CN114861024A - Wafer searching method and system based on binary direction priority - Google Patents

Abstract

The invention relates to a wafer searching method and a system based on binary direction priority, wherein the method comprises the following steps: determining a plurality of candidate searching directions according to the two reference searching directions and the corresponding opposite directions thereof, and setting the priorities of the candidate searching directions; taking the searching direction with the highest priority from the candidate searching directions of the wafer existing in the previous searching point as the main candidate searching direction of the current searching point; determining a memory point according to the change of the main candidate search direction of the current search point, and taking the memory point or the diagonal direction of the current search point as one or more secondary candidate search directions when no wafer exists in the candidate search directions; and searching the wafers according to the primary candidate searching direction or the secondary candidate searching direction of the current searching point until all the wafers are traversed. The invention can search the elements only by two search directions under the normal condition, thereby improving the search efficiency; and the relative simplicity of searching the path is ensured while traversing all the elements.

Description

Wafer searching method and system based on binary direction priority

Technical Field

The invention belongs to the technical field of chip packaging, and particularly relates to a wafer searching method and system based on binary direction priority.

Background

In the manufacturing process in the field of electronic packaging, global searching or traversing of elements such as dies (wafers) or chips is often involved, such as detecting, sorting, die bonding, and the like. If traversing search is to be performed on an orderly-arranged element array (as shown in fig. 1), the conventional method generally takes a picture of a current local element in real time by using a camera from an arbitrary starting point, searches for positions of other elements around the element at the current position at the same time through image recognition, and then sequentially determines the position of a next search element according to a specified priority order. Before confirming the next position, the method needs to visually calculate the positions of adjacent elements in at least four peripheral directions (i.e. quaternary directions, such as + X, -X, + Y, -Y), and then directly match the position of the next searching element according to the priorities of the four directions, and in the high-speed real-time processing process, the method occupies larger calculation overhead, thereby influencing the overall searching speed, and a large amount of invalid searching information exists. In addition, in order to ensure the search global, the prior art method has a memory function, i.e. when searching in two negative directions (e.g., -X, -Y), the memory function memorizes the position information of the nearest element in the corresponding positive direction (e.g., + X, + Y), and jumps to the memory after searching to the opposite direction without wafer. However, if the function starts to search from the middle starting point, the first row of wafers is missing (as shown in fig. 2), and the like, the route of the search is too complicated, and the completeness of the search is even affected, or too many manual intervention guides are needed, and the efficiency and the effect of the search are also affected.

Disclosure of Invention

In order to solve the problems of low efficiency and search missing of a wafer or chip traversal search method in the existing chip packaging process, the invention provides a chip search method based on binary direction priority, a plurality of candidate search directions are determined according to two reference search directions and opposite directions corresponding to the two reference search directions, and the priorities of the candidate search directions are set; taking the searching direction with the highest priority from the candidate searching directions of the wafer existing in the previous searching point as the main candidate searching direction of the current searching point; determining a memory point according to the change of the main candidate search direction of the current search point, and taking the memory point or the diagonal direction of the current search point as one or more secondary candidate search directions when no wafer exists in the candidate search directions; and searching the wafers according to the primary candidate searching direction or the secondary candidate searching direction of the current searching point until all the wafers are traversed.

In a second aspect of the present invention, there is provided a wafer search system based on binary direction precedence, comprising: the first determining module is used for determining a plurality of candidate searching directions according to the two reference searching directions and the corresponding opposite directions thereof and setting the priorities of the candidate searching directions; taking the searching direction with the highest priority from the candidate searching directions of the wafer existing in the previous searching point as the main candidate searching direction of the current searching point; the second determining module is used for determining a memory point according to the change of the main candidate searching direction of the current searching point and taking the memory point or the diagonal direction of the current searching point as one or more secondary candidate searching directions when no wafer exists in the candidate searching directions; and the traversing module is used for searching the wafers according to the main candidate searching direction or the secondary candidate searching direction of the current searching point until all the wafers are traversed.

In a third aspect of the present invention, there is provided an electronic device comprising: one or more processors; a storage device for storing one or more programs which, when executed by the one or more processors, cause the one or more processors to implement the binary direction preference based wafer search method provided by the present invention in the first aspect.

In a fourth aspect of the present invention, a computer readable medium is provided, on which a computer program is stored, wherein the computer program, when executed by a processor, implements the binary direction precedence based wafer search method provided in the first aspect of the present invention.

The beneficial effects of the invention are:

1. in general, each point only needs the image recognition system to recognize and search two directions, so that the element searching speed can be ensured to be high. Only in a few cases, multiple directions need to be searched, resulting in a slightly slower speed (e.g., when a search element wraps, when a head is searched in the opposite direction of an arrow, etc.);

2. the method ensures that all elements in the element array are traversed under the normal condition, and compared with the traditional searching method, the searching path is simple and has high execution efficiency.

Drawings

FIG. 1 is a basic flow diagram of a method for maintaining a road network data range of an electronic horizon minimized in some embodiments of the invention;

FIG. 2 is a schematic illustration of an orderly array of elements in some embodiments of the invention;

FIG. 3 is a schematic diagram of searching for problematic arrays of elements using existing methods in some embodiments of the invention;

FIG. 4 is a schematic diagram of a search at a location on a wafer blue film in some embodiments of the invention;

FIG. 5 is a priority diagram of each arrow direction in some embodiments of the invention;

FIG. 6 is a flow chart of a search when a search point is in a blue-positive state in some embodiments of the invention;

FIG. 7 is a search flow chart illustrating a search point in a red positive state according to some embodiments of the invention

FIG. 8 is a search flow chart illustrating a search point in a red-negative state according to some embodiments of the invention

FIG. 9 is a search flow chart illustrating a search point in a BLUE-BACK state according to some embodiments of the invention

FIG. 10 is a flow chart of searching when a search point is in a starting point state in some embodiments of the invention

FIG. 11 is a schematic diagram of a path for searching a wafer based on a binary direction-first wafer search method in an embodiment of the present invention;

FIG. 12 is a block diagram of a binary direction-based wafer search system in accordance with some embodiments of the invention;

fig. 13 is a schematic structural diagram of an electronic device in some embodiments of the invention.

Detailed Description

The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.

Referring to fig. 1 to 4, in a first aspect of the present invention, there is provided a binary direction-based wafer searching method, including: s100, determining a plurality of candidate searching directions according to the two reference searching directions and the corresponding opposite directions thereof, and setting the priorities of the candidate searching directions; taking the searching direction with the highest priority from the candidate searching directions of the wafer existing in the previous searching point as the main candidate searching direction of the current searching point; s200, determining a memory point according to the change of the main candidate search direction of the current search point, and taking the memory point or the diagonal direction of the current search point as one or more secondary candidate search directions when no wafer exists in the candidate search directions; s300, searching the wafer according to the main candidate searching direction or the secondary candidate searching direction of the current searching point until all wafers are traversed.

It can be understood that die bonding is an important packaging process in the semiconductor industry, and the automatic die bonding machine is more and more widely applied due to the influence of factors such as labor cost and the like. An important step in the die bonding process is to sequentially remove the dies from the wafer blue film according to a certain rule, that is, an array of dies arranged in a certain overall shape according to a certain rule is arranged on the wafer blue film. This step requires that the chips around the current position are identified, then the next chip is searched according to the established rule, and finally the chips on the blue film of the wafer can be fixed on the PCB board in sequence. The search state (corresponding to the memory mechanism) in the embodiment of the present invention is represented as a preset search direction (a main candidate search direction of a previous search point) of a next search point, and the search point corresponds to a relative position or an absolute position of an element such as a wafer or a chip in an array thereof. Therefore, the above-mentioned chip searching method based on binary direction preference can also be applied to searching of other wafer or chip elements.

Without loss of generality, in some step S100 of the embodiments of the present invention, the determining a plurality of candidate search directions according to two reference search directions and their corresponding opposite directions, and setting priorities thereof includes: taking the horizontal right direction and the vertical downward direction as two reference searching directions, and taking the corresponding opposite direction and the reference searching direction as candidate searching directions; the priority of the candidate search direction is from high to low: vertically upwards, horizontally leftwards, horizontally rightwards and horizontally downwards. Two reference search directions

Specifically, the wafer searching method specifically comprises the following steps: s1: two positive search directions, namely a blue arrow direction (X axis) and a red arrow direction (Y axis) in fig. 4, are set, and hereinafter referred to as a blue positive direction and a red positive direction, respectively; conversely, the backward direction of the blue arrow and the backward direction of the red arrow are called blue-light and red-light, respectively. The direction is prioritized as: red reverse (upper) > blue reverse (left) > blue positive (right) > red positive (lower); s2: each point is provided with a state, facilitating the following method to be performed separately. Possible states are: red positive, blue positive, red negative, blue negative, initial point state; s3: firstly, when searching at the current point, the direction of the last searching point is (old element) which does not need to be searched (except the initial state); s4: the overall method for searching comprises the following steps: it is only necessary to search for the two of the remaining three directions (axis directions) having higher priority (priority order is shown in S1) at first, and if neither of the two directions is present, the third is searched. If the direction is not right, left, right, then go to search for the diagonal direction (the priority of the diagonal direction: upper left > upper right > lower left > lower right); s5: every time the first element moves in the blue-reverse direction, the coordinates of the first element point in the blue-forward direction are memorized. If there are no elements, the memory is not memorized, and the memory point is covered and emptied after one use. S6: when moving in the opposite direction of the arrow and jumping to the memory point, the line feed does not change the direction of the arrow. Line feed changes the direction of the blue arrow when moving in the positive direction of the arrow.

