CN114776870A - Large-caliber vacuum high-pressure control valve - Google Patents

Large-caliber vacuum high-pressure control valve Download PDF

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Publication number
CN114776870A
CN114776870A CN202210537407.2A CN202210537407A CN114776870A CN 114776870 A CN114776870 A CN 114776870A CN 202210537407 A CN202210537407 A CN 202210537407A CN 114776870 A CN114776870 A CN 114776870A
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valve
matched
valve core
cavity
chamber
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CN202210537407.2A
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罗德礼
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Individual
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0603Multiple-way valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025Electrical or magnetic means
    • F16K37/005Electrical or magnetic means for measuring fluid parameters

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

The invention discloses a large-caliber vacuum high-pressure control valve, which comprises: a valve seat of hexahedral structure; a piston and spool assembly disposed within the valve seat; the valve comprises a valve seat, a valve seat and a valve seat, wherein matched chambers are arranged below each surface of the valve seat, and the chambers are communicated through matched pore passages in space; each chamber is configured to include: the device comprises a piston assembly mounting cavity, a valve core assembly mounting cavity, a low-pressure exhaust cavity, a high-pressure air inlet cavity, a pressure sensor assembly mounting cavity and an electromagnetic valve core assembly mounting cavity. The invention provides a large-caliber vacuum high-pressure control valve, which integrates all actuating mechanisms for realizing the function of the automatic control valve on a six-way valve seat through the structural design of the valve seat, can be integrally machined and manufactured, is easy to ensure the machining and manufacturing precision, mature in technology, small in difficulty, low in cost, easy to control the quality of a machining process and better in adaptability, and has the advantages of low cost and high machining efficiency.

