CN114777417A - Double-tower double-reboiler ultra-high purity nitrogen generator device - Google Patents
Double-tower double-reboiler ultra-high purity nitrogen generator device Download PDFInfo
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- CN114777417A CN114777417A CN202210458055.1A CN202210458055A CN114777417A CN 114777417 A CN114777417 A CN 114777417A CN 202210458055 A CN202210458055 A CN 202210458055A CN 114777417 A CN114777417 A CN 114777417A
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 143
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 72
- 238000000034 method Methods 0.000 claims abstract description 40
- 238000004887 air purification Methods 0.000 claims abstract description 21
- 230000008014 freezing Effects 0.000 claims abstract description 17
- 238000007710 freezing Methods 0.000 claims abstract description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 238000011221 initial treatment Methods 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- 230000000844 anti-bacterial effect Effects 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- 239000007791 liquid phase Substances 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 7
- 239000003365 glass fiber Substances 0.000 claims description 7
- 238000003860 storage Methods 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000012071 phase Substances 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 239000003507 refrigerant Substances 0.000 claims description 3
- 230000005514 two-phase flow Effects 0.000 claims description 3
- 230000008016 vaporization Effects 0.000 claims description 3
- 238000005057 refrigeration Methods 0.000 claims 3
- 238000011084 recovery Methods 0.000 abstract description 5
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 239000003921 oil Substances 0.000 description 13
- 238000001914 filtration Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- DOTMOQHOJINYBL-UHFFFAOYSA-N molecular nitrogen;molecular oxygen Chemical compound N#N.O=O DOTMOQHOJINYBL-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04151—Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
- F25J3/04163—Hot end purification of the feed air
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
The invention discloses a double-tower and double-reboiler ultra-high purity nitrogen making machine device, which comprises an air compressor and two rectifying tower bodies, wherein the air compressor is used for compressing external air, the air outlet end of the air compressor is communicated with an air buffer tank through a pipeline, the air outlet end of the air buffer tank is communicated with an oil remover through a pipeline, the air outlet end of the oil remover is communicated with a freezing dryer through a pipeline, the air outlet end of the freezing dryer is communicated with an air purification assembly through a pipeline, the air outlet end of the freezing dryer is communicated with an air process tank through an air purification assembly, the air inlet ends of the two rectifying tower bodies are communicated with the air outlet end of the air process tank through a pipeline, the outer wall of each rectifying tower body is communicated with two groups of reboilers through a pipeline, the air outlet ends of the two rectifying tower bodies are communicated with a nitrogen process tank, when the device is used, the double-tower and double-reboiler ultra-high purity nitrogen making machine is adopted, and the whole device has low energy consumption, high recovery rate and very convenient use.
Description
Technical Field
The invention belongs to the technical field of nitrogen generator equipment, and particularly relates to an ultra-pure nitrogen generator device with double towers and double reboilers.
Background
The nitrogen generator is an apparatus for obtaining nitrogen by separating oxygen and nitrogen in air as a raw material by a physical method, and is industrially applied, and is classified into three methods, namely, a cryogenic air separation method, a molecular sieve air separation method (PSA), and a membrane air separation method according to the classification method.
The nitrogen making machine is nitrogen making equipment designed and manufactured according to pressure swing adsorption technology, the nitrogen making machine takes a high-quality inlet carbon molecular sieve as an adsorbent, air is separated by adopting a pressure swing adsorption Principle (PSA) at normal temperature to prepare high-purity nitrogen, two adsorption towers are usually connected in parallel, an inlet pneumatic valve is controlled by an inlet PLC to automatically operate, pressurization adsorption and decompression regeneration are alternately carried out, nitrogen-oxygen separation is completed, and the required high-purity nitrogen is obtained.
With the rapid development of economy, industrial gas is one of basic industrial factors of national economy, the status and the effect in the national economy are increasingly prominent, particularly with the coming of the internet era, industries such as electronics, polycrystalline silicon and the like are widely aroused, the demand of high-purity gas is more and more, nitrogen is generally manufactured by a nitrogen making machine in the prior art, but the nitrogen making machine has higher energy consumption and lower recovery rate in the using process, wastes resources to a certain extent and is inconvenient to use, and therefore a double-tower and double-reboiler ultrahigh-purity nitrogen making machine is provided for solving the problems in the prior art.
