CN114776916A - Glass fiber quartz tube for PEVCD process - Google Patents
Glass fiber quartz tube for PEVCD process Download PDFInfo
- Publication number
- CN114776916A CN114776916A CN202210349706.3A CN202210349706A CN114776916A CN 114776916 A CN114776916 A CN 114776916A CN 202210349706 A CN202210349706 A CN 202210349706A CN 114776916 A CN114776916 A CN 114776916A
- Authority
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- China
- Prior art keywords
- connecting portion
- quartz tube
- groove
- flanging
- sleeve
- Prior art date
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- 239000010453 quartz Substances 0.000 title claims abstract description 76
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims abstract description 19
- 230000008569 process Effects 0.000 title claims abstract description 18
- 239000003365 glass fiber Substances 0.000 title claims abstract description 15
- 238000007789 sealing Methods 0.000 claims description 41
- 229910000831 Steel Inorganic materials 0.000 claims description 20
- 239000010959 steel Substances 0.000 claims description 20
- 239000002775 capsule Substances 0.000 claims description 11
- 230000006835 compression Effects 0.000 claims description 11
- 238000007906 compression Methods 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 230000000903 blocking effect Effects 0.000 claims description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- -1 polyethylene vinyl chloride Polymers 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L37/00—Couplings of the quick-acting type
- F16L37/08—Couplings of the quick-acting type in which the connection between abutting or axially overlapping ends is maintained by locking members
- F16L37/12—Couplings of the quick-acting type in which the connection between abutting or axially overlapping ends is maintained by locking members using hooks, pawls or other movable or insertable locking members
- F16L37/123—Couplings of the quick-acting type in which the connection between abutting or axially overlapping ends is maintained by locking members using hooks, pawls or other movable or insertable locking members using a retaining member in the form of a wedge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/02—Flanged joints the flanges being connected by members tensioned axially
- F16L23/032—Flanged joints the flanges being connected by members tensioned axially characterised by the shape or composition of the flanges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/02—Flanged joints the flanges being connected by members tensioned axially
- F16L23/036—Flanged joints the flanges being connected by members tensioned axially characterised by the tensioning members, e.g. specially adapted bolts or C-clamps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/16—Flanged joints characterised by the sealing means
- F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L37/00—Couplings of the quick-acting type
- F16L37/22—Couplings of the quick-acting type in which the connection is maintained by means of balls, rollers or helical springs under radial pressure between the parts
- F16L37/23—Couplings of the quick-acting type in which the connection is maintained by means of balls, rollers or helical springs under radial pressure between the parts by means of balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L37/00—Couplings of the quick-acting type
- F16L37/24—Couplings of the quick-acting type in which the connection is made by inserting one member axially into the other and rotating it to a limited extent, e.g. with bayonet action
- F16L37/244—Couplings of the quick-acting type in which the connection is made by inserting one member axially into the other and rotating it to a limited extent, e.g. with bayonet action the coupling being co-axial with the pipe
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L9/00—Rigid pipes
- F16L9/10—Rigid pipes of glass or ceramics, e.g. clay, clay tile, porcelain
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The invention discloses a glass fiber quartz tube for a PEVCD (plasma enhanced chemical vapor deposition) process, which comprises a first quartz tube, a second quartz tube and a connecting assembly, wherein the first quartz tube is connected with the second quartz tube through the connecting assembly; one end of the first quartz tube is provided with a first flanging, one end of the second quartz tube is provided with a second flanging, and the end face of the first flanging is tightly attached to the end face of the second flanging; the connecting assembly comprises a first housing and a second housing, the first housing comprises a first limiting portion and a first connecting portion, the first limiting portion is slidably sleeved on the first quartz tube, the first connecting portion is slidably sleeved on the first flanging, the second housing comprises a second limiting portion and a second connecting portion, the second limiting portion is slidably sleeved on the second quartz tube, the second flanging is slidably sleeved on the second connecting portion, and the first connecting portion and the second connecting portion are connected in a clamping mode. According to the glass fiber quartz tube for the PEVCD process, the two quartz tubes can be connected and combined by arranging the connecting component, so that the length requirement on the quartz tubes in use is met.
