CN114754984A - Refraction-reflection type pupil optical axis sensor - Google Patents

Refraction-reflection type pupil optical axis sensor Download PDF

Info

Publication number
CN114754984A
CN114754984A CN202210544348.1A CN202210544348A CN114754984A CN 114754984 A CN114754984 A CN 114754984A CN 202210544348 A CN202210544348 A CN 202210544348A CN 114754984 A CN114754984 A CN 114754984A
Authority
CN
China
Prior art keywords
pupil
optical axis
light
light beam
catadioptric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210544348.1A
Other languages
Chinese (zh)
Inventor
叶一东
尚武云
石岩
王�锋
黄祖鑫
顾静良
欧龙
谢川林
张宏
赵媛媛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Applied Electronics of CAEP
Original Assignee
Institute of Applied Electronics of CAEP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Applied Electronics of CAEP filed Critical Institute of Applied Electronics of CAEP
Priority to CN202210544348.1A priority Critical patent/CN114754984A/en
Publication of CN114754984A publication Critical patent/CN114754984A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08Catadioptric systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08Catadioptric systems
    • G02B17/0864Catadioptric systems having non-imaging properties
    • G02B17/0876Catadioptric systems having non-imaging properties for light collecting, e.g. for use with a detector

Abstract

The invention provides a catadioptric pupil optical axis sensor, which comprises a front-end optical system, a pupil plane sensor and a pupil plane sensor, wherein the front-end optical system is arranged on one side of a detected pupil plane; the light path integration system is arranged on one side of the front-end optical system and used for receiving the light beam reflected from the light path reflection unit, and the light beam enters from one end of the light path integration unit and is divided into two paths to be emitted; the pupil detector is arranged at the exit position of one path of light beam and is used for detecting the light beam section light spot intensity distribution at a pupil plane to obtain a light beam alignment error at the pupil position; and the optical axis detector is arranged at the exit position of the other path of light beam and is used for detecting the far field light intensity distribution of the laser beam to obtain the direction error of the optical axis. The catadioptric pupil optical axis sensor provided by the invention simultaneously realizes the measurement of the pupil position and the optical axis direction of the laser output beam relative to the telescope in the laser system carried in the moving platform broadband vibration complex environment in one set of equipment, and has the advantages of small size, light weight, compact structure and high precision.