Description

Large-caliber vacuum high-pressure control valve
Technical Field
The invention relates to the field of mechanical design and manufacture. More particularly, the invention relates to a large-caliber vacuum high-pressure control valve with working pressure covering vacuum and high pressure, which is mainly used for automatic control in the process of conveying high-flow high-pressure fluid.
Background
In the field of hydrogen energy application, safe delivery of large quantities of high pressure hydrogen is involved, with hydrogen pressures as high as 10 MPa. The automatic control valves for conveying high-flow high-pressure gas mainly comprise two types, namely an electric stop valve and a pilot valve.
Valves such as electric stop valves mainly use a speed reducing motor to drive a valve plugThe valve moves up and down to close or open the valve, and the valve rod is sealed in a packing sealing mode to realize the sealing of the valve body and an external air medium. The valve has the advantages that the valve can work under two working pressures of high pressure and vacuum, but the typical defects of the valve are that the valve rod is driven by the reducing motor to move up and down due to the clamping effect of the filler on the valve rod, so that the energy consumption is high; the filling material sealing mode is adopted to easily achieve the vacuum helium leakage rate of 1 multiplied by 10-6P·m3·s-1Leakage rate levels that do not meet the 1 x 10 leakage rate required for high pressure/high flow hydrogen delivery-9P·m3·s-1The small leak rate required for hydrogen safety. The electric valve of the corrugated pipe also uses the high-pressure corrugated pipe as the electric valve of the corrugated pipe for sealing the valve body, although the leakage rate of the electric valve of the corrugated pipe can be 1 multiplied by 10-9P·m3·s-1However, bellows motor operated valves cannot withstand high pressures of 10 MPa.
Valves such as pilot valves utilize their own high pressure gas as a source of valve opening/closing power. Its advantages are saving energy, easy automatic control, low energy consumption and easy leakage rate less than 1X 10-9P·m3·s-1. However, a typical disadvantage of these valves is that they cannot be opened when the operating pressure is low to a certain value. The disadvantage of valves that cannot be opened in the entire operating pressure range limits the field of application of such valves. Limiting the application of such valves in high purity/high pressure/high flow hydrogen delivery processes.
However, no matter what valve is adopted, a common problem exists in practical application, namely the matching degree of the actuating mechanism and the valve is the problem, namely the split type design of the actuating mechanism and the valve enables the machining and manufacturing precision, the machining process quality and the like of the valve not to be controlled easily, and further the use stability of equipment is influenced.
Disclosure of Invention
An object of the present invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages described hereinafter.
To achieve these objects and other advantages in accordance with the purpose of the invention, there is provided a large-caliber vacuum high-pressure control valve, including:
a valve seat of hexahedral structure;
a piston and spool assembly disposed within the valve seat;
the valve comprises a valve seat, a valve seat and a valve seat, wherein matched chambers are arranged below each surface of the valve seat, and the chambers are communicated with each other through matched pore passages in space;
each chamber is configured to include:
the piston assembly mounting cavity and the valve core assembly mounting cavity are oppositely arranged in space so as to limit the piston and the valve core assembly;
the low-pressure exhaust chamber and the high-pressure inlet chamber are arranged oppositely in space and communicated with the piston assembly mounting chamber and the valve core assembly mounting chamber;
the pressure sensor assembly installation cavity and the solenoid valve core assembly installation cavity are arranged oppositely in space.
Preferably, the duct is configured to include:
a first gas communication hole for communicating the upper position of the piston assembly mounting chamber with the solenoid valve core assembly mounting chamber is also arranged in the valve seat;
a second gas communication pore passage for communicating the pressure sensor installation chamber with the valve core installation chamber;
a third gas communication pore canal which communicates the electromagnetic valve core assembly installation cavity with the valve core installation cavity, wherein a taper hole which is coaxial with the third gas communication pore canal is arranged at one end of the electromagnetic valve core assembly installation cavity close to the third gas communication pore canal;
a fourth gas communication pore passage for communicating the electromagnetic valve core assembly mounting cavity with the low-pressure exhaust cavity and the lower part of the piston assembly mounting cavity;
the piston assembly mounting chamber is divided into an upper chamber and a lower chamber by a piston in space;
the upper cavity is communicated with the electromagnetic valve core assembly mounting cavity through a first gas communication pore channel; the lower chamber is configured to communicate with the low pressure exhaust chamber;
the electromagnetic valve core assembly mounting cavity is communicated with the low-pressure exhaust cavity through a third gas communication pore passage;
and the piston assembly mounting cylinder is communicated with the electromagnetic valve core assembly mounting cavity through a third gas communication pore.
Preferably, a linked switch valve core assembly mounting chamber communicated with the fourth gas communication channel is further arranged beside the solenoid valve core assembly mounting chamber.
Preferably, the piston assembly mounting chamber is coaxial with the cartridge mounting chamber; the electromagnetic valve core assembly mounting cavity is coaxial with the pressure sensor mounting cavity, and the low-pressure exhaust cavity is coaxial with the high-pressure air inlet cavity;
the electromagnetic valve element assembly mounting cavity and the pressure sensor mounting cavity are provided with a first coaxial line, and the low-pressure exhaust cavity and the high-pressure air inlet cavity are provided with a second coaxial line;
the first coaxial line is spatially located below the second coaxial line, and the distance between the first coaxial line and the second coaxial line is configured to be 5mm-10 mm.
Preferably, the piston and spool assembly is configured to include:
