CN114890660A - Tin bath shielding gas tail gas treatment system device and method - Google Patents

Tin bath shielding gas tail gas treatment system device and method Download PDF

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Publication number
CN114890660A
CN114890660A CN202210605431.5A CN202210605431A CN114890660A CN 114890660 A CN114890660 A CN 114890660A CN 202210605431 A CN202210605431 A CN 202210605431A CN 114890660 A CN114890660 A CN 114890660A
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Prior art keywords
gas
tin bath
pressure
hydrogen
nitrogen
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Inventor
李志进
居上江
浦佳岳
吴晓军
徐峥
董自强
马惠平
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Jiangsu Huadong Yaopi Glass Co ltd
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Jiangsu Huadong Yaopi Glass Co ltd
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Priority to CN202210605431.5A priority Critical patent/CN114890660A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00Shaping glass in contact with the surface of a liquid
    • C03B18/02Forming sheets
    • C03B18/20Composition of the atmosphere above the float bath; Treating or purifying the atmosphere above the float bath

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Gases (AREA)

Abstract

The invention provides a tin bath shielding gas tail gas treatment system device and a tin bath shielding gas tail gas treatment method. The system device and the method have the advantages of energy conservation and emission reduction, environmental friendliness, improvement of the resource utilization rate and reduction of the gas production cost.

