CN114761776B - Relative pressure sensor comprising a drying chamber - Google Patents

Relative pressure sensor comprising a drying chamber Download PDF

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Publication number
CN114761776B
CN114761776B CN202080083555.0A CN202080083555A CN114761776B CN 114761776 B CN114761776 B CN 114761776B CN 202080083555 A CN202080083555 A CN 202080083555A CN 114761776 B CN114761776 B CN 114761776B
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China
Prior art keywords
pressure sensor
container
measuring element
relative pressure
moisture
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CN202080083555.0A
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CN114761776A (en
Inventor
米夏埃尔·休格尔
弗兰克·伏尔兹
尼尔斯·波纳特
阿明·鲁普
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Endress and Hauser SE and Co KG
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Endress and Hauser SE and Co KG
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0654Protection against aggressive medium in general against moisture or humidity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

The invention relates to a relative pressure sensor (1) for determining a pressure (p 1) of a medium (2) relative to an atmospheric pressure (p 2), comprising: -a housing (3), which housing (3) has a measuring element (4) located in the housing (3), wherein the pressure (p 1) to be measured acts on an outer surface of the measuring element (4), which surface is in contact with the medium (2); a reference pressure supply (5), the reference pressure supply (5) providing an atmospheric pressure (p 2) in the form of ambient air to the inner surface of the measuring element (4); an evaluation unit (6), which evaluation unit (6) determines the pressure (p 1) of the medium (2) from the variable determined using the measuring element (4) and comprises the suction of atmospheric moisture from the ambient air supplied via the reference pressure supply (5). The drying chamber (7) has a drying module (8), which drying module (8) comprises a container (9) and a hygroscopic material (10) completely enclosed by the container (9).

