CN114849414A - Liquid SF for recovery 6 Method for cleaning a plant - Google Patents

Liquid SF for recovery 6 Method for cleaning a plant Download PDF

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Publication number
CN114849414A
CN114849414A CN202210410058.8A CN202210410058A CN114849414A CN 114849414 A CN114849414 A CN 114849414A CN 202210410058 A CN202210410058 A CN 202210410058A CN 114849414 A CN114849414 A CN 114849414A
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China
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ball valve
manual ball
adsorption tower
nitrogen
pipeline
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Inventor
许一力
房超
苏晓东
黄海龙
方红磊
陈以明
孙伟
武子豪
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Anhui Xinli Electric Technology Consulting Co Ltd
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Anhui Xinli Electric Technology Consulting Co Ltd
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Priority to CN202210410058.8A priority Critical patent/CN114849414A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40083Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/151Reduction of greenhouse gas [GHG] emissions, e.g. CO2

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

Liquid SF for recovery 6 Method for purifying a plant, belonging to the SF 6 The technical field of purification treatment, and solves the problem that the prior device can not ensure liquid SF 6 The problem of complete gasification; the input end of the first air heat exchanger is connected with the first manual ball valve, the output end of the first air heat exchanger is connected with the first input end of the plate heat exchanger, the first output end of the plate heat exchanger is connected with one end of the first electric ball valve, the other end of the first electric ball valve is connected with the input end of the multistage adsorption tower, the output end of the multistage adsorption tower is connected with one end of the second manual ball valve, the other end of the second manual ball valve is connected with the input end of the dust filter, the output end of the dust filter is connected with the fourth self-sealing port, a nitrogen circulating heating pipeline is connected between the second input end and the second output end of the plate heat exchanger, and the first safety valve is installed between the plate heat exchanger and the first electric ball valve; liquid SF 6 The gas is completely gasified after being heated twice by the first air heat exchanger and the plate heat exchanger, and the purification efficiency is greatly improved.

Description

Liquid SF for recovery 6 Method for cleaning a plant
Technical Field
The invention belongs to the field of transformer substation SF 6 The technical field of purification treatment, and relates to a liquid SF for recovery 6 A method of decontaminating a device.
Background
In recent years, with the rapid development of global energy internet, a large amount of SF 6 The gas insulation equipment is generally used in ultrahigh voltage, extra-high voltage and fully-closed combined electrical appliances. At the same time, with many SF's in our country 6 Increase in operational life of gas-insulated apparatus and SF 6 /N 2 The mixed gas has the gradual replacement of SF 6 As a trend for insulating media in electrical devices, SF 6 The task of on-site recovery (mostly outdoor open-air) is increasing year by year, and the recovered SF is convenient for transportation and storage 6 Typically in liquid form, in cylinders or tanks. SF 6 The gas can generate decomposition action under the action of a high-voltage electric field and the influence of various factors such as equipment fault discharge and the like, and various impurity gases are generated. At present, liquid SF is often adopted in the purification operation 6 After flowing out of the heat exchanger, the gas flows into a container filled with adsorbents such as activated carbon, activated alumina, silica gel, molecular sieves and the like to remove impurities and moisture through gas adsorption, however, the adsorption effect of the adsorbents is easily influenced by temperature, pressure, adsorption sequence and the like, and if the gasification effect is poor, liquid SF is easily caused 6 The gas is gasified in the adsorption container, so that the temperature and the pressure in the adsorption container are difficult to meet the requirements, and the purification efficiency is seriously influenced.
In the prior art, the invention of Chinese patent application No. CN113803960A with application publication date of 2021, 12 months and 17 days provides a method and a system for recovering and purifying sulfur hexafluoride gas, aiming at the problems of low recovery rate and recovery purity and large liquid nitrogen consumption in the prior art, and provides a method for recovering and purifying sulfur hexafluoride gasThe technical scheme has high recovery purity and can reduce the consumption of liquid nitrogen. However, this document does not solve the problem that the existing purification devices cannot guarantee liquid SF 6 Complete gasification, resulting in low purification efficiency.
Disclosure of Invention
The invention aims to design a liquid SF for recovery 6 A method for purifying a device to solve the problem that the prior purifying device can not ensure liquid SF 6 Complete gasification, resulting in low purification efficiency.
The invention solves the technical problems through the following technical scheme:
liquid SF for recovery 6 A method of decontaminating an apparatus, said decontaminating apparatus comprising: liquid SF 6 Preheating pipeline and liquid SF 6 Gasification line, SF 6 A gas purification pipeline and a nitrogen circulating heating pipeline; the liquid SF 6 The preheating pipeline includes: the first self-sealing interface ZF1, the first manual ball valve S1 and the first air heat exchanger HR 1; the liquid SF 6 The gasification pipeline includes: the device comprises a plate heat exchanger BH, a first safety valve SV1 and a first electric ball valve V1; the SF 6 The gas purification pipeline includes: a first absorption tower XF1, a second absorption tower XF2, a third absorption tower XF3, a fourth absorption tower XF4, a seventh manual ball valve S7, an eighth manual ball valve S8, a ninth manual ball valve S9, a tenth manual ball valve S10, an eleventh manual ball valve S11, a twelfth manual ball valve S12, a second manual ball valve S2, a dust filter FC, and a fourth self-sealing opening ZF 4; the nitrogen gas circulation heating pipeline comprises: a third manual ball valve S3, a fourth manual ball valve S4, a fifth manual ball valve S5, a moisture filter SF, a second safety valve SV2, a nitrogen storage tank DQG, a Roots blower YS2 and a nitrogen heater DJR; one end of the first manual ball valve S1 is in sealing connection with a first self-sealing interface ZF1, the other end of the first manual ball valve S1 is in sealing connection with the input end of a first air heat exchanger HR1, the output end of the first air heat exchanger HR1 is in sealing connection with the first input end of a plate heat exchanger BH, the first output end of the plate heat exchanger BH is in sealing connection with one end of a first electric ball valve V1, and the first electric ball valveThe other end of the V1 is hermetically connected with the bottom port of a first adsorption tower