CN114766023A - 数据处理方法、装置及系统、电子设备 - Google Patents
数据处理方法、装置及系统、电子设备 Download PDFInfo
- Publication number
- CN114766023A CN114766023A CN202080002604.3A CN202080002604A CN114766023A CN 114766023 A CN114766023 A CN 114766023A CN 202080002604 A CN202080002604 A CN 202080002604A CN 114766023 A CN114766023 A CN 114766023A
- Authority
- CN
- China
- Prior art keywords
- samples
- sample
- sample production
- data processing
- bad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003672 processing method Methods 0.000 title claims description 86
- 238000004519 manufacturing process Methods 0.000 claims abstract description 492
- 238000012545 processing Methods 0.000 claims abstract description 119
- 238000000034 method Methods 0.000 claims abstract description 49
- 230000002411 adverse Effects 0.000 claims abstract description 40
- 238000009826 distribution Methods 0.000 claims description 50
- 238000012512 characterization method Methods 0.000 claims description 38
- 230000015654 memory Effects 0.000 claims description 30
- 238000003860 storage Methods 0.000 claims description 29
- 238000004590 computer program Methods 0.000 claims description 25
- 230000004044 response Effects 0.000 claims description 19
- 238000013016 damping Methods 0.000 claims description 6
- 238000005315 distribution function Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 description 44
- 230000008569 process Effects 0.000 description 40
- 230000002950 deficient Effects 0.000 description 28
- 238000010586 diagram Methods 0.000 description 20
- 239000000047 product Substances 0.000 description 16
- 238000004422 calculation algorithm Methods 0.000 description 13
- 238000003066 decision tree Methods 0.000 description 11
- 238000001514 detection method Methods 0.000 description 9
- 238000004458 analytical method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 230000003993 interaction Effects 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000007726 management method Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000546 chi-square test Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000007405 data analysis Methods 0.000 description 2
- 238000013075 data extraction Methods 0.000 description 2
- 238000013500 data storage Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000013024 troubleshooting Methods 0.000 description 2
- 241000254158 Lampyridae Species 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000009638 autodisplay Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000013501 data transformation Methods 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32187—Correlation between controlling parameters for influence on quality parameters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32188—Teaching relation between controlling parameters and quality parameters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32204—Performance assurance; assure certain level of non-defective products
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Human Computer Interaction (AREA)
- General Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- General Factory Administration (AREA)
Abstract
一种数据处理方法,包括:响应于用户在第一界面的第一输入,获取样本集合的不良类型;所述样本集合中包括多个样本;每个样本具有第一参数和第二参数;所述第一参数被配置为表征所述样本的属于所述不良类型的不良程度;所述第二参数被配置为表征所述样本经过的样本生产设备的设备信息;基于所述多个样本的第一参数和第二参数,计算多个样本生产设备对所述多个样本中的良率纯度指标,获得所述多个样本生产设备的影响参数;每个样本生产设备的影响参数被配置为表征所述样本生产设备对所述多个样本上出现所述不良类型的影响程度;在第二界面上显示所述多个样本生产设备的影响参数。
