CN114879426B - Device and method for improving temperature adaptability of working bandwidth of tunable Fabry-Perot filter - Google Patents

Device and method for improving temperature adaptability of working bandwidth of tunable Fabry-Perot filter Download PDF

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CN114879426B
CN114879426B CN202210807476.0A CN202210807476A CN114879426B CN 114879426 B CN114879426 B CN 114879426B CN 202210807476 A CN202210807476 A CN 202210807476A CN 114879426 B CN114879426 B CN 114879426B
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value
wavelength
driving voltage
mark
voltage
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CN114879426A (en
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张爽爽
申雅峰
江琴
王莉
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/213—Fabry-Perot type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot

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  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)

Abstract

The invention provides a device and a method for improving temperature adaptability of a working bandwidth of a tunable Fabry-Perot filter, wherein the device comprises a broadband light source, the tunable Fabry-Perot filter, a first optical fiber coupler, a first mark wavelength generating unit, a second mark wavelength generating unit, a third mark wavelength generating unit, a signal acquisition processing module and a driving circuit, and the method utilizes 3 marks of wavelength as reference and converts wavelength information into sampling points and driving voltage coordinate information, wherein 2 marks of wavelength information are used for judging and setting a driving voltage range, and the other 1 path of 2 marks of wavelength information are used for judging whether a tuning bandwidth is stable, and then the driving voltage loaded to the tunable Fabry-Perot filter is adjusted in real time by compensating the position of the mark wavelength. The tunable Fabry-Perot filter disclosed by the invention can compensate the working bandwidth drift of the tunable Fabry-Perot filter caused by temperature change, and the temperature adaptability of the working bandwidth of the tunable Fabry-Perot filter is improved.

Description

Device and method for improving temperature adaptability of working bandwidth of tunable Fabry-Perot filter
Technical Field
The invention belongs to the technical field of fiber grating demodulation, and relates to a device and a method for improving temperature adaptability of a working bandwidth of a tunable Fabry-Perot filter.
Background
In practical engineering application, the demodulation method based on the tunable Fabry-Perot filter is the most widely used demodulation method in the fiber grating demodulation technology. According to the wavelength selection characteristic of the tunable Fabry-Perot filter, an optical signal of a broadband light source enters the tunable Fabry-Perot filter and then outputs narrow-band light, and a quasi-continuous wavelength sequence in a certain range is generated after linearly-changed voltage is loaded on the tunable Fabry-Perot filter, so that the working bandwidth of the Fabry-Perot filter can be tuned. When the output light wavelength is consistent with the reflection wavelength of the fiber grating sensor, the light intensity detected by the photoelectric detector in the signal acquisition and processing module is maximum, and the reflection wavelength of the fiber grating sensor and the wavelength variation under different parameters can be demodulated through acquiring the relation between the peak position of the maximum light intensity and the working bandwidth of the tunable Fabry-Perot filter. As prior art, for example, CN104391417A discloses a high-speed fiber grating demodulation system based on parallel scanning of tunable optical filters.
The stability of the operating bandwidth of a tunable fabry-perot filter can affect the accuracy and demodulation capacity of a demodulation method based on the tunable fabry-perot filter. When a voltage with periodic linear change is loaded on the tunable Fabry-Perot filter, the tuning bandwidth of the tunable Fabry-Perot filter is in periodic linear change, the tunable Fabry-Perot filter belongs to capacitive load and has the problems of hysteresis and nonlinearity, and the prior art CN109470285A discloses a wavelength demodulation method of a high-precision high-speed fiber grating sensor, which solves the problem of nonlinearity between a driving voltage and the transmission wavelength of the tunable optical filter. However, as the devices work and heat productivity of the devices is accumulated, under the same linear driving voltage, the working bandwidth of the tunable fabry-perot filter is influenced by the working temperature to generate drift, so that the demodulation capacity of the demodulation method based on the tunable fabry-perot filter is influenced, and particularly, when the temperature of the working environment changes, the problem is more serious, so that a technology for improving the working bandwidth temperature adaptability of the tunable fabry-perot filter is needed, the problem of working bandwidth drift caused by temperature is solved, the stability of the working bandwidth of the demodulation method based on the tunable fabry-perot filter under different temperature environments is favorably improved, and the demodulation capacity is improved.
Disclosure of Invention
The invention aims to provide a device and a method for improving the temperature adaptability of the working bandwidth of a tunable Fabry-Perot filter, which can solve the problem of bandwidth drift caused by temperature, improve the stability of the working bandwidth of a demodulation method based on the tunable Fabry-Perot filter in different temperature environments and improve the demodulation capacity.
In order to achieve the above object, an aspect of the present invention provides an apparatus for improving temperature adaptability of an operating bandwidth of a tunable fabry-perot filter, including a broadband light source, a tunable fabry-perot filter, a first optical fiber coupler, a first labeled wavelength generating unit, a second labeled wavelength generating unit, a third labeled wavelength generating unit, a signal collecting and processing module, and a driving circuit;
the drive voltage generated by the drive circuit is applied to the tunable Fabry-Perot filter, the broadband light emitted by the broadband light source enters the tunable Fabry-Perot filter applied with the drive voltage and then becomes narrowband scanning light, the narrowband scanning light is divided into 4 branches by the first optical fiber coupler, the first branch is output as scanning light, the second branch enters the first mark wavelength generating unit generating a first mark wavelength, the third branch enters the second mark wavelength generating unit generating a second mark wavelength, the fourth branch enters the third mark wavelength generating unit generating a third mark wavelength and a fourth mark wavelength, the optical signals output by the first mark wavelength generating unit, the second mark wavelength generating unit and the third mark wavelength generating unit enter the signal collection processing module, and the signal collection processing module collects and processes the drive voltage generated by the drive circuit and the first mark wavelength Marking optical signals with wavelengths from a first marking wavelength to a second marking wavelength, sending an instruction to the driving circuit, and controlling the driving circuit to change the driving voltage applied to the tunable Fabry-Perot filter according to the instruction of the signal acquisition processing module;
the wavelength value of the first marking wavelength is smaller than the starting value of the working bandwidth range of the tunable Fabry-Perot filter, the wavelength value of the second marking wavelength is larger than the ending value of the working bandwidth range, and the wavelength values of the third marking wavelength and the fourth marking wavelength are the starting value and the ending value of the working bandwidth range respectively.