Disclosure of Invention
The invention aims to provide a double-tower and double-reboiler ultrahigh-purity nitrogen generator device, which is manufactured by adopting a double-tower and double-reboiler, has low energy consumption and high recovery rate, and solves the problems in the background technology.
In order to realize the purpose, the invention adopts the following technical scheme: the ultra-pure nitrogen making machine device comprises an air compressor and two rectifying tower bodies, wherein the air compressor is used for compressing external air, the air outlet end of the air compressor is communicated with an air buffer tank through a pipeline, the air outlet end of the air buffer tank is communicated with an oil remover through a pipeline, the air outlet end of the oil remover is communicated with a freezing dryer through a pipeline, the air outlet end of the freezing dryer is communicated with an air purification assembly through a pipeline, the air outlet end of the freezing dryer is communicated with an air process tank through an air purification assembly, the air inlet ends of the two rectifying tower bodies are communicated with the air outlet end of the air process tank through a pipeline, the outer wall of each rectifying tower body is communicated with two groups of reboilers through a pipeline, and the air outlet ends of the two rectifying tower bodies are communicated with the nitrogen process tank.
Also comprises the following steps:
step one, injecting external air into an air buffer tank for standby by using an air compressor;
injecting the air stored in the air buffer tank into an oil remover, performing primary treatment by using the air of the oil remover, and injecting the air for primary treatment into a freezing type dryer for drying;
step three, introducing the dried compressed air obtained in the step two into an air purification assembly, purifying the dried compressed air by using the air purification assembly to obtain purified compressed air, and injecting the purified air into an air process tank for storage;
injecting the air stored in the air process tank in the third step into the rectifying tower body to prepare nitrogen, wherein high-purity nitrogen can be obtained by adopting nitrogen preparation equipment with double rectifying tower bodies, the content of impurities such as oxygen, argon and the like in the product nitrogen can be reduced, and ppb-level impurities can be reached;
and step five, injecting the high-purity nitrogen obtained in the step four into the nitrogen process tank for storage, so as to facilitate later use.
Preferably, the air purification assembly comprises a first filter, a second filter and a filter tank, wherein the air inlet end of the first filter is communicated with the air outlet end of the freeze dryer through a pipeline, and the air outlet end of the filter tank is communicated with the air inlet end of the air process tank through a pipeline.
Preferably, the air outlet end of the first filter is communicated with the air inlet end of the second filter through a pipeline, and the air outlet end of the second filter is communicated with the air inlet end of the filter tank through a pipeline.
Preferably, the inside of filtering the jar is provided with active carbon filter layer, glass fiber filter layer and HEPA antibacterial filter layer, the active carbon filter layer sets up in the inside upper end of filtering the jar, the HEPA antibacterial filter layer sets up in the inside lower extreme of filtering the jar, the glass fiber filter layer sets up between active carbon filter layer and HEPA antibacterial filter layer.
Preferably, the air compressor is set to be a double-screw air compressor, the double-screw air compressor overcomes the defects that a single-screw air compressor is unbalanced and a bearing is easy to damage, and the double-screw air compressor has the advantages of long service life, low noise and more energy conservation.
Preferably, the freeze dryer exchanges heat between the primarily processed compressed air and a refrigerant, the temperature of the compressed air is reduced to a dew point temperature within a range of 2-10 ℃, the air inlet temperature of the freeze dryer is set to be 0-80 ℃, and the working pressure of the freeze dryer is set to be 0.3-1.2 MPa.
Preferably, the reboiler is used for vaporizing liquid, the material liquid level in the reboiler and the liquid level of the rectifying tower body are at the same height, a liquid phase is provided by the bottom line of the rectifying tower body and enters the reboiler, 25-30% of the liquid phase in the reboiler is vaporized, the vaporized two-phase flow is sent back to the rectifying tower body, the gas-phase component returning to the rectifying tower body upwards passes through a tray of the rectifying tower body, and the liquid-phase component falls back to the bottom of the rectifying tower body.
Preferably, the gas outlet end of the nitrogen process tank is communicated with a flow meter, the flow meter is a gas flow meter and is used for monitoring the amount of nitrogen flowing out of the nitrogen process tank, and the flow meter is arranged in a target type, a vortex street type, a V-cone type, a hole plate type or a power bar type.
