CN114739462B

CN114739462B - Interactive device

Info

Publication number: CN114739462B
Application number: CN202210481933.1A
Authority: CN
Inventors: 谢明哲
Original assignee: BOE Technology Group Co Ltd
Current assignee: BOE Technology Group Co Ltd
Priority date: 2022-05-05
Filing date: 2022-05-05
Publication date: 2024-04-05
Anticipated expiration: 2042-05-05
Also published as: WO2023213273A1; CN114739462A

Abstract

The present invention relates to an interaction device. The interaction device comprises a substrate and a plurality of device arrays arranged on the substrate; each device array comprises a plurality of device units arranged in an array and a wire for connecting the device units into a net shape; each device cell in each device array is located within a cell defined by traces in the other one or more device arrays, and the traces between adjacent device cells in each device array are insulated at intersections of the traces in the other device arrays. On the basis of setting the first device array, the interactive device sets the device units of the second device array in the unit cells of the first device array, so that two device arrays are simultaneously set on the interactive device. According to a similar arrangement mode, a third device array and other device arrays can be similarly arranged in sequence, so that the arrangement density of device units in the interaction device can be improved, and better and higher interaction effects are achieved.

Description

Interactive device

Technical Field

The invention relates to the technical field of interaction of information, energy and the like, such as sensing external information, transmitting and receiving information to the external world, receiving and storing energy from the external world, releasing energy to the internal world or the external world and the like, in particular to an interaction device.

Background

The electronic skin can simulate, restore and even replace the skin of a human body, has the same feeling and touch as the skin of the human body, and can sense various information such as different external pressure and temperature. The electronic skin can be applied to the medical field, the intelligent anthropomorphic robot field, and the like.

In the disclosed electronic skin, the electronic skin consists of a plurality of electronic sense units arranged on a flexible substrate, wherein the main body of each electronic sense unit is an active field effect transistor which takes a resistor as a load and adopts a common source connection method, and the touch sense force measuring function, the temperature sense temperature measuring function and the distance sense distance measuring function can be simultaneously realized.

The existing electronic skin has the problems of low information induction sensitivity to the outside, few information types which can be inducted and the like.

Disclosure of Invention

The invention provides an interaction device, which solves the technical problems of low sensitivity, few inductable information types and the like of the interaction device such as electronic skin and the like in the prior art.

The invention provides an interaction device, which comprises a substrate and a plurality of device arrays arranged on the substrate; each device array comprises a plurality of device units arranged in an array manner and a wire for connecting the device units into a net shape; each device cell in each device array is located within a cell defined by traces in the other one or more device arrays, and the traces between adjacent device cells in each device array are insulated at intersections of the traces in the other device arrays.

Each device unit is one of a deformation sensor, a pressure sensor, a temperature sensor, a humidity sensor, a light emitting device, an energy storage unit, a power generation unit and a communication unit.

In each device array, the plurality of device units are the same in type; alternatively, at least one device cell is of a different type than the other device cells.

Wherein the device units in the plurality of device arrays are of the same kind; alternatively, the device cell types in at least one device array are different from the device cell types in other device arrays.

Wherein the substrate is a deformable material.

Wherein the substrate is made of styrene-ethylene-butylene-styrene block copolymer, polydimethylsiloxane or polyimide.

The substrate is provided with a non-deformation region, and the non-deformation region comprises an area where the device unit is located.

In each device array, a plurality of device units are arranged in a plurality of rows and columns and are arranged in a matrix; the distance between the non-deformation regions where adjacent device cells are located in the row direction and/or the column direction is 100-200 micrometers.

In each device array, the non-deformation area where each device unit is located is a regular octagon; the length of the side of the non-deformation region where each device cell is located is 50-150 microns.

In each device array, at least a first interval is arranged on a wire between two adjacent device units, and the shape of the wire is nonlinear in the first interval.

The wiring shape in the first section is a curve, or a multi-section line, or a folding wiring formed by reciprocally extending along a specific direction.

In each device array, wires connecting two adjacent device units and wires separating cells where the two device units are located have one and only one intersection.

Wherein, the device arrays are positioned on different layers, and an isolation layer is arranged between each device array and other device arrays; alternatively, at least two device arrays are located in the same layer, at the intersection of the wires of the device arrays located in the same layer, one of the wires passes under or over the other wire, and an isolation portion is provided at the intersection of the wires.

The interaction device comprises a first substrate and a second substrate, wherein the plurality of device arrays are formed on the first surface side of the first substrate and the second substrate, and the second surface sides of the first substrate and the second substrate are connected.

Wherein each device unit is located at the center of the located cell.

The wiring of each device array is single-layer or multi-layer, and the material of each layer comprises any one of gold, aluminum, silver, ITO and PEDOT.

Wherein the interaction means comprises a protective layer formed over the array of devices; the material of the protective layer is at least one of silicon nitride, silicon oxide, polyimide and acrylic.

Wherein the interaction device is an electronic skin.

Compared with the prior art, the interaction device provided by the embodiment of the invention has the following advantages:

according to the interaction device provided by the invention, on the basis of setting the first device array, the device units of the second device array are arranged in the unit cells formed by the wiring of the first device array, meanwhile, the wiring of the second device array spans the wiring of the first device array, and the wiring of the second device array and the wiring of the first device array are arranged at the intersection in an insulating manner, so that the two device arrays are simultaneously arranged on the interaction device, and the interference of signals generated between the first device array and the second device array is avoided. According to the setting mode of the second device array, a plurality of device arrays such as a third device array and a fourth device array can be similarly and sequentially set, so that the plurality of device arrays can be installed on the interaction device, the setting density of device units in the interaction device is improved, and better and higher interaction effects are achieved. For example, when detecting external information such as temperature, humidity, pressure, etc., higher detection sensitivity and accuracy can be obtained; when the light is emitted or information is displayed, higher light-emitting brightness, higher display resolution and higher definition can be obtained; when information communication is carried out, better communication quality and effect can be obtained; when power generation is performed, larger power generation amount can be obtained; more energy can be stored when the energy is stored.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.

In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, and it will be obvious to a person skilled in the art that other drawings can be obtained from these drawings without inventive effort.

FIG. 1 is a schematic diagram of an interaction device in an embodiment of the present invention;

FIG. 2 is a schematic diagram of an interaction apparatus having two device arrays;

FIG. 3 is a schematic diagram of an interaction apparatus having three device arrays;

FIG. 4 is a schematic diagram of the relative relationship of device units of different device arrays;

FIG. 5 is a schematic diagram of a first arrangement in which different device arrays are arranged in different layers;

FIG. 6 is a schematic diagram of a second arrangement in which different device arrays are arranged in different layers;

FIG. 7 is a schematic diagram of a first arrangement in which different device arrays are arranged in the same layer;

FIG. 8 is a schematic diagram of a second arrangement in which different device arrays are arranged in the same layer;

FIG. 9 is a schematic diagram of an interactive device with dual substrates.

In the figure:

10-substrate; 11-a first substrate; 12-a second substrate; 13-an adhesive layer;

20. 20a, 20b, 20 c-arrays of devices; 21. 21a, 21b1, 21b2, 21 c-device units; 22. 22a, 22a1, 22b1, 22 c-traces; 23-a protective layer;

BA. BA1, BA2, MA, SA-cell.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Embodiments of the interaction device provided by the invention are described below with reference to the accompanying drawings.

In this embodiment, the interaction device is used for interacting information and/or energy with the outside world. Specifically, for example, various information such as temperature, humidity, air pressure and the like of the outside is sensed and detected, light energy such as solar energy of the outside is converted into electric energy, the electric energy is transferred and converted to the outside, light rays are emitted to the outside for lighting or displaying information, signals are acquired from the outside, signals are sent to the outside, and the like for information transfer. The interaction device in this embodiment may appear as a product form such as electronic skin.

Referring to fig. 1 and 2, the interaction apparatus provided in this embodiment includes a substrate 10 and a plurality of device arrays 20 disposed on the substrate 10. Each device array 20 includes a plurality of device units 21 arranged in an array, and wirings 22 connecting the plurality of device units 21 in a mesh shape.

In the present embodiment, each device unit 21 is one of a deformation sensor, a pressure sensor, a temperature sensor, a humidity sensor, a light emitting device, an energy storage unit, a power generation unit, and a communication unit. The deformation sensor can detect the deformation of the interaction device; the pressure sensor can detect the external air pressure and the external hydraulic pressure, or directly act on the contact pressure of the interaction device, and the like; the temperature sensor can detect the temperature of an external object in a contact or non-contact mode; the light emitting devices can emit light to the outside for illumination, or the light emitting devices can be arranged in an array, and various information such as characters, pictures and the like can be displayed by controlling the on and off of different light emitting devices; the energy storage unit can receive and store energy from the inside or the outside to supply the energy to the inside or the outside object, for example, the energy storage unit directly obtains and stores electric energy from the outside, or receives and stores electric energy from the inside power generation unit, and the stored electric energy can be supplied to other device units 21 inside the interaction device or output to the outside; the power generation unit may receive external light energy or convert other energy sources into electric energy in a photoelectric conversion manner, for example, and the converted electric energy may be stored by the energy storage power supply; the communication unit may send signals to the outside and/or receive signals from the outside etc.

The plurality of device units 21 arranged in an array may be the same type of device as described above, or may be different types of devices, respectively, for one device array 20. In the case where the plurality of device units 21 in one device array 20 are all of the same type of device, for example, are all pressure sensors, a higher pressure detection sensitivity can be obtained at this time. When the plurality of device units 21 in one device array 20 are different types of devices, each device unit 21 may be different from the other device units 21 in kind, that is, two device units 21 of the same kind are not present in one device array 20; it is also possible that some of the device units 21 are of the same kind of device, while one or more of the device units 21 are of a different kind than the other device units 21. For example, in a device array 20 including not only a pressure sensor but also a temperature sensor, a humidity sensor, a light emitting device, a power generation unit, and the like, the device array 20 can realize more functions.

For multiple device arrays 20 in the interacting device, the device units 21 in different device arrays 20 may all be of the same kind; similar to the above, this arrangement can achieve higher sensitivity and accuracy in a certain function. Of course, there may be at least one device array 20 in which the device cells 21 are of a different type than the device cells 21 in the other device arrays 20.

In the structure shown in fig. 2, the wirings 22 connected between the four device units 21 may enclose one quadrangular unit cell (more specifically, rectangular) and one device array 20 includes the above-described plurality of unit cells. In other embodiments of the interaction means, each cell may also be of other shapes, such as triangles, pentagons or more polygons, while the shape of the cells comprised in one device array 20 is also not limited to one shape, and may comprise a combination of shapes.

Each device cell 21 in each device array 20 is located within a cell defined by a trace 22 in the other device array or arrays 20, and the trace 22 between adjacent device cells 21 in each device array 20 is insulated at intersections with the traces 22 in the other device arrays 20.

In the case of an interacting device having two device arrays 20, as illustrated in fig. 2, the sum trace 22a of the first device array 20a forms a plurality of cells BA, which are the largest cells in the interacting device illustrated in fig. 2, and the device units 21a of the first device array 20a are located at nodes at corners of the cells BA. Each device cell 21b of the second device array 20b is disposed within the cell BA formed solely by the trace 22a of the first device array 20 a. Meanwhile, in the second device array 20b, the wiring 22b connected to the device unit 21b located in one cell BA divides the cell BA into four small cells SA, which is the smallest cell in the interaction apparatus shown in fig. 2.

In the case of an interacting device having three or more device arrays 20, taking the example that the number of device arrays 20 is three, in connection with the embodiment shown in fig. 3, the trace 22a of the first device array 20a forms a plurality of cells BA, which is the largest cell in the interacting device shown in fig. 3, the device units 21a of the first device column 20a being located at the nodes at the corners of the cells BA. Each device cell 21b of the second device array 20b is disposed within the cell BA formed solely by the trace 22a of the first device array 20 a. Meanwhile, in the second device array 20b, the trace 22b connected to the device unit 21b located in one cell BA cuts the cell BA into four smaller cells MA, which are slightly smaller than the cell BA in the interaction device shown in fig. 3, but are not the smallest cells in the interaction device shown in fig. 3. Each cell MA is formed by the trace 22a of the first device array 20a and the trace 22b of the second device array 20b together. Each device cell 21c of the third device array 20c is disposed within the cell MA formed by the trace 22a of the first device array 20a and the trace 22b of the second device array 20 b. Meanwhile, in the third device array 20c, the trace 22c connected to the device unit 21c located in one cell MA divides the cell MA into four smaller cells SA, which are the smallest cells in the interacting device shown in fig. 3. The smallest unit cell SA is formed by a combination of two or three of the wirings 22a, 22b, and 22 c.

In fig. 3, the device units 21 in the three device arrays 20a, 20b, 20c are represented in different shapes for convenience of distinction, and do not represent that the kinds of the device units 21 in the three device arrays 20a, 20b, 20c are necessarily different. Meanwhile, in fig. 3, each trace 22 is shown as a straight line for simplicity, but in practice the trace 22 may be of various shapes as will be described later.

In the embodiment shown in fig. 2 described above, the trace 22b of the second device array 20b divides each cell BA into four substantially equal cells SA. In the embodiment shown in fig. 3, the traces 22b of the second device array 20b divide each cell BA into four cells MA that are approximately equal; each cell MA houses one device unit 21c, and the trace 22c connected to the device unit 21c divides the cell MA into four cells SA that are substantially equal. It should be noted that the above arrangement does not constitute a limitation of the embodiments of the present invention, and in implementing the solution of the present invention, each large cell may be divided into four or other numbers of smaller cells, and in these smaller cells of unequal size, the device unit 21 is not necessarily provided in each of the cells, for example, the device unit may be provided only in the cell of larger area.

According to the interaction device provided by the embodiment, on the basis of setting the first device array 20, the device units 21 of the second device array 20 are set in the unit cells formed by the wires 22 of the first device array 20, meanwhile, the wires 21 of the second device array 20 cross the wires 21 of the first device array 20, and the wires 21 of the second device array and the wires 21 of the first device array are arranged in an insulating manner at the intersection, so that the two device arrays 20 are simultaneously set on the interaction device, and signal interference between the first device array 20 and the second device array 20 is avoided. According to the above-mentioned arrangement manner of the second device array 20, a plurality of third device arrays 20, fourth device arrays and the like can be sequentially arranged similarly, so that more device arrays 20 can be installed on the interaction device, the arrangement density of the device units 21 in the interaction device is improved, and better and higher interaction effects are achieved. For example, when detecting external information such as temperature, humidity, pressure, etc., higher detection sensitivity and accuracy can be obtained; when the light is emitted or information is displayed, higher light-emitting brightness, higher display resolution and higher definition can be obtained; when information communication is carried out, better communication quality and effect can be obtained; when power generation is performed, larger power generation amount can be obtained; more energy can be stored when the energy is stored.

In this embodiment, the substrate 10 may be a deformable material. The substrate 10 made of the deformation material can deform or deform freely to a certain extent under the action of external force, so that when the deformation material is applied to products such as electronic skin and the like, the deformation material can meet the requirements of the products for changing between different states and having various forms. Specifically, the substrate 10 is made of styrene-ethylene-butylene-styrene block copolymer (SEBS, styrene Ethylene Butylene Styrene), polydimethylsiloxane (PDMS), or Polyimide (PI).

In one embodiment, the substrate 10 has a non-deformed region thereon, which includes the region where the device unit 21 is located. The device unit 21 is arranged in a non-deformation area on the substrate 10, so that the device unit 21 can be prevented from being interfered and damaged by normal operation and function realization of the device unit 21 when the substrate 10 deforms under the action of external force, and the device unit 21 can be ensured to normally operate.

The non-deformation region provided on the substrate 10 may be achieved by performing a specific process treatment on the surface of the substrate 10 made of a deformable material such as an elastic material. By performing surface process treatment on the elastic material, the elastic modulus of the surface is reduced, so that the formed non-deformed region maintains the surface morphology of the region where the substrate 10 is in a deformed state such as stretching, extrusion, deformation, twisting, etc., which is a known prior art and will not be described again.

Referring to fig. 4, in combination with fig. 2 and 3 described above, for each device array 20, a plurality of device cells 21 are arranged in a plurality of rows and columns in a matrix arrangement. The distance L2 between non-deformed regions where adjacent device cells are located in the row direction, or in the column direction, or in both the row and column directions, may be 100 to 200 micrometers. In each device array 20, the non-deformation region where each device unit 21 is located may be a regular octagon; the length L1 of the side of the non-deformation region where each device unit 21 is located may be 50 to 150 μm, and the side of the length L1 may be used for connecting the traces 22.

Referring to fig. 2, 3 and 4, each device cell 21 may be located at the center of the cell. When the substrate 10 is a deformable elastic substrate and the product form of the interaction device is an electronic skin, the arrangement is convenient to design the elastic deformation amplitude of each area on the substrate 10 so as to meet the requirements under different deformation states and prevent the substrate 10 from being damaged. However, in other embodiments, each device unit 21 may not be located in the center of the cell.

In one embodiment, in each device array 20, the trace 22 between two adjacent device units 21 has at least a first section, and in the first section, the shape of the trace 22 is nonlinear.

As shown in fig. 2, the node M and the node N are located in a segment (between the two device units 21) of the trace 22, and the entire segment is not linear between the node M and the node N, and the trace 22 has a folded trace that extends in a certain direction and is folded back and forth in a partial section of the segment. When the substrate 10 is deformed by an external force, the partially folded trace may be pulled to be unfolded, so that an effective connection between the two device units 21 may be maintained in the deformed state. In particular, the tracks 22 may be made of a material having a certain ductility, so that the tracks 22, by their own ductility, better and more reliable in the case of being pulled by external forces, achieve an effective connection between the device units 21.

In other embodiments, the trace shape in the first section (for example, the section between the node M and the node N) is a curve, or a multi-segment line, or a folded trace formed by reciprocally extending along a specific direction. Generally, as long as the trace 22 in the first section is not a straight line structure, when an external force is applied, the trace 22 can provide a certain extensible space by being pulled and converted into a straight line, and when the deformation amplitude of the substrate 10 does not exceed the extensible amplitude range, the effective connection between the two device units 21 is ensured.

In each device array 20, there is one and only one intersection between the trace 22 connecting between two adjacent device units 21 and the trace 22 separating the cells where the two device units 21 are located. As shown in fig. 2, fig. 2 includes cells BA1 and BA2. The track 22a1 is a common side of the two cells BA1, BA2, i.e. the track separating the two cells BA1, BA2. The device units 21b1 and 21b2 are provided in the cells BA1 and BA2, respectively, and the wiring 22b1 is a wiring connecting the two device units 21b1 and 21b 2. As can be seen in fig. 2, there is only one intersection between trace 22b1 and trace 22a 1. This arrangement helps to simplify the structure between the traces 22 and more conveniently achieve intersection and insulation of the two. In this embodiment, in order to achieve this, a folded trace structure as shown in fig. 2 is not provided at the intersection of two traces 22, and at the intersection of two traces 22, each trace 22 may have a straight line shape or an arc shape, and as shown in fig. 2, is preferably straight line shape.

At the intersection of the two wires 22, the shape of each wire 22 is not set to be a folding wire structure, and the deformation of the wires 22 and the substrate 10 can be limited at the intersection area of the wires 22, so that the deformation of the wires 22 and the substrate 10 is prevented from adversely affecting the area where the wires 22 are connected, and the structure of the connection of the wires 22 is destroyed.

Referring to fig. 1, the interacting means includes a protective layer 23, the protective layer 23 being formed over the device array 20; the material of the protective layer 23 is one or a combination of more of silicon nitride, silicon oxide, polyimide and acrylic. The protective layer 23 may isolate the device array 20 from other structures and the outside world while also providing protection to the device array 20.

In one embodiment, the plurality of device arrays 20 are located in different layers, with an isolation layer disposed between each device array 20 and the other device arrays 20. The isolation layer may be in the form of a layer of the substrate 10 or may be in the form of a layer of the protective layer 23, as shown in fig. 5 and 6, respectively.

In another embodiment, at least two device arrays 20 of the interaction means are located on the same layer (in case the number of device arrays 20 is more than three, it may be that all device arrays 20 are located on the same layer), and at the intersection of the tracks 22 of the device arrays 20 located on the same layer, one track 22 passes under the other track 22, forming a subterranean channel structure similar to that in an urban transportation system, as shown in fig. 7. Alternatively, one of the wires 22 may pass over the other wire 22 to form an overpass structure similar to that of an urban traffic system, as shown in fig. 8. On the basis, an isolation part is further arranged at the intersection of the two wires 22, and the two wires 22 are isolated, so that insulation between the two wires 22 can be ensured. The spacer may be in the form of a layer of substrate 10 or a layer of protective layer 23, as shown in fig. 7 and 8, respectively.

In one embodiment, the interaction device may include a first substrate 11 and a second substrate 12, as shown in fig. 9, where a plurality of device arrays 20 are formed on a first side of the first substrate 11 and the second substrate 12 (i.e., an upper side of the first substrate 11 and a lower side of the second substrate 12 in fig. 9), and the second side of the first substrate 11 and the second substrate 12 (i.e., the lower side of the first substrate 11 and the upper side of the second substrate 12 in fig. 9) are connected. In this embodiment, the first substrate 11 and the second substrate 12 are respectively formed with a plurality of device arrays 20, which are equivalent to a complete interaction device as described above, and in this embodiment, the two devices are connected together and are integrated as an interaction device, so that the interaction device has more device arrays 20, and thus a better interaction effect can be obtained. Specifically, the first substrate 11 and the second substrate 12 may be adhesively connected by an adhesive layer 13.

In one embodiment, the traces 22 of each device array 20 are single or multi-layered, and each layer is made of any one of gold, aluminum, silver, ITO, and PEDOT. When the wirings 22 are of a multi-layer structure, an interlayer insulating layer is disposed between two adjacent layers of wirings to ensure insulation between them.

It should be noted that in this document, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

The foregoing is only a specific embodiment of the invention to enable those skilled in the art to understand or practice the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An interactive apparatus comprising a substrate and a plurality of device arrays disposed on the substrate; the device arrays comprise a plurality of device units arranged in an array manner and wiring for connecting the device units into a net shape;

each device cell in each device array is located within a cell defined by traces in the other one or more device arrays, and the traces between adjacent device cells in each device array are insulated at intersections of the traces in the other device arrays;

in each device array, at least a first interval is arranged on a wire between two adjacent device units, and the shape of the wire is nonlinear in the first interval;

in each device array, wires connecting adjacent two device units and wires separating cells where the two device units are located are arranged at one intersection; wherein, at the intersection of two wires, the shape of each wire is straight.

2. The interactive apparatus of claim 1 wherein each device unit is one of a deformation sensor, a pressure sensor, a temperature sensor, a humidity sensor, a light emitting device, an energy storage unit, a power generation unit, and a communication unit.

3. The interaction device of claim 2, wherein the plurality of device units are of the same type in each device array; alternatively, at least one device cell is of a different type than the other device cells.

4. The interaction device of claim 2, wherein the device units in the plurality of device arrays are of the same type; alternatively, the device cell types in at least one device array are different from the device cell types in other device arrays.

5. The interactive device of claim 1, wherein the substrate is a deformable material.

6. The interactive device of claim 5, wherein the substrate is a styrene-ethylene-butylene-styrene block copolymer, or polydimethylsiloxane, or polyimide.

7. The interactive apparatus of claim 5 wherein the substrate has a non-deformable region thereon, the non-deformable region comprising an area where the device unit is located.

8. The interactive apparatus of claim 7 wherein the plurality of device cells in each device array are arranged in a plurality of rows and columns in a matrix arrangement; the distance between the non-deformation regions where adjacent device cells are located in the row direction and/or the column direction is 100-200 micrometers.

9. The interactive apparatus of claim 7 wherein in each device array, the non-deformation region in which each device unit is located is a regular octagon; the length of the side of the non-deformation region where each device cell is located is 50-150 microns.

10. The interactive device of claim 1, wherein the trace in the first section is curved, or a multi-segment line, or a folded trace formed by reciprocally extending along a specific direction.

11. The interaction device of claim 1, wherein the plurality of device arrays are located on different layers, and wherein an isolation layer is disposed between each device array and the other device arrays; or alternatively

At least two device arrays are located at the same layer, at the intersection of the wires of the device arrays located at the same layer, one wire passes through the lower side or the upper side of the other wire, and an isolation part is arranged at the intersection of the two wires.

12. The interactive apparatus of claim 1 or 5, comprising a first substrate and a second substrate, wherein a first side of the first substrate and the second substrate is formed with the plurality of device arrays, and wherein a second side of the first substrate and the second substrate meet.

13. The interactive apparatus of claim 1 wherein each device unit is located in the center of the cell.

14. The interactive apparatus of claim 1 wherein the traces of each device array are single or multi-layered, and the material of each layer comprises any one of gold, aluminum, silver, ITO, and PEDOT.

15. The interactive apparatus of claim 1, wherein the interactive apparatus comprises a protective layer formed over the array of devices; the material of the protective layer is at least one of silicon nitride, silicon oxide, polyimide and acrylic.

16. The interactive device of claim 1, wherein the interactive device is an electronic skin.