XF1, the top port of the first adsorption tower XF1 is hermetically connected with the top port of a second adsorption tower XF2, the bottom port of the second adsorption tower XF2 is hermetically connected with the bottom port of a third adsorption tower XF3, the top port of the third adsorption tower XF3 is hermetically connected with the top port of a fourth adsorption tower XF4, the bottom port of the fourth adsorption tower XF4 is hermetically connected with one end of a second manual ball valve S2, the other end of the second manual ball valve S2 is hermetically connected with the input end of a dust filter FC, the output end of the dust filter FC is hermetically connected with a fourth self-sealing port ZF4, a nitrogen circulating heating pipeline is hermetically connected between the second input end and the second output end of a plate heat exchanger BH, and a first safety valve SV1 is hermetically mounted on a pipeline between the plate heat exchanger BH and the first electric ball valve V1; one end of the third manual ball valve S3 is in sealing connection with the output end of the nitrogen heater DJR, the other end of the third manual ball valve S3 is in sealing connection with the second input end of the plate heat exchanger BH, the second output end of the plate heat exchanger BH is in sealing connection with one end of the fourth manual ball valve S4, the other end of the fourth manual ball valve S4 is in sealing connection with one end of the fifth manual ball valve S5, the other end of the fifth manual ball valve S5 is in sealing connection with the input end of the moisture filter SF, the output end of the moisture filter SF is in sealing connection with the input end of the nitrogen storage tank DQG, the output end of the nitrogen storage tank DQG is in sealing connection with the input end of the Roots fan YS2, the output end of the Roots fan YS2 is in sealing connection with the input end of the nitrogen heater DJR, and the second safety valve SV2 is in sealing connection with the pipeline between the moisture filter SF and the nitrogen storage tank DQG;
the method specifically comprises the following steps:
(1) opening a third manual ball valve S3, a fourth manual ball valve S4 and a fifth manual ball valve S5, and starting a nitrogen heater DJR, a Roots blower YS2 and a plate heat exchanger BH; the nitrogen heater DJR sends the heated nitrogen into a plate heat exchanger BH through a third manual ball valve S3 for heat exchange, the heat-exchanged nitrogen enters a moisture filter SF through a fourth manual ball valve S4 and a fifth manual ball valve S5 for drying treatment, the dried nitrogen enters a nitrogen storage tank DQG and then enters a nitrogen heater through a Roots blower YS2 for cyclic heating;
(2) the first self-sealing interface ZF1 is connected with the recovered liquid SF 6 The steel cylinder is connected in a sealing way, and the fourth self-sealing interface ZF4 is connected with the back-stage SF 6 The processing device is connected in a sealing mode, the first manual ball valve S1, the second manual ball valve S2 and the first electric ball valve V1 are opened, and the first air heat exchanger HR1 is opened; at this point the reactor is opened with the recovered liquid SF 6 Valve of steel cylinder, liquid SF 6 Flows into a first air heat exchanger HR1 from a first manual ball valve S1, is preheated by a first air heat exchanger HR1, flows into a plate heat exchanger BH for heating, and is heated twice to obtain liquid SF 6 Complete gasification to SF 6 Gas, SF 6 After passing through a first electric ball valve V1, the gas enters a first absorption tower XF1, a second absorption tower XF2, a third absorption tower XF3 and a fourth absorption tower XF4 in sequence to absorb SF 6 Impurity gas in the gas enters the dust filter FC after passing through the second manual ball valve S2 to adsorb SF 6 Dust in the gas finally enters the back-stage SF through a fourth self-sealing interface ZF4 6 The processing device carries out the next processing.
When the purification device of the invention is used, liquid SF 6 Preheating the liquid SF through a first air heat exchanger HR1 and a first air heat exchanger HR1, then flowing into a plate heat exchanger BH for heating, and heating the liquid SF twice 6 Complete gasification to SF 6 Gas, SF 6 And the gas enters the multistage adsorption tower again to be adsorbed by the adsorbent, so that impurities are removed, and the efficiency of purification operation is greatly improved.
Further, the purification device further comprises: a vacuum pumping pipeline; the evacuation pipeline include: a seventh manual ball valve S7, an eighth manual ball valve S8, a thirteenth manual ball valve S13, a second air heat exchanger HR2, a vacuum gauge ZK, a solenoid valve DV1 and a vacuum compressor YS 1; one end of the seventh manual ball valve S7 is respectively connected with the top ports of the first adsorption tower XF1 and the second adsorption tower XF2 in a sealing manner, one end of the eighth manual ball valve S8 is respectively connected with the top ports of the third adsorption tower XF3 and the fourth adsorption tower XF4 in a sealing manner, the other end of the seventh manual ball valve S7 and the other end of the eighth manual ball valve S8 are both connected with one end of the thirteenth manual ball valve S13 in a sealing manner, the other end of the thirteenth manual ball valve S13 is connected with the input end of the second air heat exchanger HR2 in a sealing manner, the output end of the second air heat exchanger HR2 is connected with one end of a solenoid valve DV1 in a sealing manner, the other end of the solenoid valve DV1 is connected with the input end of a vacuum compressor YS1 in a sealing manner, and a vacuum gauge ZK is installed on a pipeline between the second air heat exchanger HR2 and the solenoid valve DV1 in a sealing manner.
Further, the purification device further comprises: a tail gas treatment pipeline; the tail gas treatment pipeline comprises: the alkali liquor box JYX, the third self-sealing interface ZF3 and the fourteenth manual ball valve S14; the input end of lye tank JYX and the output end sealing connection of vacuum compressor YS1, the output end of lye tank JYX and third proclaim oneself interface ZF3 sealing connection, the one end sealing connection of fourteenth manual ball valve S14 is on the pipeline between vacuum compressor YS1 and lye tank JYX, the other end of fourteenth manual ball valve S14 passes through pipeline sealing connection on the pipeline between fourth manual ball valve S4 and fifth manual ball valve S5.
Further, the purification device further comprises: a nitrogen charging pipeline; the nitrogen charging pipeline comprises: the second self-sealing interface ZF2, the pressure reducing valve JY and the sixth manual ball valve S6; one end of the pressure reducing valve JY is in sealing connection with the second self-sealing interface ZF2, the other end of the pressure reducing valve JY is in sealing connection with one end of the thirteenth manual ball valve S13, one end of the sixth manual ball valve S6 is in sealing connection with a pipeline between the nitrogen heater DJR and the third manual ball valve S3 through a pipeline, and the other end of the sixth manual ball valve S6 is in sealing connection with a pipeline between the pressure reducing valve JY and the thirteenth manual ball valve S13 through a pipeline.