In step S200 of some embodiments of the present invention, the taking the diagonal direction of the memory point or the current search point as one or more sub-candidate search directions when there is no wafer in the candidate search direction includes: s201, if the current search point is in a blue-reverse search state or a red-reverse search state, and the first chip in the prior candidate search direction specified by the state is traversed (namely the set memory point jump condition is met), jumping to the memory point, and taking the search state of the current search point as the search state of the memory point.

Further, the step of using the diagonal direction of the memory point or the current search point as one or more sub-candidate search directions when there is no wafer in the candidate search directions further includes: s202, if no wafer exists on the next search point of the candidate search direction of the current search point and the memory point is empty, the diagonal direction of the current search point is upgraded to the candidate search direction for searching.

Specifically, there are two cases of memory point jumping: firstly, the wafer is in a red reverse state, namely when the wafer is taken to move in a red reverse direction, the wafer is taken out, and then the wafer is searched for in a blue reverse direction; if yes, taking crystal to move in the direction opposite to the blue direction; similarly, when there is no chip in the blue reverse direction, the blue forward direction is searched; if there is no chip in the above directions, the memory point is skipped, if the memory point is empty, the diagonal direction is searched, and if there is a chip in the diagonal direction, the chip is searched in the diagonal direction. If none of the above, reporting an error: elements cannot be searched and need to be adjusted manually. Secondly, when the crystal is taken and moved in the reverse direction of blue, searching and taking the crystal in the reverse directions of red and blue according to the rule, and jumping to a memory point if no crystal exists in the reverse directions of red and blue; if the memory point is empty, searching in the positive direction: if the wafer exists in the positive direction, searching in the positive direction; otherwise, searching the diagonal direction, and if the diagonal direction moves to the diagonal direction, searching the diagonal direction. If none of the above, reporting an error: elements cannot be searched, and manual adjustment is needed; alternatively, the positive directions represented by the positive blue and the positive red can be interchanged, and the representation colors (red or blue) can be replaced by other colors, or corresponding marks or identifications can be used for distinguishing different search directions.

In step S200 of some embodiments of the present invention, the determining a memory point according to a change in a main candidate search direction of the current search point includes: if the search state of the current search point is not consistent with the search state of the previous search point for the first time (if and only if searching to the second priority direction of all the candidate search directions, namely the horizontal left direction for the first time), the first search point of the current search point in the opposite direction of the search state is taken as a memory point.

Referring to fig. 6-11, fig. 11 shows the path that a wafer will take using this method to search for an aligned array of wafer elements on a blue film. If the line needs to be changed due to the fact that the line moves to the head according to the positive direction of the arrow in the whole search period, the positive direction of the blue arrow is reversed once. The specific search path includes: when the wafer search is performed using this method from the starting point using the search flow shown in fig. 10, i.e., when there is a wafer in both the red-reverse direction and the blue-reverse direction, the search is moved to the red-reverse direction with a higher priority, and the next point is recorded as the red-reverse state.

At this time, the search is continued in the reverse direction to the red until point a, at which point a is in the reverse state, and the search flow shown in fig. 8 is used, i.e., the search is performed in the two directions with higher priority, i.e., the red direction has no wafer, and the blue direction has a wafer, the search is performed in the reverse direction to the blue direction, and at the same time, the position of the first wafer C in the blue direction is recorded, and the next point is recorded as the reverse state to the blue direction.

At this time, the search is performed in the blue-reverse direction until the point B, which is in the blue-reverse state, and the search flow shown in fig. 9 is used, that is, the chip is not found in both the red-reverse direction and the blue-reverse direction with the higher search priority, but the memory point is found, the position of the memory point C is skipped to, and the point C is recorded as the blue-positive state.

At this time, the search is continued according to the above rule until point E, at which point E is in the red-plus state, and the search flow shown in fig. 7 is used, that is, the two directions with higher priority of blue-plus and blue-plus are searched first, and if there is a wafer in blue-plus, the wafer is moved in the blue-minus direction, and at the same time, the position of the first wafer F in blue-plus is recorded, and the next point is recorded as the blue-plus state.

