CN114877361A - Combustion equipment for detecting performance of electric wire and cable - Google Patents

Combustion equipment for detecting performance of electric wire and cable Download PDF

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Publication number
CN114877361A
CN114877361A CN202210499024.0A CN202210499024A CN114877361A CN 114877361 A CN114877361 A CN 114877361A CN 202210499024 A CN202210499024 A CN 202210499024A CN 114877361 A CN114877361 A CN 114877361A
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China
Prior art keywords
wall
box
shell
electric wire
performance
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Pending
Application number
CN202210499024.0A
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Chinese (zh)
Inventor
杨国刚
李慧
沈凡凡
许泽权
谢文祥
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Zhongcheng Jinjian Hubei Engineering Technology Co ltd
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Zhongcheng Jinjian Hubei Engineering Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Zhongcheng Jinjian Hubei Engineering Technology Co ltd filed Critical Zhongcheng Jinjian Hubei Engineering Technology Co ltd
Priority to CN202210499024.0A priority Critical patent/CN114877361A/en
Publication of CN114877361A publication Critical patent/CN114877361A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00Arrangements of devices for treating smoke or fumes
    • F23J15/02Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/022Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow
    • F23J15/025Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow using filters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J1/00Removing ash, clinker, or slag from combustion chambers
    • F23J1/06Mechanically-operated devices, e.g. clinker pushers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

Abstract

The invention discloses a combustion device for detecting the performance of an electric wire and a cable, which comprises a shell, a clamping box and a supporting box, wherein the clamping box is installed on the inner wall of the shell, the supporting box is installed on the top of the shell, a first clamping block is installed on the inner wall of the clamping box, an opening is formed in the outer wall of the clamping box, a first sleeve is installed on the top of the clamping box in a penetrating mode, and a first support rod is installed on the inner wall of the first sleeve in a penetrating mode. The invention realizes the quick fixation of the sample and the quick removal of the combustion residues, improves the detection efficiency, can discharge the gas generated by the combustion of the sample after purification, avoids the direct pollution of the toxic and harmful gas to the atmosphere, and simultaneously, removes the residues after the combustion through mechanical equipment, thereby reducing the potential safety hazard to detection personnel.

