CN114859565A - Coaxial reflection type laser beam shaping method and device - Google Patents
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Abstract
The invention relates to a coaxial reflection type laser beam shaping method and a coaxial reflection type laser beam shaping device, which can be used for shaping the light intensity of a laser output beam into required annular distribution and can effectively compensate the phase change generated by the light intensity shaping. The invention adopts two aspheric reflectors, wherein the first aspheric reflector realizes the energy divergence light intensity shaping of the incident laser beam, so that the reflected light realizes the energy distribution of the required uniform flat top light at the second aspheric reflector; the second aspheric surface reflector is responsible for carrying out collimation and phase compensation on the light beam, so that the output light beam is not only a flat-top light beam, but also has phase distribution close to a diffraction limit. The invention integrates beam shaping, beam collimation and phase correction, has the characteristics of compact structure, high damage-resistant threshold value, good shaping homogenization effect and the like, and has wide application prospect.
Description
Technical Field
The invention belongs to the technical field of optics, and particularly relates to a coaxial reflection type laser beam shaping method and device.
Background
Since the advent of laser devices, laser light has been widely used in various fields because of its excellent monochromaticity, directivity, small divergence, high brightness, and the like. Such as laser cutting, laser printing, laser communication, laser measurement techniques, etc. Has outstanding contribution in the aspects of military industry, civil use, scientific research and the like. However, the light intensity of the beam cross section of the laser emitted by the laser is gaussian, so-called gaussian beam, the energy distribution of the beam is high in central energy and low in edge energy, the central light intensity and the edge light intensity are generally greatly different, and secondly, the gaussian beam is propagated along a hyperbola, and the characteristics limit the development of the laser in many fields. Therefore, the laser beam is required to be shaped, the shaped beam is generally a flat-top beam, the energy distribution is uniform, and the cross section of the output beam can be in various shapes, such as a circle, a rectangle or a ring according to the requirements of different conditions. For example, in the field of lithography, in order to make etched lines uniform and smooth, the irradiance distribution of the laser used for etching is required to be relatively uniform; in the processes of laser material processing and laser welding, the uneven energy distribution of the Gaussian beam can reduce the energy utilization rate and even the processing precision, and the Gaussian beam is generally required to be shaped into flat top light; in a high-energy laser system, a Gaussian beam can cause non-uniform thermal deformation and serious thermal halo of an optical element, and the focusing effect is influenced. The intensity distribution of the high-energy laser should be as uniform as possible to prevent beam drift and divergence due to mirror damage, thermal distortion, and non-uniform thermal bloom.
Ring laser beams, i.e., laser beams with relatively low central intensity, have found wide application in the fields of medicine, biotechnology, microelectronics, optical information processing, and material science, among others. In recent years it has been found that for some specific processing applications, such as laser shock shaping, a ring beam also has certain advantages, and a ring-shaped flat-top beam can further expand the use of ring lasers.
Many studies have been made on shaping gaussian beams at home and abroad, and various shaping methods have been proposed. The method for intercepting the hard-edge diaphragm applied at the earliest is to arrange a small-aperture diaphragm in front of a laser beam, intercept an area with more uniform light energy distribution in the center of a Gaussian beam and filter a part with non-uniform edge energy distribution. In order to solve the problem of light energy utilization rate, domestic and foreign scholars research and provide various shaping methods with no loss or low light beam loss, wherein the more applied methods comprise the following methods: aspheric beam shaping method, microlens array beam shaping method, liquid crystal spatial light modulator beam shaping method, binary optical element beam shaping method, and the like. Wherein, the beam shaping technology of the diffraction optical element and the beam shaping technology of the liquid crystal spatial light modulator are not suitable for the beam shaping of the high-power laser; the micro-lens array beam shaping technology is only suitable for shaping the far-field focal spot shape of a beam, the utilization rate of light energy can be reduced due to the fact that a certain interval exists between micro-lenses, the edge of each micro-lens can generate a certain diffraction phenomenon, and the quality of beam shaping can be influenced due to coherent superposition of sub-beams. Generally, the laser beam shaping methods commonly used at present have respective defects when used for shaping high-power laser beams. For above-mentioned beam shaping system, two aspherical mirror are placed to two aspherical mirror beam shaping system on the light beam transmission path, and the phase place that first aspherical mirror adjusted incident beam distributes and forms required light intensity distribution in second aspherical mirror position department, and the phase place that the light intensity was reshaped back is responsible for compensating to the second aspherical mirror for the output beam not only has required light intensity distribution, still has the phase place distribution of nearly diffraction limit. However, the conventional aspheric lens shaping system cannot shape the gaussian beam into flat-top uniform annular light.