And continuing to search according to the searching method until a point D is searched, wherein the point D is in a blue-reversed state, and using the searching process shown in FIG. 9, namely searching for a chip in the red-reversed direction and the blue-reversed direction with high priority, jumping to the position of a memory point F if the memory point exists, and recording the point F as the blue-positive state. And then, the rules are continuously and repeatedly used for searching, and finally the terminal point can be searched, namely a better global searching route is obtained in less time. It will be appreciated that the above method is equivalent to searching the wafer according to the primary candidate search direction or the secondary candidate search direction of the current search point and its search state until all wafers are traversed.

Example 2

Referring to fig. 12, in a second aspect of the present invention, there is provided a binary direction-based wafer search system 1, comprising: a first determining module 11, configured to determine multiple candidate search directions according to two reference search directions and opposite directions corresponding to the two reference search directions, and set priorities of the candidate search directions; taking the searching direction with the highest priority from the candidate searching directions of the wafer existing in the previous searching point as the main candidate searching direction of the current searching point; a second determining module 12, configured to determine a memory point according to a change in a main candidate search direction of a current search point, and use the memory point or a diagonal direction of the current search point as one or more sub-candidate search directions when there is no wafer in the candidate search directions; and a traversing module 13, configured to search the wafer according to the primary candidate search direction or the secondary candidate search direction of the current search point until all wafers are traversed.

In some embodiments of the invention, said first determination module 11 comprises: a first determining unit, configured to determine a plurality of candidate search directions according to two reference search directions and opposite directions corresponding thereto, and set priorities thereof; and the second determining unit is used for taking the searching direction with the highest priority as the main candidate searching direction of the current searching point from the candidate searching directions of the existing wafer of the previous searching point.

Example 3

Referring to fig. 13, in a third aspect of the present invention, there is provided an electronic apparatus comprising: one or more processors; storage means for storing one or more programs which, when executed by the one or more processors, cause the one or more processors to carry out the method of the invention in the first aspect.

Electronic device 500 may include a processing means (e.g., central processing unit, graphics processor, etc.) 501 that may perform various appropriate actions and processes in accordance with a program stored in a Read Only Memory (ROM)502 or a program loaded from a storage means 508 into a Random Access Memory (RAM) 503. In the RAM503, various programs and data necessary for the operation of the electronic apparatus 500 are also stored. The processing device 501, the ROM502, and the RAM503 are connected to each other through a bus 504. An input/output (I/O) interface 505 is also connected to bus 504.

The following devices may be connected to the I/O interface 505 in general: input devices 506 including, for example, a touch screen, touch pad, keyboard, mouse, camera, microphone, accelerometer, gyroscope, etc.; output devices 507 including, for example, a Liquid Crystal Display (LCD), speakers, vibrators, and the like; a storage device 508 including, for example, a hard disk; and a communication device 509. The communication means 509 may allow the electronic device 500 to communicate with other devices wirelessly or by wire to exchange data. While fig. 13 illustrates an electronic device 500 having various means, it is to be understood that not all illustrated means are required to be implemented or provided. More or fewer devices may be alternatively implemented or provided. Each block shown in fig. 13 may represent one device or may represent a plurality of devices as necessary.

In particular, according to an embodiment of the present disclosure, the processes described above with reference to the flowcharts may be implemented as computer software programs. For example, embodiments of the present disclosure include a computer program product comprising a computer program embodied on a computer readable medium, the computer program comprising program code for performing the method illustrated in the flow chart. In such an embodiment, the computer program may be downloaded and installed from a network via the communication means 509, or installed from the storage means 508, or installed from the ROM 502. The computer program, when executed by the processing device 501, performs the above-described functions defined in the methods of embodiments of the present disclosure. It should be noted that the computer readable medium described in the embodiments of the present disclosure may be a computer readable signal medium or a computer readable storage medium or any combination of the two. A computer readable storage medium may be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the foregoing. More specific examples of the computer readable storage medium may include, but are not limited to: an electrical connection having one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing. In embodiments of the disclosure, a computer readable storage medium may be any tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device. In embodiments of the present disclosure, however, a computer readable signal medium may comprise a propagated data signal with computer readable program code embodied therein, for example, in baseband or as part of a carrier wave. Such a propagated data signal may take many forms, including, but not limited to, electro-magnetic, optical, or any suitable combination thereof. A computer readable signal medium may also be any computer readable medium that is not a computer readable storage medium and that can communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device. Program code embodied on a computer readable medium may be transmitted using any appropriate medium, including but not limited to: electrical wires, optical cables, RF (radio frequency), etc., or any suitable combination of the foregoing.

