CN114877552A - Miniature throttling refrigerator, application method thereof and infrared detector - Google Patents
Miniature throttling refrigerator, application method thereof and infrared detector Download PDFInfo
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- CN114877552A CN114877552A CN202210254106.9A CN202210254106A CN114877552A CN 114877552 A CN114877552 A CN 114877552A CN 202210254106 A CN202210254106 A CN 202210254106A CN 114877552 A CN114877552 A CN 114877552A
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- 238000000034 method Methods 0.000 title claims abstract description 9
- 238000005057 refrigeration Methods 0.000 claims abstract description 193
- 239000001257 hydrogen Substances 0.000 claims abstract description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 10
- 229910052754 neon Inorganic materials 0.000 claims abstract description 10
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000001307 helium Substances 0.000 claims abstract description 7
- 229910052734 helium Inorganic materials 0.000 claims abstract description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000012530 fluid Substances 0.000 claims description 101
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical group [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 9
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 239000012528 membrane Substances 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000000399 optical microscopy Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/30—Expansion means; Dispositions thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/40—Fluid line arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Abstract
The invention relates to a miniature throttling refrigerator which comprises a refrigerating plate, wherein a plurality of stages of refrigerating modules are formed in the refrigerating plate, and the stages of refrigerating modules are sequentially arranged along the thickness direction of the refrigerating plate. The application method of the throttling refrigerator and the infrared detector provided with the throttling refrigerator are also related. In the invention, the micro throttling refrigerator adopts a plurality of refrigeration modules distributed in a hierarchical manner, and the previous refrigeration module can cool the next refrigeration module, so that the throttling refrigeration effect of the working medium of each refrigeration module behind the first refrigeration module can be realized at a lower conversion temperature, such as hydrogen, neon, helium and other working mediums, the application range of the working medium can be effectively widened, and meanwhile, the refrigeration temperature below 70K can be realized on the ultra-micro refrigerator.
Description
Technical Field
The invention belongs to the technical field of throttling refrigerators, and particularly relates to a micro throttling refrigerator, an application method thereof and an infrared detector provided with the micro throttling refrigerator.
Background
The ultra-miniature throttle refrigerator (MMR) has the characteristics of novel process, small size, low vibration, no magnetism and the like, is invented by the professor Little of Stanford university in the United states in the 70 s of 20 th century, and is successfully applied to electronic technology and superconducting technology, such as California university adopts MMR to cool an optical detector of a 500 x 500 array charge-coupled device, and Japan Tokyo university adopts MMR as a sample cooler of a differential light diffractometer; in addition, there are many applications in microelectronics and solid state science, such as the measurement of properties of small samples, electron and optical microscopy, and the like.
Under the condition of room temperature, the single-stage ultramicro throttling refrigerator can only adopt the fluid with the throttling conversion temperature higher than the room temperature, and for the fluid with the throttling conversion temperature lower than the room temperature, such as neon, hydrogen, helium and other fluids, the single-stage throttling refrigerator can not generate the throttling refrigeration effect, so that the minimum refrigeration temperature of the throttling refrigeration is limited.
Disclosure of Invention
The invention relates to a micro throttling refrigerator, an application method thereof and an infrared detector provided with the micro throttling refrigerator, which can at least solve part of defects in the prior art.
The invention relates to a miniature throttling refrigerator which comprises a refrigerating plate, wherein a plurality of stages of refrigerating modules are formed in the refrigerating plate, and the stages of refrigerating modules are sequentially arranged along the thickness direction of the refrigerating plate.
As one embodiment, each stage of refrigeration module comprises a high-pressure fluid channel and a low-pressure fluid channel which are arranged in layers in the thickness direction of the refrigeration plate and are communicated through a throttling expansion unit, and in the two adjacent stages of refrigeration modules, the low-pressure fluid channel of the previous stage of refrigeration module is adjacent to the high-pressure fluid channel of the next stage of refrigeration module.
In one embodiment, the refrigeration plate comprises a plurality of stacked refrigeration unit plates, and each of the high pressure fluid passages and each of the low pressure fluid passages are distributed in each of the refrigeration unit plates.
As one embodiment, the high pressure fluid passage and the low pressure fluid passage of each stage of the refrigeration module are respectively formed on two adjacent refrigeration unit plates.
As one embodiment, the high-pressure fluid channel and the low-pressure fluid channel of each stage of refrigeration module are respectively formed on two side plate surfaces of the same refrigeration unit plate, and the fluid channels between two adjacent refrigeration unit plates are not in series flow with each other.
In one embodiment, each of the refrigeration unit plates is a glass plate, and the high-pressure fluid channel and the low-pressure fluid channel are microchannels lithographically etched in the corresponding plate body.
As one embodiment, the air inlet of the next-stage refrigeration module is arranged corresponding to the middle part of the low-pressure fluid channel of the previous-stage refrigeration module, wherein the working medium flowing directions of the low-pressure fluid channel and the high-pressure fluid channels on the two sides are opposite.
In one embodiment, the high pressure fluid channel includes a plurality of high pressure flow path segments distributed in a serpentine shape and connected in series, each high pressure flow path segment having a serpentine flow path.
The invention also relates to an application method of the micro throttling refrigerator, which comprises the following steps:
the throttle refrigerator adopts a two-stage refrigeration module, wherein,
the primary refrigeration module adopts a first refrigeration working medium, and the first refrigeration working medium is argon or nitrogen; the secondary refrigeration module adopts a second refrigeration working medium, and the second refrigeration working medium is neon or hydrogen;
alternatively, the first and second electrodes may be,
the throttling refrigerator adopts a three-stage refrigeration module, wherein,
the primary refrigeration module adopts a first refrigeration working medium, and the first refrigeration working medium is argon or nitrogen; the secondary refrigeration module adopts a second refrigeration working medium, and the second refrigeration working medium is neon or hydrogen; the third-stage refrigeration module adopts a third refrigeration working medium, and the third refrigeration working medium is helium.
The invention also relates to an infrared detector which is provided with the miniature throttling refrigerator.
The invention has at least the following beneficial effects:
in the invention, the micro throttling refrigerator adopts a plurality of refrigeration modules distributed in a hierarchical manner, and the previous refrigeration module can cool the next refrigeration module, so that the throttling refrigeration effect of the working medium of each refrigeration module behind the first refrigeration module can be realized at a lower conversion temperature, such as hydrogen, neon, helium and other working mediums, the application range of the working medium can be effectively widened, and meanwhile, the refrigeration temperature below 70K can be realized on the ultra-micro refrigerator.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a micro throttle refrigerator according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of the primary high-voltage side unit plate of FIG. 1;
FIG. 3 is a schematic structural view of a primary low-pressure side unit plate of FIG. 1;
FIG. 4 is a schematic structural view of the secondary high side cell plate of FIG. 1;
fig. 5 is a schematic structural view of the secondary low pressure side unit plate of fig. 1.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
Referring to fig. 1, an embodiment of the present invention provides a micro throttling refrigerator, including a refrigeration plate, where multiple stages of refrigeration modules are formed in the refrigeration plate, and the refrigeration modules at different stages are sequentially arranged along a thickness direction of the refrigeration plate.
The micro throttling refrigerator adopts the multi-stage refrigeration modules distributed in a hierarchical manner, and the upper stage refrigeration module can cool the lower stage refrigeration module, so that the throttling refrigeration effect of the working medium of each stage refrigeration module behind the first stage refrigeration module can be realized at a lower conversion temperature, such as working media of hydrogen, neon, helium and the like, the application range of the working medium can be effectively widened, and meanwhile, the refrigeration temperature below 70K can be realized on the ultra-micro refrigerator.
Preferably, each stage of refrigeration module comprises a high-pressure fluid passage 21 and a low-pressure fluid passage 22 which are arranged in layers in the thickness direction of the refrigeration plate and are communicated through a throttling expansion unit, and in the adjacent two stages of refrigeration modules, the low-pressure fluid passage 22 of the previous stage of refrigeration module is adjacent to the high-pressure fluid passage 21 of the next stage of refrigeration module.
The high-pressure fluid passage 21 and the low-pressure fluid passage 22 are microchannels. In order to facilitate the processing of the high-pressure fluid channels 21 and the low-pressure fluid channels 22, preferably, the refrigeration plate includes a plurality of refrigeration unit plates, each high-pressure fluid channel 21 and each low-pressure fluid channel 22 are distributed on each refrigeration unit plate, after the corresponding fluid channel is processed on the corresponding refrigeration unit plate, the refrigeration unit plates are overlapped and connected to form the refrigeration plate, and particularly, the refrigeration unit plates can be sealed and combined together in a bonding manner.
The throttle expansion unit includes a throttle element 231 and an expansion chamber 232, an inlet end of the throttle element 231 is connected to an outlet end of the high-pressure fluid passage 21, an outlet end of the throttle element 231 is communicated with the expansion chamber 232, and an outlet end of the expansion chamber 232 is connected to an inlet end of the low-pressure fluid passage 22. The throttling element 231 may be provided with a plurality of channels side by side to prevent one of the channels from clogging and interfering with the proper operation of the refrigerator.