The invention has the technical effects and advantages that: compared with the prior art, the ultra-pure nitrogen making device with double towers and double reboilers provided by the invention has the following advantages:
the invention utilizes an air compressor to inject external air into an air buffer tank for standby, injects the air stored in the air buffer tank into an oil remover, utilizes the air of the oil remover to carry out primary treatment, then injects the air used for the primary treatment into a freezing type dryer to be dried, introduces the dried compressed air into the interior of an air purification component, utilizes the air purification component to purify the dried compressed air to obtain the purified compressed air, injects the purified air into an air process tank to be stored, injects the air stored in the air process tank into the interior of a rectifying tower body to carry out nitrogen production, wherein, a nitrogen production device adopting double rectifying tower bodies can obtain high-purity nitrogen, reduces the content of impurities such as oxygen, argon and the like in product nitrogen and can reach ppb level, two reboilers are communicated on the side walls of the two rectifying tower bodies, and two reboilers are utilized, the invention can reduce the internal temperature of the rectifying tower body, thereby reducing the power consumption, obtaining high-purity nitrogen and having high recovery rate.
Drawings
FIG. 1 is a schematic view of the preparation process of the present invention;
FIG. 2 is a schematic structural diagram of a reboiler according to the present invention;
FIG. 3 is a schematic view of a cross-sectional axial structure of a canister according to the present invention;
FIG. 4 is a process flow diagram of the present invention.
In the figure: 1. an air compressor; 2. an air buffer tank; 3. an oil remover; 4. a freeze dryer; 5. a first filter; 6. a second filter; 7. a filtration tank; 701. an activated carbon filter layer; 702. a glass fiber filter layer; 703. a HEPA antibacterial filter layer; 8. an air process tank; 9. a rectifying tower body; 10. a nitrogen process tank; 11. a flow meter; 12. a reboiler.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The specific embodiments described herein are merely illustrative of the invention and do not delimit the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a double-tower and double-reboiler ultra-high purity nitrogen making machine device as shown in figures 1-4, which comprises an air compressor 1 and two rectifying tower bodies 9, wherein the air compressor 1 is used for compressing external air, the air outlet end of the air compressor 1 is communicated with an air buffer tank 2 through a pipeline, the air outlet end of the air buffer tank 2 is communicated with an oil remover 3 through a pipeline, the air outlet end of the oil remover 3 is communicated with a freeze dryer 4 through a pipeline, the air outlet end of the freeze dryer 4 is communicated with an air purification assembly through a pipeline, the air outlet end of the freeze dryer 4 is communicated with an air process tank 8 through an air purification assembly, the air inlet ends of the two rectifying tower bodies 9 are communicated with the air outlet end of the air process tank 8 through pipelines, the outer wall of each rectifying tower body 9 is communicated with two groups of reboilers 12 through pipelines, the air outlet ends of the two rectifying tower bodies 9 are communicated with a nitrogen process tank 10.
Also comprises the following steps:
step one, injecting external air into an air buffer tank for standby by using an air compressor;
injecting the air stored in the air buffer tank into an oil remover, performing primary treatment by using the air of the oil remover, and injecting the air for primary treatment into a freezing type dryer for drying;
step three, introducing the dried compressed air obtained in the step two into an air purification assembly, purifying the dried compressed air by using the air purification assembly to obtain purified compressed air, and injecting the purified air into an air process tank for storage;
injecting the air stored in the air process tank in the step three into the interior of a rectifying tower body to produce nitrogen, wherein high-purity nitrogen can be obtained by adopting nitrogen production equipment with double rectifying tower bodies, the content of impurities such as oxygen, argon and the like in product nitrogen can be reduced, and ppb level impurities can be reached;
and step five, injecting the high-purity nitrogen obtained in the step four into the nitrogen process tank for storage, so as to facilitate later use.
The air purification assembly comprises a first filter 5, a second filter 6 and a filter tank 7, wherein the air inlet end of the first filter 5 is communicated with the air outlet end of the freeze dryer 4 through a pipeline, and the air outlet end of the filter tank 7 is communicated with the air inlet end of the air process tank 8 through a pipeline.
The air outlet end of the first filter 5 is communicated with the air inlet end of the second filter 6 through a pipeline, and the air outlet end of the second filter 6 is communicated with the air inlet end of the filter tank 7 through a pipeline.
