
1. A surface diffusion method for increasing the matrix strength of a nanoscale component, comprising: the method comprises the following steps:
firstly, preparing a nanoscale part, and cleaning a sample to obtain a sample;
secondly, performing ion bombardment or polishing ultrasonic cleaning pretreatment on the sample obtained in the first step;
thirdly, carrying out diffusion and permeation treatment on the sample pretreated in the second step, and diffusing interstitial alloying elements into the surface of the nanoscale part to form a continuous and compact surface alloy permeation layer;
and fourthly, cooling to room temperature along with the furnace after the diffusion treatment is finished, and taking out.
2. The method of claim 1, wherein the surface diffusion is performed by a surface diffusion method that increases the matrix strength of the nanoscale component, the method comprising: in the first step, the characteristic size of the matrix of the micro-scale part is less than or equal to 10 mm.
3. The method of claim 1, wherein the surface diffusion is performed by a surface diffusion method that increases the matrix strength of the nanoscale component, the method comprising: in a first step the nanoscale component substrate comprises any one of iron, tantalum and titanium.
4. The method of claim 1, wherein the surface diffusion is performed by a surface diffusion method that increases the matrix strength of the nanoscale component, the method comprising: the diffusion treatment method in the third step comprises ion diffusion or gas diffusion.
5. The method of claim 1, wherein the surface diffusion is performed by a surface diffusion method that increases the matrix strength of the nanoscale component, the method comprising: in the third step, the intermittent alloying elements comprise any one of carbon, nitrogen, oxygen and boron, and the concentration ratio of the alloying elements is not more than the maximum solid solubility of the alloying elements in the base metal.
6. The method of claim 1, wherein the surface diffusion is performed by a surface diffusion method that increases the matrix strength of the nanoscale component, the method comprising: the thickness of the alloy infiltrated layer in the third step is greater than 1/6 for the feature size.
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