Preferably, the broadband light source includes a semiconductor laser, a first optical fiber isolator connected to an output end of the semiconductor laser, a second optical fiber isolator connected to an input end of the semiconductor laser, and the device further includes a second optical fiber coupler connected between the tunable fabry-perot filter and the first optical fiber coupler, the semiconductor laser, the first optical fiber isolator, the second optical fiber isolator, the tunable fabry-perot filter and the second optical fiber coupler form an annular cavity structure, and narrow-band light output by the tunable fabry-perot filter is circularly amplified in the annular cavity for multiple times and then is output to the first optical fiber coupler through the second optical fiber coupler.
Another aspect of the present invention provides a method for improving temperature adaptability of an operating bandwidth of a tunable fabry-perot filter, wherein the method for improving temperature adaptability of the operating bandwidth of the tunable fabry-perot filter comprises:
step S1: the signal acquisition processing module sends an instruction to the driving circuit, and sets the initial value and the final value of the driving voltage to the minimum value which can be generated by the driving circuitV L And maximum valueV H The signal acquisition processing module synchronously acquires the driving voltage, the optical signal output by the first mark wavelength generating unit and the optical signal output by the second mark wavelength generating unit, acquires a curve of the driving voltage and the number of sampling points, calculates the peak position of each peak of the optical signal through Gaussian fitting, acquires a voltage value corresponding to the position of each peak according to the acquired curve of the driving voltage and the number of the sampling points, calculates the voltage difference between two adjacent peaks, and selects two voltage values with the maximum voltage difference as the initial value of the initial driving voltageV L1 And a termination valueV H1 ；
Step S2: the signal acquisition processing module sends an instruction to the driving circuit, and sets the initial value and the final value of the driving voltage as the initial value of the initial driving voltageV L1 And a terminal valueV H1 Synchronously collecting the driving voltage and the optical signal output by the third mark wavelength generating unit, judging whether the number of wave crests is 2, if so, repeating the step S1, and if so, judging that the 2 wave crests sequentially correspond to the third mark wavelengthλ a And a fourth mark wavelengthλ b Obtaining a curve of the driving voltage and the number of sampling points, and calculating a third mark wavelength by Gaussian fittingλ a And a fourth mark wavelengthλ b Corresponding peak positionN a 、N b Calculating the 2 wave peak positions according to the obtained curve of the driving voltage and the number of sampling pointsCorresponding peak voltageV Na ，V Nb ；
Step S3: the signal acquisition processing module sends an instruction to the driving circuit, and sets the initial value and the final value of the driving voltage as the initial value of the initial driving voltageV L1 And a termination valueV H1 Synchronously acquiring the driving voltage and the optical signal output by the third mark wavelength generating unit, and obtaining the third mark wavelength through Gaussian fitting calculationλ a And a fourth mark wavelengthλ b Corresponding peak positionN a1 、N b1 And calculating to obtain corresponding voltage according to the curve of the driving voltage and the number of sampling points acquired in the step S2V Na1 、V Nb1 To, forN a1 、N b1 AndN a 、N b comparing, if they are identical, the signal acquisition processing module can be used for sending instruction to the described drive circuit to make the initial value and termination value of drive voltageV L1 AndV H1 set as the start value and the end value of the driving voltage of the next period, if they are not consistent, utilize (N a ，V Na1 ) And (a)N b ，V Nb1 ) Refitting the curve of the driving voltage and the number of sampling points, and calculating to obtain the voltage values at the sampling starting point and the sampling end pointV L1 ’ AndV H1 ’ judgment ofV L1 ’ Whether or not greater thanV L And is made ofV H1 ’ Whether or not less thanV H If it satisfiesV L1 ’ ＞V L And isV H1 ’ ＜V H The signal acquisition processing module sends an instruction to the driving circuit to set the starting value and the ending value of the driving voltage of the next period as the valuesV L1 ’ AndV H1 ’ if not satisfied withV L1 ’ ＞V L And is provided withV H1 ’ ＜V H Then, step S1 and step S2 are repeated;
step S4: in the ith period from the 2 nd period, the signal acquisition processing module sends an instruction to the driving circuit, and the starting value and the ending value of the driving voltage are set as the starting value and the ending value determined in the previous period and are set as the starting value and the ending value determined in the previous periodV Li AndV Hi synchronously collecting the driving voltage and the optical signal output by the third mark wavelength generating unit, and calculating the third mark wavelength by Gaussian fittingλ a And a fourth mark wavelengthλ b Corresponding peak positionN ai 、N bi And calculating to obtain corresponding voltage value according to the curve of the driving voltage and the number of sampling points acquired in the previous periodV Nai 、V Nbi To, forN ai 、N bi AndN a(i-1) 、N b(i-1) comparing, if they are identical, the signal acquisition processing module can be used for sending instruction to the described drive circuit to make the initial value and termination value of drive voltageV Li AndV Hi setting the starting value and the ending value of the driving voltage of the next period, and if the starting value and the ending value are not consistent, utilizing (N a（i-1） ，V Nai ) And (a)N b（i-1） ，V Nbi ) Refitting the curve of the driving voltage and the number of sampling points, and calculating to obtain the voltage values of the sampling starting point and the sampling end pointV Li ’ AndV Hi ’ judgment ofV Li ’ Whether or not greater thanV L And is andV Hi ’ whether or not less thanV H If it satisfiesV Li ’ ＞V L And isV Hi ’ ＜V H Then, the signal acquisition processing module sends an instruction to the driving circuit, and the first part (A), (B) and (C)i+1) Starting and ending values of a periodic drive voltageV L（i+1） ，V H（i+1） Is arranged asV Li ’ AndV Hi ’ if not satisfied withV Li ’ ＞V L And isV Hi ’ ＜V H Then, step S1 to step S3 are repeated.