the piston is matched with the piston component mounting cavity, and a piston ring is arranged on one side matched with the side wall of the piston component mounting cavity;
the first valve core is matched with one end of the piston, and a sealing ring is arranged on the side wall matched with the end face of the low-pressure exhaust chamber;
a first resilient member disposed at a free end of the first valve element and spatially cooperating with the valve element mounting chamber;
wherein a sectional area of the piston is configured to be larger than a sectional area of the first spool.
Preferably, the device further comprises an electric switch mechanism matched with the piston assembly, and the electric switch mechanism is configured to comprise:
the center of the first mounting flange is provided with a first screw rod in transmission connection with the speed reducing motor;
one end of the screw sleeve is connected with the output end of the speed reducing motor, and the other end of the screw sleeve is connected with the first screw rod through threads;
the corrugated pipe is fixedly arranged between the first screw and the first mounting flange;
the speed reducing motor is connected with the first mounting flange through a second screw rod in a matched mode;
the screw sleeve is connected with the output end of the speed reducing motor through a matched anti-rotation screw, and a second elastic element is arranged at the position, matched with the piston assembly, of the lower end of the first screw rod;
a matched anti-rotation flat key is arranged at the contact position of the first screw and the first mounting flange;
when the speed reducing motor rotates forwards, the downward extending length of the first screw is the sum of the height of the thread on the first screw and the height of the thread on the screw sleeve, and when the motor rotates backwards, the upward contracting length of the first screw is equal to the sum of the height of the thread on the first screw and the height of the thread on the screw sleeve;
the bellows is in a contracted state at a high pressure, and a bearing pressure of the bellows is configured to be greater than or equal to 10MPa at the contracted state.
Preferably, the safety valve mounting seat assembly is matched with the valve core assembly mounting chamber and is configured to comprise:
the second mounting flange is matched with the valve seat, and a first gasket matched with the second mounting flange is arranged on the end face, contacted with the valve seat, of the second mounting flange;
the second valve core is arranged on the second mounting flange, the top block is matched with the second valve core, and a first valve ball matched with the second valve core is arranged between the second valve core and the top block;
the ejector block and the second valve core are provided with second gas communication pore passages matched with a first gas channel, and the ejector block is provided with a third elastic element at a position matched with the first gas channel;
and a first thimble matched with the first valve ball is arranged in the first gas channel of the second valve core, and a first sealing gasket matched with the first thimble is arranged on the periphery of the first thimble.
Preferably, the pressure sensor mount assembly, which is mated with the pressure sensor assembly, is configured to include:
the fixed seat is arranged in the valve core assembly mounting cavity and is connected with the first elastic element;
a third mounting flange matched with the fixed seat;
a second gas channel communicated with the valve core assembly mounting cavity is arranged on the fixed seat and the third mounting flange;
a second valve ball matched with the second gas channel is arranged between the fixed seat and the third mounting flange;
and a second thimble matched with the second valve ball is arranged in the second gas channel of the third mounting flange, and a second sealing gasket matched with the second thimble is arranged on the periphery of the second thimble.
Preferably, the electromagnetic valve core assembly further comprises a magnetic valve switch assembly which is matched with the electromagnetic valve core assembly mounting chamber and is configured to comprise:
the third valve core is arranged in the electromagnetic valve core assembly installation cavity;
the free end of the magnetic attraction ring matched with the third valve element is connected with the electromagnet mechanism;
the pressure plate is arranged between the magnetic attraction ring and the valve seat;
a fourth elastic element is arranged between the third valve core and the pressure plate;
the electromagnet mechanism is configured to comprise an electromagnet, an upper flange and a lower flange which are matched with the electromagnet, and a matched membrane is arranged between the upper flange and the lower flange;
the upper flange, the diaphragm and the lower flange are made of the same metal material, and the thickness of the diaphragm is set to be 0.1-0.2 mm.
Preferably, a ganging switch spool assembly is also included that cooperates with the ganging switch spool assembly mounting chamber and is configured to include:
a valve stem cooperating with the pressure plate;
the fourth valve element is sleeved outside the valve rod and matched with the side wall of the installation cavity of the linkage switch valve element assembly;
and a fifth elastic piece is arranged between the valve hammer matched with the fourth valve core and the fourth gas communication pore channel.
The invention at least comprises the following beneficial effects:
firstly, the valve seat is structurally designed, the hexahedral valve seat is structurally designed, so that the six-way valve seat is provided with chambers for accommodating all actuating mechanisms, and gas communication pore passages for communicating all the chambers are matched to realize the matching of all the actuating mechanisms in the work process.
Secondly, in order to solve the problem that the existing pilot valve cannot work under vacuum, the invention integrates an electric actuator sealed by a corrugated pipe on the same valve body, and the electric actuator only works when the working pressure is lower than 0.1 MPa. The welded corrugated pipe can bear high pressure of 10MPa in a contraction state, and is in the contraction state when the valve works at high pressure. Namely, when the pressure is higher than 0.1MPa, the valve is opened/closed by adopting the principle of a pilot valve; when the pressure is lower than 0.1MPa, the valve is opened/closed by adopting the bellows valve principle.
