CN114879547A - Parameter monitoring system and parameter monitoring method for gas supply unit of laser device - Google Patents

Parameter monitoring system and parameter monitoring method for gas supply unit of laser device Download PDF

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Publication number
CN114879547A
CN114879547A CN202210216873.0A CN202210216873A CN114879547A CN 114879547 A CN114879547 A CN 114879547A CN 202210216873 A CN202210216873 A CN 202210216873A CN 114879547 A CN114879547 A CN 114879547A
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module
parameter
serial port
single chip
chip microcomputer
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马世伟
汤明志
陈光化
贾玮哲
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/04Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0428Safety, monitoring
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/20Pc systems
    • G05B2219/24Pc safety
    • G05B2219/24024Safety, surveillance
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Testing And Monitoring For Control Systems (AREA)

Abstract

The invention aims to provide a parameter monitoring system and a parameter monitoring method for a gas supply unit of a laser device. The system comprises a lower computer and an upper computer, wherein the lower computer is composed of a singlechip module connected with a temperature and humidity sensor, a pressure sensor, a flow sensor, a cleanliness sensor, a mobile terminal display module and an electromagnetic valve control module, and the singlechip is connected with the upper computer through a serial communication line; the upper computer adopts a LabVIEW platform and is provided with a data display module and a control panel module, the data display module is connected with the lower computer configuration, parameter setting, task display, parameter abnormity alarm and parameter historical curve, and the control panel module is connected with the lower computer to send a control command. The method comprises four steps of serial port communication configuration of a lower computer and an upper computer, monitoring parameter setting, air supply unit working module selection and data processing and display. The invention can monitor the parameters of the air supply unit of the large-scale multifunctional laser device on line, and ensure the safe operation and maintenance of the device.

Description

Parameter monitoring system and parameter monitoring method for gas supply unit of laser device
Technical Field
The invention relates to a parameter monitoring system for a gas supply unit of a laser device and a using method thereof.
Background
The large multifunctional laser device for inertial confinement fusion is a large scientific engineering with large scale, complex system, high intensity and high cost, and a xenon lamp pumped neodymium glass sheet amplifier system is used for high-power driving of laser beam emission at home and abroad at present. The gas supply unit comprises a gas transmission system and a control system, clean cooling air, nitrogen-oxygen mixed gas, compressed air and the like can be conveyed to each subsystem in the laser device, and the amplifier lamp box and the wafer box are cooled by adopting a circulating gas purging mode. The mode of synchronously blowing the xenon lamp and the neodymium glass sheet in a homologous mode greatly reduces the air tightness requirement between the lamp box and the sheet box of the sheet amplifier, can reduce the use of organic sealing materials in the sheet amplifier, and reduces the generation of pollutants in the sheet amplifier, thereby prolonging the maintenance period of the xenon lamp and the neodymium glass and ensuring the maintenance of the gain capability of the sheet amplifier. The circulating gas purging mode of the sheet amplifier system is characterized in that gas flow purging is remotely controlled, is injected from the top of the amplifier, blows from top to bottom, is discharged from the bottom of the amplifier, enters an exhaust pipeline through a gas collection pipeline at the bottom, and is reused after circulating treatment. The gas recycling mode can reduce the consumption of the purging gas, reduce the operation cost and greatly improve the personal safety of operation and maintenance personnel during the gas purging.
The gas supply unit consists of gas supply and exhaust pipelines, valves, a gas parameter sensor and a control module. The sensor system comprises pressure, flow, temperature and humidity and cleanliness sensors and various sensing signal detection and data acquisition processing and transmission systems, and the control module is respectively connected with the sensors and the electromagnetic valves. Meanwhile, the air supply unit can also provide regular gas replacement, vacuum air recovery, pump air supply and flushing, air knife blowing and the like for related equipment units by using clean nitrogen-oxygen mixed gas and compressed air. Therefore, in order to guarantee various gas use requirements of the large-scale multifunctional laser system in the installation integration, operation and maintenance stages, the flow, pressure, temperature, humidity and cleanliness of gas need to be monitored, the on-line monitoring of the running state, the verification state and the like of the supporting equipment is needed, and the safe operation of the system is guaranteed.
