CN114851055A - Method for detecting flatness of polishing film of double-sided polishing machine - Google Patents

Method for detecting flatness of polishing film of double-sided polishing machine Download PDF

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Publication number
CN114851055A
CN114851055A CN202210463969.7A CN202210463969A CN114851055A CN 114851055 A CN114851055 A CN 114851055A CN 202210463969 A CN202210463969 A CN 202210463969A CN 114851055 A CN114851055 A CN 114851055A
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China
Prior art keywords
polishing
polishing film
flatness
dial indicator
film
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CN202210463969.7A
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Chinese (zh)
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CN114851055B (en
Inventor
于钦涛
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Beijing Crystal Photoelectric Science & Technology Inc
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Beijing Crystal Photoelectric Science & Technology Inc
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation

Abstract

The invention relates to a method for detecting the flatness of a polishing film of a double-sided polishing machine, which measures the flatness of the polishing film through a tool consisting of two dial gauges and a hard gasket, and ensures that a connecting line of gauge heads of the two dial gauges is tangent to an inner hole of the polishing film during measurement, so that the height relation of the middle positions of an inner ring, an outer ring and the polishing film of the polishing film is determined according to the readings of the two dial gauges, and a polishing disc is repaired in a targeted manner according to the measurement result, so that the flatness of all parts of the surface of the polishing film is consistent, and the processing precision of a polishing sheet is ensured.

Description

Method for detecting flatness of polishing film of double-sided polishing machine
Technical Field
The invention belongs to the field of plane double-side polishing, and relates to a method for detecting the flatness of a polishing film of a plane double-side polishing machine.
Background
Four-action double-side polishing machines such as 9B are widely used in the field of double-side polishing. Polyurethane or damping cloth polishing films are adhered to the upper disc and the lower disc of the double-sided polishing machine. And a carrier wandering star wheel for placing the polishing sheet is arranged between the upper film and the lower film, a hole for placing the polishing sheet is arranged in the wandering star wheel, and the sheet to be polished is placed in the hole. The apparatus was started up for top and bottom polishing. The polishing sheet has high requirements on the surface shape. One of the main factors affecting the surface shape of the polishing sheet is the flatness of the polishing film. Since the polishing film is made of a soft material, the flatness of the polishing film cannot be detected for a long time, and the disc is repaired by using a method of reversely rotating the correction wheel according to the habit. Because the disc repairing is not based on the disc repairing, the difference of the surface shapes of products thrown by the polishing machines is very large, a plurality of machines are needed to match the products, and the semi-finished products of the polishing sheets with poor surface shapes are transferred to the polishing machines with good states to repair the surface shapes. In order to make the flatness of the polishing film uniform, the flatness of the polishing film must be measured.
Disclosure of Invention
The invention aims to solve the problem that the flatness of the polishing film cannot be measured by using a traditional plane measuring method, overcomes the characteristic of softness of the polishing film, uses a gasket as a support and uses two dial gauges to measure the flatness of the polishing film.
The purpose of the invention and the technical problem to be solved are realized by adopting the following technical scheme. The invention provides a method for detecting the flatness of a polishing film of a double-sided polishing machine, which comprises the following steps: 1) assembling a detection tool, wherein the tool comprises a support frame with the length of Lmm, and a first dial indicator and a second dial indicator which are fixed on the support frame, wherein the first dial indicator is fixed in the middle of the support frame, the second dial indicator is fixed at the position of Nmm on one side of the first dial indicator, and the support frame is supported through support legs at two ends;
2) correcting the zero position of the tool: placing 4 gaskets made of hard materials on a 0-level marble platform, then placing an assembled detection tool on the 0-level marble platform, respectively positioning support legs at two ends of a tool support frame and two dial indicator heads on the corresponding gaskets, and then correcting a first dial indicator 1 and a second dial indicator 2 to 0; 3) placing the gasket on a polishing film on the surface of the polishing disc, and placing the polishing film corresponding to the first dial indicator head close to an inner hole of the polishing film; then, placing the corrected tool on the polishing film, placing the support legs of the tool and the dial gauge heads on corresponding gaskets, and enabling the connecting line of the two dial gauge heads to be separated from the inner hole of the polishing film; 4) reading the values of the first dial indicator and the second dial indicator, rotating the polishing disc to uniformly measure the values of at least four different positions of the polishing die, and taking the average value of the measurement results; 5) and repairing the disc according to the measurement result.
The object of the present invention and the technical problems solved thereby can be further achieved by the following technical measures.
The support frame comprises a cross rod and support legs fixed at two ends of the cross rod, one end of the cross rod is fixed with one support leg, the other end of the cross rod is fixed with two support legs, and the distance between each support leg and the end of the cross rod at the end of the support leg is consistent.
In the method for detecting the flatness of the polishing film of the double-sided polishing machine, the support legs are dial gauge heads and form an isosceles triangle.
According to the flatness detection method for the polishing film of the double-sided polishing machine, the gaskets are all round gaskets, and the peripheral surfaces of the gaskets corresponding to the first dial indicator head are tangent to the inner hole of the polishing film.
According to the flatness detection method for the polishing film of the double-sided polishing machine, the support frame is further fixed with a balancing weight which is as heavy as the second dial indicator, and the balancing weight and the second dial indicator are symmetrically distributed on two sides of the first dial indicator.
In the method for detecting the flatness of the polishing film of the double-sided polishing machine, the placing sequence of the gaskets in the step 3) is consistent with that in the step 2).
According to the method for detecting the flatness of the polishing film of the double-sided polishing machine, the length L of the support frame and the distance N between the two dial indicators satisfy the following relation: SQRT ((D/2) 2 -((d/2) 2 -a));N=SQRT(((D/2-r/2)/2) 2 -(d/2+a) 2 ) (ii) a Wherein D is the outer diameter of the polishing disk; d is the diameter of the inner hole of the polishing disc; a is the distance from the first dial to the edge of the inner hole of the polishing disk.
According to the flatness detection method of the polishing film of the double-sided polishing machine, the diameter of the gasket is 28-32mm, and the thickness of the gasket is 2.5-3 mm.
In the method for detecting the flatness of the polishing film of the double-sided polishing machine, the corresponding relationship between the measured value in the step 5) and the disc repairing mode is as follows: when the average measured value c of the first dial gauge is positive, the polishing film is high inside and low outside, and the autorotation direction of the correction wheel is consistent with that of the lower polishing disc, namely the correction disc is rotated forwardly; when the average measured value c of the first dial gauge is negative, the polishing film is low inside and high outside, the rotation direction of the correction wheel is opposite to that of the lower polishing disk, and the correction wheel reverses the correction disk.
According to the flatness detection method for the polishing film of the double-sided polishing machine, when the average measurement value b of the second dial indicator in the step 4) is equal to c/2, the height of the polishing film is uniformly changed from inside to outside; when b is larger than c/2, the polishing film is convex in the middle; when b is less than c/2, dishing in the middle of the polishing film is indicated.
Compared with the prior art, the invention has obvious advantages and beneficial effects. By means of the technical scheme, the invention can achieve considerable technical progress and practicability, has wide industrial utilization value and at least has the following advantages:
the invention realizes the detection of the surface flatness of the polishing film by the matching of the dial indicator and the gasket, and judges the height of each part of the surface of the polishing film according to the detection result, thereby pertinently correcting the polishing film according to the heights of different positions of the surface of the polishing film, ensuring the uniformity of the flatness of each part of the polishing film and ensuring the processing precision of the polishing sheet.
