CN114815073A - Wavelength division multiplexing device and wavelength division multiplexing system - Google Patents
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- CN114815073A CN114815073A CN202210555282.6A CN202210555282A CN114815073A CN 114815073 A CN114815073 A CN 114815073A CN 202210555282 A CN202210555282 A CN 202210555282A CN 114815073 A CN114815073 A CN 114815073A
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
- G02B6/29382—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM including at least adding or dropping a signal, i.e. passing the majority of signals
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Abstract
A wavelength division multiplexing device and a wavelength division multiplexing system are provided. The wavelength division multiplexing device comprises a substrate, an isolating layer and a waveguide layer which are sequentially arranged along a first direction, wherein the wavelength division multiplexing device is provided with a first end face and a second end face which are parallel to the first direction, one of the first end face and the second end face is an input end face of the wavelength division multiplexing device, and the other end face is an output end face; the waveguide layer includes a slab layer and a ridge-and-ridge layer located on a side of the slab layer remote from the substrate, the ridge-and-ridge layer including an interference region, a first transmission arm region connecting the interference region and extending to the first end face, and a plurality of second transmission arm regions connecting the interference region and extending to the second end face. The technical scheme of the embodiment of the disclosure can reduce the transmission loss of the wavelength division multiplexing system.
Description
Technical Field
The present disclosure relates to the field of optical communication technologies, and in particular, to a wavelength division multiplexing device and a wavelength division multiplexing system.
Background
Wavelength Division Multiplexing (WDM) is a communication technology in which a series of optical signals carrying information but having different wavelengths are combined into one bundle at a transmitting end by a multiplexer (also called a combiner), and transmitted along a single optical fiber, and the optical signals are separated at a receiving end by a demultiplexer (also called a demultiplexer).
Technical advantages of wavelength division multiplexing include: the huge bandwidth resources of the optical fiber can be fully utilized, so that the transmission capacity is increased by dozens of times and hundreds of times compared with the single wavelength; a large amount of optical fibers and a 3R regenerator (reshaping, amplifying and timing) are saved during large-capacity long-distance transmission, so that the transmission cost is obviously reduced; when the network is upgraded and expanded, the new service can be opened or superposed by increasing the wavelength without modifying the optical cable line; the method is irrelevant to the signal rate and the modulation format, and is convenient for introducing a large-bandwidth new service; and network switching and restoration can be achieved using WDM routing to achieve future transparent all-optical networks, and so on.
How to reduce the transmission loss of the wavelength division multiplexing system is a technical problem to be solved urgently at present.
Disclosure of Invention
The embodiment of the disclosure provides a wavelength division multiplexing device and a wavelength division multiplexing system, so as to reduce the transmission loss of the wavelength division multiplexing system.
According to an aspect of the present disclosure, there is provided a wavelength division multiplexing device including a substrate, an isolation layer, and a waveguide layer sequentially arranged in a first direction, wherein the wavelength division multiplexing device has a first end face and a second end face parallel to the first direction, one of the first end face and the second end face is an input end face of the wavelength division multiplexing device, and the other is an output end face; the waveguide layer includes a slab layer and a ridge-and-ridge layer located on a side of the slab layer remote from the substrate, the ridge-and-ridge layer including an interference region, a first transmission arm region connecting the interference region and extending to the first end face, and a plurality of second transmission arm regions connecting the interference region and extending to the second end face.
In some embodiments, the first end face is orthogonal to the second end face, the interference region comprises a rectangular portion comprising first and second side edges parallel to the first end face, and third and fourth side edges parallel to the second end face; the first transfer arm section is connected to the first side of the interference zone, and the plurality of second transfer arm sections are connected to the third side of the interference zone.
In some embodiments, the first transfer arm section extends to the first end face in a direction parallel to the third side edge, or the first transfer arm section extends to the first end face in a direction away from the third side edge; each second transmission arm region extends to the second end face along the direction far away from the first side edge.