Description
PCT国内申请,说明书已公开。
Claims (31)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2020/125447 WO2022088084A1 (zh) | 2020-10-30 | 2020-10-30 | 数据处理方法、装置及系统、电子设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114766023A true CN114766023A (zh) | 2022-07-19 |
CN114766023B CN114766023B (zh) | 2023-05-16 |
Family
ID=81381797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202080002604.3A Active CN114766023B (zh) | 2020-10-30 | 2020-10-30 | 数据处理方法、装置及系统、电子设备 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20230004138A1 (zh) |
CN (1) | CN114766023B (zh) |
WO (1) | WO2022088084A1 (zh) |
Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200509274A (en) * | 2003-08-26 | 2005-03-01 | Promos Technologies Inc | System and method for effective yield loss analysis for semiconductor wafers |
CN103100678A (zh) * | 2013-01-15 | 2013-05-15 | 中冶南方工程技术有限公司 | 连铸坯缺陷影响参数的在线控制系统与方法 |
CN103606114A (zh) * | 2013-12-05 | 2014-02-26 | 国家电网公司 | 一种继电保护设备可靠性的评估方法 |
US20140355866A1 (en) * | 2013-05-30 | 2014-12-04 | Samsung Sds Co., Ltd. | Method and apparatus for identifying root cause of defect using composite defect map |
CN106815462A (zh) * | 2015-11-30 | 2017-06-09 | 郑芳田 | 辨识良率损失的根本原因的系统与方法 |
US20180033134A1 (en) * | 2016-07-29 | 2018-02-01 | Wipro Limited | System and method for dynamically determining balance shelf life of an industrial component |
JP2018163622A (ja) * | 2017-03-27 | 2018-10-18 | 国立大学法人鳥取大学 | 製造不良原因の探索支援方法及び情報処理装置 |
CN109711659A (zh) * | 2018-11-09 | 2019-05-03 | 成都数之联科技有限公司 | 一种工业生产的良率提升管理系统和方法 |
CN110083636A (zh) * | 2019-04-04 | 2019-08-02 | 深圳市华星光电技术有限公司 | 面板缺陷的检测系统及检测方法 |
CN110163647A (zh) * | 2019-03-14 | 2019-08-23 | 腾讯科技(深圳)有限公司 | 一种数据处理方法及装置 |
CN110276410A (zh) * | 2019-06-27 | 2019-09-24 | 京东方科技集团股份有限公司 | 确定不良原因的方法、装置、电子设备及存储介质 |
CN110378586A (zh) * | 2019-07-08 | 2019-10-25 | 国网山东省电力公司菏泽供电公司 | 基于动态闭环知识管理的变电设备缺陷预警方法及系统 |
CN110796187A (zh) * | 2019-10-22 | 2020-02-14 | 西安奕斯伟硅片技术有限公司 | 不良分类方法及装置 |
CN111159645A (zh) * | 2019-12-19 | 2020-05-15 | 成都数之联科技有限公司 | 一种基于产品生产履历和参数的不良根因定位方法 |
WO2020105468A1 (ja) * | 2018-11-22 | 2020-05-28 | 日本電気株式会社 | 情報処理装置、情報処理システム、情報処理方法及びプログラムが格納された非一時的なコンピュータ可読媒体 |
CN111212279A (zh) * | 2018-11-21 | 2020-05-29 | 华为技术有限公司 | 一种视频质量的评估方法及装置 |
US20200334446A1 (en) * | 2017-12-31 | 2020-10-22 | Asml Netherlands B.V. | Methods and systems for defect inspection and review |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8725667B2 (en) * | 2008-03-08 | 2014-05-13 | Tokyo Electron Limited | Method and system for detection of tool performance degradation and mismatch |
CN206450191U (zh) * | 2017-02-17 | 2017-08-29 | 京东方科技集团股份有限公司 | 位置信息收集装置 |
-
2020
- 2020-10-30 US US17/781,127 patent/US20230004138A1/en active Pending
- 2020-10-30 WO PCT/CN2020/125447 patent/WO2022088084A1/zh active Application Filing
- 2020-10-30 CN CN202080002604.3A patent/CN114766023B/zh active Active
Patent Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200509274A (en) * | 2003-08-26 | 2005-03-01 | Promos Technologies Inc | System and method for effective yield loss analysis for semiconductor wafers |
CN103100678A (zh) * | 2013-01-15 | 2013-05-15 | 中冶南方工程技术有限公司 | 连铸坯缺陷影响参数的在线控制系统与方法 |
US20140355866A1 (en) * | 2013-05-30 | 2014-12-04 | Samsung Sds Co., Ltd. | Method and apparatus for identifying root cause of defect using composite defect map |
CN103606114A (zh) * | 2013-12-05 | 2014-02-26 | 国家电网公司 | 一种继电保护设备可靠性的评估方法 |