Description

Tin bath shielding gas tail gas treatment system device and method
Technical Field
The invention belongs to the field of gas treatment, relates to a gas treatment system device and a gas treatment method, and particularly relates to a tin bath protective gas tail gas treatment system device and a tin bath protective gas tail gas treatment method.
Background
The main equipment in the float glass forming production process is a tin bath which uses nitrogen-hydrogen mixed gas as protective gas. Most of the nitrogen-hydrogen mixed gas is prepared according to the process requirements and enters the tin bath from each span of a plurality of inlets of the tin bath; the equipment partially extending into the tin bath is directly blown or cooled by pure nitrogen into the tin bath. The flow of protective gas input by the tin bath is stable in normal production, and micro-positive pressure of 20-30 Pa is kept in the tin bath.
30-40% of the protective gas is directly discharged through an exhaust pipeline at the front end of the tin bath, and the rest most of the protective gas is taken out from an outlet of the tin bath along with the glass. The trace is leaked out through the tin bath seal, and the tin bath seal is lower than 1% under the normal condition. The exhaust gas composition in normal production: n is a radical of 2 Proportion greater than 92%, H 2 Proportion 6% -8%, H 2 The proportion of O is normally less than 500ppm, the oxygen content is normally less than 10ppm, H 2 The S content is normally lower than 100ppm, and other trace dust forms are tin oxide, tin sulfide, tin steam and the like. The quality requirement of the tin bath protective gas is that the dew point is lower than minus 60 ℃; oxygen content less than 10 ppm; the temperature is below 30 ℃. This requires the device to have the functions of dust removal, oxygen removal and water removal.
The forming process of the float glass requires stable atmosphere of a tin bath, stable flow of protective gas and stable pressure in the tin bath, otherwise, high-quality float glass (original automobile sheet) cannot be produced, so that a protective gas collecting system is required to avoid interference on pressure control in the tin bath, avoid damage to a micro-positive pressure environment in the tin bath and adapt to pressure fluctuation of the tin bath to a certain extent. The purified output is stable for recycling, and H is detected in real time 2 The proportion is convenient for the timely adjustment of the original protective gas proportioning system, and the stable total flow and proportioning of the protective gas are ensured. At present, no device and process for collecting, purifying and recycling the tail gas of the tin bath protective gas are available in the production of float glass at home and abroad.
Traditionally, the protective gas is obtained by respectively producing nitrogen and hydrogen, and then adding the nitrogen and the hydrogen into a tin bath after mixing according to the proportion required by the process. The mainstream in the field of nitrogen production is a cryogenic air separation method and a PSA (pressure swing adsorption) method, the mainstream in the field of hydrogen production is a water electrolysis method, an ammonia decomposition method and the like, the preparation device is complex, a large amount of energy sources such as electric power and the like are consumed, and the cost is high.
Disclosure of Invention
In order to solve the technical problems in the prior art, the invention provides a protective gas tail gas treatment system device and a method.
In order to achieve the technical effect, the invention adopts the following technical scheme:
the invention aims to provide a tin bath shielding gas tail gas treatment system device which comprises a first filtering device, a pressure stabilizing device, a pressurizing device, a second filtering device, a deoxidizing device, a cooling device and a dehydrating device which are sequentially connected.
In the invention, a tail gas collecting device and a second cooling device can be sequentially arranged in front of the first filtering device according to the gas flowing direction. The tail gas can be collected in a discharge pipe and cooled to normal temperature through a water cooler. At the moment, a large amount of tin oxide, tin sulfide and the like form solid particles, and then the solid particles enter a first filtering device for preceding stage removal; the water cooler in the cooling device and the filter in the first filtering device are both used and prepared and can be cleaned or replaced on line.
As a preferable technical solution of the present invention, the pressure stabilizer includes a surge tank.
As a preferable technical solution of the present invention, the gas outlet of the pressure stabilizer is provided with a pressure regulating valve.
Preferably, the pressure regulating valve is a pneumatic diaphragm regulating valve.
In the invention, the pressure of the tin bath collecting pipe outlet or the buffer tank is regulated and stabilized through the opening of the pressure regulating valve. If the opening degree of the pressure regulating valve is maintained at the high level for a long period of time, the operating frequency of the downstream supercharging device is appropriately increased, and if the opening degree of the pressure regulating valve is maintained at the low level for a long period of time, the operating frequency of the downstream supercharging device is appropriately decreased. The pressure stabilizer is provided with a pressure supplementing loop, and the prepared finished gas is input into the buffer tank after being decompressed, so that the system can not complete a necessary safety flow when the tail gas cannot be collected.
As the preferable technical scheme of the invention, the supercharging device is a Roots blower.
In the invention, the Roots blower can be two parallel Roots blowers which are used for standby.
As a preferable technical solution of the present invention, an automatic gas emptying device is provided on a connection pipe between the pressure boosting device and the second filtering device.
Preferably, the automatic gas emptying device comprises an emptying valve arranged on the connecting pipeline, and a pressure detection assembly, an oxygen content detection assembly and a dew point detection assembly which are arranged at a gas outlet of the pressurization device.
In the invention, when the pressure detection component of the automatic gas emptying device detects overpressure automatic emptying, if the oxygen content detection component detects that the oxygen content of the treated gas (such as partial leakage of an upstream pipeline and outside air entering a system) is higher than the upper limit or the dew point detection component detects that the dew point is higher than the upper limit (such as leakage of a cooler and entering an exhaust gas treatment system), the automatic gas emptying device also automatically empties the treated gas.
As a preferable technical scheme of the invention, the oxygen removing device comprises a heating assembly and a deoxidation reaction assembly which are sequentially connected along the gas flow direction.