In some embodiments, one side edge of the first transfer arm region is flush with the fourth side of the interference region.
In some embodiments, the first end face is parallel to the second end face, the interference region comprises a rectangular portion comprising a first side and a second side orthogonal to the first end face, and a third side and a fourth side parallel to the first end face; the first transfer arm section is connected to the fourth side of the interference section, and the plurality of second transfer arm sections are connected to the third side of the interference section.
In some embodiments, the first transmission arm region extends to the first end face in a direction parallel to the first side edge, or the first transmission arm region extends to the first end face in a direction away from the second side edge; each second transmission arm region extends to the second end face along the direction far away from the first side edge.
In some embodiments, one side edge of the first transfer arm region is flush with the first side of the interference region.
In some embodiments, the wavelength division multiplexing device further has a third end face and a fourth end face parallel to the first direction; the interference zone extends to the third end face and/or the fourth end face.
In some embodiments, the extending directions of the plurality of second transfer arm regions are parallel.
In some embodiments, the plurality of second transfer arm sections are arranged at unequal intervals.
In some embodiments, the first transmission arm region includes a first width reduction portion and a first equal width portion which are sequentially arranged in a direction close to the first end surface, the width of the first width reduction portion gradually reduces in the direction close to the first end surface, and the width of the first equal width portion is constant; each second transmission arm region comprises a second width reducing part and a second equal width part which are sequentially arranged along the direction close to the second end surface, the width of the second width reducing part is gradually reduced along the direction close to the second end surface, and the width of the second equal width part is not changed.
According to an aspect of the present disclosure, there is provided a wavelength division multiplexing system comprising a transmitting device, a receiving device, and an optical fiber connected between the transmitting device and the receiving device, wherein the transmitting device and the receiving device respectively comprise the wavelength division multiplexing device according to any of the embodiments of the foregoing aspects.
According to one or more embodiments of the present disclosure, the first transmission arm region and the second transmission arm regions may be designed based on the wavelength of the transmitted optical signals, so that the interference effect of the interference region on different optical signals may be precisely matched to the wavelength thereof, and the second transmission arm regions may be well coupled to the corresponding optical modulators at the second end surface, thereby reducing the transmission loss of the wavelength division multiplexing system.
These and other aspects of the disclosure will be apparent from and elucidated with reference to the embodiments described hereinafter.
Drawings
Further details, features and advantages of the disclosure are disclosed in the following description of exemplary embodiments, taken in conjunction with the accompanying drawings, in which:
fig. 1 is a schematic perspective view of a wavelength division multiplexing device according to some embodiments of the present disclosure;
fig. 2 is a schematic perspective view of a wavelength division multiplexing device according to some embodiments of the present disclosure;
fig. 3 is a schematic top view of a wdm device according to some embodiments of the present disclosure;
fig. 4 is a schematic perspective view of a wavelength division multiplexing device according to some embodiments of the present disclosure;
fig. 5 is a schematic top view of a wdm device according to some embodiments of the present disclosure;
fig. 6 is a schematic top view of a wdm device according to some embodiments of the present disclosure; and
fig. 7 is a schematic top view of a wdm device according to some embodiments of the present disclosure.
Reference numerals:
100-wave division multiplexing device
1 a-first end face
1 b-second end face
1 c-third end face
1 d-fourth end face
110-substrate
120-isolation layer
131-plate layer
132-Ridge layer
20-interference region
21-first transfer arm area
22-second transfer arm region
201-first side edge
202-second side edge
203-third side edge
204-fourth side
2010-trapezoidal section
211-first equal wide portion
212-first reduced width section
221-second equal width part
222-second reduced width portion
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art can appreciate, the described embodiments can be modified in various different ways, without departing from the spirit or scope of the present disclosure. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
The wavelength division multiplexing device has wide application on a chip, and due to the integration of the chip, the wavelength division multiplexing device and the optical modulator can be integrated on the same wafer together, so that the raw material cost and the packaging cost can be greatly reduced. The inventors of the present disclosure have noted that, in some related arts, there is a large loss in coupling of the wavelength division multiplexing device and the optical modulator due to their respective structural features.