According to the device and the method for improving the temperature adaptability of the working bandwidth of the tunable Fabry-Perot filter, the 3-mark wavelength is used as a reference, the driving voltage loaded to the tunable Fabry-Perot filter is adjusted in real time, the bandwidth drift caused by temperature change can be compensated, the temperature adaptability of the working bandwidth of the tunable Fabry-Perot filter is improved, and the demodulation capacity of the fiber grating sensing system based on the tunable Fabry-Perot filter is improved.
Drawings
Fig. 1 is a schematic diagram of a configuration of an apparatus for improving temperature adaptability of an operating bandwidth of a tunable fabry-perot filter according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of a device for improving temperature adaptability of an operating bandwidth of a tunable fabry-perot filter according to another embodiment of the present invention.
Fig. 3 is a coordinate system constructed by the driving voltage, the optical signals of the first mark wavelength generating unit and the second mark wavelength generating unit, and the number of sampling points according to one embodiment of the present invention.
FIG. 4 is a schematic diagram of Gaussian fitting peak finding according to an embodiment of the present invention.
Fig. 5 is a coordinate system constructed by the driving voltage, the optical signal of the third mark wavelength generating unit, and the number of sampling points according to an embodiment of the present invention.
Fig. 6 is a schematic configuration diagram of a tunable fabry-perot filter operating bandwidth temperature adaptability test apparatus according to an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following detailed description will be made with reference to the accompanying drawings.
Embodiments of the present invention provide an apparatus for improving temperature adaptability of an operating bandwidth of a tunable fabry-perot filter. Fig. 1 is a schematic configuration diagram of an apparatus for improving temperature adaptability of an operating bandwidth of a tunable fabry-perot filter according to an embodiment of the present invention. As shown in fig. 1, the device for improving the temperature adaptability of the operating bandwidth of the tunable fabry-perot filter according to the embodiment of the present invention includes a broadband light source 21, a tunable fabry-perot filter 4, a first optical fiber coupler 6, a first labeled wavelength generating unit 7, a second labeled wavelength generating unit 8, a third labeled wavelength generating unit 9, a signal acquisition and processing module 10, and a driving circuit 11.
The driving voltage generated by the driving circuit 11 is applied to the tunable Fabry-Perot filter 4, the broadband light emitted by the broadband light source 21 enters the tunable Fabry-Perot filter 4 applied with the driving voltage and then becomes narrowband scanning light, the narrowband scanning light is divided into 4 branches through the first optical fiber coupler 6, the first branch is output as scanning light, the second branch enters the first mark wavelength generating unit 7 generating a first mark wavelength, the third branch enters the second mark wavelength generating unit 8 generating a second mark wavelength, the fourth branch enters the third mark wavelength generating unit 9 generating a third mark wavelength and a fourth mark wavelength, optical signals output by the first mark wavelength generating unit 7, the second mark wavelength generating unit 8 and the third mark wavelength generating unit 9 enter the signal acquisition processing module 10, the signal acquisition processing module 10 sends instructions to the driving circuit 11, and controlling the driving voltage output by the driving circuit 11, wherein the driving circuit 11 changes the driving voltage applied to the tunable Fabry-Perot filter 4 according to the instruction of the signal acquisition processing module 10.
Fig. 2 is a schematic diagram of the structure of the device for improving the temperature adaptability of the operating bandwidth of the tunable fabry-perot filter according to another embodiment of the present invention. In this another embodiment, the broadband light source 21 includes a semiconductor laser 1, a first optical fiber isolator 2 connected to an output end of the semiconductor laser 1, and a second optical fiber isolator 3 connected to an input end of the semiconductor laser 1, the apparatus further includes a second optical fiber coupler 5 connected between a tunable fabry-perot filter 4 and the first optical fiber coupler 6, the semiconductor laser 1, the first optical fiber isolator 2, the second optical fiber isolator 3, the tunable fabry-perot filter 4, and the second optical fiber coupler 5 form an annular cavity structure, and narrow-band light output by the tunable fabry-perot filter is circularly amplified in the annular cavity for multiple times and then output to the first optical fiber coupler 6 through the second optical fiber coupler 5.
In the present embodiment, since the light energy generated by the semiconductor laser 1 is relatively weak, the light energy of the narrow band passing through the tunable fabry-perot filter 4 is very small, and thus cannot be used practically. After the ring cavity is formed, the narrow-band light is oscillated and amplified after being transmitted in the ring cavity for many times, and the output light energy of the narrow-band light is strengthened.
The first mark wavelength generating unit 7, the second mark wavelength generating unit 8 and the third mark wavelength generating unit 9 can all select a single-peak etalon or a double-peak etalon which is narrow in bandwidth, convenient for peak finding, and small in influence of environmental factors such as temperature, vibration and impact on absolute wavelength, the size of the output mark wavelength can be selected according to a working bandwidth range required by actual use, a first mark wavelength value of the first mark wavelength generating unit 7 is smaller than a starting value of the working bandwidth range, a second mark wavelength value of the second mark wavelength generating unit 8 is larger than an ending value of the working bandwidth range, the third mark wavelength generating unit 9 comprises two wavelength values of a third mark wavelength and a fourth mark wavelength, and the starting value and the ending value of the working bandwidth range are respectively selected.