Aiming at the defects in the prior art, the invention provides a coaxial reflection type laser beam shaping method and device. As shown in fig. 2, the light intensity shaping and the wavefront correction of the circular gaussian beam are effectively integrated, and the coaxial reflector is adopted to shape the incident light into the annular flat-topped beam. A novel double-aspheric reflector surface type distribution design method is provided, and the problem that the traditional aspheric lens cannot realize annular beam shaping is effectively solved.
Disclosure of Invention
The invention aims to provide a coaxial reflection type laser beam shaping method and device aiming at the defects in the prior art. The invention integrates the light intensity shaping and the light intensity shaped wave front correction of the light beam into a whole, not only can change the light intensity distribution of the emergent light beam, but also can compensate the wave front phase distribution of the light beam after the light intensity shaping, so that the shaped output light beam has the required light intensity distribution and the phase distribution close to the diffraction limit. The double-aspheric surface reflector realizes the shaping of the annular Gaussian beam, and compared with the shaping of the traditional aspheric surface lens, the double-aspheric surface reflector shaping device has the advantages of high shaping efficiency, simple and compact system structure, annular beam emergence and wide application range.
The technical scheme adopted by the invention is as follows:
a coaxial reflection type laser beam shaping method adopts a double-aspheric reflector group consisting of two aspheric reflectors and is used for shaping a laser beam incident in parallel into a hollow flat-topped beam, and the design steps of the double-aspheric reflector group are as follows:
(1) according to the light intensity distribution f of the incident laser beam input (r) and the target light intensity distribution g to be achieved output (r) based on the law of conservation of energy
The diameter of the incident beam at the aspherical mirror S1 is calculatedThe correspondence relationship R ═ h (R) and R ═ h between the outgoing position R and the radial incident position R of the outgoing light beam on the aspherical mirror S2 -1 (R)；
(2) According to the correspondence relationship between the radial outgoing position R of the incident light beam at the aspheric mirror S1 and the radial incoming position R of the outgoing light beam at the aspheric mirror S2, R (R) and R (h) -1 (R) designing surface profile distribution of the aspherical mirror S1 and the aspherical mirror S2 of the coaxial reflection type laser beam shaping device; because the aspheric surface of the aspheric surface reflector S1 and the aspheric surface of the aspheric surface reflector S2 in the designed aspheric surface reflector group are both in rotational symmetry, only a generatrix of the aspheric surface needs to be designed, a space rectangular coordinate system o-xyz is established by taking the axis of the aspheric surface reflector group as a z-axis and the initial point of the aspheric surface reflector S1 as an origin, and a cylindrical coordinate system is established by taking xoy as a base plane and the z-axis as a longitudinal axis; the surface profile of the aspherical mirror S1 is shown by the following equation:
wherein z (r) is the surface sag at the radial position r of the mirror surface of the aspherical mirror S1; L is the distance between the starting points of two aspheric surfaces, Z 0 And Y 0 Relative coordinate values of the starting point of the aspherical mirror S2 at the starting point of the aspherical mirror S1;
(3) the profile of the aspherical mirror S2 is shown by the following equation:
wherein z (R) is the surface sag of the mirror image position R of the aspherical mirror S2;
furthermore, two coaxial aspheric surface reflectors are arranged in the propagation direction of the incident beam, the aspheric surface reflector S1 is used for shaping the light intensity distribution of the laser beam and uniformly diverging the incident beam, so that the required light intensity distribution is formed at the aspheric surface reflector S2, and the aspheric surface reflector S2 is used for performing phase compensation and beam collimation on the light beam after the light intensity shaping.