Description

Combustion equipment for detecting performance of electric wire and cable
Technical Field
The invention relates to the technical field of wires and cables, in particular to a combustion device for detecting the performance of a wire and cable.
Background
In modern society, with the popularization of information-based intelligence, people increasingly rely on electric wires and cables for transmitting electric energy and data in production and life, and the electric wires and cables are similar to the nervous system of a huge machine in a city, and extend to each corner of the city, a street lamp and a well cover, and the electric wires and cables are distributed on the electric wires and cables.
The dense cable aggregation is a huge disaster in case of fire, and the better the flame retardant performance of the electric wire and cable, a part of other properties such as the reduction of physical and technological properties of the material, the difficulty of operation and the increase of material cost are lost, so the flame retardant performance of the electric wire and cable needs to be tested to provide a basis for research and development and production.
The existing combustion equipment for detecting the performance of the electric wire and the electric cable has the defects that:
1. when the existing combustion equipment for detecting the performance of the electric wire and the electric cable works, the fixed wire body is mostly bound manually, so that time is consumed, and the detection efficiency is reduced;
2. the existing detection equipment directly exhausts waste gas generated in the combustion process to the atmosphere through an exhaust system, is easy to cause damage to detection personnel and is not beneficial to environmental protection;
3. after the existing detection equipment finishes detection, combustion residues need to be manually stripped, and if the temperature of the residues is too high, the operation is carried out at the moment, so that danger is brought to detection personnel;
4. the manual cleaning of the residues reduces the detection efficiency and is not beneficial to the rapid detection operation.
Disclosure of Invention
The invention aims to provide a combustion device for detecting the performance of an electric wire and a cable, which aims to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the combustion equipment for detecting the performance of the electric wire and the cable comprises a shell, a clamping box and a supporting box, wherein the clamping box is installed on the inner wall of the shell, and the supporting box is installed at the top of the shell;
the inner wall of the card box is provided with a first clamping block, the outer wall of the card box is provided with an opening, the top of the card box is provided with a first sleeve in a penetrating manner, the inner wall of the first sleeve is provided with a first supporting rod in a penetrating manner, one end of the first supporting rod is provided with a second clamping head, the outer wall of the first supporting rod is provided with a second supporting rod, the outer wall of the second supporting rod is provided with a first spring, and one end of the first spring is connected with the inner wall of the card box;
the supporting plate is installed on the inner wall of the shell, the supporting box is installed at the bottom of the supporting plate, the slide way is installed on the inner wall of the shell, the third supporting rod is installed on the inner wall of the shell, the machine door is installed on the outer wall of the shell, the button is installed on the outer wall of the shell, the second supporting rod rebounds to enable the second clamping head to push the line body to the first clamping block, the line body is rapidly fixed, manpower is saved, and the function of rapidly fixing the line body and saving the manpower is achieved.
Preferably, a reaction box is installed to the inner wall of a box, a first pipeline is installed in the top of the reaction box in a penetrating mode, a filter box is installed to one end of the first pipeline, a second pipeline is installed in the outer wall of the reaction box in a penetrating mode, one end of the second pipeline extends to the inside of the shell, a suction head is installed to one end of the second pipeline, a fan is installed to the inner wall of the second pipeline, purified gas is discharged through the first pipeline, the toxic gas is prevented from injuring workers, and the function of preventing the toxic gas from injuring the workers is achieved.
Preferably, the motor is installed to the inner wall of support box, and the runner is installed to the output of motor, and fourth branch is installed through the bearing to the one end of runner, and the top of extension board is run through and is installed the second sleeve, and the one end of fourth branch runs through the telescopic both ends of second, and the top is installed to the one end of fourth branch.
Preferably, the pulley is installed to the inner wall of slide, and the collection box is installed to the one end of pulley, and fifth branch is installed at the top of extension board, and the telescopic link is installed to the outer wall of fifth branch, and the scraper blade is installed to the output of telescopic link.
Preferably, the bottom of the housing is provided with a support block.
Preferably, the top of the support plate is provided with a through hole.
Preferably, the outer wall of the third supporting rod is provided with a flame projecting head.
Preferably, the outer wall of the machine door is provided with a handle, and the outer wall of the machine door is provided with an observation window.
Preferably, the inner wall of the housing is provided with a detection block.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the first spring, the first clamping block and the second supporting rod are installed, so that the effect of saving manpower for quickly fixing the line body is realized, the first supporting rod is pulled to drive the second supporting rod to move, the second supporting rod drives the first spring to move, the first spring moves to enable the second clamping head to move, the line body is placed into the clamping box through the opening, the first supporting rod is loosened, the second supporting rod is driven by the first spring to rebound, the second supporting rod rebounds to enable the second clamping head to push the line body to the first clamping block, so that the line body is quickly fixed, the manpower is saved, and the function of saving the manpower for quickly fixing the line body is realized;
