CN114857126A - Cylinder control device, cylinder control method, and electronic apparatus - Google Patents

Cylinder control device, cylinder control method, and electronic apparatus Download PDF

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Publication number
CN114857126A
CN114857126A CN202210583238.6A CN202210583238A CN114857126A CN 114857126 A CN114857126 A CN 114857126A CN 202210583238 A CN202210583238 A CN 202210583238A CN 114857126 A CN114857126 A CN 114857126A
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cylinder
target
piston
movement
speed
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Chinese (zh)
Inventor
葛德高
陈信宏
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Changxin Memory Technologies Inc
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Changxin Memory Technologies Inc
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Priority to CN202210583238.6A priority Critical patent/CN114857126A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08Characterised by the construction of the motor unit
    • F15B15/14Characterised by the construction of the motor unit of the straight-cylinder type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20Other details, e.g. assembly with regulating devices
    • F15B15/22Other details, e.g. assembly with regulating devices for accelerating or decelerating the stroke
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B19/00Testing; Calibrating; Fault detection or monitoring; Simulation or modelling of fluid-pressure systems or apparatus not otherwise provided for
    • F15B19/005Fault detection or monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B20/00Safety arrangements for fluid actuator systems; Applications of safety devices in fluid actuator systems; Emergency measures for fluid actuator systems
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B21/00Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
    • F15B21/02Servomotor systems with programme control derived from a store or timing device; Control devices therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Fluid-Pressure Circuits (AREA)

Abstract

The disclosure provides a cylinder control device, a cylinder control method and an electronic device. The cylinder control system includes: the speed acquisition unit is used for acquiring the preset movement speed of the piston in the target cylinder; the pressure adjusting device is electrically connected with the speed acquiring unit and used for adjusting the target cylinder to meet the target working pressure according to the preset movement speed; and the speed control unit is electrically connected with the pressure regulating equipment and used for adjusting the movement speed of the piston in the target cylinder at least according to the target working pressure so as to maintain the adjusted movement speed of the piston in the target cylinder within a first preset range. The cylinder control system realizes automatic control of the working pressure and speed of the cylinder so as to ensure stable operation of a semiconductor manufacturing process.

Description

Cylinder control device, cylinder control method, and electronic apparatus
Technical Field
The disclosure relates to the technical field of semiconductor manufacturing, in particular to a cylinder control device, a cylinder control method and electronic equipment.
Background
In a semiconductor manufacturing process, a machine table part is driven by a cylinder to move so as to achieve the purpose of transmitting a silicon wafer or positioning the silicon wafer, so that a cylinder is an important and indispensable movement driving part, the position stability of the silicon wafer is influenced due to the fact that the cylinder moves too fast, or the silicon wafer is collided during positioning, the productivity loss caused by the production beat is influenced due to the fact that the cylinder moves too slowly, and therefore the speed of the cylinder is critical to the quality stability and the productivity of the wafer. The cylinder movement speed generally refers to the linear movement speed of a piston in a cylinder.
The moving speed of the air cylinder is related to the working pressure of the cylinder body, the increasing of the working pressure can lead to the increase of the moving speed of the air cylinder, the decreasing of the working pressure can lead to the decrease of the moving speed of the air cylinder, the too high moving speed of the air cylinder not only can affect the stability of the position of the wafer, but also can lead to the breakage of the wafer during positioning, and the too low moving speed of the air cylinder can affect the production beat, thereby causing the capacity loss.
Therefore, there is a need in the art to provide a cylinder control system to automatically control the working pressure and speed of the cylinder and ensure smooth performance of the semiconductor manufacturing process.
Disclosure of Invention
The disclosure mainly aims to provide a cylinder control device, a cylinder control method and an electronic device, so as to solve the problem that in the prior art, too fast or too slow movement speed of a cylinder affects a semiconductor manufacturing process.
In order to achieve the above object, according to one aspect of the present disclosure, there is provided a cylinder control system including: the speed acquisition unit is used for acquiring the preset movement speed of the piston in the target cylinder; the pressure adjusting device is electrically connected with the speed acquiring unit and used for adjusting the target cylinder to meet the target working pressure according to the preset movement speed; and the speed control unit is electrically connected with the pressure regulating equipment and used for adjusting the movement speed of the piston in the target cylinder at least according to the target working pressure so as to maintain the adjusted movement speed of the piston in the target cylinder within a first preset range.
Optionally, the pressure regulating device comprises: the first receiving module is in communication connection with the pressure detection unit and used for receiving a preset movement speed; the air inflow adjusting module is in communication connection with the first receiving module and used for acquiring the air inflow of the target cylinder according to the preset movement speed; a pressure regulating valve for regulating a pressure of the target cylinder; and the first control module is respectively in communication connection with the air inflow adjusting module and the pressure regulating valve and is used for controlling the pressure regulating valve according to the air inflow of the target cylinder so as to regulate the target cylinder to meet the target working pressure.
Optionally, the pressure regulating device further comprises: the first judgment module is in communication connection with the first control module and used for judging whether the target working pressure is lower than or exceeds a second preset range or not and outputting a first control signal under the condition that the judgment result is yes; and the first alarm module is electrically connected with the first judgment module and is used for carrying out alarm processing under the condition of receiving the first control signal.
Optionally, the speed control unit comprises: the first obtaining module is electrically connected with the pressure regulating device and used for obtaining a target movement speed of a piston in a target cylinder in first movement time according to target working pressure and a first preset relation curve, wherein the first preset relation curve is a curve representing a corresponding relation between the first movement time and the target working pressure; and the second control module is electrically connected with the first acquisition module and used for controlling the piston in the target cylinder to move at the target movement speed.
Optionally, the first obtaining module includes: the sub-acquisition module is electrically connected with the pressure regulating equipment and used for acquiring first movement time according to the target working pressure and the first preset relation curve; and the second calculation module is electrically connected with the sub-acquisition module and used for calculating the target movement speed according to the first movement time and the one-way movement length of the piston in the target cylinder.
Optionally, the number of the target cylinders is multiple, and the second control module is used for enabling the pistons in the multiple target cylinders to move at the target movement speed.
Optionally, the cylinder control system further comprises: and the speed detection unit is used for detecting the movement speed of the piston in the target cylinder.
Optionally, the cylinder control system further comprises: and the second alarm module is electrically connected with the speed detection unit and used for carrying out alarm processing when the situation that the movement speed of the piston in the target cylinder is lower than or exceeds a first preset range is detected.
Optionally, the speed acquisition unit includes: the first sensor is arranged on the target cylinder and used for acquiring the starting time point of the movement of the piston in the cylinder; the second sensor is arranged on the target cylinder and used for acquiring the stop time point of the movement of the piston in the cylinder; and the third calculation module is electrically connected with the first sensor and the second sensor respectively and used for acquiring the movement speed of the piston in the target cylinder according to the starting time point, the stopping time point and the one-way movement length of the piston in the target cylinder.
Optionally, the second alarm module comprises: the second receiving module is electrically connected with the speed detection unit and used for receiving the movement speed of the piston in the target cylinder; the second judgment module is electrically connected with the speed detection unit and used for judging whether the movement speed of the piston in the target cylinder is lower than or exceeds a first preset range or not and outputting an alarm signal under the condition that the judgment result is yes; and the display screen is electrically connected with the second judgment module and is used for displaying the alarm signal in a graphic mode.
According to another aspect of the present disclosure, there is provided a cylinder control method including: acquiring a preset movement speed of a piston in a target cylinder; adjusting a target cylinder to meet the target working pressure according to the preset movement speed; and adjusting the movement speed of the piston in the target cylinder at least according to the target working pressure so as to maintain the adjusted movement speed of the piston in the target cylinder within a first preset range.
Optionally, adjusting the moving speed of the piston in the target cylinder according to at least the target working pressure comprises: determining a target movement speed of a piston in a target cylinder within first movement time according to target working pressure and a first preset relation curve, wherein the first preset relation curve is a curve representing the corresponding relation between the first movement time and the target working pressure; and controlling the piston in the target cylinder to move at the target movement speed.
Optionally, the cylinder control method further comprises: acquiring historical motion data of a target cylinder, wherein the historical motion data comprises: a plurality of historical movement times, and a plurality of historical cylinder pressure values corresponding to the plurality of historical movement times; establishing a plurality of relation curves of a plurality of historical movement times and a plurality of historical cylinder pressure values; and fitting the plurality of relation curves to obtain a first preset relation curve.
Optionally, obtaining a target movement speed of the piston in the target cylinder within a first movement time according to the target working pressure and the first preset relationship curve, including: acquiring first movement time according to the target working pressure and a first preset relation curve; and calculating the target movement speed according to the first movement time and the one-way movement length of the piston in the target cylinder.
According to another aspect of the present disclosure, there is also provided an electronic device including: a processor; a memory for storing processor-executable instructions; wherein the processor is configured to execute instructions to implement the cylinder control method as described above.
