CN114748983A - Tail gas treatment device and treatment method for preparing electronic-grade hydrofluoric acid - Google Patents
Tail gas treatment device and treatment method for preparing electronic-grade hydrofluoric acid Download PDFInfo
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- CN114748983A CN114748983A CN202210428854.4A CN202210428854A CN114748983A CN 114748983 A CN114748983 A CN 114748983A CN 202210428854 A CN202210428854 A CN 202210428854A CN 114748983 A CN114748983 A CN 114748983A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1456—Removing acid components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/52—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
Abstract
The invention discloses a tail gas treatment device for preparing electronic-grade hydrofluoric acid and a treatment method, the tail gas treatment device comprises a treatment barrel body, the outer side of the treatment barrel body is provided with an air inlet and a water outlet for air intake and water drainage, the top of the treatment barrel body is fixedly provided with a top cover, the inside of the top cover is provided with a first movable groove for mechanical operation, a gear is matched with a convex tooth in the inward movement process and then rotates, the gear drives a third driving roller to rotate through a first rotating shaft, the third driving roller drives a second rotating shaft to rotate through a second driving belt, the second rotating shaft drives the convex tooth to rotate, at the moment, a movable block moves inwards to the bottom of a spray head, and then the bottom attachment of the spray head is cleaned in a rotating way, the corrosion caused by the mixture of hydrofluoric acid tail gas and pure water attached to the bottom of the spray head is prevented, and the problems that the spray head is blocked and cannot spray atomized pure water after being corroded are prevented, effectively improves the hydrofluoric acid tail gas treatment of equipment.
Description
Technical Field
The invention relates to the technical field of hydrofluoric acid tail gas treatment, in particular to a tail gas treatment device and a tail gas treatment method for preparing electronic-grade hydrofluoric acid.
Background
Hydrofluoric acid is the aqueous solution of hydrogen fluoride gas, limpid, colorless, fuming corrosive liquid, there is violent pungent smell, hydrofluoric acid is a weak acid, have extremely strong corrosivity, can corrode metal, glass and siliceous object strongly, the laboratory is generally prepared with fluorite (the principal ingredients are calcium fluoride) and concentrated sulfuric acid, need seal in the plastic bottle, and preserve in the shade, the electronic grade hydrofluoric acid in China at present only can produce in a small amount of large-scale chemical plants, its apparatus for producing all needs to react through large-scale airtight jar body.
In the process of preparing electronic-grade hydrofluoric acid, water needs to be added into the electronic-grade hydrofluoric acid for rectification, hydrofluoric acid tail gas is generated after rectification, in the process of treating the hydrofluoric acid tail gas, the first step needs to carry out water washing work on the hydrofluoric acid tail gas, the hydrofluoric acid tail gas is collected and treated by spraying atomized pure water through the characteristic that the hydrofluoric acid tail gas is dissolved in water, and then the mixture of the collected hydrofluoric acid tail gas and the pure water is subjected to alkali cleaning treatment, but the hydrofluoric acid tail gas inside the water washing barrel is easy to move upwards gradually when the water level of the mixture of the hydrofluoric acid tail gas and the pure water inside the water washing barrel is higher in the water washing process, further leading hydrofluoric acid tail gas to corrode the spray head at the top, leading the corroded spray head to easily cause the problems of blockage during spraying and no atomized pure water during spraying, further, the hydrofluoric acid tail gas cannot be washed by water, which easily causes the hydrofluoric acid tail gas in the equipment to be too much to corrode other internal parts.
Therefore, an exhaust gas treatment device and a treatment method for preparing electronic grade hydrofluoric acid are provided.
Disclosure of Invention
The present invention provides a tail gas treatment device and a tail gas treatment method for preparing electronic grade hydrofluoric acid, so as to solve the problems in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a tail gas treatment device for preparing electronic-grade hydrofluoric acid comprises a treatment barrel body, wherein an air inlet and a water outlet for air inlet and water drainage are formed in the outer side of the treatment barrel body, a top cover is fixedly mounted at the top of the treatment barrel body, a first movable groove for mechanical operation is formed in the top cover, a water spray nozzle for water spray is formed in the bottom of the first movable groove, a first electric telescopic rod for lifting motion is fixedly connected to the top of the first movable groove, a spray head for water spray is fixedly connected to the output end of the bottom of the first electric telescopic rod, a water inlet pipe for water inlet is formed in the top of the spray head, a protection block for protection is arranged in the first movable groove, a closing assembly and a transmission assembly are symmetrically arranged in the first movable groove, a control assembly for detection is arranged in the treatment barrel body, a third movable groove is formed in the first movable groove, a cleaning mechanism is arranged in the third movable groove and comprises a lifting assembly and an opposite assembly rotating assembly, and a cleaning plate for cleaning is arranged on the inner side of the third movable groove.
Preferably, the closing assembly comprises a first sliding chute, a guide chute, a first movable rod, a rolling block, a connecting plate, a supporting rod and a guide block, the inner wall of the first movable groove is provided with a first sliding groove for limiting movement, the guide groove is arranged on the inner wall of the first movable groove, the first movable rod is movably connected inside the first movable groove, two ends of the first movable rod are rotatably connected with rolling blocks, the rolling block is connected inside the first sliding chute in a rolling way, both ends of the first movable rod are fixedly connected with connecting plates for stabilization, the outer wall of the first movable rod and the inner side close to the connecting plate are rotatably connected with a supporting rod for pushing and pulling, the bottom of bracing piece passes through bolt fixed connection with the top of protection piece, the outer wall fixedly connected with of protection piece is used for the guide block of direction, guide block sliding connection is in the inside of guide way.
Preferably, the transmission assembly comprises an electric contact groove, a second electric telescopic rod, a fixed frame, a movable opening, a slot, a first spring, a second movable rod and a first electric contact plate, the outer wall of the spray head is provided with an electric contact groove for circuit control, the inner wall of the first movable groove is fixedly connected with a second electric telescopic rod for pushing, the output end of the second electric telescopic rod is fixedly connected with the first movable rod, the inside of the first movable groove is fixedly connected with a fixed frame for supporting, the movable opening is arranged at the inner side of the fixed frame in a penetrating way, the open slot is arranged at the inner side of the fixed frame, the first spring is fixedly connected with the outer side of the fixed frame, the outer side of the first spring is fixedly connected with a second movable rod for moving, the inner side end of the second movable rod is movably connected inside the groove, and a first electric touch plate used for circuit control is fixedly connected to the inner side of the second movable rod.
Preferably, control assembly includes slide, slider, hollow floating block, second activity groove, second electricity touch panel, electric touch block and contact bar, slide fixed mounting is at the inner wall of handling the staving, slider sliding connection is in the inside of slide, the inboard fixed mounting of slider has the hollow floating block that is used for detecting the water level, the second activity groove that is used for the activity is seted up to the inside of top cap, second electricity touch panel fixed connection is at the top in second activity groove, electric touch block swing joint is in the inside in second activity groove, the bottom fixedly connected with of electric touch block is used for the contact bar that promotes.
Preferably, the lifting subassembly includes second spring, adjustable shelf, fly leaf and lug, second spring fixed connection is in the bottom in third activity groove, adjustable shelf fixed connection is in the bottom of second spring, adjustable shelf swing joint is in the inside in third activity groove, the top fixed mounting of adjustable shelf has the fly leaf that is used for the lifting, the middle part sliding connection of fly leaf is at the outer wall of an electric telescopic handle output, lug fixed mounting is at the inboard lower extreme of adjustable shelf.
Preferably, the subassembly includes second spout, flange, chute, slide bar and movable block in opposite directions, the second spout runs through the inside of seting up at the lug, flange fixed connection is at the outer wall in third activity groove, the chute runs through the inboard of seting up at the flange, the middle part sliding connection of slide bar is in the inside of second spout, the both ends sliding connection of slide bar is in the inside of chute, movable block fixed connection is in the outside of slide bar, movable block swing joint is at the outer wall of lug.
Preferably, rotating assembly includes dogtooth, first axis of rotation, gear, third driving roller, second axis of rotation and second drive belt, dogtooth fixed connection is at the outer wall of lug, first axis of rotation rotates the outside of connecting at the movable block, the top fixedly connected with of first axis of rotation is used for rotatory gear, the inboard and the dogtooth intermeshing of gear, third driving roller fixed connection is in the bottom of first axis of rotation, the inside at the movable block is connected in the second axis of rotation, the top of second axis of rotation and the bottom fixed connection of clearance board, the both ends of second drive belt are connected with the outer wall of third driving roller and the outer wall transmission of second axis of rotation respectively.
Preferably, the air inlet is communicated with both the rectification condensing device and the absorption diluting device, the water outlet is communicated with the hydrofluoric acid alkali washing device, automatic control valves for controlling the inlet and the outlet are arranged inside the air inlet and the water outlet, and the water inlet pipe is connected with an external pure water tank.
Preferably, the electric contact groove is electrically connected with the second electric telescopic rod, the first electric contact plate is electrically connected with the equipment power supply, the second electric contact plate is electrically connected with the equipment power supply, the electric contact block is electrically connected with the first electric telescopic rod, and the internal structure of the equipment is coated with a lead material.
The tail gas treatment method for preparing the electronic grade hydrofluoric acid is applied to the tail gas treatment device for preparing the electronic grade hydrofluoric acid, and comprises the following steps of:
1) the uncondensed rectification waste gas and the tail gas of the absorption tank enter the treatment barrel body through the air inlet, and the uncondensed rectification waste gas and the tail gas of the absorption tank are washed by the atomized pure water sprayed by the spray head;
2) the water level height of the collected mixed liquid is detected by enabling the hollow floating block to move upwards in the slide way through the mixed liquid of pure water, uncondensed rectification waste gas and tail gas of the absorption tank;
3) after the electric contact block is contacted with the second electric contact plate, the first electric telescopic rod drives the spray head to be recovered to the inside of the first movable groove, and at the moment, the water spray opening is blocked by the protection block to prevent redundant uncondensed rectification waste gas and tail gas of the absorption groove from entering the inside of the first movable groove;
4) the movable plate is driven to move upwards through the spray head, so that the cleaning plate and the spray head synchronously move upwards, and the bottom of the spray head is cleaned under the mutual matching action of the gear and the convex teeth.
Compared with the prior art, the invention has the beneficial effects that:
1. the gear is matched with the convex teeth in the inward movement process and then rotates, the gear drives the third transmission roller to rotate through the first rotating shaft, the third transmission roller drives the second rotating shaft to rotate through the second transmission belt, the second rotating shaft drives the convex teeth to rotate, at the moment, the movable block moves inwards to the bottom of the spray head, and then the bottom attachment of the spray head is cleaned in a rotating mode, so that the situation that a mixture of hydrofluoric acid tail gas and pure water is attached to the bottom of the spray head to cause corrosion is prevented, the problems that the spray head is blocked and cannot spray atomized pure water after corrosion are prevented, and the treatment of the hydrofluoric acid tail gas by equipment is effectively improved;
2. The first movable rod moves inwards in the first sliding groove through the rolling block due to the fact that the second electric telescopic rod stretches after being electrified, the first movable rod drives the connecting plate to move inwards, the connecting plate drives the protective block to move inwards through the supporting rod, the protective block moves downwards under the sliding effect of the inner portion of the guide groove through the guide block and moves to the innermost side, the water spraying port is further blocked by the protective block, redundant hydrofluoric acid tail gas in the treatment barrel body is prevented from entering the inner portion of the first movable groove, corrosion of the hydrofluoric acid tail gas to parts in the equipment can be further prevented, and the problem that the equipment cannot operate due to the fact that the hydrofluoric acid tail gas enters the equipment is solved;
3. the hollow floating block moves upwards in the slide way through the slide block under the action of the buoyancy of the mixed liquid of hydrofluoric acid tail gas and pure water, when the water level of the mixed liquid of hydrofluoric acid tail gas and pure water in the slide way reaches a certain height, the contact rod is pushed under the action of the upward movement of the hollow floating block, so that the electric contact block moves upwards in the second movable groove, and when the electric contact block moves to the top of the second movable groove, the electric contact block is electrically contacted with the second electric contact plate, so that the detection effect on the water level in the treatment barrel body is realized;
4. According to the invention, in the process of upward movement of the spray head, after the spray head is contacted with the movable plate, the height of the bottom of the spray head is flush with the height of the upper surface of the cleaning plate, so that the cleaning plate can effectively move to the bottom of the spray head, the contact degree between the cleaning plate and the bottom of the spray head is improved, and the cleaning efficiency of the cleaning plate is improved;
5. according to the invention, when the bottom of the spray head moves to a level higher than the protection block, the tooth groove is meshed with the first gear, so that the protection block can be closed conveniently, the problem that the internal mechanical mechanism is extruded because the protection block moves when the spray head does not leave the water spray opening is prevented, and the operation efficiency of the equipment is improved.
Drawings
FIG. 1 is a perspective view of the overall structure of the present invention;
FIG. 2 is a perspective view of the overall structure of the present invention;
FIG. 3 is a cross-sectional view of the structure A-A of FIG. 2 according to the present invention;
FIG. 4 is a perspective view of the first chute and guide channel structure of the present invention;
FIG. 5 is a perspective view of a closure assembly construction according to the present invention;
FIG. 6 is a perspective view of the drive assembly of the present invention;
FIG. 7 is a cross-sectional view of the structure B-B of FIG. 2 according to the present invention;
FIG. 8 is a perspective view of the lift assembly and opposing assembly of the present invention;
FIG. 9 is an enlarged view of the structure at A in FIG. 8 according to the present invention;
FIG. 10 is a perspective view of the rotating assembly and cleaning plate structure of the present invention;
FIG. 11 is an enlarged view of the structure of FIG. 10 at B.
In the figure:
1. treating the barrel body; 2. an air inlet; 3. a water outlet; 4. a slideway; 5. a slider; 6. a hollow floating block; 7. a top cover; 8. a first movable slot; 9. a water jet; 10. a first electric telescopic rod; 11. a spray head; 12. a water inlet pipe; 13. an electric contact groove; 14. a first chute; 15. a guide groove; 16. a first movable bar; 17. a rolling block; 18. a connecting plate; 19. a support bar; 20. a protection block; 21. a guide block; 22. a second electric telescopic rod; 23. a fixed mount; 24. a movable opening; 25. grooving; 26. a first spring; 27. a second movable bar; 28. a first electrical contact pad; 31. a second movable slot; 32. a second electrical contact pad; 33. an electrical contact; 34. a contact lever; 35. a third movable slot; 36. a second spring; 37. a movable frame; 38. a movable plate; 39. a bump; 40. a second chute; 41. a convex tooth; 42. a convex plate; 43. a chute; 44. a slide bar; 45. a movable block; 46. a first rotating shaft; 47. a gear; 48. a third driving roller; 49. a second rotating shaft; 50. a second belt; 51. and (6) cleaning the plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 1 to 11, the present invention provides a technical solution:
example one
Referring to fig. 1 to 11, a tail gas treatment device for electronic-grade hydrofluoric acid preparation comprises a treatment barrel body 1, an air inlet 2 and a water outlet 3 for air inlet and water drainage are arranged on the outer side of the treatment barrel body 1, the air inlet 2 is communicated with a rectification condensing device and an absorption diluting device, the water outlet 3 is communicated with a hydrofluoric acid alkali washing device, automatic control valves for controlling inlet and outlet are arranged inside the air inlet 2 and the water outlet 3, a top cover 7 is fixedly mounted on the top of the treatment barrel body 1, a first movable groove 8 for mechanical operation is arranged inside the top cover 7, a water spray nozzle 9 for water spray is arranged at the bottom of the first movable groove 8, a first electric telescopic rod 10 for lifting motion is fixedly connected to the top of the first movable groove 8, a spray nozzle 11 for water spray is fixedly connected to the output end of the bottom of the first electric telescopic rod 10, a water inlet pipe 12 for water inlet is arranged at the top of the spray nozzle 11, the inlet tube 12 is connected with external pure water tank, the inside of first activity groove 8 is provided with protection piece 20 that is used for the protection, the inside symmetry of first activity groove 8 is provided with closed subassembly and drive assembly, the inside of handling staving 1 is provided with the control assembly who is used for the detection, third activity groove 35 has been seted up to the inside of first activity groove 8, the inside of third activity groove 35 is provided with clearance mechanism, clearance mechanism includes the lifting subassembly, subassembly rotating assembly in opposite directions, the inboard of third activity groove 35 is provided with clearance board 51 that is used for the clearance, equipment inner structure all adopts lead material coating
During operation, the hydrofluoric acid tail gas after rectification condensation and absorption dilution enters the inside of the treatment barrel body 1 through the valve inside the control air inlet 2, meanwhile, because the water inlet pipe 12 is connected with the external pure water tank, the pure water enters the inside of the spray head 11 through the water inlet pipe 12, the pure water is sprayed out in an atomized state through the spray head 11, the hydrofluoric acid and the pure water are mixed and then collected inside the treatment barrel body 1 through the characteristic that the hydrofluoric acid is dissolved in water, in the process of continuously spraying water, the water level of the mixed liquid of the hydrofluoric acid tail gas and the pure water inside the treatment barrel body 1 gradually rises, the control assembly detects the water level of the mixed liquid inside the treatment barrel body under the action of the buoyancy of the mixed liquid of the hydrofluoric acid tail gas and the pure water, when the water level reaches a certain height, the first electric telescopic rod 10 is controlled to be powered on, the first electric telescopic rod 10 drives the spray head 11 to move upwards inside the first movable tank 8 after being powered on, when the bottom of shower nozzle 11 moved to the level that is higher than protection piece 20, drive closed subassembly through drive assembly and make protection piece 20 block up water jet 9, prevented that hydrofluoric acid tail gas from entering into the inside spare part that corrodes of first movable tank 8, meanwhile, shower nozzle 11 rethread lifting subassembly drives subassembly to move to the inside side in opposite directions, make revolving assembly cleaning plate 51 clear up the bottom of shower nozzle 11 when subassembly moves to the inside in opposite directions, rethread control delivery port 3 inside electric valve opens, and then make the hydrofluoric acid tail gas of 1 inside collection of processing staving and the mixed liquid of pure water enter into the step of next alkali wash.
Example two
Referring to fig. 1 to 6, the closing assembly includes a first sliding slot 14, a guiding slot 15, a first movable rod 16, a rolling block 17, a connecting plate 18, a supporting rod 19 and a guiding block 21, the inner wall of the first movable slot 8 is provided with the first sliding slot 14 for limiting movement, the guiding slot 15 is provided on the inner wall of the first movable slot 8, the first movable rod 16 is movably connected inside the first movable slot 8, both ends of the first movable rod 16 are rotatably connected with the rolling block 17, the rolling block 17 is rotatably connected inside the first sliding slot 14, both ends of the first movable rod 16 are fixedly connected with the connecting plate 18 for stabilization, the outer wall of the first movable rod 16 and the inner side close to the connecting plate 18 are rotatably connected with the supporting rod 19 for pushing and pulling, the bottom of the supporting rod 19 is fixedly connected with the top of the protecting block 20 through a bolt, the outer wall of the protecting block 20 is fixedly connected with the guiding block 21 for guiding, the guide block 21 is slidably coupled inside the guide groove 15.
The transmission component comprises an electric contact groove 13, a second electric telescopic rod 22, a fixed frame 23, a movable opening 24, a slot 25, a first spring 26, a second movable rod 27 and a first electric contact plate 28, the electric contact groove 13 for circuit control is arranged on the outer wall of the spray head 11, the electric contact groove 13 is electrically connected with the second electric telescopic rod 22, the inner wall of the first movable groove 8 is fixedly connected with the second electric telescopic rod 22 for pushing, the output end of the second electric telescopic rod 22 is fixedly connected with the first movable rod 16, the fixed frame 23 for supporting is fixedly connected with the inner part of the first movable groove 8, the movable opening 24 penetrates through the inner side of the fixed frame 23, the slot 25 is arranged on the inner side of the fixed frame 23, the first spring 26 is fixedly connected on the outer side of the fixed frame 23, the second movable rod 27 for moving is fixedly connected on the outer side of the first spring 26, the inner side end of the second movable rod 27 is movably connected in the slot 25, a first electrical contact plate 28 for circuit control is fixedly connected to the inner side of the second movable bar 27.
In operation, at the same time, when the bottom of the nozzle 11 moves to a level higher than the protection block 20, the electrical contact groove 13 and the first electrical contact plate 28 abut against each other, and meanwhile, in the process of abutting the electrical contact groove 13 and the first electrical contact plate 28 against each other, the first electrical contact plate 28 moves towards the inside of the open groove 25, the open groove 25 drives the movable opening 24 to move towards the outside inside of the movable opening 24 and stretches the first spring 26, at the same time, under the action of the reverse compression force of the first spring 26, the second movable rod 27 drives the first electrical contact plate 28 to tightly abut against the electrical contact groove 13, and meanwhile, because the first electrical contact plate 28 is in telecommunication connection with the equipment use power supply, the electrical contact groove 13 is powered on, the electrical contact groove 13 is electrically connected with the second electrical telescopic rod 22, so that the second electrical telescopic rod 22 is powered on, and after the second electrical telescopic rod 22 is powered on, the first movable rod 16 extends to move towards the inside of the first sliding groove 14 through the rolling block 17, first movable rod 16 drives connecting plate 18 and moves to the inboard, connecting plate 18 drives protection piece 20 through bracing piece 19 and moves to the inboard, protection piece 20 moves to the inboard time downstream through guide block 21 under the gliding effect in inside of guide way 15, and then make protection piece 20 block up water jet 9, prevent to handle the inside unnecessary hydrofluoric acid tail gas of 1 inside of staving and enter into the inside of first movable groove 8, and then can prevent that hydrofluoric acid tail gas from corroding the inside spare part of equipment, reduce because the unable problem of moving of equipment that causes behind hydrofluoric acid tail gas entering equipment inside.
EXAMPLE III
Referring to fig. 7 to 9, the control assembly includes a slide 4, a slide 5, a hollow floating block 6, a second movable groove 31, a second electric contact plate 32, an electric contact block 33 and a contact rod 34, the slide 4 is fixedly mounted on the inner wall of the processing barrel 1, the slide 5 is slidably connected inside the slide 4, the hollow floating block 6 for detecting a water level is fixedly mounted on the inner side of the slide 5, the second movable groove 31 for movement is formed inside the top cover 7, the second electric contact plate 32 is electrically connected with a power supply for equipment, the second electric contact plate 32 is fixedly connected to the top of the second movable groove 31, the electric contact block 33 is movably connected inside the second movable groove 31, the electric contact block 33 is electrically connected with the first electric telescopic rod 10, and the contact rod 34 for pushing is fixedly connected to the bottom of the electric contact block 33.
When in work, the hollow floating block 6 moves upwards in the slide way 4 through the slide block 5 under the action of the buoyancy of the mixed liquid of hydrofluoric acid tail gas and pure water, when the water level of the mixed liquid of the hydrofluoric acid tail gas and the pure water reaches a certain height, the contact rod 34 is pushed under the action of the upward movement of the hollow floating block 6, so that the electric contact block 33 moves upwards in the second movable tank 31, when the electrical contact block 33 moves to the top of the second movable tank 31, the electrical contact block 33 is in electrical contact with the second electrical contact plate 32, thereby realizing the detection of the water level inside the processing barrel 1, since the second electrical contact plate 32 is connected to the device for use, and the electrical contact block 33 is electrically connected, since the electrical contact block 33 is electrically connected to the first electrical telescopic rod 10, and then the first electric telescopic rod 10 is powered on, and the first electric telescopic rod 10 drives the spray head 11 to move upwards in the first movable groove 8 after being powered on.
Example four
Referring to fig. 7 to 11, the lifting assembly includes a second spring 36, a movable frame 37, a movable plate 38 and a protrusion 39, the second spring 36 is fixedly connected to the bottom of the third movable groove 35, the movable frame 37 is fixedly connected to the bottom of the second spring 36, the movable frame 37 is movably connected to the inside of the third movable groove 35, the movable plate 38 for lifting is fixedly installed at the top of the movable frame 37, the middle portion of the movable plate 38 is slidably connected to the outer wall of the output end of the first electric telescopic rod 10, and the protrusion 39 is fixedly installed at the lower end of the inner side of the movable frame 37.
The subassembly includes second spout 40 in opposite directions, flange 42, chute 43, slide bar 44 and movable block 45, second spout 40 runs through and sets up in the inside of lug 39, flange 42 fixed connection is in the outer wall of third movable groove 35, chute 43 runs through and sets up the inboard at flange 42, the middle part sliding connection of slide bar 44 is in the inside of second spout 40, slide bar 44's both ends sliding connection is in the inside of chute 43, movable block 45 fixed connection is in the outside of slide bar 44, movable block 45 swing joint is at the outer wall of lug 39.
The rotating assembly comprises a convex tooth 41, a first rotating shaft 46, a gear 47, a third transmission roller 48, a second rotating shaft 49 and a second transmission belt 50, the convex tooth 41 is fixedly connected to the outer wall of the protruding block 39, the first rotating shaft 46 is rotatably connected to the outer side of the movable block 45, the top of the first rotating shaft 46 is fixedly connected with the gear 47 used for rotating, the inner side of the gear 47 is meshed with the convex tooth 41, the third transmission roller 48 is fixedly connected to the bottom of the first rotating shaft 46, the second rotating shaft 49 is rotatably connected to the inner portion of the movable block 45, the top of the second rotating shaft 49 is fixedly connected with the bottom of the cleaning plate 51, and two ends of the second transmission belt 50 are respectively in transmission connection with the outer wall of the third transmission roller 48 and the outer wall of the second rotating shaft 49.
In operation, meanwhile, in the process of moving the spray head 11 upward, after the spray head 11 contacts the movable plate 38, the height of the bottom of the spray head 11 is flush with the height of the upper surface of the cleaning plate 51, and the cleaning plate 51 can be effectively moved to the bottom of the spray head 11, the spray head 11 drives the movable plate 38 to move upward, the movable plate 38 drives the movable frame 37 to move upward inside the third movable groove 35 and compress the second spring 36, the movable frame 37 drives the protrusion 39 to move upward, at this time, the protrusion 39 enables the second sliding groove 40 to interact with the inclined groove 43 to drive the slide rod 44 to move inward, the slide rod 44 drives the movable block 45 to move inward, the movable block 45 drives the gear 47 to move inward, because the gear 47 is meshed with the convex tooth 41, the gear 47 rotates after being matched with the convex tooth 41 in the inward movement process, the gear 47 drives the third driving roller 48 to rotate through the first rotating shaft 46, third driving roller 48 drives second axis of rotation 49 through second drive belt 50 and rotates, second axis of rotation 49 drives protruding tooth 41 rotatoryly, this moment because the inside motion of movable block 45 to the bottom of shower nozzle 11, and then carry out rotatory clearance to the bottom attachment of shower nozzle 11, prevent the corruption that the mixture of hydrofluoric acid tail gas and pure water from attaching to the bottom of shower nozzle 11 and causing, prevent that the shower nozzle 11 from corroding the back appear blockking up and can't spray the problem of atomizing pure water, the equipment is improved effectively and is handled hydrofluoric acid tail gas.
EXAMPLE five
The tail gas treatment method for preparing the electronic-grade hydrofluoric acid is applied to the tail gas treatment device for preparing the electronic-grade hydrofluoric acid, and comprises the following steps of:
1) the uncondensed rectification waste gas and the tail gas of the absorption tank enter the treatment barrel body 1 through the air inlet 2, and the uncondensed rectification waste gas and the tail gas of the absorption tank are washed by atomized pure water sprayed by the spray head 11;
2) the water level height of the collected mixed liquid is detected by enabling the hollow floating block 6 to move upwards in the slide 4 through the sliding block 5 through the mixed liquid of the pure water, the uncondensed rectification waste gas and the tail gas of the absorption tank;
3) after the electric contact block 33 is contacted with the second electric contact plate 32, the first electric telescopic rod 10 drives the spray head 11 to be recovered to the inside of the first movable tank 8, and at the moment, the protection block 20 blocks the water spray opening 9 to prevent redundant uncondensed rectification waste gas and absorption tank tail gas from entering the inside of the first movable tank 8;
4) the movable plate 38 is driven by the spray head 11 to move upwards, so that the cleaning plate 51 and the spray head 11 move upwards synchronously, and the bottom of the spray head 11 is cleaned under the mutual matching action of the gear 47 and the convex teeth 41.
The working principle is as follows: starting equipment, make rectification condensation and absorption hydrofluoric acid tail gas after diluting enter into the inside of processing staving 1 through the inside valve of control air inlet 2, simultaneously because inlet tube 12 is connected with external pure water case, and then make the pure water enter into the inside of shower nozzle 11 through inlet tube 12, rethread shower nozzle 11 erupts the pure water with the atomizing state, through the characteristic that hydrofluoric acid is dissolved in water, and then collect the inside at processing staving 1 after making hydrofluoric acid and pure water mix, at the continuous in-process of spraying water, the water level of the mixed liquid of the inside hydrofluoric acid tail gas of processing staving 1 and pure water rises gradually, make hollow floating block 6 pass through slider 5 at the inside upward movement of slide 4 under the effect of the mixed liquid of hydrofluoric acid tail gas and pure water buoyancy, when the water level of the mixed liquid of inside hydrofluoric acid tail gas and pure water reaches certain height, promote contact lever 34 under the effect of hollow floating block 6 upward movement this moment makes electric contact block 33 in the inside of second movable trough 31 to the inside of second movable trough 31 Go up the motion, when electric touch multitouch 33 moves the top of second movable tank 31, electric touch multitouch 33 and second electric touch panel 32 electric contact, and then realize the detection effect to handling 1 inside water level of staving, because second electric touch panel 32 is connected with equipment usage, and then make electric touch multitouch 33 circular telegram, because electric touch multitouch 33 and 10 electric connection of first electric telescopic handle, and then make 10 circular telegrams of first electric telescopic handle, drive shower nozzle 11 at the inside upward movement of first movable tank 8 after 10 circular telegrams of first electric telescopic handle.
Meanwhile, when the bottom of the nozzle 11 moves to a level higher than the protection block 20, the electrical contact groove 13 and the first electrical contact plate 28 are abutted against each other, and meanwhile, in the process that the electrical contact groove 13 and the first electrical contact plate 28 are abutted against each other, the first electrical contact plate 28 moves towards the inside of the open groove 25, the open groove 25 drives the movable port 24 to move towards the outside in the movable port 24 and stretches the first spring 26, meanwhile, under the action of the reverse compression force of the first spring 26, the second movable rod 27 drives the first electrical contact plate 28 to be tightly abutted against the electrical contact groove 13, and meanwhile, because the first electrical contact plate 28 is in telecommunication connection with the equipment use power supply, the electrical contact groove 13 is electrified, the electrical contact groove 13 is electrically connected with the second electrical contact 22, so that the second electrical telescopic rod 22 is electrified, the second electrical telescopic rod 22 is electrified and then extends to enable the first movable rod 16 to move towards the inside of the first sliding groove 14 through the rolling block 17, first movable rod 16 drives connecting plate 18 and moves to the inboard, connecting plate 18 drives protection piece 20 through bracing piece 19 and moves to the inboard, protection piece 20 moves to the inboard time downstream through guide block 21 under the gliding effect in inside of guide way 15, and then make protection piece 20 block up water jet 9, prevent to handle the inside unnecessary hydrofluoric acid tail gas of 1 inside of staving and enter into the inside of first movable groove 8, and then can prevent that hydrofluoric acid tail gas from corroding the inside spare part of equipment, reduce because the unable problem of moving of equipment that causes behind hydrofluoric acid tail gas entering equipment inside.
Meanwhile, in the process of moving the spray head 11 upwards, after the spray head 11 contacts the movable plate 38, the height of the bottom of the spray head 11 is flush with the height of the upper surface of the cleaning plate 51, so that the cleaning plate 51 can be effectively moved to the bottom of the spray head 11, the movable plate 38 is driven to move upwards by the spray head 11, the movable plate 38 drives the movable frame 37 to move upwards in the third movable groove 35 and compress the second spring 36, the movable frame 37 drives the projection 39 to move upwards, the projection 39 enables the second sliding groove 40 to interact with the inclined groove 43 to drive the slide rod 44 to move inwards, the slide rod 44 drives the movable block 45 to move inwards, the movable block 45 enables the gear 47 to move inwards, because the gear 47 is meshed with the convex teeth 41, the gear 47 rotates after being matched with the convex teeth 41 in the process of moving inwards, the gear 47 drives the third transmission roller 48 to rotate through the first rotation shaft 46, third driving roller 48 drives second axis of rotation 49 through second drive belt 50 and rotates, second axis of rotation 49 drives protruding tooth 41 rotatoryly, this moment because the inside bottom of shower nozzle 11 that moves to of movable block 45, and then the bottom attachment to shower nozzle 11 carries out rotatory clearance, prevent the corrosion that the matter of hydrofluoric acid tail gas and pure water attached to the bottom of shower nozzle 11 and caused, prevent that the shower nozzle 11 from corroding the back appear blockking up and can't spray the problem of atomizing pure water, the equipment is improved effectively and is handled hydrofluoric acid tail gas.
Meanwhile, an electric valve in the water outlet 3 is controlled to be opened, so that the mixed liquid of hydrofluoric acid tail gas and pure water collected in the treatment barrel body 1 enters the next alkali washing step.
It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other elements in processes, methods, articles, or devices that comprise the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a tail gas processing apparatus that electronic grade hydrofluoric acid prepared for, includes processing staving (1), its characterized in that: an air inlet (2) and a water outlet (3) for air inlet and water drainage are formed in the outer side of the treatment barrel body (1), a top cover (7) is fixedly installed at the top of the treatment barrel body (1), a first movable groove (8) for mechanical operation is formed in the top cover (7), a water spray nozzle (9) for water spray is formed in the bottom of the first movable groove (8), a first electric telescopic rod (10) for lifting motion is fixedly connected to the top of the first movable groove (8), a spray head (11) for water spray is fixedly connected to the output end of the bottom of the first electric telescopic rod (10), a water inlet pipe (12) for water inlet is formed in the top of the spray head (11), a protection block (20) for protection is arranged in the first movable groove (8), a closing assembly and a transmission assembly are symmetrically arranged in the first movable groove (8), the inside of handling staving (1) is provided with the control assembly who is used for detecting, third activity groove (35) have been seted up to the inside in first activity groove (8), the inside in third activity groove (35) is provided with clearance mechanism, clearance mechanism includes lifting subassembly, subassembly rotating assembly in opposite directions, the inboard in third activity groove (35) is provided with clearance board (51) that are used for the clearance.
2. The apparatus of claim 1, wherein the apparatus comprises: the closing assembly comprises a first sliding groove (14), a guide groove (15), a first movable rod (16), rolling blocks (17), a connecting plate (18), a supporting rod (19) and a guide block (21), the first sliding groove (14) used for limiting movement is formed in the inner wall of the first movable groove (8), the guide groove (15) is formed in the inner wall of the first movable groove (8), the first movable rod (16) is movably connected inside the first movable groove (8), the rolling blocks (17) are rotatably connected to the two ends of the first movable rod (16), the rolling blocks (17) are rotatably connected inside the first sliding groove (14), the connecting plate (18) used for stabilizing is fixedly connected to the two ends of the first movable rod (16), the supporting rod (19) used for pushing and pulling is rotatably connected to the outer wall of the first movable rod (16) and the inner side, close to the connecting plate (18), the bottom of bracing piece (19) passes through bolt fixed connection with the top of protection piece (20), the outer wall fixedly connected with of protection piece (20) is used for guide's guide block (21), guide block (21) sliding connection is in the inside of guide way (15).
3. The apparatus of claim 2, wherein the apparatus comprises: the transmission assembly comprises an electric contact groove (13), a second electric telescopic rod (22), a fixing frame (23), a movable port (24), a groove (25), a first spring (26), a second movable rod (27) and a first electric contact plate (28), the electric contact groove (13) for circuit control is formed in the outer wall of the spray head (11), the second electric telescopic rod (22) used for pushing is fixedly connected to the inner wall of the first movable groove (8), the output end of the second electric telescopic rod (22) is fixedly connected with the first movable rod (16), the fixing frame (23) used for supporting is fixedly connected to the inner part of the first movable groove (8), the movable port (24) penetrates through the inner side of the fixing frame (23), the groove (25) is formed in the inner side of the fixing frame (23), and the first spring (26) is fixedly connected to the outer side of the fixing frame (23), the outer side of the first spring (26) is fixedly connected with a second movable rod (27) used for moving, the inner side end of the second movable rod (27) is movably connected inside the groove (25), and the inner side of the second movable rod (27) is fixedly connected with a first electric touch plate (28) used for circuit control.
4. The apparatus of claim 3, wherein the apparatus comprises: control assembly includes slide (4), slider (5), hollow floating block (6), second activity groove (31), second electricity touch panel (32), electric touch block (33) and contact bar (34), slide (4) fixed mounting is at the inner wall of handling staving (1), slider (5) sliding connection is in the inside of slide (4), the inboard fixed mounting of slider (5) has hollow floating block (6) that are used for detecting the water level, second activity groove (31) that are used for the activity are seted up to the inside of top cap (7), second electricity touch panel (32) fixed connection is at the top in second activity groove (31), electricity touch block (33) swing joint is in the inside in second activity groove (31), the bottom fixedly connected with of electricity touch block (33) is used for contact bar (34) that promote.
5. The apparatus of claim 1, wherein the apparatus comprises: the lifting assembly comprises a second spring (36), a movable frame (37), a movable plate (38) and a convex block (39), the second spring (36) is fixedly connected to the bottom of a third movable groove (35), the movable frame (37) is fixedly connected to the bottom of the second spring (36), the movable frame (37) is movably connected to the inside of the third movable groove (35), the movable plate (38) for lifting is fixedly mounted at the top of the movable frame (37), the middle of the movable plate (38) is slidably connected to the outer wall of the output end of the first electric telescopic rod (10), and the convex block (39) is fixedly mounted at the inner lower end of the movable frame (37).
6. The apparatus of claim 5, wherein the apparatus comprises: the subassembly includes second spout (40), flange (42), chute (43), slide bar (44) and movable block (45) in opposite directions, second spout (40) run through the inside of seting up at lug (39), flange (42) fixed connection is at the outer wall of third movable groove (35), chute (43) run through the inboard of seting up at flange (42), the middle part sliding connection of slide bar (44) is in the inside of second spout (40), the both ends sliding connection of slide bar (44) is in the inside of chute (43), movable block (45) fixed connection is in the outside of slide bar (44), movable block (45) swing joint is at the outer wall of lug (39).
7. The apparatus of claim 6, wherein the apparatus comprises: the rotating component comprises convex teeth (41), a first rotating shaft (46), a gear (47), a third driving roller (48), a second rotating shaft (49) and a second driving belt (50), the convex teeth (41) are fixedly connected with the outer wall of the convex block (39), the first rotating shaft (46) is rotatably connected with the outer side of the movable block (45), the top of the first rotating shaft (46) is fixedly connected with a gear (47) for rotation, the inner side of the gear (47) is meshed with the convex teeth (41), the third driving roller (48) is fixedly connected to the bottom of the first rotating shaft (46), the second rotating shaft (49) is rotatably connected inside the movable block (45), the top of the second rotating shaft (49) is fixedly connected with the bottom of the cleaning plate (51), and two ends of the second transmission belt (50) are respectively in transmission connection with the outer wall of the third transmission roller (48) and the outer wall of the second rotating shaft (49).
8. The apparatus of claim 1, wherein the apparatus comprises: the gas inlet (2) is communicated with both the rectification condensing device and the absorption diluting device, the water outlet (3) is communicated with the hydrofluoric acid alkali washing device, automatic control valves for controlling the inlet and the outlet are arranged inside the gas inlet (2) and the water outlet (3), and the water inlet pipe (12) is connected with an external pure water tank.
9. The apparatus of claim 4, wherein the apparatus comprises: the electric contact groove (13) is electrically connected with the second electric telescopic rod (22), the first electric contact plate (28) is electrically connected with the equipment power supply, the second electric contact plate (32) is electrically connected with the equipment power supply, the electric contact block (33) is electrically connected with the first electric telescopic rod (10), and the internal structure of the equipment is coated with a lead material.
10. An exhaust gas treatment method for preparing electronic-grade hydrofluoric acid, which is applied to the exhaust gas treatment device for preparing electronic-grade hydrofluoric acid according to any one of claims 1-9, wherein the method comprises the following steps: the method comprises the following steps
1) Uncondensed rectification waste gas and tail gas of an absorption tank enter the treatment barrel body (1) through the air inlet (2), and the uncondensed rectification waste gas and the tail gas of the absorption tank are washed by atomized pure water sprayed by the spray head (11);
2) The water level height of the collected mixed liquid is detected by enabling the hollow floating block (6) to move upwards in the slide way (4) through the sliding block (5) through the mixed liquid of pure water, uncondensed rectification waste gas and tail gas of the absorption tank;
3) after the electric contact block (33) is contacted with the second electric contact plate (32), the first electric telescopic rod (10) drives the spray head (11) to be recovered into the first movable groove (8), and at the moment, the protection block (20) blocks the water spray opening (9) to prevent redundant uncondensed rectification waste gas and absorption groove tail gas from entering the first movable groove (8);
4) the movable plate (38) is driven to move upwards through the spray head (11), so that the cleaning plate (51) and the spray head (11) synchronously move upwards, and the bottom of the spray head (11) is cleaned under the mutual matching action of the gear (47) and the convex teeth (41).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210428854.4A CN114748983B (en) | 2022-04-22 | 2022-04-22 | Tail gas treatment device and treatment method for preparing electronic-grade hydrofluoric acid |
| PCT/CN2022/118385 WO2023201972A1 (en) | 2022-04-22 | 2022-09-13 | Tail gas treatment device and treatment method for use in preparation of electronic-grade hydrofluoric acid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210428854.4A CN114748983B (en) | 2022-04-22 | 2022-04-22 | Tail gas treatment device and treatment method for preparing electronic-grade hydrofluoric acid |
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| Publication Number | Publication Date |
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| CN114748983A true CN114748983A (en) | 2022-07-15 |
| CN114748983B CN114748983B (en) | 2023-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210428854.4A Active CN114748983B (en) | 2022-04-22 | 2022-04-22 | Tail gas treatment device and treatment method for preparing electronic-grade hydrofluoric acid |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN114748983B (en) |
| WO (1) | WO2023201972A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116020230A (en) * | 2023-02-28 | 2023-04-28 | 福建德尔科技股份有限公司 | Waste gas recycling device for hexafluoroethane |
| CN116173574A (en) * | 2022-12-19 | 2023-05-30 | 福建天甫电子材料有限公司 | Waste liquid recycling device for electronic grade hydrofluoric acid preparation |
| WO2023201972A1 (en) * | 2022-04-22 | 2023-10-26 | 福建龙氟化工有限公司 | Tail gas treatment device and treatment method for use in preparation of electronic-grade hydrofluoric acid |
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| CN105363333A (en) * | 2015-11-20 | 2016-03-02 | 太仓市振锋化工设备有限公司 | Polypropylene acid mist absorption tower |
| CN205361713U (en) * | 2015-12-15 | 2016-07-06 | 重庆亘宇园林景观工程有限公司 | Gardens are with flexible shower nozzle device |
| CN212582588U (en) * | 2020-05-07 | 2021-02-23 | 江苏城铭工程项目管理有限公司 | Ecological bank protection of hydraulic engineering |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2023201972A1 (en) | 2023-10-26 |
| CN114748983B (en) | 2023-01-20 |
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Address after: 364200 No. 9, Gongye Road, Pingpu village, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province Applicant after: Fujian Longfu New Material Co.,Ltd. Address before: 364200 No. 9, Gongye Road, Pingpu village, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province Applicant before: FUJIAN LONGFU CHEMICAL Co.,Ltd. |
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