CN114859542A - Illumination system and microscope equipment - Google Patents
Illumination system and microscope equipment Download PDFInfo
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- CN114859542A CN114859542A CN202111307955.8A CN202111307955A CN114859542A CN 114859542 A CN114859542 A CN 114859542A CN 202111307955 A CN202111307955 A CN 202111307955A CN 114859542 A CN114859542 A CN 114859542A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/082—Condensers for incident illumination only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
- G01N21/6458—Fluorescence microscopy
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0961—Lens arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0994—Fibers, light pipes
Abstract
The invention discloses an illumination system, which comprises a light source component, a light homogenizing and shaping element arranged on an output light path of the light source component, and an objective lens group arranged on an output light path of the light homogenizing and shaping element; the light homogenizing and shaping element is used for homogenizing and shaping light emitted by the light source component into a light beam with a preset spot shape; the objective lens group is used for modulating the size of light beam spots output by the light source component. According to the method, the micro-lens array is utilized to reduce the energy loss of the illuminating light beam, improve the illumination illuminance and ensure the uniformity of the spot illuminance of the illuminating light beam, so that when the illuminating system is applied to microscope equipment, the noise of a detection image of an imaging system can be reduced, and the accuracy of an analysis result of the detection image is improved; the application also provides microscope equipment with the beneficial effects.
Description
Technical Field
The invention relates to the technical field of optical illumination, in particular to an illumination system and microscope equipment.
Background
In the field of fluorescent molecule detection and analysis, a microscope device is generally adopted for fluorescent image acquisition, and fluorescent molecule analysis is performed based on the fluorescent image acquisition. The quality of an image obtained by an image sensor is directly determined by the superiority of an optical-mechanical system in the fluorescence microscope, and the excellent optical-mechanical system can relieve great pressure for later-stage image processing such as fluorescent molecule positioning, signal enhancement, image denoising and the like. In the field of fluorescent molecule detection, an optical mechanical system can be roughly divided into an illumination system module and an imaging system module; light beams output by an illumination light source in the illumination system module are modulated into light spots with specific shapes such as circles, rectangles and the like through a series of optical elements to be incident on a target surface, wherein fluorescent molecules or fluorescent groups are distributed on the target surface; the imaging system module is used for imaging a fluorescence signal emitted on a target surface of a target on an industrial camera through a microscope objective.
In order to enable the optical mechanical system to capture an optimal fluorescence signal, how to improve the matching degree between an illumination spot output by the illumination system in the microscope device and an effective field of view of the imaging system, and how to improve the illumination uniformity and the illumination power density of the illumination spot are all problems that need to be focused on in fluorescence molecule detection.
Disclosure of Invention
The invention aims to provide an illumination system and microscope equipment, which improve the spot illumination and the spot illumination uniformity of illumination light beams to a certain extent and provide high-quality illumination for image acquisition detection in the microscope equipment.
To solve the above technical problem, the present invention provides an illumination system, including:
the light source comprises a light source component, a uniform light shaping element arranged on an output light path of the light source component, and an objective lens group arranged on an output light path of the uniform light shaping element;
the light homogenizing and shaping element is used for homogenizing and shaping light emitted by the light source component into a light beam with a preset spot shape;
and the objective lens group is used for modulating the size of light spots of light beams output by the light source component.
In an optional embodiment of the present application, the dodging shaping element includes a micro lens array disposed in an output optical path of the light source module, and a condensing lens disposed in an output optical path of the micro lens array;
wherein, the micro-element of the micro-lens array is a micro-element structure with a set shape.
In an alternative embodiment of the present application, the microlens array is a double row microlens array, and the pitch between the two rows of microlens arrays is equal to the focal length of a single microlens array.
In an optional embodiment of the present application, the light homogenizing shaping element comprises a light homogenizing rod disposed in an output light path of the light source assembly, and a light exit end surface of the light homogenizing rod is contoured into a set shape.
In an alternative embodiment of the present application, the light source assembly includes a luminescent light source and a collimating lens disposed in an output optical path of the luminescent light source.
In an optional embodiment of the present application, the number of the light emitting sources is two, and one collimating lens is disposed on an output optical path of each of the light emitting sources; and the light combining element is arranged on the output light paths of the two collimating lenses and is used for combining the light beams output by the two collimating lenses and outputting the light beams.
In an optional embodiment of the present application, the objective lens group comprises a double cemented lens and a micro objective lens.
