CN114877825A - Linear spectrum confocal system for three-dimensional surface type measurement based on super-surface light splitting - Google Patents
Linear spectrum confocal system for three-dimensional surface type measurement based on super-surface light splitting Download PDFInfo
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Abstract
The invention discloses a linear spectrum confocal system for three-dimensional surface type measurement based on super-surface light splitting. The system comprises: a broad spectrum light source for providing optical radiation having a range of wavelengths; a super-surface optical splitter for splitting optical radiation emitted by the optical radiation source into separate wavelengths; the cylindrical lens group is used for focusing the optical radiation with different wavelengths on different heights in the depth direction of the surface of the object to be measured, and the transmission direction of the radiation light is not changed in the direction vertical to the meridian plane; an optical radiation processing unit that receives optical radiation reflected from the surface of the object to be measured in a specular reflection direction and guides the optical radiation to the detector; a detector for receiving radiation reflected from the measured object. The invention uses the super surface to realize dispersion and proves the feasibility of the dispersion, can realize spectral separation to a greater extent than prisms, gratings and the like, can measure a larger depth range during surface shape measurement, and has more uniform precision among different depths.
Description
Technical Field
The invention relates to a measuring instrument and a method, in particular to a linear spectrum confocal system for three-dimensional surface type measurement based on super-surface light splitting.
Background
With the progress of modern detection technology, the three-dimensional measurement technology gradually becomes the research focus of people, and particularly with the development of high and new technologies such as laser technology, computer technology, image processing technology and the like, the optical three-dimensional measurement technology is widely applied. The optical three-dimensional surface type measuring technology is widely applied to the fields of high-speed detection, product development, quality control and the like due to the advantages of high precision, high efficiency, non-contact property and the like.
The concept of confocal microscopy was first proposed by Minsky in the United states in 1955, which built a first confocal microscope using the confocal principle and patented in 1957. The spectrum confocal technology is developed on the basis of confocal microscopy, axial scanning is not needed, and the wavelength corresponds to axial distance information directly, so that the measurement speed is greatly improved. The sensor based on the spectrum confocal technology is a novel sensor with high precision and non-contact type, and the precision can reach nm magnitude theoretically. The spectrum confocal sensor has low requirement on the condition of the measured surface, allows the measured surface to have a larger inclination angle, has high measuring speed and high real-time performance, is quickly a hot sensor for industrial measurement, and is widely applied to the fields of precision positioning, film thickness measurement, micro-profile precision measurement and the like.
At present, most of spectrum confocal systems adopt a dispersion lens group to realize spectrum separation, the spectrum separation obtained by the dispersion method is not obvious, the measurement depth is small, only the height information of a detection point can be obtained in each measurement, and if a three-dimensional surface type of the whole plane needs to be obtained, two-dimensional scanning needs to be carried out. There is also a system for realizing spectrum separation by adopting the grating, but the utilization rate of light energy is greatly weakened and the measurement precision is reduced by utilizing the first-order diffraction light of the transmission grating for measurement.
Disclosure of Invention
The invention provides a linear spectrum confocal system for three-dimensional surface shape measurement based on super-surface light splitting, which adopts a super-surface to realize spectrum separation and verify feasibility, and simultaneously adopts a series of cylindrical lens groups to realize line measurement, thereby reducing displacement scanning dimensionality during surface shape measurement.
The invention firstly provides a linear spectrum confocal system for three-dimensional surface type measurement based on super-surface light splitting, which comprises:
a broad spectrum light source for providing optical radiation having a range of wavelengths;
a super-surface optical splitter for conditioning the optical radiation to separate the optical radiation into separate wavelengths;
the cylindrical lens group is used for adjusting the optical radiation passing through the super surface, so that the optical radiation with the separated wavelengths is guided to the surface of the measured object from different directions, and the optical radiation with different wavelengths is focused at different heights in the depth direction of the surface of the measured object; and in the direction perpendicular to the meridian plane, the propagation direction of the radiated light is not changed;
the optical radiation processing unit guides the optical radiation which is perfectly focused on the measuring point on the surface of the measured object to the detector in the direction of specular reflection, so that the optical path of the optical radiation with the wavelength after the specular reflection is symmetrical to the optical path before the specular reflection, and the optical radiation which is not perfectly focused on the measuring point on the surface of the measured object is not guided to the detector;
a detector for receiving the optical radiation guided by the optical radiation processing unit.
Further, the super-surface light splitting device uses a nano fin array, and the size of the nano fin array is in a sub-wavelength scale; by arranging the nanofins with different sizes at different positions, light splitting with good linearity, large dispersion degree and high resolution is realized.
Further, the broad spectrum light source is arranged to provide parallel light radiation of uniform illumination.
Furthermore, the super-surface light splitting device is adopted as a super-surface structure silicon nanofin array, the silicon nanofin array comprises a plurality of silicon nanofin units, and the silicon nanofin units are arranged in a manner of being parallel to the surface of the silicon nanofin array
Is a nm -1 The wavelength range is λ according to design requirements 1 -λ 2 After the parallel light radiation passes through the super-surface light splitting device, the emergent angle is theta 1 -θ 2 (ii) a According to the generalized Snell's law, the incident light and the emergent light satisfy
Wherein theta is t ,θ i ,n t ,n i The transmission angle, the incidence angle, the refractive index of the transmission region and the refractive index of the incidence region are respectively.
Further, the cylindrical lens group is configured to make all the lights with different wavelengths emitted from the super surface enter the cylindrical lens group, focus on different heights in the depth direction of the surface of the object to be measured, and do not change the propagation direction of the light in the direction perpendicular to the meridian plane.
Further, the optical radiation processing unit comprises a group of cylindrical lens groups, and the cylindrical lens groups are arranged to guide the optical radiation focused on the measuring point on the surface of the measured object to the detector in a mode of being symmetrical to the optical path before focusing.
Furthermore, the detector is an area detector, is arranged on a focal plane of the optical radiation processing unit, determines the wavelength of the radiation focused on the surface of the measured object through signals provided by the detector, and determines the position of the surface according to the wavelength of the radiation.
The invention also provides a three-dimensional surface type measuring method based on the device; which comprises the following steps:
1) a broad spectrum light source provides optical radiation having a range of wavelengths;
2) the super-surface conditioning the optical radiation to separate the optical radiation into separate wavelengths,
3) the cylindrical lens group adjusts the optical radiation passing through the super surface, so that the optical radiation with the separated wavelengths is guided to the surface of the measured object from different directions, and the optical radiation with different wavelengths is focused at different heights in the depth direction of the surface of the measured object; in addition, in the direction vertical to the meridian plane, the propagation direction of the radiation light is not changed, namely, a linear measuring point in the meridian plane direction can be measured simultaneously in one measurement;
4) the optical radiation processing unit guides the optical radiation perfectly focused on the measuring point on the surface of the measured object to the detector in the mirror reflection direction, so that the optical path of the optical radiation with the wavelength after mirror reflection is symmetrical to the optical path before mirror reflection, and the optical radiation which is not perfectly focused on the measuring point on the surface of the measured object is not guided to the detector;
5) the detector receives the wavelength corresponding to the optical radiation reflected by the measured object, and linear measuring point surface type information in the direction vertical to the meridian plane of the surface of the measured object is obtained according to the wavelength information;
6) and moving the measured object or the measuring device towards the direction vertical to the meridian plane, and scanning the dimension of the measured object to obtain the three-dimensional surface type of the surface of the measured object.
Compared with the prior art, the invention realizes dispersion through the super surface, and compared with the traditional prism which is limited by a material dispersion curve, the super surface dispersion deflection device has unique advantages in accurately regulating and controlling the dispersion curve and improving the linearity of confocal measurement. In addition, the super-surface deflector has better angular resolution than the grating structure and the prism structure. The super surface can realize stronger dispersion, can realize spectral separation to a greater extent than prisms, gratings and the like, and can measure a larger depth range during surface shape measurement; the super-surface deflector can obtain more excellent linearity, and the measurement precision is improved; the super-surface deflector has small volume and light weight, and can reduce the volume and mass of the system compared with a prism or a grating for dispersion. The use of the super-surface structure is innovative and feasible in improving the accuracy of the surface profile measurement. Meanwhile, the cylindrical mirror is used for replacing a spherical mirror, linear detection can be realized, one scanning dimension can be reduced when the three-dimensional surface type information of the plane of the object to be detected is obtained, the plane three-dimensional surface type information can be obtained only by scanning once, and the scanning efficiency is improved.
Drawings
FIG. 1 is a plot of super-surface dispersion confocal plane position versus wavelength;
FIG. 2 is a schematic view of a super-surface unit structure, wherein the L direction is the x direction and the W direction is the y direction;
FIG. 3 is a graph of a duty cycle versus equivalent refractive index for a metamaterial;
FIG. 4 is a graph showing the relation between the equivalent refractive index and the y coordinate required by the super-surface;
FIG. 5 is a graph showing the relationship between the duty cycle required by the super surface and the y coordinate;
FIG. 6 is a schematic plan view of a super-surface;
FIG. 7 is a schematic perspective view of a super-surface;
FIG. 8 is a schematic perspective view of a super-surface;
FIG. 9 is a simulation diagram of the super-surface for different wavelength light splitting, from left to right, 500nm,600nm,700nm wavelength light rays are deflected differently in the propagation direction after passing through the super-surface;
FIG. 10 is a light path diagram of a detection module of a linear spectral confocal system for three-dimensional surface type measurement based on super-surface light splitting;
FIG. 11 is a light path diagram of a detection module of a linear spectral confocal system for three-dimensional surface type measurement based on super-surface light splitting.
Detailed Description
In order to make the structure, features and advantages of the present invention more clear, the present invention will now be described in further detail with reference to the accompanying drawings, but it should not be construed as limiting the scope of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The present embodiment provides a linear spectral confocal system for three-dimensional surface shape measurement based on super-surface spectroscopy, which includes:
a broad spectrum light source for providing optical radiation having a range of wavelengths;
a super-surface optical splitter for conditioning the optical radiation to separate the optical radiation into separate wavelengths;
the cylindrical lens group is used for adjusting the optical radiation passing through the super surface, so that the optical radiation with the separated wavelengths is guided to the surface of the measured object from different directions, and the optical radiation with different wavelengths is focused at different heights in the depth direction of the surface of the measured object; and in the direction perpendicular to the meridian plane, the propagation direction of the radiated light is not changed;
the optical radiation processing unit guides the optical radiation perfectly focused on the measuring point on the surface of the measured object to the detector in the mirror reflection direction, so that the optical path of the optical radiation with the wavelength after mirror reflection is symmetrical to the optical path before mirror reflection, and the optical radiation which is not perfectly focused on the measuring point on the surface of the measured object is not guided to the detector;
a detector for receiving the optical radiation guided by the optical radiation processing unit.
In the embodiment, the silicon nano fin array with the super-surface structure is used as a super-surface light splitting device according to the generalized Snell's law
Of silicon nanofin cells
3.67789 x 10 -3 nm -1 From the design requirement, the light splitter needs to perform dispersion deflection on the light with the wavelength of 500-1000nm, and the light is vertically incident (theta) i 0), a deflection angle of 17 ° 1 '6 "-35 ° 49' 41" can be obtained, which can meet the dispersion requirements. Compared with the grating, the super-surface nano structure has higher period density on a unit plane, which ensures higher angular resolution and provides a foundation for improving the surface type measurement resolution.
Through simulation, it can be demonstrated that the dispersion characteristic of the super-surface dispersion structure has good linearity in the confocal plane, as shown in fig. 1.
The invention introduces a design method for realizing approximate linear dispersion of a super surface meeting the light splitting requirement of the confocal system design, which comprises the following steps:
firstly, the design about realizing linear dispersion transmission phase type super surface is given by combining with the equivalent medium theory. And (3) enabling the super surface to be equivalent to a layer of anisotropic medium film, and analyzing the super surface by using an equivalent medium theory. The incident light is TE polarized light. The electric field should remain continuous at the boundary, i.e.:
wherein D is gy ，D 1,y Between a structural unit and a building unit respectivelyElectrical flux density of the separator. Epsilon g ，ε 1 Dielectric constants of the structural units and spaces, respectively, E y Is the electric field vector. From this we can calculate the mean electric flux density of the super-surface:
wherein, Λ is the structural unit period in the y direction, and η is the proportion of the length of the structural unit in the structural unit period. Therefore, the first-order dielectric constant of the super surface can be obtained:
according to the relation between dielectric coefficient and refractive index ∈ ═ n 2 Simultaneous formula (0.3), yielding:
wherein n is 1 ，n g Respectively, the refractive index of the structural unit and the refractive index of the air space.
Next, a design example of super-surface implemented linear dispersion that meets the design splitting requirement of the present confocal system is designed:
we used a silica material as the substrate, with a thickness of 0.5 mm. Si is adopted as the material of the super surface unit. As shown in fig. 2, H is the height of the super-surface unit, W, L are the thickness of the super-surface unit in the x and y directions, respectively. Let H be 2 um. In the x-direction, the period of the cell should be constant and W should also take a constant value, since the dispersion should remain uniform. To increase the equivalent index to achieve stronger dispersion, we directly set the duty cycle in the x-direction to 1. If a reduction in dispersion is desired, only the duty cycle in the x-direction needs to be adjusted. The total length in the x direction can be directly prolonged according to the system requirements, and the light splitting performance of the system cannot be influenced. In the y direction, the unit spacing is 300nm, and the duty ratio is adjusted correspondingly with the change of the y coordinate so as to realize linear dispersion. Next, we quantitatively calculated structures in the range of 17um in y-direction length.
Using equation (0.4), we can obtain the equivalent refractive index versus material duty cycle curve as shown in fig. 3 below. The phase difference and the equivalent refractive index satisfy the formula:
according to the design requirements:
with the simultaneous equation (0.4) (0.5), we can find that the equivalent refractive index in the y-direction of the super-surface should satisfy the curve shown in fig. 4.
Simultaneous formula (0.4) (0.5); we find that the following equation is satisfied between the duty cycle and the coordinate y:
therefore, we can obtain the duty cycle versus y coordinate as shown in fig. 5.
According to the relation (0.6), the super surface design diagram can be obtained as shown in fig. 6.
The abscissa in the figure is the y-direction of the super-surface. The blue area indicates a space occupied by the Si unit, and the white area indicates a space occupied by air. It can be seen that the duty cycle of the super-surface unit needs to be adjusted quantitatively in order to achieve linear dispersion. The specific value of L is calculated from (0.6). By utilizing the calculation method, the super-surface prism meeting the requirement of approximate linear dispersion can be designed in a wide spectrum range according to the requirement. It is also very convenient to adjust the degree of dispersion by changing the duty cycle in the x-direction.
Fig. 9 and 10 are partial block diagrams of the linear spectral confocal system of the invention. The linear spectral confocal system comprises: the device comprises a radiation light source, a super surface, a cylindrical lens group, a light radiation processing unit and a detector.
The radiation light source is a wide-spectrum LED with the color temperature of about 5000K, can provide uniform light radiation with the wavelength of 500-1000nm, is regarded as a point light source, and converts the light emitted by the wide-spectrum LED into parallel light radiation to vertically enter the next optical element through common optical elements such as a convex lens and the like.
The super surface structure adopts a silicon nano fin array according to the generalized Snell's law
Of silicon nanofin cells
3.67789 x 10 -3 nm -1 From the design requirement, the light splitter needs to perform dispersion deflection on the light with the wavelength of 500-1000nm, and the light is vertically incident (theta) i 0), a deflection angle of 17 ° 1 '6 "-35 ° 49' 41" can be obtained, which can meet the dispersion requirements.
And the cylindrical lens group can lead the separated wavelengths to the measured object in a direction different from the depth direction of the measured surface, so that the optical radiation with different wavelengths is focused on different heights of the surface of the measured object in the normal direction of the measured plane, and the propagation direction of the optical radiation is not changed in the direction vertical to the meridian plane.
An optical radiation processing unit arranged to direct optical radiation of different wavelengths reflected by the mirror of the plane of interest correspondingly to the detector.
The detection unit is a planar CMOS device and is arranged on the focal plane of the optical component system of the optical radiation processing unit. The invention requires that the size of the CMOS pixel element is less than 2 mu m, and the size of the CMOS pixel element is more than 20 x 10mm, and the CMOS pixel element is used for receiving the reflected optical radiation of the measured object processed by the optical radiation processing unit, determining the wavelength of the radiation focused on the measured surface through the signal provided by the detector, and determining the position of the surface by using the wavelength.
Fig. 7 and 8 are schematic light paths of the linear-spectrum confocal system of the invention. It can be seen from the figure that the light with different wavelengths emitted from the broad spectrum light source passes through the lens group and then passes through the super surface to realize the spectral separation, but for the light radiation with single wavelength, the light still enters the rear lens group as parallel light. The propagation direction of the light is changed in the normal direction of the measured surface, and the separated wavelengths are guided to the measured object in a direction different from the depth direction of the surface being measured, so that the light radiation of different wavelengths is focused on different heights of the surface of the measured object in the normal direction of the measured plane. Only the optical radiation perfectly focused on the surface of the object to be measured can enter the optical radiation processing unit through the symmetrical optical components, and the detector receives the wavelength corresponding to the perfectly focused optical radiation, so that the surface type information of the surface of the object to be measured can be correspondingly obtained.
The above description is only exemplary of the preferred embodiments of the present invention, and is not intended to limit the present invention, and any modifications, equivalents, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A linear spectrum confocal measuring device for three-dimensional surface type measurement based on super-surface linear light splitting is characterized by comprising:
a broad spectrum light source for providing optical radiation having a range of wavelengths;
a super-surface optical splitter for conditioning the optical radiation to separate the optical radiation into separate wavelengths;
the cylindrical lens group is used for adjusting the optical radiation passing through the super surface, so that the optical radiation with the separated wavelengths is guided to the surface of the measured object from different directions, and the optical radiation with different wavelengths is focused at different heights in the depth direction of the surface of the measured object; and in the direction perpendicular to the meridian plane, the propagation direction of the radiated light is not changed;
the optical radiation processing unit guides the optical radiation perfectly focused on the measuring point on the surface of the measured object to the detector in the mirror reflection direction, so that the optical path of the optical radiation with the wavelength after mirror reflection is symmetrical to the optical path before mirror reflection, and the optical radiation which is not perfectly focused on the measuring point on the surface of the measured object is not guided to the detector;
a detector for receiving the optical radiation guided by the optical radiation processing unit.
2. The measurement apparatus of claim 1, wherein the super surface spectroscopy device uses an array of nanofins, sized at a sub-wavelength scale; by arranging the nanofins with different sizes at different positions, light splitting with good linearity, large dispersion degree and high resolution is realized.
3. A measuring apparatus according to claim 1, wherein the broad spectrum light source is arranged to provide collimated optical radiation of uniform illumination.
4. The measurement apparatus of claim 1, wherein the super-surface light-splitting device is a super-surface structured silicon nanofin array, the silicon nanofin array comprising a plurality of silicon nanofin units, and the silicon nanofin units are arranged in a row
Is a nm -1 The wavelength range is λ according to design requirements 1 -λ 2 After the parallel light radiation passes through the super-surface light splitting device, the emergent angle is theta 1 -θ 2 (ii) a According to the generalized Snell's law, the incident light and the emergent light satisfy
Wherein theta is t ,θ i ,n t ,n i The transmission angle, the incidence angle, the refractive index of the transmission region and the refractive index of the incidence region are respectively.
5. A measuring device as claimed in claim 1, characterized in that the set of cylindrical lenses is arranged such that the light of different wavelengths emerging from the super-surface enters the set of cylindrical lenses entirely, is focused at different heights in the depth direction of the surface of the object to be measured, and does not change the propagation direction of the light in a direction perpendicular to the meridian plane.
6. A measuring device as claimed in claim 1, characterized in that the optical radiation processing unit comprises a set of cylindrical lens elements arranged to direct optical radiation focused on a measuring point on the surface of the object to be measured to the detector in a manner symmetrical to the optical path before focusing.
7. A measuring device as claimed in claim 1, characterized in that the detector is an area detector which is arranged in the focal plane of the optical radiation processing unit, the wavelength of the radiation focused on the surface of the object to be measured being determined from the signals supplied by the detector, and the position of the surface being determined on the basis of the wavelength of the radiation.
8. A three-dimensional surface shape measuring method based on the device of claim 1; the method is characterized by comprising the following steps:
1) a broad spectrum light source provides optical radiation having a range of wavelengths;
2) the super-surface conditioning the optical radiation to separate the optical radiation into separate wavelengths,
3) the cylindrical lens group adjusts the optical radiation passing through the super surface, so that the optical radiation with the separated wavelengths is guided to the surface of the measured object from different directions, and the optical radiation with different wavelengths is focused at different heights in the depth direction of the surface of the measured object; in addition, in the direction vertical to the meridian plane, the propagation direction of the radiation light is not changed, namely, a linear measuring point in the meridian plane direction can be measured simultaneously in one measurement;
4) the optical radiation processing unit guides the optical radiation perfectly focused on the measuring point on the surface of the measured object to the detector in the mirror reflection direction, so that the optical path of the optical radiation with the wavelength after mirror reflection is symmetrical to the optical path before mirror reflection, and the optical radiation which is not perfectly focused on the measuring point on the surface of the measured object is not guided to the detector;
5) the detector receives the wavelength corresponding to the optical radiation reflected by the measured object, and linear measuring point surface type information in the meridian plane direction of the surface of the measured object is obtained according to the wavelength information;
6) and moving the measured object or the measuring device towards the direction vertical to the meridian plane, and scanning the dimension of the measured object to obtain the three-dimensional surface type of the surface of the measured object.
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