Based on this, the embodiments of the present disclosure provide a wavelength division multiplexing device and a wavelength division multiplexing system, so as to reduce the transmission loss of the wavelength division multiplexing system.
As shown in fig. 1, some embodiments of the present disclosure provide a wavelength division multiplexing device 100, including a substrate 110, an isolation layer 120, and a waveguide layer sequentially arranged along a first direction, the wavelength division multiplexing device 100 having a first end surface 1a and a second end surface 1b parallel to the first direction, one of the first end surface 1a and the second end surface 1b being an input end surface and the other being an output end surface of the wavelength division multiplexing device 100; the waveguide layer comprises a slab layer 131 and a ridge-and-ridge layer 132 located on a side of the slab layer 131 remote from the substrate 110, the ridge-and-ridge layer 132 comprising an interference region 20, a first transmission-arm region 21 connecting the interference region 20 and extending to the first end face 1a, and a plurality of second transmission-arm regions 22 connecting the interference region 20 and extending to the second end face 1 b.
In some embodiments, the wdm device 100 functions as a multiplexer at a transmitting end of the wdm system, the second end face 1b functions as an input end face of the multiplexer, and the first end face 1a functions as an output end face of the multiplexer. A plurality of optical signals with different wavelengths are input from the second end face 1b, guided by the plurality of second transmission arm regions 22 to enter the interference region 20 in one-to-one correspondence, and after the interference region 20 is combined, output from the first end face 1a under the guidance of the first transmission arm region 21, and then can enter the optical fiber for transmission.
In some embodiments, the wavelength division multiplexing device 100 can also be used as a demultiplexer at the receiving end of a wavelength division multiplexing system, with the first end face 1a serving as the input end face of the demultiplexer and the second end face 1b serving as the output end face of the demultiplexer. The combined optical signal transmitted by the optical fiber is input from the first end face 1a, enters the interference region 20 under the guidance of the first transmission arm region 21, is separated into a plurality of optical signals with different wavelengths in the interference region 20, and is output from the second end face 1b under the guidance of the plurality of second transmission arm regions 22 in a one-to-one correspondence manner, thereby completing the recovery of the optical signal.
For the wavelength division multiplexing device 100 used as a multiplexer, a plurality of optical signals with different wavelengths need to pass through interference paths with different lengths to complete the multiplexing when reaching the first transmission arm region 21, and for the wavelength division multiplexing device 100 used as a demultiplexer, the multiplexed optical signal can be separated into a plurality of optical signals with different wavelengths through interference paths with different lengths. According to the technical scheme of the embodiment of the disclosure, specifications of the first transmission arm region 21 and the second transmission arm regions 22 can be designed based on the wavelengths of the transmitted optical signals, so that the interference effect of the interference region 20 on different optical signals can be accurately matched with the wavelengths of the optical signals, the second transmission arm regions 22 can be well coupled with corresponding optical modulators on the second end face 1b, and the transmission loss of the wavelength division multiplexing system is reduced.
In the disclosed embodiment, the waveguide layer adopts a ridge waveguide structure, and has a series of excellent characteristics such as low main mode cutoff frequency, wide frequency band and low impedance. The pattern of the waveguide layer may be formed by a patterning process. The patterning process may, for example, undergo processes such as film formation, photoresist coating, exposure, development, etching, photoresist stripping, and the like, to finally form a relatively precise pattern structure of the waveguide layer, and the fabrication process is relatively simple.
In some embodiments of the present disclosure, as shown in fig. 1, 2 and 3, the first end face 1a is orthogonal to the second end face 1b, and the interference region 20 includes a rectangular portion including a first side 201 and a second side 202 parallel to the first end face 1a, and a third side 203 and a fourth side 204 parallel to the second end face 1 b.