2. the reaction box, the second pipeline and the fan are arranged, so that the effect of avoiding toxic gas from injuring workers is achieved, reaction liquid is prevented from splashing out under the action of the filter box, smoke generated by combustion is sucked into the second pipeline through the suction head due to rotation of the fan, harmful gas is transmitted into the reaction box through the second pipeline, the gas is purified by the reaction liquid in the reaction box, the purified gas is discharged through the first pipeline, the harm of the toxic gas to the workers is avoided, and the function of avoiding the harm of the toxic gas to the workers is achieved; meanwhile, the purified gas is discharged, so that the pollution to the natural environment is reduced;
3. according to the invention, the fourth support rod, the motor and the rotating wheel are arranged, so that the effect of preventing workers from manually stripping stains and improving the safety is realized, the second sleeve is used for supporting the fourth support rod, the motor rotates to drive the rotating wheel to rotate, the rotating wheel rotates to drive the bearing to move, the bearing moves to drive the fourth support rod to move, the fourth support rod moves to drive the top head to move, the top head moves to shake off stains attached to a line body after combustion, the workers are prevented from manually stripping stains and improving the safety, and the function of preventing the workers from manually stripping stains and improving the safety is realized;
4. according to the automatic stain cleaning device, the scraping plates, the telescopic rods and the pulleys are mounted, so that the effects of automatic stain cleaning and quick stain moving-out are achieved, the stains are shaken and fall onto the surface of the support plate, the telescopic rods move to drive the scraping plates to move, the stains fall into the collection box through the through holes by moving the scraping plates, the collection box is pulled to move the pulleys, the stains are quickly moved out by moving the pulleys, and the functions of automatic stain cleaning and quick stain moving-out are achieved.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic view of a portion of the cartridge of the present invention;
FIG. 4 is a schematic view of a partial structure of a cartridge according to the present invention;
FIG. 5 is a schematic view of a portion of the support box of the present invention;
fig. 6 is a schematic view of a partial structure of the slide of the present invention.
In the figure: 1. a housing; 101. a support block; 2. a card box; 201. a first clamping block; 202. a first sleeve; 203. a first support bar; 204. a second chuck; 205. a second support bar; 206. a first spring; 3. a branch box; 301. a second conduit; 302. a suction head; 303. a fan; 304. a reaction box; 305. a first conduit; 306. a filter box; 4. a support box; 401. a motor; 402. a rotating wheel; 403. a fourth strut; 404. a second sleeve; 5. a slideway; 501. a pulley; 502. a collection box; 503. a fifth strut; 504. a telescopic rod; 505. a squeegee; 6. a support plate; 601. a through opening; 7. a third support bar; 701. a flame projecting head; 8. a machine door; 801. a handle; 9. a button; 901. and detecting the block.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 and 2, a combustion apparatus for testing performance of an electric wire and cable comprises a housing 1, a cartridge 2 and a support 3, wherein the housing 1 is used for protecting the apparatus, the cartridge 2 is used for supporting a first fixture block 201, the support 3 is used for supporting a reaction box 304, the cartridge 2 is mounted on an inner wall of the housing 1, the support 3 is mounted on a top of the housing 1, a support plate 6 is mounted on an inner wall of the housing 1, the support plate 6 is used for supporting a support box 4, the support plate 6 is mounted at a bottom of the support plate 4, a slide 5 is mounted on the inner wall of the housing 1, the slide 5 is used for providing a moving place for a pulley 501, a third support rod 7 is mounted on the inner wall of the housing 1, the third support rod 7 is used for supporting a flame spray head 701, a door 8 is mounted on an outer wall of the housing 1, the door 8 is used for facilitating taking materials, a button 9 is mounted on an outer wall of the housing 1, the button 9 is used for controlling the state of the device, the supporting block 101 is installed at the bottom of the shell 1, the supporting block 101 is used for supporting the shell 1, the through hole 601 is formed in the top of the supporting plate 6, the through hole 601 is used for facilitating cleaning of stains, the outer wall of the third supporting rod 7 is provided with the flame burner 701, the flame burner 701 is used for facilitating combustion of a wire body, the outer wall of the machine door 8 is provided with the handle 801, the handle 801 is used for facilitating opening and closing of the machine door 8, the inner wall of the shell 1 is provided with the detection block 901, the detection block 901 is used for detecting the performance of the wire body, the outer wall of the machine door 8 is provided with the observation window, and the observation window is used for facilitating observation of an internal combustion state by a worker;
referring to fig. 2 and 3, a first clamping block 201 is installed on the inner wall of the cartridge 2, an opening is formed on the outer wall of the cartridge 2, a first sleeve 202 is installed on the top of the cartridge 2 in a penetrating manner, a first support rod 203 is installed on the inner wall of the first sleeve 202 in a penetrating manner, a second clamping head 204 is installed at one end of the first support rod 203, a second support rod 205 is installed on the outer wall of the first support rod 203, a first spring 206 is installed on the outer wall of the second support rod 205, one end of the first spring 206 is connected with the inner wall of the cartridge 2, the first support rod 203 is pulled to drive the second support rod 205 to move, the second support rod 205 moves to drive the first spring 206 to move, the first spring 206 moves to move the second clamping head 204, a wire body is placed into the cartridge 2 through the opening, the first support rod 203 is loosened to drive the second support rod 205 to rebound by the first spring 206, the second support rod 205 rebounds to push the wire body 204 to the first clamping block 201 to be quickly fixed, the function of saving labor for quickly fixing the wire body is realized;
