CN114789334A - Correcting unit of part for semiconductor processing machinery - Google Patents
Correcting unit of part for semiconductor processing machinery Download PDFInfo
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- CN114789334A CN114789334A CN202210716697.7A CN202210716697A CN114789334A CN 114789334 A CN114789334 A CN 114789334A CN 202210716697 A CN202210716697 A CN 202210716697A CN 114789334 A CN114789334 A CN 114789334A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
- B23P19/10—Aligning parts to be fitted together
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Abstract
The invention provides a correcting device of a part for a semiconductor processing machine, which relates to the technical field of part correcting devices and comprises the following components: the device comprises a base, a fixing part, a clamping part, a correcting part and a driving part; two backup pads are symmetrically welded to the bottom end face of the base, and the two backup pads are in contact with the ground. Three auxiliary rods are welded on the flange B in an annular array shape, and the three auxiliary rods are all in cylindrical rod-shaped structures; the auxiliary rod is connected with the flange A in an inserting mode, and the head end of the auxiliary rod is polished; the head end of handling the back auxiliary rod through polishing is half spherical structure, and the auxiliary rod has constituteed guide structure and the bearing structure when flange B places when flange B and flange A connect, thereby on the one hand, convenience when can improving flange B and connecting has been avoided, on the other hand, can avoid flange B and ground contact to be infected with the dust through the support of auxiliary rod when placing, solved at first, it is convenient inadequately when current device installation, and be infected with the problem of dust easily on the flange when the maintenance is dismantled.
Description
Technical Field
The invention relates to the technical field of part correcting devices, in particular to a correcting device for parts for semiconductor processing machinery.
Background
Semiconductor processing machines are composed of a plurality of parts, and during the processing of the semiconductor processing machine parts, correction is carried out by using a correction device, otherwise, the assembly effect is influenced.
However, as for the current conventional part correcting device, firstly, the existing device is not convenient enough to install, and dust is easily attached to the flange during maintenance and disassembly; secondly, current device can not realize the protection of colliding with of correcting the head, leads to the damage of correcting the head easily after sharp-pointed hard thing and correcting the head collision.
Disclosure of Invention
In view of the above, the present invention provides a correcting device for parts used in semiconductor processing machinery, which has an auxiliary rod, and through the arrangement of the auxiliary rod, on one hand, the mounting efficiency of a flange A and a flange B can be improved, and on the other hand, the flange B can be prevented from being contaminated by dust when being placed;
still have the protection seat, through the setting of protection seat, can realize the protection of colliding with of correcting the head, and can realize accomodating of protection seat automatically when proofreading.
The invention provides a correcting device of a part for a semiconductor processing machine, which comprises the following components: the device comprises a base, a fixing part, a clamping part, a correcting part and a driving part; two supporting plates are symmetrically welded on the bottom end face of the base, and both the two supporting plates are in contact with the ground; the fixing parts consist of four adjusting seats, four fixing piles and four handles; the clamping part consists of a clamping seat, sliding rods A, a clamping block, an elastic piece A, a stress block and a blocking seat, the clamping seat is fixedly connected to the base through bolts, and the two sliding rods A are symmetrically welded on the clamping seat; the two sliding rods A are connected with clamping blocks in a sliding mode, and three blank pieces are clamped between the clamping blocks and the clamping seats; the correcting parts are three in number and consist of a seat body, a sliding rod B, a flange A, a flange B, a connecting rod A, an auxiliary rod, a correcting head, a sliding rod C, a protective seat and an elastic part B, and the seat body is fixedly connected to the base through bolts; the seat body is connected with a sliding rod B in a sliding mode, and a flange A is welded at the tail end of the sliding rod B; the flange A is fixedly connected with a flange B through a bolt, a connecting rod A is welded on the flange B, and a correcting head is fixedly connected to the connecting rod A; three auxiliary rods are welded on the flange B in an annular array shape, and the three auxiliary rods are all in a cylindrical rod-shaped structure; the auxiliary rod is connected with the flange A in an inserting mode, and the head end of the auxiliary rod is polished; the head end of the auxiliary rod after polishing is of a hemispherical structure, and the auxiliary rod forms a guide structure when the flange B is connected with the flange A and a support structure when the flange B is placed; the driving part consists of an electric telescopic rod, a connecting seat, a connecting rod B and an auxiliary plate, and the electric telescopic rod is fixedly connected to the base through a bolt.