Description
Technical Field
The invention relates to a glass fiber quartz tube for a PEVCD (polyethylene vinyl chloride) process.
Background
PECVD (plasma Enhanced Chemical Vapor deposition) plasma Enhanced Chemical Vapor deposition is to use low-temperature plasma as an energy source, place a silicon wafer on a cathode of glow discharge under low pressure, heat the silicon wafer to a preset temperature by the glow discharge (or additionally adding a heating element), then introduce a proper amount of reaction gas, and form a solid film on the silicon wafer by the reaction of the gas with plasma through a vacuum Chemical reaction.
With the development of the PECVD equipment technology, the requirements for cost reduction and large capacity are higher and higher, and the requirements for the length and the size of a quartz tube used for the PEVCD process are also higher and higher.
Disclosure of Invention
The invention aims to provide a glass fiber quartz tube for a PEVCD process, which is reasonable in structure, and two quartz tubes can be connected and combined by arranging a connecting assembly so as to meet the length requirement of the quartz tubes in use.
In order to achieve the above purpose, the technical solution of the present invention is to design a glass fiber quartz tube for PEVCD process, which includes a first quartz tube and a second quartz tube, and a connecting assembly for connecting the first quartz tube and the second quartz tube;
one end of the first quartz tube is provided with a first flanging, one end of the second quartz tube is provided with a second flanging, and the end face of the first flanging is tightly attached to the end face of the second flanging;
coupling assembling includes first housing and second housing, first housing includes first spacing portion and the first connecting portion of a body coupling, first quartz capsule is located to first spacing slidable cover, first flanging is located to first connecting portion slidable cover, the second housing includes spacing portion of the second and the second connecting portion of a body coupling, the quartz capsule of second is located to the spacing slidable cover of second, the second flanging is located to second connecting portion slidable cover, the terminal surface of first connecting portion and the terminal surface of second connecting portion are hugged closely each other, and the joint is connected between first connecting portion and the second connecting portion.
Preferably, the end face of the first connecting part is provided with two hooks which are symmetrically arranged along the axis of the first connecting part, two transverse holes which are in one-to-one correspondence with the clamping hooks are arranged on the end surface of the second connecting part, the clamping hooks are inserted into the corresponding transverse holes, and one side of the clamping hook, which is far away from the first connecting part, is provided with a first inclined plane, the second connecting part is provided with a vertical hole communicated with the transverse hole, a spring mounting groove is arranged on the hole wall of the vertical hole, a compression spring is arranged in the spring mounting groove, a stop lever is connected in the vertical hole in a sliding way, one end of the stop lever extends into the transverse hole and is matched with the clamping hook in a clamping way, the end part of the stop lever is provided with a second inclined plane matched with the first inclined plane, the stop lever is provided with a convex ring positioned in the spring mounting groove, the convex ring is positioned between the compression spring and the transverse hole, and two ends of the compression spring are respectively abutted with the convex ring and the groove wall of the spring mounting groove.
Preferably, a first sealing groove is formed in the end face of the first flanging, a second sealing groove corresponding to the first sealing groove is formed in the end face of the second flanging, a first sealing ring is arranged in the first sealing groove, and the first sealing ring extends into the second sealing groove.
Preferably, a third sealing groove is formed in the end face of the first flanging, the third sealing groove is located on the outer side of the first sealing groove, a fourth sealing groove corresponding to the third sealing groove is formed in the end face of the second flanging, a second sealing ring is arranged in the fourth sealing groove, and the second sealing ring extends into the third sealing groove.
Preferably, the connecting assembly further comprises a fixed sleeve, a pressing sleeve and a tensioning sleeve, the fixed sleeve is fixedly arranged on the second connecting portion, the pressing sleeve is slidably sleeved on the second connecting portion, the pressing sleeve is arranged between the fixed sleeve and the tensioning sleeve, a tension spring is connected between the fixed sleeve and the pressing sleeve, the tensioning sleeve is arranged on the outer side of the first connecting portion, one end of the tensioning sleeve is rotatably connected to the pressing sleeve, a linear groove and an annular groove are formed in the inner side wall of the tensioning sleeve, the linear groove is axially arranged along the tensioning sleeve, the annular groove is circumferentially arranged along the tensioning sleeve, the annular groove is arranged between the linear groove and the pressing sleeve, one end of the linear groove is communicated with the annular groove, the other end of the linear groove penetrates through the end face of the tensioning sleeve, a steel ball mounting groove corresponding to the annular groove is formed in the outer side wall of the first connecting portion, and a steel ball is arranged in the steel ball mounting groove, the steel ball part protrudes out of the outer side wall of the first connecting part, and the protruding part of the steel ball is clamped in the annular groove.