Thirdly, based on the pilot valve principle, when the electromagnetic valve is electrified, a pore passage for connecting a high-pressure end of the valve and a low-pressure end of the valve is opened, a small amount of high-pressure gas is introduced and is introduced into a closed cavity formed by a piston and a cylinder body, and the piston is pushed by the high-pressure gas to move downwards so as to automatically open the valve; when the electromagnetic valve is powered off, the hole channel connecting the high-pressure end of the valve and the low-pressure end of the valve is closed, meanwhile, high-pressure gas in a closed cavity formed by the piston and the cylinder is decompressed to the low-pressure end of the valve through a synchronous air release valve integrated in the cavity of the valve, and the valve core is pushed to move upwards by the spring force arranged in the valve, so that the valve is automatically closed.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is a schematic view of an embodiment of the invention showing the structure of a large-caliber vacuum high-pressure control valve in the direction A-A;
FIG. 2 is a schematic view of the structure of FIG. 1 in the direction B-B;
FIG. 3 is a schematic view of the structure of FIG. 1 in the direction C-C;
FIG. 4 is a schematic view of the valve seat of FIG. 1 in the direction A-A;
FIG. 5 is a schematic view of the valve seat of FIG. 1 in the direction B-B;
FIG. 6 is a schematic view of the valve seat of FIG. 1 in a C-C direction;
FIG. 7 is a view in the direction J of FIG. 4;
FIG. 8 is a k-direction view of FIG. 5;
FIG. 9 is a schematic illustration of the engagement of a valve seat with a piston and valve core assembly in accordance with an embodiment of the present invention;
fig. 10 is an enlarged schematic view of the piston and the valve core assembly in fig. 9.
FIG. 11 is a schematic diagram of the construction of an electrical switching mechanism in accordance with an embodiment of the present invention;
FIG. 12 is a schematic view of the configuration of a relief valve seat assembly in cooperation with a valve seat in an embodiment of the present invention;
FIG. 13 is an enlarged schematic view of the safety valve seat assembly of FIG. 12;
FIG. 14 is a schematic view of the engagement of the pressure sensor mount assembly with the valve seat in an embodiment of the present invention;
FIG. 15 is an enlarged schematic view of the pressure sensor mount assembly of FIG. 14;
FIG. 16 is a schematic view of the magnetic valve actuator mechanism engaged with a valve seat in accordance with an embodiment of the present invention;
FIG. 17 is an enlarged schematic view of the valve magnetic switching mechanism of FIG. 16;
FIG. 18 is an enlarged schematic view of the electromagnet mechanism of FIG. 16;
FIG. 19 is a schematic view of a cooperating switching valve cartridge assembly and valve seat in accordance with an embodiment of the invention;
fig. 20 is an enlarged structural schematic view of the linked switch valve core assembly in fig. 19.
Detailed Description
The present invention is further described in detail below with reference to the attached drawings so that those skilled in the art can implement the invention by referring to the description.
It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
It is to be understood that in the description of the present invention, the terms indicating orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are used only for convenience in describing the present invention and for simplification of the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise specifically stated or limited, the terms "mounted," "disposed," "sleeved/connected," "connected," and the like are used in a broad sense, and for example, "connected" may be a fixed connection, a detachable connection, an integral connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, and a communication between two elements, and those skilled in the art will understand the specific meaning of the above terms in the present invention in a specific case.
Fig. 1-3 show an implementation of a large bore vacuum high pressure control valve according to the present invention, comprising: the valve seat (1), the air inlet connecting flange (2) and the air outlet connecting flange (3) are arranged on the left end surface and the right end surface of the valve seat (1); the piston and valve core assembly (4) is arranged in the valve seat (1); an electric switch mechanism (5) connected with the upper end face of the valve seat (1); a safety valve mounting seat component (6) connected with the lower end face of the valve seat (1); the pressure sensor mounting seat assembly (7) is connected with the lower end face of the valve seat (1); a valve magnetic switch mechanism (8) connected with the front end face of the valve seat (1); and the air bleed valve component (9) is arranged in the front cavity of the valve seat (1), and is also called as a linkage switch valve core component.
As shown in fig. 4-8, the valve seat (1) has a hexahedral structure, a mounting cavity is correspondingly arranged below each end face, corresponding communicating pore channels are respectively arranged between the upper cavity and the lower cavity, between the left cavity and the right cavity, between the front cavity and the right cavity, and between the upper cavity and the rear cavity, and the valve is switched on or off by controlling the opening or closing of the corresponding communicating pore channels;
specifically, fig. 4 shows a schematic structural diagram of a left end face, a right end face, an upper end face and a lower end face in a section a-a of the valve seat (1), and a low-pressure exhaust connecting seat (101) and a low-pressure exhaust cavity (102) are arranged on the left end face of the valve seat; a connecting seat (103) of an electric switch mechanism (5) and a piston assembly mounting chamber (104) are arranged on the upper end surface of the valve seat; a high-pressure air inlet connecting seat (105) and a high-pressure air inlet chamber (106) are arranged on the right end face of the valve seat; a safety valve component connecting seat (107) and a valve core mounting chamber (108) are arranged on the lower end face of the valve seat. The low pressure exhaust chamber (102), piston assembly mounting chamber (104), high pressure intake chamber (106) and spool mounting chamber (108) are interconnected. Each chamber is configured to include:
fig. 5 is a schematic structural view showing upper and lower end faces, and front and rear end faces in a B-B section of a valve seat (1) on which a pressure sensor connecting seat (109) and a pressure sensor module mounting chamber (110) are provided; a valve magnetic switch mechanism connecting seat (111) and an electromagnetic valve core assembly mounting chamber (112) are arranged on the rear end face of the valve seat; a gas communication duct (113) is further provided at an upper end portion of the valve seat (1) and communicates an upper portion of the piston assembly mounting chamber (104) with the solenoid valve cartridge assembly mounting chamber (112). The pressure sensor mounting chamber (110) is communicated with the valve core mounting chamber (108) through a hole (115), and the electromagnetic valve core assembly mounting chamber (112) is communicated with the valve core mounting chamber (108) through a hole (114). A tapered bore (116) coaxial with the orifice (114) is provided at an end of the orifice (114) adjacent the cartridge mounting chamber (108).