Optionally, two limiting plates are symmetrically welded on the top end face of the base, and both the two limiting plates are of a rectangular plate-shaped structure;
the two limiting plates are in contact with the seat body, and the top end faces of the two limiting plates are polished; the top end face of the limiting plate is of an arc-shaped structure after polishing, and the two limiting plates jointly form an auxiliary fixing structure of the seat body and a guide structure during installation of the seat body.
Optionally, the four adjusting seats are all in threaded connection with the base, a fixing pile is inserted into each adjusting seat, and the fixing piles are connected with soil in an inserted manner; all the symmetrical welding has two handles on every adjustment seat, and the horizontal support adjustment structure of base and the dismantlement structure of spud pile have been constituteed jointly to handle and adjustment seat.
Optionally, the clamping seat is fixedly connected with a blocking seat through a bolt, the blocking seat is of a Z-shaped structure, and the blocking seat is in contact with the tail end of the blank.
Optionally, the two sliding rods a are of a stepped shaft-shaped structure, and each sliding rod a is sleeved with an elastic part a, and the two elastic parts a jointly form an elastic reset structure of the clamping block.
Optionally, the flange B is slidably connected with two sliding rods C, and the head ends of the two sliding rods C are connected with the protection seat; the protective seat is of a cylindrical tubular structure and is sleeved on the correcting head;
an elastic piece B is sleeved on each of the two sliding rods C, and the elastic pieces B form an elastic stretching structure of the sliding rods C and the protection seat.
Optionally, the protective seat and the correction head are aligned with the blank, and the protective seat contacts with the blank when the sliding rod B moves forwards for 5cm, and the correction head is inserted with the blank when the sliding rod B continues to move forwards for 2 cm.
Optionally, a stress block is welded on the clamping block, and the stress block is subjected to bevel treatment;
the electric telescopic rod head is fixedly connected with a connecting seat, and three connecting rods B are welded on the connecting seat; the head ends of the three connecting rods B are all connected with the auxiliary plate in a welding mode, the auxiliary plate is in contact with the inclined surface of the stress block when the sliding rod B moves forwards for 2cm, and the blank is clamped when the sliding rod B continues to move forwards.
Optionally, three of the connecting rods B are all cylindrical rod-shaped structures, and the connecting rods B are aligned with the sliding rods B, and the connecting rods B are located 20cm above the sliding rods B.
Alternatively, the connecting seat is an L-shaped plate structure, and contacts the seat body when the sliding rod B moves forward by 10cm, and the connecting seat constitutes a protection structure of the sliding rod C.
Advantageous effects
Through the arrangement of the fixing part, the four adjusting seats are all in threaded connection with the adjusting seats, and each adjusting seat is inserted with a fixing pile, and the fixing piles are connected with soil in an inserting manner; equal symmetrical welding has two handles on every adjustment seat, and the horizontal support adjustment structure of base and the dismantlement structure of spud pile have been constituteed jointly to handle and adjustment seat, thereby on the one hand when rotating the adjustment seat, can realize the horizontal support adjustment of base, on the other hand, can take the spud pile out from earth under the promotion of adjustment seat when rotating the adjustment seat, with current device relative ratio, the horizontal adjustment of base can be realized through setting up of fixed part in this application, and the structure that realizes base horizontal adjustment can also make things convenient for the dismantlement of spud pile.
Through the arrangement of the auxiliary rods, three auxiliary rods are welded on the flange B in an annular array shape and are all in a cylindrical rod-shaped structure; the auxiliary rod is connected with the flange A in an inserting mode, and the head end of the auxiliary rod is polished; the head end of auxiliary rod is the semi spherical structure after the processing of polishing, and the auxiliary rod has constituteed guide structure when flange B and flange A connect and the bearing structure when flange B places to on the one hand, convenience when can improving flange B and connecting has, on the other hand can avoid flange B and ground contact to be infected with the dust through the support of auxiliary rod when placing.