Further, still include: the adsorbent is regenerated on line, specifically as follows:
s1, temperature-rising analysis of the adsorbent: the second hand ball valve S2 is opened, and the residual SF in the first absorption tower XF1, the second absorption tower XF2, the third absorption tower XF3 and the fourth absorption tower XF4 is filtered 6 The gas is totally discharged to the later stage SF 6 After the treatment device is processed, the second manual ball valve S2 is closed, the second self-sealing interface ZF2 is hermetically connected with the high-purity nitrogen steel cylinder, and the fifth manual ball valve S5, the sixth manual ball valve S6, the seventh manual ball valve S7, the eighth manual ball valve S8 and the ninth manual ball valve are openedA valve S9, a tenth manual ball valve S10, an eleventh manual ball valve S11 and a twelfth manual ball valve S12, wherein a high-purity nitrogen steel cylinder is opened, a pressure reducing valve JY is adjusted, nitrogen is filled into the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4, the high-purity nitrogen steel cylinder is closed after being filled with the nitrogen, a nitrogen heater DJR is started to heat at the moment, the heated nitrogen flows through the sixth manual ball valve S6, enters the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower 3 and the fourth adsorption tower XF4, passes through the fifth manual ball valve S5 and then enters a moisture filter SF to be dried, the dried nitrogen enters the nitrogen storage tank DQG, then enters a nitrogen heater through a Roots blower fan 2 to be circularly heated, and the temperature of the adsorption tower XF1, the second adsorption tower XF 5, the third adsorption tower XF 3624 and the fourth adsorption tower XF 5842 is raised, then closing a fifth manual ball valve S5 and a sixth manual ball valve S6, opening a fourteenth manual ball valve S14, enabling nitrogen and the resolved impurities in the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 to flow into an alkaline liquid tank JYX and then to be neutralized and discharged, finally closing the fourteenth manual ball valve S14, and ending the heating resolving operation of the adsorbent;
s2, vacuum-pumping negative-pressure analysis of the adsorbent: opening a thirteenth manual ball valve S13 and a solenoid valve DV1, opening a second air heat exchanger HR2 and a vacuum compressor YS1, vacuumizing and negative pressure analyzing the adsorbents in a first adsorption tower XF1, a second adsorption tower XF2, a third adsorption tower XF3 and a fourth adsorption tower XF4, closing a second air heat exchanger HR2, a vacuum compressor YS1, a thirteenth manual ball valve S13 and a solenoid valve DV1 when a vacuum gauge ZK reaches a set value, opening a thirteenth fourth manual ball valve S14, opening a high-purity nitrogen steel cylinder, adjusting a pressure reducing valve JY, filling nitrogen into the first adsorption tower XF 695 2, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4, closing a first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF 8458, discharging impurities in a desorption tower JX 3872 and a seventh manual ball valve S8, and finally discharging alkaline liquid S7 and the alkaline tank S8, and the last manual ball valve are closed, and the manual ball valve S8 are closed, The ninth manual ball valve S9, the tenth manual ball valve S10, the eleventh manual ball valve S11, the twelfth manual ball valve S12, and the fourteenth manual ball valve S14, and the evacuation negative pressure analysis operation is completed.
Further, the SF 6 The gas purification pipeline further comprises: a ninth manual ball valve S9, a tenth manual ball valve S10, an eleventh manual ball valve S11, a twelfth manual ball valve S12; and one end of each of the ninth manual ball valve S9, the tenth manual ball valve S10, the eleventh manual ball valve S11 and the twelfth manual ball valve S12 is respectively and correspondingly arranged at the bottom ports of the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 in a sealing manner, and the other ends of the ninth manual ball valve S9, the tenth manual ball valve S10, the eleventh manual ball valve S11 and the twelfth manual ball valve S12 are all arranged on a pipeline between the fourth manual ball valve S4 and the fifth manual ball valve S5 in a sealing manner.
Further, the liquid SF 6 The preheating circuit still includes: a third pressure sensor P3; the third pressure sensor P3 is hermetically mounted on the pipeline between the first manual ball valve S1 and the first air heat exchanger HR 1.
Further, the liquid SF 6 The gasification pipeline still includes: and the first temperature sensor T1, wherein the first temperature sensor T1 is hermetically arranged on the plate heat exchanger BH.
Further, the SF 6 The gas purification pipeline further comprises: the first pressure sensor P1 and the third temperature sensor T3 are arranged on the pipeline between the dust filter FC and the fourth self-sealing opening ZF4 in a sealing mode, and the first pressure sensor P1 and the third temperature sensor T3 are arranged on the pipeline between the dust filter FC and the fourth self-sealing opening ZF4 in a sealing mode.
Further, the nitrogen gas circulation heating pipeline further comprises: the nitrogen heater comprises a second temperature sensor T2, a second pressure sensor P2 and a fourth temperature sensor T4, wherein the second temperature sensor T2 is hermetically installed on a pipeline between a fourth manual ball valve S4 and a fifth manual ball valve S5, the second pressure sensor P2 is hermetically installed on a pipeline between a Roots blower YS2 and the nitrogen heater DJR, and the fourth temperature sensor T4 is hermetically installed at one end of the nitrogen heater DJR.
The invention has the advantages that:
(1) when the purification device of the invention is used, liquid SF 6 Preheating the liquid SF through a first air heat exchanger HR1 and a first air heat exchanger HR1, then flowing into a plate heat exchanger BH for heating, and heating the liquid SF twice 6 Complete gasification to SF 6 Gas, SF 6 And the gas enters the multistage adsorption tower again to be adsorbed by the adsorbent, so that impurities are removed, and the efficiency of purification operation is greatly improved.
(2) When the adsorbent in the multistage adsorption tower is saturated, nitrogen is filled into the multistage adsorption tower, the nitrogen heater DJR is started to heat after the multistage adsorption tower is filled with nitrogen, the adsorbent in the multistage adsorption tower is heated and analyzed, the vacuumizing pipeline is opened again, the multistage adsorption tower is vacuumized, the adsorbent in the multistage adsorption tower is vacuumized and analyzed at negative pressure, the online regeneration of the adsorbent is realized, and the efficiency of purification operation is further improved.
Drawings
FIG. 1 shows a first embodiment of the present invention for recovering liquid SF 6 The structure of the purification device;
FIG. 2 shows the recovered liquid SF according to the first embodiment of the present invention 6 The structure of the multi-stage adsorption tower of the purification device;
FIG. 3 is a diagram of the recovered liquid SF according to the first embodiment of the present invention 6 A flow chart of a method of purifying a device.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The technical scheme of the invention is further described by combining the drawings and the specific embodiments in the specification:
example one
As shown in FIG. 1, a recovered liquid SF 6 PurificationThe device comprises: the system comprises a first self-sealing interface ZF1, a first manual ball valve S1, a third pressure sensor P3, a first air heat exchanger HR1, a plate heat exchanger BH, a first safety valve SV1 and a first electric ball valve V1; a first adsorption tower XF1, a second adsorption tower XF2, a third adsorption tower XF3, a fourth adsorption tower XF4, a seventh manual ball valve S7, an eighth manual ball valve S8, a ninth manual ball valve S9, a tenth manual ball valve S10, an eleventh manual ball valve S11, a twelfth manual ball valve S12, a second manual ball valve S2, a dust filter FC, a first pressure sensor P1, a first temperature sensor T1, a third temperature sensor T3 and a fourth self-sealing opening ZF 4; a thirteenth manual ball valve S13, a second air heat exchanger HR2, a vacuum gauge ZK, a solenoid valve DV1 and a vacuum compressor YS 1; the alkali liquor box JYX, the third self-sealing interface ZF3 and the fourteenth manual ball valve S14; a third manual ball valve S3, a fourth manual ball valve S4, a second temperature sensor T2, a fifth manual ball valve S5, a moisture filter SF, a second safety valve SV2, a nitrogen storage tank DQG, a roots blower YS2, a second pressure sensor P2, a nitrogen heater DJR, a fourth temperature sensor T4; a second self-sealing interface ZF2, a pressure reducing valve JY and a sixth manual ball valve S6.
First self-sealing interface ZF1 and liquid SF containing recycled liquid 6 The steel cylinder is in sealing connection, one end of a first manual ball valve S1 is in sealing connection with a first self-sealing interface ZF1 through a pipeline, the other end of the first manual ball valve S1 is in sealing connection with the input end of a first air heat exchanger HR1 through a pipeline, the output end of the first air heat exchanger HR1 is in sealing connection with the first input end of a plate heat exchanger BH through a pipeline, the first output end of the plate heat exchanger BH is in sealing connection with one end of a first electric ball valve V1 through a pipeline, the other end of the first electric ball valve V1 is in sealing connection with the bottom port of a first adsorption tower XF1 through a pipeline, the top port of the first adsorption tower XF1 is in sealing connection with the top port of a second adsorption tower XF2 through a pipeline, the bottom port of the second adsorption tower XF2 is in sealing connection with the bottom port of a third adsorption tower XF3 through a pipeline, the top port of the third adsorption tower XF3 is in sealing connection with the top port of a fourth adsorption tower XF4 through a pipeline, the bottom port of the fourth adsorption tower XF4 is hermetically connected with one end of a second manual ball valve S2 through a pipeline, and the other end of the second manual ball valve S2 is connected with the dust filter FCThe input end is hermetically connected with the pipeline, the output end of the dust filter FC is hermetically connected with a fourth self-sealing port ZF4 through the pipeline, one end of a ninth manual ball valve S9, a tenth manual ball valve S10, an eleventh manual ball valve S11 and a twelfth manual ball valve S12 are respectively and correspondingly hermetically installed at the bottom ports of a first adsorption tower XF1, a second adsorption tower XF2, a third adsorption tower XF3 and a fourth adsorption tower XF4, the other ends of the ninth manual ball valve S9, the tenth manual ball valve S10, the eleventh manual ball valve S11 and the twelfth manual ball valve S12 are hermetically installed on the pipeline between the fourth manual ball valve S4 and the fifth manual ball valve S5, one end of a seventh manual ball valve S7 is respectively and hermetically connected with the top ports of the first adsorption tower XF1 and the second adsorption tower XF2 through the pipeline, the other end of the seventh manual ball valve S7 is hermetically connected with a thirteenth manual ball valve JY 13, one end of an eighth manual ball valve S8 is respectively connected with the top ports of a third adsorption tower XF3 and a fourth adsorption tower XF4 in a sealing mode through pipelines, the other end of the eighth manual ball valve S8 is connected with a pipeline between a pressure reducing valve JY and a thirteenth manual ball valve S13 in a sealing mode, a third pressure sensor P3 is installed on a pipeline between a first manual ball valve S1 and a first air heat exchanger HR1 in a sealing mode, a first temperature sensor T1 is installed on a plate heat exchanger BH in a sealing mode, a first safety valve SV1 is installed on a pipeline between the plate heat exchanger BH and a first electric ball valve V1 in a sealing mode, and a first pressure sensor P1 and a third temperature sensor T3 are installed on a pipeline between a dust filter FC and a fourth self-sealing port ZF4 in a sealing mode.
One end of a third manual ball valve S3 is hermetically connected with the output end of a nitrogen heater DJR through a pipeline, the other end of the third manual ball valve S3 is hermetically connected with the second input end of a plate heat exchanger BH through a pipeline, the second output end of the plate heat exchanger BH is hermetically connected with one end of a fourth manual ball valve S4 through a pipeline, the other end of the fourth manual ball valve S4 is hermetically connected with one end of a fifth manual ball valve S5 through a pipeline, the other end of the fifth manual ball valve S5 is hermetically connected with the input end of a moisture filter SF through a pipeline, the output end of the moisture filter SF is hermetically connected with the input end of a nitrogen storage tank DQG through a pipeline, the output end of the nitrogen storage tank DQG is hermetically connected with the input end of a Roots blower YS2 through a pipeline, the output end of the Roots blower YS2 is hermetically connected with the input end of the nitrogen heater DJR through a pipeline, a second temperature sensor T2 is hermetically installed on a pipeline between the fourth manual ball valve S4 and the fifth manual ball valve S5, the second safety valve SV2 is hermetically arranged on a pipeline between the moisture filter SF and the nitrogen storage tank DQG, the second pressure sensor P2 is hermetically arranged on a pipeline between the Roots blower YS2 and the nitrogen heater DJR, and the fourth temperature sensor T4 is hermetically arranged at one end of the nitrogen heater DJR.
