CN114888663B - Edging and chamfering method for ITO target - Google Patents

Edging and chamfering method for ITO target Download PDF

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Publication number
CN114888663B
CN114888663B CN202210245389.0A CN202210245389A CN114888663B CN 114888663 B CN114888663 B CN 114888663B CN 202210245389 A CN202210245389 A CN 202210245389A CN 114888663 B CN114888663 B CN 114888663B
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China
Prior art keywords
target
clamping plate
fixed platform
edging
chamfering
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CN202210245389.0A
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CN114888663A (en
Inventor
王梓通
裴炜炀
余芳
李伦圭
康洙男
刘毅华
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Vital Thin Film Materials Guangdong Co Ltd
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Vital Thin Film Materials Guangdong Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses an edging and chamfering method of an ITO target, aiming at ensuring the production quality of the target, and the technical scheme is as follows: relates to a grinding machine and a fixed platform; the fixed platform is provided with an inclined plane; the fixed platform is provided with a clamping assembly for clamping the side face of the target material, the inclined plane is provided with a diversion trench for guiding the flow of the cutting fluid, and the diversion trench extends from the higher end to the lower end of the inclined plane; the method comprises the following steps: fixing the fixed platform on the grinding machine; placing the target on the inclined surface, and clamping the side surface of the target through a clamping assembly to fix the target on a fixed platform; wherein, the target material covers the diversion trench; starting a grinding machine and cutting fluid; the grinding wheel of the grinding machine grinds the top edge of the higher side of the target material; after the grinding wheel finishes grinding the top edge of the higher side of the target material, closing the grinding machine and the cutting fluid; the target is taken down and deburred, belonging to the technical field of target processing.

Description

Edging and chamfering method for ITO target
Technical Field
The invention belongs to the technical field of target processing, and particularly relates to an edge grinding and chamfering method for an ITO target.
Background
According to actual production needs, the target material can be subjected to edging and chamfering procedures.
In the prior art, an edge grinding and chamfering process of a target is shown in a positioning device for milling and chamfering an ITO planar target and a use method thereof disclosed in patent publication No. CN108568721B, wherein the use method of the positioning device is as follows: (1) Fixing a placing base in the positioning equipment on a grinding machine; (2) Placing a planar target to be processed on a placing platform, enabling the end face of the planar target to be processed to be attached to a first inclined face, adjusting a positioning plate after the placement of the planar target is completed, enabling the side face of the positioning plate to be attached to the side face of a planar plate, fastening the positioning plate on the first inclined face through a bolt, covering a fixing platform on the planar target after the adjustment of the positioning plate is completed, enabling a second inclined face to be attached to the other side end face of the planar target, and enabling the fixing platform to be connected with a first limiting platform through the bolt penetrating through the second fixing platform; (3) And (3) after the step (2) is finished, positioning the planar target, detecting whether the planar target is fixed firmly again, starting the grinding machine if the planar target is fixed to meet the requirements, and adjusting the milling size of the grinding machine, so that the planar target is milled.
In the scheme, the process of edging and chamfering the target is realized by the use method of the positioning equipment, when the positioning equipment is used for fixing the target, the target needs to be tightly pressed on the placing platform by using the fixing platform, and the target is easy to crack in the working process of the grinding machine, so that the production quality is influenced.
Disclosure of Invention
The invention mainly aims to provide an edging and chamfering method for an ITO target, aiming at ensuring the production quality of the target.
According to a first aspect of the invention, the invention provides an edging and chamfering method for an ITO target, which relates to a grinding machine and a fixed platform; the fixed platform is provided with an inclined plane, and the target is placed on the inclined plane during processing; the fixed platform is provided with a clamping assembly for clamping the side surface of the target material, the inclined surface is provided with a guide groove for guiding the flow of the cutting fluid, and the guide groove extends from the higher end to the lower end of the inclined surface; the higher end of the diversion trench is an open end, and the lower end of the diversion trench is a closed end; the method comprises the following steps:
fixing the fixed platform on the grinding machine;
placing the target on the inclined surface, and clamping the side surface of the target through the clamping assembly to fix the target on the fixed platform; wherein, the target material covers the diversion trench;
starting a grinding machine and cutting fluid; the grinding wheel of the grinding machine and the cutting fluid move synchronously, and the grinding wheel grinds the top edge of the higher side of the target material to form a chamfer; before the target material is ground, the grinding wheel moves along the grinding direction for at least 1 stroke so as to enable the cutting fluid to fill the diversion trench;
after the grinding wheel finishes grinding the top edge of the higher side of the target material, closing the grinding machine and the cutting fluid;
and taking down the target material and removing burrs.