CN106815462A (zh) * | 2015-11-30 | 2017-06-09 | 郑芳田 | 辨识良率损失的根本原因的系统与方法 |
US20180033134A1 (en) * | 2016-07-29 | 2018-02-01 | Wipro Limited | System and method for dynamically determining balance shelf life of an industrial component |
JP2018163622A (ja) * | 2017-03-27 | 2018-10-18 | 国立大学法人鳥取大学 | 製造不良原因の探索支援方法及び情報処理装置 |
US20200334446A1 (en) * | 2017-12-31 | 2020-10-22 | Asml Netherlands B.V. | Methods and systems for defect inspection and review |
CN109711659A (zh) * | 2018-11-09 | 2019-05-03 | 成都数之联科技有限公司 | 一种工业生产的良率提升管理系统和方法 |
CN111212279A (zh) * | 2018-11-21 | 2020-05-29 | 华为技术有限公司 | 一种视频质量的评估方法及装置 |
WO2020105468A1 (ja) * | 2018-11-22 | 2020-05-28 | 日本電気株式会社 | 情報処理装置、情報処理システム、情報処理方法及びプログラムが格納された非一時的なコンピュータ可読媒体 |
CN110163647A (zh) * | 2019-03-14 | 2019-08-23 | 腾讯科技(深圳)有限公司 | 一种数据处理方法及装置 |
CN110083636A (zh) * | 2019-04-04 | 2019-08-02 | 深圳市华星光电技术有限公司 | 面板缺陷的检测系统及检测方法 |
CN110276410A (zh) * | 2019-06-27 | 2019-09-24 | 京东方科技集团股份有限公司 | 确定不良原因的方法、装置、电子设备及存储介质 |
CN110378586A (zh) * | 2019-07-08 | 2019-10-25 | 国网山东省电力公司菏泽供电公司 | 基于动态闭环知识管理的变电设备缺陷预警方法及系统 |
CN110796187A (zh) * | 2019-10-22 | 2020-02-14 | 西安奕斯伟硅片技术有限公司 | 不良分类方法及装置 |
CN111159645A (zh) * | 2019-12-19 | 2020-05-15 | 成都数之联科技有限公司 | 一种基于产品生产履历和参数的不良根因定位方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2022088084A1 (zh) | 2022-05-05 |
CN114766023B (zh) | 2023-05-16 |
US20230004138A1 (en) | 2023-01-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10453008B2 (en) | Automatic time series exploration for business intelligence analytics | |
US11941645B1 (en) | Methods and systems to extract signals from large and imperfect datasets | |
US10572837B2 (en) | Automatic time interval metadata determination for business intelligence and predictive analytics | |
US20180053134A1 (en) | System, method and computer product for management of proof-of-concept software pilots, including neural network-based kpi prediction | |
US20170004409A1 (en) | Automated selection of generalized linear model components for business intelligence analytics | |
US20210364999A1 (en) | System and method for analyzing cause of product defect, computer readable medium | |
CN113837596B (zh) | 一种故障确定方法、装置、电子设备及存储介质 | |
CN111581197B (zh) | 对数据集中的数据表进行抽样和校验的方法及装置 | |
US20230267302A1 (en) | Large-Scale Architecture Search in Graph Neural Networks via Synthetic Data | |
CN113592017B (zh) | 一种深度学习模型标准化训练方法、管理系统、处理终端 | |
CN115237804A (zh) | 性能瓶颈的评估方法、装置、电子设备、介质和程序产品 | |
CN114766023B (zh) | 数据处理方法、装置及系统、电子设备 | |
US20240004375A1 (en) | Data processing method, and electronic device and storage medium | |
RU2715024C1 (ru) | Способ отладки обученной рекуррентной нейронной сети | |
CN111461306A (zh) | 特征评估的方法及装置 | |
CN114972273A (zh) | 流水化产品数据集增强方法、系统、设备及存储介质 | |
US20220247620A1 (en) | Identification of Clusters of Elements Causing Network Performance Degradation or Outage | |
US20230022253A1 (en) | Fast and accurate prediction methods and systems based on analytical models | |
CN104217093B (zh) | 利用不良样本的缺陷地图判定问题设备的方法及其装置 | |
CN115413349A (zh) | 数据处理方法及装置、电子设备、存储介质 | |
CN115735203A (zh) | 数据处理方法、装置、设备及存储介质 | |
US11899650B2 (en) | Using statistical dispersion in data process generation | |
WO2022036710A1 (en) | Method of indication selection for a fault diagnosis of a gearbox | |
CN117370326A (zh) | 一种数据评估方法、装置、电子设备及介质 | |
CN117829294A (zh) | 模型测评方法、装置、电子设备及存储介质 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |