CN1147378C - Technology for machining rotary mirror for high-precision metal scan - Google Patents

Technology for machining rotary mirror for high-precision metal scan

Info

Publication number
CN1147378C
CN1147378C CNB991207963A CN99120796A CN1147378C CN 1147378 C CN1147378 C CN 1147378C CN B991207963 A CNB991207963 A CN B991207963A CN 99120796 A CN99120796 A CN 99120796A CN 1147378 C CN1147378 C CN 1147378C
Authority
CN
China
Prior art keywords
tilting mirror
mirror
stock
removing machine
optical reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB991207963A
Other languages
Chinese (zh)
Other versions
CN1293089A (en
Inventor
马文生
陈斌
张志�
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CNB991207963A priority Critical patent/CN1147378C/en
Publication of CN1293089A publication Critical patent/CN1293089A/en
Application granted granted Critical
Publication of CN1147378C publication Critical patent/CN1147378C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

The present invention relates to an improvement on a processing method for a metal scanning rotating mirror, which belongs to the technical field of precise machinery. In the prior art, a supporting surface and a datum surface of the rotating mirror are first machined, and then, an optical reflecting surface of the rotating mirror is machined. The present invention first machines the optical reflecting surface of the rotary mirror, and then, the rotary mirror is fixed and adjusted by a four dimensional fixture under the monitoring of an autocollimator to achieve the goal of raising the rate of finished products even if a relative tower difference error value A' of the finished optical reflecting surface of the rotating mirror is large. The present invention solves the problem of exorbitant precision requirement for the operating supporting surface of the rotary mirror, the operating datum surface of the rotary mirror and the four dimensional fixture, raises the rate of finished products and machining efficiency, and reduces cost.

Description

The job operation of rotary mirror for high-precision metal scan
The present invention relates to a kind of improvement of the job operation to the metal scan tilting mirror.
The process of prior art is: at first the work supporting surface of processing metal scanning mirror and working standard face, the optical reflection face of back processing metal scanning mirror.For example, when the metal scan tilting mirror was applied to the scanning imagery occasion, its key technical indexes was: adjacent surface angle error franchise is less than 10 rads; The franchise A that relative tower difference is a scanning mirror tower angle off-design reference consistency is less than 10 rads; The tilting mirror optical reflection is faced the angle consistance franchise B of tilting mirror revolving shaft less than 10 rads; The right alignment franchise of tilting mirror solid and its work revolving shaft is less than 5 microns etc.Utilize the prior art method, at first work supporting surface of processing metal scanning mirror (as the Bearing Installation face) and working standard face (end face) are processing datum with work supporting surface or working standard face again, the optical reflection face of processing metal scanning mirror.When utilizing this method to make the metal scan tilting mirror, the optical reflection face of metal scan tilting mirror machines, just produce the error A ' (certified products A ' should less than A) of relative tower difference, then the tilting mirror optical reflection is in the face of the allowed band B ' of the angle conformity error of tilting mirror work revolving shaft.
B′≤B-A′。
B ' value is often very little, guarantee to produce the tilting mirror optical reflection and face the angle conformity error B ' of tilting mirror work revolving shaft in franchise B scope, must make A ' process lessly, must make the tilting mirror base of high dimensional accuracy and form accuracy, especially for batch process, require to produce the high installed surface of dimensional uniformity again, also must make the supporting tool anchor clamps of very high degree of precision, otherwise can only produce underproof tilting mirror.And this frock clamp does not have versatility, and manufacturing cost is higher, is not suitable for plurality of specifications and batch process.
The objective of the invention is to solve owing to produce the error A ' value of relative tower difference during the processing metal scanning mirror when big, the low problem of generation yield rate; Minimizing is to tilting mirror base supporting surface and the high problem of frock clamp precision prescribed, thereby provides a kind of cost low, the job operation of the high precision scanning mirror that working (machining) efficiency and cost rate are high.
The step of job operation of the present invention is as follows:
(1) at first prepares tilting mirror base and heat-treat the elimination internal stress, leave less process redundancy, fully eliminate internal stress;
(2) on the feeding worktable of stock-removing machine with index plate and anchor clamps clamping tilting mirror base and fly to cut the optical reflection face of tilting mirror;
(3) on stock-removing machine with four-dimensional anchor clamps clamping tilting mirror body, the consistance B of the relative stock-removing machine axis of rotation of each the optical reflection face angle of the tilting mirror that flies to cut with autocollimatic value instrument monitoring again "; adjust four-dimensional anchor clamps then and make the consistance B of the relative stock-removing machine axis of rotation of each optical reflection face angle of tilting mirror " less than conformity error B ' rad, the right alignment that makes the tilting mirror solid is less than design objective;
(4) again with the work supporting surface and the working standard face that are fixed on the tilting mirror of cutter turning after adjusting on the stock-removing machine feeding worktable.
Good effect of the present invention: adopt to adjust four-dimensional anchor clamps and with the method for autocollimatic value instrument monitoring, reached error A ' value in the relative tower difference of optical reflection face of tilting mirror when bigger, also can improve the yield rate of product.The present invention adopts the optical reflection face of processing tilting mirror earlier, the work supporting surface of back processing tilting mirror and the technology of working standard face, what solved prior art the method for processing tilting mirror reflecting surface is brought behind the processing tilting mirror supporting surface earlier requires frock clamp manufacturing accuracy height, versatility is poor, and the cost height is unsuitable for problems such as batch process.Method of the present invention can be manufactured the rotary mirror for high-precision metal scan that cost is low, yield rate is high, working (machining) efficiency is high.
Description of drawings:
Fig. 1 is the process principle synoptic diagram of procedure of processing 2 of the present invention.
Fig. 2 is the process principle synoptic diagram of procedure of processing 3 of the present invention and 4.
As shown in Figure 1, stock-removing machine adopts the MSG-325 diamond lathe.On the main shaft of MSG-325 diamond lathe 1 rotating disk is installed, at the edge of rotating disk cutting tool 2 is installed, main shaft is done rotation provides the revolution of diamond cutter 2 to fly to cut motion and cutting-in feed motion.Tilting mirror 3 to be processed is fixed on support fixture 4, and support fixture 4 is fixed on the end tooth indexing 5, and end tooth indexing 5 is fixed on the MSG-325 diamond lathe feeding worktable 6, and feeding worktable 6 drives tilting mirror 3 to be processed and makes horizontal straight-line feed cutting movement.After processing a face of tilting mirror 3, rotate the next to be processed reflecting surface of end tooth indexing 5 to tilting mirror.Successively to last reflecting surface completion of processing.So far procedure of processing 2 of the present invention is finished, and produces relative tower mistake difference A '.
As shown in Figure 2, provide the revolution principal cutting movement by MSG-325 diamond lathe 1, the tilting mirror 3 that flies to cut is fixed on homemade can the adjustment the swing of diamond lathe main-shaft axis work two dimension, and can be on the anchor clamps 7 of doing the two-dimensional translation adjustment on the main shaft end face.Homemade four-dimensional anchor clamps 7 are installed on the main shaft end face of MSG-325 diamond lathe 1.The main shaft of rotation MSG-325 diamond lathe 1, monitor each optical reflection face of the tilting mirror 3 that flies to cut with 702 type autocollimators 8 of market supply, by regulating homemade four-dimensional anchor clamps 7, main-shaft axis is done the two dimension swing adjust, the conformity error B of the relative main-shaft axis of each optical reflection face that makes the tilting mirror 3 that flies to cut is " less than franchise B '.On the main shaft end face, do the two-dimensional translation adjustment by homemade four-dimensional anchor clamps 7, make the tilting mirror solid to the right alignment franchise of the revolving shaft of MSG-325 diamond lathe 1 less than designing requirement, procedure of processing 3 is finished.The main axis rotation of MSG-325 diamond lathe 1, feeding worktable 6 drives diamond cutter 2, makes the work supporting surface and the working standard face of turning tilting mirror, whole work of completing steps 4.