By applying the technical scheme, the cylinder control system is provided, the preset movement speed of the piston in the target cylinder is obtained through the speed obtaining unit, the pressure adjusting device is enabled to adjust the target cylinder to meet the target working pressure according to the preset movement speed, then the movement speed of the piston in the target cylinder is adjusted at least according to the target working pressure by utilizing the speed control unit, so that the movement speed of the piston in the adjusted target cylinder is maintained in a first preset range, the automatic control of the working pressure and speed of the cylinder is realized, and the smooth proceeding of a semiconductor manufacturing process is ensured.
The details of one or more embodiments of the application are set forth in the accompanying drawings and the description below. Other features and advantages of the application will be apparent from the description and drawings, and from the claims.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure and are not to limit the disclosure. In the drawings:
FIG. 1 is a schematic diagram illustrating a cylinder control apparatus according to an exemplary embodiment;
FIG. 2 is a schematic diagram illustrating the operating pressure of a cylinder versus the time of movement of a piston within the cylinder, according to an exemplary embodiment;
FIG. 3 is a schematic diagram illustrating another cylinder control arrangement according to an exemplary embodiment;
FIG. 4 is a block flow diagram illustrating a cylinder control method according to an exemplary embodiment;
fig. 5 is an apparatus block diagram of a terminal according to an embodiment of the present disclosure.
In order to more clearly illustrate the embodiments of the present disclosure or technical solutions in the conventional technology, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Wherein the figures include the following reference numerals:
10. a target cylinder; 20. a motion time analysis system; 30. a pressure regulating valve; 40. a first sensor; 50. a second sensor; 60. a processor; 70. a memory.
Detailed Description
It should be noted that, in the present disclosure, the embodiments and features of the embodiments may be combined with each other without conflict. The present disclosure will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
In order to make the technical solutions of the present disclosure better understood by those skilled in the art, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure, and it is obvious that the described embodiments are only some embodiments of the present disclosure, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
It should be noted that the terms "first," "second," and the like in the description and claims of the present disclosure and in the above-described drawings are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the present disclosure may be described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example 1
According to an embodiment of the present disclosure, there is provided a cylinder control apparatus, and fig. 1 is a schematic view of the cylinder control apparatus provided according to the embodiment of the present disclosure, as shown in fig. 1, the cylinder control apparatus including: a speed acquisition unit, a pressure adjustment device, and a speed control unit, which will be described below.
By adopting the above cylinder control device of this embodiment, the preset movement speed of the piston in the target cylinder 10 is obtained by the speed obtaining unit, and the pressure adjusting device is enabled to adjust the target cylinder 10 to meet the target working pressure according to the preset movement speed, and then the movement speed of the piston in the target cylinder 10 is adjusted by the speed control unit at least according to the target working pressure, so that the movement speed of the piston in the adjusted target cylinder 10 is maintained in the first preset range, thereby realizing the automatic control of the working pressure and speed of the cylinder, and ensuring the smooth proceeding of the semiconductor manufacturing process.
Moreover, the speed control unit can be used for preventing the cylinder from being abraded and accelerated and the service life of the cylinder from being reduced due to the fact that the moving speed of the cylinder is too high or too low, and can also be used for avoiding wafer processing abnormity or wafer breakage caused by inclination due to inconsistent speed of the cylinder.
In addition, the cylinder inevitably generates loss under long-time actuation, the loss condition of the cylinder is uncontrollable, and the first preset range can be set along with the increase of the service time so as to adjust the upper limit and the lower limit of the movement speed of the piston in the target cylinder 10, thereby monitoring the health condition of the target cylinder 10 in real time.
In order to achieve automatic adjustment of the cylinder pressure, as an alternative embodiment, the pressure adjusting apparatus includes a first receiving module, an intake air amount adjusting module, a pressure adjusting valve 30, and a first control module, as shown in fig. 1, wherein: the first receiving module is in communication connection with the pressure detection unit and used for receiving a preset movement speed; the air inflow adjusting module is in communication connection with the first receiving module and is used for acquiring the air inflow of the target cylinder 10 according to the preset movement speed; a pressure regulating valve 30 for regulating the pressure of the target cylinder 10; the first control module is respectively in communication connection with the air inflow adjusting module and the pressure regulating valve 30, and is used for controlling the pressure regulating valve 30 according to the air inflow of the target cylinder 10 so as to regulate the target cylinder 10 to meet the target working pressure.
In the above embodiment, the first receiving module receives the preset movement speed, and since different linear relationships exist between the intake pressures and speeds of different cylinders, the intake air amount adjusting module can output the intake air amount of the target cylinder 10 corresponding to the preset movement speed according to the linear relationship, so that the pressure regulating valve 30 regulates the intake air amount of the target cylinder 10 under the control of the first control module, and the target cylinder 10 meets the target working pressure. Illustratively, the pressure regulating valve 30 has a data analysis (CDA) function therein and is controlled by direct current DC.
As an optional implementation manner, the pressure adjusting apparatus further includes a first determining module and a first alarm module, where: the first judgment module is in communication connection with the first control module and is used for judging whether the target working pressure is lower than or exceeds a second preset range or not and outputting a first control signal under the condition that the judgment result is yes; the first alarm module is electrically connected with the first judgment module and is used for carrying out alarm processing under the condition of receiving the first control signal.
In the above embodiment, when the first determining module determines that the target working pressure of the target cylinder 10 is lower than or exceeds the second preset range, the first determining module sends a first control signal to the first alarm module, and the second alarm module can perform alarm processing when receiving the first control signal, so as to remind an operator to stop the machine for maintenance, thereby ensuring the safety of the mechanical arm and the silicon wafer to a certain extent.
Illustratively, the alarm module includes an audible alarm device, and the audible alarm device warns the target cylinder 10 if the target working pressure exceeds a second preset range. It should be noted that the manner of the alarm module performing the alarm processing is not limited to the above example, and the alarm module may further include a light alarm device, and the disclosure is not limited in particular.
In order to realize the automatic control of the cylinder speed, as an alternative embodiment, the speed control unit comprises a first acquisition module and a second control module. The first obtaining module is electrically connected with the pressure adjusting device and is used for obtaining a target movement speed of a piston in a target cylinder 10 within a first movement time according to a target working pressure and a first preset relation curve, wherein the first preset relation curve is a curve representing a corresponding relation between the first movement time and the target working pressure; the second control module is electrically connected with the first acquisition module and is used for controlling the piston in the target cylinder 10 to move at the target movement speed.
In the above embodiment, the first obtaining module may include a sub obtaining module electrically connected to the pressure adjusting device for obtaining the first movement time according to the target working pressure and the first preset relationship curve, and a second calculating module electrically connected to the sub obtaining module for calculating the target movement speed according to the first movement time and the one-way movement length of the piston in the target cylinder 10.
The automatic control process of the speed control unit may include: and enabling the sub-acquisition module to acquire first movement time according to the target working pressure of the target cylinder 10 and a first preset relation curve, enabling the second calculation module to calculate a target movement speed according to the first movement time and the one-way movement length of the piston in the target cylinder 10, and then controlling the piston in the target cylinder 10 to move at the target movement speed through the second control module.
For example, a first obtaining module in the speed control unit obtains working pressures of a certain cylinder corresponding to different time points within a preset working time, and establishes a relation curve between the working pressure of the certain cylinder and a movement time of a piston in the certain cylinder, as shown in fig. 2, and then determines a first movement time corresponding to a target working pressure in the relation curve, and a second calculating module in the speed control unit calculates a target movement speed of the certain cylinder by using a one-way movement length of the piston in the certain cylinder and the first movement time, so that the second control module in the speed control unit sets the cylinder speed accordingly.
With the cylinder control system in the present embodiment, it is also possible to automatically control the speeds of a plurality of target cylinders 10, as shown in fig. 3. At this time, the above-mentioned second control module in the speed control unit is used to control the pistons in the plurality of target cylinders 10 to move at the target movement speed. The motion consistency of each cylinder is controlled, the speed of each cylinder is automatically adjusted, the machine moves consistently, and the phenomenon that a platform inclines or moves inconsistently due to the difference of the speeds of the cylinders is avoided.
Illustratively, a pressure adjusting device is electrically connected with a first cylinder and a second cylinder respectively, a speed acquiring unit is electrically connected with the pressure adjusting device and is used for acquiring a first preset movement speed of a piston in the first cylinder and a second preset movement speed of the piston in the second cylinder, the pressure adjusting device respectively adjusts the first cylinder and the second cylinder to meet corresponding target working pressures according to the first preset movement speed and the second preset movement speed, a speed control unit is electrically connected with the pressure adjusting device, wherein a first acquiring module respectively acquires the working pressures of the first cylinder and the second cylinder corresponding to different time points in preset working time and establishes a relation curve of the working pressures and the movement time of the piston in the cylinder, then determines a first movement time corresponding to the target working pressure in the first relation curve, a second calculating module utilizes the one-way movement length of the piston in the first cylinder and the corresponding first movement time, and calculating to obtain a first target movement speed, and calculating to obtain a second target movement speed by using the one-way movement length of the piston in the second cylinder and the corresponding first movement time, so that a second control module in the speed control unit sets the movement speed of the piston in the first cylinder at the first target movement speed, and sets the movement speed of the piston in the second cylinder at the second target movement speed.