Preferably, one side that the trip is close to first connecting portion is equipped with the third inclined plane, the tip that the pin is arranged in the horizontal hole is equipped with and is used for the fourth inclined plane with third inclined plane matched with, vertical hole link up the lateral wall of second connecting portion, the one end that the horizontal hole was kept away from to the pin supports in compressing tightly the inside wall of cover, be equipped with the hole of dodging that is used for dodging the pin on compressing tightly the inside wall of cover.
The invention has the advantages and beneficial effects that: the utility model provides a glass fiber quartz capsule for PEVCD technology, its is rational in infrastructure, through setting up coupling assembling, can connect the combination with the quartz capsule that two lengths are shorter to the length requirement to the quartz capsule when satisfying the use, the quartz capsule that length is shorter is all more convenient at transportation and maintenance in-process. And, when the quartz capsule was connected the combination, need not to use bolt and nut subassembly to fasten, it is more convenient and efficient to connect the operation.
Drawings
FIG. 1 is a schematic of the present invention.
Fig. 2 is an enlarged view of a point a in fig. 1.
Fig. 3 is an enlarged view at B in fig. 1.
Fig. 4 is an enlarged view at C in fig. 1.
Detailed Description
The following description of the embodiments of the present invention will be made with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
The technical scheme of the specific implementation of the invention is as follows:
as shown in fig. 1 to 4, a glass fiber quartz tube for PEVCD process includes a first quartz tube 1 and a second quartz tube 2, and a connecting assembly for connecting the first quartz tube 1 and the second quartz tube 2;
one end of the first quartz tube 1 is provided with a first flanging 3, one end of the second quartz tube 2 is provided with a second flanging 4, and the end face of the first flanging 3 is tightly attached to the end face of the second flanging 4;
coupling assembling includes first housing 5 and second housing 6, first housing 5 includes first spacing portion 7 and first connecting portion 8 of an organic whole connection, first quartz capsule 1 is located to first spacing portion 7 slidable cover, first flanging 3 is located to first connecting portion 8 slidable cover, second housing 6 includes spacing portion 9 of a body coupling's second and second connecting portion 10, second quartz capsule 2 is located to the spacing portion 9 slidable cover of second, second flanging 4 is located to second connecting portion 10 slidable cover, the terminal surface of first connecting portion 8 is hugged closely each other with the terminal surface of second connecting portion 10, and the joint is connected between first connecting portion 8 and the second connecting portion 10. By adopting the scheme, when the first quartz tube 1 and the second quartz tube 2 are connected and combined, the first housing 5 and the second housing 6 are sleeved on the first quartz tube 1 and the second quartz tube 2 in advance respectively, then the first housing 5 and the second housing 6 are drawn close to each other until the first connecting part 8 and the second connecting part 10 are connected in a clamping manner, at the moment, the first flanging 3 and the second flanging 4 are clamped between the first limiting part 7 and the second limiting part 9, and the end surface of the first flanging 3 is tightly attached to the end surface of the second flanging 4, so that the connection and combination between the first quartz tube 1 and the second quartz tube 2 are completed.