Drawings
FIG. 1 is a schematic diagram of a tool for detecting flatness of a polishing film of a double-sided polishing machine in accordance with an embodiment 1 of the present invention;
FIG. 2 is a schematic structural diagram of a tool for detecting flatness of a polishing film of a double-sided polishing machine in embodiment 1 of the present invention;
FIG. 3 is a schematic diagram of a tool for detecting flatness of a polishing film of a double-sided polishing machine in accordance with embodiment 2 of the present invention;
FIG. 4 is a schematic structural diagram of a tool for detecting flatness of a polishing film of a double-sided polishing machine in embodiment 2 of the present invention;
FIG. 5 is a front view of a tool for detecting flatness of a polishing film of a double-sided polishing machine in accordance with embodiment 2 of the present invention;
FIG. 6 is a schematic view of a polishing pad with a high inside and a low outside;
FIG. 7 is a schematic view of a polishing disk with a low inside and a high outside;
FIG. 8 is a schematic view of a polishing pad with a regular transition of inner height and outer height;
FIG. 9 is a schematic view of a polishing disk with a low inside and a high outside and a regular transition;
FIG. 10 is a schematic view of a polishing disk with a concave center between the inner and outer races;
FIG. 11 is a schematic view of a polishing disk with a bulge in the middle of the inner and outer races.
[ description of main element symbols ]
1: first dial gauge
2: second dial gauge
3: cross bar
4: supporting leg
5: gasket
6: balancing weight
7: polishing disk
8: polishing film
9: polishing film inner hole
Detailed Description
To further illustrate the technical means and effects of the present invention for achieving the predetermined objects, the following detailed description will be given to the specific embodiments, structures, features and effects of the method for detecting the flatness of a polishing film of a double-side polishing machine according to the present invention with reference to the accompanying drawings and preferred embodiments.
Please refer to fig. 1-2, which are schematic diagrams of parts of a double-sided polishing machine polishing film flatness detection tool according to embodiment 1 of the present invention, the detection tool includes a support frame, and a first dial indicator 1 and a second dial indicator 2 fixed on the support frame. The first dial indicator 1 is fixed in the middle of the support frame, and the second dial indicator 2 is located on one side of the first dial indicator 1.
Wherein the support frame include horizontal pole 3 and fix the stabilizer blade 4 in 3 both ends bottoms of horizontal pole, above-mentioned first thousandth micrometer and second amesdial are all fixed on horizontal pole 3. Preferably, the number of the legs 4 is 3, one leg 4 is fixed at one end of the cross bar 3, two legs 4 are fixed at the other end, and the 3 legs 4 are not in the same straight line.
In this embodiment, the cross bar 3 is an i-shaped bracket with sufficient rigidity and strong deformation resistance, and is made of gray cast iron and has the size of 20mm × 30mm × Lmm. For enhancing rigidity, a groove with the depth of 5mm, the width of 10mm and the length of Lmm is formed at the middle position of the upper surface and the lower surface along the length direction of the cross bar 3, a hole is punched in the middle of the cross bar 3 for installing a first dial indicator 1, then a hole is punched at the position Nmm away from the right side of the first dial indicator 1 for installing a second dial indicator 2, wherein L is SQRT ((D/2) 2 -((d/2) 2 -a));N=SQRT(((D/2-r/2)/2) 2 -(d/2+a) 2 ) D is polishingDisc 7 disc outer diameter; d is the diameter of the inner hole of the polishing disc; a is the distance between the first dial indicator and the edge of the inner hole of the polishing disc, and the value is generally 3-8 mm.
One end of the cross bar 3 is provided with a screw hole from the end Mmm, the other end of the cross bar 3 is provided with two screw holes which are distributed at intervals from the end Mmm side by side, and the support legs 4 are fixedly supported on the cross bar 3 through one screw hole respectively. Preferably, M is 10, and the distance between two wire holes arranged side by side at the same end of the cross bar is 20mm, but the invention is not limited thereto. In this embodiment, the cross bar 3 is provided with two feet 4 at the end close to the second dial indicator 2 and only one foot 4 at the end far from the second dial indicator 2. Preferably, the connecting line between the three support legs 4 is an isosceles triangle, and the connecting line between the two support legs 4 at the same end of the cross bar 3 is the bottom of the isosceles triangle. Preferably, a connecting line of the gauge heads of the first dial gauge 1 and the second dial gauge 2 passes through the height of the isosceles triangle.