In a specific embodiment of the invention, the flow guide grooves are multiple, and the multiple flow guide grooves are crossed to form a fish-scale structure.
In a specific embodiment of the present invention, a connection portion between the side edge of the diversion trench along the diversion direction and the inclined surface is a chamfered structure.
In a specific embodiment of the invention, the rotating speed of the grinding wheel is 1500-1800 rpm, and the grinding feed is 0.015-0.03 mm.
In a particular embodiment of the invention, the target is removed by separating the clamping assembly from the target and blowing air into the open end of the flow-directing channel.
In a specific embodiment of the invention, the clamping assembly comprises a first clamping plate arranged on one side of the fixed platform, a second clamping plate arranged on the inclined surface and a third clamping plate; the top of the first clamping plate is arranged higher than the inclined surface;
the first clamping plate and the second clamping plate are matched to clamp two opposite sides of the target material; the lower side of the target material is tightly propped against the third clamping plate.
In a particular embodiment of the invention, the second clamping plate is arranged on the inclined surface in a position-adjustable manner such that the distance between the first clamping plate and the second clamping plate is adjustable.
In a specific embodiment of the invention, a positioning block is arranged at the lower end of the fixed platform, and a positioning surface is arranged on one side of the positioning block close to the higher end of the fixed platform and is perpendicular to the inclined surface;
the target material positioning device further comprises a plurality of standard blocks, when the third clamping plate is installed, one side of each standard block abuts against the positioning surface, and the third clamping plate abuts against the other side of each standard block to enable the side face, matched with the target material, of the third clamping plate to be parallel to the positioning surface.
In a specific embodiment of the invention, the fixed platform comprises a supporting block and a fixed plate, wherein the fixed plate is detachably connected to the bottom of the supporting block; the inclined surface is arranged at the top of the supporting block;
the supporting block is made of PVC material; the fixing plate is made of metal materials which can be magnetically attracted.
One of the above technical solutions of the present invention has at least one of the following advantages or beneficial effects:
in the invention, a target is fixed on a fixed platform, and before the target is ground, a grinding wheel is idle for at least 1 stroke along a grinding direction so as to enable cutting fluid to fill a diversion trench; the cutting fluid is an oily substance and can play a role in bonding the target material in the diversion trench; meanwhile, air between the target and the fixed platform can be squeezed away when the cutting fluid enters the diversion trench, and the target can be tightly pressed on the fixed platform by external pressure; the arrangement of the diversion trench replaces the external pressing block to tightly press the target on the fixed platform, so that the phenomenon of target cracking in the machining process can be effectively avoided, and the production quality of the target is ensured.
Drawings
The invention is further described below with reference to the accompanying drawings and examples;
FIG. 1 is a flow chart of example 1 of the present invention;
fig. 2 is a schematic view of processing a target according to example 1 of the present invention;
FIG. 3 is a structural view of a fixed platform of embodiment 1 of the present invention;
fig. 4 is an enlarged schematic view of G in fig. 3 of embodiment 1 of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention and are not to be construed as limiting the present invention.
Example 1
Referring to fig. 1 to 4, an edge grinding and chamfering method for an ITO target relates to a grinding machine and a fixed platform 1; the fixed platform 1 is provided with an inclined plane A, and the target material a is placed on the inclined plane A during processing; the fixed platform 1 is provided with a clamping assembly 2 for clamping the side surface of the target material a, the inclined surface A is provided with a guide groove 3 for guiding the flow of the cutting fluid B, and the guide groove 3 extends from the higher end to the lower end of the inclined surface A; the higher end of the flow guide groove 3 is an open end for the cutting fluid to enter, and the lower end of the flow guide groove is a closed end for preventing the cutting fluid from flowing away;
in this embodiment, the target a has a square shape;
the method comprises the following steps:
step 1: fixing the fixed platform 1 on a grinding machine;
specifically, the fixed platform 1 is fixed by arranging an electromagnetic chuck or other fixing devices on the grinding machine;
and 2, step: placing a target material a on the inclined surface A, and clamping the side surface of the target material a through a clamping assembly 2 to fix the target material a on a fixed platform 1; wherein, the target material a covers the diversion trench 3;
specifically, the clamping assembly 2 comprises a first clamping plate 21 arranged on one side of the fixed platform 1, a second clamping plate 22 arranged on the inclined surface a, and a third clamping plate 23; the top of the first clamping plate 21 is arranged higher than the inclined surface A;
the first clamping plate 21 and the second clamping plate 22 are matched to clamp two opposite sides of the target material a; the lower side of the target material a abuts against the third clamping plate 23, the upper surface of the target material a does not need to be pressed, and the target material a is prevented from cracking during processing while stable clamping is ensured.
And step 3: starting a grinding machine and cutting fluid B; grinding the top edge of the higher side of the target material a by using a grinding wheel C of the grinding machine; before the target material a is ground, the grinding wheel C leaves 2 strokes along the grinding direction so that the cutting fluid B is filled in the diversion trench 3;
the stroke of the grinding wheel C refers to a path taken by the grinding wheel C for grinding a layer of target material a; cutting fluid B is sprayed to the contact position of the grinding wheel C and the target material a, and a liquid spraying pipe for spraying the cutting fluid B moves along with the grinding wheel C;
specifically, the rotating speed of the grinding wheel C is 1500-1800 rpm, the grinding feed amount is 0.015-0.03 mm, and the normal operation of edging and chamfering is ensured;
and 4, step 4: after the grinding wheel C finishes grinding the top edge of the higher side of the target material a, the grinding machine and the cutting fluid B are closed;
and 5: and (5) taking down the target material a and removing burrs.
And (4) by replacing the bevel edge to be polished of the target material a and repeating the steps 2-5, the edge grinding and chamfering of the plurality of bevel edges of the target material a can be realized.
Specifically, when the target a is removed, the chuck assembly 2 is separated from the target a, and air is blown into the open end of the guide groove 3 to remove the target a.
In practical application, the sequence of steps can be adjusted according to actual production needs, and this embodiment does not limit this; the sequence of steps described in this embodiment is only one specific implementation manner.
Before the target material a is ground, the grinding wheel C leaves 2 strokes along the grinding direction so that the cutting fluid B is filled in the diversion trench 3; the cutting fluid B enters the diversion trench 3, and can play a role in adhering the target material a in the diversion trench 3 because the cutting fluid B is an oily substance; meanwhile, the cutting fluid B enters the diversion trench 3, air between the target material a and the fixed platform 1 is squeezed away, and the target material a is pressed on the fixed platform 1 by external pressure; the arrangement of the diversion trench 3 replaces an external pressing block to tightly press the target material a on the fixed platform 1, so that the phenomenon that the target material a cracks in the machining process can be effectively avoided, and the production quality of the target material a is ensured;
particularly, grinding wheel C pushes down target a during grinding to can make the lower end of target a have a power that upwarps, cutting fluid B and guiding gutter 3 cooperation make target a adhere to on fixed platform 1 in order to offset the power that upwarps, guarantee the normal clear of target a processing, simultaneously, it has replaced the peripheral hardware briquetting, has avoided target a to appear the phenomenon of fracture when processing.
Preferably, the flow guide grooves 3 are multiple, and the multiple flow guide grooves 3 intersect to form a fish scale-shaped structure, which can increase the contact area between the cutting fluid B and the target material a, so that the target material a is more stably attached to the fixed platform 1 under the action of the cutting fluid B;
wherein the lower end of part of the guide grooves 3 is communicated with another guide groove 3.
More preferably, the connection between the side of the diversion trench 3 along the diversion direction and the inclined plane a is a chamfer structure D, that is, both sides of the diversion trench 3 are provided with chamfer structures D, so as to further increase the contact area between the cutting fluid B and the target material a, so that the target material a is more stably attached to the fixed platform 1.