Further, the shaping method can shape the laser beam into a ring-shaped flat-top beam near the diffraction limit.
Further, it can be used to shape the gaussian beam into a ring beam having a desired light intensity distribution, and also can be used to shape other laser beams having a symmetrical light intensity distribution into a beam having a desired light intensity distribution.
A coaxial reflection type laser beam shaping device comprises an aspheric reflector group consisting of two aspheric reflectors, and is used for reflecting parallel incident laser beams and then annularly illuminating a target surface, wherein the two aspheric reflectors are an aspheric reflector S1 and an aspheric reflector S2, and the design method of the aspheric reflector group comprises the following steps:
(1) establishing annular laser beam shaping requirement, selecting flat-top beam model, determining incident and emergent mapping relation R ═ h (R) and R ═ h -1 (R)；
(2) A spatial rectangular coordinate system o-xyz is established by taking the axis of the aspherical mirror group as a z-axis and the starting point of the aspherical mirror S1 as an origin, a cylindrical coordinate system is established by taking xoy as a base plane and the z-axis as a longitudinal axis, the direction of a laser beam is parallel to the z-axis, any point on the surface S1 is (X, y, z (X, y)), and the coordinate of the starting point of the aspherical mirror S2 relative to the surface S1 is (X, y) 0 ,Y 0 ,Z 0 ) The coordinates of a point on the aspherical mirror S2 in the local coordinate system with the starting point of the aspherical mirror S2 as the origin are (X, Y, Z (X, Y)); wherein Z (X, Y) is a Z-point coordinate of the coordinates (X, Y), and Z (X, Y) is a Z-point coordinate of the coordinates (X, Y);
(3) according to the corresponding relation of the reflection points of the light rays between the aspheric surface reflector S1 and the aspheric surface reflector S2, assuming that an incident light beam and an emergent light beam are parallel to an optical axis and both the input and output wave fronts are plane waves, an aplanatic principle is introduced here to establish an aplanatic equation, and a bus is positioned between the aplanatic equation and the output wave front y The oz plane is:
(Y 0 +Y-y) 2 ＝(L-Z 0 )(L+Z 0 +2(Z(Y)-z(y)))
wherein z (y) is an equation of a generatrix of the aspherical mirror S1 in the 2-dimensional plane, and z (y) is an equation of a generatrix of the aspherical mirror S2;
(4) the partial derivatives of z (y) can be obtained by using Snell's law and bringing in aplanatic conditions:
(5) converting the above equation into a cylindrical coordinate system, and integrating r to obtain the surface equation of the aspherical mirror S1:
(6) the obtained z (r) zone return aplanatism condition can obtain a surface form equation of the aspherical mirror S2:
furthermore, two coaxial aspheric surface reflectors are arranged in the propagation direction of the incident beam, the aspheric surface reflector S1 is used for shaping the light intensity distribution of the laser beam and uniformly diverging the incident beam, so that the required light intensity distribution is formed at the aspheric surface reflector S2, and the aspheric surface reflector S2 is used for performing phase compensation and beam collimation on the light beam after the light intensity shaping.
Further, the shaping method can shape the laser beam into a ring-shaped flat-top beam close to the diffraction limit.
Further, it can be used to shape the gaussian beam into a ring beam having a desired light intensity distribution, and also can be used to shape other laser beams having a symmetrical light intensity distribution into a beam having a desired light intensity distribution.
Compared with the prior art, the invention has the advantages that:
(1) compared with the existing annular beam shaping system, the system designed by the invention has higher transmission efficiency and higher laser damage resistance threshold of the reflector.
(2) Compared with a free-form surface reflector or a diffraction optical element in the prior art, the designed aspheric surface reflector has lower processing difficulty, is easy to produce and detect, and is suitable for batch production.
(3) Compared with the system designed in the prior art, the structure of the system provided by the invention is more compact, and is beneficial to miniaturization and lightweight design.
