CN114877914B - Ground simulation test system for inertial sensor - Google Patents
Ground simulation test system for inertial sensor Download PDFInfo
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- CN114877914B CN114877914B CN202210627177.9A CN202210627177A CN114877914B CN 114877914 B CN114877914 B CN 114877914B CN 202210627177 A CN202210627177 A CN 202210627177A CN 114877914 B CN114877914 B CN 114877914B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
Abstract
The application relates to the technical field of inertial sensor simulation, in particular to an inertial sensor ground simulation test system, which comprises a simulation mass block, a simulation electrode cage and a high-precision adjusting table, wherein: the simulation mass block is arranged in the center of the simulation electrode cage; the simulation electrode cage is arranged on the high-precision adjusting table; the front end of the simulation electrode cage is provided with a measuring circuit, the top end of the simulation electrode cage is provided with a vacuum device, and the rear end of the simulation electrode cage is provided with an angle measuring device. The ground stable suspension of the inertial sensor inspection quality can be realized, and the ground stable suspension is used for ground performance simulation test and scientific experiment ground simulation, provides ground test basis for the on-orbit reliable operation of the inertial sensor, and can also be used for test experiments related to various inertial sensors.
Description
Technical Field
The application relates to the technical field of inertial sensor simulation, in particular to an inertial sensor ground simulation test system.
Background
The inertial sensor adopts a differential capacitance detection and static feedback control method, is high-precision displacement measurement equipment for space detection, has measurement precision of pm magnitude, can provide an inertial reference standard for drag-free flight for a high-precision universe detection platform, can provide a stable measurement basis for a laser interferometer in the gravitational wave detection process, and can also measure low-frequency weak acceleration after a measurement and control mode is changed, so that the inertial sensor has important application prospects in the fields of gravitational wave detection, satellite drag-free flight, scientific satellite microgravity level test, high-precision space science experiments and the like.
In order to ensure that the inertial sensor can stably run on the track, and the performance index reaches the design expectation, each performance of the inertial sensor needs to be tested in the ground as thoroughly as possible. However, in order to achieve a high measurement accuracy, the proof mass of the inertial sensor needs to be of the order of kg and the electrode spacing of the order of mm. If the traditional high-voltage suspension measurement method is directly adopted, the ground suspension voltage can reach more than 5 ten thousand volts, which is obviously unrealistic, and if the tower falling test method is adopted, the high-speed falling kg-level test quality and millimeter-level movable clearance can generate great impact on an electrode cage, so that equipment is damaged, and therefore, the traditional ground test method cannot realize the direct test on the performance of an inertial sensor. If the simulation device can be adopted to realize the high-voltage suspension of the inertial sensor in the ground state, the full-physical simulation possibility can be provided for the measurement and control modes of the inertial sensor, the laser interferometry method, the residual charge influence and the like more comprehensively.
Disclosure of Invention
The main aim of the application is to provide an inertial sensor ground simulation test system, which carries out full physical simulation on an inertial sensor, greatly reduces risks caused by incomplete on-orbit function and performance test, and realizes the test of the inertial sensor ground performance.
In order to achieve the above-mentioned purpose, the application provides an inertial sensor ground simulation test system, including simulation mass block, simulation electrode cage and high accuracy adjustment platform, wherein: the simulation mass block is arranged in the center of the simulation electrode cage; the simulation electrode cage is arranged on the high-precision adjusting table; the front end of the simulation electrode cage is provided with a measuring circuit, the top end of the simulation electrode cage is provided with a vacuum device, and the rear end of the simulation electrode cage is provided with an angle measuring device.
Further, the material of the analog mass block is engineering plastic, and the surface of the analog mass block is plated with a metal material.
Further, the simulation electrode cage is of a cube structure and comprises six faces, a limiting structure is arranged between every two faces, and electrodes are arranged on each face.
Further, a measurement circuit is connected to the electrodes on each face of the analog electrode cage for detecting a change in the difference thereof.
Further, the measurement circuit is also connected with the feedback control circuit.
Further, a high-precision driving rotating shaft is arranged in the middle of the high-precision adjusting table.
Further, the goniometer comprises a laser interferometry goniometer and a table goniometer mirror, wherein: the table body angle measuring reflector is fixed on the high-precision adjusting table and is positioned at the rear end of the simulation electrode cage; the laser interference goniometer is connected with the high-precision driving rotating shaft through a rotating shaft feedback controller.
Further, the feedback control circuit has two control modes, including a high voltage control mode and an inertial measurement mode.
The ground simulation test system of the inertial sensor provided by the invention has the following beneficial effects:
the ground stable suspension of the inertial sensor inspection quality can be realized, and the ground stable suspension is used for ground performance simulation test and scientific experiment ground simulation, provides ground test basis for the on-orbit reliable operation of the inertial sensor, and can also be used for test experiments related to various inertial sensors.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, are included to provide a further understanding of the application and to provide a further understanding of the application with regard to the other features, objects and advantages of the application. The drawings of the illustrative embodiments of the present application and their descriptions are for the purpose of illustrating the present application and are not to be construed as unduly limiting the present application. In the drawings:
FIG. 1 is a schematic diagram of a ground simulation test system for an inertial sensor according to an embodiment of the present application;
FIG. 2 is an X-axis electrode plate layout of a simulated electrode cage of an inertial sensor ground simulation test system in accordance with an embodiment of the present application;
FIG. 3 is a Y-axis electrode plate layout of a simulated electrode cage of an inertial sensor ground simulation test system in accordance with an embodiment of the present application;
FIG. 4 is a Z-axis electrode plate layout of a simulated electrode cage of an inertial sensor ground simulation test system in accordance with an embodiment of the present application;
FIG. 5 is a control diagram of a feedback control circuit of a simulated electrode cage of an inertial sensor ground simulation test system in the Z-axis direction in accordance with an embodiment of the present application;
in the figure: 1-simulation mass block, 2-simulation electrode cage, 3-limit structure, 4-electrode, 5-vacuum device, 6-measuring circuit, 7-feedback control circuit, 8-laser interferometry angle meter, 9-stage angle measuring reflector, 10-rotating shaft feedback controller, 11-high precision adjusting table, 12-high precision driving rotating shaft.
Detailed Description
In order to make the present application solution better understood by those skilled in the art, the following description will be made in detail and with reference to the accompanying drawings in the embodiments of the present application, it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe the embodiments of the present application described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are used primarily to better describe the present application and its embodiments and are not intended to limit the indicated device, element or component to a particular orientation or to be constructed and operated in a particular orientation.
Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.
In addition, the term "plurality" shall mean two as well as more than two.
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1, the present application provides an inertial sensor ground simulation test system, which includes a simulation mass block 1, a simulation electrode cage 2 and a high-precision adjusting table 11, wherein: the simulation mass block 1 is arranged in the center of the interior of the simulation electrode cage 2; the simulation electrode cage 2 is arranged on the high-precision adjusting table 11; the front end of the simulation electrode cage 2 is provided with a measuring circuit 6, the top end is provided with a vacuum device 5, and the rear end is provided with an angle measuring device.
Specifically, the ground simulation test system for the inertial sensor is mainly used for testing the horizontal and axial functions and performances of the inertial sensor, and can provide a ground suspension measurement platform for various research experiments of the inertial sensor. The analog mass block 1 is manufactured by adopting a special process, and has similar surface metal materials and the same machining precision as the actual structure of the inertial sensor; the simulation electrode cage 2 is mainly used for simulating the surface material characteristics of an inertial sensor, integrates a detection voltage injection electrode and a mass block control electrode in the horizontal axial direction, and simultaneously designs a special channel for laser interferometry verification. The high-precision adjusting table 11 is mainly used for adjusting acceleration, and can realize closed-loop adjustment and measurement of a tiny inclination angle. The measuring circuit 6 is mainly used for measuring the change of the displacement of the analog mass block 1, the vacuum device 5 is mainly used for maintaining the vacuum inside the electrode 4 cage under the ground condition, noise caused by high-voltage discharge and excessive gas damping is avoided, the angle measuring device is mainly used for measuring the inclination angle of the high-precision adjusting table 11, and in order to utilize the gravity component along the table surface direction to measure, calibrate and the like of the inertial sensor in the ground test process.
Further, the material of the analog mass block 1 is engineering plastic, and the surface of the analog mass block is plated with a metal material. The simulation mass block 1 is preferably a cubic test mass block made of engineering plastic materials, then a metal material is plated on the surface of the test mass block by adopting methods such as vapor deposition or electroplating, so that a surface metallized test mass block simulator is formed, the test mass block simulator can also be manufactured into a hollow form according to actual requirements, the side length of the simulation mass block 1 is 40-60mm, the mass is 20-200g, the surface roughness is below 1um, and due to the light mass and large volume, the test mass block simulator can be suspended in the center of an electrode cage under the action of a polar plate high voltage of less than 1500V when the distance between electrodes 4 is proper, so that the ground suspension voltage is greatly reduced. In addition, the linear expansion coefficient of the engineering plastic of the analog mass block 1 is in the order of 10 < -5 >/DEG C, if the ambient temperature is controlled within +/-0.1 ℃ in the test, the change of the size of the mass block caused by the temperature is only in the order of 100nm, and compared with the electrode spacing of more than 100 mu m, the error caused by the test in the ground test experiment is negligible, so that the measurement precision is improved.
Further, the simulation electrode cage 2 is of a cube structure and comprises six faces, a limiting structure 3 is arranged between every two faces, and electrodes 4 are arranged on each face. The simulation electrode cage 2 is a cubic structure surrounding the simulation mass 1, which mainly serves to carry the simulation mass 1 and to provide measurement and control electrodes 4 in the respective axial direction, as well as laser vias. In this embodiment, the simulation electrode cage 2 is made of microcrystalline glass material, the electrode cage is in a cube structure, six surfaces are respectively processed, after the processing is completed, a precision screw is adopted as a limiting structure 3, the precision screw is adhered to the edge of an electrode plate, then metal coating is carried out on the electrode plate, then an etching technology is adopted, the metal material of an insulating part is etched, gold is generally adopted as the metal material of the electrode 4, wherein as shown in fig. 2-4, two electrodes 4 are arranged on each surface along an X axis and a Y axis, four electrodes 4 are arranged on each surface along a Z axis, finally, the simulation mass block 1 is matched with six electrode 4 plates to assemble, the whole assembly is completed, in fig. 2, a left circle and a right circle represent injection electrodes, the applied voltage in the place is 100kHz, the positive alternating voltage with the amplitude of 1-4V, displacement detection of the simulation mass is used, the middle circle area is a laser through hole, the joint test can be carried out with the laser interferometry angle meter 8 in the joint test process of a ground system, and in the same fig. 3, the upper circle and the lower circle represent the injection electrodes, and the middle circle area is the laser through hole.
Further, a measuring circuit 6 is connected to the electrodes 4 on each side of the analog electrode cage 2 for detecting a change in the difference thereof. The measuring circuit 6 and two surfaces of the analog electrode cage 2 in the Z-axis direction form a high-voltage suspension system, the high-voltage suspension system can enable the analog mass block 1 to suspend in the gravity direction (Z-axis direction) of the analog electrode cage 2, a capacitor is formed between the analog mass block 1 and the electrode 4 plates on two opposite sides of the corresponding axis, when the displacement of the analog mass block 1 in the axial direction changes, the capacitor also changes, the measuring circuit 6 in the Z-axis direction detects the change of a difference value between the two capacitors, and the displacement of the analog mass block 1 in the direction can be calculated according to the change of the difference value. Similarly, the electrodes 4 on each surface along the X axis and the Y axis are connected with the measuring circuit 6, and according to actual measurement conditions, different channels in each axial direction respectively use different measuring circuits 6 to detect the displacement of the channel, and the principle of the displacement detection is calculated by using the capacitance difference of the measuring circuit 6.
Further, as shown in fig. 5, the measurement circuit 6 is also connected to a feedback control circuit 7. The measuring circuit 6 is also connected with the high-voltage feedback circuit and the PID controller, and the measuring circuit 6 can apply feedback control voltage to the electrode 4 plate in the Z-axis direction through the control of the PID controller and the high-voltage feedback circuit according to the change of the difference value between the capacitors, so that the displacement detection voltage in the Z-axis direction reaches about 0V, and the analog mass block 1 is stably suspended in the gravity direction (Z-axis direction). Similarly, feedback control in the X-axis direction and the Y-axis direction is the same as that in the Z-axis direction, and the feedback control circuit 7 is mainly used for controlling the analog mass block 1 at the center position of the electrode cage according to displacement data detected by the measurement circuit 6.
Further, a high-precision driving rotary shaft 12 is provided in the middle of the high-precision adjusting table 11. The high-precision driving rotating shaft 12 can realize the tiny inclination angle adjustment of the high-precision adjusting table 11 to obtain 1 multiplied by 10 -8 And adjusting the step length of the inclination angle of rad, adjusting the feedback control voltage of the horizontal axial direction to the minimum value, wherein the input acceleration caused by the inclination angle is minimum at the moment, and entering an inertia measurement mode. After the spindle 12 is driven to rotate with high precision, the analog mass 1 moves a small distance, but the feedback control system can restore the analog mass to the original position in a very short time, but in order to maintain the position of the mass, the feedback voltage will become large, which is equivalent to a feedback control mode, and the acceleration is estimated by the feedback acting force.
Further, the goniometer device comprises a laser interferometry goniometer 8 and a table goniometer mirror 9, wherein: the table body angle measuring reflector 9 is fixed on the high-precision adjusting table 11 and is positioned at the rear end of the simulation electrode cage 2; the laser interferometry goniometer 8 is connected to a high precision drive spindle 12 via a spindle feedback controller 10. The angle measuring device is mainly used for measuring the inclination angle of a high-precision adjusting table 11, if the tiny inclination angle is theta, the corresponding gravity component is g theta, the inclination angle is adjusted by adopting a feedback control method, the adjustment quantity is determined by a laser interference angle measuring instrument 8, the driving is completed by a high-precision driving rotating shaft 12 of the adjusting table, the adjustment quantity is set by an upper computer, a table body angle measuring reflector 9 is used for controlling an optical path in laser interference measurement, the laser interference angle measuring instrument 8 is used for measuring tiny angle change of a table surface, a rotating shaft feedback controller 10 is used for reading data of the laser interference angle measuring instrument 8 and converting the data into a driving signal to transmit the high-precision driving rotating shaft 12, and therefore the table surface is subjected to angle control.
Further, the feedback control circuit 7 has two control modes including a high-voltage control mode and an inertia measurement mode. The feedback control circuit 7 is mainly used for stably controlling the analog mass block 1 in the horizontal direction and measuring the displacement change in the horizontal direction, and comprises two working modes in the measuring process, under the high-voltage control mode, the input acceleration in the horizontal axial direction is regulated to be within 0.1ug by regulating the inclination angle of the high-precision regulating table 11, and then the control mode of the X axis or the Y axis can be changed into an inertial measurement mode, namely, the feedback control is not carried out on the horizontal direction, only the displacement detection and readout are carried out, and the direction can carry out the related test of inertial measurement at the moment, and under the inertial measurement mode, the analog mass block 1 is approximately considered to be influenced by the earth pulsation only, and the residual acceleration is 10 -7 m/s 2 The magnitude of the free drift time of about 30 seconds can be provided for the horizontal axis at this time, and the free drift time is used for testing and evaluating the measurement and control process in the inertial measurement mode. In general, in the high-pressure control mode, the analog mass 1 is stably controlled in all three axial directions, and in the inertia measurement mode, only the displacement change of one horizontal axial direction is measured, and the control is not performed any more, namely, if the gravity component in the direction is large, the displacement of the analog mass 1 in the direction reaches the maximum value relatively quickly.
The foregoing description is only of the preferred embodiments of the present application and is not intended to limit the same, but rather, various modifications and variations may be made by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims (4)
1. The ground simulation test system of the inertial sensor is characterized by comprising a simulation mass block, a simulation electrode cage and a high-precision adjusting table, wherein:
the simulation mass block is arranged in the center of the simulation electrode cage;
the simulation electrode cage is arranged on the high-precision adjusting table;
the front end of the simulation electrode cage is provided with a measuring circuit, the top end of the simulation electrode cage is provided with a vacuum device, and the rear end of the simulation electrode cage is provided with an angle measuring device;
the simulated electrode cage is of a cube structure and comprises six faces, a limiting structure is arranged between every two faces, and electrodes are arranged on each face;
the measuring circuit is connected with the electrodes on each surface of the analog electrode cage and is used for detecting the change of the difference value;
a high-precision driving rotating shaft is arranged in the middle of the high-precision adjusting table;
the angle measuring device comprises a laser interference angle measuring instrument and a platform angle measuring reflecting mirror, wherein:
the platform body angle measurement reflecting mirror is fixed on the high-precision adjusting platform and is positioned at the rear end of the simulation electrode cage;
the laser interference goniometer is connected with the high-precision driving rotating shaft through a rotating shaft feedback controller.
2. The inertial sensor ground simulation test system of claim 1, wherein the simulated mass is an engineering plastic with a surface plated with a metallic material.
3. The inertial sensor ground-based simulation test system of claim 1, wherein the measurement circuit is further coupled to a feedback control circuit.
4. The inertial sensor ground-simulation test system of claim 3, wherein the feedback control circuit has two control modes, including a high voltage control mode and an inertial measurement mode.
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| CN202210627177.9A CN114877914B (en) | 2022-06-02 | 2022-06-02 | Ground simulation test system for inertial sensor |
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| CN104158431B (en) * | 2014-08-05 | 2016-05-04 | 中国空间技术研究院 | The super silent flatform system of a kind of electrostatic suspension formula space-based |
| CN104237563B (en) * | 2014-09-04 | 2017-04-05 | 兰州空间技术物理研究所 | Suitable for the high-pressure electrostatic circuit suspension of Electrostatically suspended accelerometer ground test |
| CN106872730B (en) * | 2017-05-04 | 2019-07-02 | 三峡大学 | A kind of acceleration measurement device and method |
| CN113466491B (en) * | 2021-07-01 | 2023-12-05 | 兰州空间技术物理研究所 | Satellite accelerometer sensitive structure |
| CN113884702B (en) * | 2021-10-18 | 2023-09-26 | 兰州空间技术物理研究所 | Design method for improving consistency of scale factors of electrostatic suspension accelerometer |
| CN114324978A (en) * | 2021-12-17 | 2022-04-12 | 兰州空间技术物理研究所 | Ground static calibration method for accelerometer capture range |
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