The signal collecting and processing module 10 is configured to collect and process the driving voltage signal and the optical signals output by the first labeled wavelength generating unit 7, the second labeled wavelength generating unit 8, and the third labeled wavelength generating unit 9, and send an instruction to the driving circuit 11 to control the output voltage thereof. The driving circuit 11 is used for generating a linear driving voltage, and can change a start value and an end value of the output voltage according to an instruction of the signal acquisition processing module 10.
Because the wavelength change of the tunable Fabry-Perot filter 4 and the driving voltage are in a linear relation, the voltage of the tunable Fabry-Perot filter 4 is increased and the wavelength is reduced in the same free spectral range (which can be regarded as a wavelength change period). The first mark wavelength and the second mark wavelength are selected to have wavelength values exceeding the range of the operating bandwidth, and as will be described later, the voltage range corresponding to the first mark wavelength and the second mark wavelength is used as the initial driving voltage range, so that the output light wavelength of the tunable fabry-perot filter 4 completely covers the actually required range of the operating bandwidth, and the integrity of the operating bandwidth can be ensured.
The third mark wavelength and the fourth mark wavelength select the start value and the end value of the actually required working bandwidth, so as to judge whether the output light wavelength of the tunable fabry-perot filter 4 covers the actually required working bandwidth range. Since the wavelength of the tunable fabry-perot filter 4 at different temperatures corresponding to the same driving voltage changes, the driving voltage range of the next period is adjusted by comparing whether the wavelength position obtained in the period is consistent with the wavelength position obtained in the previous period as described later, so that the working bandwidth of the tunable fabry-perot filter is more stable.
In one embodiment, the semiconductor laser 1 outputs broadband light with a center wavelength of 1520nm, covering the C + L band. The first optical fiber isolator 2 and the second optical fiber isolator 3 have the same parameters, and the passing range is 1550nm +/-50 nm. The free spectral range of the tunable Fabry-Perot filter 4 is 106nm (1500 nm-1606 nm), and the driving voltage range corresponding to one free spectral range is 12V. The second fiber coupler 5 is a 1x2 fiber coupler, with a split ratio of 8:2, 20% of the light entering the ring cavity and 80% of the light output. The first optical fiber coupler 6 is a 1x4 optical fiber coupler with a splitting ratio of 1:1:1:1, and is evenly divided into four equal parts by the first optical fiber coupler 6. The first mark wavelength generation unit 7 selects a single-peak etalon having a wavelength of 1501nm, the second mark wavelength generation unit 8 selects a single-peak etalon having a wavelength of 1605nm, and the third mark wavelength generation unit 9 selects double-peak etalons having wavelengths of 1503nm and 1603 nm.
Embodiments of the present invention also provide a method for improving temperature adaptability of an operating bandwidth of a tunable fabry-perot filter. In the embodiment, the tunable Fabry-Perot filter works according to a certain working period, the method of the embodiment uses 3 mark wavelengths as reference, determines the driving voltage (hereinafter also referred to as initial driving voltage) of a first period by using 2 paths of first mark wavelengths and second mark wavelengths, judges whether the output wavelength range of the tunable Fabry-Perot filter meets the requirement of actual working bandwidth in real time by using the other 1 path of two third mark wavelengths and fourth mark wavelengths in the subsequent period, and adjusts the driving voltage range loaded to the tunable Fabry-Perot filter in real time, thereby effectively compensating the bandwidth drift problem caused by temperature change and improving the temperature adaptability of the working bandwidth of the tunable Fabry-Perot filter.
The method for improving the temperature adaptability of the working bandwidth of the tunable Fabry-Perot filter comprises the steps S1 to S4.
In step S1, the signal acquisition processing module 10 sends an instruction to the driving circuit 11 to set the start value and the end value of the initial driving voltage to the minimum value and the maximum value that can be generated by the driving circuit 11 (S) ((S))V L ，V H ). Then, the signal acquisition processing module 10 is used to synchronously acquire the driving voltage (V L ，V H ) And the optical signals output by the first mark wavelength generating unit 7 and the second mark wavelength generating unit 8, so as to obtain a curve of the driving voltage and the number of sampling points.
In one embodiment, the start and end values of the initial driving voltage are set to the minimum and maximum voltage values (0, 40V) that the driving circuit 11 can generate. Under the linear driving voltage, the signal acquisition processing module 10 is used for synchronously acquiring the driving voltage and the optical signals output by the first mark wavelength generating unit 7 and the second mark wavelength generating unit 8. Fig. 3 is a coordinate system constructed by the driving voltage, the optical signals of the first mark wavelength generating unit and the second mark wavelength generating unit, and the number of sampling points according to one embodiment of the present invention. As shown in fig. 3, a coordinate system is constructed with the number of sampling points as an abscissa and the driving voltage, the optical signal of the first marker wavelength generating unit 7, and the optical signal of the second marker wavelength generating unit 8 as ordinates, and a curve of the driving voltage and the number of sampling points is obtained. The number of sampling points N in one cycle is 1000, and 3 peaks of the optical signal of the first mark wavelength generation unit 7 and the optical signal of the second mark wavelength generation unit 8 are respectively collected when a driving voltage of 0-40V is applied.
