CN114813880A - Integrated electrochemical gas sensor and preparation process thereof - Google Patents
Integrated electrochemical gas sensor and preparation process thereof Download PDFInfo
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- CN114813880A CN114813880A CN202210469982.3A CN202210469982A CN114813880A CN 114813880 A CN114813880 A CN 114813880A CN 202210469982 A CN202210469982 A CN 202210469982A CN 114813880 A CN114813880 A CN 114813880A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G45/00—Compounds of manganese
- C01G45/12—Manganates manganites or permanganates
- C01G45/1221—Manganates or manganites with a manganese oxidation state of Mn(III), Mn(IV) or mixtures thereof
- C01G45/125—Manganates or manganites with a manganese oxidation state of Mn(III), Mn(IV) or mixtures thereof of the type[MnO3]n-, e.g. Li2MnO3, Li2[MxMn1-xO3], (La,Sr)MnO3
- C01G45/1264—Manganates or manganites with a manganese oxidation state of Mn(III), Mn(IV) or mixtures thereof of the type[MnO3]n-, e.g. Li2MnO3, Li2[MxMn1-xO3], (La,Sr)MnO3 containing rare earth, e.g. La1-xCaxMnO3, LaMnO3
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G53/00—Compounds of nickel
Abstract
The invention discloses an integrated electrochemical gas sensor and a preparation process, wherein the integrated electrochemical gas sensor comprises: a first layer of YSZ substrate, a second layer of YSZ substrate and a third layer of YSZ substrate are arranged from top to bottom; the gas-sensitive electrode is arranged on the first layer of YSZ substrate; a Pt counter electrode mounted on a first layer of YSZ substrate; the acquisition circuit is used for acquiring signals of the gas-sensitive electrode and the Pt counter electrode and is arranged on the second layer of YSZ substrate; the isolation layer is used for eliminating the influence of a heating electric field on signal acquisition and is arranged between the second layer of YSZ substrate and the third layer of YSZ substrate; a Pt wire heating circuit disposed on a third layer of YSZ substrate. The electrochemical gas sensor prepared by the invention has the advantages of integration, large-scale mass production, long service life, low power consumption, easy carrying and the like.
Description
Technical Field
The invention relates to the technical field of electrochemical sensors, in particular to an integrated electrochemical gas sensor and a preparation process thereof.
Background
In recent years, with the continuous promotion of global industrialization process, the economy of China is remarkably developed, but the problem of environmental pollution is very severe, and great threat is brought to the life health safety of people. With the continuous improvement of living standard of people, the concern on the environmental health and safety problem is increasing, and the gas sensor for environmental detection is coming with wide development prospect. The electrochemical gas sensor can be applied to environmental monitoring under multiple scenes due to the advantages of good selectivity, high sensitivity and the like. For example, the electrochemical gas sensor can be used for monitoring the emission of gases such as nitrogen oxides and the like in automobile exhaust; the electrochemical gas sensor can be used for monitoring hydrogen sulfide gas generated by mineral resource exploitation in real time, so that explosion is avoided, and the life safety of people is guaranteed; the electrochemical gas sensor can also be used for detecting acetone generated by the gas exhaled by the diabetic patient in clinical medicine, so that the early-stage diabetic patient screening is realized. In order to further realize multi-scene application of the electrochemical gas sensor, the electrochemical gas sensor which is integrated, low in cost, portable, high in performance and used for detecting the concentration of the target gas under the environmental concentration in real time is developed, and the electrochemical gas sensor has great market application prospect.
Through the development of recent decades, a hybrid potential type electrochemical gas sensor based on Yttrium Stabilized Zirconia (YSZ) has great development potential in the detection of gases such as nitrogen oxides, hydrogen sulfide, acetone, ammonia gas, Volatile Organic Compounds (VOCs) and the like. Most electrochemical gas sensors designed in the market at present are assembled structures, for example, the application number 202010303885.8 publication number CN 111537585 a discloses a gas sensor based on YSZ and CoTiO 3 Mixed potential type NO of sensitive electrode 2 A sensor, a method for its manufacture and its use. The method mainly comprises the following steps: al of Pt heater electrode 2 O 3 Ceramic plate, YSZ substrate, Pt reference electrode and sensitive electrode, and method for fixing lower surface of YSZ substrate and Al 2 O 3 Ceramic plate adhesives, etc. The electrochemical gas sensor has the problems of complex manufacturing process, high power consumption and reduced heat conduction and adhesive force of the binder. This makes the electrochemical gas sensors of this type short-lived and does not meet the broad market demand for long-lived sensors. Therefore, the design is integrated, the preparation process is simple, and the power consumption is lowThe body sensor has very important economic benefit and social significance.