In the invention, the tail gas is heated to 100 ℃ by the heating component and then enters the deoxidation reaction component, the palladium catalyst is arranged in the deoxidation reaction component, hydrogen in the tail gas reacts with residual oxygen in the tail gas under the action of the catalyst, and water generated by the reaction is basically taken away by nitrogen, so that the catalyst is not influenced by water and loses efficacy, does not need regeneration treatment and can be used for a long time. Wherein, the heating component can be an electric heater or other high-temperature hot air heat exchangers in the factory, and the catalyst can be palladium catalyst.
As a preferable technical solution of the present invention, the water removal device includes a gas-liquid separation module and an adsorption drying module which are connected in sequence along a gas flow direction.
Preferably, the adsorption drying assembly comprises at least 2 adsorption drying towers in parallel.
In the invention, the deoxidized tail gas firstly enters a gas-liquid separation device to remove liquid water, and then enters an adsorption drying device to deeply remove water. When the adsorption drying tower parts connected in parallel work, the rest parts are regenerated by the adsorption filler, and the regenerated gas uses the finished product purified gas prepared by the device.
As a preferable technical scheme of the invention, a nitrogen-hydrogen proportioning device is connected behind the water removal device.
Preferably, the nitrogen-hydrogen proportioning device comprises an oxygen content detection component, a dew point detection component, a hydrogen content detection component and an emptying component.
In the invention, when the oxygen content is detected to be higher than the lower limit value or the dew point is detected to be higher than the lower limit value, the gas is unqualified and is automatically exhausted. And then detecting the proportion and the flow of hydrogen in the gas, and adjusting the parameters of the original nitrogen-hydrogen proportioning system in real time according to the measured data to finally stabilize the flow and the proportion of the nitrogen and the hydrogen entering the tin bath. The pressure of the molten tin bath is prevented from fluctuating by a pressure-stabilizing regulating valve before entering the molten tin bath.
The invention also aims to provide a tin bath protective gas tail gas treatment method, which uses the system device of one aim and comprises the following steps:
the cooled tin bath protective gas tail gas enters the first filtering device for first filtering, and sequentially enters the pressure stabilizing device and the pressurizing device to obtain pressurized gas;
and the pressurized gas is subjected to secondary filtration, is cooled with a cooling device after being deoxidized by a deoxidizing device, and is used for tin bath shielding gas after being dewatered by a dewatering device.
In a preferred embodiment of the present invention, the pressure stabilizer controls the pressure fluctuation of the molten tin bath to be less than or equal to 5Pa, such as 1Pa, 1.5Pa, 2Pa, 2.5Pa, 3Pa, 3.5Pa, 4Pa, or 4.5Pa, but the pressure stabilizer is not limited to the above-mentioned values, and other values not shown in the above-mentioned range of values are also applicable.
Preferably, the pressure of the pressurized gas is 0.08 to 0.09MPa, such as 0.081MPa, 0.082MPa, 0.083MPa, 0.084MPa, 0.085MPa, 0.086MPa, 0.087MPa, 0.088MPa or 0.089MPa, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the heating assembly heats the gas to a temperature of not less than 100 ℃, such as 105 ℃, 110 ℃, 115 ℃, 120 ℃, 125 ℃, 130 ℃, 135 ℃, 140 ℃, 145 ℃ or 150 ℃ before the oxygen removal device removes oxygen, but is not limited to the recited values, and other values not recited in the range of values are equally applicable.
Preferably, after the water removal, the gas is used as the tin bath protective gas after the nitrogen and hydrogen are adjusted by the nitrogen and hydrogen proportioning device.
Preferably, the oxygen content of the gas after water removal is not higher than 10ppm, and the dew point is not higher than-70 ℃. Wherein the oxygen content may be 1ppm, 2ppm, 3ppm, 4ppm, 5ppm, 6ppm, 7ppm, 8ppm or 9ppm etc., and the dew point may be-75 deg.C, -80 deg.C, -85 deg.C or-90 deg.C etc., but is not limited to the recited values, and other values not recited in the numerical range are also applicable.
Compared with the prior art, the invention has at least the following beneficial effects:
(1) the tin bath protective gas tail gas treatment system device provided by the invention has the advantage that the tail gas recovery rate can reach 90% except a small amount of regeneration loss. The dew point of the gas after the recovery treatment is less than-70 ℃, the oxygen content is less than 10ppm, the requirement of the process on protective gas is met, the energy is saved, the cost is reduced, and the method belongs to the initiative in a float glass production line;
(2) the tin bath protective gas tail gas treatment system device provided by the invention does not change the original production process, gas pipeline and control system of the tin bath, adopts multiple strategies to deal with different production modes, and keeps the inlet pressure of the system stable;
a. in normal and stable production: the pressure control is adopted, the pressure of the outlet of the tin bath and the pressure of the buffer tank are collected, and the pressure stability is maintained through the adjustment of the opening of an adjusting valve at the outlet of the buffer tank;
b. when the tin bath equipment goes in and out for operation: about once per day; at the moment, because of factors such as the inlet and outlet of equipment and the like, the pressure of the tin bath is obviously reduced, flow control is adopted, a regulating valve at the outlet of a buffer tank maintains a slightly lower set flow, the pressure loss of a downstream purification system is avoided, the opening of the control strategy is instructed by an original tin bath control system, or the system judges to enter the mode according to the pressure of each monitoring point;
c. when the molten tin bath is cleaned and maintained: about once per month. At the moment, the tin bath is opened in a large area, a large amount of inevitable air enters, the recovery device is stopped or enters an internal circulation mode according to preset steps, tail gas is not collected from the tin bath any more, and finished product gas returns to the buffer tank for pressure compensation;
(3) the tin bath protective gas tail gas treatment system device provided by the invention adopts a data acquisition and monitoring system in control, so that the system stably operates and timely sends out early warning or automatic emergency treatment; for example: controlling the temperature of the cooled tail gas, automatically adjusting the flow of cooling water through a cooling water adjusting valve, and alarming at high temperature; monitoring the pressure difference of the filtering device, cleaning or switching the filter according to the pressure difference, and increasing the frequency of the Roots blower; the dew point detection at the buffer tank indicates that the problem of upstream gas collection or water leakage of a cooler and the like are caused by overhigh temperature, and the gas needs to be automatically emptied in time if the treatment capacity of the purification device is exceeded; monitoring the oxygen content at the buffer tank, and if the oxygen content exceeds the upper limit, such as air leakage, timely discharging is required;