Furthermore, two hooks 11 are arranged on the end face of the first connecting portion 8, the two hooks 11 are symmetrically arranged along the axis of the first connecting portion 8, two transverse holes 12 corresponding to the hooks 11 one to one are arranged on the end face of the second connecting portion 10, the hooks 11 are inserted into the corresponding transverse holes 12, a first inclined surface 13 is arranged on one side, away from the first connecting portion 8, of each hook 11, a vertical hole 14 communicated with the transverse hole 12 is arranged in the second connecting portion 10, a spring mounting groove 15 is arranged on the wall of each vertical hole 14, a compression spring 16 is arranged in each spring mounting groove 15, a stop rod 17 is slidably connected in each vertical hole 14, one end of each stop rod 17 extends into the transverse hole 12 and is in clamping fit with the corresponding hook 11, a second inclined surface 18 matched with the first inclined surface 13 is arranged at the end portion of each stop rod 17, a convex ring 19 located in each spring mounting groove 15 is arranged on each stop rod 17, the convex ring 19 is positioned between the compression spring 16 and the transverse hole 12, and two ends of the compression spring 16 are respectively abutted with the convex ring 19 and the groove wall of the spring installation groove 15. By adopting the scheme, when the first housing 5 and the second housing 6 are close to each other, the hook 11 on the first connecting portion 8 is inserted into the transverse hole 12 of the second connecting portion 10, in the process, the first inclined surface 13 on the hook 11 is in contact with the second inclined surface 18 of the stop lever 17, the stop lever 17 is pushed to move and exit from the transverse hole 12 through the contact matching of the first inclined surface 13 and the second inclined surface 18, the stop lever 17 compresses the compression spring 16 through the convex ring 19 when moving, after the hook 11 passes over the stop lever 17, the stop lever 17 moves under the elastic restoring force of the compression spring 16 and extends into the transverse hole 12, at the moment, the stop lever 17 is in clamping matching with the hook 11, and the hook 11 cannot retreat due to the blocking of the stop lever 17, so that the clamping connection between the first connecting portion 8 and the second connecting portion 10 is realized.
Further, a first sealing groove 20 is formed in the end face of the first flanging 3, a second sealing groove 21 corresponding to the first sealing groove 20 is formed in the end face of the second flanging 4, a first sealing ring 22 is arranged in the first sealing groove 20, and the first sealing ring 22 extends into the second sealing groove 21. By adopting the scheme, the sealing performance between the first quartz tube 1 and the second quartz tube 2 is favorably improved.
Furthermore, a third seal groove 23 is formed in the end face of the first flanging 3, the third seal groove 23 is located outside the first seal groove 20, a fourth seal groove 24 corresponding to the third seal groove 23 is formed in the end face of the second flanging 4, a second seal ring 25 is arranged in the fourth seal groove 24, and the second seal ring 25 extends into the third seal groove 23. By adopting the scheme, the sealing performance between the first quartz tube 1 and the second quartz tube 2 is further improved.
Further, the connecting assembly further comprises a fixing sleeve 26, a pressing sleeve 27 and a tensioning sleeve 28, the fixing sleeve 26 is fixedly sleeved on the second connecting portion 10, the pressing sleeve 27 is slidably sleeved on the second connecting portion 10, the pressing sleeve 27 is located between the fixing sleeve 26 and the tensioning sleeve 27, an extension spring 29 is connected between the fixing sleeve 26 and the pressing sleeve 27, the tensioning sleeve 28 is located outside the first connecting portion 8, one end of the tensioning sleeve 28 is rotatably connected to the pressing sleeve 27, a linear groove 30 and an annular groove 31 are arranged on the inner side wall of the tensioning sleeve 28, the linear groove 30 is arranged along the axial direction of the tensioning sleeve 28, the annular groove 31 is arranged along the circumferential direction of the tensioning sleeve 28, the annular groove 31 is located between the linear groove 30 and the pressing sleeve 27, one end of the linear groove 30 is communicated with the annular groove 31, and the other end of the linear groove 30 penetrates through the end face of the tensioning sleeve 28, the outer side wall of the first connecting part 8 is provided with a steel ball mounting groove 32 corresponding to the annular groove 31, a steel ball 33 is arranged in the steel ball mounting groove 32, the steel ball 33 partially protrudes out of the outer side wall of the first connecting part 8, and the protruding part of the steel ball 33 is clamped in the annular groove 31. By adopting the above scheme, after the first connecting part 8 and the second connecting part 9 are connected in a clamping manner, the pressing sleeve 27 is pushed in the direction towards the first connecting part 8 and the extension spring 29 is extended, the pressing sleeve 27 drives the tensioning sleeve 28 to move together, so that the protruding parts of the steel balls 33 enter the linear grooves 30, until the tensioning sleeve 28 moves until the protruding parts of the steel balls 33 enter the annular groove 31 from the linear grooves 30, the tensioning sleeve 28 is rotated by a certain angle, the protruding parts of the steel balls 33 are staggered with the linear grooves 30, the steel balls 33 are clamped in the annular groove 31, so that the tensioning sleeve 28 and the pressing sleeve 27 cannot retreat, and the first cover 5 and the second cover 6 can be tensioned together by the elastic resetting force of the extension spring 29, and the first quartz tube 1 and the second quartz tube 2 are tensioned together, so as to improve the connection stability between the first quartz tube 1 and the second quartz tube 2, the loosening phenomenon is prevented in the using process.
