CN114884264A - Scroll vacuum pump with axial flux motor - Google Patents

Abstract

The invention relates to a scroll vacuum pump with an axial flux motor, wherein a vacuum air exhaust mechanism is arranged in a shell, the axial flux motor is arranged at the rear end of the shell, the vacuum air exhaust mechanism comprises a pump stator, a pump rotor, an eccentric rotating shaft, a corrugated pipe assembly and a flange bearing seat, the pump stator and the pump rotor are matched with each other, the front end of the corrugated pipe assembly is provided with a connecting cover connected with the pump rotor, the rear end of the corrugated pipe assembly is fixed in the shell, the flange bearing seat is fixedly arranged in the shell and inserted in the corrugated pipe assembly, the eccentric rotating shaft is rotatably arranged in the flange bearing seat, the front end of the eccentric rotating shaft is connected with the pump rotor, the rear end of the eccentric rotating shaft is connected with the axial flux motor rotor in the axial flux motor, the front end of the eccentric rotating shaft is provided with a first balancing weight, the first balancing weight is arranged in the connecting cover, and the edge of the axial flux motor rotor is provided with a second balancing weight. The invention adopts the axial flux motor to drive the eccentric rotating shaft to rotate, thereby greatly reducing the volume and the weight of the vortex vacuum pump and ensuring the stability of the vortex vacuum pump.

Description

Scroll vacuum pump with axial flux motor

Technical Field

The invention relates to the field of vacuum equipment, in particular to a scroll vacuum pump with an axial flux motor.

Background

The conventional scroll vacuum pump generally adopts a radial gap type motor structure to drive a main shaft of a pump body to rotate, and particularly, a stator and a rotor of a motor adopted by the conventional scroll vacuum pump are coaxially sleeved and arranged, and an interaction magnetic field is radial, namely, the same as the radial direction of the scroll vacuum pump. In addition, some scroll vacuum pumps are driven by standard motors, the standard motors and the main bodies of the scroll vacuum pumps are fixed in a transition mode through motor bases or shells, and the shafts are connected through couplers. However, as the application of the scroll vacuum pump is more and more extensive, the scroll pump is more and more used in the rough vacuum section, which requires the volume of the scroll vacuum pump to be smaller and smaller, and the radial gap type motor structure or the standard motor has a longer axial length, which greatly increases the volume of the scroll vacuum pump and is difficult to meet the use requirement.

Axial flux motor is different with ordinary motor structure, its magnetic flux direction is the axial, and its unique disk coil structure can reduce the volume and the weight of motor greatly, if can combine together axial flux motor and scroll vacuum pump, will make the scroll vacuum pump volume reduce undoubtedly, nevertheless the scroll vacuum pump forms basic air exhaust mechanism by the combination of pump rotor and pump stator's vortex dish cooperation structure, this just requires extremely high to the eccentric main shaft stability of driving pump rotor pivoted, if eccentric main shaft stability reduces, will influence the vortex dish cooperation between pump rotor and the pump stator, and then influence the efficiency of bleeding, lead to both locks even, thereby seriously influence the stability of scroll vacuum pump. Because no scroll vacuum pump adopting the axial flux motor exists at present, the problem that how to combine the axial flux motor with the scroll vacuum pump and not influence the stability of the scroll vacuum pump is needed to be considered is solved.

Disclosure of Invention

The invention aims to provide a scroll vacuum pump with an axial flux motor, which adopts the axial flux motor to drive an eccentric rotating shaft to rotate, greatly reduces the volume and weight of a scroll vacuum pump, and can ensure the stable rotation of the eccentric rotating shaft so as to ensure the stability of the scroll vacuum pump.

The purpose of the invention is realized by the following technical scheme:

a scroll vacuum pump with an axial flux motor comprises a shell, a vacuum air pumping mechanism and the axial flux motor, wherein the vacuum air pumping mechanism is arranged in the shell, the axial flux motor is arranged at the rear end of the shell, the vacuum air pumping mechanism comprises a pump stator, a pump rotor, an eccentric rotating shaft, a corrugated pipe assembly and a flange bearing seat, the pump stator and the pump rotor are matched with each other, the front end of the corrugated pipe assembly is provided with a connecting cover and is hermetically connected with the pump rotor, the rear end of the corrugated pipe assembly is hermetically fixed in the shell, the flange bearing seat is fixedly arranged in the shell and is inserted in the corrugated pipe assembly, the eccentric rotating shaft is rotatably arranged in the flange bearing seat, the front end of the eccentric rotating shaft is connected with the pump rotor, the rear end of the eccentric rotating shaft is connected with the axial flux motor rotor in the axial flux motor, the front end of the eccentric rotating shaft is provided with a first balancing weight, and the first balancing weight is arranged in the connecting cover, and a second balancing weight is arranged at the edge of the rotor of the axial flux motor.

The eccentric rotating shaft comprises an eccentric shaft end, a shaft disc, a rotating shaft main body and a motor connecting end, wherein the shaft disc is arranged at the front end of the rotating shaft main body, the eccentric shaft end is arranged on the front side of the shaft disc and connected with the pump rotor, the first balancing weight is arranged on the eccentric shaft end, and the motor connecting end is arranged at the rear end of the rotating shaft main body and connected with the axial flux motor rotor.

Be equipped with bearing and distance cover subassembly in the flange bearing frame, wherein the pivot main part front end and the rear end of eccentric pivot are respectively through the bearing support of corresponding end, and pivot main part outside cover is equipped with distance cover subassembly, just distance cover subassembly is located between two bearings, axial flux motor rotor middle part is equipped with the rotor shaft sleeve, just the rotor shaft sleeve suit in on the motor connecting end of eccentric pivot rear end, bearing in the flange bearing frame front end with the reel of eccentric pivot offsets, bearing in the flange bearing frame rear end with be equipped with the bearing clamping ring between the rotor shaft sleeve, and the bearing clamping ring is fixed in on the flange bearing frame the rotor shaft sleeve is kept away from flange bearing frame one side and is equipped with lock nut, just lock nut suit in on the motor connecting end.

The distance sleeve assembly comprises an inner layer distance sleeve and an outer layer distance sleeve, two ends of the inner layer distance sleeve and two ends of the outer layer distance sleeve are respectively abutted to bearings on corresponding sides, and the bearings are angular contact ball bearings.

The axial flux motor rotor comprises a rotor core, the rotor shaft is sleeved in a through hole in the middle of the rotor core, and the second balancing weight is fixed on the edge of the rotor core.

The eccentric shaft end is sleeved with a rotor bearing, the rotor bearing is fixedly connected with the pump rotor, and the first balancing weight is arc-shaped and is arranged on the rotor bearing.

The corrugated pipe assembly is characterized in that a partition plate is arranged in the shell, a first groove is formed in the middle of the partition plate, a through hole for the flange bearing seat to penetrate through is formed in the middle of the bottom of the first groove, a connecting disc is arranged at the rear end of the corrugated pipe assembly, a flange is arranged at the rear end of the flange bearing seat and fixedly arranged in the first groove of the partition plate, and the connecting disc is fixed on the partition plate and covers the first groove and the flange.

The corrugated pipe assembly comprises a first corrugated pipe section, a middle section and a second corrugated pipe section, wherein one end of the first corrugated pipe section is connected with the middle section, the other end of the first corrugated pipe section is provided with the connecting cover, one end of the second corrugated pipe section is connected with the middle section, and the other end of the second corrugated pipe section is connected with the connecting disc.

The rear end of the shell is provided with a heat dissipation shell, and the axial flux motor is arranged in the heat dissipation shell.

The casing front end is equipped with fan assembly, the casing downside is equipped with the mainboard base.

The invention has the advantages and positive effects that:

1. the invention adopts the axial flux motor to drive the eccentric rotating shaft to rotate so as to drive the pump rotor to move, and the volume and the weight of the axial flux motor are smaller, so that the volume and the weight of the vortex vacuum pump are greatly reduced.