The inside of filtering tank 7 is provided with active carbon filter layer 701, glass fiber filter layer 702 and HEPA antibacterial filter layer 703, active carbon filter layer 701 sets up in the inside upper end of filtering tank 7, HEPA antibacterial filter layer 703 sets up in the inside lower extreme of filtering tank 7, glass fiber filter layer 702 sets up between active carbon filter layer 701 and HEPA antibacterial filter layer 703.
Air compressor 1 sets up to double screw air compressor, and double screw air compressor has overcome the shortcoming that single screw air compressor machine is uneven, the bearing is fragile, and double screw air compressor possesses longe-lived, and the noise is low, more energy-conserving advantage.
The freezing type dryer 4 carries out heat exchange on the compressed air after primary treatment and a refrigerant, the temperature of the compressed air is reduced to the dew point temperature within the range of 2-10 ℃, the air inlet temperature of the freezing type dryer 4 is set to be 0-80 ℃, and the working pressure of the freezing type dryer 4 is set to be 0.3-1.2 MPa.
The reboiler 12 is used for vaporizing liquid, the liquid level of the material in the reboiler 12 and the liquid level of the rectifying tower 9 are at the same height, a liquid phase is provided by the bottom line of the rectifying tower 9 and enters the reboiler 12, 25-30% of the liquid phase in the reboiler 12 is vaporized, the vaporized two-phase flow is sent back to the rectifying tower 9, the gas-phase component returning to the rectifying tower 9 upwards passes through the trays of the rectifying tower 9, and the liquid-phase component falls back to the bottom of the rectifying tower 9.
The outlet end of the nitrogen process tank 10 is communicated with a flow meter 11, the flow meter 11 is a gas flow meter, the flow meter 11 is used for monitoring the amount of nitrogen flowing out of the nitrogen process tank 10, and the flow meter 11 is one of a target type, a vortex street type, a V-cone type, a hole plate type or a power bar type.
The working principle is as follows: when the air purifier is used, external air is injected into an air buffer tank 2 for standby by an air compressor 1, the air stored in the air buffer tank 2 is injected into an oil remover 3, the air in the oil remover 3 is used for primary treatment, then the air used for the primary treatment is injected into a freezing type dryer 4 for drying, the dried compressed air is introduced into an air purification assembly, the dried compressed air is purified by the air purification assembly to obtain purified compressed air, and the purified air is injected into an air process tank 8 for storage;
then the air stored in the air process tank 8 is injected into the interior of the rectification tower body 9 to produce nitrogen, wherein the nitrogen production equipment adopting the double rectification tower bodies 9 can obtain high-purity nitrogen, the content of impurities such as oxygen, argon and the like in product nitrogen is reduced, and ppb level impurities can be reached, two reboilers 12 are communicated on the side walls of the two rectification tower bodies 9, and the temperature in the rectification tower body 9 can be reduced by utilizing the two reboilers 12, so that the power consumption is reduced, high-purity nitrogen is obtained, and the recovery rate is high.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still make modifications to the technical solutions described in the foregoing embodiments, or make equivalent substitutions and improvements to part of the technical features of the foregoing embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. Double-tower and double-reboiler ultra-pure nitrogen making machine device, comprising an air compressor (1) and two rectifying tower bodies (9), and is characterized in that: the air compressor (1) is used for compressing external air, the air outlet end of the air compressor (1) is communicated with an air buffer tank (2) through a pipeline, the air outlet end of the air buffer tank (2) is communicated with an oil remover (3) through a pipeline, the air outlet end of the oil remover (3) is communicated with a freezing type dryer (4) through a pipeline, the air outlet end of the freezing dryer (4) is communicated with an air purification component through a pipeline, the air outlet end of the freezing type dryer (4) is communicated with an air process tank (8) through an air purification assembly, the air inlet end of the rectifying tower body (9) is communicated with the air outlet end of the air process tank (8) through a pipeline, each air outlet end of the rectifying tower body (9) is communicated with two groups of reboilers (12) through pipelines, and the air outlet end of the rectifying tower body (9) is communicated with a nitrogen process tank (10).