Description

Refraction-reflection type pupil optical axis sensor
Technical Field
The invention relates to the technical field of light beam alignment and optical axis stabilization, in particular to a catadioptric pupil optical axis sensor.
Background
In various laser transmission and receiving systems such as a laser communication system, a laser ranging system, a laser deicing system, a laser radar system, a laser space debris removal system and … … carried by a moving platform (such as a truck, an airplane, a ship and the like), a laser and a transmitting and receiving telescope are installed at different positions of the platform, as shown in fig. 1, it is required to ensure that a laser beam is aligned with the center of a telescope pupil (the pupil position is usually arranged near an optical path spectroscope shown in fig. 1) in a complex environment, and the laser transmission direction is consistent with the optical axis of the telescope. The pupil optical axis sensor is error measuring equipment for measuring the error of the output beam of a laser in a laser system carried in a moving platform broadband vibration complex environment relative to the pupil position and the optical axis direction of a telescope, and is used for detecting a sampling signal beam transmitted by a spectroscope at the entrance of the telescope to obtain the beam alignment error and the optical axis direction error of a laser beam at the pupil position of the telescope. However, in practical applications, the size and weight of the device are large, which causes problems of inconvenient use.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art.
Therefore, the invention provides a catadioptric pupil optical axis sensor.
The invention provides a catadioptric pupil optical axis sensor, comprising:
a front end optical system disposed at one side of the pupil plane to be detected to reflect, fold, and focus the light beam;
the light path integration system is arranged on one side of the front end optical system and used for receiving the light beam reflected by the light path reflection unit, and the light beam enters from one end of the light path integration unit and is divided into two paths to be emitted;
the pupil detector is arranged at the exit position of one path of light beam and is used for detecting the light beam section spot intensity distribution at a pupil plane to obtain the light beam alignment error at the pupil position;
and the optical axis detector is arranged at the exit position of the other path of light beam and is used for detecting the far field light intensity distribution of the laser beam to obtain the direction error of the optical axis.
According to the catadioptric pupil optical axis sensor of the above technical solution of the present invention, the following additional technical features may also be provided:
in the above technical solution, the front-end optical system includes a half-transmitting half-reflecting mirror, a spherical reflecting mirror, and a plane reflecting mirror;
the light beam enters from the semi-transparent semi-reflecting mirror, is refracted to the spherical reflecting mirror, is reflected to the plane reflecting mirror, and is finally reflected to the light path integration system.
In the above technical solution, the optical path integration system includes a negative power lens group, a beam splitter prism, an attenuation and filter group, and a pupil lens group, which are arranged in sequence.
In the above technical solution, the negative power lens group is an aberration-eliminating negative power lens group composed of two or more lenses, and is combined with the front-end optical system to eliminate spherical aberration, chromatic aberration, coma aberration and astigmatism in the field of view of the optical system, and obtain a longer equivalent focal length in a smaller total length of the optical path to ensure the detection accuracy of the pupil optical axis sensor.
In the above technical solution, the beam splitter prism is a partial reflection and partial transmission beam splitter prism, and divides the signal beam into two paths, which enter the pupil detection branch and the optical axis detection branch respectively.
In the above technical solution, the attenuation and filter set is composed of an attenuation sheet and a filter, the attenuation sheet is used for adjusting the light intensity entering the detector, and the filter is used for filtering out the background light to improve the detection signal-to-noise ratio.
In the above technical solution, the pupil lens group is a lens group composed of two or more lenses, so that a pupil plane is imaged on a photosensitive surface of a pupil detector, and detection of alignment error of a light beam position at the pupil plane is realized.
In the above technical solution, the pupil detector is a high frame frequency CCD camera or a CMOS camera, and is configured to detect a light beam cross section spot intensity distribution at a pupil plane, and obtain a light beam alignment error at a pupil position.
In the above technical solution, the optical axis detector is a high frame frequency camera or a position sensitive detector, and is configured to detect far field light intensity distribution of a laser beam and obtain an optical axis direction error.
Compared with the prior art, the catadioptric pupil optical axis sensor provided by the invention has the following beneficial effects:
a semi-transparent semi-reflecting mirror, a spherical reflecting mirror and a plane reflecting mirror are adopted to form a reflecting element folding light path front end optical system, a longer equivalent focal length is obtained by combining a negative focal power lens group, high-precision measurement capability is obtained, and the total length of the system is shortened; the measurement of pupil position error and optical axis direction error can be realized simultaneously in one set of equipment through a beam splitter prism and a rear end element; according to the installation space constraint in engineering application, the optical path layout mode is flexibly selected, the size of the system in each direction is controlled, and the size constraint in the limited installation space of the application environment is met.