Fig. 5 shows the detailed structure of the solenoid valve core assembly mounting chamber (112) in the C-C section of the valve seat (1), which comprises a mounting chamber (117) for mounting a linked switch valve core assembly (also called a deflation valve) (9) and a gas communication passage (118). The gas communication port (118) communicates the solenoid valve core assembly mounting chamber (112) with the low pressure exhaust chamber (102) and the lower portion of the piston assembly mounting chamber (104).
Firstly, the valve seat (1) is of a hexahedral structure, and a connecting seat and a mounting bolt hole are processed on each surface;
processing a chamber below each surface, wherein the chamber comprises a low-pressure exhaust chamber (102), a piston assembly mounting cylinder (104), a high-pressure air inlet chamber (106), a valve core mounting cylinder (108), a pressure sensor mounting chamber (110) and an electromagnetic valve core assembly mounting chamber (112); a linkage switch valve core assembly mounting chamber (117) and a gas communication channel (118) are also arranged beside the solenoid valve core assembly mounting chamber (112). The piston assembly mounting cylinder (104) is divided into two sections by a piston. Wherein, the upper chamber section is communicated with the electromagnetic valve core assembly mounting chamber (112) through a duct (113); the lower chamber section is in communication with a low pressure exhaust cavity (102).
The chambers are communicated through corresponding connecting pore passages;
the piston component mounting cylinder (104) is coaxial with the valve core mounting cylinder (108); the solenoid spool assembly mounting chamber (112) is coaxial with the pressure sensor mounting chamber (110), the low pressure exhaust chamber (102) is coaxial with a high pressure intake chamber (106);
the coaxial line b of the electromagnetic valve core assembly mounting cavity (112) and the pressure sensor mounting cavity (110) is arranged below the coaxial line a of the low-pressure exhaust cavity (102) and the high-pressure air inlet cavity (106), and the distance between the coaxial line a and the low-pressure exhaust cavity and the high-pressure air inlet cavity is 5-10 mm;
sixthly, the electromagnetic valve core assembly mounting cavity (112) is communicated with the low-pressure exhaust cavity (102) through the gas communication pore passage (114);
the piston assembly mounting cylinder (104) is communicated with the electromagnetic valve core assembly mounting chamber (112) through the gas communication hole (114);
in the scheme, all actuating mechanisms for realizing the function of the automatic control valve are integrated on a six-way valve seat through the structural design of the valve seat (the six-way valve is characterized in that chambers are interconnected in space through matched air passages), integrated machining and manufacturing can be completed, machining and manufacturing precision is easy to guarantee, the technology is mature, the difficulty is low, the cost is low, the quality of the machining process is easy to control, and the automatic control valve has better adaptability.
In another example, as shown in fig. 9-10, the piston and spool assembly (4) is configured to include:
a piston (41) which is matched with the piston component mounting cavity, wherein a piston ring (42) is arranged on one side matched with the side wall of the piston component mounting cavity;
a first valve core (43) matched with one end of the piston, wherein a sealing ring (44) is arranged on the side wall matched with the end face of the low-pressure exhaust chamber;
a first resilient member (45) disposed at the free end of the first valve element and spatially cooperating with the valve element mounting chamber;
the action principle of the piston and valve core assembly (4) is as follows: when the valve is closed, the elastic force of the first elastic element (45) upwards applies pressure to the first valve core (43), the low-pressure exhaust cavity (102) is separated from the high-pressure air inlet cavity (106) through the sealing ring (44), the gas circulation is blocked, and the valve is in a closed state; when high-pressure gas is conveyed to the upper end chamber of the piston of the chamber (104) through the gas communication duct (113), the piston slides downwards, the first valve core (43) is pushed away by downward thrust, the low-pressure exhaust cavity (102) is communicated with the high-pressure inlet cavity (106), and the valve is in an open state.
The piston and valve core assembly (4) of the invention is characterized in that the cross-sectional area of the piston (41) is larger than the cross-sectional area of the first valve core (43); when the valve is under high pressure, the clearance between the first screw rod (56) and the upper end face of the piston (41) is more than 1 mm.
As shown in fig. 11, in another example, an electric switch mechanism (5) cooperating with the piston assembly is further included, which is configured to include:
the first mounting flange (51) is matched with the valve seat, and the center of the first mounting flange is provided with a first screw rod (56) in transmission connection with a speed reducing motor (53);
one end of the threaded sleeve (54) is connected with the output end of the speed reducing motor (53), and the other end of the threaded sleeve is connected with the first screw rod (56) through threads;
the corrugated pipe (57) is fixedly arranged between the first screw rod and the first mounting flange, in practical application, a threaded sleeve rotating along with a main shaft of a speed reducing motor (also called as the output end of the speed reducing motor) drives a screw rod with a welded corrugated pipe, which can only extend up and down, and when the motor rotates forwards, the screw rod pushes a piston downwards to open a valve; when the motor rotates reversely, the screw moves upwards, a spring arranged in the valve pushes the valve core upwards, and the valve is closed;
the speed reducing motor is connected with the first mounting flange through a second screw (52) in a matched mode;
the threaded sleeve is connected with the output end of the speed reducing motor through a matched anti-rotation screw (55), and a second elastic element (58) is arranged at the position, matched with the piston assembly, of the lower end of the first screw rod;
a matched anti-rotation flat key (59) is arranged at the contact position of the first screw and the first mounting flange;
in the scheme, when the speed reducing motor (53) positively drives the threaded sleeve (54) to rotate, the first screw (56) moves downwards to push the first valve core (43) downwards, so that the low-pressure exhaust cavity (102) is communicated with the high-pressure air inlet cavity (106), and the valve is opened; when the speed reducing motor (53) reversely drives the threaded sleeve (54) to rotate, the first screw rod (56) moves upwards, the second elastic element (45) pushes the first valve core (43) upwards to disconnect the low-pressure exhaust cavity (102) and the high-pressure air inlet cavity (106), and furthermore, when the motor rotates positively, the downward extension length of the first screw rod (56) is the sum of the height of the thread on the first screw rod (56) and the height of the thread on the threaded sleeve (54), no matter how long the motor rotates positively; when the motor rotates reversely, the first screw rod (56) contracts upwards; the length of the upward contraction of the first screw rod (56) is equal to the sum of the height of the thread of the first screw rod (56) and the height of the thread on the screw sleeve (54), no matter how long the motor rotates reversely;
furthermore, the welding corrugated pipe (57) is in a complete contraction state under high pressure, and in the state, the welding corrugated pipe (57) in the contraction state can bear the pressure of up to 10MPa, so that the compression resistance requirement of the valve under the high-pressure condition is met;
in practical application, the working pressure range is from vacuum to 0.1MPa, and the opening and closing of the valve are performed by an electric switch mechanism (5). When the working pressure is higher than 0.1MPa, the opening and closing actions of the valve are executed by a magnetic switch mechanism (8). The scheme has the obvious advantages that the welding corrugated pipe is designed by utilizing the characteristic that the welding corrugated pipe can bear high pressure in a compression state, the working pressure covers vacuum-10 MPa, and the problem that the existing pilot high-pressure valve cannot open the valve in a vacuum state is solved. The control of the vertical movement height of the first screw rod (56) is realized by controlling the height of the thread on the threaded sleeve (54) and the height of the thread on the first screw rod (56), so that the valve is simpler to control on and off, and a complex limiting mechanism is not needed. Specifically, in order to solve the problem that the existing pilot valve cannot work under vacuum, the scheme integrates an electric actuating mechanism sealed by a corrugated pipe on the same valve body, and the electric actuating mechanism only enables the electric actuating mechanism to work when the working pressure is lower than 0.1 MPa. The welding corrugated pipe is in a contraction state when the valve works at high pressure by utilizing the characteristic that the welding corrugated pipe can bear high pressure of 10MPa in the contraction state. Namely, when the pressure is higher than 0.1MPa, the valve is opened/closed by adopting the principle of a pilot valve; when the pressure is lower than 0.1MPa, the valve is opened/closed by adopting the valve principle of the corrugated pipe.
As shown in fig. 12-13, in another example, a safety valve mounting seat assembly (6) cooperating with the cartridge assembly mounting chamber is further included and configured to include:
the second mounting flange (61) is matched with the valve seat, and a first gasket (62) matched with the second mounting flange is arranged on the end face, which is contacted with the valve seat, of the second mounting flange;
a second valve core (66) arranged on a second mounting flange (61) and a top block (67) matched with the second valve core, wherein a first valve ball (65) matched with the second valve core is arranged between the second valve core and the top block;
the ejector block (67) and the second valve core (66) are provided with a second gas communication hole (115) matched with a first gas channel (not shown), and the ejector block (67) is provided with a third elastic element (68) at a position matched with the first gas channel;
and a first thimble (64) matched with the first valve ball (65) is arranged in the first gas channel of the second valve core (66), and a first sealing gasket (63) matched with the first thimble (64) is arranged on the periphery of the first thimble (64). The safety valve mounting seat assembly (6) has the function of conveniently replacing a safety valve even if the valve is under high pressure, in practical application, the working process of the safety valve mounting seat assembly (6) is that when the safety valve is connected through threads on the second mounting flange (61), the safety valve presses a first thimble (64) downwards, the first thimble (64) presses an ejector block (67) through a first valve ball (65), a small gap is formed between the first valve ball (65) and a second valve core (66), gas in a high-pressure chamber (108) is communicated with a safety valve gas passage through a hole (115), and when the safety valve is dismounted, a third elastic element (68) presses the first valve ball (65) through the ejector block (67), closes the small gap between the first valve ball (65) and the second valve core (66), and closes a safety valve gas passage. By means of a threaded connection on the second mounting flange (61), a seal is formed by means of the first sealing gasket (63).
14-15, in another example, a pressure sensor mount assembly (7) for cooperating with a pressure sensor assembly is configured to include:
the fixed seat (71) is arranged in the valve core assembly mounting cavity and is connected with the first elastic element;
a third mounting flange (74) matched with the fixed seat (71);
the fixed seat (71) and the third mounting flange (74) are provided with a second gas channel communicated with the valve core assembly mounting cavity;
a second valve ball (72) matched with a second gas channel is arranged between the fixed seat (71) and the third mounting flange (74);
and a second thimble (75) matched with the second valve ball (72) is arranged in the second gas channel of the third mounting flange (74), and a second sealing gasket (73) matched with the second thimble (75) is arranged on the periphery of the second thimble (75). The pressure sensor mounting seat assembly (7) has the function that the pressure sensor can be conveniently replaced even under high pressure, and in practical application, the working process of the safety valve mounting seat assembly (7) is that when the pressure sensor is connected through threads on the third mounting flange (74), the pressure sensor downwards applies pressure to the second thimble (75), the second thimble (75) applies pressure to the fixed seat (71) through the second valve ball (72), a small gap is formed between the valve ball (72) and the third mounting flange (74), and a gas passage is communicated. When the safety valve is dismounted, the first elastic element (45) presses the second valve ball (72) through the fixed seat (71), closes a small gap between the third mounting flange (74) and the fixed seat (71), and closes the air path. A seal is formed by a second gasket (76) by a threaded connection on a third mounting flange (74).
As shown in fig. 16-19, in another example, a valve magnetic switch assembly is further included that cooperates with the electromagnetic core assembly mounting chamber and is configured to include:
a third valve core (86) arranged in the solenoid valve core assembly mounting chamber;
the free end of the magnetic attraction ring (87) matched with the third valve core (86) is connected with the electromagnet mechanism (81), when the magnetic attraction ring is installed, the magnetic attraction ring and the electromagnet mechanism are fixedly connected through a matched flange (82), and when the flange (82), the magnetic attraction ring and the pressure plate are installed, a sealing gasket (83) is further arranged;
a pressure plate (84) arranged between the magnetic attraction ring (87) and the valve seat;
and a fourth elastic element (85) is arranged between the third valve core (86) and the pressure plate (84), and in practical application, the third valve core (86) forms a sealing structure with a conical surface at one end of the pore passage (114) through the fourth elastic element (85), the bolt (88) and the conical surface, so that the cavity (108) is isolated from the cavity (112). The fourth elastic element (85) and the third valve core (86) are installed in a cavity (112) of the six-way valve seat through a pressure plate (84) and a bolt (89). When the electromagnetic valve is in work, when the electromagnet is electrified, the magnetic force lifts the magnetic force attraction ring (87), high-pressure gas in the chamber (108) enters the upper part of the chamber (104) through the duct (114) and the duct (113) to push the valve element assembly to move downwards to conduct the valve;
the electromagnet mechanism (81) is configured to comprise an electromagnet (811), an upper flange (812) connected with the electromagnet (811), a diaphragm (813) and a lower flange (814). The upper flange (812), the diaphragm (813) and the lower flange (814) are welded into a whole. The electromagnet assembly (81) is characterized in that the upper flange (812), the diaphragm (813) and the lower flange (814) are made of the same metal material, such as 316L stainless steel, and the girth weld depth of the electromagnet assembly is 2-3 mm. The thickness of the membrane is between 0.1 and 0.2 mm. In order to meet the requirements of high-pressure and large-flow gas delivery, the invention adopts the following technical scheme: firstly, based on a pilot valve principle, when the electromagnetic valve is electrified, a pore channel for connecting a high-pressure end and a low-pressure end of the valve is opened, a small amount of high-pressure gas is introduced and is introduced into a closed cavity formed by a piston and a cylinder body, and the piston is pushed by the high-pressure gas to move downwards to automatically open the valve; when the electromagnetic valve is powered off, a pore passage connecting a high-pressure end of the valve and a low-pressure end of the valve is closed, meanwhile, high-pressure gas in a closed cavity formed by a piston and a cylinder body is decompressed to the low-pressure end of the valve through a synchronous air release valve integrated in a cavity of the valve, and the valve core is pushed to move upwards by the force of a spring arranged in the valve, so that the valve is automatically closed.
As shown in fig. 20, in another example, further includes a ganging switch spool assembly (9) cooperating with the ganging switch spool assembly mounting chamber, configured to include:
a valve stem (91) cooperating with the pressure plate;
the fourth valve core (92) is sleeved outside the valve rod and matched with the side wall of the installation cavity of the linkage switch valve core assembly;
and a valve hammer (93) matched with the fourth valve core, and a fifth elastic part (94) is arranged between the valve hammer and the fourth gas communication pore passage. In practical application, when the electromagnet assembly (81) is electrified, the electromagnetic force attracts and closes the magnetic attraction ring (87), and the elastic force of the spring (94) pushes the valve hammer (93) to form a duct (118) to be separated from the valve core (92).
When the electromagnet assembly (81) is powered off, the electromagnetic force attracting magnetic force disappears, the attracting ring (87) compresses the valve rod (91) downwards, the valve rod (91) pushes the valve hammer (93) away, the pore channel (118) is cut off, and when the electromagnet assembly (81) is communicated with the electrically communicated pore channel (114) during work, the pore channel (118) is cut off, so that the high-pressure gas pushes the piston to move downwards to open the valve; when the electromagnet assembly (81) is powered off to block the hole (114), the hole (118) is conducted, so that high-pressure gas in the upper cavity of the cavity (104) is quickly decompressed and released into the low-pressure cavity (102), and therefore the valve core (43) moves upwards under the thrust of the spring (45) to close the valve.
The above scheme is merely illustrative of a preferred example, and is not limiting. When the invention is implemented, appropriate replacement and/or modification can be carried out according to the requirements of users.
The number of apparatuses and the scale of the process described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be apparent to those skilled in the art.
While embodiments of the invention have been disclosed above, it is not intended that they be limited to the applications set forth in the specification and examples. It can be applied to all kinds of fields suitable for the present invention. Additional modifications will readily occur to those skilled in the art. The invention is therefore not to be limited to the specific details and illustrative examples shown and described herein, without departing from the general concept as defined by the appended claims and their equivalents.

