CN114850163B - Circulation cleaning device for groove type full-automatic cleaning machine - Google Patents
Circulation cleaning device for groove type full-automatic cleaning machine Download PDFInfo
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- CN114850163B CN114850163B CN202210433071.5A CN202210433071A CN114850163B CN 114850163 B CN114850163 B CN 114850163B CN 202210433071 A CN202210433071 A CN 202210433071A CN 114850163 B CN114850163 B CN 114850163B
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- 238000004140 cleaning Methods 0.000 title claims abstract description 122
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 58
- 230000007246 mechanism Effects 0.000 claims abstract description 53
- 238000005507 spraying Methods 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims description 17
- 238000001914 filtration Methods 0.000 claims description 15
- 230000006835 compression Effects 0.000 claims description 10
- 238000007906 compression Methods 0.000 claims description 10
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 8
- 235000012431 wafers Nutrition 0.000 abstract description 6
- 239000012634 fragment Substances 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000011010 flushing procedure Methods 0.000 abstract description 2
- 230000000737 periodic effect Effects 0.000 abstract 1
- 230000009471 action Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000005484 gravity Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/62—Regenerating the filter material in the filter
- B01D29/66—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps
- B01D29/665—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps by using pistons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a circulating cleaning device for a groove type full-automatic cleaning machine in the technical field of semiconductor processing, and aims to solve the problems that a large amount of scraps are accumulated at a filter element after the device in the prior art is used for a long time, and workers need to stop the device for periodic disassembly, assembly and cleaning. The cleaning tank is internally provided with a spraying mechanism and a bearing mechanism; the bearing mechanism comprises a bearing table and a reset assembly, the bearing table can move up and down relative to the cleaning tank, a push-pull rod is arranged on the bearing table, a piston is arranged after one end of the push-pull rod penetrates through the bottom of the cleaning tank, and the piston is connected in the cylinder body in a sliding mode; the bottom of the cleaning tank is provided with a water outlet which is communicated with a water inlet of the three-way pipe; the cleaning device is suitable for cleaning wafers, can carry out back flushing on the filter element, removes the accumulated fragments, and separates and discharges a small amount of cleaning liquid carrying the fragments, so that the effect of replacing the filter element without frequent disassembly and assembly of operators is achieved.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a circulating cleaning device for a groove type full-automatic cleaning machine.
Background
In the semiconductor manufacturing process, wafer cleaning is an important component, and the conventional cleaning means is cleaning by a full-automatic tank cleaning machine adopting a wet cleaning process. Most of the current full-automatic tank type cleaning machines are provided with a circulating spraying system which can filter and recycle the cleaning liquid, realize the circulating spraying of the cleaning liquid, improve the cleaning effect of wafers, and filter out the fragments in the cleaning liquid by utilizing a filter element, thereby reducing the consumption of water resources.
But current full self-cleaning of slot type machine circulation belt cleaning device can build up a large amount of pieces in filter core department after long-term the use, and it needs the staff to shut down regularly to carry out the dismouting clearance, and its operation is comparatively troublesome, has reduced work efficiency, is unfavorable for production and use. In order to solve the problems, innovative design is urgently needed on the basis of the original design.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a circulating cleaning device for a trough type full-automatic cleaning machine, which can carry out back flushing on a filter element after each circulating cleaning, so that accumulated debris is removed, and a small amount of cleaning liquid carrying the debris is separated and discharged, thereby achieving the effect of replacing the filter element without frequent disassembly and assembly of an operator.