Description

Relative pressure sensor comprising a drying chamber
Technical Field
The invention relates to a relative pressure sensor for determining the pressure of a medium relative to atmospheric pressure, comprising: a housing; a measuring element arranged in the housing, wherein the pressure to be measured acts on an outer surface of the measuring element, said surface being in contact with the medium; a reference pressure supply portion that supplies an atmospheric pressure in the form of ambient air to an inner surface of the measuring element; an evaluation unit that determines the pressure of the medium from the variable determined using the measuring element; and at least one drying chamber arranged in the housing for absorbing atmospheric moisture from ambient air supplied through the reference pressure supply. In this case, the medium whose pressure is to be determined is liquid or gaseous.
Background
In pressure measurement technology, absolute pressure sensors, differential pressure sensors, and relative pressure sensors are known. The absolute pressure sensor determines the main pressure absolutely, i.e. the pressure relative to the vacuum, while the differential pressure sensor determines the difference between the two different pressures. In the case of a relative pressure sensor, the pressure to be measured is determined relative to a reference pressure, wherein the atmospheric pressure prevailing in the environment of the relative pressure sensor is used as the reference pressure. The relative pressure sensor has a pressure-sensitive measuring element, typically a membrane, which is arranged on the process side inside the relative pressure sensor such that the pressure of the medium to be measured acts on the outer surface of the measuring element. By means of the reference pressure supply, the atmospheric pressure supplied from the environment to the measuring element acts on the inner surface of the measuring element. The measuring element flexes in accordance with the existing relative pressure, which is formed by the difference between the pressure to be measured and the atmospheric pressure. The bending is converted by means of an evaluation unit into an electrical signal which is dependent on the relative pressure and can therefore be used for further processing or evaluation. Various such relative pressure sensors are manufactured and sold by the company of the Endress+Hauser group.
The relative pressure sensor may determine the pressure to be measured according to various methods, such as capacitive or piezoresistive.
In a capacitive relative pressure sensor, the membrane is provided with a first electrode and the side of the measurement chamber opposite the membrane is provided with a second electrode and in some cases a third electrode. The second electrode forms together with the first electrode a measuring capacitor which is particularly sensitive to bending of the membrane, so that the relative pressure can be determined from the capacitance value. The third electrode serves as a reference electrode and forms, together with the first electrode, a reference capacitor which is substantially independent of pressure and is influenced by temperature, atmospheric moisture and other environmental parameters. By means of the capacitance of the reference capacitor, it is thus possible to compensate for interference signals, such as temperature-dependent capacitance changes.
Another group of known opposing sensors has a membrane on which a strain sensitive element, such as a strain gauge, is arranged. The strain gauge is typically arranged in the form of a wheatstone measuring bridge. The resistance of the strain gage depends on the tortuosity of the membrane and the applied pressure is determined by evaluation.
The piezoresistive opposing sensor has a sensitive layer whose electrical properties depend on the applied pressure. The layer is not directly subjected to the pressure to be measured, but is in contact with the medium via the diaphragm seal. The diaphragm seal may be a solid body or a pipe filled with an incompressible liquid such as oil and seals the process by a pressure sensitive membrane.
Relative pressure sensors are often used in industrial processes where they are exposed to large temperature fluctuations and differences between the process and the environment. In the case of sudden cooling, the dew point of the air in the interior of the relative pressure sensor may be exceeded, which results in atmospheric moisture condensing on cooler components in the interior of the relative pressure sensor. Atmospheric moisture can enter the environment, in particular, through an opening in the relative pressure sensor, which is necessary for providing the measuring element with a reference pressure, and through a reference pressure supply into the relative pressure sensor.
The evaluation unit is generally very sensitive to moisture. Therefore, in order to reliably determine the pressure, it must be ensured that no moisture or only a small amount of moisture enters or condenses within the relative pressure sensor. Ideally, the relative pressure sensor is configured such that only dry air reaches the measuring element and the evaluation unit. Typically, the reference pressure supply directs ambient pressure from an opening in the opposing pressure sensor, which is typically arranged in the housing of the opposing pressure sensor, to the inner surface of the measuring element or the inner surface of the membrane. The reference pressure supply between the opening of the relative pressure sensor and the interior of the relative pressure sensor is typically designed to be long, in some cases a serpentine path, in order to reduce moisture diffusion into the interior of the relative pressure sensor. Furthermore, in some cases, a drying chamber is arranged between the opening of the relative pressure sensor and the measuring element, which drying chamber removes moisture from the ambient air supplied by the reference pressure supply, thereby drying the ambient air.
Various drying chambers are known from the prior art.
DE10 2014 108 780a1 describes a drying module for a relative pressure sensor. The drying module includes a module housing having an interior with a desiccant and a reference pressure supply extending from an environmentally-facing opening in the module housing and through the module housing to an opening in the opposing pressure sensor. Within the module housing, the reference pressure supply takes the form of a capillary tube that is either partially permeable to moisture or has an opening along the capillary tube for exchanging air or moisture with the desiccant. The drying module is fastened to the opening of the opposite pressure sensor by means of a connecting element. Here, it is critical that the connecting element is fastened to the opening of the relative pressure sensor such that ambient air is led into the relative pressure sensor only via the reference pressure supply and only dry ambient air can enter the relative pressure sensor. The aim is to prevent moist ambient air from directly entering the relative pressure sensor without bypassing the drying module. Since the drying module is designed to be exchangeable and the connection to the relative pressure sensor must therefore be releasable, it is not easy to ensure that only ambient air dried in the drying module is led into the relative pressure sensor. At the same time, the service life of the drying module is limited, since the drying agent is connected to the ambient air via a short reference pressure supply and can therefore absorb moisture rapidly.
DE 10 2010 003 709A1 describes a relative pressure sensor comprising a housing, a measuring element, an evaluation unit, a reference pressure supply and a drying chamber which is arranged in the housing and which contains or essentially consists of a hygroscopic material. The hygroscopic material may be in the form of a molded, sintered, or composite body. The reference pressure supply takes the form of a long capillary tube between an opening in the housing of the relative pressure sensor and the drying chamber in order to reduce moisture diffusion into the interior of the relative pressure sensor. A portion of the reference pressure supply is also located within the drying chamber and is composed of a moisture permeable material to enable the drying chamber to absorb moisture from the ambient air within the reference pressure supply. This moisture permeable part of the reference pressure supply (usually a tube) must be fixed to the measuring element. Fastening the tube to the measuring element is sometimes complicated by the fact that the tube desirably has a very small inner diameter in order to allow as little moisture as possible to diffuse through the tube. Furthermore, a sealing surface is required on the side of the drying chamber facing away from the measuring element. The tube is introduced to the closing surface in such a way that: so that the reference pressure supply into the drying chamber extends only through the tube. The closing surface may be a glass feedthrough which is attached to the relative pressure sensor in an additional process step.
Disclosure of Invention
Starting from the cited prior art, the object of the present invention is to provide a drying module which can be introduced into a relative pressure sensor in a simple manner, so that only dry air reaches the measuring element and the evaluation unit.
According to the invention, this object is achieved by a relative pressure sensor for determining the pressure p1 of a medium relative to an atmospheric pressure p2, the sensor comprising: a housing; a measuring element arranged in the housing, wherein a pressure p1 to be measured acts on an outer surface of the measuring element, said surface being in contact with the medium; a reference pressure supply portion that supplies an atmospheric pressure p2 in the form of ambient air to an inner surface of the measuring element; an evaluation unit that determines a pressure p1 of the medium from the variable determined using the measuring element; and at least one drying chamber arranged in the housing for absorbing atmospheric moisture from ambient air supplied through the reference pressure supply.
In this case, the drying chamber has a drying module comprising a container and a hygroscopic material completely surrounded by the container, wherein a bottom surface of the container facing the measuring element is designed to be at least partially moisture-permeable, wherein the container is designed to be moisture-impermeable except for the bottom surface.
The use of a container for containing the hygroscopic material ensures additional stability of the hygroscopic material. For example, the hygroscopic material may be filled into the container in powder form. If the molded body is used as a hygroscopic material and loses its shape when it reaches saturation with moisture, i.e. for example, it cracks or breaks down into pieces, the container ensures that the hygroscopic material cannot disperse inside the relative pressure sensor.
An embodiment of the at least partially moisture permeable bottom surface is particularly advantageous for a relative pressure sensor whose evaluation unit is arranged near the measuring element or at least between the bottom surface and the measuring element. The drying module thus ensures an effective drying of the air in the vicinity of the evaluation unit.
Since only the bottom surface is designed to be partially permeable to moisture, moisture from the reference pressure supply can only slowly diffuse into the container and into the hygroscopic material. Thus, containing the hygroscopic material in the container significantly reduces the rate at which the hygroscopic material absorbs moisture. This also means that the hygroscopic material becomes less rapidly saturated with moisture.
The slower saturation of the hygroscopic material not only facilitates storage of the drying module, but also facilitates installation of the drying module in a relative pressure sensor. Moisture absorbent materials that are not surrounded by a container absorb moisture very rapidly once exposed to ambient air. This is a great disadvantage when installing hygroscopic materials, since the installation is performed under ambient conditions and the hygroscopic material has absorbed a lot of moisture during the installation process. However, in the solution according to the invention, this problem is significantly alleviated by using a container which is only partially permeable to moisture, in which the hygroscopic material is contained, since the drying module is able to absorb moisture from the environment much slower. At the same time, this results in easier storage of the drying module, since it can be stored longer due to slower saturation of the drying module.
By restricting the moisture entering the drying module, the hygroscopic material draws less moisture from the environment. Typically, in a relative pressure sensor, a tube is guided through a drying chamber, and the drying chamber is closed off on its side facing away from the measuring element by a glass feedthrough through which the tube is guided. It is often necessary to combine a tube with as small an inside diameter as possible with a glass feed-through so that ambient air and humidity can slowly diffuse into the drying chamber. Without the use of tubing and glass feedthroughs, the drying chamber according to the previous publication would permanently extract moisture from the ambient air within the relative pressure sensor, which would accelerate the diffusion of moisture from the environment of the relative pressure sensor into the interior of the relative pressure sensor. This will result in a rapid saturation of the hygroscopic material in the drying chamber. On the other hand, in the solution according to the invention, by containing the hygroscopic material in a container that is only partially permeable to moisture, the suction of moisture from the interior of the relative pressure sensor is significantly reduced. Thus, additional elements for restricting moisture from entering the drying module, such as tubes and glass feedthroughs, are not required. Furthermore, the significantly reduced moisture absorption by the drying chamber compared to previous solutions makes it possible to reduce the volume of the drying chamber and to reduce the volume of the hygroscopic material contained in the drying chamber. The present invention saves space, materials and costs by reducing the size of the drying module and eliminating components such as tubing and glass feedthroughs.
In this connection, it should be pointed out that the reference pressure supply from the opening in the opposite pressure sensor housing to the drying chamber should be designed such that the diffusion of moisture into the opposite pressure sensor interior is slowed down. This can be achieved, for example, by a long capillary tube as known from DE 10 2010 003 709A1. However, other embodiments of the reference pressure supply are also possible. Thus, the reference pressure supply may also take the form of a recess in the wall of the component of the opposite pressure sensor. The use of the drying module according to the invention without a long, intertwined reference pressure supply results in a faster moisture saturation of the drying module.
In one embodiment, the base body of the drying module is an annular chamber with a feed-through along the longitudinal axis of the base body, which feed-through leads the connection lines of the electronic components and the reference pressure supply to the measuring element.
In a preferred embodiment, the bottom surface of the container facing the measuring element is designed as a separate bottom unit, wherein the connection between the bottom unit and the container is designed to be form-fitting and/or impermeable to moisture. The possibility of detaching the bottom unit from the container and attaching it to the container makes it easy to fill the container with hygroscopic material. At the same time, since the container and the bottom unit should be composed of different materials, the drying module can be simply produced. For example, the container and the base unit may be produced by additive manufacturing.
Advantageously, the bottom unit may be inserted into the container. This facilitates the sealing of the drying module. In the case of a replacement of the drying module, the same container can be reused in the event of saturation of the hygroscopic material, but only the hygroscopic material.
In another embodiment, the drying module is designed in sections such that the annular chamber is divided into at least two separate chambers with respect to the longitudinal section. In embodiments in which the drying module is a single annular chamber, the connection lines of the electronic components must be led through the feedthroughs of the drying module in a complex manner. When the drying module is divided into two chambers, the connection line can pass between the two chambers in a simple manner, and the two chambers can then be combined together.
In the case of a two-part drying module, the two chambers are preferably designed symmetrically, so that the total volume of the annular chamber is distributed uniformly over the two chambers.
In one possible embodiment, the container has an outer diameter enlargement in the end region facing the measuring element, wherein the section of the housing having the inner diameter enlargement corresponds to the section of the container having the outer diameter enlargement, wherein the section of the outer diameter enlargement of the respective container and the section of the inner diameter enlargement of the housing engage one another in a form-fitting manner after the introduction of the drying module into the housing. This ensures that ambient air is guided along the reference pressure supply to the measuring element only through the feed-throughs in the drying module.
In another embodiment, the moisture impermeable material of the container is a polymer or a metal coated polymer.
In another embodiment, the moisture permeable region of the base unit is made of PA or Gore.
It is advantageous here if a molded body comprising a polymer matrix and zeolite is provided as hygroscopic material. Such molded bodies are known, for example, from DE 10 2010 062 295A1 or DE 10 2011 080 142A1.
The cross section of the outer wall of the drying module facing the housing advantageously has a wave form superimposed on a circular basic contour. The wave form superimposed on the basic contour compensates for tolerances of the diameter of the drying module and the diameter of the housing during installation of the drying module. The wave form ensures that the drying module in the housing is in a vibration-free state after the drying module is installed in the housing.
Drawings
The invention is explained in more detail with reference to the following fig. 1 to 2 b. The following is shown:
figure 1 is a schematic view of a relative pressure sensor according to the invention,
FIG. 2a is a possible embodiment of a one-piece drying module, and
Fig. 2b is a possible embodiment of a two-part drying module.
Detailed Description
The invention is applicable to various relative pressure sensors based on different measurement principles. The relative pressure sensor is for determining a pressure p1 of the medium relative to an atmospheric pressure p2, the sensor comprising: a housing; a measuring element, which is arranged in the housing, wherein the pressure p1 to be measured acts on an outer surface of the measuring element, which surface is in contact with the medium; a reference pressure supply that provides an atmospheric pressure p2 in the form of ambient air to the inner surface of the measuring element; an evaluation unit that determines the pressure p1 of the medium from the variable determined using the measuring element; and at least one drying chamber arranged in the housing for absorbing atmospheric moisture from ambient air supplied through the reference pressure supply. Corresponding relative pressure sensors are manufactured and sold by the applicant, for example under the designations "Cerabar" and "CERAPHANT".
Fig. 1 shows a relative pressure sensor 1, which comprises a housing 3, a measuring element 4 facing a medium 2, a reference pressure supply 5 and an evaluation unit 6. The reference pressure supply 5 directs ambient air from the environment of the relative pressure sensor 1 through an opening 16 in the relative pressure sensor 1 and along a recess 18 in the sleeve 17 into the interior of the relative pressure sensor 1. The recess 18 serves to limit the rate of moisture diffusion into the interior of the relative pressure sensor 1, and the recess 18 is designed such that the reference pressure supply 5 extends from the opening 16 into the interior of the sleeve 17 only along the recess 18. However, limiting moisture diffusion may also be achieved by other embodiments, such as long capillaries, which connect the opening 16 to the interior of the relative pressure sensor 1.
The relative pressure sensor also has a drying chamber 7 in which a drying module 8 is mounted. In fig. 1, the drying module 8 is designed as a two-part annular chamber, through which the connection lines 12 of the electronic components and the reference pressure supply 5 extend. Thus, other embodiments of the drying module 8 are not excluded; fig. 2a shows another possible embodiment. On the side of the drying module 8 facing the medium 2, the drying module 8 has an outer diameter enlargement of the container 13, which engages in a form-fitting manner with an inner diameter enlargement of the housing 14.
Figures 2a, b show a drying module 8 according to the invention, which drying module 8 consists of a container 9, an at least partly moisture permeable base unit 11 and a hygroscopic material 10, which hygroscopic material 10 is provided as a molded body comprising a polymer matrix and zeolite, without limiting generality. The container 9 completely encloses the hygroscopic material 10 and the container 9 is designed to be impermeable to moisture, except for the bottom unit 11. The base unit 11 may be designed as part of the container or may be designed as a separate detachable base unit, wherein the connection between the base unit 11 and the container 9 is designed to be moisture-impermeable and/or form-fitting.
In fig. 2a, the drying module 8 is designed as a one-piece annular chamber, with the bottom unit 11 being inserted into the container 9. This does not exclude other possibilities of connecting the bottom unit 11 to the container 9. The moisture impermeable material of the container is for example a polymer or a metal coated polymer, while the moisture permeable region of the base unit is made of PA or Gore. Thus, other moisture permeable or non-moisture permeable materials are not excluded. In the direction of the measuring element 4, the drying module 8 has an outer diameter enlargement of the container 13, which outer diameter enlargement is also present in the base unit.
In fig. 2b, the drying module 8 is designed as a two-part drying module, consisting of two chambers with symmetrical volumes. Of course, the drying module may also be divided into two parts in other ways. The outer wall 15 of the drying module 8 has a wave-shaped cross section.
List of reference numerals
1. Relative pressure sensor
2. Medium (D)
3. Shell body
4. Measuring element
5. Reference pressure supply part
6. Evaluation unit
7. Drying chamber
8. Drying module
9. Container
10. Moisture-absorbing material
11. Bottom surface
12. Connecting wire of electronic element
13. Outer diameter enlarging portion of container
14. Inner diameter enlarging portion of shell
15. Outer wall of drying module
16. Opening in a housing
17. Casing pipe
18. Groove