Through the arrangement of the protective seat, two sliding rods C are connected to the flange B in a sliding manner, and the head ends of the two sliding rods C are connected with the protective seat; the protective seat is of a cylindrical tubular structure and is sleeved on the correcting head; an elastic part B is sleeved on the two sliding rods C, the elastic part B forms an elastic extension structure of the sliding rods C and the protection seat, and the collision protection of the correction head can be realized through the protection seat at the moment.
Through the arrangement of the correcting part and the clamping part, firstly, the clamping block is welded with the stress block, and the stress block is subjected to oblique angle processing; the electric telescopic rod head is fixedly connected with a connecting seat, and three connecting rods B are welded on the connecting seat; the head ends of the three connecting rods B are all connected with the auxiliary plate in a welding mode, the auxiliary plate is in contact with the inclined plane of the stress block when the sliding rod B moves forwards for 2cm, and the blank piece is clamped when the sliding rod B continues to move forwards, so that the blank piece can be automatically clamped;
secondly, because of protection seat and correction head and blank position are adjusted well, and when slide bar B forward motion 5cm protection seat and blank contact to it is the grafting form to continue forward motion 2cm correction head and blank when slide bar B, thereby has just also realized the automatic of protection seat and has accomodate and the correction of blank.
Through the arrangement of the driving part, firstly, the three connecting rods B are all cylindrical rod-shaped structures, the connecting rods B are aligned with the sliding rods B, and the connecting rods B are located 20cm above the sliding rods B, so that the collision protection of the sliding rods B can be realized through the connecting rods B;
secondly, because the connecting seat is L-shaped plate structure, and when the sliding rod B moves forward 10cm, the connecting seat contacts with the seat body, and the connecting seat forms the protective structure of the sliding rod C, the damage of the sliding rod C caused by the overlong extending length of the electric telescopic rod can be prevented.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly described below.
The drawings in the following description relate to some embodiments of the invention only and are not intended to limit the invention.
In the drawings:
FIG. 1 is a schematic axial view of the present invention;
FIG. 2 is a schematic diagram of the right-hand side view of the present invention;
FIG. 3 is a schematic view of the enlarged configuration at A of FIG. 2 in accordance with the present invention;
FIG. 4 is a schematic axial view of the invention in the other direction of FIG. 1;
FIG. 5 is a schematic top view of the present invention;
FIG. 6 is an enlarged view of FIG. 5B of the present invention;
FIG. 7 is a partially sectioned isometric view of the present invention;
FIG. 8 is an enlarged view of FIG. 7 at C in accordance with the present invention;
FIG. 9 is an axial view of the correcting part of the present invention.
List of reference numerals
1. A base; 101. a support plate; 102. a limiting plate; 2. a fixed part; 201. an adjusting seat; 202. fixing the pile; 203. a handle; 3. a clamping part; 301. a clamping seat; 302. a slide bar A; 303. a clamping block; 304. an elastic member A; 305. a stress block; 306. a blocking seat; 4. a blank member; 5. a correction unit; 501. a base body; 502. a slide bar B; 503. a flange A; 504. a flange B; 505. a connecting rod A; 506. an auxiliary lever; 507. a correction head; 508. a slide bar C; 509. a protective seat; 510. an elastic member B; 6. a drive section; 601. an electric telescopic rod; 602. a connecting seat; 603. a connecting rod B; 604. an auxiliary plate.
Detailed Description
In order to make the objects, solutions and advantages of the technical solutions of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of specific embodiments of the present invention. Unless otherwise indicated, terms used herein have the ordinary meaning in the art. Like reference numerals in the drawings denote like elements.