In order to solve the technical problems, the invention adopts the following technical scheme:
the invention provides a circulating cleaning device for a groove type full-automatic cleaning machine, which comprises a cleaning groove, a three-way pipe and a cylinder body, wherein a spraying mechanism and a bearing mechanism are arranged in the cleaning groove;
the bearing mechanism comprises a bearing platform and a reset assembly, the bearing platform can move up and down relative to the cleaning tank, a push-pull rod is arranged on the bearing platform, a piston is arranged after one end of the push-pull rod penetrates through the bottom of the cleaning tank, and the piston is connected in the cylinder body in a sliding mode;
the bottom of the cleaning tank is provided with a water outlet which is communicated with a water inlet of the three-way pipe, a first water outlet of the three-way pipe is communicated with the spraying mechanism through a circulating conveying mechanism, a second water outlet of the three-way pipe is communicated with one end, far away from the push-pull rod, of the cylinder body, and the circulating conveying mechanism comprises a filter element and a water pump, wherein the filter element is used for filtering debris and is installed through a quick replacing assembly;
a drain pipe is further arranged at one end of the cylinder body, which is far away from the push-pull rod, a first valve is arranged on the drain pipe, a second valve is arranged on the second water outlet, and a closing mechanism for opening and closing the water outlet is arranged on the cleaning tank;
when the bearing platform bears the weight, the first valve is conducted, the second valve is not conducted, and the water outlet is opened by the sealing mechanism;
when the bearing table is reset, the first valve is not conducted, the second valve is conducted, and the water outlet is closed by the sealing mechanism.
Furthermore, the sealing mechanism comprises a supporting spring, a connecting rod, a box body arranged at the bottom of the cleaning tank, a lantern ring movably sleeved on the outer side of the push-pull rod and a push ring fixedly arranged on the outer side of the push-pull rod;
the box body is provided with a through hole, the water outlet is communicated with the water inlet of the three-way pipe through the through hole, a closed sliding plate used for separating the through hole is movably connected in the box body, the supporting spring is arranged between the closed sliding plate and the inner wall of the box body, one end of the connecting rod is hinged with the lantern ring, the other end of the connecting rod is hinged with the closed sliding plate, and the pushing ring is arranged between the cleaning tank and the lantern ring.
Further, be equipped with in the box body with the cavity of through-hole intercommunication, seal slide sliding connection in the cavity, the one side that the through-hole was kept away from to the cavity is equipped with spacing logical groove, the one end of sealing the slide stretch out to the box body outside through spacing logical groove with the connecting rod is articulated.
Furthermore, the bottom of the cleaning tank is provided with a containing groove matched with the bearing table, the reset assembly comprises a guide rod arranged in the containing groove and a reset spring sleeved on the guide rod, a guide hole matched with the guide rod is formed in the bearing table, and the reset spring is supported between the bearing table and the containing groove.
Further, the spraying mechanism comprises a hollow plate arranged on the inner side of the cleaning tank, a plurality of nozzles are arranged on the hollow plate, and a first water outlet of the three-way pipe is communicated with the hollow plate through a circulating conveying mechanism.
Further, the quick reloading assembly comprises a box body and a reloading plate penetrating through the box body, two filtering through grooves are formed in the reloading plate, convex rings of the filtering pipes and the limiting filtering pipes are installed in the filtering through grooves, and the filtering cores are arranged in the filtering pipes.
Furthermore, the two ends of the reloading plate are provided with positioning arc plates, and arc grooves corresponding to the positioning arc plates are arranged on the two sides of the outer wall of the box body.
Furthermore, positioning assemblies are arranged on the upper side and the lower side of the reloading plate in the box body, and each positioning assembly comprises a positioning ring, a compression spring and a driving piece for driving the positioning ring to move;
one side of the positioning ring, which is close to the reloading plate, is provided with a limiting boss, the reloading plate is provided with a limiting groove matched with the limiting boss, and the compression spring is supported between the positioning ring and the box body.
Furthermore, one side of the positioning ring, which is far away from the reloading plate, is provided with a positioning groove, a guide pipe corresponding to the positioning groove is arranged in the box body, and the outer side of the guide pipe is sleeved with the compression spring movably.