In the present embodiment, the second clamping plate 22 is disposed on the inclined surface a in a position-adjustable manner, so that the distance between the first clamping plate 21 and the second clamping plate 22 is adjustable, specifically, the second clamping plate 22 is detachably connected to the inclined surface a by a threaded connection; the second clamping plate 22 is provided with a kidney-shaped hole, the inclined surface A is provided with a plurality of threaded holes, the second clamping plate 22 is fixed on the inclined surface A in a way that bolts penetrate through the kidney-shaped hole to be matched with the threaded holes, and the position of the second clamping plate 22 can be adjusted in the fixing way, so that the fixing platform 1 can be suitable for target materials a with different lengths;
the first clamping plate 21 is fixed in the same way as the second clamping plate 22, so that the height of the first clamping plate 21 above the inclined surface a is adjustable.
In this embodiment, a positioning block is disposed at a lower end of the fixing platform 1, and a positioning surface E is disposed at a side of the positioning block close to a higher end of the fixing platform 1, and is perpendicular to the inclined surface a;
the fixture comprises a plurality of standard blocks 4, when the third clamping plate 23 is installed, one side of each standard block 4 abuts against the positioning surface E, the third clamping plate 23 abuts against the other side of each standard block 4, so that the side face, matched with the target material a, of the third clamping plate 23 is parallel to the positioning surface E, and the stability of clamping the target material a is guaranteed.
In this embodiment, still be equipped with one on the inclined plane a and dodge groove F, dodge groove F and set up in the below of locating surface E, if target a with locating surface E contacts and realizes pressing from both sides tightly, dodge groove F's setting can avoid knocking against bad target a when placing target a.
Preferably, the fixed platform 1 comprises a supporting block 11 and a fixed plate 12, wherein the fixed plate 12 is detachably connected to the bottom of the supporting block 11; the inclined surface A is arranged at the top of the supporting block 11;
the supporting block 11 is made of PVC material; the fixing plate 12 is made of a metal material which can be magnetically attracted;
specifically, the fixed platform 1 is fixed on the grinding machine through the electromagnetic chuck, that is, the fixed plate 12 is tightly sucked on the grinding machine by the electromagnetic chuck, and when the fixed plate 12 is worn, the fixed platform 1 can be ensured to normally work by replacing the new fixed plate 12 without integral replacement, so that the production cost can be saved;
the fixed plate 12 is provided with a handle, so that the fixed platform 1 can be conveniently transferred;
the fixing plate 12 is fixed with the supporting block 11 through bolt connection.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (9)

1. An edging and chamfering method of an ITO target is characterized by comprising the following steps of relating to a grinding machine and a fixed platform (1); an inclined plane (A) is arranged on the fixed platform (1), and the target (a) is placed on the inclined plane (A) during processing; the fixed platform (1) is provided with a clamping assembly (2) for clamping the side surface of the target material (a), the inclined surface (A) is provided with a guide groove (3) for guiding the flow of the cutting fluid (B), and the guide groove (3) extends from the higher end to the lower end of the inclined surface (A); the higher end of the flow guide groove (3) is an open end, and the lower end of the flow guide groove is a closed end; the method comprises the following steps:
fixing the fixed platform (1) on a grinding machine;
placing a target (a) on the inclined surface (A), and clamping the side surface of the target (a) through a clamping assembly (2) to fix the target (a) on a fixed platform (1); wherein, the target (a) covers the diversion trench (3);
starting a grinding machine and cutting fluid (B); a grinding wheel (C) of the grinding machine and the cutting fluid (B) synchronously move, and the grinding wheel (C) grinds the top edge of the higher side of the target material (a) to form a chamfer; before the target material (a) is ground, the grinding wheel (C) leaves at least 1 stroke along the grinding direction so as to enable the cutting fluid (B) to fill the diversion trench (3);
after the grinding wheel (C) finishes grinding the top edge of the higher side of the target material (a), closing the grinding machine and the cutting fluid (B);
and (4) taking down the target (a) and removing burrs.
2. The method for edging and chamfering the ITO target according to claim 1, wherein the number of the guide grooves (3) is plural, and the plural guide grooves (3) intersect to form a fish-scale-shaped structure.
3. The method for edging and chamfering an ITO target according to claim 1, wherein the connecting part of the side edge of the guide groove (3) along the guide direction and the inclined surface (A) is a chamfer structure (D).