Drawings
FIG. 1 is a schematic diagram of aspheric mirror surface type calculation;
FIG. 2 is a schematic diagram of a typical light transmission in a coaxial reflective laser beam shaping device;
FIG. 3 is a flow chart of the design of the coaxial reflective laser beam shaping device;
FIG. 4 is a schematic diagram of the light intensity distribution of the output beam shaped by the double-aspheric reflector shaping system according to the present invention;
FIG. 5 is a schematic diagram of the output beam OPD shaped by the bi-aspheric reflector shaping system of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described with reference to the accompanying drawings.
The invention relates to a coaxial reflection type laser beam shaping device, which aims to solve the defects of the existing annular laser beam shaping technology, wherein the existing annular laser beam shaping technology mostly adopts a free-form surface reflector or a diffraction optical element, the processing is difficult, the cost is high, in order to reduce the processing difficulty, a coaxial aspheric surface reflector laser shaping system is designed, the processing difficulty of a reflector is reduced while the higher transmission efficiency is realized, and the design can be used in practical production and experiments, the coaxial reflection type laser beam shaping device designed by the invention consists of an aspheric surface reflector S1 and an aspheric surface reflector S2, as shown in figure 2, the specific working process is as follows, a laser output beam is reflected and diverged by the aspheric surface reflector S1, a beam with required light intensity distribution is formed at the position of the aspheric surface reflector S2, and the beam is subjected to phase compensation by the rear mirror surface of the aspheric surface reflector S2, becomes a collimated light beam having a desired light intensity distribution, so that the output annular hollow laser beam has not only the desired light intensity distribution but also a phase distribution near the diffraction limit.
The construction process of the coaxial reflection type laser beam shaping method is shown in figure 3, and the method specifically comprises the following steps:
1. according to the light intensity distribution f of the incident beam input (r) and the target light intensity distribution g to be achieved output (r) based on the law of conservation of energy
Calculating to obtain the corresponding relation R ═ h (R) and R ═ h between the radial outgoing position R of the incident laser beam on the aspheric surface reflector S1 and the radial incoming position R of the outgoing laser beam on the aspheric surface reflector S2 -1 (R)。
2. Establishing annular laser beam shaping requirement, selecting an equal beam model, and determining the mapping relation between incidence and emergence, R (h), (R) and R (h) -1 (R)；
3. As shown in fig. 1, a spatial rectangular coordinate system o-xyz is established with the axis of the aspherical mirror group as the z-axis and the starting point of the aspherical mirror S1 as the origin, a cylindrical coordinate system is established with xoy as the base plane and the z-axis as the longitudinal axis, the direction of the laser beam is parallel to the z-axis, and it is assumed that any point on the S1 plane is (X, y, z (X, y)), and the coordinate of the starting point of S2 relative to the S1 plane is (X, y, z (X, y)), and 0 ,Y 0 ,Z 0 ) Coordinates of a point on S2 in the local coordinate system with the start point of S2 as the origin are (X, Y, Z (X, Y)); wherein Z (X, Y) is a Z-point coordinate of the coordinates (X, Y), and Z (X, Y) is a Z-point coordinate of the coordinates (X, Y);
4. because the aspheric surface reflector S1 and the aspheric surface reflector S2 in the designed aspheric surface reflector group are both in rotational axis symmetry, only the aspheric surface bus needs to be designed, so the surface type formula here only needs to consider the y axis, the x axis term is omitted in the formula, according to the corresponding relation of the reflection points of the light between the S1 surface and the S2 surface, the incident light beam and the emergent light beam are assumed to be parallel to the optical axis, and the wave fronts of the input and the output are plane waves, the aplanatism principle is introduced here, and an aplanatism equation (the bus is on the yoz plane) is established:
(Y 0 +Y-y) 2 ＝(L-Z 0 )(L+Z 0 +2(Z(Y)-z(y)))
wherein z (y) is an equation of a generatrix of the aspherical mirror S1 in the 2-dimensional plane, and z (y) is an equation of a generatrix of the aspherical mirror S2;
5. the partial derivatives of z (y) can be obtained by using Snell's law and bringing in aplanatic conditions:
6. converting the above equation into a cylindrical coordinate system, and integrating r to obtain the surface equation of the aspherical mirror S1:
7. the obtained z (r) zone return aplanatism condition can obtain a surface form equation of the aspherical mirror S2:
8. mapping function R ═ h (R) and R ═ h -1 (R) the surface type functions z (R) and z (R) are substituted to calculate surface type models of the aspherical mirror S1 and the aspherical mirror S2, the surface type models are substituted into ZEMAX software for simulation, the shaping effect is shown in figure 4, and the optical path difference is shown in figure 5.
The above description is the preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all the design solutions belonging to the idea of the present invention belong to the protection scope of the present invention.
Claims (8)
1. A coaxial reflection type laser beam shaping method adopts a double-aspheric reflector group consisting of two aspheric reflectors and is used for shaping parallel incident laser beams into hollow flat-topped beams, and is characterized in that: the design steps of the double-aspheric reflector group are as follows:
(1) according to the light intensity distribution f of the incident laser beam input (r) and the target light intensity distribution g to be achieved output (r) based on the law of conservation of energy
Calculating the corresponding relation R ═ h (R) and R ═ h between the radial outgoing position R of the incident beam on the aspheric surface reflector S1 and the radial incoming position R of the outgoing beam on the aspheric surface reflector S2 -1 (R)；
(2) According to the correspondence relationship between the radial outgoing position R of the incident light beam at the aspheric mirror S1 and the radial incoming position R of the outgoing light beam at the aspheric mirror S2, R (R) and R (h) -1 (R) designing surface profile distribution of the aspherical mirror S1 and the aspherical mirror S2 of the coaxial reflection type laser beam shaping device; because the aspheric surface of the aspheric surface reflector S1 and the aspheric surface of the aspheric surface reflector S2 in the designed aspheric surface reflector group are both in rotational symmetry, only a generatrix of the aspheric surface needs to be designed, a space rectangular coordinate system o-xyz is established by taking the axis of the aspheric surface reflector group as a z-axis and the initial point of the aspheric surface reflector S1 as an origin, and a cylindrical coordinate system is established by taking xoy as a base plane and the z-axis as a longitudinal axis; the surface profile of the aspherical mirror S1 is shown by the following equation:
wherein z (r) is the surface sag at the radial position r of the mirror surface of the aspherical mirror S1; l is the distance between the starting points of the two aspheric surfaces, Z 0 And Y 0 Relative coordinate values of a start point of the aspherical mirror S2 at a start point of the aspherical mirror S1;
(3) the profile of the aspherical mirror S2 is shown by the following equation:
wherein z (R) is the surface sag at the radial position R of the mirror surface of the aspherical mirror S2.
2. The coaxial reflective laser beam shaping method of claim 1, wherein: two coaxial aspheric surface reflectors are arranged in the transmission direction of an incident beam, the aspheric surface reflector S1 is used for shaping the light intensity distribution of a laser beam and uniformly dispersing the incident beam, so that the required light intensity distribution is formed at the aspheric surface reflector S2, and the aspheric surface reflector S2 is used for realizing phase compensation and beam collimation of the light beam after light intensity shaping.
3. The method and apparatus for shaping a coaxial reflective laser beam according to claim 1, wherein: the shaping method can shape the laser beam into an annular flat-top beam close to the diffraction limit.
4. The method and apparatus for shaping a coaxial reflective laser beam according to claim 1 or 2, wherein: can be used for shaping a Gaussian beam into an annular beam with a required light intensity distribution and can also be used for shaping other laser beams with symmetrical light intensity distribution into a beam with the required light intensity distribution.
5. The utility model provides a coaxial reflective laser beam shaping device, includes the aspherical mirror group that two aspherical mirrors constitute for carry out annular illumination to the target surface after the laser beam reflection of incidenting in parallel, two aspherical mirrors be aspherical mirror S1 and aspherical mirror S2, its characterized in that: the design method of the aspherical mirror group comprises the following steps:
(1) establishing annular laser beam shaping requirement, selecting flat-top beam model, determining incident and emergent mapping relation R ═ h (R) and R ═ h -1 (R)；
(2) A spatial rectangular coordinate system o-xyz is established by taking the axis of the aspherical mirror group as a z axis and the starting point of the aspherical mirror S1 as an origin, a cylindrical coordinate system is established by taking xoy as a base plane and the z axis as a longitudinal axis, the direction of a laser beam is parallel to the z axis, any point on the S1 plane is (X, y, z (X, y)), and the starting point of the aspherical mirror S2 is (X, y)) relative to the coordinate of the aspherical mirror S1 0 ,Y 0 ,Z 0 ) The coordinates of a point on the aspherical mirror S2 in the local coordinate system with the starting point of the aspherical mirror S2 as the origin are (X, Y, Z (X, Y)); wherein Z (X, Y) is a Z-point coordinate of the coordinates (X, Y), and Z (X, Y) is a Z-point coordinate of the coordinates (X, Y);
(3) according to the corresponding relation of the reflection points of the light rays between the aspheric surface reflector S1 and the aspheric surface reflector S2, assuming that an incident light beam and an emergent light beam are both parallel to an optical axis and the wave fronts of output and input are both plane waves, an aplanatism principle is introduced here, an aplanatism equation is established, and a generatrix is in a yoz plane:
(Y 0 +Y-y) 2 ＝(L-Z 0 )(L+Z 0 +2(Z(Y)-z(y)))
wherein z (y) is an equation of a generatrix of the aspherical mirror S1 in the 2-dimensional plane, and z (y) is an equation of a generatrix of the aspherical mirror S2;
(4) the partial derivatives of z (y) can be obtained by utilizing Snell's law and bringing in an aplanatic condition:
(5) converting the above equation into a cylindrical coordinate system, and integrating r to obtain the surface equation of the aspherical mirror S1:
(6) the obtained z (r) is brought back to aplanatic condition to obtain the surface form equation of the aspheric mirror S2:
6. the coaxial reflective laser beam shaping device of claim 5, wherein: two coaxial aspheric surface reflectors are arranged in the transmission direction of an incident beam, the aspheric surface reflector S1 is used for shaping the light intensity distribution of a laser beam and uniformly dispersing the incident beam, so that the required light intensity distribution is formed at the aspheric surface reflector S2, and the aspheric surface reflector S2 is used for realizing phase compensation and beam collimation of the light beam after light intensity shaping.
7. The coaxial reflective laser beam shaping device of claim 5, wherein: the shaping method can shape the laser beam into an annular flat-top beam close to the diffraction limit.
8. The coaxial reflective laser beam shaping device of claim 5, wherein: can be used for shaping a Gaussian beam into an annular beam with a required light intensity distribution and can also be used for shaping other laser beams with symmetrical light intensity distribution into a beam with the required light intensity distribution.
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| CN101363956A (en) * | 2008-09-23 | 2009-02-11 | 长春理工大学 | Device for forming quasi-double half-gauss hollow laser beam |
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| CN105278011A (en) * | 2014-06-30 | 2016-01-27 | 中国人民解放军国防科学技术大学 | Optical fiber laser collimating and shaping device, and design method thereof |
| US20180107006A1 (en) * | 2016-10-19 | 2018-04-19 | Coherent, Inc. | Reflective laser line-beam generator |
| US20190146226A1 (en) * | 2017-11-10 | 2019-05-16 | Boston Scientific Scimed, Inc. | Apparatus and methodology for reshaping a laser beam |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101363956A (en) * | 2008-09-23 | 2009-02-11 | 长春理工大学 | Device for forming quasi-double half-gauss hollow laser beam |
| CN103091842A (en) * | 2013-01-30 | 2013-05-08 | 中国科学院长春光学精密机械与物理研究所 | Reshaping mirror group design method capable of converting elliptical gaussian light beam into circular flat-topped light beam |
| CN105278011A (en) * | 2014-06-30 | 2016-01-27 | 中国人民解放军国防科学技术大学 | Optical fiber laser collimating and shaping device, and design method thereof |
| US20180107006A1 (en) * | 2016-10-19 | 2018-04-19 | Coherent, Inc. | Reflective laser line-beam generator |
| US20190146226A1 (en) * | 2017-11-10 | 2019-05-16 | Boston Scientific Scimed, Inc. | Apparatus and methodology for reshaping a laser beam |
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