(4) the tin bath protective gas tail gas treatment system device provided by the invention provides a reliable safety mode, for example, an emptying or air supplementing loop is adopted at a key position to place the system with overpressure or pressure loss; analyzing the hydrogen proportion and the oxygen content, forcibly cutting off the valve after the hydrogen proportion and the oxygen content exceed the limits, and introducing nitrogen for purging.
Drawings
FIG. 1 is a schematic structural diagram of a tin bath shielding gas tail gas treatment system device provided in embodiment 1 of the present invention;
FIG. 2 is a schematic structural diagram of a tin bath shielding gas tail gas treatment system device provided in embodiment 2 of the present invention;
in the figure: 1-a first filtering device, 2-a pressure stabilizing device, 3-a pressurizing device, 31-a gas automatic emptying device, 4-a second filtering device, 5-a deoxidizing device, 6-a cooling device, 7-a dehydrating device, 8-a tail gas collecting device, 9-a second cooling device and 10-a nitrogen-hydrogen proportioning device.
The present invention is described in further detail below. The following examples are merely illustrative of the present invention and do not represent or limit the scope of the claims, which are defined by the claims.
Detailed Description
To better illustrate the invention and to facilitate the understanding of the technical solutions thereof, typical but non-limiting examples of the invention are as follows:
example 1
The invention provides a tin bath shielding gas tail gas treatment system device, the structure of which is shown in figure 1, the system device comprises a first filtering device 1, a pressure stabilizing device 2, a supercharging device 3, a second filtering device 4, a deaerating device 5, a cooling device 6 and a dewatering device 7 which are connected in sequence;
the pressure stabilizing device 2 comprises a buffer tank, a gas outlet of the pressure stabilizing device 2 is provided with a pressure regulating valve, and the pressure regulating valve is a pneumatic membrane regulating valve;
the supercharging device 3 is a Roots blower, and an automatic gas emptying device 31 is arranged on a connecting pipeline between the supercharging device 3 and the second filtering device 4; the automatic gas emptying device 31 comprises an emptying valve arranged on the connecting pipeline, and a pressure detection assembly and an oxygen content detection assembly which are arranged at a gas outlet of the supercharging device 3;
the deoxidizing device 5 comprises a heating assembly and a deoxidizing reaction assembly which are sequentially connected along the gas flowing direction, wherein the heating assembly is an electric heater, and the deoxidizing reaction assembly is a reactor internally provided with a palladium catalyst;
the dewatering device 7 comprises a gas-liquid separation component and an adsorption drying component which are sequentially connected along the gas flowing direction, and the adsorption drying component comprises 2 adsorption drying towers which are connected in parallel.
Example 2
The invention provides a tin bath protective gas tail gas treatment system device, the structure of which is shown in figure 2, except that a tail gas collecting device 8 and a second cooling device 9 are sequentially arranged in front of a first filtering device according to the gas flowing direction, a nitrogen-hydrogen proportioning device 10 is connected behind a water removing device, the nitrogen-hydrogen proportioning device 10 comprises an oxygen content detection assembly, a temperature detection assembly, a hydrogen content detection assembly and an emptying assembly, and other external members are the same as those in embodiment 1.
The first filter device used in examples 1 and 2 was a stainless steel mesh filter to filter large-particle dust (100 mesh), the second filter device was a precision filter to filter fine dust (10 μm), the cooling device was a tubular cooler, the tube side was treated gas, and the shell side was 45 ℃ cooling circulating water.
Application example 1
The application example provides a tin bath shielding gas tail gas treatment method, the method uses the system device provided by the embodiment 2, and the treatment method comprises the following steps:
the cooled tin bath protective gas tail gas enters the first filtering device for first filtering, and sequentially enters the pressure stabilizing device and the pressurizing device to obtain pressurized gas;
the pressure stabilizing device controls the pressure fluctuation of the tin bath to be less than or equal to 5Pa, and the pressure of the pressurized gas is 0.08 MPa;
gas after the pressure boost carries out the second and filters, cools off with cooling device after deaerating plant deoxidization, and after water trap dewatering, gaseous warp is used for the molten tin bath protective gas behind the nitrogen hydrogen proportioning device regulation nitrogen hydrogen again.
Before the oxygen removal device performs oxygen removal, the heating assembly heats gas to 100 ℃;
the oxygen content of the tin bath protective gas is not higher than 10ppm, and the dew point is not higher than-70 ℃.
Application example 2
The application example provides a tin bath shielding gas tail gas treatment method, the method uses the system device provided by the embodiment 2, and the treatment method comprises the following steps:
the cooled tin bath protective gas tail gas enters the first filtering device for first filtering, and sequentially enters the pressure stabilizing device and the pressurizing device to obtain pressurized gas;
the pressure stabilizing device controls the pressure fluctuation of the tin bath to be less than or equal to 5Pa, and the pressure of the pressurized gas is 0.085 MPa;
gas after the pressure boost carries out the second and filters, cools off with cooling device after the deaerator, and after the water trap dewatering, gaseous process is used for the molten tin bath protective gas behind the nitrogen hydrogen proportioning device regulation nitrogen hydrogen again.
Before the oxygen removal device performs oxygen removal, the heating assembly heats gas to 120 ℃;
the oxygen content of the tin bath protective gas is not higher than 10ppm, and the dew point is not higher than-70 ℃.
Application example 3
The application example provides a tin bath shielding gas tail gas treatment method, the method uses the system device provided by the embodiment 2, and the treatment method comprises the following steps:
the cooled tin bath protective gas tail gas enters the first filtering device for first filtering, and sequentially enters the pressure stabilizing device and the pressurizing device to obtain pressurized gas;
the pressure stabilizing device controls the pressure fluctuation of the tin bath to be less than or equal to 5Pa, and the pressure of the pressurized gas is 0.085 MPa;
gas after the pressure boost carries out the second and filters, cools off with cooling device after the deaerator, and after the water trap dewatering, gaseous process is used for the molten tin bath protective gas behind the nitrogen hydrogen proportioning device regulation nitrogen hydrogen again.
Before the oxygen removal device performs oxygen removal, the heating assembly heats gas to 120 ℃;
the oxygen content of the tin bath protective gas is not higher than 10ppm, and the dew point is not higher than-70 ℃.
The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
The preferred embodiments of the present invention have been described in detail, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.