4. The method for edging and chamfering an ITO target according to claim 1, wherein the grinding wheel (C) rotates at 1500 to 1800rpm and has a cutting feed of 0.015 to 0.03mm.
5. The method for edging and chamfering an ITO target according to claim 1, wherein the target (a) is removed by separating the clamping unit (2) from the target (a) and blowing air into the open end of the guide groove (3).
6. The method for edging and chamfering an ITO target according to claim 1, wherein the clamping assembly (2) comprises a first clamping plate (21) disposed on one side of the fixed platform (1), a second clamping plate (22) disposed on the inclined surface (A), and a third clamping plate (23); the top of the first clamping plate (21) is arranged higher than the inclined surface (A);
the first clamping plate (21) and the second clamping plate (22) are matched with and clamp two opposite sides of the target material (a); the lower side of the target (a) abuts against a third clamping plate (23).
7. The method for edging and chamfering an ITO target according to claim 6, wherein the second clamping plate (22) is disposed on the inclined surface (A) in a position-adjustable manner such that the distance between the first clamping plate (21) and the second clamping plate (22) is adjustable.
8. The method for edging and chamfering the ITO target according to claim 6, wherein a positioning block is arranged at the lower end of the fixed platform (1), a positioning surface (E) is arranged at one side of the positioning block, which is close to the higher end of the fixed platform (1), and the positioning surface (E) is perpendicular to the inclined surface (A);
the fixture is characterized by further comprising a plurality of standard blocks (4), when the third clamping plate (23) is installed, one side of each standard block (4) abuts against the positioning surface (E), and the third clamping plate (23) abuts against the other side of each standard block (4) to enable the side face, matched with the target (a), of the third clamping plate (23) to be parallel to the positioning surface (E).
9. The method for edging and chamfering an ITO target according to claim 1, wherein the fixed platform (1) comprises a supporting block (11) and a fixed plate (12), and the fixed plate (12) is detachably connected to the bottom of the supporting block (11); the inclined surface (A) is arranged at the top of the supporting block (11);
the supporting block (11) is made of PVC material; the fixing plate (12) is made of metal materials which can be magnetically attracted.
CN202210245389.0A 2022-03-13 2022-03-13 Edging and chamfering method for ITO target Active CN114888663B (en)

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CN114888663B true CN114888663B (en) 2023-03-17

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101007389A (en) * 2006-01-24 2007-08-01 鸿富锦精密工业（深圳）有限公司 Jig for rolling round glasses
CN201841451U (en) * 2010-10-19 2011-05-25 广西晶联光电材料有限责任公司 Edging and chamfering fixture for planar ceramic target
KR20160139690A (en) * 2015-05-28 2016-12-07 강명조 A chamfering machine
CN206185602U (en) * 2016-10-20 2017-05-24 中国人民解放军第五三一一工厂 Stock solution vacuum adsorption device
CN207858507U (en) * 2018-01-18 2018-09-14 洛阳晶联光电材料有限责任公司 A kind of fixture for grinding machine of plane ceramic target beveling
CN110052916A (en) * 2019-04-22 2019-07-26 中国工程物理研究院激光聚变研究中心 Heavy caliber wedge optical element ultraprecise combined shaping grinding attachment and processing method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101007389A (en) * 2006-01-24 2007-08-01 鸿富锦精密工业（深圳）有限公司 Jig for rolling round glasses
CN201841451U (en) * 2010-10-19 2011-05-25 广西晶联光电材料有限责任公司 Edging and chamfering fixture for planar ceramic target
KR20160139690A (en) * 2015-05-28 2016-12-07 강명조 A chamfering machine
CN206185602U (en) * 2016-10-20 2017-05-24 中国人民解放军第五三一一工厂 Stock solution vacuum adsorption device
CN207858507U (en) * 2018-01-18 2018-09-14 洛阳晶联光电材料有限责任公司 A kind of fixture for grinding machine of plane ceramic target beveling
CN110052916A (en) * 2019-04-22 2019-07-26 中国工程物理研究院激光聚变研究中心 Heavy caliber wedge optical element ultraprecise combined shaping grinding attachment and processing method

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