In one embodiment, as shown in fig. 1-5, the high pressure fluid passage 21 and the low pressure fluid passage 22 of each stage of the refrigeration module are formed on two adjacent refrigeration unit plates, respectively. For convenience of description, in the present embodiment, the refrigeration unit plate provided with the high-pressure fluid passage 21 is defined as a high-pressure side unit plate, and the refrigeration unit plate provided with the low-pressure fluid passage 22 is defined as a low-pressure side unit plate. And further, a cover plate is superposed on the high-pressure side unit plate of the primary refrigeration module.
Taking a two-stage refrigeration module as an example, correspondingly, as shown in fig. 1 to 5, the refrigeration plate includes 5 plate bodies, which are a cover plate 11, a first-stage high-pressure-side unit plate 12, a first-stage low-pressure-side unit plate 13, a second-stage high-pressure-side unit plate 14, and a second-stage low-pressure-side unit plate 15 in sequence. Preferably, the air inlet of the primary refrigeration module is perforated by the cover plate 11 and extends to the primary high-pressure side unit plate 12, and the air outlet of the primary refrigeration module can be arranged on the side wall of the primary low-pressure side unit plate 13; the air inlet of the secondary refrigeration module is punched by the secondary low-pressure side unit plate 15 and extends to the secondary high-pressure side unit plate 14, and the air outlet of the secondary refrigeration module can be arranged on the side wall or the plate surface of the secondary low-pressure side unit plate 15.
Optionally, the thickness of the high-pressure side unit plate and the low-pressure side unit plate is within the range of 0.1-0.3 mm; controlling the distance between the high pressure fluid passage 21 and the low pressure fluid passage 22 of the same stage and the distance between the high pressure fluid passage 21 and the low pressure fluid passage 22 of the adjacent stage can reduce the heat leakage loss of the refrigerator.
With regard to the arrangement of the throttling expansion unit described above, it is preferable that in each stage of the refrigeration module, the throttling element 231 communicates with the high-pressure fluid passage 21 and both are formed on the same refrigeration unit plate, and the expansion chamber 232 extends from one of the refrigeration unit plates to the other and both ends communicate with the throttling element 231 and the low-pressure fluid passage 22, respectively. That is, the above-described throttling element 231 is formed on the high pressure side unit plate, and the expansion chamber 232 extends from the high pressure side unit plate to the low pressure side unit plate.
In another embodiment, the high-pressure fluid channel 21 and the low-pressure fluid channel 22 of each stage of the refrigeration module are respectively formed on two side plate surfaces of the same refrigeration unit plate, and the fluid channels between two adjacent refrigeration unit plates are not in series flow with each other. Preferably, the high-pressure side plate surface of the first-stage refrigeration module and the low-pressure side plate surface of the last-stage refrigeration module are respectively overlapped with a cover plate. Taking a two-stage refrigeration module as an example, correspondingly, the refrigeration plate comprises 4 plate bodies, namely an upper cover plate, a first-stage refrigeration unit plate, a second-stage refrigeration unit plate and a lower cover plate in sequence. Preferably, the air inlet of the primary refrigeration module is punched by the upper cover plate and extends to the primary refrigeration unit plate, and the air outlet of the primary refrigeration module can be arranged on the side wall of the primary refrigeration unit plate; the air inlet of the secondary refrigeration module is punched by the lower cover plate and extends to the secondary refrigeration unit plate, and the air outlet of the secondary refrigeration module can be arranged on the side wall of the secondary refrigeration unit plate.
A heat-conducting membrane can be clamped between two adjacent refrigerating unit plates so that fluid channels between the two adjacent refrigerating unit plates are not mutually connected in series; the heat-conducting membrane is preferably a metal membrane, so that the pressure resistance is ensured, and the heat exchange efficiency is good; the above-mentioned heat conductive membrane can be formed by growing metal on the refrigeration unit plate by means of sputtering or thermal evaporation. In another scheme, the low-pressure fluid passage 22 of the upper stage refrigeration module and the high-pressure fluid passage 21 of the lower stage refrigeration module are arranged in a staggered manner, so that the purpose of enabling the fluid passages between two adjacent refrigeration unit plates not to be in series flow with each other can be achieved.
Preferably, each refrigeration unit plate is a glass plate, and the heat conductivity coefficient of the glass plate is small, so that the radial heat conduction and heat leakage loss of the refrigerator can be effectively reduced; the cover plate may be a glass plate. Further preferably, the high-pressure fluid passage 21, the low-pressure fluid passage 22 and the throttling element 231 are all formed by photoetching, and particularly, for a glass plate type refrigeration unit plate, the processing and forming are easy, and the processing quality of the micro-throttling refrigerator/ultra-micro throttling refrigerator can be ensured.
Preferably, as shown in fig. 2 to 5, the high-pressure fluid channel 21 is arranged in a serpentine manner, and the low-pressure fluid channel 22 is also preferably arranged in a serpentine manner, so as to improve the heat exchange area and the heat exchange efficiency; wherein the passage sectional area of the low-pressure fluid passage 22 is larger than the passage sectional area of the high-pressure fluid passage 21. Preferably, a rib is provided in the low pressure fluid channel 22 to improve heat exchange efficiency.
Preferably, as shown in fig. 2 and 4, the high pressure fluid channel 21 includes a plurality of high pressure flow path segments, which are distributed in a serpentine shape and connected in sequence, and each of the high pressure flow path segments adopts a serpentine flow path. Based on the scheme, the heat exchange area of the high-pressure fluid channel 21 can be remarkably increased, and the refrigeration effect and efficiency are improved; and under the condition of meeting the refrigeration requirement, the size of the refrigerator can be further reduced, and the refrigerator can be conveniently integrated into an infrared detector.
Further preferably, as shown in fig. 2 to 5, in the same-stage refrigeration module, the high-pressure fluid channel 21 is opposite to the low-pressure fluid channel 22, for example, the refrigeration plate is horizontally disposed, the high-pressure fluid channel 21 is located right above or right below the low-pressure fluid channel 22, the low-temperature working medium in the low-pressure fluid channel 22 can pre-cool the high-temperature working medium in the high-pressure fluid channel 21, and the working medium flowing direction in the high-pressure fluid channel 21 is opposite to the working medium flowing direction in the low-pressure fluid channel 22 (i.e., a countercurrent heat exchange effect is formed), so that the refrigeration efficiency and effect can be effectively improved.
Further, as shown in fig. 3 and 4, the air inlet of the next-stage refrigeration module is disposed corresponding to the middle portion of the low-pressure fluid passage 22 of the previous-stage refrigeration module, and the previous-stage low-pressure fluid passage 22 can rapidly cool the next-stage high-pressure fluid passage 21, so that the working medium of the next-stage refrigeration module is rapidly cooled to the conversion temperature thereof.
In this embodiment, a multi-stage refrigeration module is adopted, the low-pressure fluid passage 22 in the refrigeration module at the same stage can cool the high-pressure fluid passage 21, and the low-pressure fluid passage 22 of the refrigeration module at the previous stage can also cool the high-pressure fluid passage 21 of the refrigeration module at the next stage, so that the throttling refrigeration effect of the working medium of the refrigeration module at each stage behind the refrigeration module at the first stage is easy to realize, the refrigeration efficiency is remarkably improved, the refrigeration temperature range and the working medium application range of the throttling refrigerator can be effectively widened, and the refrigeration temperature can reach below the liquid nitrogen temperature, for example.
In one embodiment, as shown in fig. 3 and 4, the high-pressure fluid channel 21 of the next-stage refrigeration module and the low-pressure fluid channel 22 of the previous-stage refrigeration module only have partial overlapping heat exchange, for example, the air inlet of the high-pressure fluid channel 21 of the next-stage refrigeration module is opposite to the middle of the low-pressure fluid channel 22 of the previous-stage refrigeration module, on one hand, the working medium flowing direction of the high-pressure fluid channel 21 of the two is opposite to the working medium flowing direction of the low-pressure fluid channel 22, so that the effect of countercurrent heat exchange can be achieved; on the other hand, the low-pressure fluid passage 22 of the previous-stage refrigeration module can better satisfy the cooling requirements for the high-pressure fluid passage 21 of the previous-stage refrigeration module and the high-pressure fluid passage 21 of the next-stage refrigeration module, wherein the high-pressure fluid passage 21 of the next-stage refrigeration module can be rapidly cooled.
The embodiment of the invention also provides an application method of the micro throttling refrigerator, which comprises the following steps:
the throttle refrigerator adopts a two-stage refrigeration module, wherein,
the primary refrigeration module adopts a first refrigeration working medium, and the first refrigeration working medium is argon or nitrogen; the secondary refrigeration module adopts a second refrigeration working medium, and the second refrigeration working medium is neon or hydrogen;
alternatively, the first and second electrodes may be,
the throttling refrigerator adopts a three-stage refrigeration module, wherein,
the primary refrigeration module adopts a first refrigeration working medium, and the first refrigeration working medium is argon or nitrogen; the secondary refrigeration module adopts a second refrigeration working medium, and the second refrigeration working medium is neon or hydrogen; the third-stage refrigeration module adopts a third refrigeration working medium, and the third refrigeration working medium is helium.
Therefore, the micro throttling refrigerator provided by the embodiment can adopt the working medium with the highest conversion temperature lower than the normal temperature, and has a wide application range.
Example two
The embodiment of the invention provides an infrared detector which is provided with the micro throttling refrigerator provided by the first embodiment.
The arrangement structure of the micro throttling refrigerator in the detector is conventional in the art, and is not described in detail herein.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A miniature throttle refrigerator which characterized in that: the refrigeration plate comprises a refrigeration plate, wherein multiple stages of refrigeration modules are formed in the refrigeration plate, and the refrigeration modules at different stages are sequentially arranged along the thickness direction of the refrigeration plate.
2. A micro throttle cooler according to claim 1, wherein: each stage of refrigeration module comprises a high-pressure fluid channel and a low-pressure fluid channel which are arranged in a layered mode in the thickness direction of the refrigeration plate and are communicated through a throttling expansion unit, and in the two adjacent stages of refrigeration modules, the low-pressure fluid channel of the previous stage of refrigeration module is adjacent to the high-pressure fluid channel of the next stage of refrigeration module.
3. A micro throttle cooler according to claim 2, wherein: the refrigeration plate comprises a plurality of stacked refrigeration unit plates, and each high-pressure fluid channel and each low-pressure fluid channel are distributed on each refrigeration unit plate.
4. A micro throttle cooler according to claim 3, wherein: the high-pressure fluid channel and the low-pressure fluid channel of each stage of refrigeration module are respectively formed on two adjacent refrigeration unit plates.
5. A micro throttle cooler according to claim 3, wherein: the high-pressure fluid channel and the low-pressure fluid channel of each stage of refrigeration module are respectively formed on the two side plate surfaces of the same refrigeration unit plate, and the fluid channels between two adjacent refrigeration unit plates are not mutually connected in series.
6. A micro throttle cooler according to claim 3, wherein: each refrigeration unit plate is a glass plate, and the high-pressure fluid channel and the low-pressure fluid channel are microchannels etched on corresponding plate bodies in a photoetching mode.
7. The micro throttle cooler as set forth in claim 2, wherein: the air inlet of the next-stage refrigeration module is arranged corresponding to the middle part of the low-pressure fluid channel of the previous-stage refrigeration module, wherein the working medium circulation directions of the low-pressure fluid channel and the high-pressure fluid channels on the two sides are opposite.
8. The micro throttle cooler as set forth in claim 2, wherein: the high pressure fluid channel comprises a plurality of high pressure runner segments which are distributed in a serpentine shape and are connected in sequence, and each high pressure runner segment adopts a serpentine runner.
9. The method of using a micro throttle cooler according to any one of claims 1 to 8, comprising:
the throttle refrigerator adopts a two-stage refrigeration module, wherein,
the primary refrigeration module adopts a first refrigeration working medium, and the first refrigeration working medium is argon or nitrogen; the secondary refrigeration module adopts a second refrigeration working medium, and the second refrigeration working medium is neon or hydrogen;
alternatively, the first and second electrodes may be,
the throttling refrigerator adopts a three-stage refrigeration module, wherein,
the primary refrigeration module adopts a first refrigeration working medium, and the first refrigeration working medium is argon or nitrogen; the secondary refrigeration module adopts a second refrigeration working medium, and the second refrigeration working medium is neon or hydrogen; the third-stage refrigeration module adopts a third refrigeration working medium, and the third refrigeration working medium is helium.
10. An infrared detector, characterized in that: a micro throttle refrigerator according to any one of claims 1 to 8 is provided.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115468332A (en) * | 2022-08-26 | 2022-12-13 | 武汉高芯科技有限公司 | Throttling refrigerator and throttling refrigeration infrared detector |
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| CN110486978A (en) * | 2019-08-29 | 2019-11-22 | 上海理工大学 | Array cylinder group type multilevel stack microchannel throttling heat exchange refrigerator |
| CN113028669A (en) * | 2021-02-10 | 2021-06-25 | 西安交通大学 | Microchannel throttling refrigerator |
| CN113465211A (en) * | 2021-05-31 | 2021-10-01 | 武汉高芯科技有限公司 | Linear Stirling-chip-level throttling composite refrigerator capable of rapidly refrigerating |
| CN114147516A (en) * | 2021-12-02 | 2022-03-08 | 大连理工大学 | Cascade type refrigeration and freezing clamping device |
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