As shown in fig. 1, in some embodiments, the first transfer arm region 21 is connected to a first side edge 201 of the interference region 20 and the plurality of second transfer arm regions 22 are connected to a third side edge 203 of the interference region 20. The first transmission arm region 21 extends to the first end face 1a in a direction parallel to the third side edge 203, and each second transmission arm region 22 extends to the second end face 1b in a direction away from the first side edge 201.
As shown in fig. 2, in some embodiments, the first transfer arm region 21 is connected to a first side 201 of the interference region 20, and a side edge of the first transfer arm region 21 is flush with a fourth side 204 of the interference region 20. A plurality of second transmission arm regions 22 are connected to the third side edge 203 of the interference region 20, and each second transmission arm region 22 extends to the second end face 1b in a direction away from the first side edge 201.
As shown in fig. 3, in some embodiments, a first transmission arm region 21 is connected to the first side edge 201 of the interference region 20, the first transmission arm region 21 extending to the first end surface 1a in a direction away from the third side edge 203. A plurality of second transmission arm regions 22 are connected to the third side edge 203 of the interference region 20, and each second transmission arm region 22 extends to the second end face 1b in a direction away from the first side edge 201.
In some embodiments of the present disclosure, as shown in fig. 4 and 5, the first end face 1a is parallel to the second end face 1b, and the interference region 20 includes a rectangular portion including a first side 201 and a second side 202 orthogonal to the first end face 1a, and a third side 203 and a fourth side 204 parallel to the first end face 1 a. As shown in fig. 4, in some embodiments, the first transmission arm region 21 is connected to the fourth side 204 of the interference region 20, the first transmission arm region 21 extends to the first end surface 1a in a direction parallel to the first side 201, a plurality of second transmission arm regions 22 are connected to the third side 203 of the interference region 20, and each second transmission arm region 22 extends to the second end surface 1b in a direction away from the first side 201. In this embodiment, one side edge of the first transfer arm region 21 is flush with the first side edge 201 of the interference region 20. In some embodiments, the first transmission arm region 21 may also have a spacing from the first side edge 201.
As shown in fig. 5, in some embodiments, the first transmission arm region 21 is connected to the fourth side 204 of the interference region 20, the first transmission arm region 21 extends to the first end face 1a in a direction away from the second side 202, a plurality of second transmission arm regions 22 are connected to the third side 203 of the interference region 20, and each of the second transmission arm regions 22 extends to the second end face 1b in a direction away from the first side 201.
As shown in fig. 6 and 7, in some embodiments, the wavelength division multiplexing device 100 further has a third end face 1c and a fourth end face 1d parallel to the first direction, and the interference region 20 may extend to the third end face 1c and/or the fourth end face 1 d. As shown in fig. 6, the interference area 20 includes a rectangular portion that extends directly to the third end face 1 c. As shown in fig. 7, the interference area 20 includes a rectangular portion and a trapezoidal portion 2010, the trapezoidal portion 2010 extends to the third end surface 1c and an upper bottom of the trapezoidal portion 2010 is contiguous with the second side 202 of the rectangular portion.
Taking the wavelength division multiplexing device 100 as an example of a multiplexer, the interference region 20 is mainly used for performing interference coupling on a plurality of optical signals with different wavelengths, so that the optical signals are combined when reaching the first transmission arm region 21. However, in the interference region 20, there is always a small amount of stray light that cannot be coupled out and thus cannot be output from the first transfer arm region 21. With the design of the above embodiments of the present disclosure, the small amount of stray light can be led out from the third end surface 1c and/or the fourth end surface 1d of the wavelength division multiplexing device 100, so as to avoid the interference of the small amount of stray light with the normal interference route of other light due to multiple reflections in the interference region 20, and therefore, the design of the scheme can improve the signal-to-noise ratio of the wavelength division multiplexing device 100. The shape of the trapezoidal portion 2010 of the interference region 20 in the embodiment shown in fig. 7 is designed to further facilitate the mitigation and sufficient extraction of this small amount of stray light.