The embodiment is as follows: please refer to fig. 1 to fig. 9:
the invention provides a correcting device of a part for a semiconductor processing machine, which comprises: a base 1, a fixing part 2, a clamping part 3, a correcting part 5 and a driving part 6;
two supporting plates 101 are symmetrically welded on the bottom end face of the base 1, and the two supporting plates 101 are both in contact with the ground;
the fixing part 2 consists of four adjusting seats 201, four fixing piles 202 and four handles 203;
the clamping part 3 consists of a clamping seat 301, a sliding rod A302, a clamping block 303, an elastic piece A304, a stress block 305 and a blocking seat 306, the clamping seat 301 is fixedly connected to the base 1 through bolts, and the clamping seat 301 is symmetrically welded with the two sliding rods A302; the two sliding rods A302 are connected with clamping blocks 303 in a sliding mode, and three blank pieces 4 are clamped between the clamping blocks 303 and the clamping seats 301;
the correction parts 5 are provided with three correction parts, each correction part 5 comprises a seat body 501, a sliding rod B502, a flange A503, a flange B504, a connecting rod A505, an auxiliary rod 506, a correction head 507, a sliding rod C508, a protection seat 509 and an elastic piece B510, and the seat bodies 501 are fixedly connected to the base 1 through bolts;
the driving part 6 is composed of an electric telescopic rod 601, a connecting seat 602, a connecting rod B603 and an auxiliary plate 604, and the electric telescopic rod 601 is fixedly connected to the base 1 through bolts.
In addition, according to the embodiment of the invention, as shown in fig. 2 and fig. 3, two limiting plates 102 are welded on the top end surface of the base 1 symmetrically, and both the two limiting plates 102 are in a rectangular plate-shaped structure;
the two limiting plates 102 are both contacted with the seat body 501, and the top end surfaces of the two limiting plates 102 are both polished; the top end face of limiting plate 102 is the arc structure after the processing of polishing, and two limiting plates 102 have constituteed the supplementary fixed knot structure of pedestal 501 and the guide structure when pedestal 501 installs jointly to convenience when can improving the limiting plate 102 installation, and can improve the steadiness behind the limiting plate 102 installation.
In addition, according to the embodiment of the present invention, as shown in fig. 1, four adjusting bases 201 are screwed on the base 1, and a fixing pile 202 is inserted into each adjusting base 201, and the fixing pile 202 is inserted into soil; all the symmetrical welding has two handles 203 on every adjustment seat 201, and handle 203 and adjustment seat 201 have constituteed the horizontal support adjustment structure of base 1 and the dismantlement structure of spud pile 202 jointly to when rotating adjustment seat 201 on the one hand, can realize the horizontal support adjustment of base 1, on the other hand can take spud pile 202 out from earth under the promotion of adjustment seat 201 when rotating adjustment seat 201.
In addition, according to the embodiment of the present invention, as shown in fig. 2, the retaining base 306 is fixedly connected to the clamping base 301 through a bolt, the retaining base 306 is of a Z-shaped structure, and the retaining base 306 contacts with the tail end of the blank 4, so that the position of the blank 4 can be quickly aligned through the retaining base 306.
In addition, according to the embodiment of the present invention, as shown in fig. 2, the two sliding rods a302 are both in a stepped shaft-shaped structure, and each sliding rod a302 is sleeved with one elastic member a304, and the two elastic members a304 jointly form an elastic return structure of the clamping block 303, so that the switching efficiency of the blank 4 is also improved.
In addition, according to the embodiment of the present invention, as shown in fig. 9, a sliding rod B502 is slidably connected to the seat body 501, and a flange a503 is welded to the tail end of the sliding rod B502; a flange B504 is fixedly connected to the flange A503 through bolts, a connecting rod A505 is welded to the flange B504, and a correcting head 507 is fixedly connected to the connecting rod A505;
three auxiliary rods 506 are welded on the flange B504 in an annular array shape, and the three auxiliary rods 506 are all cylindrical rod-shaped structures; the auxiliary rod 506 is connected with the flange A503 in an inserted manner, and the head end of the auxiliary rod 506 is polished; the head end of auxiliary rod 506 is the hemisphere structure after the processing of polishing, and auxiliary rod 506 has constituteed the guide structure when flange B504 and flange A503 are connected and the bearing structure when flange B504 is placed to on the one hand, can improve the convenience when flange B504 is connected, on the other hand, can avoid flange B504 and ground contact to be infected with the dust through the support of auxiliary rod 506 when placing.