The measurement of pupil position and optical axis direction of laser output beams in a laser system carried by a moving platform in a broadband vibration complex environment is realized in one set of equipment, and the device is small in size, light in weight, compact in structure and high in precision.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic optical path diagram of a laser transmission and transmission receiving system;
FIG. 2 is one of the optical path layout diagrams of the catadioptric pupil optical axis sensor of the present invention (one of the half-mirror, spherical mirror and plane mirror arrangements);
FIG. 3 is a second layout diagram of the optical path of the catadioptric pupil optical axis sensor of the present invention (another arrangement of the half-mirror, the spherical mirror and the plane mirror);
fig. 4 is a third layout diagram of the optical path of the catadioptric pupil optical axis sensor of the present invention (another arrangement of half-mirror, spherical mirror and plane mirror).
Wherein, the correspondence between the reference numbers and the component names in fig. 1 to 4 is:
1. a semi-transparent semi-reflective mirror; 2. a spherical mirror; 3. a plane mirror; 4. a negative power lens group; 5. a beam splitter prism; 6. an attenuation and filter set; 7. a pupil lens group; 8. a pupil detector; 9. an optical axis detector; 10. pupil plane location.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention, taken in conjunction with the accompanying drawings and detailed description, is set forth below. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced otherwise than as specifically described herein and, therefore, the scope of the present invention is not limited by the specific embodiments disclosed below.
A catadioptric pupil optical axis sensor provided according to some embodiments of the present invention is described below with reference to fig. 1 to 4.
Some embodiments of the present application provide a catadioptric pupil optic axis sensor.
As shown in fig. 2 to 4, a first embodiment of the present invention provides a catadioptric pupil optical axis sensor for detecting an alignment error and an optical axis direction error of a pupil plane position 10, which includes a half mirror 1, a spherical mirror 2, a plane mirror 3, a negative power lens group 4, a beam splitter prism 5, an attenuation and filter group 6, a pupil lens group 7, a pupil detector 8, and an optical axis detector 9.
The semi-transparent semi-reflecting mirror 1, the spherical reflecting mirror 2 and the plane reflecting mirror 3 form a front-end optical system which is a reflecting element folded optical path positive focal power focusing optical system and is used for beam-shrinking focusing on a large-aperture signal beam; the typical focal length of the front-end optical system is 0.3-0.8 m, and the shorter front-end focal length design is beneficial to shortening the optical path length of the pupil optical axis sensor and realizing compactness.
In addition, the front-end optical system can adopt different folded optical path layouts (as shown in fig. 2 to 4) to control the size of the system in each direction according to the actual installation space characteristics in engineering application, and compact design in the limited space of the system is realized.
In the implementation, the half-transmitting half-reflecting mirror 1 is optical flat glass, and one surface close to an incident beam is plated with a reflection reducing film to eliminate multiple reflection stray light; one surface close to the spherical reflector 2 is plated with a semi-transparent semi-reflecting light splitting film; the signal beam transmitted by the half-transmitting and half-reflecting mirror 1 is reflected by the spherical reflecting mirror 2 to reach the half-transmitting and half-reflecting mirror 1 for the second time, and is reflected to the plane reflecting mirror 3 to realize the folding of the light path.
In this embodiment, the spherical reflector 2 is a concave spherical reflector 2 made of glass or metal material, and the surface of the spherical reflector is coated with a high reflective film to focus the reflected light beam.
In this embodiment, the plane mirror 3 is a flat plate made of glass or metal material, and the surface of the plane mirror is plated with a high reflective film for turning the light beam direction, so as to realize the folding of the light path, control the size of the sensor, and reduce the volume. In this embodiment, the negative power lens group 4 is an aberration-eliminating negative power lens group 4 composed of two or more lenses, and is combined with the front end optical system to eliminate aberrations such as spherical aberration, chromatic aberration, coma aberration, astigmatism and the like in the field of view of the optical system, and obtain a longer equivalent focal length in a smaller total length of the optical path, so as to ensure the detection accuracy of the pupil optical axis sensor. The typical value of the total equivalent focal length after combination is 1 m-5 m, and a proper value can be selected according to the requirement of the resolution of the detector.
In this embodiment, the beam splitter prism 5 is a partially reflective and partially transmissive beam splitter prism 5, and divides the signal beam into two paths, which enter the pupil detection branch and the optical axis detection branch respectively.
In this embodiment, the attenuation and filter set 6 is composed of an attenuation sheet and a filter, the attenuation sheet is used for adjusting the light intensity entering the detector, and the filter is used for filtering out the background light to improve the detection signal-to-noise ratio.
In this embodiment, the pupil lens group 7 is a lens group composed of two or more lenses, and images a pupil plane onto a photosensitive surface of the pupil detector 8, so as to detect the alignment error of the light beam position at the pupil plane.
In this embodiment, the pupil detector 8 is a high frame rate CCD camera or CMOS camera for detecting the beam cross-section spot intensity distribution at the pupil plane to obtain the beam alignment error at the pupil position.
In this embodiment, the optical axis detector 9 is a high frame frequency camera or a Position Sensitive Detector (PSD), and is located at a focal plane of the optical system, and is configured to detect far-field light intensity distribution of the laser beam, so as to obtain an optical axis direction error.