Further, one side that the trip 11 is close to first connecting portion 8 is equipped with third inclined plane 34, the tip that the pin 17 is arranged in transverse hole 12 is equipped with and is used for fourth inclined plane 35 with third inclined plane 34 matched with, vertical hole 14 link up the lateral wall of second connecting portion 10, the one end that transverse hole 12 was kept away from to the pin 17 supports in the inside wall that compresses tightly cover 27, it dodges hole 36 to be equipped with the hole of dodging that is used for dodging the pin 17 on the inside wall that compresses tightly cover 27. By adopting the above scheme, the first quartz tube 1 and the second quartz tube 2 can be disassembled more conveniently, specifically, when the tightening sleeve 28 is not used, the avoiding hole 36 of the pressing sleeve 27 is communicated with the vertical hole 14, the avoiding hole 36 is used for providing a space for the stop lever 17 to exit from the transverse hole 12, when the hook 11 and the stop lever 17 are in clamping fit, the third inclined surface 34 of the hook 11 is contacted with the fourth inclined surface 35 of the stop lever 17, then the tightening sleeve 28 is used, the annular groove 31 of the tightening sleeve 28 is clamped with the steel ball 33, so as to lock the tightening sleeve 28, at the moment, the avoiding hole 36 of the pressing sleeve 27 is staggered with the vertical hole 14, the stop lever 17 is pressed by the inner side wall of the pressing sleeve 27 so as not to exit from the transverse hole 12, therefore, the hook 11 also cannot retreat, the connection reliability between the first connecting part 8 and the second connecting part 10 is ensured, when the first quartz tube 1 and the second quartz tube 2 need to be disassembled, the tensioning sleeve 28 is rotated to enable the linear groove 30 of the tensioning sleeve to correspond to the steel ball 33, so that the tensioning sleeve is unlocked, then the tensioning sleeve 28 and the pressing sleeve 27 retreat and reset under the action of elastic restoring force of the tension spring 29, then the first housing 5 is pulled along the direction far away from the second housing 6, the hook 11 is driven by the first housing 5 to move, the hook 11 pushes the stop rod 17 to retreat from the transverse hole 12 through the contact and matching of the third inclined surface 34 and the fourth inclined surface 35, the stop rod 17 extends into the avoiding hole 36 in the process and stops the hook 11, the first housing 5 is separated from the second housing 6 until the hook 11 passes through the stop rod 17, and then the first flanging 3 and the second flanging 4 can be separated, so that the first quartz tube 1 and the second quartz tube 2 are detached.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the technical principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (6)
1. The glass fiber quartz tube for the PEVCD process is characterized by comprising a first quartz tube, a second quartz tube and a connecting assembly for connecting the first quartz tube and the second quartz tube;
one end of the first quartz tube is provided with a first flanging, one end of the second quartz tube is provided with a second flanging, and the end face of the first flanging is tightly attached to the end face of the second flanging;
coupling assembling includes first housing and second housing, first housing includes first spacing portion and the first connecting portion of a body coupling, first quartz capsule is located to first spacing slidable cover, first flanging is located to first connecting portion slidable cover, the second housing includes spacing portion of a body coupling's second and second connecting portion, the second quartz capsule is located to the spacing slidable cover of second, the second flanging is located to second connecting portion slidable cover, the terminal surface of first connecting portion and the terminal surface of second connecting portion are hugged closely each other, and the joint is connected between first connecting portion and the second connecting portion.