In addition, according to the embodiment of the present invention, as shown in fig. 9, two sliding rods C508 are slidably connected to the flange B504, and the head ends of the two sliding rods C508 are connected to the protection seat 509; the protective seat 509 is a cylindrical tubular structure, and the protective seat 509 is sleeved on the correction head 507;
an elastic piece B510 is sleeved on each of the two sliding rods C508, the elastic pieces B510 form elastic extension structures of the sliding rods C508 and the protection seat 509, and at the moment, the collision protection of the correction head 507 can be achieved through the protection seat 509.
Further, according to the embodiment of the present invention, as shown in fig. 7, the protection seat 509 and the correction head 507 are aligned with the blank 4, and the protection seat 509 is in contact with the blank 4 when the slide bar B502 moves forward by 5cm, and the correction head 507 is in a plug-in shape with the blank 4 when the slide bar B502 continues to move forward by 2cm, thereby achieving the automatic storage of the protection seat 509 and the correction of the blank 4.
In addition, according to the embodiment of the present invention, as shown in fig. 2 and 7, the clamping block 303 is welded with a force-bearing block 305, and the force-bearing block 305 is processed by an oblique angle;
the head end of the electric telescopic rod 601 is fixedly connected with a connecting seat 602, and three connecting rods B603 are welded on the connecting seat 602; the head ends of the three connecting rods B603 are all connected with the auxiliary plate 604 in a welding manner, the auxiliary plate 604 is in contact with the inclined surface of the stress block 305 when the sliding rod B502 moves forwards by 2cm, and the blank piece 4 is in a clamping state when the sliding rod B502 continues to move forwards, so that the automatic clamping of the blank piece 4 can be realized.
Furthermore, according to the embodiment of the present invention, as shown in fig. 2 and 7, the three connecting rods B603 are all cylindrical rod-shaped structures, the connecting rods B603 are aligned with the sliding rods B502, and the connecting rods B603 are located 20cm above the sliding rods B502, so that the knocking protection of the sliding rods B502 can be realized by the connecting rods B603.
In addition, according to the embodiment of the present invention, as shown in fig. 2 and 7, the connection seat 602 is an L-shaped plate structure, and the connection seat 602 contacts the seat 501 when the sliding rod B502 moves forward by 10cm, and the connection seat 602 constitutes a protection structure of the sliding rod C508, so that the sliding rod C508 can be prevented from being damaged due to an excessively long extension length of the electric telescopic rod 601.
The specific use mode and function of the embodiment are as follows:
when fixing, firstly, the adjusting seat 201 is rotated to realize the horizontal adjustment of the base 1, and after the adjustment is finished, the fixing pile 202 is inserted into the adjusting seat 201 and the fixing pile 202 is nailed into soil to finish the fixation;
when the fixing pile 202 is disassembled, the adjusting seat 201 is screwed, and when the adjusting seat 201 moves upwards, the fixing pile 202 can be pulled out of the soil;
when the blank 4 is placed, the retaining seat 306 is fixedly connected to the clamping seat 301 through a bolt, the retaining seat 306 is of a Z-shaped structure, and the retaining seat 306 is in contact with the tail end of the blank 4, so that the position of the blank 4 can be quickly aligned when the blank 4 is placed through the retaining seat 306;
during correction, the electric telescopic rod 601 is driven to extend, the sliding rod B502 moves forwards, the auxiliary plate 604 is in contact with the inclined surface of the force bearing block 305 when the sliding rod B502 moves forwards by 2cm, and when the electric telescopic rod 601 continues to extend, the force bearing block 305 and the clamping block 303 move downwards under the extrusion of the auxiliary plate 604 to complete clamping of the blank 4; when the sliding rod B502 moves forwards by 5cm, the protective seat 509 is in contact with the blank 4, when the sliding rod B502 continues to move, the protective seat 509 can be automatically contracted, and when the sliding rod B502 continues to move forwards, the 2cm correcting head 507 is inserted into the blank 4, so that the automatic storage of the protective seat 509 and the correction of the blank 4 are realized;