Preferably, the first dial indicator 1 and the second dial indicator 2 are both digital display dial indicators so as to facilitate reading.
The detection tool further comprises a plurality of gaskets 5, wherein the gaskets 5 are made of hard materials and are respectively used for being cushioned among the support legs 4, the gauge heads of the first dial gauge 1 and the second dial gauge 2 and the polishing film 8 so as to realize nondestructive and reliable support and detection of the detection tool on the polishing film 8 made of soft materials. In this embodiment, the number of the spacers 5 is 4, and the spacers are all circular spacers, and the two support legs 4 at the same end of the cross bar 3 share one spacer 5, and the spacers 5 are made of tool steel, have a diameter of 28-32mm, and have a thickness of 2.5-3 mm.
Referring to fig. 3-5, which are schematic structural diagrams of each part in embodiment 2 of the present invention, in this embodiment, a weight block 6 is further fixed on the cross bar 3, and the weight block 6 has the same weight as the second dial indicator and is symmetrically distributed on two sides of the first dial indicator 1 with the second dial indicator 2 to offset the eccentricity caused by the weight of the second dial indicator 2, so that the center of gravity of the whole tool coincides with the center of gravity of the support, and the measurement result is more accurate.
The specific use steps of the polishing film flatness detection tool of the double-sided polishing machine are detailed as follows:
step 1: correcting the zero position of the tool: put 4 gaskets on 0 level marble platform, put the stabilizer blade and the amesdial gauge outfit of frock respectively on corresponding gasket, rectify first amesdial 1 and second amesdial 2 to 0 position.
Step 2, sequentially placing the gaskets 5 on the polishing film according to the sequence during zero position correction, and placing the corrected tool on the gaskets, wherein the gaskets 5 which are padded below the head of the first dial indicator 1 are tightly attached to the inner holes 9 of the polishing film, and the peripheral surfaces of the gaskets are tangent to the inner holes 9 of the polishing film, so that the first dial indicator 1 is positioned at the inner ring of the polishing film 8; the gasket 5 of pad below stabilizer blade 4 then is located 8 outside edges of polishing membrane for stabilizer blade 4 is located 8 outer lane of polishing membrane, so that the interval between 5 of the gasket of both ends stabilizer blade and the polishing membrane hole 9 is unanimous, and second amesdial 2 then can be measured the position in the middle of 8 outer lanes in the polishing membrane. Preferably, the centers of the 4 gaskets 5 of the present invention are aligned. The heads of the first dial indicator 1 and the second dial indicator 2 are both located at the middle position of the spacer 5, but the invention is not limited thereto.
Step 3, reading the numerical value of the first kilogrammeter 1, and if the numerical value is positive, indicating that the inner ring of the polishing film 8 is high, as shown in fig. 6; if the value is negative, it indicates that the outer ring of the polishing film 8 is high, as shown in FIG. 7.
And 4, determining the rotation direction of the correction wheel according to the positive value and the negative value by the correction disc, wherein the positive correction wheel rotates forwards, and the negative correction wheel rotates backwards.
Further determination of the flatness of the polished film: the reading of the first dial indicator 1 is c, the reading of the second dial indicator 2 is b, wherein the reference value of c is 0, and the reference value of b is c/2. The height e of the convex or concave part in the middle of the disk surface is b-c/2.
If the value of c is 0, the heights of the inner ring and the outer ring of the polishing disk 7 are consistent. If the value b is equal to c/2 is equal to 0, the polishing film 7 is level and does not need to be repaired; if the value b is less than 0, the inner ring and the outer ring of the polishing disk 7 are level, but the middle part is concave, and as shown in FIG. 10, the disk is repaired by the dressing wheel in a mode of combining positive rotation and negative rotation; if the value of b is larger than c/2, the polishing disk 7 is indicated to have the inner and outer rings flush with each other but the middle part is convex, and the dressing wheel is used for dressing the disk in a combined manner of forward rotation and backward rotation as shown in FIG. 11.
If the value of c is positive, the polishing pad 7 is high inside and low outside. If the value b is less than c/2, the polishing film 7 is higher than the outer ring at the inner ring, and the middle of the disk surface is sunken; if the value b is equal to c/2, the polishing disc 7 is higher than the outer ring at the inner ring, and the middle of the disc surface is a straight inclined surface, that is, the disc surface gradually decreases from inside to outside, as shown in fig. 8; if the value b is larger than c/2, the polishing disk 7 is higher than the outer ring at the inner ring, and the middle of the disk surface is convex; when the disc is repaired, the rotation direction of the correction wheel is the same as that of the lower disc, namely the disc is repaired. And after the correction and repair are finished, if the value a meets the requirement but the value b does not meet the process requirement, repairing the disc in a correction and repair combined mode, keeping the value a unchanged, and enabling the value b to reach the process requirement.
If the value of c is negative, the inside of the polishing film is low and the outside is high. If the value b is less than c/2, the polishing disk 7 is depressed in the middle of the disk surface when the inner ring is lower than the outer ring; if the value b is equal to c/2, the middle of the disk surface of the polishing disk 7 is a straight inclined surface while the inner ring is lower than the outer ring, that is, the disk surface gradually rises from inside to outside, and if the value b is greater than c/2, the middle of the disk surface of the polishing disk 7 protrudes while the inner ring is lower than the outer ring, as shown in fig. 9. When repairing the disc, the rotation direction of the correction wheel is opposite to that of the lower disc, namely the disc is repaired reversely. And after the correction and repair are finished, if the value a meets the requirement but the value b does not meet the process requirement, repairing the disc in a correction and repair combined mode, keeping the value a unchanged, and enabling the value b to reach the process requirement.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. A method for detecting the flatness of a polishing film of a double-sided polishing machine is characterized by comprising the following steps:
1) assembling a detection tool, wherein the tool comprises a support frame with the length of Lmm, and a first dial indicator and a second dial indicator which are fixed on the support frame, wherein the first dial indicator is fixed in the middle of the support frame, the second dial indicator is fixed at the position of Nmm on one side of the first dial indicator, and the support frame is supported through support legs at two ends;
2) correcting the zero position of the tool: placing 4 gaskets made of hard materials on a 0-level marble platform, then placing an assembled detection tool on the 0-level marble platform, respectively positioning support legs at two ends of a tool support frame and two dial indicator heads on the corresponding gaskets, and then correcting a first dial indicator 1 and a second dial indicator 2 to 0;
3) placing the gasket on a polishing film on the surface of the polishing disc, and placing the polishing film corresponding to the first dial indicator head close to an inner hole of the polishing film; then, placing the corrected tool on the polishing film, placing the support legs of the tool and the dial gauge heads on corresponding gaskets, and enabling the connecting line of the two dial gauge heads to be separated from the inner hole of the polishing film;
4) reading the values of the first dial indicator and the second dial indicator, rotating the polishing disc to uniformly measure the values of at least four different positions of the polishing die, and taking the average value of the measurement results;
5) and repairing the disc according to the measurement result.
2. The method for detecting the flatness of the polishing film of the double-sided polishing machine according to claim 1, wherein: the support frame comprises a cross rod and support legs fixed at two ends of the cross rod, one end of the cross rod is fixed with one support leg, the other end of the cross rod is fixed with two support legs, and the distance between each support leg and the end part of the cross rod at the end where the support leg is located is consistent.
3. The method for detecting the flatness of the polishing film of the double-sided polishing machine according to claim 2, wherein: the supporting legs are dial gauge heads and form an isosceles triangle in a surrounding mode.
4. The method for detecting the flatness of the polishing film of the double-sided polishing machine according to claim 3, wherein: the gaskets are circular gaskets, and the peripheral surfaces of the gaskets corresponding to the first dial by dial gauge head are tangent to the inner hole of the polishing film.
5. The method for detecting the flatness of the polishing film of the double-sided polishing machine according to claim 4, wherein: and the support frame is also fixed with a balancing weight which is as heavy as the second dial indicator, and the balancing weight and the second dial indicator are symmetrically distributed on two sides of the first dial indicator.
6. The method for detecting the flatness of the polishing film of the double-sided polishing machine according to claim 1, wherein: the placing sequence of the gaskets in the step 3) is consistent with that in the step 2).
7. The method for inspecting flatness of a polishing film of a double side polishing machine according to claim 1 or 5, wherein: the length L of the support frame and the distance N between the two dial indicators satisfy the following relationship:
L=SQRT((D/2) 2 -((d/2) 2 -a));
N=SQRT(((D/2-r/2)/2) 2 -(d/2+a) 2 );
wherein D is the outer diameter of the polishing disk; d is the diameter of the inner hole of the polishing disc; a is the distance from the first dial to the edge of the inner hole of the polishing disk.
8. The method for detecting the flatness of the polishing film of the double-sided polishing machine according to claim 7, wherein: the diameter of the gasket is 28-32mm, and the thickness of the gasket is 2.5-3 mm.
9. The method for detecting the flatness of the polishing film of the double-sided polishing machine according to claim 7, wherein the correspondence between the measured value in the step 5) and the repair method is as follows: when the average measured value c of the first dial indicator is positive, the polishing film has high flatness inside and low flatness outside, and the wheel is corrected to rotate forward; when the average measurement value c of the first dial indicator is negative, the polishing film is low and high, and the correction wheel is reversed to the correction disk.
10. The method for detecting the flatness of the polishing film of the double-sided polishing machine according to claim 9, wherein when the average measurement value b of the second dial indicator in the step 4) is equal to c/2, the height of the polishing film is uniformly changed from inside to outside; when b is larger than c/2, the polishing film is convex in the middle; when b is less than c/2, dishing in the middle of the polishing film is indicated.
CN202210463969.7A 2022-04-29 2022-04-29 Method for detecting flatness of polishing film of double-sided polishing machine Active CN114851055B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116494120A (en) * 2023-06-29 2023-07-28 苏州博宏源机械制造有限公司 Large disc detection method

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JP2000329503A (en) * 1999-05-19 2000-11-30 Shinei Kogyosho:Kk Instrument, and method for measuring work
JP2003191003A (en) * 2001-12-25 2003-07-08 Nippon Steel Corp Method and apparatus for measuring roll profile
CN207147388U (en) * 2017-07-03 2018-03-27 浙江贝斯特软化板有限公司 A kind of pencil softens plate plate face planeness measuring apparatus
CN110640618A (en) * 2019-09-26 2020-01-03 中国科学院上海光学精密机械研究所 Detection device and detection method for polishing die repair disc period
CN112157561A (en) * 2020-08-14 2021-01-01 大连理工大学 Polishing machine with disk surface in-place measurement and trimming functions
CN213335937U (en) * 2020-11-26 2021-06-01 黄石市东威制冷科技有限公司 Plane measuring instrument for detecting cylinder block of refrigerator compressor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000329503A (en) * 1999-05-19 2000-11-30 Shinei Kogyosho:Kk Instrument, and method for measuring work
JP2003191003A (en) * 2001-12-25 2003-07-08 Nippon Steel Corp Method and apparatus for measuring roll profile
CN207147388U (en) * 2017-07-03 2018-03-27 浙江贝斯特软化板有限公司 A kind of pencil softens plate plate face planeness measuring apparatus
CN110640618A (en) * 2019-09-26 2020-01-03 中国科学院上海光学精密机械研究所 Detection device and detection method for polishing die repair disc period
CN112157561A (en) * 2020-08-14 2021-01-01 大连理工大学 Polishing machine with disk surface in-place measurement and trimming functions
CN213335937U (en) * 2020-11-26 2021-06-01 黄石市东威制冷科技有限公司 Plane measuring instrument for detecting cylinder block of refrigerator compressor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116494120A (en) * 2023-06-29 2023-07-28 苏州博宏源机械制造有限公司 Large disc detection method
CN116494120B (en) * 2023-06-29 2023-09-19 苏州博宏源机械制造有限公司 Large disc detection method

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