A microscope apparatus comprising an illumination system as claimed in any one of the above, and an image collector;
the illumination system is used for projecting illumination light to a sample to be measured;
the image collector is used for collecting the image of the sample to be measured under the irradiation of the illumination light.
In an optional embodiment of the present application, a dichroic mirror is further disposed on an output optical path of a condensing lens in the illumination system;
the image collector is arranged on an output light path of the dichroic mirror and used for receiving reflected light which is incident to the surface of the sample to be detected of the image collector through the dichroic mirror.
In an optional embodiment of the present application, the dichroic mirror is disposed in an optical path between a plurality of lenses included in the objective lens group.
The invention provides an illumination system, which comprises a light source component, a light homogenizing and shaping element arranged on an output light path of the light source component, and an objective lens group arranged on an output light path of the light homogenizing and shaping element; the light homogenizing and shaping element is used for homogenizing and shaping light emitted by the light source component into a light beam with a preset spot shape; the objective lens group is used for modulating the size of light beam spots output by the light source component.
Utilize even light shaping component to carry out the beam of homogenizing shaping into predetermined light spot shape with the output light path of light source subassembly in this application, pass through objective group again and finally make the light beam facula accord with the illumination requirement size to the modulation effect of facula size. When the illumination system is applied to microscope equipment, the light beam facula of the illumination system can be matched with the effective view field of the imaging system only by setting the dodging shaping element into a shape structure which is the same as the effective view field of the imaging system, and compared with the method that the light beam facula shape is limited by the diaphragm to realize the matching of the illumination facula and the effective view field, the energy loss of the light beam can be reduced, and the illumination intensity is improved; because the illumination facula in this application is based on the even light beam that forms behind the even light of beam that even light plastic component was exported the light source subassembly, can guarantee to a certain extent the illuminance homogeneity of mixed output back facula on this basis.
To sum up, when the illumination system in this application is applied to among the microscope equipment, can guarantee illumination beam's high illumination and good homogeneity on the basis of the effective visual field of matching imaging system, noise when having reduced the collection detection image among the follow-up imaging system is favorable to the accuracy that fluorescence molecule detected.
The application also provides microscope equipment with the beneficial effects.
Drawings
In order to more clearly illustrate the embodiments or technical solutions of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
Fig. 1 is a schematic view of an optical path structure of an illumination system provided in an embodiment of the present application;
fig. 2 is a schematic view of an optical path structure of a microscope apparatus provided in an embodiment of the present application.
Detailed Description
The illumination system in conventional microscope equipment is a critical illumination system; the critical illumination system directly images the light source on an illuminated sample plane, and the uniformity of the light spot illumination on the sample plane is difficult to ensure. Therefore, the kola illumination system is a frustrated illumination system which images a kola mirror on a sample plane, so that the sample plane can be illuminated more uniformly.
However, in order to match the effective field of view of the imaging system, the illumination beam output by the illumination system in the microscope device needs to output a light spot having the same shape as the effective field of view of the imaging system, and therefore, the light spot shape of the illumination beam needs to be shaped by using the diaphragm. For example, the effective field of view is rectangular, a diaphragm with a rectangular light-passing hole needs to be arranged on the optical path of the illumination system, so that the spot shape of the finally output illumination light beam matches the shape of the effective field of view.
Obviously, the diaphragm can shape the light spot shape by shielding part of light output by the light source in the illumination system, so that only light in the rectangular aperture can be output to finally obtain the rectangular light spot, and obviously, the power of the illumination beam output by the illumination system can be reduced to a certain extent.
Therefore, the illumination system is provided in the application, on the basis of being matched with the effective view field of the imaging system, the illumination energy output efficiency of the illumination system can be improved, the uniformity of the light spot illumination intensity is guaranteed, and the quality of the image acquired and detected by the imaging system is favorably improved.
In order that those skilled in the art will better understand the disclosure, the invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, fig. 1 is a schematic view of an optical path structure of an illumination system provided in an embodiment of the present application. The lighting system may include:
a light source assembly 1;
a dodging shaping element arranged on an output light path of the light source component 1 and an objective lens group 4 arranged on an output light path of the dodging shaping element;
the light homogenizing and shaping element is used for homogenizing and shaping light emitted by the light source component 1 into a light beam with a preset spot shape.
The objective lens group 4 is used for modulating and outputting the spot size of the light beam output by the light source component 1.
As mentioned above, the illumination system provided in the present application is mainly applied in the microscope device, and based on the requirement of the illumination system in the microscope device, the illumination beam output by the illumination system should match with the effective field of view of the imaging system; i.e. the spot size of the illumination beam is exactly the same as the effective field of view, the imaging system can capture the area where the inspection image is captured, i.e. exactly where the spot illumination is projected by the illumination beam.
In order to modulate the spot shape of the illumination beam into a shape identical to the effective field of view of the imaging system, the dodging shaping element is arranged on the output optical path of the light source assembly 1, and the dodging shaping effect of the dodging shaping element on the light source assembly 1 is utilized, so that the spot brightness of the beam after passing through the dodging shaping element is uniform, and the spot shape is converted into a spot with a specific shape.
Alternatively, the dodging lens element may be a microlens array 2 disposed on an output optical path of the light source assembly 1 and a condenser lens 3 disposed on an output optical path of the microlens array 2.
Wherein, the micro-element of the micro-lens array 2 is a micro-element structure with a set shape; and the condenser lens 3 and the objective lens group 4 are used for modulating and outputting the spot size of the light beam output by the light source component 1.
In this embodiment, microlens array 2 is disposed on an output light path of light source assembly 1, the cutting and dividing effect of the micro elements of microlens array 2 on the projected light spots is utilized, the light spots projected on microlens array 2 are cut and divided into a plurality of small light spots with the same shape as the micro elements and transmitted for output, each small light spot is based on the light condensing effect of condenser lens 3, so that the light beams corresponding to each small light spot are converged, and each small light spot is overlapped and converged on the focal plane of condenser lens 3 for imaging, obviously, the size and the shape of the light spot on the imaging plane are the same as those of a single small light spot, and the illumination is the superposition of the light beams corresponding to all the small light spots.
Therefore, the illumination light beams output by the light source assembly 1 can be modulated by the micro lens array 2 and the condenser lens 3, that is, the illumination light beams can be modulated into light beams with the same spot shape as the micro element shape of the micro lens array 2. Therefore, the microlens array 2 in the present embodiment can further set the shapes of the microelements so that each of the shapes of the microelements is the same as the shape of the effective field of view (the size is not necessarily the same, corresponding to the scaled shape of the effective field of view); on the basis, the size of the light spot is further modulated by the objective lens group 4, so that the light spot shape size of the illumination light beam output by the illumination system is matched with the effective field of view.
Based on the above discussion, it can be known that, in this embodiment, the modulation of the spot shape of the illumination light beam is realized by cutting and dividing the light beam by the micro elements of the micro lens array 2 and then converging the light beam again, and in this process, partial light beams in the light beam do not need to be shielded and filtered out, but the light beams output by the light source assembly 1 are utilized to the maximum extent, so that on the basis of realizing the matching of the spot shape and the effective field of view, the utilization rate of the illumination light beam is further improved, and the high-illumination output of the illumination light beam is ensured.
Moreover, in this embodiment, the illumination beam output by the light source module 1 is divided by the micro lens array 2 and then is overlapped by the light condensing lens 3 to form a converging beam, and obviously, the converging beam superimposes the light and dark portions of different portions of the light spot with respect to the illumination beam directly output by the light source module 1, so that the speckle problem of the light beam is reduced to a certain extent, and the uniformity of the illumination intensity of the illumination beam corresponding to the light spot is improved.
It should be noted that the microlens array 2 is generally used in cooperation with a double-row microlens array, and therefore, the microlens array 2 used in this embodiment may also be a double-row microlens array, and the distance between the two rows of microlens arrays may be equal to the focal length of a single microlens array 2, that is, the focal length of a infinitesimal of the microlens array 2; the second row of microlens arrays acts as a field lens to control the divergence angle of the emergent beam of the first row of microlens arrays.
The shape for a single infinitesimal element is to modulate the spot to be the same as the effective field of view shape, and therefore, the infinitesimal element shape should be set based on the effective field of view shape of the imaging system employed in the microscope device, and may be rectangular, square, circular, or the like.
Wherein, in order to further promote the modulation effect of microlens array 2 to the illuminating beam, can set up collimating lens 12 in the light source subassembly 1 for the illuminating beam of the luminous source 11 output in the light source subassembly 1 forms approximate parallel light to microlens array 2 through the collimation effect of collimating lens 12, can make the light beam of passing through microlens array 2 output also be the parallel light of different field angles size almost completely from this, make the light beam that each little facula corresponds can pass through condensing lens 3 better and assemble into a facula.
In addition, in order to increase the illumination intensity of the illumination light beams output by the light source module 1, a plurality of light sources 11 may be adopted, each light source 11 is provided with a collimating lens 12 for collimation, and then the illumination light beams output by the light sources 11 are combined into a same light beam by using a light combining element 13 similar to a dichroic mirror and the like for output. The wavelengths of the light waves output by the light emitting sources 11 may be the same or different.
As the light source 11 in the light source module 1, an LED light source or a laser light source may be used. When the light source is an LED light source, the spatial light intensity distribution of the light beam output by the LED light source is lambertian, and in order to achieve the optimal collimation effect, the collimating lens 12 may be an aspheric surface with NA0.7 to NA0.9, and preferably an aspheric surface with NA 0.8.
When the light emitting source 11 is a laser light source, a beam expanding system component may be further disposed on the output optical path of the collimating lens 12, so that the light beam output by the laser light source is collimated and expanded and then enters the microlens array 2. The beam expanding system assembly may employ a galileo beam expanding system assembly.
The dodging shaping element may be an optical element having another structure besides the microlens array 2 and the condenser lens 3.
In another alternative embodiment of the present application, the light unifying element comprises a light unifying rod disposed on an output light path of the light source module, and a light emitting end face of the light unifying rod is contoured to a set shape.
The light emitting surface of the light source component 1 can be tightly attached to the light incident end of the dodging rod, the output light of the light source component 1 is parallel light, a collimating lens does not need to be arranged, and the shape of the light emergent face of the dodging rod is the same as that of the effective view field.
The light homogenizing rod is hollow and solid, the hollow inner layer is coated with a high-reflection film, and quartz glass or K9 glass is used as the solid. After light is incident into the light homogenizing rod from the incident end of the light homogenizing rod at a certain divergence angle, the light is reflected for multiple times, a virtual light source image can be formed in each reflection, and a two-dimensional virtual light source matrix is formed in the multiple reflections, so that the light beams are uniformly distributed, and the light homogenizing effect of the light homogenizing rod is further realized. Theoretically, the uniformity of the light beam is oscillated and increased along with the increase of the length of the light-homogenizing rod, the increase of the length after reaching a certain degree is not obvious for the improvement of the uniformity, and the brightness is reduced, so that in practical application, the proper length of the light-homogenizing rod can be selected according to practical requirements.
The spot shape of the light beam output by the dodging rod depends on the emergent surface of the output light beam, so that the emergent surface can be set to be in a shape in order to obtain the light beam with a specific spot.
In addition, in the illumination system provided in this embodiment, the objective lens group 4 on the output optical path of the light homogenizing and shaping element may include a double cemented lens 41 and a microscope objective lens 42 in the imaging system, and the double cemented lens 41 may also adopt a cylindrical lens structure system consistent with the cylindrical lens of the microscope objective lens 42 in the imaging system, which is not described in detail herein.
To sum up, the lighting system who provides in this application adopts even light shaping component to realize the plastic of the illuminating light beam of light source subassembly output on the minimum basis of light energy loss for illuminating light beam's facula shape and imaging system's effective visual field phase-match, promote lighting system's luminous energy output efficiency, and based on even light effect of even light shaping lens, promote the illuminance homogeneity of output facula, guaranteed the image quality that adopts lighting system's microscope equipment to gather detection images such as fluorescence image in this application, reduce image noise, be favorable to promoting the accuracy of detecting image analysis result.
The present application further provides an embodiment of a microscope device, and referring to fig. 2, fig. 2 is a schematic view of an optical path structure of the microscope device provided in the embodiment of the present application, and the microscope device may include the illumination system as described in any one of the above, and further includes an image collector 6.
It is clear that the image collector 6 also corresponds to an imaging system for collecting images of the sample plane onto which the illumination system projects the illumination beam.
In general, the illumination system projects illumination light to the plane of the sample 5 to be measured, and the illumination light is reflected on the surface of the sample 5 to be measured and input to the image collector 6. Because the light path of the illumination light incident on the surface of the sample 5 to be measured and the light path of the light reflected by the surface of the sample 5 to be measured to the surface of the image collector 6 are overlapped in space to a certain extent. For this purpose, a dichroic mirror 7 may be further arranged in the optical path of the illumination system.
Referring to fig. 2, the dichroic mirror 7 may be disposed on the output light path of the light uniformizing element, taking the light uniformizing element as the microlens array 2 and the condenser lens 3 as an example. The dichroic mirror 7 is located between the condenser lens 3 and the objective lens group 4, and may also be disposed on the optical path between a plurality of lenses in the objective lens group 4, for example, between the doublet lens 41 and the microscope objective lens 42. The dichroic mirror 7 reflects the illumination light beam, so that the illumination light beam is deflected by the dichroic mirror 7 and then enters the sample 5 to be measured, and the light reflected from the surface of the sample 5 to be measured is transmitted from the dichroic mirror 7 and enters the image collector 6; similarly, the dichroic mirror 7 is arranged between the double cemented lens 41 and the microscope objective lens 42 to realize light transmission according to the same light path principle, and in the practical application process, one dichroic mirror 7 is arranged at any one of the positions between the condenser lens 3 and the objective lens group 4 and the position between the double cemented lens 41 and the microscope objective lens 42. Moreover, in the practical application process, the dichroic mirror 7 may also be adopted to transmit the illumination light beams, and reflect the light reflected by the surface of the sample 5 to be measured, so as to implement the technical scheme of the present application, and based on the application knowledge of the dichroic mirror 7, other optical path structures with similar structures and principles can be easily obtained based on the optical path structure shown in fig. 2, and details are not repeated in this application.
The utility model provides an illumination system among the microscope equipment can reduce the light energy loss of the illuminating light of output to the at utmost, promote light energy output efficiency, and then promote illumination illuminance, and mutual matching between the effective visual field of realization illuminating light and imaging system that can be fine, and guarantee illuminating beam facula illuminance homogeneity, make this microscope equipment in carrying out practical application processes such as fluorescence molecule detection, can gather and obtain high-quality detection image, guarantee the accuracy of follow-up image analysis result, be favorable to the wide application of microscope equipment in fields such as fluorescence molecule detection.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include elements inherent in the list. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in the process, method, article, or apparatus that comprises the element. In addition, parts of the above technical solutions provided in the embodiments of the present application, which are consistent with the implementation principles of corresponding technical solutions in the prior art, are not described in detail so as to avoid redundant description.
The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (10)
1. An illumination system is characterized by comprising a light source component, a light homogenizing and shaping element arranged on an output light path of the light source component, and an objective lens group arranged on an output light path of the light homogenizing and shaping element;
the light homogenizing and shaping element is used for homogenizing and shaping light emitted by the light source component into a light beam with a preset spot shape;
and the objective lens group is used for modulating the size of light spots of light beams output by the light source component.
2. The illumination system as recited in claim 1, wherein the dodging shaping element comprises a microlens array disposed in an output optical path of the light source module, a condenser lens disposed in an output optical path of the microlens array;
wherein, the micro-element of the micro-lens array is a micro-element structure with a set shape.
3. The illumination system of claim 2, wherein the array of microlenses is a double row array of microlenses, and the spacing between two rows of microlens arrays is equal to the focal length of a single one of the microlens arrays.
4. The illumination system of claim 1, wherein the integrator element comprises an integrator rod disposed in an output optical path of the light source module, a light exit end surface of the integrator rod being contoured to the set shape.
5. The illumination system as recited in claim 1, wherein the light source module comprises a luminescent light source and a collimating lens disposed in an output optical path of the luminescent light source.
6. The illumination system of claim 5, wherein the number of the light sources is two, and one of the collimating lenses is disposed on an output light path of each of the light sources; and the light combining element is arranged on the output light paths of the two collimating lenses and is used for combining the light beams output by the two collimating lenses and outputting the light beams.
7. The illumination system of claim 1, wherein the objective lens group comprises a doublet and a microobjective.
8. A microscope apparatus comprising an illumination system according to any one of claims 1 to 7, and an image collector;
the illumination system is used for projecting illumination light to a sample to be measured;
the image collector is used for collecting the image of the sample to be measured under the irradiation of the illumination light.
9. The microscope apparatus according to claim 8, wherein a dichroic mirror is further provided on an output light path of the condenser lens in the illumination system;
the image collector is arranged on an output light path of the dichroic mirror and used for receiving reflected light which is incident to the surface of the sample to be detected of the image collector through the dichroic mirror.
10. The microscope device according to claim 9, wherein the dichroic mirror is provided on an optical path between a plurality of lenses included in the objective lens group.
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| CN112130308A (en) * | 2020-08-20 | 2020-12-25 | 浙江大学 | High-resolution microscopic imaging system with multi-angle illumination |
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