2. The front end and the rear end of the rotating shaft main body of the eccentric rotating shaft are supported by the bearings, so that the supporting stability is ensured, the first balancing weight is arranged at the eccentric shaft end at the front end of the eccentric rotating shaft, the second balancing weight is arranged on the axial flux motor rotor, so that the rotation stability of the eccentric rotating shaft is ensured, and the second balancing weight is arranged at the edge of the axial flux motor rotor.

3. The axial flux motor rotor is fixedly connected with the motor connecting end through the locking nut, so that the axial flux motor rotor is convenient to mount and dismount while the integral structure is compact, and later maintenance is facilitated.

4. The axial flux motor is arranged in the heat dissipation shell at the rear end of the shell, so that the vacuum pump has the advantages of reducing the volume of the vacuum pump and noise, along with high power density and excellent heat dissipation performance.

Drawings

Figure 1 is a schematic structural view of the present invention,

figure 2 is an exploded view of the invention of figure 1,

figure 3 is a schematic view of the axial-flux electric machine rotor of figure 1,

figure 4 is a view a-a of figure 3,

figure 5 is a schematic view of the axial-flux electric machine stator structure of figure 1,

fig. 6 is a schematic diagram of the working process of the present invention.

Wherein, 1 is a vacuum pumping mechanism, 101 is a pump stator, 1011 is a stator scroll plate, 102 is a pump rotor, 1021 is a rotor scroll plate, 1022 is a connecting plate, 103 is an eccentric rotating shaft, 1031 is an eccentric shaft end, 1032 is a motor connecting end, 1033 is a shaft disc, 104 is a bellows assembly, 1041 is a connecting cover, 1042 is a connecting disc, 1043 is an intermediate section, 104 is a bellows assembly, 105 is a distance sleeve assembly, 1051 is an inner layer distance sleeve, 1052 is an outer layer distance sleeve, 106 is a bearing, 107 is a first balancing weight, 108 is a rotor bearing, 109 is a flange bearing seat, 110 is a bearing pressing ring, 2 is a shell, 201 is a clapboard, 202 is a shell inner cavity, 3 is an axial flux motor, 301 is an axial flux motor rotor, 3011 is a rotor shaft sleeve, 3012 is a rotor core, 3013 is a second balancing weight, 3014 is a screw, 302 is an axial flux motor stator, 3021 is a coil, 3022 is a stator core, 3023 is a lead wire, 303 is a heat dissipation housing, 304 is a lock nut, 4 is a motherboard base, and 5 is a fan assembly.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

As shown in fig. 1 to 6, the present invention includes a housing 2, a vacuum pumping mechanism 1 and an axial flux motor 3, wherein the vacuum pumping mechanism 1 is disposed in the housing 2, the axial flux motor 3 is disposed at the rear end of the housing 2, the vacuum pumping mechanism 1 includes a pump stator 101, a pump rotor 102, an eccentric rotating shaft 103, a bellows assembly 104 and a flange bearing seat 109, wherein the pump stator 101 and the pump rotor 102 are matched with each other, the front end of the bellows assembly 104 is provided with a connecting cover 1041 to be hermetically connected with the pump rotor 102, the rear end is hermetically fixed in the housing 2, the flange bearing seat 109 is fixedly disposed in the housing 2 and inserted into the bellows assembly 104, the eccentric rotating shaft 103 is rotatably mounted in the flange bearing seat 109, the front end of the eccentric rotating shaft 103 is connected with the pump rotor 102, the rear end is connected with the axial flux motor rotor 301 in the axial flux motor 3, the front end of the eccentric rotating shaft 103 is provided with a first balancing weight 107, and the first balancing weight 107 is arranged in the connecting cover 1041, and a second balancing weight 3013 is arranged at the edge of the axial flux motor rotor 301. The axial flux motor 3 is adopted to drive the eccentric rotating shaft 103 to rotate so as to drive the pump rotor 102 to move, the volume and the weight of the vortex vacuum pump are greatly reduced due to the fact that the volume and the weight of the axial flux motor 3 are smaller, in addition, the first balancing weight 107 and the second balancing weight 3013 are used for guaranteeing the stable rotation of the eccentric rotating shaft 103, and further the stable operation of the vortex vacuum pump is guaranteed, wherein the second balancing weight 3013 is arranged on the edge of the axial flux motor rotor 301, the balancing weight moment can be increased, and the stable operation is guaranteed.