In addition, the pupil optical axis sensor can have a plurality of optical path layout modes, and three optical path layout embodiments are given in fig. 2 to 4. The optical path principle and the system composition of each optical path layout embodiment are the same, and the difference lies in that different optical path folding modes are adopted, so that the flexibility and the compactness of the optical path spatial layout are realized, the optical path layout mode is flexibly selected according to the installation space position constraint in engineering application, the size of the system in each direction is controlled, and the size constraint in the limited installation space of the application environment is met.
As shown in fig. 2 to 4, the semi-transparent and semi-reflective mirror 1, the spherical reflective mirror 2, and the plane reflective mirror 3 constitute a front-end optical system of the pupil optical axis sensor, which is a reflective element folded optical path positive focal power focusing optical system for beam-shrinking focusing of incoming large-aperture signal light beams, the front-end optical system typically has a focal length of 0.4m to 0.6m, and the shorter front-end focal length design is beneficial to shortening the optical path length of the pupil optical axis sensor and reducing the volume and weight.
Therefore, the invention is characterized in that a semi-transparent semi-reflecting mirror 1, a spherical reflecting mirror 2 and a plane reflecting mirror 3 are adopted to form a reflecting element folded optical path front end optical system, a longer equivalent focal length is obtained by combining a negative focal power lens group 4, high-precision measurement capability is obtained, and the total length of the system is shortened; the measurement of pupil position error and optical axis direction error can be realized simultaneously in one set of equipment through the beam splitter prism 5 and the rear end element; according to the installation space constraint in engineering application, the light path layout mode is flexibly selected, the size of the system in each direction is controlled, and the size constraint in the limited installation space of the application environment is met. The system has compact structure, small volume, light weight and high precision.
The device can simultaneously realize the measurement of pupil position and optical axis direction of the output beam of the laser in the laser system carried by the moving platform in a broadband vibration complex environment in one set of equipment, and has the advantages of small size, light weight, compact structure and high precision.
In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. A catadioptric pupil optic axis sensor comprising:
a front-end optical system disposed at one side of the detected pupil plane to reflect, fold, and focus the light beam;
the light path integration system is arranged on one side of the front-end optical system and used for receiving the light beam reflected from the light path reflection unit, and the light beam enters from one end of the light path integration unit and is divided into two paths to be emitted;
the pupil detector is arranged at the exit position of one path of light beam and is used for detecting the light beam section light spot intensity distribution at a pupil plane to obtain a light beam alignment error at the pupil position;
and the optical axis detector is arranged at the exit position of the other path of light beam and is used for detecting the far field light intensity distribution of the laser beam to obtain the direction error of the optical axis.
2. The catadioptric pupil optical axis sensor of claim 1 where the front-end optics includes a half mirror, a spherical mirror, a plane mirror;
the light beam enters from the semi-transparent semi-reflective mirror, is refracted to the spherical reflector, is reflected to the plane reflector, and is finally reflected to the light path integration system.
3. The catadioptric pupil optical axis sensor of claim 2 wherein the optical path integration system comprises a negative power lens group, a beam splitter prism, an attenuation and filter set and a pupil lens group arranged in sequence.
4. The catadioptric pupil optical axis sensor of claim 3, wherein the negative power lens group is an aberration-eliminating negative power lens group composed of two or more lenses, and is combined with the front-end optical system to eliminate spherical aberration, chromatic aberration, coma aberration and astigmatism in the field of view of the optical system, and obtain a longer equivalent focal length in a smaller total length of the optical path to ensure the detection accuracy of the pupil optical axis sensor.
5. The catadioptric pupil optical axis sensor of claim 4 where the beam splitter prism is a partially reflective and partially transmissive beam splitter prism that splits the signal beam into two paths that enter the pupil detection branch and the optical axis detection branch, respectively.
6. The catadioptric pupil optical axis sensor of claim 5 where the attenuation and filter set consists of an attenuator to adjust the intensity of light entering the detector and a filter to filter out background light to improve the detection signal-to-noise ratio.
7. The catadioptric pupil optical axis sensor of claim 6, wherein the pupil lens group is a lens group composed of two or more lenses, so that the pupil plane is imaged on a pupil detector light-sensitive plane, and the detection of the alignment error of the light beam position at the pupil plane is realized.
8. The catadioptric pupil optical axis sensor of any one of claims 1 to 7 wherein the pupil detector is a high frame rate CCD or CMOS camera to detect beam cross-section spot intensity distributions at a pupil plane to obtain beam alignment errors at a pupil position.
9. The catadioptric pupil optical axis sensor of any one of claims 1 to 7 wherein the optical axis detector is a high frame rate camera or a position sensitive detector for detecting the far field light intensity distribution of the laser beam to obtain the optical axis direction error.
CN202210544348.1A 2022-05-19 2022-05-19 Refraction-reflection type pupil optical axis sensor Pending CN114754984A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210544348.1A CN114754984A (en) 2022-05-19 2022-05-19 Refraction-reflection type pupil optical axis sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210544348.1A CN114754984A (en) 2022-05-19 2022-05-19 Refraction-reflection type pupil optical axis sensor