Disclosure of Invention
The invention aims to provide a parameter monitoring system and a parameter monitoring method for a gas supply unit of a laser device, which can monitor parameters of the gas supply unit of a large multifunctional laser device on line and ensure the safe operation and maintenance of the device.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a parameter monitoring system for a gas supply unit of a laser device, which comprises a lower computer and an upper computer, wherein the lower computer is formed by connecting a temperature and humidity sensor, a pressure sensor, a flow sensor, a cleanliness sensor, a mobile terminal display module and an electromagnetic valve control module with a singlechip module; the upper computer adopts a LabVIEW platform and is provided with a data display module and a control panel module; the data display module is connected with the lower computer for configuration, parameter setting, task display, parameter abnormity alarm and parameter historical curve, and the control panel module is connected with the lower computer for sending control commands.
As a further improvement of the invention, the temperature and humidity sensor, the pressure sensor, the flow sensor and the cleanliness sensor all support an Ethernet or RS485 serial port communication mode; the single chip microcomputer module adopts an SP3485 chip as an RS485 transceiver, and a pin 1 and a pin 4 of the single chip microcomputer module are respectively connected to a PA2 port and a PA3 port of the single chip microcomputer; the single chip microcomputer module adopts a LAN8720A as an Ethernet module, and an RJ45 interface with a network transformer is additionally arranged to form a self-adaptive network card; the single chip microcomputer module adopts an ATK-ESP8266 as a wireless module to be connected with a mobile terminal, a pin 7 and a pin 8 of the single chip microcomputer module are respectively connected to ports PB10 and PB11 of the single chip microcomputer, and a pin 1 and a pin 16 of the single chip microcomputer module are respectively connected to a ground GND terminal and a 3.3V power supply terminal of the single chip microcomputer.
In order to achieve the above object, the present invention further provides a gas parameter monitoring method for a laser driving apparatus, which is operated by the above system of the present invention, and comprises the following steps:
step 1, a lower computer and an upper computer are in serial port communication configuration;
step 2, monitoring parameter setting;
step 3, selecting a working module of the gas supply unit;
and 4, processing and displaying data.
As a further improvement of the invention, the specific content of the step 1 is as follows:
step 1.1 the serial port configuration flow is as follows:
step 1.1.1, the upper computer calls a VISA serial port configuration function in LabVIEW to initialize, and the configuration and selection of serial port numbers are required to be consistent with those of a single chip microcomputer;
step 1.1.2, if the serial port is successfully opened, lighting a serial port LED lamp and setting an 'opening serial port' button, delaying for 1 millisecond until an upper computer is stably connected with the single chip microcomputer;
step 1.1.3, if the serial port cannot be used normally, popping up a message of 'serial port opening failure' to prompt and setting a 'serial port opening' button, and continuing to be in a waiting state;
and step 1.1.4, calling a VISA Close function when the serial port is closed, closing the selected serial port number and extinguishing the serial port LED.
As a further improvement of the invention, the specific content of the step 2 is as follows:
step 2.1, setting two parameter values for each parameter according to temperature, humidity, pressure, flow and cleanliness parameters in the parameters, wherein the two parameter values are respectively a parameter upper limit and a parameter lower limit;
and 2.2, when the measured data exceeds the upper limit or is lower than the lower limit, an LED lamp on the single chip microcomputer can be lightened, and meanwhile, an alarm display is carried out on an upper computer data display module interface.
As a further improvement of the present invention, the specific content of step 3 is as follows:
3.1, selecting a module needing to work by an upper computer, sending a control command to the lower computer, controlling a secondary relay by a single-chip relay output module, controlling the on-off of a solenoid valve by the secondary relay, controlling the on-off of a gas pipeline, working according to a working mode corresponding to each working module, indicating a task state by a yellow indicator light, lighting up when the task is not finished at present, and turning off after the task is finished;
and 3.2, displaying the execution condition of each gas using task by the upper computer control panel module, wherein when the yellow lamp is on, the task is not completed in the day, and the progress indication bar indicates the completion progress in the day.
As a further improvement of the present invention, the specific content of step 4 is as follows:
step 4.1, transmitting the field gas use parameters acquired by the sensor to a switch in an Ethernet mode, summarizing data to a lower singlechip by the switch, uploading the data to an upper computer by the singlechip, connecting the singlechip with a mobile terminal through an ATK-ESP8266 wireless module, and displaying the acquired data at the mobile terminal;
and 4.2, a sensor interface is arranged in a data display module of the upper computer, the interface is displayed in a column mode according to different working modules, real-time readings of all sensors can be displayed, the differential pressure readings, the flow velocity readings, the temperature and humidity readings and the cleanliness readings are sequentially displayed from top to bottom, and a recent numerical curve can be displayed.
Compared with the prior art, the invention has the following obvious prominent substantive characteristics and remarkable advantages:
1. the method detects a plurality of parameters of the gas, including temperature, humidity, pressure, flow and cleanliness; the data collected by the sensors are transmitted and gathered, and the requirement of monitoring a plurality of environmental data of the equipment in real time is met;
2. the LabVIEW interface and the mobile terminal display interface of the upper computer have alarm display functions, so that the system safety is improved; the daily work tasks and the working state of each module are displayed in detail, and the system has a good man-machine interaction function.
Drawings
FIG. 1 shows the overall architecture of the system of the present invention.
FIG. 2 is a schematic diagram of the single-chip microcomputer of the invention.
Fig. 3 is a master control flow chart of the single chip microcomputer.
FIG. 4 is an overall display interface of the upper computer according to the present invention.
FIG. 5 is a specific display interface of the parameter history curve of the upper computer according to the present invention.
FIG. 6 is a mobile terminal display interface according to the present invention.
Detailed Description
The invention will be further described with respect to preferred embodiments in conjunction with the following drawings:
the first embodiment is as follows:
in this embodiment, as shown in fig. 1 and 2, a parameter monitoring system for a gas supply unit of a laser device includes a lower computer and an upper computer, wherein the lower computer is composed of a single chip microcomputer module connected with a temperature and humidity sensor, a pressure sensor, a flow sensor, a cleanliness sensor, a mobile terminal display module and an electromagnetic valve control module, and the single chip microcomputer module is connected with the upper computer through a serial communication line; the upper computer adopts a LabVIEW platform and is provided with a data display module and a control panel module; the data display module is connected with the lower computer for configuration, parameter setting, task display, parameter abnormity alarm and parameter historical curve, and the control panel module is connected with the lower computer for sending control commands.
The parameter monitoring system for the gas supply unit of the laser device can monitor the parameters of the gas supply unit of the large multifunctional laser device on line, and ensures the safe operation and maintenance of the device.
Example two:
this embodiment is substantially the same as the first embodiment, and is characterized in that:
in this embodiment, the temperature and humidity sensor, the pressure sensor, the flow sensor and the cleanliness sensor all support an ethernet or RS485 serial port communication mode, the single chip module adopts an SP3485 chip as an RS485 transceiver, and the pin 1 and the pin 4 are respectively connected to a PA2 port and a PA3 port of the single chip; the single chip microcomputer module adopts a LAN8720A as an Ethernet module, and an RJ45 interface with a network transformer is additionally arranged to form a self-adaptive network card; the single chip microcomputer module adopts an ATK-ESP8266 as a wireless module to be connected with a mobile terminal, a pin 7 and a pin 8 of the single chip microcomputer module are respectively connected to ports PB10 and PB11 of the single chip microcomputer, and a pin 1 and a pin 16 of the single chip microcomputer module are respectively connected to a ground GND terminal and a 3.3V power supply terminal of the single chip microcomputer.