in the use process, firstly, the three connecting rods B603 are all cylindrical rod-shaped structures, the positions of the connecting rods B603 are aligned with the positions of the sliding rods B502, and the connecting rods B603 are positioned 20cm above the sliding rods B502, so that collision protection of the sliding rods B502 can be realized through the connecting rods B603; secondly, since the connecting seat 602 is an L-shaped plate structure, and the connecting seat 602 contacts the seat body 501 when the sliding rod B502 moves forward by 10cm, and the connecting seat 602 constitutes a protection structure for the sliding rod C508, the sliding rod C508 can be prevented from being damaged due to the overlong extension length of the electric telescopic rod 601;
during maintenance, three auxiliary rods 506 are welded on the flange B504 in an annular array manner, and the three auxiliary rods 506 are all cylindrical rod-shaped structures; the auxiliary rod 506 is connected with the flange A503 in an inserted manner, and the head end of the auxiliary rod 506 is polished; the head end of auxiliary rod 506 is the hemisphere structure after the processing of polishing, and auxiliary rod 506 has constituteed the guide structure when flange B504 and flange A503 are connected and the bearing structure when flange B504 is placed to on the one hand, can improve the convenience when flange B504 is connected, on the other hand, can avoid flange B504 and ground contact to be infected with the dust through the support of auxiliary rod 506 when placing.
Finally, it should be noted that, when describing the positions of the components and the matching relationship between the components, the invention will be generally exemplified by one/a pair of components, however, it should be understood by those skilled in the art that such positions, matching relationship, etc. are also applicable to other components/other pairs of components.
The above description is intended to be illustrative of the present invention and not to limit the scope of the invention, which is defined by the claims appended hereto.
Claims (10)
1. A correcting device for a part for a semiconductor processing machine, comprising: the device comprises a base (1), a fixing part (2), a clamping part (3), a correcting part (5) and a driving part (6); two supporting plates (101) are symmetrically welded on the bottom end face of the base (1), and the two supporting plates (101) are in contact with the ground; the fixing part (2) consists of four adjusting seats (201), four fixing piles (202) and four handles (203); the clamping part (3) consists of a clamping seat (301), sliding rods A (302), a clamping block (303), an elastic piece A (304), a stress block (305) and a blocking seat (306), the clamping seat (301) is fixedly connected to the base (1) through bolts, and the clamping seat (301) is symmetrically welded with the two sliding rods A (302); the two sliding rods A (302) are connected with clamping blocks (303) in a sliding mode, and three blank pieces (4) are clamped between the clamping blocks (303) and the clamping seats (301); the number of the correcting parts (5) is three, the correcting parts (5) are composed of a base body (501), a sliding rod B (502), a flange A (503), a flange B (504), a connecting rod A (505), an auxiliary rod (506), a correcting head (507), a sliding rod C (508), a protective base (509) and an elastic piece B (510), and the base body (501) is fixedly connected to the base (1) through bolts; a sliding rod B (502) is connected to the base body (501) in a sliding mode, and a flange A (503) is welded to the tail end of the sliding rod B (502); a flange B (504) is fixedly connected to the flange A (503) through bolts, a connecting rod A (505) is welded to the flange B (504), and a correcting head (507) is fixedly connected to the connecting rod A (505); three auxiliary rods (506) are welded on the flange B (504) in an annular array shape, and the three auxiliary rods (506) are all in a cylindrical rod-shaped structure; the auxiliary rod (506) is connected with the flange A (503) in an inserting mode, and the head end of the auxiliary rod (506) is polished; the head end of the auxiliary rod (506) is of a hemispherical structure after being polished, and the auxiliary rod (506) forms a guide structure when the flange B (504) is connected with the flange A (503) and a support structure when the flange B (504) is placed; the driving part (6) consists of an electric telescopic rod (601), a connecting seat (602), a connecting rod B (603) and an auxiliary plate (604), and the electric telescopic rod (601) is fixedly connected to the base (1) through a bolt.