In the embodiment of the present disclosure, the extending directions of the plurality of second transfer arm regions 22 may be parallel or the extending directions of at least two of the second transfer arm regions 22 are not parallel. In addition, the plurality of second transfer arm regions 22 may be arranged at equal intervals or at unequal intervals.
Based on the wavelengths of the multiple optical signals transmitted by the wavelength division multiplexing system, referring to the above embodiment, the structure of the device is designed accordingly, so that the interference effect of the interference region 20 on different optical signals can be precisely matched with the wavelengths thereof, and the multiple second transmission arm regions 22 at the second end face 1b can be well coupled with the corresponding optical modulators, thereby reducing the transmission loss of the wavelength division multiplexing system.
Referring to any one of the embodiments shown in fig. 1 to 7, the first transfer arm region 21 includes a first reduced width portion 212 and a first equal width portion 211 which are sequentially arranged in a direction close to the first end surface 1a, the width of the first reduced width portion 212 gradually decreases in the direction close to the first end surface 1a, and the width of the first equal width portion 211 does not change; each of the second transfer arm regions 22 includes a second reduced-width portion 222 and a second equal-width portion 221 which are arranged in this order in a direction near the second end face 1b, the width of the second reduced-width portion 222 gradually decreases in a direction near the second end face 1b, and the width of the second equal-width portion 221 does not change.
The first and second equal-width portions 211 and 221 are used to perform a steady-state modulation of the light spot, thereby contributing to an improvement in the stability of the light transmission. The first width reduction portion 212 and the second width reduction portion 222 are designed to perform a relatively gentle spot modulation on the light transmitted through the waveguide layer, which is advantageous for further reducing the transmission loss.
The embodiment of the present disclosure further provides a wavelength division multiplexing system, which includes a transmitting device, a receiving device, and an optical fiber connected between the transmitting device and the receiving device, where the transmitting device and the receiving device respectively include the wavelength division multiplexing device 100 in any of the foregoing embodiments. The wavelength division multiplexing device 100 is used as a multiplexer in a transmitting apparatus and as a demultiplexer in a receiving apparatus, and can effectively reduce transmission loss.
It will be understood that in this specification, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like, indicate an orientation or positional relationship or dimension based on that shown in the drawings, which terms are used for convenience of description only and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be considered limiting to the scope of the disclosure.
Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to a number of indicated technical features. Thus, features defined as "first", "second", "third" may explicitly or implicitly include one or more of the features. In the description of the present disclosure, "a plurality" means two or more unless specifically limited otherwise.
In the present disclosure, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integral; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present disclosure can be understood by those of ordinary skill in the art as appropriate.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise the first and second features being in direct contact, or may comprise the first and second features being in contact, not directly, but via another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
This description provides many different embodiments or examples that can be used to implement the present disclosure. It should be understood that these various embodiments or examples are purely exemplary and are not intended to limit the scope of the disclosure in any way. Those skilled in the art can conceive of various changes or substitutions based on the disclosure of the specification of the present disclosure, which are intended to be included within the scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the protection scope defined by the appended claims.
Claims (12)
1. A wavelength division multiplexing device includes a substrate, an isolation layer, and a waveguide layer arranged in this order along a first direction,
the wavelength division multiplexing device is provided with a first end face and a second end face which are parallel to the first direction, wherein one of the first end face and the second end face is an input end face of the wavelength division multiplexing device, and the other end face is an output end face;
the waveguide layer includes a slab layer and a ridge-and-ridge layer located on a side of the slab layer remote from the substrate, the ridge-and-ridge layer including an interference region, a first transmission arm region connecting the interference region and extending to the first end face, and a plurality of second transmission arm regions connecting the interference region and extending to the second end face.
2. The wavelength division multiplexing device of claim 1,
the first end face is orthogonal to the second end face, the interference region comprises a rectangular part, and the rectangular part comprises a first side edge and a second side edge which are parallel to the first end face, and a third side edge and a fourth side edge which are parallel to the second end face;
the first transfer arm section is connected to the first side of the interference zone, and the plurality of second transfer arm sections are connected to the third side of the interference zone.
3. The wavelength division multiplexing device of claim 2, wherein,
the first transmission arm area extends to the first end face along a direction parallel to the third side edge, or the first transmission arm area extends to the first end face along a direction far away from the third side edge;
each second transmission arm region extends to the second end face along the direction far away from the first side edge.
4. The wavelength division multiplexing device of claim 2, wherein,
one side edge of the first transmission arm area is flush with the fourth side edge of the interference area.
5. The wavelength division multiplexing device of claim 1,
the first end face is parallel to the second end face, the interference region comprises a rectangular part, and the rectangular part comprises a first side edge and a second side edge which are orthogonal to the first end face, and a third side edge and a fourth side edge which are parallel to the first end face;
the first transfer arm section is connected to the fourth side of the interference section, and the plurality of second transfer arm sections are connected to the third side of the interference section.
6. The wavelength division multiplexing device of claim 5, wherein,
the first transmission arm area extends to the first end face along a direction parallel to the first side edge, or the first transmission arm area extends to the first end face along a direction far away from the second side edge;
each second transmission arm region extends to the second end face along the direction far away from the first side edge.
7. The wavelength division multiplexing device of claim 5, wherein,
one side edge of the first transmission arm area is flush with the first side edge of the interference area.
8. The wavelength division multiplexing device of claim 1,
the wavelength division multiplexing device further has a third end face and a fourth end face parallel to the first direction;
the interference zone extends to the third end face and/or the fourth end face.
9. The wavelength division multiplexing device of claim 1,
the extending directions of the plurality of second transfer arm regions are parallel.
10. The wavelength division multiplexing device of claim 9, wherein,
the plurality of second transfer arm sections are arranged at unequal intervals.
11. The wavelength division multiplexing device according to any one of claims 1 to 10,
the first transmission arm area comprises a first width reducing part and a first equal width part which are sequentially arranged along the direction close to the first end surface, the width of the first width reducing part is gradually reduced along the direction close to the first end surface, and the width of the first equal width part is not changed;
each second transmission arm region comprises a second width reducing part and a second equal width part which are sequentially arranged along the direction close to the second end surface, the width of the second width reducing part is gradually reduced along the direction close to the second end surface, and the width of the second equal width part is not changed.
12. A wavelength division multiplexing system comprising a transmitting device, a receiving device, and an optical fiber connected between the transmitting device and the receiving device, wherein the transmitting device and the receiving device respectively comprise the wavelength division multiplexing device according to any one of claims 1 to 11.
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| JP2000241644A (en) * | 1998-12-22 | 2000-09-08 | Nippon Telegr & Teleph Corp <Ntt> | Multi-mode interference optical coupler |
| CN103091869A (en) * | 2013-02-05 | 2013-05-08 | 中国科学院半导体研究所 | Integrated coherent-light-communication electro-optical modulator structure |
| US20170248760A1 (en) * | 2014-09-19 | 2017-08-31 | University Of Southampton | Optical (de)multiplexers |
| CN107092056A (en) * | 2017-06-12 | 2017-08-25 | 北京大学 | A kind of Wavelength division multiplexer/demultiplexer and preparation method thereof |
| CN111830628A (en) * | 2020-07-24 | 2020-10-27 | 联合微电子中心有限责任公司 | Coarse wavelength division multiplexer/demultiplexer and optical communication equipment |
| CN114488406A (en) * | 2020-11-12 | 2022-05-13 | 山东大学 | Compact wavelength multiplexer based on multi-mode interference principle |
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