As shown in fig. 1-2, the eccentric rotating shaft 103 includes an eccentric shaft end 1031, a shaft disk 1033, a rotating shaft main body and a motor connecting end 1032, wherein the shaft disk 1033 is disposed at the front end of the rotating shaft main body, the eccentric shaft end 1031 is disposed at the front side of the shaft disk 1033 and connected to the pump rotor 102, a rotor bearing 108 is sleeved on the eccentric shaft end 1031, and the rotor bearing 108 is fixedly connected to the pump rotor 102, as shown in fig. 2, the first weight block 107 is arc-shaped and mounted on the rotor bearing 108, the rotor bearing 108 and the first weight block 107 are both disposed in the connecting cover 1041, and the motor connecting end 1032 is disposed at the rear end of the rotating shaft main body and connected to the axial flux motor rotor 301.

As shown in fig. 1-2, a bearing 106 and a distance sleeve assembly 105 are arranged in the flange bearing seat 109, wherein the front end and the rear end of a rotating shaft main body of the eccentric rotating shaft 103 are respectively supported by the bearings 106 at the corresponding ends, the distance sleeve assembly 105 is sleeved outside the rotating shaft main body, the distance sleeve assembly 105 is arranged between the two bearings 106, a rotor shaft sleeve 3011 is arranged in the middle of the axial flux motor rotor 301, the rotor shaft sleeve 3011 is sleeved on a motor connecting end 1032 at the rear end of the eccentric rotating shaft 103, the bearing 106 in the front end of the flange bearing seat 109 is abutted against a shaft disc 1033 of the eccentric rotating shaft 103, a bearing press ring 110 is arranged between the bearing 106 in the rear end of the flange bearing seat 109 and the rotor shaft sleeve 3011, the bearing press ring 110 is fixed on the flange bearing seat 109 by screws to realize axial position limitation of the bearing 106, a lock nut 304 is arranged on one side of the rotor shaft sleeve 3011 away from the flange bearing seat 109, and the locking nut 304 is sleeved on the motor connecting end 1032, and the axial flux motor rotor 301 and the motor connecting end 1032 are fixed after the locking nut 304 is screwed down, so that the axial flux motor 3 is fixedly connected with the vacuum pumping mechanism 1. The front end and the rear end of the rotating shaft main body of the eccentric rotating shaft 103 are supported by the bearing 106, two-point support ensures stable support, and further ensures stable rotation of the eccentric rotating shaft 103, the bearing pressing ring 110 is used for pressing and fixing the structures of the bearing 106, the distance sleeve assembly 105 and the like, the axial flux motor rotor 301 is fixedly connected with the motor connecting end 1032 through the locking nut 304, the integral structure is ensured to be compact, meanwhile, the installation and the disassembly are convenient, and the later maintenance is facilitated.

In the present embodiment, as shown in fig. 2, the distance sleeve assembly 105 includes an inner distance sleeve 1051 and an outer distance sleeve 1052, and both ends of the inner distance sleeve 1051 and both ends of the outer distance sleeve 1052 respectively abut against the bearings 106 on the corresponding sides to ensure the distance between the bearings 106. In the present embodiment, the bearing 106 is an angular ball bearing.

As shown in fig. 1, a partition plate 201 is disposed in the casing 2, a first groove is disposed in the middle of the partition plate 201, a through hole through which the flange bearing seat 109 passes is disposed in the middle of the bottom of the first groove, a connection plate 1042 is disposed at the rear end of the bellows assembly 104, a flange is disposed at the rear end of the flange bearing seat 109, the flange is fixedly mounted in the first groove of the partition plate 201, and the connection plate 1042 is fixed on the partition plate 201 and covers the first groove and the flange, so that the flange bearing seat 109 is completely disposed in the bellows assembly 104.

As shown in fig. 2, the bellows assembly 104 includes a first bellows section, a middle section 1043, and a second bellows section, wherein one end of the first bellows section is connected to the middle section 1043, the other end of the first bellows section is provided with the connection cap 1041, one end of the second bellows section is connected to the middle section 1043, and the other end of the second bellows section is connected to the connection plate 1042. When the invention works, the eccentric rotating shaft 103 drives the pump rotor 102 to rotate through the axial flux motor 3, and the bellows assembly 104 swings with the follow-up. The bellows assembly 104 completely isolates the outer casing inner cavity 202 from the first balancing weight 107, the rotor bearing 108, the eccentric rotating shaft 103, the flange bearing seat 109 and the like, so that air is prevented from entering the outer casing inner cavity 202 of the bellows assembly 104 through the mounting positions of the bearing 106 and the like, and the operation stability and the ultimate vacuum degree of the scroll vacuum pump are improved.

As shown in fig. 3 to 4, the axial flux motor rotor 301 includes a rotor core 3012, the rotor shaft sleeve 3011 is disposed in a through hole in the middle of the rotor core 3012, and the second weight 3013 is fixed to the edge of the rotor core 3012 through a screw 3014. The rotor core 3012 is a permanent magnet. As shown in fig. 5, axial-flux motor stator 302 includes a coil 3021 and a stator core 3022, and coil 3021 is provided outside stator core 3022, and lead wire 3023 is provided on the coil 3021 side.

As shown in fig. 1 to 2, a heat dissipation housing 303 is disposed at a rear end of the housing 2, and the axial flux motor rotor 301 and the axial flux motor stator 302 are both disposed in the heat dissipation housing 303. Radiating rib plates are uniformly distributed on the radiating shell 303 to realize a radiating function, and the appearance of the radiating shell 303 is matched with the shell 2 to form a whole, so that the attractive appearance of a product is ensured.

As shown in fig. 1 to 2 and 6, the pump stator 101 is provided with a stator scroll plate 1011, the pump rotor 102 is provided with a rotor scroll plate 1021, and the stator scroll plate 1011 and the rotor scroll plate 1021 are molded line conjugate fitted. As shown in fig. 6, the pump rotor 102 is driven by the eccentric rotation shaft 103 to move, and during the rotation process, the compression chamber formed between the stator scroll plate 1011 and the rotor scroll plate 1021 changes along with the movement of the pump rotor, so as to realize the vacuum pumping function. The structure and operation principle of the pump stator 101 and the pump rotor 102 are well known in the art.

As shown in fig. 2, the pump rotor 102 is provided with a connecting plate 1022, and the rotor scroll plate 1021 is provided on the connecting plate 1022, as shown in fig. 1, the connecting cover 1041 at the front end of the bellows assembly 104 is fixedly mounted on the connecting plate 1022, and in addition, a second groove is provided in the middle of the connecting plate 1022, and the rotor bearing 108 is embedded in the second groove.

As shown in fig. 1-2, 2 front ends of the shells are provided with a fan assembly 5, the fan assembly 5 can take away heat generated by the stator scroll plate 1011 after being started, reduce the surface temperature of the stator scroll plate, further control the deformation of the stator scroll plate, and improve the stability of the vacuum pumping mechanism 1, in addition, the lower side of the shell 2 is provided with a main board base 4, and a control main board module of the whole device can be integrated in the main board base 4. The fan assembly 5 and the control board module are all well known in the art.

The working principle of the invention is as follows:

as shown in fig. 6, the stator scroll plate 1011 on the pump stator 101 and the rotor scroll plate 1021 on the pump rotor 102 are molded line conjugate fit, when the present invention works, the pump rotor 102 is driven by the eccentric rotating shaft 103 to move, and during the rotation process, the compression chamber formed between the stator scroll plate 1011 and the rotor scroll plate 1021 changes accordingly to realize the vacuum pumping function, which is a technique known in the art.

As shown in figures 1-2, the invention adopts the axial flux motor 3 to drive the eccentric rotating shaft 103 to rotate, and then drives the pump rotor 102 to move, because the volume and the weight of the axial flux motor 3 are smaller, the volume and the weight of the vortex vacuum pump are greatly reduced, in addition, because the structure of the axial flux motor 3 is greatly different from the structure of the existing radial motor and the standard motor, the invention needs to redesign the supporting structure of the eccentric rotating shaft 103 to ensure the stability of the vortex vacuum pump, wherein the front end and the rear end of the rotating shaft main body of the eccentric rotating shaft 103 are supported by the bearing 106 to ensure the stable support, and the invention realizes the fixed connection of the fixed bearing 106, the fixed distance sleeve assembly 105 and the like by the bearing press ring 110, and realizes the fixed connection of the axial flux motor rotor 301 and the motor connecting end 1032 by the lock nut 304, thereby ensuring the compact integral structure, being convenient for installation and disassembly, and being beneficial to the later maintenance, while the eccentric shaft end 1031 at the front end of the eccentric rotating shaft 103 is provided with the first balancing weight 107, the axial flux motor rotor 301 is provided with the second balancing weight 3013, the first balancing weight 107 and the second balancing weight 3013 ensure the stable rotation of the eccentric rotating shaft 103, generally, the balancing weights are arranged on the eccentric rotating shaft 103 in the prior art structure, on one hand, the eccentric rotating shaft 103 is easy to be supported insufficiently and stably due to the limitation of the volume of a pump body and other factors, on the other hand, the shaft diameter of the eccentric rotating shaft 103 is limited, and a relatively heavy balancing weight needs to be configured to ensure the rotating balancing moment, but the invention combines the scroll vacuum pump with the axial flux motor 3, wherein the second balancing weight 3013 is arranged at the edge of the axial flux motor rotor 301, and because the radius of the axial flux motor rotor 301 is far larger than the shaft diameter of the eccentric rotating shaft 103, the balancing moment can be effectively increased, and the rotating stability of the eccentric rotating shaft 103 can be ensured, and simultaneously has larger starting torque.

Claims (10)

1. A scroll vacuum pump having an axial flux motor, comprising: the vacuum pump comprises a shell (2), a vacuum pumping mechanism (1) and an axial flux motor (3), wherein the vacuum pumping mechanism (1) is arranged in the shell (2), the axial flux motor (3) is arranged at the rear end of the shell (2), the vacuum pumping mechanism (1) comprises a pump stator (101), a pump rotor (102), an eccentric rotating shaft (103), a corrugated pipe assembly (104) and a flange bearing seat (109), the pump stator (101) and the pump rotor (102) are matched with each other, a connecting cover (1041) is arranged at the front end of the corrugated pipe assembly (104) and is hermetically connected with the pump rotor (102), the rear end of the corrugated pipe assembly is hermetically fixed in the shell (2), the flange bearing seat (109) is fixedly arranged in the shell (2) and is inserted in the corrugated pipe assembly (104), the eccentric rotating shaft (103) is rotatably arranged in the flange bearing seat (109), and the front end of the eccentric rotating shaft (103) is connected with the pump rotor (102), The rear end links to each other with axial flux motor rotor (301) among axial flux motor (3), eccentric pivot (103) front end is equipped with first balancing weight (107), just first balancing weight (107) are located connect in the cover (1041), axial flux motor rotor (301) edge is equipped with second balancing weight (3013).

2. A scroll vacuum pump with an axial flux motor as claimed in claim 1, wherein: eccentric pivot (103) are including eccentric axle head (1031), reel (1033), pivot main part and motor connection end (1032), and wherein pivot main part front end is equipped with reel (1033), reel (1033) front side be equipped with eccentric axle head (1031) with pump rotor (102) link to each other be equipped with on eccentric axle head (1031) first balancing weight (107), pivot main part rear end be equipped with motor connection end (1032) with axial flux motor rotor (301) link to each other.

3. A scroll vacuum pump with an axial flux motor as claimed in claim 2, wherein: the motor rotor is characterized in that a bearing (106) and a distance sleeve assembly (105) are arranged in the flange bearing seat (109), wherein the front end and the rear end of a rotating shaft main body of an eccentric rotating shaft (103) are respectively supported by the bearings (106) of corresponding ends, the distance sleeve assembly (105) is sleeved on the outer side of the rotating shaft main body, the distance sleeve assembly (105) is arranged between the two bearings (106), a rotor shaft sleeve (3011) is arranged in the middle of an axial flux motor rotor (301), the rotor shaft sleeve (3011) is sleeved on a motor connecting end (1032) of the rear end of the eccentric rotating shaft (103), the bearing (106) in the front end of the flange bearing seat (109) is abutted against a shaft disc (1033) of the eccentric rotating shaft (103), a bearing pressing ring (110) is arranged between the bearing (106) in the rear end of the flange bearing seat (109) and the rotor shaft sleeve (3011), and the bearing pressing ring (110) is fixed on the flange bearing seat (109), and a locking nut (304) is arranged on one side, away from the flange bearing seat (109), of the rotor shaft sleeve (3011), and the locking nut (304) is sleeved on the motor connecting end (1032).

4. A scroll vacuum pump with an axial flux motor as claimed in claim 3, wherein: the distance sleeve assembly (105) comprises an inner layer distance sleeve (1051) and an outer layer distance sleeve (1052), two ends of the inner layer distance sleeve (1051) and two ends of the outer layer distance sleeve (1052) are respectively abutted to bearings (106) on the corresponding side, and the bearings (106) are angular contact ball bearings.

5. A scroll vacuum pump with an axial flux motor as claimed in claim 3, wherein: axial flux motor rotor (301) includes rotor core (3012), rotor shaft sleeve (3011) are located in the through-hole at rotor core (3012) middle part, and second balancing weight (3013) are fixed in rotor core (3012) edge.

6. A scroll vacuum pump with an axial flux motor as claimed in claim 2, wherein: the eccentric shaft end (1031) is sleeved with a rotor bearing (108), the rotor bearing (108) is fixedly connected with the pump rotor (102), and the first balancing weight (107) is arc-shaped and is arranged on the rotor bearing (108).

7. A scroll vacuum pump with an axial flux motor as claimed in claim 1, wherein: the improved corrugated pipe assembly is characterized in that a partition plate (201) is arranged in the shell (2), a first groove is formed in the middle of the partition plate (201), a through hole for the flange bearing seat (109) to penetrate is formed in the middle of the bottom of the first groove, a connecting disc (1042) is arranged at the rear end of the corrugated pipe assembly (104), a flange is arranged at the rear end of the flange bearing seat (109), the flange is fixedly arranged in the first groove of the partition plate (201), and the connecting disc (1042) is fixed on the partition plate (201) and covers the first groove and the flange.

8. A scroll vacuum pump with an axial flux motor as claimed in claim 7, wherein: the bellows assembly (104) comprises a first bellows section, an intermediate section (1043) and a second bellows section, wherein one end of the first bellows section is connected with the intermediate section (1043), the other end of the first bellows section is provided with the connecting cover (1041), one end of the second bellows section is connected with the intermediate section (1043), and the other end of the second bellows section is connected with the connecting disc (1042).

9. A scroll vacuum pump with an axial flux motor as claimed in claim 1, wherein: the rear end of the shell (2) is provided with a heat dissipation shell (303), and the axial flux motor (3) is arranged in the heat dissipation shell (303).

10. A scroll vacuum pump with an axial flux motor as claimed in claim 1, wherein: the front end of the shell (2) is provided with a fan assembly (5), and the lower side of the shell (2) is provided with a main board base (4).

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