In step S1, the signal acquisition processing module 10 processes the optical signals of the first marker wavelength generation unit 7 and the second marker wavelength generation unit 8, and calculates the peak position of each peak of the optical signal by gaussian fitting. Let the first mark wavelength of the first mark wavelength generation unit 7 beλ Ⅰ The corresponding peak positions are respectivelyN Ⅰ ，N Ⅰ ’ ，N Ⅰ ’’ …, respectively; the second mark wavelength of the second mark wavelength generation unit 8 isλ Ⅱ The corresponding peak positions are respectivelyN Ⅱ ，N Ⅱ ’ ，N Ⅱ ’’ …。
In the above embodiment, as can be seen from fig. 3, when the driving voltage of 0 to 40V is applied, the number of peaks of the optical signal of the first mark wavelength generating unit 7 and the optical signal of the second mark wavelength generating unit 8 is 3, and at this time, the free spectral range of the two complete tunable fabry-perot filters is included under the driving voltage, and the driving voltage corresponding to one free spectral range can be further accurately obtained according to the voltage corresponding to two peaks. The signal acquisition processing module 10 processes the optical signal, as shown in fig. 4, may perform rough positioning according to the maximum value of the light intensity/voltage of each peak, and then read each of three points around the maximum value to perform gaussian fitting, so as to obtain the peak position of each peak. As shown in FIG. 3, three peak positions in the optical signal of the first marker wavelength generating unit 7N Ⅰ ，N Ⅰ ’ ，N Ⅰ ’’ 150.5, 515.8, 885.3, respectively; second oneMarking three peak positions in the optical signal of the wavelength generating unit 8N Ⅱ ，N Ⅱ ’ ，N Ⅱ ’’ 76.2, 442.6, 810.0, respectively.
Further, in step S1, the signal acquisition processing module 10 acquires a peak position according to the acquired curve of the driving voltage and the number of sampling pointsN Ⅰ ，N Ⅰ ’ ，N Ⅱ ，N Ⅱ ’ Corresponding voltage valueV NⅠ ，V NⅠ ’ ，V NⅡ ，V NⅡ ’ (from the aspect of power consumption, the wave crest corresponding to the smaller two voltages is selected for calculation), the method will be implementedN Ⅰ ，N Ⅰ ’ ，N Ⅱ ，N Ⅱ ’ Sequentially ordering from small to large, and calculating the voltage difference between two adjacent wave crestsΔV 1 ，ΔV 2 ，ΔV 3 . After comparison, two voltage values with larger voltage difference are selected as the initial value and the final value of the initial driving voltageV L1 AndV H1 in this case, the wavelength range of the scanning light isλ Ⅰ Toλ Ⅱ Including the required operating bandwidth.
In the above embodiment, the obtained driving voltage is linearly fitted, the fitting formula is y =0.04 × x, 76.2, 150.5, 442.6, 515.8 can be calculated, the corresponding voltages are 3.05V, 6.02V, 17.70V, 20.63V, and the voltage differences between two adjacent peaks are 2.97V, 11.68V, and 2.93V, respectively. As can be seen from fig. 3, when the voltage difference is 11.68V and the driving voltage is linearly increased from 6.02V to 17.70V, the output wavelength is changed from 1501nm to 1605nm, which is approximately a free spectral range (1500 nm to 1606 nm) of the tunable fabry-perot filter 4, and thus 6.02V and 17.70V are set as the start value and the end value of the initial driving voltage.
In step S2, the signal acquisition processing module 10 sets the start value and the end value of the driving voltage to beV L1 AndV H1 and applied to the tunable fabry-perot filter 4, and the driving voltage and the optical signal of the third mark wavelength generation unit 9 are synchronously collected by the signal collection processing module 10. Fig. 5 is a coordinate system constructed by the driving voltage, the optical signal of the third mark wavelength generating unit, and the number of sampling points according to an embodiment of the present invention. As shown in fig. 5, a coordinate system is constructed by using the number of sampling points as an abscissa and the driving voltage and the optical signal of the third mark wavelength generating unit 9 as an ordinate, and a curve of the driving voltage and the number of sampling points is obtained.
In step S2, it is first determined whether or not the number of peaks in the optical signal of third marker wavelength generating element 9 is 2, and if it is less than 2, step S1 is repeated. When the number of peaks in the optical signal of the third mark wavelength generating means 9 is 2, the explanation is made onV L1 ～V H1 Under the driving voltage, the wavelength variation range of the tunable Fabry-Perot filter 4 can cover the actually required working bandwidth range (1503 nm-1603 nm), and the output light in the period can meet the use requirement. When the number of wave crests is less than 2, the explanation isV L1 ～V H1 Under the driving voltage, the wavelength variation range of the tunable fabry-perot filter 4 cannot cover the actually required working bandwidth range, and the driving voltage range calculated according to the previous period is considered to be unsuitable for being used as the driving voltage range of the present period, and in such a case, the driving voltage cannot be adjusted according to the positional relationship of the two wavelength values of the third mark wavelength generating unit 9, so that the driving voltage needs to be initialized, and the step S1 is repeated to obtain a new driving voltage range again.
When the number of peaks in the optical signal of the third mark wavelength generating unit 9 is 2, the 2 peaks are determined to correspond to the third mark wavelength sequentiallyλ a And a fourth mark wavelengthλ b The peak position of each peak is calculated by gaussian fitting. A third mark wave of a third mark wavelength generation unit 9The peak positions corresponding to the long and fourth mark wavelengths are respectivelyN a ，N b Calculating to obtain the driving voltage and the sampling point number according to the obtained curveN a ，N b Corresponding voltageV Na ，V Nb 。
In the above embodiment, the signal collection processing module 10 sends an instruction to the driving circuit 11, and sets the start value and the end value of the driving voltage to 6.02V and 17.70V, and then the signal collection processing module 10 reads the driving voltage and the optical signal of the third mark wavelength generating unit 9, where the number of sampling points N is 1000. Third and fourth mark wavelengths of the third mark wavelength generation unit 9λ a ，λ b 1503nm and 1603nm respectively and corresponding peak positionsN a ，N b 18.9, 980.5, respectively, corresponding voltagesV Na ，V Nb 6.24V and 17.49V (the solid peaks in FIG. 5, i.e., the peak-to-peak ratio)V L1 ～V H1 The optical signal of the third mark wavelength generation unit 9 acquired at the drive voltage for the first time).