Furthermore, the driving part comprises a pull ring and a plurality of driving rods, one ends of the driving rods are respectively and fixedly connected with one side of the positioning ring, which is far away from the reloading plate, and the other ends of the driving rods are respectively and fixedly connected with the pull ring positioned on the outer side of the box body; the driving rods respectively penetrate through the box body and are in sliding connection with the box body.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the circulating cleaning device for the groove type full-automatic cleaning machine, the bearing table overcomes the tension drop of the reset assembly under the action of the gravity of the material box, so that the push-pull rod is driven to move, the piston moves in the cylinder body relatively, and after the material box is cleaned circularly each time, the filter element can be washed back by using the gravity action and the negative pressure of water in the circulating conveying mechanism, so that the accumulated fragments are removed, and a small amount of cleaning liquid carrying the fragments is separated and discharged; thereby reached and need not the frequent dismouting of operating personnel and changed the effect of filter core, it has improved work efficiency, labour saving and time saving, convenient to use.
2. This full self-cleaning of slot type machine circulation belt cleaning device drives through the push-and-pull rod and pushes away the ring motion, makes it promote the lantern ring, recycles the lantern ring and seals the slide with the help of the connecting rod pulling, makes and seals the slide and carry out the switching to the outlet for the device is automatic when appropriate to accomplish opening and closing the outlet, and need not additionally control, has improved the automatic effect of device.
3. This full self-cleaning of slot type machine circulation belt cleaning device has the quick subassembly of reloading, through pushing the reloading board, makes the location arc board that promotes the side and the arc recess phase with each other, and then makes spacing recess remove to box center department, lets new filter tube pushed to the box in promptly to this completion that can be quick is to the change of filter core, makes and can accomplish the reloading under the state that need not the outage equipment, convenient operation, change efficiently, the using value is big.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural diagram of a circular cleaning device for a trough-type full-automatic cleaning machine according to an embodiment of the invention;
FIG. 2 is an enlarged schematic view of the part A of the circulating cleaning device for the trough type full-automatic cleaning machine shown in FIG. 1;
FIG. 3 is an enlarged schematic view of the circulation cleaning device B of the trough type full automatic cleaning machine shown in FIG. 1;
FIG. 4 is a schematic top view of a cleaning tank of the circulation cleaning device for the tank type full automatic cleaning machine shown in FIG. 1;
FIG. 5 is a schematic side view of a quick change assembly of the circulating cleaning apparatus for the trough-type full automatic cleaning machine of FIG. 1;
FIG. 6 is a schematic structural diagram of a change-over plate of the circulating cleaning device for the trough type full-automatic cleaning machine shown in FIG. 1;
FIG. 7 is a schematic structural diagram of a circulating cleaning device for the trough type full-automatic cleaning machine shown in FIG. 1 in a load-bearing state;
in the figure: 1. a cleaning tank; 2. a three-way pipe; 3. a cylinder body; 4. a bearing platform; 5. a push-pull rod; 6. a piston; 7. a water outlet; 8. a filter element; 9. a water pump; 10. a blow-off pipe; 11. a first valve; 12. a second valve; 13. a box body; 14. a collar; 15. a push ring; 16. a support spring; 17. a connecting rod; 18. a through hole; 19. sealing the sliding plate; 20. a cavity; 21. a limiting through groove; 22. a containing groove; 23. a guide bar; 24. a return spring; 25. a guide hole; 26. a hollow slab; 27. a nozzle; 28. a box body; 29. changing the plate; 30. a filtering through groove; 31. a filter tube; 32. a convex ring; 33. positioning the arc plate; 34. an arc-shaped groove; 35. a positioning ring; 36. a compression spring; 37. a limiting boss; 38. a limiting groove; 39. a positioning groove; 40. a guide tube; 41. a drive rod; 42. and (4) a pull ring.