In the embodiment, a plurality of parameters of the gas are detected, including temperature, humidity, pressure, flow and cleanliness; the data collected by the sensors are transmitted and collected, and the requirement for monitoring a plurality of environmental data of the equipment in real time is met. The parameter of the air supply unit of the large-scale multifunctional laser device can be monitored on line, and the safe operation and maintenance of the device are guaranteed.
EXAMPLE III
As shown in fig. 3 to 6, a gas parameter monitoring method for a laser driving apparatus, which employs the system of the above embodiment, includes the following steps:
step 1, a lower computer and an upper computer are in serial port communication configuration;
step 1.1 the serial port configuration flow is as follows:
step 1.1.1, the upper computer calls a VISA serial port configuration function in LabVIEW to initialize, and the configuration and selection of serial port numbers are required to be consistent with those of a single chip microcomputer;
step 1.1.2, if the serial port is successfully opened, lighting a serial port LED lamp and setting an 'opening serial port' button, delaying for 1 millisecond until an upper computer is stably connected with the single chip microcomputer;
step 1.1.3, if the serial port cannot be used normally, popping up a message of 'serial port opening failure' to prompt and setting a 'serial port opening' button, and continuing to be in a waiting state;
and step 1.1.4, calling a VISA Close function when the serial port is closed, closing the selected serial port number and extinguishing the serial port LED.
Step 2, setting monitoring parameters:
step 2.1, setting two parameter values for each parameter according to temperature, humidity, pressure, flow and cleanliness parameters in the parameters, wherein the two parameter values are respectively a parameter upper limit and a parameter lower limit;
and 2.2, when the measured data exceeds the upper limit or is lower than the lower limit, an LED lamp on the single chip microcomputer can be lightened, and meanwhile, an alarm display is carried out on an upper computer data display module interface.
And 3, selecting a working module of the air supply unit:
3.1, selecting a module needing to work by an upper computer, sending a control command to the lower computer, controlling a secondary relay by a single-chip relay output module, controlling the on-off of a solenoid valve by the secondary relay, controlling the on-off of a gas pipeline, working according to a working mode corresponding to each working module, indicating a task state by a yellow indicator light, lighting up when the task is not finished at present, and turning off after the task is finished;
and 3.2, displaying the execution condition of each gas using task by the upper computer control panel module, wherein when the yellow lamp is on, the task is not completed in the day, and the progress indication bar indicates the completion progress in the day.
Step 4, monitoring parameter data processing and displaying;
step 4.1, transmitting the field gas utilization parameters acquired by the sensor to a switch in an Ethernet mode, summarizing data to a lower singlechip by the switch, uploading the data to an upper computer by the singlechip, connecting the singlechip with a mobile terminal through an ATK-ESP8266 wireless module, and displaying the acquired data at the mobile terminal;
and 4.2, a sensor interface is arranged in a data display module of the upper computer, the interface is displayed in a column mode according to different working modules, real-time readings of all sensors can be displayed, the differential pressure readings, the flow velocity readings, the temperature and humidity readings and the cleanliness readings are sequentially displayed from top to bottom, and a recent numerical curve can be displayed.
The system of the embodiment is divided into an upper computer and a lower computer. The lower computer mainly realizes the collection of gas parameters and the control of the electromagnetic valve: the measurement system takes an STM32F407ZG chip as a core controller, and all sensors support an Ethernet or RS485 serial port communication mode. The upper computer adopts a graphical programming language LabVIEW to compile programs, mainly completes the receiving and processing of gas parameter data, and has the functions of parameter setting, parameter abnormity alarming, working module selection, sensor parameter real-time display and the like.
In the system of the embodiment, the upper computer software is developed by a LabVIEW platform, and after a user opens a serial port, the user needs to wait for the initialization of the serial port and communicate with the single chip after the serial port is stably connected with the single chip, and then sends a data request to the single chip according to the selection of the working module. After the single chip microcomputer obtains an upper computer selection instruction, gas parameter measurement is continuously carried out, measured data are sent to the upper computer, and the upper computer receives the measured data through a serial port, processes and displays the measured data. In the monitoring process, if the measured gas parameter value exceeds a set threshold value, the system can give an alarm immediately, and the red alarm lamps of the single chip microcomputer, the mobile terminal interface and the upper computer interface can be simultaneously lightened.
And after the lower singlechip is powered on or reset, the program starts to run. After initialization, the system enters a While main cycle for waiting, after the upper computer is connected with the single chip microcomputer through a serial port, a user is waited for selecting a working module through a LabVIEW interface, and after confirmation, the upper computer sends a corresponding instruction to the single chip microcomputer. The single chip microcomputer receives the instruction and controls the corresponding relay, so that the electromagnetic valve is controlled to be opened, the electromagnetic valve works according to the working mode corresponding to each working module, the sensor data corresponding to the modules are collected, and the state monitoring can be simultaneously carried out through the LabVIEW interface of the upper computer and the interface of the mobile terminal.
In summary, the embodiments of the present invention are applied to a parameter monitoring system and a parameter monitoring method for an air supply unit of a laser device. The system comprises a lower computer and an upper computer, wherein the lower computer is composed of a singlechip module connected with a temperature and humidity sensor, a pressure sensor, a flow sensor, a cleanliness sensor, a mobile terminal display module and an electromagnetic valve control module, and the singlechip is connected with the upper computer through a serial port communication line; the upper computer adopts a LabVIEW development platform and is provided with a data display module and a control panel module, the data display module is connected with the lower computer for configuration, parameter setting, task display, parameter abnormity alarm and parameter historical curve, and the control panel module is connected with the lower computer for sending a control command. The using method comprises four steps of serial port communication configuration of the lower computer and the upper computer, monitoring parameter setting, air supply unit working module selection, data processing and display and the like. The invention can monitor the parameters of the air supply unit of the large-scale multifunctional laser device on line, and ensure the safe operation and maintenance of the device.
The present invention is not limited to the above embodiments, and based on the technical solutions of the present disclosure, those skilled in the art can make some substitutions and modifications to some technical features without creative efforts according to the disclosed technical contents, and these substitutions and modifications are all within the protection scope of the present invention.

Claims (7)

1. The utility model provides a parameter monitoring system for laser device air feed unit, includes next computer and host computer, its characterized in that: the lower computer is formed by connecting a temperature and humidity sensor, a pressure sensor, a flow sensor, a cleanliness sensor, a mobile terminal display module and an electromagnetic valve control module through a single chip microcomputer module, and the single chip microcomputer module is connected with the upper computer through a serial port communication line; the upper computer adopts a LabVIEW platform and is provided with a data display module and a control panel module; the data display module is connected with the lower computer for configuration, parameter setting, task display, parameter abnormity alarm and parameter historical curve, and the control panel module is connected with the lower computer for sending control commands.
2. The parameter monitoring system for a laser device gas supply unit according to claim 1, characterized in that: the temperature and humidity sensor, the pressure sensor, the flow sensor and the cleanliness sensor all support an Ethernet or RS485 serial port communication mode; the single chip microcomputer module adopts an SP3485 chip as an RS485 transceiver, and a pin 1 and a pin 4 of the single chip microcomputer module are respectively connected to a PA2 port and a PA3 port of the single chip microcomputer; the single chip microcomputer module adopts a LAN8720A as an Ethernet module, and an RJ45 interface with a network transformer is additionally arranged to form a self-adaptive network card; the single chip microcomputer module adopts an ATK-ESP8266 as a wireless module to be connected with a mobile terminal, a pin 7 and a pin 8 of the single chip microcomputer module are respectively connected to ports PB10 and PB11 of the single chip microcomputer, and a pin 1 and a pin 16 of the single chip microcomputer module are respectively connected to a ground GND terminal and a 3.3V power supply terminal of the single chip microcomputer.