Claims (11)

1. A relative pressure sensor (1) for measuring the pressure (p 1) of a medium (2) relative to the atmospheric pressure (p 2),
The sensor includes:
A housing (3);
-a measuring element (4), the measuring element (4) being arranged in the housing (3), wherein the pressure (p 1) to be measured acts on an outer surface of the measuring element (4), which surface is in contact with the medium (2);
A reference pressure supply (5), the reference pressure supply (5) supplying an atmospheric pressure (p 2) in the form of ambient air to an inner surface of the measuring element (4);
-an evaluation unit (6), the evaluation unit (6) determining the pressure (p 1) of the medium (2) from the variable determined using the measuring element (4);
And at least one drying chamber (7), the at least one drying chamber (7) being arranged in the housing (3) for absorbing atmospheric moisture from the ambient air supplied by the reference pressure supply (5),
Wherein the drying chamber (7) has a drying module (8), the drying module (8) comprising a container (9) and a hygroscopic material (10) completely surrounded by the container (9), wherein a bottom surface (11) of the container (9) facing the measuring element (4) is designed to be at least partially moisture-permeable, wherein the container (9) is designed to be moisture-impermeable except for the bottom surface (11),
Wherein the evaluation unit (6) is arranged near the measuring element (4) or between the bottom surface (11) and the measuring element (4).
2. The relative pressure sensor of claim 1,
Wherein the base body of the drying module (8) is an annular chamber with a feed-through along the longitudinal axis of the base body, which leads the connection lines (12) of the electronic components and the reference pressure supply (5) to the measuring element (4).
3. The relative pressure sensor according to claim 1 or 2,
Wherein the bottom surface (11) of the container (9) facing the measuring element (4) is designed as a separate bottom unit, wherein the connection between the bottom unit and the container (9) is designed to be form-fitting and/or impermeable to moisture.
4. The relative pressure sensor according to claim 3,
Wherein the bottom unit is insertable into the container (9).
5. The relative pressure sensor according to claim 2,
Wherein the drying module (8) is designed in several parts such that the annular chamber is divided into at least two separate chambers with respect to a longitudinal section.
6. The relative pressure sensor of claim 5,
In the case of a two-part drying module (8), the two chambers are designed symmetrically such that the total volume of the annular chamber is distributed evenly over the two chambers.
7. The relative pressure sensor according to claim 1 or 2,
Wherein the container (9) has an outer diameter enlargement (13) in the end region facing the measuring element (4), wherein the housing (3) has a section of an inner diameter enlargement (14) which corresponds to the section of the outer diameter enlargement (13) of the container, wherein after the drying module (8) has been introduced into the housing (3), the section of the outer diameter enlargement (13) of the container and the section of the inner diameter enlargement (14) of the housing engage one another in a form-fitting manner.
8. The relative pressure sensor according to claim 1 or 2,
Wherein the moisture impermeable material of the container (9) is a polymer or a metal coated polymer.
9. The relative pressure sensor according to claim 3,
Wherein the moisture permeable region of the base unit is made of PA or Gore.
10. The relative pressure sensor according to claim 1 or 2,
Wherein a molded body comprising a polymer matrix and zeolite is provided as the hygroscopic material (10).
11. The relative pressure sensor according to claim 1 or 2,
Wherein the cross section of the outer wall (15) of the drying module (8) facing the housing (3) has a wave shape superimposed on a circular basic contour.
CN202080083555.0A 2019-12-02 2020-11-20 Relative pressure sensor comprising a drying chamber Active CN114761776B (en)

Applications Claiming Priority (3)

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DE102019132723.7 2019-12-02
DE102019132723.7A DE102019132723A1 (en) 2019-12-02 2019-12-02 Relative pressure sensor with drying chamber
PCT/EP2020/082845 WO2021110429A1 (en) 2019-12-02 2020-11-20 Relative-pressure sensor comprising a drying chamber

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CN114761776B true CN114761776B (en) 2024-07-12

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WO (1) WO2021110429A1 (en)

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CN114761776A (en) 2022-07-15
DE102019132723A1 (en) 2021-06-02
EP4070062A1 (en) 2022-10-12
US20230012816A1 (en) 2023-01-19

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