2. The apparatus for correcting a part for a semiconductor processing machine according to claim 1, wherein: the top end face of the base (1) is symmetrically welded with two limiting plates (102), and the two limiting plates (102) are both in a rectangular plate structure;
the two limiting plates (102) are in contact with the seat body (501), and the top end faces of the two limiting plates (102) are polished; the top end face of the limiting plate (102) is of an arc-shaped structure after polishing, and the two limiting plates (102) jointly form an auxiliary fixing structure of the seat body (501) and a guide structure when the seat body (501) is installed.
3. The apparatus for correcting a part for a semiconductor processing machine as claimed in claim 1, wherein: the four adjusting seats (201) are in threaded connection with the base (1), a fixing pile (202) is inserted into each adjusting seat (201), and the fixing piles (202) are connected with soil in an inserting manner; all symmetrical welding has two handle (203) on every adjustment seat (201), and handle (203) and adjustment seat (201) have constituteed the dismantlement structure of the horizontal support adjustment structure of base (1) and spud pile (202) jointly.
4. The apparatus for correcting a part for a semiconductor processing machine as claimed in claim 1, wherein: the clamping seat (301) is fixedly connected with a blocking seat (306) through a bolt, the blocking seat (306) is of a Z-shaped structure, and the blocking seat (306) is in contact with the tail end of the blank (4).
5. The apparatus for correcting a part for a semiconductor processing machine according to claim 1, wherein: two slide bar A (302) are ladder shaft column structure, and all cup joint an elastic component A (304) on every slide bar A (302), and two elastic component A (304) have constituteed the elasticity reset structure of grip block (303) jointly.
6. The apparatus for correcting a part for a semiconductor processing machine as claimed in claim 1, wherein: the flange B (504) is connected with two sliding rods C (508) in a sliding manner, and the head ends of the two sliding rods C (508) are connected with a protective seat (509); the protective seat (509) is a cylindrical tubular structure, and the protective seat (509) is sleeved on the correction head (507);
an elastic piece B (510) is sleeved on each of the two sliding rods C (508), and the elastic pieces B (510) form elastic stretching structures of the sliding rods C (508) and the protection seat (509).
7. The apparatus for correcting a part for a semiconductor processing machine as claimed in claim 1, wherein: the protective seat (509) and the correction head (507) are aligned with the blank (4), the protective seat (509) is contacted with the blank (4) when the sliding rod B (502) moves forwards for 5cm, and the correction head (507) is inserted into the blank (4) when the sliding rod B (502) continues to move forwards for 2 cm.
8. The apparatus for correcting a part for a semiconductor processing machine according to claim 1, wherein: the clamping block (303) is welded with a stress block (305), and the stress block (305) is subjected to oblique angle processing;
the head end of the electric telescopic rod (601) is fixedly connected with a connecting seat (602), and three connecting rods B (603) are welded on the connecting seat (602); the head ends of the three connecting rods B (603) are all connected with the auxiliary plate (604) in a welding mode, the auxiliary plate (604) is in contact with the inclined surface of the stress block (305) when the sliding rod B (502) moves forwards by 2cm, and the blank piece (4) is in a clamping mode when the sliding rod B (502) continues to move forwards.
9. The apparatus for correcting a part for a semiconductor processing machine according to claim 1, wherein: the three connecting rods B (603) are all cylindrical rod-shaped structures, the connecting rods B (603) are aligned with the sliding rods B (502), and the connecting rods B (603) are located 20cm above the sliding rods B (502).
10. The apparatus for correcting a part for a semiconductor processing machine according to claim 1, wherein: the connecting seat (602) is in an L-shaped plate structure, when the sliding rod B (502) moves forwards for 10cm, the connecting seat (602) is in contact with the seat body (501), and the connecting seat (602) forms a protection structure of the sliding rod C (508).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210716697.7A CN114789334B (en) | 2022-06-23 | 2022-06-23 | Correcting unit of part for semiconductor processing machinery |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210716697.7A CN114789334B (en) | 2022-06-23 | 2022-06-23 | Correcting unit of part for semiconductor processing machinery |
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| CN114789334A true CN114789334A (en) | 2022-07-26 |
| CN114789334B CN114789334B (en) | 2022-09-09 |
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