Claims (10)

1. A large bore vacuum high pressure control valve comprising:
a valve seat of hexahedral structure;
a piston and spool assembly disposed within the valve seat;
the valve comprises a valve seat, a valve seat and a valve seat, wherein matched chambers are arranged below each surface of the valve seat, and the chambers are communicated through matched pore passages in space;
each chamber is configured to include:
the piston assembly mounting cavity and the valve core assembly mounting cavity are oppositely arranged in space so as to limit the piston and the valve core assembly;
the low-pressure exhaust chamber and the high-pressure air inlet chamber are oppositely arranged in space and communicated with the piston assembly mounting chamber and the valve core assembly mounting chamber;
the pressure sensor assembly installation cavity and the solenoid valve core assembly installation cavity are arranged oppositely in space.
2. The large bore vacuum high pressure control valve of claim 1, wherein the orifice is configured to include:
a first gas communication hole for communicating the upper position of the piston assembly mounting chamber with the solenoid valve core assembly mounting chamber is also arranged in the valve seat;
a second gas communication pore passage for communicating the pressure sensor installation chamber with the valve core installation chamber;
a third gas communication pore channel for communicating the electromagnetic valve core assembly installation cavity with the valve core installation cavity, wherein a taper hole coaxial with the third gas communication pore channel is arranged at one end of the electromagnetic valve core assembly installation cavity close to the third gas communication pore channel;
a fourth gas communicating pore passage for communicating the electromagnetic valve core assembly mounting cavity with the low-pressure exhaust cavity and the lower part of the piston assembly mounting cavity;
the piston assembly mounting chamber is divided into an upper chamber and a lower chamber by a piston in space;
the upper cavity is communicated with the electromagnetic valve core assembly mounting cavity through a first gas communication pore channel; the lower chamber is configured to communicate with the low pressure exhaust chamber;
the electromagnetic valve core assembly mounting cavity is communicated with the low-pressure exhaust cavity through a third gas communication pore passage;
and the piston assembly mounting cylinder is communicated with the electromagnetic valve core assembly mounting cavity through a third gas communication pore.
3. The large-caliber vacuum high-pressure control valve according to claim 2, wherein a linked switch valve core assembly mounting chamber communicated with the fourth gas communication hole is further provided beside the solenoid valve core assembly mounting chamber.
4. The large bore vacuum high pressure control valve of claim 1 wherein the piston assembly mounting chamber is coaxial with the spool mounting chamber; the electromagnetic valve core assembly mounting cavity is coaxial with the pressure sensor mounting cavity, and the low-pressure exhaust cavity is coaxial with the high-pressure air inlet cavity;
the electromagnetic valve core assembly mounting cavity and the pressure sensor mounting cavity are provided with a first coaxial line, and the low-pressure exhaust cavity and the high-pressure air inlet cavity are provided with a second coaxial line;
the first coaxial line is spatially located below the second coaxial line, and the distance between the first coaxial line and the second coaxial line is between 5mm and 10 mm.
5. The large bore vacuum high pressure control valve of claim 1, wherein the piston and spool assembly is configured to include:
the piston is matched with the piston component mounting cavity, and a piston ring is arranged on one side matched with the side wall of the piston component mounting cavity;
the first valve core is matched with one end of the piston, and a sealing ring is arranged on the side wall matched with the end face of the low-pressure exhaust chamber;
the first elastic element is arranged at the free end of the first valve core and is matched with the valve core mounting cavity in space;
wherein a sectional area of the piston is configured to be larger than a sectional area of the first spool.
6. The large bore vacuum high pressure control valve of claim 1 further comprising an electrical switch mechanism associated with the piston assembly and configured to include:
the center of the first mounting flange is provided with a first screw rod in transmission connection with the speed reducing motor;
one end of the screw sleeve is connected with the output end of the speed reducing motor, and the other end of the screw sleeve is connected with the first screw rod through threads;
the corrugated pipe is fixedly arranged between the first screw and the first mounting flange;
the speed reducing motor is connected with the first mounting flange through a second screw rod in a matched mode;
the screw sleeve is connected with the output end of the speed reducing motor through a matched anti-rotation screw, and a second elastic element is arranged at the position, matched with the piston assembly, of the lower end of the first screw rod;
a matched anti-rotation flat key is arranged at the contact position of the first screw and the first mounting flange;
when the speed reducing motor rotates forwards, the downward extending length of the first screw is the sum of the height of the thread on the first screw and the height of the thread on the screw sleeve, and when the motor rotates backwards, the upward contracting length of the first screw is equal to the sum of the height of the thread on the first screw and the height of the thread on the screw sleeve;
the bellows is in a contracted state at a high pressure, and a bearing pressure of the bellows is configured to be greater than or equal to 10MPa at the contracted state.
7. The large bore vacuum high pressure control valve of claim 1, further comprising a relief valve mount assembly cooperating with the spool assembly mounting chamber and configured to include:
the second mounting flange is matched with the valve seat, and a first gasket matched with the second mounting flange is arranged on the end face, in contact with the valve seat, of the second mounting flange;
the second valve core is arranged on the second mounting flange, the top block is matched with the second valve core, and a first valve ball matched with the second valve core is arranged between the second valve core and the top block;
the ejector block and the second valve core are provided with second gas communication pore passages matched with a first gas channel, and the ejector block is provided with a third elastic element at the position matched with the first gas channel;
and a first thimble matched with the first valve ball is arranged in the first gas channel of the second valve core, and a first sealing gasket matched with the first thimble is arranged on the periphery of the first thimble.
8. The large bore vacuum high pressure control valve of claim 1, wherein the pressure sensor mount assembly cooperating with the pressure sensor assembly is configured to include:
the fixed seat is arranged in the valve core assembly mounting cavity and connected with the first elastic element;
a third mounting flange matched with the fixed seat;
a second gas channel communicated with the valve core assembly mounting cavity is arranged on the fixed seat and the third mounting flange;
a second valve ball matched with the second gas channel is arranged between the fixed seat and the third mounting flange;
and a second thimble matched with the second valve ball is arranged in the second gas channel of the third mounting flange, and a second sealing gasket matched with the second thimble is arranged on the periphery of the second thimble.
9. The large bore vacuum high pressure control valve of claim 1, further comprising a valve magnetic switch assembly cooperating with the electromagnetic spool assembly mounting chamber and configured to include:
the third valve core is arranged in the electromagnetic valve core assembly installation cavity;
the free end of the magnetic attraction ring matched with the third valve element is connected with the electromagnet mechanism;
the pressure plate is arranged between the magnetic attraction ring and the valve seat;
a fourth elastic element is arranged between the third valve core and the pressure plate;
the electromagnet mechanism is configured to comprise an electromagnet, an upper flange and a lower flange which are matched with the electromagnet, and a matched membrane is arranged between the upper flange and the lower flange;
the upper flange, the diaphragm and the lower flange are made of the same metal material, and the thickness of the diaphragm is 0.1-0.2 mm.
10. The large bore vacuum high pressure control valve of claim 9, further comprising a ganged switch spool assembly mated with the ganged switch spool assembly mounting chamber, configured to include:
a valve rod matched with the pressure plate;
the fourth valve core is sleeved outside the valve rod and matched with the side wall of the installation cavity of the linkage switch valve core assembly;
and a fifth elastic part is arranged between the valve hammer matched with the fourth valve core and the fourth gas communication pore channel.
CN202210537407.2A 2022-05-17 2022-05-17 Large-caliber vacuum high-pressure control valve Pending CN114776870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210537407.2A CN114776870A (en) 2022-05-17 2022-05-17 Large-caliber vacuum high-pressure control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210537407.2A CN114776870A (en) 2022-05-17 2022-05-17 Large-caliber vacuum high-pressure control valve

Publications (1)

Publication Number Publication Date
CN114776870A true CN114776870A (en) 2022-07-22

Family

ID=82437211

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210537407.2A Pending CN114776870A (en) 2022-05-17 2022-05-17 Large-caliber vacuum high-pressure control valve

Country Status (1)

Country Link
CN (1) CN114776870A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116972185A (en) * 2023-09-22 2023-10-31 沈阳富创精密设备股份有限公司 Low-vibration vacuum valve for semiconductor production line

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116972185A (en) * 2023-09-22 2023-10-31 沈阳富创精密设备股份有限公司 Low-vibration vacuum valve for semiconductor production line
CN116972185B (en) * 2023-09-22 2023-11-21 沈阳富创精密设备股份有限公司 Low-vibration vacuum valve for semiconductor production line

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