2. The glass fiber quartz tube for PEVCD process of claim 1, wherein the first connecting portion has two hooks on its end surface, the two hooks are symmetrically disposed along the axis of the first connecting portion, the second connecting portion has two transverse holes corresponding to the hooks one by one, the hooks are inserted into the corresponding transverse holes, and one side of the hooks away from the first connecting portion has a first inclined surface, the second connecting portion has a vertical hole connected to the transverse holes, the wall of the vertical hole has a spring mounting groove, the spring mounting groove has a compression spring therein, the vertical hole has a stop rod slidably connected therein, one end of the stop rod extends into the transverse hole and is engaged with the hooks, and the end of the stop rod has a second inclined surface for engaging with the first inclined surface, the stop rod has a convex ring therein, the convex ring is positioned between the compression spring and the transverse hole, and two ends of the compression spring are respectively abutted with the convex ring and the groove wall of the spring mounting groove.
3. The glass fiber quartz tube for the PEVCD process of claim 2, wherein a first sealing groove is formed on an end surface of the first flanging, a second sealing groove corresponding to the first sealing groove is formed on an end surface of the second flanging, a first sealing ring is arranged in the first sealing groove, and the first sealing ring extends into the second sealing groove.
4. The glass fiber quartz tube for the PEVCD process of claim 3, wherein the end face of the first flanging is provided with a third sealing groove, the third sealing groove is located outside the first sealing groove, the end face of the second flanging is provided with a fourth sealing groove corresponding to the third sealing groove, the fourth sealing groove is provided with a second sealing ring, and the second sealing ring extends into the third sealing groove.
5. The glass fiber quartz tube for PEVCD process as claimed in claim 4, wherein the connecting assembly further includes a fixing sleeve, a pressing sleeve and a tensioning sleeve, the fixing sleeve is disposed on the second connecting portion, the pressing sleeve is slidably disposed on the second connecting portion, the pressing sleeve is disposed between the fixing sleeve and the pressing sleeve, a tension spring is connected between the fixing sleeve and the pressing sleeve, the tensioning sleeve is disposed outside the first connecting portion, one end of the tensioning sleeve is rotatably connected to the pressing sleeve, the inner sidewall of the tensioning sleeve is provided with a linear groove and an annular groove, the linear groove is disposed along the axial direction of the tensioning sleeve, the annular groove is disposed along the circumferential direction of the tensioning sleeve, the annular groove is disposed between the linear groove and the pressing sleeve, one end of the linear groove is connected to the annular groove, the other end of the linear groove penetrates the end surface of the tensioning sleeve, the outer sidewall of the first connecting portion is provided with a mounting groove corresponding to the annular groove, the steel ball mounting groove is internally provided with a steel ball, the steel ball partially protrudes out of the outer side wall of the first connecting part, and the protruding part of the steel ball is clamped in the annular groove.
6. The glass fiber quartz tube for the PEVCD process as claimed in claim 5, wherein a third inclined plane is disposed on one side of the hook close to the first connecting portion, a fourth inclined plane for matching with the third inclined plane is disposed on the end portion of the blocking rod located in the transverse hole, the vertical hole penetrates through the outer side wall of the second connecting portion, one end of the blocking rod away from the transverse hole abuts against the inner side wall of the pressing sleeve, and an avoiding hole for avoiding the blocking rod is disposed on the inner side wall of the pressing sleeve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210349706.3A CN114776916B (en) | 2022-04-04 | 2022-04-04 | Glass fiber quartz tube for PEVCD process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210349706.3A CN114776916B (en) | 2022-04-04 | 2022-04-04 | Glass fiber quartz tube for PEVCD process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114776916A true CN114776916A (en) | 2022-07-22 |
| CN114776916B CN114776916B (en) | 2024-10-22 |
Family
ID=82428016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210349706.3A Active CN114776916B (en) | 2022-04-04 | 2022-04-04 | Glass fiber quartz tube for PEVCD process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114776916B (en) |
Citations (15)
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| Publication number | Publication date |
|---|---|
| CN114776916B (en) | 2024-10-22 |
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