Publications (1)

Publication Number Publication Date
CN114754984A true CN114754984A (en) 2022-07-15

Family

ID=82335780

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210544348.1A Pending CN114754984A (en) 2022-05-19 2022-05-19 Refraction-reflection type pupil optical axis sensor

Country Status (1)

Country Link
CN (1) CN114754984A (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002057830A1 (en) * 2001-01-10 2002-07-25 Nikon Corporation Zoom optical system, aligner having the zoom optical system, and aligning method
CN103149657A (en) * 2013-03-18 2013-06-12 中国工程物理研究院应用电子学研究所 Optical axis stabilizing device in light-path transmission among optical platforms and control method
CN103926683A (en) * 2014-04-18 2014-07-16 中国科学院光电技术研究所 Variable focal length optical system
CN104317039A (en) * 2014-11-11 2015-01-28 苏州大学 Reflex type telephoto objective lens
US20150362403A1 (en) * 2014-06-16 2015-12-17 Canon Kabushiki Kaisha Measurement apparatus, measurement method, optical element fabrication apparatus, and optical element
WO2017213722A1 (en) * 2016-06-07 2017-12-14 Raytheon Company High-performance beam director for high-power laser systems or other systems
CA2987462A1 (en) * 2016-12-22 2018-06-22 Safran Vectronix Ag Observation device having an eye-controlled laser rangefinder
CN110579859A (en) * 2019-09-03 2019-12-17 佛山科学技术学院 compact type long-focal-length star sensor telecentric optical system
CN114296055A (en) * 2021-12-03 2022-04-08 中国科学院西安光学精密机械研究所 Compact polarized laser optical axis consistency measuring system and measuring method

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002057830A1 (en) * 2001-01-10 2002-07-25 Nikon Corporation Zoom optical system, aligner having the zoom optical system, and aligning method
CN103149657A (en) * 2013-03-18 2013-06-12 中国工程物理研究院应用电子学研究所 Optical axis stabilizing device in light-path transmission among optical platforms and control method
CN103926683A (en) * 2014-04-18 2014-07-16 中国科学院光电技术研究所 Variable focal length optical system
US20150362403A1 (en) * 2014-06-16 2015-12-17 Canon Kabushiki Kaisha Measurement apparatus, measurement method, optical element fabrication apparatus, and optical element
CN104317039A (en) * 2014-11-11 2015-01-28 苏州大学 Reflex type telephoto objective lens
WO2017213722A1 (en) * 2016-06-07 2017-12-14 Raytheon Company High-performance beam director for high-power laser systems or other systems
CA2987462A1 (en) * 2016-12-22 2018-06-22 Safran Vectronix Ag Observation device having an eye-controlled laser rangefinder
CN110579859A (en) * 2019-09-03 2019-12-17 佛山科学技术学院 compact type long-focal-length star sensor telecentric optical system
CN114296055A (en) * 2021-12-03 2022-04-08 中国科学院西安光学精密机械研究所 Compact polarized laser optical axis consistency measuring system and measuring method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
魏继锋;彭勇;高学燕;周山;: "简易型大直径激光束功率能量在线测量装置", vol. 35, no. 03 *

Similar Documents

Publication Publication Date Title
US6268944B1 (en) Free-space optical lasercom system
US5748365A (en) Catadioptric one-to-one telecentric image combining system
US6483638B1 (en) Ultra-broadband UV microscope imaging system with wide range zoom capability
US6552852B2 (en) Catoptric and catadioptric imaging systems
JPH08171054A (en) Reflection refraction optical system
US6424471B1 (en) Catadioptric objective with physical beam splitter
US20060279838A1 (en) Large telescopic optical system with null alignment optics
US4824243A (en) Compact continuous wave wavefront sensor
US6115175A (en) UV image forming optical system
WO2012030837A2 (en) Collection optics
CA1103498A (en) Wide annulus unit power optical system
US3721488A (en) Focusing arrangment for afocal telescopes
CN114754984A (en) Refraction-reflection type pupil optical axis sensor
GB2030315A (en) Catadioptric Infra-red Lenses
US6036324A (en) Catadioptric zoom scattering collector
GB2332533A (en) Optical system comprising beam splitter and Offner relay
CN115307748A (en) Device and method for measuring far and near field light spot modes of laser communication load
US4247200A (en) Projection type lens meter
CN111090223B (en) Optical measurement system
US7477438B2 (en) Optical imaging system for imaging at least two planes of a light beam spaced apart in the beam direction
US6762889B2 (en) Compact telephoto lens for grating scale position measuring system
CN217693339U (en) Laser communication system compatible with star sensor
Zhelem et al. The Hector Instrument: optical design of the new higher-resolution spectrograph
JP3290705B2 (en) Confocal optics
JP2007140013A (en) Photodetection optical system and optical system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination