CN114877823A - System and method for quickly and accurately detecting prism comprehensive surface shape error based on vertical laser interferometer - Google Patents
System and method for quickly and accurately detecting prism comprehensive surface shape error based on vertical laser interferometer Download PDFInfo
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- CN114877823A CN114877823A CN202210370982.8A CN202210370982A CN114877823A CN 114877823 A CN114877823 A CN 114877823A CN 202210370982 A CN202210370982 A CN 202210370982A CN 114877823 A CN114877823 A CN 114877823A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
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Abstract
The invention discloses a quick and accurate detection system for a prism comprehensive surface shape error based on a vertical laser interferometer, which comprises: a laser interferometer; a horizontal angle compensator; a mirror device; a parallelism calibrator; detecting a terminal; the detection system can have the test function of the horizontal interferometer from the aspect of overall structure design, the observation system can achieve the test precision of the comprehensive surface shape of the horizontal interferometer, and the detection system is simple in overall structure and convenient and fast to operate for a front-line detector. The detection system realizes the high parallelism of the detected surface of a product and an interferometer lens by controlling the horizontal angle compensator and the levelness calibrator, and in addition, the system improvement is carried out from various angles by controlling the reflecting mirror through the inclined plane compensator, so that the rapid and accurate detection of the comprehensive surface shape of the prism is realized.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a system and a method for quickly and accurately detecting a comprehensive surface shape error of a prism based on a vertical laser interferometer.
Background
Aiming at the detection of the optical prism, the existing vertical laser interferometer only can realize the pre-detection of a single surface shape, and cannot realize the detection of the comprehensive surface shape error of the product. However, whether the produced product corresponds to the requirements on the design drawing or not cannot be directly realized by the detection of a vertical interferometer on a production field at present, and the measurement of the comprehensive surface type of the prism can be realized only by means of a horizontal interferometer; however, the horizontal interferometer is high in cost and large in occupied area, and is inconvenient for rapid detection of production field pre-inspection, and whether a product is qualified or not is judged according to the application scene of the product of a terminal customer by detecting the comprehensive surface shape in the design process.
In addition, in the actual process of one-line detection, the shapes of some prisms are complex, the measured surface is difficult to keep highly parallel to the lens of the vertical interferometer, the current vertical interferometer lacks a corresponding adjusting device, the final detection data has a large difference with the actual numerical value, and the precision of the test and the efficiency of the production are greatly influenced.
Therefore, in combination with the above problems, it is necessary to design a system and a method for rapidly and accurately detecting the comprehensive surface shape error of the prism by using a vertical laser interferometer.
Disclosure of Invention
The invention aims to provide a novel system and a novel method for rapidly and accurately detecting the comprehensive surface shape error of a prism by using a vertical laser interferometer.
More specifically, the invention provides a system for rapidly and accurately detecting an error of a comprehensive surface shape of a prism based on a vertical laser interferometer, which is characterized by comprising:
the laser interferometer is arranged above the horizontal angle compensator and is used for measuring the surface related parameters of the prism;
the horizontal angle compensator is arranged on the detection table, is used for placing a prism and adjusts the parallelism between a lens of the laser interferometer and the prism through the horizontal angle compensator;
the reflecting mirror device is arranged on the side surface of the horizontal angle compensator at intervals through the base and is used for matching with the laser interferometer to present the light path of the comprehensive surface shape of the prism;
the parallelism calibrator is arranged on the detection table and positioned between the vertical laser interferometer and the horizontal angle compensator and is used for calibrating the parallelism of the lens of the laser interferometer and the surface of the prism;
and the detection terminal system is connected with the laser interferometer and used for counting and analyzing the acquired image data.
As a specific improvement of the present invention, the horizontal angle compensator includes:
the fixed disc is arranged on the detection table and is provided with a cylindrical cavity with an opening at the upper end;
a piston propulsion assembly disposed within the cylindrical cavity;
the air bag compensation assembly is arranged on the upper end surface of the piston propelling assembly;
and one end surface fine tuning support assembly arranged on two opposite side surfaces of the fixed disc.
As a specific improvement of the invention, the piston propulsion assembly comprises:
the piston handle is in threaded connection with the fixed disc;
the piston plate is fixed at the upper end of the piston handle and is positioned in the cylindrical cavity;
the air bag compensation assembly comprises:
the fine tuning flat plate is connected with the piston plate through a damping rotating shaft, and a fine tuning gap is formed between the fine tuning flat plate and the piston plate;
the first air bag is arranged on one half surface of the upper end surface of the fine adjustment flat plate and is connected with the first air charging device;
the second air bag is arranged on the other half surface of the upper end surface of the fine adjustment flat plate and is connected with a second air charging device 435;
the terminal surface fine setting supporting component includes:
the fine adjustment groove is formed in the side face of the fixed disc, and a fine adjustment sliding block capable of interacting up and down is arranged in the fine adjustment groove;
the bottom end of the fine adjustment rod is hinged with the fine adjustment sliding block, and the middle part of the fine adjustment rod is hinged to the side surface of the fixed disc through a hinge rod;
and the supporting wheel is fixed at the top end of the fine adjustment rod.
As a specific improvement of the present invention, a mirror device includes:
the fixed seat is arranged on the detection table, and an operation cavity is arranged in the fixed seat;
the inclined plane angle compensator is arranged on the side of the horizontal angle compensator at intervals;
it includes:
an operating part arranged above the fixed seat;
the sliding part is arranged on one side surface of the fixed seat close to the prism and is hinged with the operation part;
an adjusting part arranged between the operating part and the sliding part;
and the reflecting mirror is arranged on the outer side surface of the sliding part, and the side included angle between the reflecting mirror and the prism is adjusted under the adjusting action of the inclined surface angle compensator.
As a specific improvement of the present invention,
the operation portion includes:
the operating column is divided into a threaded section and a smooth section, the smooth section is fixed in the operating cavity of the fixed seat, the threaded end extends to the outside of the fixed seat, and an adjusting groove for adjusting the adjusting part is formed in the side surface of the operating column;
the operating block is sleeved on the operating column in a threaded manner, and a circle of circular groove is formed in the upper end face of the operating block;
the adjusting part includes:
the L-shaped adjusting rod is arranged in the adjusting groove in a sliding manner;
one end of the connecting rod is hinged with the L-shaped adjusting rod, and the other end of the connecting rod is connected with the sliding part;
the sliding part includes:
the seat board is fixedly connected with the reflector;
a sliding groove arranged on the seat board;
and the sliding block is arranged in a sliding manner with the sliding groove, and the other end of the connecting rod is hinged with the sliding block.
As a specific improvement of the present invention,
the parallelism calibrator comprises:
the upright post is fixed on the detection platform;
the rotating assembly is rotatably arranged on the upright post;
the Z-shaped calibration component is fixedly arranged on the side surface of the rotating component;
and the balance rod horizontally penetrates through the Z-shaped calibration assembly and is always parallel to the lens of the vertical laser interferometer.
As a specific improvement of the present invention, the rotating assembly comprises:
the two turntables are respectively and rotatably arranged at the upper and lower positions of the upright post;
two support rods are respectively and vertically connected between the two turntables in parallel.
The "Z-shaped" calibration assembly includes:
the two horizontal rods are respectively fixed on the side surfaces of the two turntables in an up-down corresponding manner;
and the inclined rod is connected between the end parts of the two horizontal rods and forms a Z-shaped structural member together with the two horizontal rods.
More specifically, the invention provides a method for rapidly and accurately detecting the comprehensive surface shape error of the prism based on the laser interferometer, which comprises the following steps:
s1: installing a detection platform, a laser interferometer and a detection terminal, and enabling the laser interferometer to be positioned right above the detection platform;
s2: a reflector device is additionally arranged on the detection table;
s3: putting the prism on a detection table, starting the laser interferometer, and adjusting the lens of the vertical laser interferometer to be always parallel to the upper surface of the prism through the horizontal angle compensator;
s4: adjusting the requirement of the included angle between the reflector device and the prism according to the light path of the prism, and ensuring that the end surface of the prism and the reflector device are kept within a certain angle range;
s5: after the detection positions of the prism and the reflector device are adjusted through the step S4, the laser interferometer is combined to shoot, the comprehensive surface image of the prism is presented through reflection, the collected image data are transmitted to the detection terminal, statistics and analysis are carried out through a built-in program of a computer, and the final detection result is displayed.
Further, the step S1 includes calibrating parallelism between the prism and the laser interferometer, and the parallelism calibrator is used for real-time calibration, and the parallelism calibrator is used as a reference for calibrating parallelism between the upper surface of the prism and the lens of the laser interferometer.
Further, the compensation angle of the horizontal angle compensator in the step S3 is 0 to 5 °; in the step S4, the range of the included angle between the mirror device and the prism is 0 ° 10'-0 ° 20', and the reflecting surface and the end surface of the mirror are kept within the range of the included angle, which is convenient for reducing the interference of the image.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention provides a detection system for detecting the comprehensive surface shape error of a prism, which has the advantages of simple overall structure, convenient and quick operation for a front-line detector, and can obtain a faster and more accurate detection result through simple adjustment, thereby saving more time for front-line quality inspection.
2. The detection method of the invention combines the detection system, and is characterized in that the reflection principle of the reflector is utilized to present the comprehensive surface shape image of the prism, so that the detection of the comprehensive surface shape error of the prism by the vertical interferometer becomes possible.
3. When a detection system is designed, the horizontal angle compensator and the inclined plane angle compensator in the reflector device are designed to realize that the measured surface of the prism is parallel to the height of the camera through the improved horizontal angle compensator and the improved inclined plane compensator, the interference factors of the test process are avoided by adjusting the angles of the reflector and the end surface of the prism, finally, the system improvement is carried out from various angles, and the purpose of rapid and accurate comprehensive surface shape detection is realized.
4. The interferometer testing range and flexibility are increased, and the operation cost is reduced. The observation system after the transformation of the vertical interferometer can simultaneously have the test function of the horizontal interferometer, can achieve the same comprehensive surface shape test precision as the horizontal interferometer, does not need to spend high expense on purchasing the horizontal interferometer for the pre-inspection of daily production, saves the floor area of equipment and the production cost of enterprises, and improves the comprehensive utilization rate and the production efficiency of the equipment.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic view of the inspection system of the present invention without adjusting the position of the prism;
FIG. 2 is a schematic diagram of the inspection system with the prism position adjusted.
Fig. 3 is a schematic diagram of a horizontal angle compensator.
FIG. 4 is an enlarged view of portion A of FIG. 3;
fig. 5 is a schematic view of a mirror arrangement.
FIG. 6 is a schematic diagram of a levelness calibrator.
Fig. 7 is a schematic view of a prism product in an embodiment.
FIG. 8 is a diagram illustrating the effect of the detection without the addition of the mirror device and the horizontal angle compensator.
FIG. 9 is a diagram showing the effect of detection when a mirror device and a horizontal angle compensator are added.
Wherein:
1. a laser interferometer; 2. a prism; 3. a detection table;
4. a horizontal angle compensator;
41. fixing the disc;
42. a piston propulsion assembly; 421. a piston handle; 422. a piston plate;
43. an air bag compensation assembly; 431. finely adjusting the flat plate; 432. a first air bag; 433. a first air charging device; 434. a second air bag; 435. a second inflator 435; 436. a damping rotating shaft;
44. the end surface fine tuning support component; 441. fine tuning the groove; 442. finely adjusting the sliding block; 443. a fine adjustment rod; 445. a hinged lever; 446. a support wheel;
45. a cylindrical cavity;
5. a mirror device;
51. a fixed seat; 511. an operating chamber;
52. a bevel angle compensator;
521. an operation section; 5211. an operating column; 5212. an adjustment groove; 5213. an operation block; 5214. a circular groove;
522. an adjustment section; 5221. an L-shaped adjustment lever; 5222. a connecting rod;
523. a sliding part; 5231. a seat plate; 5232. a sliding groove; 5233. a slider;
53. a mirror.
6. A parallelism calibrator;
61. a column; 62. a balancing pole; 63. a turntable; 64. a support bar; 65. a horizontal bar; 66. a diagonal bar;
7. and detecting the terminal.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description, fig. 7 shows a schematic diagram of a prism 2 product, and it can be seen that there are 4 polished surfaces and a comprehensive error between the 4 polished surfaces, which is called as comprehensive surface error detection, a general detection prism 2 is divided into a single surface and a comprehensive surface, and when there is no mirror at present, the existing detection is shown in fig. 8, which shows the surface condition of the single surface, but needs to detect the comprehensive surface error of the 4 polished surfaces, and the existing interferometer cannot detect the comprehensive surface error, and at the same time, because of the light path of the product itself, including the reason of the angle and the reflection intensity of the reflection are not enough to show the comprehensive surface of the prism 2.
The image will disappear by the reflecting surface of the reflector being visible through the occlusion.
The comprehensive surface image is presented through reflection, then the software sets a detection aperture area required by a client, the software captures the image, the image is analyzed through computer software after being shot by a high-definition camera, the presented data is compared with the requirement of a client drawing, and the image is qualified if the presented data is smaller than the requirement of the client drawing.
On one hand, the application provides a rapid and accurate detection system for the comprehensive surface shape error of the prism 2 based on the laser interferometer 1, taking a vertical type vertical laser interferometer as an example, as shown in fig. 1 to 6, and the system comprises:
the laser interferometer 1 is arranged above the horizontal angle compensator 4 and used for measuring the surface related parameters of the prism 2;
in particular, the parallelism calibrator 6 is arranged on the detection table 3 and positioned between the vertical laser interferometer 1 and the horizontal angle compensator 4 to calibrate the parallelism between the lens of the laser interferometer 1 and the surface of the prism 2; the parallelism calibrator 6 includes: an upright post 61 fixed on the detection table 3; a rotating component which is rotatably arranged on the upright post 61; the Z-shaped calibration component is fixedly arranged on the side surface of the rotating component; a balance rod 62 horizontally penetrates through the Z-shaped calibration assembly and is always parallel to the lens of the laser interferometer 1;
the rotating assembly includes: two turntables 63 rotatably disposed at upper and lower positions of the column 61, respectively; and the two support rods 64 are respectively vertically connected between the two turntables 63 in parallel.
The "Z-shaped" calibration assembly includes:
two horizontal rods 65 are respectively fixed on the side surfaces of the two turntables 63 in an up-down corresponding manner; the inclined rod 66 is connected between the end parts of the two horizontal rods 65 and forms a Z-shaped structural part with the two horizontal rods 65, the balance rod 62 is clamped in a groove in the inclined rod 66, the balance rod 62 can move up and down under the action of friction force between the balance rod 62 and the groove, the stability of the balance rod 62 at any position can be guaranteed, the balance rod 62 is made of light materials as far as possible, the upper horizontal rod 65 is horizontally attached to the lens of the laser interferometer 1, and the lower horizontal rod 65 is positioned at the lower end of the upright post 61, so that the adjusting range is enlarged.
During operation, after the prism 2 is placed on the horizontal angle compensator 4 in advance, the rotating assembly is rotated to a position below a lens of the laser interferometer 1, the rotating assembly is slowly placed on a guide frame of the Z-shaped calibration assembly, the inclined rod 66 is used as a guide target at a constant speed, the balance rod 62 is moved downwards on the inclined rod 66, meanwhile, the left end of the balance rod 62 is movably inserted into a groove in the side surface of the upright post 61, two points of convenience are convenient to determine a straight line, the balance rod 62 always moves linearly in the two grooves of the inclined rod 66 and the upright post 61 and is guided by the inclined rod 66, the balance rod 62 always can keep a position relation parallel to the upper horizontal rod 65 to move downwards until the position is moved to the upper end face of the prism 2, and is attached to a part of the upper end face of the prism 2, so that the levelness of the upper end face of the prism 2 can be adjusted below;
particularly, the horizontal angle compensator 4 is arranged on the detection platform 3, is used for placing the prism 2, and adjusts the parallelism between the lens of the laser interferometer 1 and the prism 2 through the horizontal angle compensator 4;
the horizontal angle compensator 4 includes: a fixed disk 41, a piston advancing assembly 42, an air bag compensating assembly 43, and end face fine adjustment support assemblies 44, wherein,
a fixed disc 41 arranged on the detection table 3 and provided with a cylindrical cavity 45 with an open upper end;
a piston propulsion assembly 42 disposed within the cylindrical cavity 45; the piston propulsion assembly 42 includes: a piston handle 421 which is connected with the fixed disk 41 by screw thread, and an adjusting cavity for rotatably adjusting the piston handle 421 is arranged above the fixed disk 41; a piston plate 422 fixed to the upper end of the piston handle 421 and located in the cylindrical cavity 45;
during operation, the piston handle 421 drives the piston plate 422 to rotate upwards and move slowly by manually rotating the piston handle 421, so that the piston plate 422 is slowly moved out of the cylindrical cavity 45 at a constant speed;
an air bag compensation assembly 43 arranged on the upper end surface of the piston propulsion assembly 42; the air bag compensating module 43 includes:
the fine tuning flat plate 431 is connected with the piston plate 422 through a damping rotating shaft 436, and a fine tuning gap is arranged between the fine tuning flat plate 431 and the piston plate 422; the first air bag 432 is arranged on one half surface of the upper end surface of the fine tuning flat plate 431 and is connected with the first inflating device 433; the second air bag 434 is arranged on the other half surface of the upper end surface of the fine adjustment flat plate 431 and is connected with the second air charging device 435; the sizes of the first air bag 432 and the second air bag 434 are different, the first air bag 432 and the second air bag 434 are arranged according to actual needs, the purpose is to meet the structural structures of the bottoms of different prisms 2, and meanwhile, when the first air bag 432 and the second air bag 434 are arranged, the first air bag 432 and the second air bag 434 respectively occupy half of the area of the upper end face of the fine tuning flat plate 431, so that the irregular structure of the bottom face of the prism 2 can be considered, and the unevenness of the bottom face of the prism 2 can be better compensated;
during operation, in the process that the piston plate 422 gradually moves upwards, after the piston plate 422 is moved out visually, the damping rotating shaft 436 is adjusted manually, the fine tuning flat plate 431 can be finely tuned to be inclined due to a certain adjusting gap existing between the fine tuning flat plate 431 and the piston plate 422, the purpose is to be matched with the bottom surface of the prism 2, the operation can be correspondingly adjusted according to the actual bottom surface structure of the prism 2, and can not be adjusted, and finally, the interiors of the first air bag 432 and the second air bag 434 are simultaneously inflated by extruding the first air inflation device 433 and the second air inflation device 435, so that the final angle compensation is realized, the first air bag 432 and the second air bag 434 can be better attached to the bottom surface of the prism 2, the bottom surface of the prism 2 is lifted, and the upper end surface of the prism 2 and the lens of the vertical laser interferometer 1 realize the purpose of primary horizontal angle adjustment;
an end fine tuning support assembly 44 disposed on opposite sides of the mounting plate 41, the end fine tuning support assembly 44 comprising: a fine adjustment groove 441 arranged on the side surface of the fixed disk 41, and a fine adjustment sliding block 442 capable of interacting up and down is arranged in the fine adjustment groove 441; a fine adjustment rod 443, the bottom end of which is hinged with the fine adjustment slide block 442, and the middle part of which is hinged with the side surface of the fixed disc 41 through a cylindrical cavity 45 of the hinge rod 4; a support wheel 446 fixed to the top end of the fine adjustment rod 443;
during operation, according to the levelness calibrator, the final fine adjustment and stable support are performed on the parallelism between the upper end surface of the prism 2 and the lens of the laser interferometer 1 by combining the horizontal angle compensator 4, specifically, the fine adjustment slider 442 is moved to drive the fine adjustment rod 443 to slightly move up and down, the support wheel 446 is abutted against the bottom surface of the prism 2, and finally the fine adjustment slider 442 is limited by the puller bolt under the guidance of the balance rod 62, so that the levelness is finally determined.
Particularly, the reflecting mirror device 5 is arranged on the side surface of the horizontal angle compensator 4 at intervals through a base and is used for matching with the laser interferometer 1 to present the light path of the comprehensive surface shape of the prism 2; comprises a fixed seat 51, an inclined plane angle compensator 52 and a reflector;
the fixed seat 51 is arranged on the detection table 3, an operation cavity 511 is arranged in the fixed seat 51, the specific inclination angle is set according to actual needs, the fixed seat 51 can be movably arranged on the detection table 3 through a horizontal seat, the arrangement of the horizontal seat can ensure the balance of the fixed seat 51, and meanwhile, the fixed seat 51 can be driven by the horizontal seat to move on the detection table 3, so that the distance between the prism 2 and the reflector device 5 can be quickly adjusted according to needs;
a slope angle compensator 52 provided at an interval on the side of the horizontal angle compensator 4;
it includes: an operation part 521 disposed above the fixing base 51; a sliding part 523 arranged on one side surface of the fixed seat 51 close to the prism 2 and hinged with the operation part 521; an adjusting part 522 provided between the operation part 521 and the sliding part 523;
the operation unit 521 includes:
an operating post 5211, which is divided into a threaded section and a smooth section, the smooth section is fixed in the operating cavity 511 of the fixing seat 51, the threaded end extends to the outside of the fixing seat 51, and an adjusting groove 5212 for adjusting the adjusting portion 522 is formed on the side surface of the operating post 5211; an operation block 5213 screwed on the operation post 5211, and a ring of circular grooves 5214 are formed in the upper end surface of the operation block 5213;
the adjusting portion 522 includes:
an L-shaped adjusting rod 52221 slidably disposed in the adjusting groove 5212; a link rod 5222 having one end hinged to the L-shaped adjustment rod 52221 and the other end connected to the sliding part 523;
the sliding portion 523 includes:
a seat plate 5231 fixedly connected to the reflector; a slide groove 5232 formed in the seat plate 5231; a slider 5233 slidably disposed in the sliding groove 5232, and the other end of the connecting rod 5222 is hinged to the slider;
the reflecting mirror 53 is arranged on the outer side surface of the sliding part 523 and used for adjusting the side included angle between the reflecting mirror and the prism 2 under the adjusting action of the inclined surface angle compensator 52;
during operation, the operation block 5213 is manually rotated, the operation block 5213 can push the L-shaped adjusting rod 52221 to move in the adjusting groove 5212 under the action of screw rotation, so as to drive the connecting rod 5222 to slide in the sliding groove 5232 and jack up the seat plate 5231, so that the purpose of forming an included angle between the reflector and the side surface of the prism 2 is realized, the circular groove 5214 is designed to ensure that the L-shaped adjusting rod 52221 always slides in the circular groove 5214 in the adjusting process, so that the connecting rod 5222 cannot rotate along with the operation block 5213, and the purpose of better operation is achieved;
the detection terminal 7 is connected with the laser interferometer 1 and used in a matched mode, and is used for counting, analyzing and displaying the acquired image data; the detection terminal 7 comprises a camera display screen which mainly displays image images and also displays a software analysis system.
On the other hand, the application provides a method for rapidly and accurately detecting the comprehensive surface shape error of the prism 2 based on the laser interferometer 1, which comprises the following steps:
s1: installing a detection table 3, a laser interferometer 1 and a detection terminal 7, and enabling the vertical laser interferometer 1 to be positioned right above the detection table 3;
s2: a reflector device 5 is additionally arranged on the detection table 3;
s3: putting the prism 2 on a detection table 3, starting the vertical laser interferometer 1, and adjusting a lens of the laser interferometer 1 to be always parallel to the upper surface of the prism 2 through the horizontal angle compensator 4; compensating the angle between the surfaces of the prism 2 product directly according to the horizontal angle compensator 4;
s4: adjusting the requirement of the included angle between the reflector device 5 and the prism 2 according to the light path of the prism 2 to ensure that the prism 2 is not parallel to the reflector device 5; the reflecting mirrors in the reflecting mirror device 5 can be arranged according to the light paths of different surfaces of the prism 2;
s5: after the detection positions of the prism 2 and the reflector device 5 are adjusted in step S4, the vertical laser interferometer 1 is combined to take a picture, the comprehensive surface image of the prism 2 is presented by reflection, the collected image data is transmitted to the detection terminal 7, and the final detection result is displayed after statistics and analysis are performed by a program built in the computer.
The step S1 further includes a step of calibrating the parallelism between the prism 2 and the laser interferometer 1, the parallelism calibrator 6 calibrates the parallelism in real time, and the parallelism calibrator 6 is used as a reference for calibrating the parallelism between the upper surface of the prism 2 and the lens of the laser interferometer 1.
The compensation angle of the horizontal angle compensator 4 in the step S3 is 0 to 5 °; in step S4, the included angle between the mirror device 5 and the prism 2 ranges from 0 ° 10 'to 0 ° 20'.
In the invention, the reflector is not added randomly, the reflector and the surface to be reflected cannot be completely parallel according to the light path of the product, a relative included angle is formed, the angle has a certain range, if the reflector and the surface to be reflected are too parallel, the detection of the comprehensive surface shape is interfered, the image of the comprehensive surface has the interference of a surface image, the comprehensive image of the surface is detected, the real light passing area of the comprehensive image or the part of the area is used when a client uses the comprehensive image, and therefore, the detection of the unused surface is interfered. Adjust the mesa, let detect face and camera lens must be parallel, if form the contained angle, the image will be unclear, this application has designed speculum device 5, has installed the inclined plane angle compensator 52 that can carry out following angle compensation to the speculum additional in the design installation speculum simultaneously, contained angle between regulation speculum that can be accurate fast and the prism 2 is applicable to the detection requirement of different prisms 2.
In addition, there is the contained angle between two faces of product, and is not parallel, so need have the compensation of a horizontal angle, because the camera lens of interferometer is fixed, does a horizontal angle compensation piece, lets the product detect the face parallel with the camera lens, just can realize the quick accurate fine setting to 2 horizontal angles of prism through the horizontal angle compensator 4 that this application designed.
Example, the prism 2 in FIG. 1 is used as the prism 2 for detection,
1. the detection system is adopted for detection, the prism 2 is placed on the horizontal angle compensator 4 in advance before detection, the rotating assembly is rotated to the position below the vertical laser interferometer 1, the balancing rod 62 is slowly moved at a constant speed until the balancing rod reaches the upper end face of the prism 2 and the balancing rod is partially just attached to the upper end face, and the horizontal angle of the prism 2 needs to be compensated for 1-5 degrees; 2. manually rotating the adjusting movable handle to drive the piston plate 422 to move upwards, and simultaneously slightly rotating the damping rotating shaft 436 after the piston plate 422 is moved out of the cylindrical cavity 45 to incline the fine adjustment flat plate 431, lift the position of the notch on the bottom surface of the prism 2 and roughly adjust the levelness of the bottom surface of the prism 2;
3. the first inflation device 433 and the second inflation device 435 are simultaneously squeezed by two hands, and when the first air bag 432 and the second air bag 434 are gradually full, the bottom surface of the prism 2 is finely adjusted, so that the upper end surface of the prism 2 is basically and horizontally attached to the balance rod 62;
4. the two end faces of the prism 2 are operated to perform final fine adjustment and support, the fine adjustment sliding block 442 is manually slid, the supporting wheels 446 on the side faces of the two ends of the fixed disc 41 are attached to the bottom face of the prism 2, the balance rod 62 is observed again, the bottom face of the balance rod 62 is completely attached to the upper end face of the prism 2, and at the moment, the fine adjustment sliding block 442 is tightly pushed through a puller bolt, so that the final accurate adjustment of the parallelism of 0-5 degrees is realized;
5. starting the laser interferometer 1, firstly presenting an image, clicking a detection command key, and enabling the image to flash at one time in a gap of about 3 seconds, so that the camera is a high-definition camera;
6. meanwhile, the reflector can be finely adjusted in the detection process, the distance and the angle between the reflector on the reflector device 5 and the right side surface of the prism 2 are adjusted, the angle is adjusted firstly, the included angle between the right side surface of the prism 2 and the reflector is 0-20', the best included angle is obtained, the operation block 5213 is rotated manually, the L-shaped adjusting rod 52221 is driven to move in the adjusting groove 5212 of the operation column 5211, the connecting rod 5222 is further pushed to slide in the sliding groove 5232, the seat plate 5231 is jacked up for a certain angle finally, the purpose of adjusting the angle between the prism 2 and the reflector is realized, the non-parallel position relation exists between the prism 2 and the reflector, and after the angle is adjusted, the distance between the prism 2 and the reflector can be adjusted by directly moving the position of the fixing seat 51 on the surface of the detection table 3;
7. after the adjustment is completed, the camera is shot, the data of the image is transmitted to a program in a host at the rear end after the camera is shot, and a computer program analyzes the data, such as the amount of irregular data of the surface shape, the detection of interference fringes and the like.
Referring to fig. 8, as shown in fig. 9,
fig. 8 shows the test result before the attachment, and only the surface shape accuracy RMSi of the vertical plane can be measured, and the measurement value is 0.048.
Fig. 9 shows the test result after installation, which can test the comprehensive surface shape accuracy RMSi, and the measured value is 0.089.
Analysis of results
The prior art is as follows: due to the limitation of the existing equipment, the surface shape precision of one surface can only be tested independently in the current single test, and the numerical value of the surface shape precision test is only the precision test data of the single surface;
according to the application, after improvement: the design method can detect the comprehensive precision data of four surfaces at one time, and the numerical value of the comprehensive precision data is the comprehensive precision test data obtained by 'superposing' the four surfaces; the detection value of the method better meets the test requirements of customers, and the actual application scene of the customers is the comprehensive precision of four surfaces. Therefore, the single-surface RMSi value of a single surface is lower than the comprehensive surface shape accuracy RMSi value of four surfaces, and the lower the test value is, the higher the accuracy is; the application tests the comprehensive surface shape formed by adding 4 surfaces, the testing precision of the equipment is kept unchanged, but the final testing value is certainly slightly larger than the testing value of a single surface, and as can be seen from the testing value data of figures 8 and 9, the testing value of the comprehensive surface shape tested by adopting the device and the method of the application and the testing value of the single surface shape adopted in the prior art have certain differences, the better and more comprehensive testing effect of the scheme of the application can be better demonstrated, and the target value of a client can be more approached.
The points to be noted are: the detection precision of the machine is always kept unchanged, only the surface shape precision numerical value of a detected product is passively reflected, and the invention aims at achieving the purpose of improving the equipment use range by utilizing various designs, namely, the single surface shape data detection is optimized into the comprehensive surface shape data detection method, so that the more satisfactory degree is achieved from the perspective of customers.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention, and all simple modifications, alterations and equivalent changes made to the above embodiments according to the technical spirit of the present invention still fall within the protection scope of the technical solution of the present invention.
Claims (10)
1. Quick accurate detecting system of prism integrated surface shape error based on vertical laser interferometer which characterized in that includes:
the laser interferometer is arranged above the horizontal angle compensator and is used for measuring the surface related parameters of the prism;
the horizontal angle compensator is arranged on the detection table, is used for placing a prism and adjusts the parallelism between the lens of the vertical laser interferometer and the prism through the horizontal angle compensator;
the reflecting mirror device is arranged on the side surface of the horizontal angle compensator at intervals through the base and is used for matching with the vertical laser interferometer to present the light path of the comprehensive surface shape of the prism;
the parallelism calibrator is arranged on the detection table and positioned between the vertical laser interferometer and the horizontal angle compensator and is used for calibrating the parallelism of the lens of the vertical laser interferometer and the surface of the prism;
and the detection terminal system is connected with the vertical laser interferometer and used for counting and analyzing the acquired image data.
2. The system for rapidly and accurately detecting the integrated profile error of the prism based on the vertical laser interferometer according to claim 1, wherein the horizontal angle compensator comprises:
the fixed disc is arranged on the detection table and is provided with a cylindrical cavity with an opening at the upper end;
a piston propulsion assembly disposed within the cylindrical cavity;
the air bag compensation assembly is arranged on the upper end surface of the piston propelling assembly;
and one end surface fine tuning support assembly arranged on two opposite side surfaces of the fixed disc.
3. The system for rapidly and accurately detecting the integrated profile error of a prism based on a vertical laser interferometer according to claim 2,
the piston propulsion assembly includes:
the piston handle is in threaded connection with the fixed disc;
the piston plate is fixed at the upper end of the piston handle and is positioned in the cylindrical cavity;
the air bag compensation assembly comprises:
the fine tuning flat plate is connected with the piston plate through a damping rotating shaft, and a fine tuning gap is formed between the fine tuning flat plate and the piston plate;
the first air bag is arranged on one half surface of the upper end surface of the fine adjustment flat plate and is connected with the first air charging device;
the second air bag is arranged on the other half surface of the upper end surface of the fine adjustment flat plate and is connected with the second air charging device;
the terminal surface fine setting supporting component includes:
the fine adjustment groove is formed in the side face of the fixed disc, and a fine adjustment sliding block capable of interacting up and down is arranged in the fine adjustment groove;
the bottom end of the fine adjustment rod is hinged with the fine adjustment sliding block, and the middle part of the fine adjustment rod is hinged to the side surface of the fixed disc through a hinge rod;
and the supporting wheel is fixed at the top end of the fine adjustment rod.
4. The system for rapidly and accurately detecting the integrated profile error of the prism based on the vertical laser interferometer according to claim 1, wherein the mirror means comprises:
the fixed seat is arranged on the detection table, and an operation cavity is arranged in the fixed seat;
the inclined plane angle compensator is arranged on the side of the horizontal angle compensator at intervals;
it includes:
an operating part arranged above the fixed seat;
the sliding part is arranged on one side surface of the fixed seat close to the prism and is hinged with the operation part;
an adjusting part arranged between the operating part and the sliding part;
and the reflecting mirror is arranged on the outer side surface of the sliding part, and the side included angle between the reflecting mirror and the prism is adjusted under the adjusting action of the inclined surface angle compensator.
5. The system for rapidly and accurately detecting the integrated profile error of the prism based on the vertical laser interferometer according to claim 4,
the operation portion includes:
the operating column is divided into a threaded section and a smooth section, the smooth section is fixed in the operating cavity of the fixed seat, the threaded end extends to the outside of the fixed seat, and an adjusting groove for adjusting the adjusting part is formed in the side surface of the operating column;
the operating block is sleeved on the operating column in a threaded manner, and a circle of circular groove is formed in the upper end face of the operating block;
the adjusting part includes:
the L-shaped adjusting rod is arranged in the adjusting groove in a sliding manner;
one end of the connecting rod is hinged with the L-shaped adjusting rod, and the other end of the connecting rod is connected with the sliding part;
the sliding part includes:
the seat board is fixedly connected with the reflector;
a sliding groove arranged on the seat board;
and the sliding block is arranged in a sliding manner with the sliding groove, and the other end of the connecting rod is hinged with the sliding block.
6. The system for rapidly and accurately detecting the integrated profile error of a prism based on a vertical laser interferometer according to claim 1,
the parallelism calibrator comprises:
the upright post is fixed on the detection platform;
the rotating assembly is rotatably arranged on the upright post;
the Z-shaped calibration component is fixedly arranged on the side surface of the rotating component;
and the balance rod horizontally penetrates through the Z-shaped calibration assembly and is always parallel to the lens of the vertical laser interferometer.
7. The system for rapidly and accurately detecting the integrated profile error of a prism based on a vertical laser interferometer according to claim 6,
the rotating assembly includes:
the two turntables are respectively and rotatably arranged at the upper and lower positions of the upright post;
two support rods are respectively and vertically connected between the two turntables in parallel.
The "Z-shaped" calibration assembly includes:
the two horizontal rods are respectively fixed on the side surfaces of the two turntables in an up-down corresponding manner;
and the inclined rod is connected between the end parts of the two horizontal rods and forms a Z-shaped structural member together with the two horizontal rods.
8. The method for the rapid and accurate detection system of the prism comprehensive surface shape error based on the vertical laser interferometer of any one of claims 1 to 7, which comprises the following steps:
s1: installing a detection table, a laser interferometer and a detection terminal, and enabling the laser interferometer to be positioned right above the detection table;
s2: a reflector device is additionally arranged on the detection table;
s3: putting the prism on a detection table, starting the vertical laser interferometer, and adjusting the lens of the laser interferometer to be always parallel to the upper surface of the prism through the horizontal angle compensator;
s4: adjusting the requirement of the included angle between the reflector device and the prism according to the light path of the prism, and ensuring that the end surface of the prism and the reflector device are kept within a certain angle range;
s5: after the detection positions of the prism and the reflector device are adjusted through the step S4, the vertical laser interferometer is combined to shoot, the comprehensive surface image of the prism is presented through reflection, the collected image data are transmitted to a detection terminal, statistics and analysis are carried out through a built-in program of a computer, and the final detection result is displayed.
9. The method as claimed in claim 8, wherein the step S1 further comprises calibrating the parallelism between the prism and the laser interferometer lens by a parallelism calibrator, which is used as a reference for calibrating the parallelism between the upper surface of the prism and the laser interferometer lens.
10. The method according to claim 9, wherein the compensation angle of the horizontal angle compensator in the step S3 is 0-5 °; in step S4, the included angle between the mirror device and the prism end face is 0 ° 10'-0 ° 20', and the reflecting surface of the mirror and the reference surface are kept within the included angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210370982.8A CN114877823A (en) | 2022-04-11 | 2022-04-11 | System and method for quickly and accurately detecting prism comprehensive surface shape error based on vertical laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210370982.8A CN114877823A (en) | 2022-04-11 | 2022-04-11 | System and method for quickly and accurately detecting prism comprehensive surface shape error based on vertical laser interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114877823A true CN114877823A (en) | 2022-08-09 |
Family
ID=82669372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210370982.8A Withdrawn CN114877823A (en) | 2022-04-11 | 2022-04-11 | System and method for quickly and accurately detecting prism comprehensive surface shape error based on vertical laser interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114877823A (en) |
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2022
- 2022-04-11 CN CN202210370982.8A patent/CN114877823A/en not_active Withdrawn
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Application publication date: 20220809 |