Disclosure of Invention
The invention aims to provide an integrated electrochemical gas sensor and a preparation process thereof, and the prepared electrochemical gas sensor has the advantages of integration, large-scale mass production, long service life, low power consumption, easy carrying and the like.
In order to achieve the purpose, the invention provides the following technical scheme:
in one aspect of the invention, the invention provides a gas sensitive material, and the gas sensitive material is NiFe 2 O 4 Gas sensitive pastes or LaMnO 3 Gas sensitive paste or La 0.9 Ag 0.1 MnO 3 One of gas sensitive slurries.
In another aspect of the present invention, the present invention provides a method for preparing a gas sensitive material, comprising the steps of:
(1) completely dissolving a mixture A in deionized water, wherein the mixture A is any one of a mixture of nickel nitrate hexahydrate and ferric nitrate nonahydrate, or a mixture of lanthanum nitrate and manganese nitrate, or a mixture of lanthanum nitrate and silver nitrate and manganese nitrate;
(2) completely dissolving citric acid and ethylenediamine tetraacetic acid in deionized water, adjusting the pH of the solution to be within the range of 8-9, and heating and stirring at 80-100 ℃ until gel appears;
(3) keeping the gel in an oven at the temperature of 200-;
(4) and (3) rolling the sample powder, isopropanol, glycol and glycerol to obtain the gas-sensitive slurry.
In some embodiments of the invention, in step (1), the molar ratio of nickel nitrate hexahydrate to iron nitrate nonahydrate is 1:2, the molar ratio of lanthanum nitrate to manganese nitrate is 1: 1, lanthanum nitrate and the molar ratio of silver nitrate to manganese nitrate is 0.9: 0.1: 1; in the step (2), the molar ratio of the citric acid to the ethylenediamine tetraacetic acid is 2: 1; in the step (4), the volume ratio of the isopropanol to the ethylene glycol to the glycerol is 50:10:3, and the rolling time is 2-4 h.
In one aspect of the invention, an integrated electrochemical gas sensor is presented. The integrated electrochemical gas sensor comprises a first layer of YSZ substrate, a second layer of YSZ substrate and a third layer of YSZ substrate which are arranged from top to bottom, wherein the YSZ substrate is used for conducting oxygen ions; the gas-sensitive electrode is used for collecting a voltage signal of the gas-sensitive slurry and is arranged on the first layer of YSZ substrate; the Pt counter electrode is used for collecting a voltage signal of the Pt counter electrode, and the Pt counter electrode is arranged on the first layer of YSZ substrate; the acquisition circuit is used for acquiring signals of the gas-sensitive electrode and the Pt counter electrode and is arranged on the second layer of YSZ substrate; the isolation layer is used for eliminating the influence of a heating electric field on signal acquisition and is arranged between the second layer of YSZ substrate and the third layer of YSZ substrate; and the Pt wire heating circuit is used for heating the YSZ substrate, and is arranged on the third layer of YSZ substrate.
In some embodiments of the present invention, the isolation layer is an alumina insulation layer.
In another aspect of the present invention, the present invention provides a process for preparing an integrated electrochemical gas sensor, comprising the steps of:
(1) preparing a YSZ substrate, and printing a Pt wire heating circuit on a third layer of the YSZ substrate;
(2) covering the third layer of YSZ substrate with an isolation layer;
(3) covering a second layer of YSZ substrate on the isolation layer, and printing an acquisition circuit on the second layer of YSZ substrate;
(4) covering a first layer of YSZ substrate on the acquisition circuit, printing a Pt counter electrode and a gas-sensitive electrode on the first layer of YSZ substrate, and arranging gas-sensitive slurry on a current collecting layer of the gas-sensitive electrode;
(5) and calcining the multilayer film prepared in the sequential steps by adopting a low-temperature co-fired ceramic process to obtain the integrated electrochemical gas sensor.
In some embodiments of the invention, in step (1), the YSZ substrate is prepared by tape casting, and the Pt wire heating circuit is printed on the third YSZ substrate by screen printing; in the step (4), the gas-sensitive slurry is prepared on the current collecting layer of the gas-sensitive electrode by adopting an ink-jet printing or ultrasonic spraying process, and then roasting is carried out to enable the gas-sensitive electrode to be in contact with the first layer of YSZ substrate, wherein the roasting temperature is 1000-1200 ℃.
In another aspect of the invention, the invention provides an integrated electrochemical gas sensor test chamber comprising: the integrated electrochemical gas sensor is arranged in the ceramic cavity; a filter screen for filtering a target gas; the golden finger clamping groove is used for heating the Pt wire heating circuit and collecting response signals of the electrochemical gas sensor.
In some embodiments of the present invention, the filter screen is disposed on the top of the ceramic cavity, and the golden finger slot is disposed on the side of the ceramic cavity.
In some embodiments of the present invention, two of the filter screens are provided, and the two filter screens use SiO with different sizes 2 And (4) preparing nanoparticles.
Compared with the prior art, the invention has the beneficial effects that:
1) the integrated electrochemical gas sensor prepared in the invention has the advantages of integration, large-scale mass production, long service life, low power consumption, easy integration, convenient carrying and the like, simplifies the manufacturing process of the electrochemical sensor to a great extent, and reduces the manufacturing cost.
2) The electrochemical gas sensor provided by the invention shows good detection results in the detection aspects of gases such as hydrogen, nitrogen oxides, hydrogen sulfide, acetone, ammonia gas and Volatile Organic Compounds (VOC), and has considerable application value.
Drawings
FIG. 1 is a schematic structural view of an integrated electrochemical gas sensor according to example 1 of the present invention;
FIG. 2 shows an example 2 of the present invention in which NiFe is used for an integrated electrochemical gas sensor 2 O 4 Gas sensitive slurry Pair 0.5ppmH 2 Curve of S response value with working temperatureA drawing;
FIG. 3 is a diagram showing the use of LaMnO in an integrated electrochemical gas sensor in example 3 of the present invention 3 Gas sensitive slurry Pair 0.5ppmH 2 S response value changes with working temperature;
FIG. 4 shows La used in the integrated electrochemical gas sensor of example 4 of the present invention 0.9 A g0.1 MnO 3 Gas sensitive slurry to 0.5ppm H 2 S response value changes with working temperature;
FIG. 5 shows La used in the integrated electrochemical gas sensor in example 4 of the present invention 0.9 A g0.1 MnO 3 Response recovery curves of the gas sensitive slurry;
FIG. 6 shows an integrated chemical gas sensor using La in example 4 of the present invention 0.9 A g0.1 MnO 3 Selectivity profiles of the gas sensitive slurries for different gases.
FIG. 7 shows an integrated electrochemical gas sensor test chamber according to example 5 of the present invention.