Claims (10)

1. The utility model provides a molten tin bath protection gas tail gas processing system device, a serial communication port, system device is including the first filter equipment, voltage regulator device, supercharging device, second filter equipment, deaerator, cooling device and the water trap that connect gradually.
2. The system set forth in claim 1 wherein the pressure stabilizer means comprises a surge tank.
3. The system arrangement according to claim 1 or 2, characterized in that the gas outlet of the pressure-stabilizing device is provided with a pressure-regulating valve;
preferably, the pressure regulating valve is a pneumatic diaphragm regulating valve.
4. The system-device as claimed in any one of claims 1 to 3, wherein the pressure-increasing device is a Roots blower.
5. The system device according to any one of claims 1 to 4, wherein a gas automatic emptying device is arranged on a connecting pipeline between the pressurizing device and the second filtering device;
preferably, the automatic gas emptying device comprises an emptying valve arranged on the connecting pipeline, and a pressure detection assembly, an oxygen content detection assembly and a dew point detection assembly which are arranged at a gas outlet of the pressurization device.
6. The system-device as claimed in any one of claims 1 to 5, wherein the oxygen-removing device comprises a heating module and a deoxidation reaction module which are connected in series along the gas flow direction.
7. The system device according to any one of claims 1 to 6, wherein the water removal device comprises a gas-liquid separation component and an adsorption drying component which are connected in sequence along the gas flow direction;
preferably, the adsorption drying assembly comprises at least 2 adsorption drying towers in parallel.
8. The system device according to any one of claims 1 to 7, wherein a nitrogen-hydrogen proportioning device is connected behind the water removal device;
preferably, the nitrogen-hydrogen proportioning device comprises an oxygen content detection component, a dew point detection component, a hydrogen content detection component and an emptying component.
9. A tin bath shielding gas tail gas treatment method, which is characterized by using the system device of any one of claims 1 to 8, and comprises the following steps:
the cooled tin bath protective gas tail gas enters the first filtering device for first filtering, and sequentially enters the pressure stabilizing device and the pressurizing device to obtain pressurized gas;
and the pressurized gas is subjected to secondary filtration, is cooled with a cooling device after being deoxidized by a deoxidizing device, and is used for tin bath shielding gas after being dewatered by a dewatering device.
10. The processing method according to claim 9, wherein the pressure stabilizing device controls the pressure fluctuation of the tin bath to be less than or equal to 5 Pa;
preferably, the pressure of the pressurized gas is 0.08-0.09 MPa;
preferably, before the oxygen removing device removes oxygen, the heating assembly heats the gas to be not lower than 100 ℃;
preferably, after the water removal, the gas is used as the tin bath protective gas after the nitrogen and hydrogen are adjusted by the nitrogen and hydrogen proportioning device;
preferably, the oxygen content of the gas after water removal is not higher than 10ppm, and the dew point is not higher than-70 ℃.
CN202210605431.5A 2022-05-30 2022-05-30 Tin bath shielding gas tail gas treatment system device and method Pending CN114890660A (en)