In step S3, the signal collection processing module 10 sets the start value and the end value of the driving voltage of the next cycle to beV L1 AndV H1 the signal collecting and processing module 10 is used to synchronously collect the driving voltage and the optical signal of the third mark wavelength generating unit 9, and the wavelength of the third mark wavelength generating unit 9 can be obtained by gaussian fitting calculation as in step S2λ a ，λ b Corresponding peak positionN a1 ，N b1 And calculating to obtain corresponding voltage according to the curve of the driving voltage and the number of sampling points obtained in the step S2V Na1 ，V Nb1 . For is toN a1 ，N b1 AndN a andN b comparing, if they are consistent, the signal acquisition processing module 10 sends them to the driving circuit 11Instructing to start and stop the driving voltageV L1 AndV H1 setting the starting value and the ending value of the driving voltage of the next period, and if the starting value and the ending value are not consistent, utilizing (N a ，V Na1 ) And (a)N b ，V Nb1 ) Linearly fitting the curve of the driving voltage and the number of sampling points again to calculate the sum of 0 point (sampling starting point)NAt the point (sampling end point) of a voltage value ofV L1 ’ AndV H1 ’ the signal acquisition processing module 10 sends an instruction to the driving circuit 11 to adjust the start value and the end value of the driving voltage toV L1 ’ AndV H1 ’ can be combined withλ a ，λ b Is adjusted toN a ，N b The scanning light kept output can be coveredλ a ～λ b A band.
In step S3, voltage values at the sampling start point and the sampling end point are calculatedV L1 ’ AndV H1 ’ then, need to judgeV L1 ’ Whether or not greater thanV L And is made ofV H1 ’ Whether or not less thanV H If it satisfiesV L1 ’ ＞V L And is provided withV H1 ’ ＜V H Then the signal acquisition processing module sends an instruction to the drive circuit to set the start value and the end value of the drive voltage of the next period asV L1 ’ AndV H1 ’ if not satisfiedV L1 ’ ＞V L And is provided withV H1 ’ ＜V H Then repeat the above stepsS1 and step S2. If the condition is not satisfied, it is described that the driving voltage of the next cycle obtained by calculation has exceeded the voltage range that can be generated by the driving circuit 11, the steps S1 and S2 are repeated, the driving voltage is initialized, the driving voltage within the range that can be generated by the driving circuit 11 itself is obtained again, and then the voltage fine adjustment is performed through the previous steps, so that the dead cycle can be avoided.
In the above embodiment, the signal collection processing module 10 again sets the start value and the end value of the driving voltage to 6.02V and 17.70V, and then the signal collection processing module 10 reads the driving voltage and the optical signal of the third mark wavelength generation unit 9, and the number of sampling points is 1000. The two wavelengths of the third mark wavelength generation unit 9 read this timeλ a ，λ b Still 1503nm, 1603nm, corresponding peak positionN a1 ，N b1 Change is 15.2, 976.8, corresponding to voltage valueV Na1 ，V Nb1 The change was 6.20V, 17.45V (dotted peak in FIG. 5, i.e., peak)V L1 ～V H1 The optical signal of the third mark wavelength generation unit 9 acquired at the second time under the driving voltage). As shown in fig. 5, under the same driving voltage, the voltage values corresponding to the two peaks of the third mark wavelength generating unit 9 drift, so that the positions of the two peaks of the third mark wavelength generating unit 9 change, and the driving voltage needs to be adjusted to ensure that the positions of the two peaks of the third mark wavelength generating unit 9 do not change. Using (18.9, 6.20), (980.5, 17.45) to re-fit the driving voltage versus number of sample points curve as y =0.0117x +5.9789, it can be found that when x is 0 and 1000, the corresponding y values are 5.9789 and 17.6789. Setting these two values as the start value and the end value of the driving voltage of the next cycle, the positions of the two peaks of the third mark wavelength generating unit 9 can be compensated to 18.9 and 980.5, thereby maintaining the output scanning light covering 1503nm to 1603 nm.
The step S3 can be regarded as the adjustment of the driving voltage for the 1 st duty cycle, and in the step S4, the adjustment is performed for the 2 nd cycleiOne cycle, repeating for the 1 st cycle in step S3And (6) processing. Specifically, the signal acquisition processing module 10 sets the start value and the end value of the driving voltage to the start value and the end value determined in the previous period, and sets the start value and the end value to the values determined in the previous periodV Li AndV Hi the signal acquisition processing module 10 is always used to synchronously acquire the driving voltage and the optical signal of the third mark wavelength generation unit 9, and the wavelength of the third mark wavelength generation unit 9 is calculated and acquired by the same method as the previous stepsλ a ，λ b Corresponding peak positionN ai ，N bi And corresponding voltage valueV Nai ，V Nbi . For the present periodN ai 、N bi Of the previous cycleN a(i-1) 、N b(i-1) Comparing, if they are consistent, the signal acquisition processing module 10 directly compares the start value and the end value of the driving voltage of the periodV Li AndV Hi setting the starting value and the ending value of the driving voltage of the next period, and if the starting value and the ending value are not consistent, utilizing (N a（i-1） ，V Nai ) And (a) and (b)N b（i-1） ，V Nbi ) Re-fitting the curve of the driving voltage and the number of sampling points to obtain 0 point sumNAt a point in time of a voltage value ofV Li ’ AndV Hi ’ 。
judgment ofV Li ’ Whether or not greater thanV L (0V) andV Hi ’ whether or not less thanV H (40V). If it satisfiesV Li ’ ＞V L (0V) andV Hi ’ ＜V H (40V), an instruction is sent to the driving circuit 11 through the signal acquisition processing module 10, and thei+1) Starting and ending values of a periodic drive voltageV L（i+1） ，V H（i+1） Is arranged asV Li ’ AndV Hi ’ . If not satisfied withV Li ’ ＞V L And isV Hi ’ ＜V H Then, step S1 to step S3 are repeated. If the condition is not satisfied, it is described that the driving voltage of the next cycle obtained by calculation has exceeded the voltage range that can be generated by the driving circuit 11, the steps S1 to S3 are repeated, the driving voltage is initialized, the driving voltage within the range that can be generated by the driving circuit 11 itself is obtained again, and then the voltage fine adjustment is performed through the previous steps, so that the dead cycle can be avoided.
The following experiments prove the beneficial effects of the device and the method for improving the temperature adaptability of the operating bandwidth of the tunable fabry-perot filter according to the above embodiments of the present invention.
As shown in fig. 6, on the basis of the apparatus for improving the temperature adaptability of the operating bandwidth of the tunable fabry-perot filter according to the embodiment of the present invention, the tunable fabry-perot filter 4 is placed in the high and low temperature box 12, the operating temperature of the tunable fabry-perot filter 4 is controlled by the high and low temperature box 12, and the tuning bandwidth is obtained by means of the multi-peak etalon 13 with a mark position. The first branch output light of the first fiber coupler 6 is connected to the multi-peak etalon 13 with the mark bit, and then is read into the computer 15 after being subjected to photoelectric conversion and analog-to-digital conversion in the signal processing unit 14. Finally, the tuning bandwidth of the tunable Fabry-Perot filter 4 is read according to the spectrum of the multi-peak etalon 13 with the mark bit.
When a fixed driving voltage (6.02V to 17.70V) is applied to the tunable Fabry-Perot filter 4, the tuning bandwidth of the tunable Fabry-Perot filter 4 is (1503 nm to 1603 nm) at normal temperature (20 ℃), the tuning bandwidth of the tunable Fabry-Perot filter 4 is (1503.8 nm to 1602 nm) at high temperature of 70 ℃, and the tuning bandwidth of the tunable Fabry-Perot filter 4 is (1502 nm to 1604.6 nm) at low temperature of-55 ℃. When the device and the method of the embodiment of the invention are used, the tuning bandwidth of the tunable Fabry-Perot filter 4 is (1503 nm-1603 nm) under the room temperature environment (20 ℃), the high temperature environment of 70 ℃ and the low temperature environment of-55 ℃. Compared with the prior art, the device and the method for improving the temperature adaptability of the working bandwidth of the tunable Fabry-Perot filter have obvious effect on improving the stability of the tuning bandwidth of the tunable Fabry-Perot filter.
In summary, the apparatus and method for improving the temperature adaptability of the operating bandwidth of the tunable fabry-perot filter according to the present invention uses 3-mark wavelength as a reference, converts the wavelength information into the sampling point and the driving voltage coordinate information, wherein 2 routes of marking wavelength information are used for judging and setting the driving voltage range, the other 1 routes of 2 marking wavelength information are used for judging whether the working bandwidth is stable, and then, the wavelength position is compensated and marked, the linear voltage loaded to the tunable Fabry-Perot filter is adjusted in real time, the stability of the working bandwidth of the tunable Fabry-Perot filter is improved, the influence of bandwidth drift caused by temperature change on the demodulation capacity of the demodulation method based on the tunable Fabry-Perot filter is effectively reduced, the temperature adaptability of the demodulation method is improved, and the application process of the demodulation system based on the demodulation method of the tunable Fabry-Perot filter in the field of airplane structure health monitoring is promoted.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the present invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.

Claims (3)

1. A device for improving the temperature adaptability of the working bandwidth of a tunable Fabry-Perot filter is characterized by comprising a broadband light source (21), the tunable Fabry-Perot filter (4), a first optical fiber coupler (6), a first mark wavelength generating unit (7), a second mark wavelength generating unit (8), a third mark wavelength generating unit (9), a signal acquisition processing module (10) and a driving circuit (11);
the drive voltage generated by the drive circuit (11) is applied to the tunable Fabry-Perot filter (4), the broadband light emitted by the broadband light source (21) enters the tunable Fabry-Perot filter (4) applied with the drive voltage and then becomes narrow-band scanning light, the narrow-band scanning light is divided into 4 branches through the first optical fiber coupler (6), the first branch serves as scanning light output, the second branch enters the first mark wavelength generating unit (7) generating a first mark wavelength, the third branch enters the second mark wavelength generating unit (8) generating a second mark wavelength, the fourth branch enters the third mark wavelength generating unit (9) generating a third mark wavelength and a fourth mark wavelength, and optical signals output by the first mark wavelength generating unit (7), the second mark wavelength generating unit (8) and the third mark wavelength generating unit (9) enter the signal acquisition processing module (10) ) The signal acquisition and processing module (10) acquires and processes the driving voltage generated by the driving circuit (11) and the optical signals with the first to fourth mark wavelengths, sends an instruction to the driving circuit (11), and controls the driving circuit (11) to change the driving voltage applied to the tunable Fabry-Perot filter (4) according to the instruction of the signal acquisition and processing module (10);
wherein the wavelength value of the first marker wavelength is smaller than the starting value of the working bandwidth range of the tunable Fabry-Perot filter (4), the wavelength value of the second marker wavelength is larger than the ending value of the working bandwidth range, and the wavelength values of the third marker wavelength and the fourth marker wavelength are respectively the starting value and the ending value of the working bandwidth range.
2. An arrangement according to claim 1, characterized in that the broadband light source (21) comprises a semiconductor laser (1), a first fiber isolator (2) connected to an output of the semiconductor laser (1), a second fiber isolator (3) connected to an input of the semiconductor laser (1), the device further comprises a second fiber coupler (5) connected between the tunable Fabry-Perot filter (4) and the first fiber coupler (6), the semiconductor laser (1), the first optical fiber isolator (2), the second optical fiber isolator (3), the tunable Fabry-Perot filter (4) and the second optical fiber coupler (5) form a ring cavity structure, narrow-band light output by the tunable Fabry-Perot filter (4) is circularly amplified in the annular cavity for multiple times and then is output to the first optical fiber coupler (6) through the second optical fiber coupler (5).
3. A method for improving temperature adaptability of an operating bandwidth of a tunable fabry-perot filter, wherein the temperature adaptability of the operating bandwidth of the tunable fabry-perot filter is improved by using the device of claim 1 or 2, and the method comprises the following steps:
step S1: the signal acquisition processing module (10) sends an instruction to the drive circuit (11), and sets a starting value and an ending value of the drive voltage to a minimum value which can be generated by the drive circuit (11)V L And maximum valueV H The signal acquisition processing module (10) acquires the driving voltage, the optical signal output by the first mark wavelength generating unit (7) and the optical signal output by the second mark wavelength generating unit (8) synchronously, acquires a curve of the driving voltage and the number of sampling points, calculates the peak position of each peak of the optical signal through Gaussian fitting, acquires a voltage value corresponding to each peak position according to the acquired curve of the driving voltage and the number of sampling points, calculates the voltage difference between two adjacent peaks, and selects two voltage values with the maximum voltage difference as the initial value of the initial driving voltageV L1 And a terminal valueV H1 ；
Step S2: the signal acquisition processing module (10) sends an instruction to the drive circuit (11), and sets the initial value and the end value of the drive voltage as the initial value of the initial drive voltageV L1 And a terminal valueV H1 Synchronously acquiring the driving voltage and the optical signal output by the third mark wavelength generating unit (9), judging whether the number of wave crests is 2, and if so, judging whether the number of the wave crests is 2If the number of the peaks is less than 2, repeating the step S1, and if the number of the peaks is 2, determining that the 2 peaks sequentially correspond to the third mark wavelengthλ a And a fourth mark wavelengthλ b Obtaining a curve of the driving voltage and the number of sampling points, and calculating a third mark wavelength by Gaussian fittingλ a And a fourth mark wavelengthλ b Corresponding peak positionN a 、N b Calculating to obtain peak voltages corresponding to the 2 peak positions according to the obtained curves of the driving voltage and the number of sampling pointsV Na ，V Nb ；
Step S3: the signal acquisition processing module (10) sends an instruction to the drive circuit (11), and sets the initial value and the end value of the drive voltage as the initial value of the initial drive voltageV L1 And a termination valueV H1 Synchronously acquiring the driving voltage and the optical signal output by the third mark wavelength generating unit (9), and obtaining the third mark wavelength through Gaussian fitting calculationλ a And a fourth mark wavelengthλ b Corresponding peak positionN a1 、N b1 And calculating to obtain corresponding voltage according to the curve of the driving voltage and the number of sampling points acquired in the step S2V Na1 、V Nb1 To, forN a1 、N b1 AndN a 、N b comparing, if the two values are consistent, the signal acquisition processing module (10) sends an instruction to the driving circuit (11) to enable the starting value and the ending value of the driving voltage to be consistentV L1 AndV H1 setting the starting value and the ending value of the driving voltage of the next period, and if the starting value and the ending value are not consistent, utilizing (N a ，V Na1 ) And (a) and (b)N b ，V Nb1 ) Refitting the curve of the driving voltage and the number of sampling points, and calculating to obtain the voltage values at the sampling start point and the sampling end pointV L1 ’ AndV H1 ’ judgment ofV L1 ’ Whether or not greater thanV L And is andV H1 ’ whether or not less thanV H If it satisfiesV L1 ’ ＞V L And isV H1 ’ ＜V H Then the signal acquisition processing module (10) sends an instruction to the drive circuit (11) to set the start value and the end value of the drive voltage of the next period as the valuesV L1 ’ AndV H1 ’ if not satisfied withV L1 ’ ＞V L And is provided withV H1 ’ ＜V H Then, step S1 and step S2 are repeated;
step S4: in the ith period from the 2 nd period, the signal acquisition processing module (10) sends an instruction to the drive circuit (11), and the start value and the end value of the drive voltage are set as the start value and the end value determined in the previous period and are set as the start value and the end valueV Li AndV Hi synchronously collecting the driving voltage and the optical signal output by the third mark wavelength generating unit (9), and obtaining the third mark wavelength through Gaussian fitting calculationλ a And a fourth mark wavelengthλ b Corresponding peak positionN ai 、N bi And calculating to obtain corresponding voltage value according to the curve of the driving voltage and the number of sampling points acquired in the previous periodV Nai 、V Nbi To is aligned withN ai 、N bi AndN a(i-1) 、N b(i-1) comparing, if the two values are consistent, the signal acquisition processing module (10) sends an instruction to the driving circuit (11) to enable the starting value and the ending value of the driving voltage to be consistentV Li AndV Hi set as the driving voltage of the next periodIf they do not match, usingN a（i-1） ，V Nai ) And (a)N b（i-1） ，V Nbi ) Refitting the curve of the driving voltage and the number of sampling points, and calculating to obtain the voltage values of the sampling starting point and the sampling end pointV Li ’ AndV Hi ’ judgment ofV Li ’ Whether or not greater thanV L And is andV Hi ’ whether or not less thanV H If it satisfiesV Li ’ ＞V L And isV Hi ’ ＜V H Sending an instruction to the driving circuit (11) through the signal acquisition processing module (10), and sending the instruction (c) to (b)i+1) Starting and ending values of a periodic drive voltageV L（i+1） ，V H（i+1） Is arranged asV Li ’ AndV Hi ’ if not satisfiedV Li ’ ＞V L And isV Hi ’ ＜V H Then, step S1 to step S3 are repeated.
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