referring to fig. 2 and 4, a reaction box 304 is installed on an inner wall of the support box 3, a first pipeline 305 is installed on a top of the reaction box 304 in a penetrating manner, a filter box 306 is installed at one end of the first pipeline 305, a second pipeline 301 is installed on an outer wall of the reaction box 304 in a penetrating manner, one end of the second pipeline 301 extends into the housing 1, a suction head 302 is installed at one end of the second pipeline 301, a fan 303 is installed on an inner wall of the second pipeline 301, the filter box 306 prevents a reaction liquid from splashing out, the fan 303 rotates to suck flue gas generated by combustion into the second pipeline 301 through the suction head 302, the second pipeline 301 transmits harmful gas into the reaction box 304, the reaction liquid in the reaction box 304 purifies the gas, the purified gas is discharged through the first pipeline 305, injury of the toxic gas to workers is avoided, and a function of avoiding the toxic gas from injuring the workers is realized;
referring to fig. 2 and 4, a motor 401 is installed on the inner wall of the support box 4, a rotating wheel 402 is installed at the output end of the motor 401, a fourth supporting rod 403 is installed at one end of the rotating wheel 402 through a bearing, a second sleeve 404 is installed at the top of the support plate 6 in a penetrating manner, one end of the fourth supporting rod 403 penetrates through two ends of the second sleeve 404, a top is installed at one end of the fourth supporting rod 403, the second sleeve 404 is used for supporting the fourth supporting rod 403, the motor 401 rotates to drive the rotating wheel 402 to rotate, the rotating wheel 402 rotates to drive the bearing to move, the bearing moves to drive the fourth supporting rod 403 to move, the fourth supporting rod 403 moves to drive the top to move, the top moves to shake off stains attached to a line body after combustion, the stains are prevented from being manually peeled by a worker, safety is improved, and the function of preventing the worker from manually peeling the stains and improving safety is realized;
referring to fig. 2 and 4, a pulley 501 is installed on the inner wall of the slideway 5, a collection box 502 is installed at one end of the pulley 501, a fifth support rod 503 is installed at the top of the support plate 6, an expansion link 504 is installed on the outer wall of the fifth support rod 503, a scraper 505 is installed at the output end of the expansion link 504, dirt falls to the surface of the support plate 6 by vibration, the expansion link 504 moves to drive the scraper 505 to move, the scraper 505 moves to enable the dirt to fall into the collection box 502 through the through opening 601, the collection box 502 is pulled to drive the pulley 501 to move, the pulley 501 moves to enable the dirt to move out quickly, and the functions of automatically cleaning the dirt and moving the dirt out quickly are achieved.
The working principle is that the shell 1 is used for protecting the device, the card box 2 is used for supporting the first clamping block 201, the support plate 6 is used for supporting the reaction box 304, the slide 5 is used for providing a moving place for the pulley 501, the third support rod 7 is used for supporting the flame-throwing head 701, the door 8 is used for facilitating taking of materials, the button 9 is used for controlling the state of the device, the first support rod 203 is pulled to drive the second support rod 205 to move, the second support rod 205 is moved to drive the first spring 206 to move, the first spring 206 moves to drive the second clamping head 204 to move, the wire body is placed into the card box 2 through the opening, the first support rod 203 is loosened, the first support rod 206 drives the second support rod 205 to rebound, the second support rod 205 rebounds to drive the second clamping head 204 to push the first clamping block 201 to be quickly fixed, and labor is saved, the function of quickly fixing the wire body and saving manpower is realized, the reaction liquid is prevented from splashing under the action of the filter box 306, the smoke generated by combustion is sucked into the second pipeline 301 through the suction head 302 due to the rotation of the fan 303, the harmful gas is transmitted into the reaction box 304 through the second pipeline 301, the gas is purified by the reaction liquid in the reaction box 304, the purified gas is discharged through the first pipeline 305, the injury of the toxic gas to workers is avoided, the function of avoiding the injury of the toxic gas to the workers is realized, the second sleeve 404 is used for providing support for the fourth supporting rod 403, the motor 401 rotates to drive the rotating wheel 402 to rotate, the rotating wheel 402 rotates to drive the bearing to move, the bearing moves to drive the fourth supporting rod 403 to move, the fourth supporting rod 403 moves to drive the top head to move, the stain attached to the wire body after combustion is shaken off due to the movement of the top head, the manual stripping of the workers is avoided, and the safety is improved, the function of avoiding the staff to manually peel off the spot and improving the safety is realized, the spot shakes and falls to the surface of the support plate 6, the telescopic rod 504 moves to drive the scraper blade 505 to move, the scraper blade 505 moves to enable the spot to fall into the collection box 502 through the through hole 601, the collection box 502 is pulled to drive the pulley 501 to move, the pulley 501 moves to enable the spot to move out fast, and the functions of automatic spot cleaning and fast spot moving out are realized.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (9)

1. The utility model provides a wire and cable performance detects uses combustion apparatus, includes shell (1), card box (2) and a box (3), its characterized in that: the inner wall of the shell (1) is provided with a card box (2), and the top of the shell (1) is provided with a support box (3);
the inner wall of the card box (2) is provided with a first clamping block (201), the outer wall of the card box (2) is provided with an opening, the top of the card box (2) is provided with a first sleeve (202) in a penetrating manner, the inner wall of the first sleeve (202) is provided with a first supporting rod (203) in a penetrating manner, one end of the first supporting rod (203) is provided with a second clamping head (204), the outer wall of the first supporting rod (203) is provided with a second supporting rod (205), the outer wall of the second supporting rod (205) is provided with a first spring (206), and one end of the first spring (206) is connected with the inner wall of the card box (2);
extension board (6) are installed to the inner wall of shell (1), support box (4) are installed to the bottom of extension board (6), slide (5) are installed to the inner wall of shell (1), third branch (7) are installed to the inner wall of shell (1), door (8) are installed to the outer wall of shell (1), button (9) are installed to the outer wall of shell (1).
2. The combustion apparatus for detecting the performance of electric wire according to claim 1, wherein: the inner wall of a box (3) is provided with a reaction box (304), the top of the reaction box (304) is provided with a first pipeline (305) in a penetrating way, one end of the first pipeline (305) is provided with a filter box (306), the outer wall of the reaction box (304) is provided with a second pipeline (301) in a penetrating way, one end of the second pipeline (301) extends to the inside of the shell (1), one end of the second pipeline (301) is provided with a suction head (302), and the inner wall of the second pipeline (301) is provided with a fan (303).
3. The combustion apparatus for detecting performance of electric wire according to claim 1, wherein: the inner wall of support box (4) is installed motor (401), and runner (402) are installed to the output of motor (401), and fourth branch (403) are installed through the bearing to the one end of runner (402), and the top of extension board (6) is run through and is installed second sleeve (404), and the both ends of second sleeve (404) are run through to the one end of fourth branch (403), and the top is installed to the one end of fourth branch (403).
4. The combustion apparatus for detecting the performance of electric wire according to claim 1, wherein: pulley (501) are installed to the inner wall of slide (5), and collection box (502) are installed to the one end of pulley (501), and fifth branch (503) are installed at the top of extension board (6), and telescopic link (504) are installed to the outer wall of fifth branch (503), and scraper blade (505) are installed to the output of telescopic link (504).
5. The combustion apparatus for detecting the performance of electric wire according to claim 1, wherein: the bottom of the shell (1) is provided with a supporting block (101).
6. The combustion apparatus for detecting the performance of electric wire according to claim 1, wherein: the top of the support plate (6) is provided with a through hole (601).
7. The combustion apparatus for detecting the performance of electric wire according to claim 1, wherein: and a flame-throwing head (701) is arranged on the outer wall of the third supporting rod (7).
8. The combustion apparatus for detecting the performance of electric wire according to claim 1, wherein: the outer wall of the machine door (8) is provided with a handle (801), and the outer wall of the machine door (8) is provided with an observation window.
9. The combustion apparatus for detecting the performance of electric wire according to claim 1, wherein: the inner wall of the shell (1) is provided with a detection block (901).
CN202210499024.0A 2022-05-09 2022-05-09 Combustion equipment for detecting performance of electric wire and cable Pending CN114877361A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210499024.0A CN114877361A (en) 2022-05-09 2022-05-09 Combustion equipment for detecting performance of electric wire and cable

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210499024.0A CN114877361A (en) 2022-05-09 2022-05-09 Combustion equipment for detecting performance of electric wire and cable

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Publication Number Publication Date
CN114877361A true CN114877361A (en) 2022-08-09

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115537511A (en) * 2022-10-22 2022-12-30 海安华诚新材料有限公司 High-efficiency low-energy-consumption oriented silicon steel plate decarburization annealing device
CN116282863A (en) * 2023-04-11 2023-06-23 江苏晟驰微电子有限公司 Annealing equipment and process for deposited phosphosilicate glass

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115537511A (en) * 2022-10-22 2022-12-30 海安华诚新材料有限公司 High-efficiency low-energy-consumption oriented silicon steel plate decarburization annealing device
CN116282863A (en) * 2023-04-11 2023-06-23 江苏晟驰微电子有限公司 Annealing equipment and process for deposited phosphosilicate glass
CN116282863B (en) * 2023-04-11 2023-11-07 江苏晟驰微电子有限公司 Annealing equipment and process for deposited phosphosilicate glass

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