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Application Number Priority Date Filing Date Title
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5925158A (en) * 1997-12-19 1999-07-20 Praxair Technology, Inc. Gas recycle for float glass system
CN103570221A (en) * 2013-11-08 2014-02-12 蚌埠玻璃工业设计研究院 Molten tin bath with filter device
CN203429050U (en) * 2013-09-16 2014-02-12 四川旭虹光电科技有限公司 Device capable of recycling mixed gas in tin groove
CN106865959A (en) * 2017-03-17 2017-06-20 四川旭虹光电科技有限公司 The circulation utilization method of 3D glass tin tank shielded gas
CN109289422A (en) * 2018-11-14 2019-02-01 东台中玻特种玻璃有限公司 Online Low-E glass barrier layer exhaust treatment system and exhaust gas treating method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5925158A (en) * 1997-12-19 1999-07-20 Praxair Technology, Inc. Gas recycle for float glass system
CN203429050U (en) * 2013-09-16 2014-02-12 四川旭虹光电科技有限公司 Device capable of recycling mixed gas in tin groove
CN103570221A (en) * 2013-11-08 2014-02-12 蚌埠玻璃工业设计研究院 Molten tin bath with filter device
CN106865959A (en) * 2017-03-17 2017-06-20 四川旭虹光电科技有限公司 The circulation utilization method of 3D glass tin tank shielded gas
CN109289422A (en) * 2018-11-14 2019-02-01 东台中玻特种玻璃有限公司 Online Low-E glass barrier layer exhaust treatment system and exhaust gas treating method

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