The second self-sealing connector ZF2 is in sealing connection with a high-purity nitrogen steel cylinder, one end of a pressure reducing valve JY is in sealing connection with the second self-sealing connector ZF2 through a pipeline, the other end of the pressure reducing valve JY is in sealing connection with one end of a thirteenth manual ball valve S13 through a pipeline, the other end of a thirteenth manual ball valve S13 is in sealing connection with the input end of a second air heat exchanger HR2 through a pipeline, the output end of the second air heat exchanger HR2 is in sealing connection with one end of a solenoid valve DV1 through a pipeline, the other end of the solenoid valve DV1 is in sealing connection with the input end of a vacuum compressor YS2 through a pipeline, the output end of the vacuum compressor YS1 is in sealing connection with the input end of an alkaline liquid tank JYX through a pipeline, the output end of the alkaline liquid tank JYX is in sealing connection with the third self-sealing connector ZF3 through a pipeline, one end of a sixth manual ball valve S6 is in sealing connection with a pipeline between a nitrogen heater R85R and a third manual ball valve S3 through a pipeline, and the other end of a sixth manual ball valve S13 through a pipeline, and the other end of a pipeline, and the pressure reducing valve JY 6 through a pipeline, and a pipeline are in sealing connection with a pipeline, and a pipeline are in sealing connection of a pipeline, and a pipeline The vacuum gauge ZK is hermetically installed on the pipeline between the second air heat exchanger HR2 and the electromagnetic valve DV1, one end of the fourteenth manual ball valve S14 is hermetically connected on the pipeline between the vacuum compressor YS1 and the lye tank JYX through the pipeline, and the other end of the fourteenth manual ball valve S14 is hermetically connected on the pipeline between the fourth manual ball valve S4 and the fifth manual ball valve S5 through the pipeline.
As shown in fig. 3, the device has the following work flow:
first, recovered liquid SF 6 Purifying and refining
1. For liquid SF 6 Gasification line and SF 6 Gas purification pipeline vacuum pumping
Opening a first manual ball valve S1, a second manual ball valve S2, a seventh manual ball valve S7, an eighth manual ball valve S8, a thirteenth manual ball valve S13, a solenoid valve DV1 and a first electric ball valve V1, closing a first self-sealing port ZF1 and a fourth self-sealing port ZF4, starting a vacuum compressor YS1 to vacuumize, closing the first electric ball valve V1, the solenoid valve DV1 and the vacuum compressor YS1 in sequence when the ZK parameter of the vacuum gauge reaches a set value, closing the first manual ball valve S1, the second manual ball valve S2, the seventh manual ball valve S7, the eighth manual ball valve S8 and the thirteenth manual ball valve S13, and finishing the vacuumizing operation.
2. Recovered liquid SF 6 Temperature-controlled gasification and purification
Opening a third manual ball valve S3, a fourth manual ball valve S4 and a fifth manual ball valve S5, and starting a nitrogen heater DJR, a Roots blower YS2 and a plate heat exchanger BH; and the nitrogen heater DJR sends the heated nitrogen into the plate heat exchanger BH through a third manual ball valve S3 for heat exchange, the nitrogen after heat exchange enters the water filter SF for drying treatment after passing through a fourth manual ball valve S4 and a fifth manual ball valve S5, and the dried nitrogen enters a nitrogen storage tank DQG and then enters the nitrogen heater for cyclic heating through a Roots blower YS 2.
The first self-sealing interface ZF1 is connected with the recovered liquid SF 6 The steel cylinder is connected in a sealing way, and the fourth self-sealing interface ZF4 is connected with the back-stage SF 6 The processing device is connected in a sealing mode, the first manual ball valve S1, the second manual ball valve S2 and the first electric ball valve V1 are opened, and the first air heat exchanger HR1 is opened; at this time, the liquid SF with the recovered liquid is slowly opened 6 Valve of steel cylinder, liquid SF 6 Flows into a first air heat exchanger HR1 from a first manual ball valve S1, is preheated by a first air heat exchanger HR1, flows into a plate heat exchanger BH for heating, and is heated twice to obtain liquid SF 6 Complete gasification to SF 6 Gas, SF 6 After passing through a first electric ball valve V1, the gas enters a first absorption tower XF1, a second absorption tower XF2, a third absorption tower XF3 and a fourth absorption tower XF4 in sequence to absorb SF 6 Impurity gas in the gas enters the dust filter FC after passing through the second manual ball valve S2 to adsorb SF 6 Dust in the gas finally enters the gas through a fourth self-sealing interface ZF4Grade SF 6 The processing device carries out the next processing; containing recovered liquid SF 6 After the steel cylinder purification treatment is finished, the first manual ball valve S1, the first electric ball valve V1, the first air heat exchanger HR1 and the roots blower YS2 are closed in sequence, and the purification treatment operation is finished when the second manual ball valve S2, the third manual ball valve S3, the fourth manual ball valve S4 and the fifth manual ball valve S5 are closed in sequence.
Secondly, the adsorbent is regenerated on line
1. Temperature-rising desorption of adsorbent
The second hand ball valve S2 is opened, and the residual SF in the first absorption tower XF1, the second absorption tower XF2, the third absorption tower XF3 and the fourth absorption tower XF4 is filtered 6 The gas is totally discharged to the later stage SF 6 After the treatment device, closing a second manual ball valve S2, then hermetically connecting a second self-sealing interface ZF2 with a high-purity nitrogen steel cylinder, opening a fifth manual ball valve S5, a sixth manual ball valve S6, a seventh manual ball valve S7, an eighth manual ball valve S8, a ninth manual ball valve S9, a tenth manual ball valve S10, an eleventh manual ball valve S11 and a twelfth manual ball valve S12, opening the high-purity nitrogen steel cylinder at the moment, adjusting a pressure reducing valve JY, filling nitrogen into a first adsorption tower XF1, a second adsorption tower XF2, a third adsorption tower XF3 and a fourth adsorption tower XF4, closing the high-purity nitrogen steel cylinder after filling the nitrogen, starting a nitrogen heater R at the moment to heat, enabling the heated nitrogen to flow through the sixth manual ball valve S6, entering the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3, the fourth adsorption tower XF4, enabling the heated nitrogen to pass through a fifth manual ball valve S5 to perform dry water treatment, the dried nitrogen enters a nitrogen storage tank DQG, and then enters a nitrogen heater through a Roots blower YS2 to be circularly heated, the temperature of the adsorbents in the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 is raised and analyzed, then the fifth manual ball valve S5 and the sixth manual ball valve S6 are closed, the fourteenth manual ball valve S14 is opened, the nitrogen in the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 and the analyzed impurities flow into an alkaline liquid tank JYX and are neutralized and discharged, then the fourteenth manual ball valve S14 is closed, and the operation of raising and analyzing the temperature of the adsorbents is finished.
2. Vacuum-pumping negative pressure desorption of adsorbent
Opening a seventh manual ball valve S7, an eighth manual ball valve S8, a thirteenth manual ball valve S13 and a solenoid valve DV1, opening a second air heat exchanger HR2 and a vacuum compressor YS1, performing vacuum negative pressure analysis on the adsorbents in the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4, allowing the impurities analyzed in the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 to flow into an alkali liquor tank JYX and then to be discharged, closing the seventh manual ball valve S7, the eighth manual ball valve S8, the second air heat exchanger HR2, the vacuum compressor YS1, the thirteenth manual ball valve S13 and the DV1 when a vacuum gauge ZK reaches a set value, and finishing the vacuum negative pressure analysis operation.
3. Nitrogen filling, purging and cooling
Opening a seventh manual ball valve S7, a ninth manual ball valve S9, a tenth manual ball valve S10 and a thirteenth and fourth manual ball valve S14, opening a high-purity nitrogen steel cylinder, adjusting a pressure reducing valve JY, filling nitrogen into a first adsorption tower XF1 and a second adsorption tower XF2, filling nitrogen into the first adsorption tower XF1 and the second adsorption tower XF2, purging and cooling, enabling the purged nitrogen to flow into an alkaline liquid tank JYX and then neutralizing and discharging, stopping filling nitrogen into the first adsorption tower XF1 and the second adsorption tower XF2, purging and cooling when the temperature detected by a second temperature sensor T2 is reduced to the ambient temperature, and closing the seventh manual ball valve S7, the ninth manual ball valve S9 and the tenth manual ball valve S10; and opening an eighth manual ball valve S8, an eleventh manual ball valve S11 and a twelfth manual ball valve S12, purging and cooling the third adsorption tower XF3 and the fourth adsorption tower XF4 by filling nitrogen, enabling the purged nitrogen to flow into an alkaline liquid tank JYX and then to be neutralized and discharged, stopping purging and cooling the third adsorption tower XF3 and the fourth adsorption tower XF4 by filling nitrogen when the temperature detected by the second temperature sensor T2 is reduced to the ambient temperature, closing a high-purity nitrogen steel cylinder, adjusting a pressure reducing valve JY, the eighth manual ball valve S8, the eleventh manual ball valve S11, the twelfth manual ball valve S12 and the fourteenth manual ball valve S14.
4. Vacuumizing and cleaning of adsorption tower
And opening a seventh manual ball valve S7, an eighth manual ball valve S8, a thirteenth manual ball valve S13 and a solenoid valve DV1, opening a second air heat exchanger HR2 and a vacuum compressor YS1, vacuumizing the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4, and closing the second air heat exchanger HR2, the vacuum compressor YS1, the seventh manual ball valve S7, the eighth manual ball valve S8, the thirteenth manual ball valve S13 and the solenoid valve DV1 when the vacuum gauge ZK reaches a set value, so that the operation of vacuumizing and cleaning the adsorption towers is finished.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1. Liquid SF for recovery 6 A method of decontaminating an apparatus, said decontaminating apparatus comprising: liquid SF 6 Preheating pipeline and liquid SF 6 Gasification line, SF 6 A gas purification pipeline and a nitrogen circulating heating pipeline; the liquid SF 6 The preheating pipeline includes: the first self-sealing interface ZF1, the first manual ball valve S1 and the first air heat exchanger HR 1; the liquid SF 6 The gasification pipeline includes: the device comprises a plate heat exchanger BH, a first safety valve SV1 and a first electric ball valve V1; the SF 6 The gas purification pipeline includes: a first adsorption tower XF1, a second adsorption tower XF2, a third adsorption tower XF3, a fourth adsorption tower XF4, a seventh manual ball valve S7, an eighth manual ball valve S8, a ninth manual ball valve S9, a tenth manual ball valve S10, an eleventh manual ball valve S11, a twelfth manual ball valve S12, a second manual ball valve S2, a dust filter FC, and a fourth self-sealing opening ZF 4; the nitrogen gas circulation heating pipeline comprises: a third manual ball valve S3, a fourth manual ball valve S4, a fifth manual ball valve S5, a moisture filter SF, a second safety valve SV2, a nitrogen storage tank DQG, a Roots blower YS2 and a nitrogen heater DJR; one end of the first manual ball valve S1The other end of a first manual ball valve S1 is hermetically connected with an input end of a first air heat exchanger HR1, an output end of the first air heat exchanger HR1 is hermetically connected with a first input end of a plate heat exchanger BH, a first output end of the plate heat exchanger BH is hermetically connected with one end of a first electric ball valve V1, the other end of the first electric ball valve V1 is hermetically connected with a bottom port of a first adsorption tower XF1, a top port of the first adsorption tower XF1 is hermetically connected with a top port of a second adsorption tower XF2, a bottom port of the second adsorption tower XF2 is hermetically connected with a bottom port of a third adsorption tower XF3, a top port of the third adsorption tower XF3 is hermetically connected with a top port of a fourth adsorption tower XF4, a bottom port of the fourth adsorption tower XF4 is hermetically connected with one end of a second manual ball valve S2, and the other end of the second manual ball valve S2 is hermetically connected with an input end of a dust filter FC, the output end of the dust filter FC is hermetically connected with a fourth self-sealing port ZF4, a nitrogen circulating heating pipeline is hermetically connected between the second input end and the second output end of the plate heat exchanger BH, and a first safety valve SV1 is hermetically arranged on a pipeline between the plate heat exchanger BH and a first electric ball valve V1; one end of the third manual ball valve S3 is in sealing connection with the output end of the nitrogen heater DJR, the other end of the third manual ball valve S3 is in sealing connection with the second input end of the plate heat exchanger BH, the second output end of the plate heat exchanger BH is in sealing connection with one end of the fourth manual ball valve S4, the other end of the fourth manual ball valve S4 is in sealing connection with one end of the fifth manual ball valve S5, the other end of the fifth manual ball valve S5 is in sealing connection with the input end of the moisture filter SF, the output end of the moisture filter SF is in sealing connection with the input end of the nitrogen storage tank DQG, the output end of the nitrogen storage tank DQG is in sealing connection with the input end of the Roots fan YS2, the output end of the Roots fan YS2 is in sealing connection with the input end of the nitrogen heater DJR, and the second safety valve SV2 is in sealing connection with the pipeline between the moisture filter SF and the nitrogen storage tank DQG;
the method specifically comprises the following steps:
(1) opening a third manual ball valve S3, a fourth manual ball valve S4 and a fifth manual ball valve S5, and starting a nitrogen heater DJR, a Roots blower YS2 and a plate heat exchanger BH; the nitrogen heater DJR sends the heated nitrogen into the plate heat exchanger BH for heat exchange through a third manual ball valve S3, the nitrogen after heat exchange enters the moisture filter SF for drying treatment after passing through a fourth manual ball valve S4 and a fifth manual ball valve S5, and the dried nitrogen enters a nitrogen storage tank DQG and then enters the nitrogen heater for cyclic heating through a Roots blower YS 2;
(2) the first self-sealing interface ZF1 is connected with the recovered liquid SF 6 The steel cylinder is connected in a sealing way, and the fourth self-sealing interface ZF4 is connected with the back-stage SF 6 The processing device is connected in a sealing mode, the first manual ball valve S1, the second manual ball valve S2 and the first electric ball valve V1 are opened, and the first air heat exchanger HR1 is opened; at this point the reactor is opened with the recovered liquid SF 6 Valve of steel cylinder, liquid SF 6 Flows into a first air heat exchanger HR1 from a first manual ball valve S1, is preheated by a first air heat exchanger HR1, flows into a plate heat exchanger BH for heating, and is heated twice to obtain liquid SF 6 Complete gasification to SF 6 Gas, SF 6 After passing through a first electric ball valve V1, the gas enters a first absorption tower XF1, a second absorption tower XF2, a third absorption tower XF3 and a fourth absorption tower XF4 in sequence to absorb SF 6 Impurity gas in the gas enters the dust filter FC after passing through the second manual ball valve S2 to adsorb SF 6 Dust in the gas finally enters the back-stage SF through a fourth self-sealing interface ZF4 6 The processing device carries out the next processing.
2. The method of claim 1, wherein the purification apparatus further comprises: a vacuum pumping pipeline; the evacuation pipeline include: a seventh manual ball valve S7, an eighth manual ball valve S8, a thirteenth manual ball valve S13, a second air heat exchanger HR2, a vacuum gauge ZK, a solenoid valve DV1 and a vacuum compressor YS 1; one end of the seventh manual ball valve S7 is respectively connected with the top ports of the first adsorption tower XF1 and the second adsorption tower XF2 in a sealing manner, one end of the eighth manual ball valve S8 is respectively connected with the top ports of the third adsorption tower XF3 and the fourth adsorption tower XF4 in a sealing manner, the other end of the seventh manual ball valve S7 and the other end of the eighth manual ball valve S8 are both connected with one end of the thirteenth manual ball valve S13 in a sealing manner, the other end of the thirteenth manual ball valve S13 is connected with the input end of the second air heat exchanger HR2 in a sealing manner, the output end of the second air heat exchanger HR2 is connected with one end of a solenoid valve DV1 in a sealing manner, the other end of the solenoid valve DV1 is connected with the input end of a vacuum compressor YS1 in a sealing manner, and a vacuum gauge ZK is installed on a pipeline between the second air heat exchanger HR2 and the solenoid valve DV1 in a sealing manner.
3. The method of claim 2, wherein the purification apparatus further comprises: a tail gas treatment pipeline; the tail gas treatment pipeline comprises: the alkali liquor box JYX, the third self-sealing interface ZF3 and the fourteenth manual ball valve S14; the input end of lye tank JYX and the output end sealing connection of vacuum compressor YS1, the output end of lye tank JYX and third proclaim oneself interface ZF3 sealing connection, the one end sealing connection of fourteenth manual ball valve S14 is on the pipeline between vacuum compressor YS1 and lye tank JYX, the other end of fourteenth manual ball valve S14 passes through pipeline sealing connection on the pipeline between fourth manual ball valve S4 and fifth manual ball valve S5.
4. The method of claim 3, wherein the purification apparatus further comprises: a nitrogen charging pipeline; the nitrogen charging pipeline comprises: the second self-sealing interface ZF2, the pressure reducing valve JY and the sixth manual ball valve S6; one end of the pressure reducing valve JY is in sealing connection with the second self-sealing interface ZF2, the other end of the pressure reducing valve JY is in sealing connection with one end of the thirteenth manual ball valve S13, one end of the sixth manual ball valve S6 is in sealing connection with a pipeline between the nitrogen heater DJR and the third manual ball valve S3 through a pipeline, and the other end of the sixth manual ball valve S6 is in sealing connection with a pipeline between the pressure reducing valve JY and the thirteenth manual ball valve S13 through a pipeline.
5. The method of claim 4, further comprising: the method for regenerating the adsorbent on line comprises the following specific steps:
s1 analysis of adsorbent at elevated temperature
The second hand ball valve S2 was opened, and the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3, and the third adsorption tower XF3 were placedRemaining SF in the four adsorption towers XF4 6 The gas is totally discharged to the later stage SF 6 After the treatment device, closing a second manual ball valve S2, then hermetically connecting a second self-sealing interface ZF2 with a high-purity nitrogen steel cylinder, opening a fifth manual ball valve S5, a sixth manual ball valve S6, a seventh manual ball valve S7, an eighth manual ball valve S8, a ninth manual ball valve S9, a tenth manual ball valve S10, an eleventh manual ball valve S11 and a twelfth manual ball valve S12, opening the high-purity nitrogen steel cylinder at the moment, adjusting a pressure reducing valve JY, filling nitrogen into a first adsorption tower XF1, a second adsorption tower XF2, a third adsorption tower XF3 and a fourth adsorption tower XF4, closing the high-purity nitrogen steel cylinder after filling the nitrogen, starting a nitrogen heater R at the moment to heat, enabling the heated nitrogen to flow through the sixth manual ball valve S6, entering the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3, the fourth adsorption tower XF4, enabling the heated nitrogen to pass through a fifth manual ball valve S5 to perform dry water treatment, the dried nitrogen enters a nitrogen storage tank DQG, and then enters a nitrogen heater through a Roots blower YS2 to be circularly heated, so that the temperature of the adsorbents in the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 is raised and analyzed, then the fifth manual ball valve S5 and the sixth manual ball valve S6 are closed, the fourteenth manual ball valve S14 is opened, the nitrogen in the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 and the analyzed impurities flow into an alkaline liquid tank JYX and are neutralized and discharged, then the fourteenth manual ball valve S14 is closed, and the temperature raising and analyzing operation of the adsorbents is finished;
s2 vacuum-pumping negative-pressure analysis of adsorbent
Opening a seventh manual ball valve S7, an eighth manual ball valve S8, a thirteenth manual ball valve S13 and a solenoid valve DV1, opening a second air heat exchanger HR2 and a vacuum compressor YS1, performing vacuum negative pressure analysis on the adsorbents in a first adsorption tower XF1, a second adsorption tower XF2, a third adsorption tower XF3 and a fourth adsorption tower XF4, allowing the impurities analyzed in the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 to flow into an alkali liquor tank JYX and then to be discharged, closing the seventh manual ball valve S7, the eighth manual ball valve S8, the second air heat exchanger HR2, the vacuum compressor YS1, the thirteenth manual ball valve S13 and the DV1 when a vacuum gauge ZK reaches a set value, and finishing the vacuum negative pressure analysis operation;
s3, filling nitrogen to blow and cool
Opening a seventh manual ball valve S7, a ninth manual ball valve S9, a tenth manual ball valve S10 and a thirteenth and fourth manual ball valve S14, opening a high-purity nitrogen steel cylinder, adjusting a pressure reducing valve JY, filling nitrogen into a first adsorption tower XF1 and a second adsorption tower XF2, filling nitrogen into the first adsorption tower XF1 and the second adsorption tower XF2, purging and cooling, enabling the purged nitrogen to flow into an alkaline liquid tank JYX and then neutralizing and discharging, stopping filling nitrogen into the first adsorption tower XF1 and the second adsorption tower XF2, purging and cooling when the temperature detected by a second temperature sensor T2 is reduced to the ambient temperature, and closing the seventh manual ball valve S7, the ninth manual ball valve S9 and the tenth manual ball valve S10; opening an eighth manual ball valve S8, an eleventh manual ball valve S11 and a twelfth manual ball valve S12, purging and cooling the third adsorption tower XF3 and the fourth adsorption tower XF4 by filling nitrogen, enabling the purged nitrogen to flow into an alkaline liquid tank JYX and then to be neutralized and discharged, stopping purging and cooling the third adsorption tower XF3 and the fourth adsorption tower XF4 by filling nitrogen when the temperature detected by a second temperature sensor T2 is reduced to the ambient temperature, closing a high-purity nitrogen steel cylinder, adjusting a pressure reducing valve JY, the eighth manual ball valve S8, the eleventh manual ball valve S11, the twelfth manual ball valve S12 and the fourteenth manual ball valve S14;
s4, vacuumizing and cleaning the adsorption tower
And opening a seventh manual ball valve S7, an eighth manual ball valve S8, a thirteenth manual ball valve S13 and a solenoid valve DV1, opening a second air heat exchanger HR2 and a vacuum compressor YS1, vacuumizing the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4, and closing the second air heat exchanger HR2, the vacuum compressor YS1, the seventh manual ball valve S7, the eighth manual ball valve S8, the thirteenth manual ball valve S13 and the solenoid valve DV1 when the vacuum gauge ZK reaches a set value, so that the operation of vacuumizing and cleaning the adsorption towers is finished.
6. The method of claim 1, wherein the SF is performed 6 The gas purification pipeline further comprises: ninth manual ball valve S9, tenth manual ball valveBall valve S10, eleventh manual ball valve S11, twelfth manual ball valve S12; and one end of each of the ninth manual ball valve S9, the tenth manual ball valve S10, the eleventh manual ball valve S11 and the twelfth manual ball valve S12 is respectively and correspondingly arranged at the bottom ports of the first adsorption tower XF1, the second adsorption tower XF2, the third adsorption tower XF3 and the fourth adsorption tower XF4 in a sealing manner, and the other ends of the ninth manual ball valve S9, the tenth manual ball valve S10, the eleventh manual ball valve S11 and the twelfth manual ball valve S12 are all arranged on a pipeline between the fourth manual ball valve S4 and the fifth manual ball valve S5 in a sealing manner.
7. Method according to claim 1, characterized in that said liquid SF 6 The preheating circuit still includes: a third pressure sensor P3; the third pressure sensor P3 is hermetically mounted on the pipeline between the first manual ball valve S1 and the first air heat exchanger HR 1.
8. Method according to claim 1, characterized in that said liquid SF 6 The gasification pipeline still includes: and the first temperature sensor T1, wherein the first temperature sensor T1 is hermetically arranged on the plate heat exchanger BH.
9. The method of claim 1, wherein the SF is performed 6 The gas purification pipeline further comprises: the first pressure sensor P1 and the third temperature sensor T3 are arranged on the pipeline between the dust filter FC and the fourth self-sealing opening ZF4 in a sealing mode, and the first pressure sensor P1 and the third temperature sensor T3 are arranged on the pipeline between the dust filter FC and the fourth self-sealing opening ZF4 in a sealing mode.
10. The method of claim 1, wherein the nitrogen recycle heating line further comprises: the nitrogen heater comprises a second temperature sensor T2, a second pressure sensor P2 and a fourth temperature sensor T4, wherein the second temperature sensor T2 is hermetically installed on a pipeline between a fourth manual ball valve S4 and a fifth manual ball valve S5, the second pressure sensor P2 is hermetically installed on a pipeline between a Roots blower YS2 and the nitrogen heater DJR, and the fourth temperature sensor T4 is hermetically installed at one end of the nitrogen heater DJR.
CN202210410058.8A 2022-04-19 2022-04-19 Liquid SF for recovery 6 Method for cleaning a plant Pending CN114849414A (en)

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