In fig. 1 and 7, 1, a gas sensing electrode, 2, a Pt counter electrode, 3, an acquisition circuit, 4, a YSZ substrate, 5, an isolation layer, 6, a heating circuit, 7, a Pt wire, 8, a filter screen, 9, a ceramic cavity, 10, and a golden finger clamping groove.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
As shown in fig. 1, the integrated electrochemical gas sensor includes a first layer YSZ substrate 4, a second layer YSZ substrate 4, and a third layer YSZ substrate 4 disposed from top to bottom, wherein the YSZ substrate 4 is used for conducting oxygen ions; the gas-sensitive electrode 1 is used for collecting a voltage signal of gas-sensitive slurry, and the gas-sensitive electrode 1 is arranged on the first layer of YSZ substrate 4; the Pt counter electrode 2 is used for collecting voltage signals of the Pt counter electrode 2, and the Pt counter electrode 2 is arranged on the first layer of YSZ substrate 4; the gas sensor comprises an acquisition circuit 3, wherein the acquisition circuit 3 is used for acquiring signals of a gas-sensitive electrode 1 and a Pt counter electrode 2, two groups of acquisition circuits 3 are arranged, one end of each acquisition circuit 3 is respectively connected with the Pt counter electrode 2 and the gas-sensitive electrode 1, the other end of each acquisition circuit 3 is connected with a first layer of YSZ substrate 4, and the acquisition circuits are arranged on a second layer of YSZ substrate 4; the isolation layer 5 is used for eliminating the influence of a heating electric field on signal acquisition, the isolation layer 5 is an aluminum oxide insulation layer, and the isolation layer 5 is arranged between the second layer of YSZ substrate 4 and the third layer of YSZ substrate 4; and the Pt wire heating circuit is used for heating the YSZ substrate and consists of a Pt wire 7 and a heating circuit 6, and the Pt wire heating circuit is arranged on the third layer of YSZ substrate 4.
The preparation process of the integrated electrochemical gas sensor comprises the following steps:
(1) preparing a YSZ substrate by adopting a tape casting method, and printing a Pt wire heating circuit on the third layer of YSZ substrate by a screen printing method;
(2) covering an isolation layer on the third layer of YSZ substrate to prevent the interference of a heating electric field to the acquisition circuit;
(3) covering a second layer of YSZ substrate on the isolation layer, and then screen-printing an acquisition circuit on the second layer of YSZ substrate;
(4) covering a first layer of YSZ substrate on an acquisition circuit, screen-printing a Pt counter electrode and a gas-sensitive electrode on the first layer of YSZ substrate, preparing a gas-sensitive slurry on a current collecting layer of the gas-sensitive electrode by adopting an ink-jet printing or ultrasonic spraying process, and then roasting at 1200 ℃ to enable the gas-sensitive electrode to be in contact with the first layer of YSZ substrate, wherein the gas-sensitive slurry is NiFe 2 O 4 A gas sensitive slurry;
(5) and calcining the multilayer film prepared in the sequential steps by adopting a low-temperature co-fired ceramic process to obtain the integrated electrochemical gas sensor.
Example 2
NiFe 2 O 4 The preparation method of the gas-sensitive slurry comprises the following steps:
(1) nickel nitrate hexahydrate (Ni (NO) 3 ) 2 ·6H 2 O) andferric nitrate nonahydrate (Fe (NO) 3 ) 3 ·9H 2 O) according to 1:2 molar ratio, completely dissolved in 100ml deionized water.
(2) And mixing citric acid and ethylene diamine tetraacetic acid according to the ratio of 2:1 mol ratio, completely dissolved in 200ml deionized water, added with ammonia water to adjust the pH value of the solution to be in the range of 8-9, and heated and magnetically stirred at 80 ℃ until gel appears.
(3) Keeping the gel in a baking oven at 240 ℃ for 5h, calcining the gel in a muffle furnace at 600 ℃ for 5h, and finally grinding the calcined material in agate to finally obtain NiFe 2 O 4 And (3) powder.
(4) Weighing 1.0g of the prepared target powder, adding 10.0ml of isopropanol, 2.0ml of ethylene glycol and 0.6ml of glycerol, placing in a roller mill bottle, and rolling for 2h to obtain NiFe 2 O 4 A gas sensitive slurry.
As shown in FIG. 2, NiFe was prepared 2 O 4 After the gas-sensitive slurry is sintered on the gas-sensitive electrode of the integrated electrochemical gas sensor in example 1, the response voltage of the test is changed along with the working temperature, and it can be seen from the figure that when the working temperature is 400 ℃, the response voltage is 500ppb of H 2 The response voltage of the S gas reached a maximum of-38 mV.
Example 3
This embodiment is different from embodiment 2 in that: replacing nickel nitrate hexahydrate and ferric nitrate nonahydrate with lanthanum nitrate and manganese nitrate, wherein the molar ratio of lanthanum nitrate to manganese nitrate is 1: LaMnO preparation according to example 2 3 A gas sensitive slurry.
As shown in FIG. 3, LaMnO to be prepared 3 After the gas-sensitive slurry is sintered on the gas-sensitive electrode of the integrated electrochemical gas sensor in example 1, the response voltage of the test is changed along with the working temperature, and it can be seen from the figure that when the working temperature is 420 ℃, the response voltage is 500ppb of H 2 The response voltage of S gas reached a maximum of-28 mV.
Example 4
This embodiment is different from embodiment 2 in that: the nickel nitrate hexahydrate and the ferric nitrate nonahydrate are replaced by lanthanum nitrate, silver nitrate and manganese nitrateMolar ratio to manganese nitrate 0.9: 0.1: la was prepared according to the procedure of example 2 0.9 Ag 0.1 MnO 3 A gas sensitive slurry.
La to be prepared as shown in FIG. 4 0.9 Ag 0.1 MnO 3 After the gas-sensitive slurry is sintered on the gas-sensitive electrode of the integrated electrochemical gas sensor in example 1, the response voltage of the test is changed along with the working temperature, and it can be seen from the figure that when the working temperature is 380 ℃, the response voltage is 500ppb of H 2 The response voltage of the S gas reached a maximum of-43 mV.
FIG. 5 shows La to be prepared 0.9 Ag 0.1 MnO 3 After the gas-sensitive slurry is sintered on the gas-sensitive electrode of the integrated electrochemical gas sensor, the response recovery time change curve of the test on hydrogen sulfide gas with 0.5ppm can be clearly obtained from fig. 6, the response time is only 30s, and the recovery time is 72 s.
FIG. 6 shows La to be prepared 0.9 Ag 0.1 MnO 3 After the gas-sensitive slurry is sintered on the gas-sensitive electrode of the integrated electrochemical gas sensor, the sensitivity of the gas-sensitive slurry to different gases is compared at the working temperature of 380 ℃, and as can be seen from fig. 7, the gas-sensitive slurry shows obvious advantages for 0.5ppm of hydrogen sulfide in seven gases of hydrogen sulfide, methane, ammonia, carbon monoxide, nitrogen dioxide and acetone, the gas concentration is very low, the response voltage is-43 mV, and the selectivity for different gases is good.
Example 5
As shown in fig. 7, an integrated electrochemical gas sensor testing chamber, comprising: the ceramic cavity 9 is internally provided with the integrated electrochemical gas sensor; the filter screen 8, the filter screen 8 is used for filtering the target gas; the golden finger clamping groove 10 is used for heating the Pt wire heating circuit and collecting response signals of the electrochemical gas sensor. The filter screen 8 is arranged at the top of the ceramic cavity 9, and the golden finger clamping groove 10 is arranged at the side part of the ceramic cavity 8. Two filter screens 8 are longitudinally arranged, and the two filter screens 8 adopt SiO with different sizes 2 And (4) preparing nanoparticles.
The foregoing is merely exemplary and illustrative of the present invention and various modifications, additions and substitutions may be made by those skilled in the art to the specific embodiments described without departing from the scope of the present invention as defined in the accompanying claims.
Claims (10)
1. A gas-sensitive material characterized by: the gas-sensitive material is NiFe 2 O 4 Gas sensitive slurries or LaMnO 3 Gas sensitive paste or La 0.9 Ag 0.1 MnO 3 One of gas sensitive slurries.
2. A method for preparing a gas-sensitive material according to claim 1, comprising the steps of:
(1) completely dissolving a mixture A in deionized water, wherein the mixture A is any one of a mixture of nickel nitrate hexahydrate and ferric nitrate nonahydrate, or a mixture of lanthanum nitrate and manganese nitrate, or a mixture of lanthanum nitrate and silver nitrate and manganese nitrate;
(2) completely dissolving citric acid and ethylenediamine tetraacetic acid in deionized water, adjusting the pH of the solution to be within the range of 8-9, and heating and stirring at 80-100 ℃ until gel appears;
(3) keeping the gel in an oven at the temperature of 200-;
(4) and (3) rolling the sample powder, isopropanol, ethylene glycol and glycerol to obtain the gas-sensitive slurry.
3. The method for preparing a gas-sensitive material according to claim 2, wherein:
in the step (1), the molar ratio of nickel nitrate hexahydrate to ferric nitrate nonahydrate is 1:2, and the molar ratio of lanthanum nitrate to manganese nitrate is 1: 1, lanthanum nitrate and the molar ratio of silver nitrate to manganese nitrate is 0.9: 0.1: 1;
in the step (2), the molar ratio of the citric acid to the ethylenediamine tetraacetic acid is 2: 1;
in the step (4), the volume ratio of the isopropanol to the ethylene glycol to the glycerol is 50:10:3, and the rolling time is 2-4 h.
4. An integrated electrochemical gas sensor, comprising:
the first layer of YSZ substrate, the second layer of YSZ substrate and the third layer of YSZ substrate are arranged from top to bottom, and the YSZ substrate is used for conducting oxygen ions;
the gas-sensitive slurry as claimed in any one of claims 1 to 3 is arranged on a current collecting layer of the gas-sensitive electrode, the gas-sensitive electrode is used for collecting a voltage signal of the gas-sensitive slurry, and the gas-sensitive electrode is arranged on a first layer of YSZ substrate;
the Pt counter electrode is used for collecting a voltage signal of the Pt counter electrode, and the Pt counter electrode is arranged on the first layer of YSZ substrate;
the acquisition circuit is used for acquiring signals of the gas-sensitive electrode and the Pt counter electrode and is arranged on the second layer of YSZ substrate;
the isolation layer is used for eliminating the influence of a heating electric field on signal acquisition and is arranged between the second layer of YSZ substrate and the third layer of YSZ substrate;
and the Pt wire heating circuit is used for heating the YSZ substrate, and is arranged on the third layer of YSZ substrate.
5. The integrated electrochemical gas sensor according to claim 4, wherein: the isolation layer is an aluminum oxide insulation layer.
6. The preparation process of the integrated electrochemical gas sensor is characterized by comprising the following steps of:
(1) preparing a YSZ substrate, and printing a Pt wire heating circuit on a third layer of the YSZ substrate;
(2) covering the third layer of YSZ substrate with an isolation layer;
(3) covering a second layer of YSZ substrate on the isolation layer, and printing an acquisition circuit on the second layer of YSZ substrate;
(4) covering a first layer of YSZ substrate on the acquisition circuit, printing a Pt counter electrode and a gas-sensitive electrode on the first layer of YSZ substrate, and arranging the gas-sensitive slurry as claimed in any one of claims 1 to 3 on a current collecting layer of the gas-sensitive electrode;
(5) and calcining the multilayer film prepared in the sequential steps by adopting a low-temperature co-fired ceramic process to obtain the integrated electrochemical gas sensor.
7. The process for preparing an integrated electrochemical gas sensor according to claim 6, wherein:
in the step (1), the YSZ substrate is prepared by adopting a tape casting method, and the Pt wire heating circuit is printed on the third layer YSZ substrate by a screen printing method;
in the step (4), the gas-sensitive slurry is prepared on the current collecting layer of the gas-sensitive electrode by adopting an ink-jet printing or ultrasonic spraying process, and then roasting is carried out to enable the gas-sensitive electrode to be in contact with the first layer of YSZ substrate, wherein the roasting temperature is 1000-1200 ℃.
8. An integrated electrochemical gas sensor test chamber, comprising:
a ceramic chamber within which the integrated electrochemical gas sensor of claim 6 or 7 is disposed;
a filter screen for filtering a target gas;
the golden finger clamping groove is used for heating the Pt wire heating circuit and collecting response signals of the electrochemical gas sensor.
9. The integrated electrochemical gas sensor test chamber of claim 8, wherein: the filter screen is arranged at the top of the ceramic cavity, and the golden finger clamping groove is arranged at the side part of the ceramic cavity.
10. The integrated electrochemical gas sensor test chamber of claim 8, wherein: the filter screen is provided with two, two the filter screen adopts the not unidimensional SiO 2 And (4) preparing nanoparticles.
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| CN115784320A (en) * | 2022-11-15 | 2023-03-14 | 安徽大学 | Gas-sensitive material and preparation method and application thereof |
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