The computer readable medium may be embodied in the electronic device; or may exist separately without being assembled into the electronic device. The computer readable medium carries one or more computer programs which, when executed by the electronic device, cause the electronic device to:

computer program code for carrying out operations for embodiments of the present disclosure may be written in any combination of one or more programming languages, including an object oriented programming language such as Java, Smalltalk, C + +, Python, and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The program code may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or the connection may be made to an external computer (for example, through the Internet using an Internet service provider).

The flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present disclosure. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, which is intended to cover any modifications, equivalents, improvements, etc. within the spirit and scope of the present invention.

Claims (10)

1. A wafer searching method based on binary direction priority is characterized by comprising the following steps:

determining a plurality of candidate searching directions according to the two reference searching directions and the corresponding opposite directions thereof, and setting the priorities of the candidate searching directions; taking the searching direction with the highest priority from the candidate searching directions of the wafer existing in the previous searching point as the main candidate searching direction of the current searching point;

determining a memory point according to the change of the main candidate search direction of the current search point, and taking the memory point or the diagonal direction of the current search point as one or more secondary candidate search directions when no wafer exists in the candidate search directions;

and searching the wafers according to the primary candidate searching direction or the secondary candidate searching direction of the current searching point until all the wafers are traversed.

2. The binary direction-first based wafer search method as claimed in claim 1, wherein said determining the memory point according to the variation of the main candidate search direction of the current search point comprises:

and if the main candidate searching direction of the current searching point is not consistent with the main candidate searching direction of the previous searching point for the first time, taking the first searching point of the current searching point on the reverse direction of the main candidate searching direction as a memory point.

3. The binary direction-first wafer search method as claimed in claim 2, wherein said taking the diagonal direction of the memory point or the current search point as one or more sub-candidate search directions when there is no wafer in the candidate search directions comprises:

if the current search point is in the opposite direction of the reference search direction and the first chip in the main candidate search direction has been traversed, jumping to the memory point, and using the search state of the current search point as the main candidate search direction of the memory point.

4. The binary direction-first wafer search method as claimed in claim 2, wherein said taking the diagonal direction of the memory point or the current search point as one or more sub-candidate search directions when there is no wafer in the candidate search directions further comprises:

if no wafer exists on the next search point in the candidate search direction of the current search point and the memory point is empty, the diagonal direction of the current search point is upgraded to the main candidate search direction for searching.

5. The binary direction-first based wafer search method of any one of claims 2 to 4, wherein the memory dots are emptied after one use.

6. The binary direction-first based wafer search method of any one of claims 1 to 4, wherein determining the candidate search directions according to the two reference search directions and their corresponding opposite directions and setting their priorities comprises:

taking the horizontal right direction and the vertical downward direction as two reference searching directions, and taking the corresponding opposite direction and the reference searching direction as candidate searching directions;

the priority of the candidate search direction is from high to low: vertically up, horizontally left, horizontally right, horizontally down.

7. A binary direction-based wafer search system, comprising:

the first determining module is used for determining a plurality of candidate searching directions according to the two reference searching directions and the corresponding opposite directions thereof and setting the priorities of the candidate searching directions; taking the searching direction with the highest priority from the candidate searching directions of the wafer existing in the previous searching point as the main candidate searching direction of the current searching point;

the second determining module is used for determining a memory point according to the change of the main candidate searching direction of the current searching point and taking the memory point or the diagonal direction of the current searching point as one or more secondary candidate searching directions when no wafer exists in the candidate searching directions;

and the traversing module is used for searching the wafers according to the main candidate searching direction or the secondary candidate searching direction of the current searching point until all the wafers are traversed.

8. The binary direction-first based wafer search system of claim 7 wherein the first determination module comprises:

a first determining unit, configured to determine a plurality of candidate search directions according to two reference search directions and opposite directions corresponding thereto, and set priorities thereof;

and the second determining unit is used for taking the searching direction with the highest priority as the main candidate searching direction of the current searching point from the candidate searching directions of the existing wafer of the previous searching point.

9. An electronic device, comprising: one or more processors; a storage device to store one or more programs that, when executed by the one or more processors, cause the one or more processors to implement the binary direction preference based wafer search method of any one of claims 1-6.

10. A computer-readable medium, on which a computer program is stored, wherein the computer program, when being executed by a processor, implements the binary direction precedence based wafer search method according to any one of claims 1 to 6.

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