Also comprises the following steps:
step one, injecting external air into an air buffer tank for standby by using an air compressor;
injecting the air stored in the air buffer tank into an oil remover, performing primary treatment by using the air of the oil remover, and injecting the air for primary treatment into a freezing type dryer for drying;
step three, introducing the dried compressed air obtained in the step two into an air purification assembly, purifying the dried compressed air by using the air purification assembly to obtain purified compressed air, and injecting the purified air into an air process tank for storage;
injecting the air stored in the air process tank in the third step into the rectifying tower body to prepare nitrogen, wherein high-purity nitrogen can be obtained by adopting nitrogen preparation equipment with double rectifying tower bodies, the content of impurities such as oxygen, argon and the like in the product nitrogen can be reduced, and ppb-level impurities can be reached;
and step five, injecting the high-purity nitrogen obtained in the step four into the nitrogen process tank for storage, so as to facilitate later use.
2. The double column, double reboiler ultra high purity nitrogen plant of claim 1, wherein: the air purification assembly comprises a first filter (5), a second filter (6) and a filter tank (7), wherein the air inlet end of the first filter (5) is communicated with the air outlet end of the freeze dryer (4) through a pipeline, and the air outlet end of the filter tank (7) is communicated with the air inlet end of the air process tank (8) through a pipeline.
3. The double column, double reboiler ultra high purity nitrogen plant of claim 2, wherein: the air outlet end of the first filter (5) is communicated with the air inlet end of the second filter (6) through a pipeline, and the air outlet end of the second filter (6) is communicated with the air inlet end of the filter tank (7) through a pipeline.
4. The double column, double reboiler ultra high purity nitrogen plant of claim 3, wherein: the inside of filter tank (7) is provided with active carbon filter layer (701), glass fiber filter layer (702) and HEPA antibacterial filter layer (703), active carbon filter layer (701) sets up in the inside upper end of filter tank (7), HEPA antibacterial filter layer (703) sets up in the inside lower extreme of filter tank (7), glass fiber filter layer (702) set up between active carbon filter layer (701) and HEPA antibacterial filter layer (703).
5. The double column, double reboiler ultra high purity nitrogen plant of claim 1, wherein: air compressor (1) sets up to double screw air compressor, and double screw air compressor has overcome the shortcoming that single screw air compressor machine is uneven, the bearing is fragile, and double screw air compressor possesses longe-lived, and the noise is low, more energy-conserving advantage.
6. The double column, double reboiler ultra high purity nitrogen plant of claim 1, wherein: the refrigeration dryer (4) exchanges heat between the primarily treated compressed air and a refrigerant, the temperature of the compressed air is reduced to a dew point temperature within a range of 2-10 ℃, the air inlet temperature of the refrigeration dryer (4) is set to be 0-80 ℃, and the working pressure of the refrigeration dryer (4) is set to be 0.3-1.2 MPa.
7. The double column, double reboiler ultra high purity nitrogen plant of claim 1, wherein: the reboiler (12) is used for vaporizing liquid, the material liquid level in the reboiler (12) and the liquid level of the rectifying tower body (9) are at the same height, a liquid phase is provided by the tower bottom line of the rectifying tower body (9) and enters the reboiler (12), 25-30% of the liquid phase in the reboiler (12) is vaporized, the vaporized two-phase flow is sent back to the rectifying tower body (9), the gas-phase components returning to the rectifying tower body (9) upwards pass through a tower tray of the rectifying tower body (9), and the liquid-phase components fall back to the tower bottom of the rectifying tower body (9).
8. The double column, double reboiler ultra high purity nitrogen plant of claim 1, wherein: the gas outlet end of the nitrogen process tank (10) is communicated with a flow meter (11), the flow meter (11) is set to be a gas flow meter, the flow meter (11) is used for monitoring the amount of nitrogen flowing out of the nitrogen process tank (10), and the flow meter (11) is set to be one of a target type, a vortex street type, a V cone type, a perforated plate type or a Weiliba type.
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| CN112093782A (en) * | 2020-07-31 | 2020-12-18 | 辉门环新（安庆）粉末冶金有限公司 | Nitrogen purification system and nitrogen purification method |
| CN216080638U (en) * | 2021-08-27 | 2022-03-18 | 常州市长宇实用气体有限公司 | Single-compression double-pressurization double-expansion high-purity nitrogen preparation device |
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