Detailed Description
The invention is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The first embodiment is as follows:
the embodiment of the invention provides a circulating cleaning device for a groove type full-automatic cleaning machine, which comprises a cleaning groove 1, wherein spraying mechanisms are arranged on the inner walls of two sides of the cleaning groove 1, and a bearing mechanism is arranged at the bottom in the cleaning groove; the bearing mechanism comprises a bearing platform 4 and a reset assembly, the bearing platform 4 can move up and down relative to the cleaning tank 1, a push-pull rod 5 is arranged on the bearing platform 4, a piston 6 is arranged at one end of the push-pull rod 5 after penetrating through the bottom of the cleaning tank 1, the piston 6 is connected in the cylinder body 3 in a sliding mode, a water outlet 7 is arranged at the bottom of the cleaning tank 1, the water outlet 7 is communicated with a water inlet of the three-way pipe 2 through a pipeline, a first water outlet of the three-way pipe 2 is communicated with the spraying mechanism through a circulating conveying mechanism, a second water outlet of the three-way pipe 2 is communicated with one end, far away from the push-pull rod 5, of the cylinder body 3, and the circulating conveying mechanism comprises a filter element 8 and a water pump 9, wherein the filter element is used for filtering scraps and is installed through the quick change assembly, and the water pump drives water to circulate; a drain pipe 10 is further arranged at one end of the cylinder body 3 far away from the push-pull rod 5, a first valve 11 is arranged on the drain pipe 10, a second valve 12 is arranged on the second water outlet, and a closing mechanism for opening and closing the water outlet 7 is arranged on the cleaning tank 1; when the bearing table 4 bears the load, the first valve 11 is conducted, the second valve 12 is not conducted, and the water outlet 7 is opened by the sealing mechanism; when the platform 4 is returned, the first valve 11 is not opened, the second valve 12 is opened, and the drain port 7 is closed by the closing mechanism.
It should be noted that, the circulating conveying mechanism and the spraying mechanism can be provided with a plurality of groups, which are uniformly distributed around the cleaning tank 1, and the specific arrangement number and position can be adjusted correspondingly according to the actual use condition. In the present embodiment, the first valve 11 and the second valve 12 are check valves, and the opening and closing of the check valves are controlled by water pressure, but the check valves are not limited thereto, and may be solenoid valves or other valve bodies, and the control is performed by switches or sensors, and only the same effect is required.
Specifically, when the cleaning device is used, a material box with wafers is placed on the bearing table 4, the bearing table 4 gradually descends under the action of gravity of the material box to overcome the tension of the reset assembly, the bearing table 4 drives the push-pull rod 5 to move together, the push-pull rod 5 pushes the piston 6 to move in the cylinder 3 relatively, and the piston 6 discharges cleaning liquid containing a small amount of debris accumulated in the cylinder 3 through the drain pipe 10 as the first valve 11 is conducted and the second valve 12 is not conducted under the action of water pressure; when the carrier table 4 is lowered to the end of the stroke, as shown in fig. 7, the piston 6 just blocks the nozzle communicating with the second valve 12, and the closing mechanism opens the water outlet 7. And then starting the circulating conveying mechanism, wherein a water pump 9 of the circulating conveying mechanism drives the cleaning solution to circularly flow along the water outlet 7, the three-way pipe 2, the filter element 8 and the spraying mechanism in sequence to finish circulating spraying, and the cleaning solution cannot be discharged from the drain pipe 10 through the cylinder body 3 because the second valve 12 is blocked by the piston 6, so that the filter element 8 filters the debris in circulating conveying and enables the debris to be attached and accumulated between the filter element 8 and the first water outlet of the three-way pipe 2. When the wafer is cleaned, the water pump 9 is closed, the feed box is taken away, then the bearing table 4 gradually rises under the action of the reset assembly, the water outlet 7 is closed by the sealing mechanism, the bearing table 4 pulls the piston 6 to rise through the push-pull rod 5, and the piston 6 loosens the blockage of the pipe orifice communicated with the second valve 12; subsequently, under the action of negative pressure, the first valve 11 is not conducted, the second valve 12 is conducted, and the water outlet 7 is closed, so that the cleaning liquid remained in the circulating conveying mechanism and the three-way pipe 2 enters the rodless cavity of the cylinder body 3 through the second water outlet of the three-way pipe 2 to be accumulated, and under the action of negative pressure and gravity, the water in the circulating conveying mechanism reversely flows, so that the filter element 8 is reversely flushed, and the accumulated debris is transferred to the cylinder body 3 to be stored, wherein one period is finished. When the next feed box is placed, the operation is repeated, and the scraps are discharged, so that the filter element 8 can be backwashed after the feed box is cleaned every time by arranging the structure, the accumulated scraps are removed, and a small amount of cleaning liquid carrying the scraps is separated and discharged; thereby reached and need not frequent dismouting of operating personnel and changed the effect of filter core 8, improved work efficiency, labour saving and time saving, convenient to use.
In this embodiment, as shown in fig. 1-2, the sealing mechanism includes a supporting spring 16, a connecting rod 17, a box 13 disposed at the bottom of the cleaning tank 1, a collar 14 movably sleeved on the outer side of the push-pull rod 5, and a pushing ring 15 fixedly disposed on the outer side of the push-pull rod 5; be equipped with through-hole 18 on the box body 13, the outlet 7 is linked together through-hole 18 and the water inlet of three-way pipe 2, swing joint has the closed slide 19 that is used for cutting off through-hole 18 in the box body 13, supporting spring 16 locates between closed slide 19 and the box body 13 inner wall, the one end and the lantern ring 14 of connecting rod 17 are articulated, the other end is articulated with closed slide 19, promote ring 15 locates between washing tank 1 and the lantern ring 14, be equipped with the cavity 20 with through-hole 18 intercommunication in the box body 13, closed slide 19 sliding connection is in cavity 20, one side that through-hole 18 was kept away from to cavity 20 is equipped with spacing logical groove 21, the one end of closed slide 19 stretches out to the box body 13 outside through spacing logical groove 21 and is articulated with connecting rod 17.
Specifically, when the bearing platform 4 bears the load, the push-pull rod 5 drives the push ring 15 to move downwards together, then the push ring 15 pushes the lantern ring 14 to move, the lantern ring 14 pulls the sealing sliding plate 19 to move through the connecting rod 17, the sealing sliding plate 19 slides along the limiting through groove 21, then the sealing sliding plate 19 retracts into the cavity 20 by overcoming the tension of the supporting spring 16, when the bearing platform 4 descends to the end of the stroke, the sealing sliding plate 19 does not block the through hole 18, at the moment, the water outlet 7 is communicated with the water inlet of the three-way pipe 2 through the through hole 18, namely, the sealing mechanism opens the water outlet 7, when the bearing platform 4 resets, the supporting spring 16 does not push the lantern ring 14 any more, then the sealing sliding plate 19 blocks the through hole 18 under the tension of the supporting spring 16, namely, the sealing mechanism closes the water outlet 7. Through setting up above structure can make the device automatically accomplish opening and closing outlet 7 in the right time, and need not additionally control, its automation that has improved the device.
In this embodiment, as shown in fig. 1, a containing groove 22 matched with the carrying platform 4 is disposed at the bottom of the cleaning tank 1, the reset assembly includes a guide rod 23 disposed in the containing groove 22 and a reset spring 24 sleeved on the guide rod 23, a guide hole 25 matched with the guide rod 23 is disposed on the carrying platform 4, and the reset spring 24 is supported between the carrying platform 4 and the containing groove 22. When bearing the weight of the bearing platform 4, the bearing platform 4 gradually descends into the containing groove 22, and after the bin is taken away, the bearing platform 4 rises from the containing groove 22 under the tension of the return spring 24, in order to avoid the return spring 24 from bending in the using process, a guide rod 23 is arranged, and the bearing platform 4 moves up and down along the guide rod 23 through a guide hole 25. Through setting up the stability when structure has improved plummer 4 up-and-down motion, and avoided the subassembly that resets to directly expose in washing tank 1, prolonged the life of part.
In this embodiment, as shown in fig. 4, the spraying mechanism includes a hollow plate 26 disposed inside the cleaning tank 1, a plurality of nozzles 27 are disposed on the hollow plate 26, the nozzles 27 are uniformly arranged on one side of the hollow plate 26 close to the plummer 4 and aligned to an oblique lower side, a first water outlet of the three-way pipe 2 is communicated with the hollow plate 26 through the circulating conveying mechanism, when the circulating spraying is performed, the cleaning solution enters the hollow plate 26 through the circulating conveying mechanism, the hollow plate 26 divides the cleaning solution to each nozzle 27, and the nozzles 27 spray the material tank, it should be noted that the nozzles 27 are higher than a liquid level when the cleaning tank 1 performs the cleaning. The structure can make the workbin obtain abundant spraying through setting up above. The cleaning effect of the wafer is improved.
Example two:
as shown in fig. 1 and 5, the embodiment provides a circulation cleaning device for a trough type full-automatic cleaning machine, which is different from the first embodiment in that a quick reloading assembly is specifically described.
Quick change dress subassembly includes box 28 and the board 29 of changing the dress that runs through box 28, changes and is equipped with two on the board 29 of changing the dress and filters logical groove 30, filters the bulge loop 32 that leads to and install filter tube 31 and spacing filter tube 31 in the logical groove 30, and filter core 8 is located in the filter tube 31, and the both ends of changing the dress board 29 are equipped with location arc board 33, and the outer wall both sides of box 28 are equipped with the arc recess 34 corresponding with location arc board 33.
Specifically, when the filter cartridge 8 needs to be replaced, the filter pipe 31 with the filter cartridge 8 is placed in the filter through groove 30 located on the outer side of the box body 28, the filter pipe 31 can be installed on the inner side of the filter through groove 30 due to the limit of the convex ring 32, then the replacement plate 29 is pushed, the positioning arc plate 33 on the pushing side is matched with the arc-shaped groove 34, the limit groove 38 is just moved to the center of the box body 28, a new filter pipe 31 is pushed into the box body 28, an old filter pipe 31 is pushed out from the other side of the box body 28 along with the replacement plate 29, and then the old filter pipe 31 is taken down, so that the replacement of the filter cartridge 8 is completed.
In an embodiment of the present invention, in order to prevent the filter tube 31 and the reloading plate 29 from moving freely during the use process, positioning components are further disposed in the box 28 on the upper and lower sides of the reloading plate 29. The positioning assembly comprises a positioning ring 35, a compression spring 36 and a driving piece for driving the positioning ring 35 to move; a limiting boss 37 is arranged on one side of the positioning ring 35 close to the reloading plate 29, a limiting groove 38 matched with the limiting boss 37 is arranged on the reloading plate 29, and the compression spring 36 is supported between the positioning ring 35 and the box body 28.
Specifically, after the limiting groove 38 moves to the center of the filter element 8, the driving part is released, at this time, the push-pull rod 5 is kept attached to the reloading plate 29 under the tension of the compression spring 36, and meanwhile, the limiting boss 37 is kept clamped with the limiting groove 38, so that the upper limiting boss 37 is attached to the top of the filter pipe 31 and is limited; further, the changing plate 29 cannot be moved any more. When the replacement is needed again, the limiting boss 37 is separated from the limiting groove 38 through the driving piece, and then the replacement can be carried out.
As shown in fig. 3 and 5, in order to realize the function of driving the positioning ring 35 to move, the driving member provided in the embodiment of the present invention may specifically include a pull ring 42 and a plurality of driving rods 41, wherein one end of each of the plurality of driving rods 41 is fixedly connected to one side of the positioning ring 35 away from the exchanging plate 29, and the other end is fixedly connected to the pull ring 42 located outside the box 28; the driving rods 41 respectively penetrate through the box body 28 and are connected with the box body 28 in a sliding mode. When the device is used, the pull rings 42 on the upper side and the lower side of the box body 28 are pulled, and the pull rings 42 can drive the positioning ring 35 to move through the driving rod 41, so that the device is convenient to operate and use.
In order to further improve the motion stability of the positioning ring 35, a positioning groove 39 is formed in one side of the positioning ring 35 away from the reloading plate 29, a guide pipe 40 corresponding to the positioning groove 39 is arranged in the box body 28, and the compression spring 36 is movably sleeved outside the guide pipe 40; in use, the positioning ring 35 can slide along the guide tube 40.
Compared with the prior art, the circulating conveying mechanism provided by the invention comprises the quick replacing assembly, the quick replacing assembly can quickly replace the filter element 8, so that the replacement can be completed under the state of not stopping the equipment, the operation is convenient, the replacement efficiency is high, and the application value is high.
The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A circulating cleaning device for a groove type full-automatic cleaning machine is characterized by comprising a cleaning groove (1), a three-way pipe (2) and a cylinder body (3), wherein a spraying mechanism and a bearing mechanism are arranged in the cleaning groove (1);
the bearing mechanism comprises a bearing table (4) and a reset assembly, wherein the bearing table (4) can move up and down relative to the cleaning tank (1), a push-pull rod (5) is arranged on the bearing table (4), one end of the push-pull rod (5) penetrates through the bottom of the cleaning tank (1) and then is provided with a piston (6), and the piston (6) is connected in the cylinder body (3) in a sliding manner;
a water outlet (7) is formed in the bottom of the cleaning tank (1), the water outlet (7) is communicated with a water inlet of the three-way pipe (2), a first water outlet of the three-way pipe (2) is communicated with the spraying mechanism through a circulating conveying mechanism, a second water outlet of the three-way pipe (2) is communicated with one end, far away from the push-pull rod (5), of the cylinder body (3), and the circulating conveying mechanism comprises a filter element (8) and a water pump (9), wherein the filter element is used for filtering debris and is installed through a quick replacement assembly;
a drain pipe (10) is further arranged at one end, far away from the push-pull rod (5), of the cylinder body (3), a first valve (11) is arranged on the drain pipe (10), a second valve (12) is arranged on the second water outlet, and a sealing mechanism for opening and closing the water outlet (7) is arranged on the cleaning tank (1);
when the bearing table (4) bears the load, the first valve (11) is conducted, the second valve (12) is not conducted, and the water outlet (7) is opened by the closing mechanism;
when the bearing table (4) is reset, the first valve (11) is not conducted, the second valve (12) is conducted, and the water outlet (7) is closed by the closing mechanism.
2. The circulating cleaning device for the groove type full-automatic cleaning machine according to claim 1, wherein the sealing mechanism comprises a supporting spring (16), a connecting rod (17), a box body (13) arranged at the bottom of the cleaning groove (1), a lantern ring (14) movably sleeved on the outer side of the push-pull rod (5) and a pushing ring (15) fixedly arranged on the outer side of the push-pull rod (5);
be equipped with through-hole (18) on box body (13), outlet (7) through-hole (18) with the water inlet of three-way pipe (2) is linked together, swing joint has in box body (13) is used for with closed slide (19) that through-hole (18) cut off, supporting spring (16) are located between closed slide (19) and box body (13) inner wall, the one end and the lantern ring (14) of connecting rod (17) are articulated, and the other end is articulated with closed slide (19), it locates between washing tank (1) and lantern ring (14) to push ring (15).
3. The circulating cleaning device for the groove type full-automatic cleaning machine is characterized in that a cavity (20) communicated with the through hole (18) is arranged in the box body (13), the closed sliding plate (19) is connected in the cavity (20) in a sliding mode, a limiting through groove (21) is formed in one side, away from the through hole (18), of the cavity (20), and one end of the closed sliding plate (19) extends out of the box body (13) through the limiting through groove (21) to be hinged to the connecting rod (17).
4. The circulating cleaning device for the groove type full-automatic cleaning machine according to claim 1, wherein a containing groove (22) matched with the bearing platform (4) is formed in the bottom of the cleaning groove (1), the reset assembly comprises a guide rod (23) arranged in the containing groove (22) and a reset spring (24) sleeved on the guide rod (23), a guide hole (25) matched with the guide rod (23) is formed in the bearing platform (4), and the reset spring (24) is supported between the bearing platform (4) and the containing groove (22).
5. The circulating cleaning device for the trough type full-automatic cleaning machine according to any one of claims 1-4, characterized in that the spraying mechanism comprises a hollow plate (26) arranged inside the cleaning trough (1), a plurality of nozzles (27) are arranged on the hollow plate (26), and the first water outlet of the three-way pipe (2) is communicated with the hollow plate (26) through a circulating conveying mechanism.
6. The circulating cleaning device for the groove type full-automatic cleaning machine according to claim 1, wherein the quick reloading assembly comprises a box body (28) and a reloading plate (29) penetrating through the box body (28), two filtering through grooves (30) are formed in the reloading plate (29), a filtering pipe (31) and a convex ring (32) for limiting the filtering pipe (31) are installed in each filtering through groove (30), and the filter element (8) is arranged in each filtering pipe (31).
7. The circulating cleaning device for the groove type full-automatic cleaning machine as claimed in claim 6, wherein two ends of the reloading plate (29) are provided with positioning arc plates (33), and two sides of the outer wall of the box body (28) are provided with arc grooves (34) corresponding to the positioning arc plates (33).
8. The circulating cleaning device for the trough type full-automatic cleaning machine according to claim 6 or 7, characterized in that positioning components are arranged on the upper side and the lower side of the reloading plate (29) in the box body (28), and each positioning component comprises a positioning ring (35), a compression spring (36) and a driving piece for driving the positioning ring (35) to move;
the locating ring (35) is equipped with spacing boss (37) near one side of reloading board (29), be equipped with on reloading board (29) with spacing boss (37) assorted spacing recess (38), pressure spring (36) support between locating ring (35) and box (28).
9. The circulation cleaning device for the groove type full-automatic cleaning machine according to claim 8, wherein a positioning groove (39) is formed in one side of the positioning ring (35) far away from the reloading plate (29), a guide pipe (40) corresponding to the positioning groove (39) is arranged in the box body (28), and the compression spring (36) is movably sleeved outside the guide pipe (40).
10. The circulation cleaning device for the groove type full-automatic cleaning machine is characterized in that the driving part comprises a pull ring (42) and a plurality of driving rods (41), one ends of the driving rods (41) are fixedly connected with one sides of the positioning rings (35) far away from the reloading plate (29), and the other ends of the driving rods are fixedly connected with the pull ring (42) positioned outside the box body (28); the driving rods (41) respectively penetrate through the box body (28) and are connected with the box body (28) in a sliding mode.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210433071.5A CN114850163B (en) | 2022-04-24 | 2022-04-24 | Circulation cleaning device for groove type full-automatic cleaning machine |
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| CN202210433071.5A CN114850163B (en) | 2022-04-24 | 2022-04-24 | Circulation cleaning device for groove type full-automatic cleaning machine |
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| CN114850163B true CN114850163B (en) | 2023-03-24 |
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| US5213117A (en) * | 1991-07-05 | 1993-05-25 | Soichiro Yamamoto | Parts washer |
| CN204293942U (en) * | 2014-12-12 | 2015-04-29 | 广州亨龙机电股份有限公司 | A kind of automatic back flush filtration structure |
| CN110523684A (en) * | 2019-08-27 | 2019-12-03 | 吕福杰 | A kind of Chinese medicine cleaning device |
| CN216116541U (en) * | 2021-08-25 | 2022-03-22 | 中山必能科技有限公司 | Instrument for detecting whether water delivery of mold is smooth or not |
| CN215997786U (en) * | 2021-11-01 | 2022-03-11 | 苏州富怡达超声波有限公司 | Full-automatic single-station cleaning machine |
| CN114082707A (en) * | 2021-11-19 | 2022-02-25 | 西安嘉仕顿智能科技有限公司 | Ultrasonic cleaning machine with workpiece drying device for ferroelectric motor maintenance |
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