As an optional implementation manner, the cylinder control system in this embodiment further includes a speed detection unit and a second alarm module, where: the speed detection unit is used for detecting the movement speed of the piston in the target cylinder 10; the second alarm module is electrically connected with the speed detection unit and is used for carrying out alarm processing when the movement speed of the piston in the target cylinder 10 is detected to be lower than or exceed a first preset range.
In the above embodiment, the speed detection unit may include the first sensor 40, the second sensor 50, and the moving time analysis system 20, as shown in fig. 1 and 3, wherein: the first sensor 40 is arranged on the target cylinder 10 and used for acquiring the starting time point of the piston movement in the cylinder; the second sensor 50 is arranged on the target cylinder 10 and is used for acquiring a stop time point of the piston movement in the cylinder; the motion time analysis system 20 is electrically connected to the first sensor 40 and the second sensor 50, respectively, and is configured to calculate a cylinder motion time to be characterized as a cylinder speed, so as to detect a motion speed of a piston in the target cylinder 10.
Illustratively, the moving time analysis system 20 includes a third calculation module electrically connected to the first sensor 40 and the second sensor 50 respectively, for calculating the moving speed of the piston in the target cylinder 10 according to the starting time point, the stopping time point, and the one-way moving length of the piston in the target cylinder 10.
In the above embodiment, as shown in fig. 2, if the second alarm module determines that the movement speed of the piston in the target cylinder 10 detected by the speed detection unit exceeds the first preset range, the alarm processing is performed, and if the second alarm module determines that the movement speed of the piston in the target cylinder 10 detected by the speed detection unit is lower than the first preset range, the alarm processing is also performed. In order to implement the above functions, the second alarm module may include a second receiving module, a second determining module, and a display screen, wherein: the second receiving module is electrically connected with the speed detecting unit and is used for receiving the movement speed of the piston in the target cylinder 10; the second judgment module is electrically connected with the speed detection unit and is used for judging whether the movement speed of the piston in the target cylinder 10 is lower than or exceeds a first preset range or not and outputting an alarm signal under the condition that the judgment result is yes; the display screen is electrically connected with the second judgment module and used for displaying the alarm signal in a graphic mode, so that an operator is reminded to stop the machine for maintenance, and the safety of the mechanical arm and the silicon wafer is guaranteed to a certain extent.
Example 2
According to an embodiment of the present disclosure, a cylinder control method is provided, it should be noted that the steps illustrated in the flowchart of the drawings may be executed in a computer system such as a set of computer executable instructions, and that while a logical order is illustrated in the flowchart, in some cases the steps illustrated or described may be executed in an order different from that shown herein.
Fig. 4 is a schematic flow chart of a cylinder control method provided according to an embodiment of the present disclosure, and as shown in fig. 4, the method includes the following steps:
step S102, acquiring a preset movement speed of a piston in a target cylinder;
step S104, adjusting a target cylinder to meet target working pressure according to a preset movement speed;
and S106, adjusting the movement speed of the piston in the target cylinder at least according to the target working pressure, so that the adjusted movement speed of the piston in the target cylinder is maintained in a first preset range.
It should be noted that, the above steps S102 to S106 correspond to the speed acquisition unit, the pressure adjustment device, and the speed control unit in embodiment 1, and the implemented examples and application scenarios of the steps are the same, but are not limited to the disclosure of embodiment 1.
By adopting the cylinder control method disclosed by the disclosure, the preset movement speed of the piston in the target cylinder is obtained, the target cylinder is adjusted to meet the target working pressure according to the preset movement speed, and then the movement speed of the piston in the target cylinder is adjusted at least according to the target working pressure, so that the movement speed of the piston in the target cylinder after adjustment is maintained in a first preset range, and thus the automatic control of the working pressure and speed of the cylinder is realized, and the stable proceeding of a semiconductor manufacturing process is ensured.
As an alternative embodiment, adjusting the movement speed of the piston in the target cylinder according to at least the target working pressure includes: determining a target movement speed of a piston in a target cylinder within first movement time according to target working pressure and a first preset relation curve, wherein the first preset relation curve is a curve representing the corresponding relation between the first movement time and the target working pressure; and controlling the piston in the target cylinder to move at the target movement speed.
For example, the working pressure of a certain cylinder corresponding to different time points within a preset working time is obtained, a relation curve of the working pressure of the cylinder and the movement time of a piston in the cylinder is established, as shown in fig. 2, then a first movement time corresponding to the target working pressure in the relation curve is determined, and a target movement speed of the cylinder is calculated by using the one-way movement length of the piston in the cylinder and the first movement time, so as to set the cylinder speed.
In order to obtain the first preset relationship curve, as an optional implementation, the cylinder control method further includes: acquiring historical motion data of a target cylinder, wherein the historical motion data comprises: a plurality of historical movement times, and a plurality of historical cylinder pressure values corresponding to the plurality of historical movement times; establishing a plurality of relation curves of a plurality of historical movement times and a plurality of historical cylinder pressure values; and fitting the plurality of relation curves to obtain a first preset relation curve.
As an alternative embodiment, obtaining the target movement speed of the piston in the target cylinder within the first movement time according to the target working pressure and the first preset relation curve includes: acquiring first movement time according to the target working pressure and a first preset relation curve; and calculating the target movement speed according to the first movement time and the one-way movement length of the piston in the target cylinder.
By adopting the cylinder control method in the embodiment, the speed of a plurality of target cylinders can be automatically controlled. At this time, the cylinder control method includes: and controlling the pistons in the target cylinders to move at the target movement speed. The motion consistency of each cylinder is controlled, the speed of each cylinder is automatically adjusted, the machine moves consistently, and the phenomenon that a platform inclines or moves inconsistently due to the difference of the speeds of the cylinders is avoided.
Illustratively, the process of automatically controlling the speed of the plurality of target cylinders is as follows: acquiring a first preset movement speed of a piston in a first cylinder and a second preset movement speed of a piston in a second cylinder; respectively adjusting a first air cylinder and a second air cylinder to meet corresponding target working pressure according to the first preset movement speed and the second preset movement speed; respectively acquiring working pressures of a first cylinder and a second cylinder corresponding to different time points within preset working time, establishing a relation curve of the working pressures and the movement time of a piston in the cylinder, and then determining the corresponding first movement time of the target working pressure in the first relation curve; calculating to obtain a first target movement speed by using the one-way movement length of the piston in the first cylinder and the corresponding first movement time, and calculating to obtain a second target movement speed by using the one-way movement length of the piston in the second cylinder and the corresponding first movement time; the movement speed of the piston in the first cylinder is set at a first target movement speed, while the movement speed of the piston in the second cylinder is set at a second target movement speed.
As an alternative embodiment, the cylinder control method in the present embodiment further includes: detecting the movement speed of a piston in a target cylinder; and under the condition that the movement speed of the piston in the target cylinder is detected to be lower than or exceed a first preset range, performing alarm processing.
In the above embodiment, the detection of the moving speed of the piston in the target cylinder may be achieved by calculating the cylinder moving time to be characterized as the cylinder speed. At this time, the step of detecting the moving speed of the piston in the target cylinder includes: respectively acquiring a starting time point and a stopping time point of the movement of a piston in a cylinder; and acquiring the movement speed of the piston in the target cylinder according to the starting time point, the stopping time point and the one-way movement length of the piston in the target cylinder.
Illustratively, the target cylinder 10 is provided with a first sensor 40 and a second sensor 50, as shown in fig. 1 and 3, the first sensor 40 is used for acquiring a starting time point of piston movement in the cylinder, the second sensor 50 is used for acquiring a stopping time point of piston movement in the cylinder, and the movement speed of the piston in the target cylinder 10 is calculated according to the starting time point, the stopping time point and the one-way movement length of the piston in the target cylinder 10.
Example 3
Embodiments of the present disclosure may provide an electronic device, which may be any one of computer terminal devices in a computer terminal group.
Optionally, in this embodiment, the electronic device may be located in at least one network device of a plurality of network devices of a computer network.
Alternatively, fig. 5 is a block diagram illustrating a structure of an electronic device according to an example embodiment. As shown in fig. 5, the electronic device may include: one or more processors 60 (only one shown), a memory 70 for storing processor-executable instructions; wherein the processor is configured to execute instructions to implement any of the cylinder control methods described above.
The memory may be used to store software programs and modules, such as program instructions/modules corresponding to the cylinder control method and apparatus in the embodiments of the present disclosure, and the processor executes various functional applications and data processing by running the software programs and modules stored in the memory, so as to implement the above-described cylinder control method. The memory may include high speed random access memory, and may also include non-volatile memory, such as one or more magnetic storage devices, flash memory, or other non-volatile solid-state memory. In some examples, the memory may further include memory located remotely from the processor, and these remote memories may be connected to the computer terminal through a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
The processor can call the information and application program stored in the memory through the transmission device to execute the following steps: acquiring a preset movement speed of a piston in a target cylinder; adjusting a target cylinder to meet the target working pressure according to the preset movement speed; and adjusting the movement speed of the piston in the target cylinder at least according to the target working pressure so as to maintain the adjusted movement speed of the piston in the target cylinder within a first preset range.
Optionally, the processor may further execute the program code of the following steps: adjusting a speed of movement of a piston within a target cylinder based at least on a target operating pressure, comprising: determining a target movement speed of a piston in a target cylinder within first movement time according to target working pressure and a first preset relation curve, wherein the first preset relation curve is a curve representing the corresponding relation between the first movement time and the target working pressure; and controlling the piston in the target cylinder to move at the target movement speed.
Optionally, the processor may further execute the program code of the following steps: acquiring historical motion data of a target cylinder, wherein the historical motion data comprises: a plurality of historical movement times, and a plurality of historical cylinder pressure values corresponding to the plurality of historical movement times; establishing a plurality of relation curves of a plurality of historical movement times and a plurality of historical cylinder pressure values; and fitting the plurality of relation curves to obtain a first preset relation curve.
Optionally, the processor may further execute the program code of the following steps: according to the target working pressure and a first preset relation curve, the target movement speed of the piston in the target cylinder in the first movement time is obtained, and the method comprises the following steps: acquiring first movement time according to the target working pressure and a first preset relation curve; and calculating the target movement speed according to the first movement time and the one-way movement length of the piston in the target cylinder.
Those of ordinary skill in the art will appreciate that the configuration shown in FIG. 5 is merely illustrative. Fig. 5 is a diagram illustrating a structure of the electronic device. For example, more or fewer components (e.g., network interfaces, display devices, etc.) than shown in FIG. 5 may also be included or have a different configuration than shown in FIG. 5.
Those skilled in the art will appreciate that all or part of the steps in the methods of the above embodiments may be implemented by a program instructing hardware associated with the terminal device, where the program may be stored in a computer-readable storage medium, and the storage medium may include: flash disks, Read-Only memories (ROMs), Random Access Memories (RAMs), magnetic or optical disks, and the like.
The above-mentioned serial numbers of the embodiments of the present disclosure are merely for description and do not represent the merits of the embodiments.
In the above embodiments of the present disclosure, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the several embodiments provided in the present disclosure, it should be understood that the disclosed technology can be implemented in other ways. The above-described embodiments of the apparatus are merely illustrative, and for example, a division of a unit is merely a division of a logic function, and an actual implementation may have another division, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, units or modules, and may be in an electrical or other form.
Units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present disclosure may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The integrated unit, if implemented in the form of a software functional unit and sold or used as a separate product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present disclosure may be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present disclosure. And the aforementioned storage medium includes: a U-disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic or optical disk, and other various media capable of storing program codes.
The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure, and various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.

Claims (15)

1. A cylinder control system, comprising:
the speed acquisition unit is used for acquiring the preset movement speed of the piston in the target cylinder;
the pressure adjusting device is electrically connected with the speed acquiring unit and used for adjusting the target cylinder to meet the target working pressure according to the preset movement speed;
and the speed control unit is electrically connected with the pressure regulating equipment and used for adjusting the movement speed of the piston in the target cylinder at least according to the target working pressure so as to maintain the adjusted movement speed of the piston in the target cylinder within a first preset range.
2. The cylinder control system according to claim 1, characterized in that the pressure adjusting apparatus comprises:
the first receiving module is in communication connection with the pressure detection unit and used for receiving the preset movement speed;
the air inflow adjusting module is in communication connection with the first receiving module and used for acquiring the air inflow of the target cylinder according to the preset movement speed;
a pressure regulating valve for regulating the pressure of the target cylinder;
and the first control module is respectively in communication connection with the air inflow adjusting module and the pressure regulating valve and is used for controlling the pressure regulating valve according to the air inflow of the target cylinder so as to regulate the target cylinder to meet the target working pressure.
3. The cylinder control system according to claim 2, characterized in that the pressure adjusting apparatus further comprises:
the first judgment module is in communication connection with the first control module and is used for judging whether the target working pressure is lower than or exceeds a second preset range or not and outputting a first control signal under the condition that the judgment result is yes;
and the first alarm module is electrically connected with the first judgment module and is used for carrying out alarm processing under the condition of receiving the first control signal.
4. The cylinder control system according to claim 1, wherein the speed control unit comprises:
the first obtaining module is electrically connected with the pressure regulating device and used for obtaining a target movement speed of a piston in the target cylinder within first movement time according to the target working pressure and a first preset relation curve, wherein the first preset relation curve is a curve representing a corresponding relation between the first movement time and the target working pressure;
and the second control module is electrically connected with the first acquisition module and used for controlling the piston in the target cylinder to move at the target movement speed.
5. The cylinder control system according to claim 4, wherein the first acquisition module includes:
the sub-acquisition module is electrically connected with the pressure regulating equipment and used for acquiring the first movement time according to the target working pressure and the first preset relation curve;
and the second calculation module is electrically connected with the sub-acquisition module and used for calculating the target movement speed according to the first movement time and the one-way movement length of the piston in the target cylinder.
6. The cylinder control system of claim 4, wherein the target cylinder is a plurality of cylinders, and the second control module is configured to move pistons in the plurality of target cylinders at the target movement speed.
7. The cylinder control system according to claim 1, further comprising:
and the speed detection unit is used for detecting the movement speed of the piston in the target cylinder.
8. The cylinder control system according to claim 7, further comprising:
and the second alarm module is electrically connected with the speed detection unit and is used for carrying out alarm processing when the situation that the movement speed of the piston in the target cylinder is lower than or exceeds the first preset range is detected.
9. The cylinder control system according to claim 1, wherein the speed acquisition unit includes:
the first sensor is arranged on the target cylinder and used for acquiring the starting time point of the movement of the piston in the cylinder;
the second sensor is arranged on the target cylinder and used for acquiring the stop time point of the movement of the piston in the cylinder;
and the third calculation module is electrically connected with the first sensor and the second sensor respectively and is used for acquiring the movement speed of the piston in the target cylinder according to the starting time point, the stopping time point and the one-way movement length of the piston in the target cylinder.
10. The cylinder control system of claim 8, wherein the second warning module comprises:
the second receiving module is electrically connected with the speed detection unit and used for receiving the movement speed of the piston in the target cylinder;
the second judgment module is electrically connected with the speed detection unit and used for judging whether the movement speed of the piston in the target cylinder is lower than or exceeds the first preset range or not and outputting an alarm signal if the judgment result is yes;
and the display screen is electrically connected with the second judgment module and is used for displaying the alarm signal in a graphic mode.
11. A cylinder control method characterized by comprising:
acquiring a preset movement speed of a piston in a target cylinder;
adjusting the target cylinder to meet the target working pressure according to the preset movement speed;
and adjusting the movement speed of the piston in the target cylinder at least according to the target working pressure so as to maintain the adjusted movement speed of the piston in the target cylinder within a first preset range.
12. The cylinder control method according to claim 11, wherein the adjusting the movement speed of the piston in the target cylinder in accordance with at least the target operating pressure comprises:
determining a target movement speed of a piston in the target cylinder within first movement time according to the target working pressure and a first preset relation curve, wherein the first preset relation curve is a curve representing a corresponding relation between the first movement time and the target working pressure;
and controlling the piston in the target cylinder to move at the target movement speed.
13. The cylinder control method according to claim 12, characterized by further comprising:
acquiring historical motion data of the target cylinder, wherein the historical motion data comprises: a plurality of historical movement times, and a plurality of historical cylinder pressure values corresponding to the plurality of historical movement times;
establishing a plurality of relation curves of the plurality of historical movement times and the plurality of historical cylinder pressure values;
and fitting the plurality of relation curves to obtain the first preset relation curve.
14. The cylinder control method according to claim 12, wherein the obtaining of the target movement speed of the piston in the target cylinder within the first movement time according to the target working pressure and the first preset relationship curve comprises:
acquiring the first movement time according to the target working pressure and the first preset relation curve;
and calculating the target movement speed according to the first movement time and the one-way movement length of the piston in the target cylinder.
15. An electronic device, comprising:
a processor;
a memory for storing the processor-executable instructions;
wherein the processor is configured to execute the instructions to implement the cylinder control method of any one of claims 11 to 14.
CN202210583238.6A 2022-05-26 2022-05-26 Cylinder control device, cylinder control method, and electronic apparatus Pending CN114857126A (en)

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Application Number Priority Date Filing Date Title
CN202210583238.6A CN114857126A (en) 2022-05-26 2022-05-26 Cylinder control device, cylinder control method, and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210583238.6A CN114857126A (en) 2022-05-26 2022-05-26 Cylinder control device, cylinder control method, and electronic apparatus

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115419629A (en) * 2022-08-31 2022-12-02 上海积塔半导体有限公司 Test cylinder, semiconductor equipment and method for monitoring running speed of piston of test cylinder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115419629A (en) * 2022-08-31 2022-12-02 上海积塔半导体有限公司 Test cylinder, semiconductor equipment and method for monitoring running speed of piston of test cylinder
CN115419629B (en) * 2022-08-31 2024-06-11 上海积塔半导体有限公司 Test cylinder, semiconductor device and method for monitoring running speed of piston of semiconductor device

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