3. A parameter monitoring method for a gas supply unit of a laser device is characterized in that: operating with the parameter monitoring system for a laser device gas supply unit according to claim 1 or 2, comprising the following operating steps:
step 1, a lower computer and an upper computer are in serial port communication configuration;
step 2, monitoring parameter setting;
step 3, selecting a working module of the air supply unit;
and 4, processing and displaying data.
4. A parameter monitoring method for a gas supply unit of a laser device according to claim 3, characterized in that: the specific steps of the step 1 are as follows:
step 1.1, the serial port configuration process is as follows:
step 1.1.1, the upper computer calls a VISA serial port configuration function in LabVIEW to initialize, and the configuration and selection of serial port numbers are consistent with those of the single chip microcomputer;
step 1.1.2, if the serial port is successfully opened, lightening a serial port LED lamp and setting an 'opening serial port' button, and delaying for 1 millisecond until an upper computer is stably connected with a single chip microcomputer;
step 1.1.3, if the serial port cannot be used normally, popping up a message of 'serial port opening failure' to prompt and setting a 'serial port opening' button, and continuing to be in a waiting state;
and step 1.1.4, calling a VISA Close function when the serial port is closed, closing the selected serial port number and extinguishing the serial port LED.
5. A parameter monitoring method for a gas supply unit of a laser device according to claim 3, characterized in that: the specific steps of the step 2 are as follows:
step 2.1, setting two parameter values for each parameter according to temperature, humidity, pressure, flow and cleanliness parameters in the parameters, wherein the two parameter values are respectively a parameter upper limit and a parameter lower limit;
and 2.2, when the measured data exceeds the upper limit or is lower than the lower limit, the LED lamp on the single chip microcomputer can be lightened, and meanwhile, the upper computer data display module interface can display an alarm.
6. A parameter monitoring method for a gas supply unit of a laser device according to claim 3, characterized in that: the specific steps of the step 3 are as follows:
3.1, selecting a module needing to work by an upper computer, sending a control command to the lower computer, controlling a secondary relay by a single-chip relay output module, controlling the on-off of a solenoid valve by the secondary relay, controlling the on-off of a gas pipeline, working according to a working mode corresponding to each working module, indicating a task state by a yellow indicator light, lighting up when the task is not finished at present, and turning off after the task is finished;
and 3.2, displaying the execution condition of each gas using task by the upper computer control panel module, wherein when the yellow lamp is on, the task is not completed in the day, and the progress indication bar indicates the completion progress in the day.
7. A parameter monitoring method for a gas supply unit of a laser device according to claim 3, characterized in that: the specific steps of the step 4 are as follows:
step 4.1, transmitting the field gas use parameters acquired by the sensor to a switch in an Ethernet mode, summarizing data to a lower singlechip by the switch, uploading the data to an upper computer by the singlechip, connecting the singlechip with a mobile terminal through an ATK-ESP8266 wireless module, and displaying the acquired data at the mobile terminal;
and 4.2, a sensor interface is arranged in a data display module of the upper computer, the interface is displayed in a column mode according to different working modules, real-time readings of all sensors can be displayed, the differential pressure readings, the flow velocity readings, the temperature and humidity readings and the cleanliness readings are sequentially displayed from top to bottom, and a recent numerical curve can be displayed.
CN202210216873.0A 2022-03-07 2022-03-07 Parameter monitoring system and parameter monitoring method for gas supply unit of laser device Pending CN114879547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210216873.0A CN114879547A (en) 2022-03-07 2022-03-07 Parameter monitoring system and parameter monitoring method for gas supply unit of laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210216873.0A CN114879547A (en) 2022-03-07 2022-03-07 Parameter monitoring system and parameter monitoring method for gas supply unit of laser device

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CN114879547A true CN114879547A (en) 2022-08-09

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