Claims (1)

1, the job operation of rotary mirror for high-precision metal scan is characterized in that: it comprises the following steps,
(1) preparation tilting mirror base and heat-treat the elimination internal stress;
(2) on stock-removing machine with index plate (5) and anchor clamps (4) clamping tilting mirror bases (3) and fly to cut the optical reflection face of tilting mirror;
(3) on stock-removing machine with four-dimensional anchor clamps (7) clamping tilting mirror bodies (3), the consistance B of the angle of the relative stock-removing machine axis of rotation of each optical reflection face of tilting mirror that flies to cut with autocollimatic value instrument (8) monitoring again "; adjust four-dimensional anchor clamps (7) then and make the angle consistance B of the relative stock-removing machine axis of rotation of each optical reflection face of tilting mirror " less than B ' rad, the right alignment that makes the tilting mirror solid is less than design objective;
(4) again with the work supporting surface and the working standard face that are fixed on the tilting mirror of cutter (2) turning after adjusting on the stock-removing machine feeding worktable (6).
CNB991207963A 1999-10-13 1999-10-13 Technology for machining rotary mirror for high-precision metal scan Expired - Fee Related CN1147378C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB991207963A CN1147378C (en) 1999-10-13 1999-10-13 Technology for machining rotary mirror for high-precision metal scan

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB991207963A CN1147378C (en) 1999-10-13 1999-10-13 Technology for machining rotary mirror for high-precision metal scan

Publications (2)

Publication Number Publication Date
CN1293089A CN1293089A (en) 2001-05-02
CN1147378C true CN1147378C (en) 2004-04-28

Family

ID=5281677

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB991207963A Expired - Fee Related CN1147378C (en) 1999-10-13 1999-10-13 Technology for machining rotary mirror for high-precision metal scan

Country Status (1)

Country Link
CN (1) CN1147378C (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102078968B (en) * 2011-01-20 2012-06-20 天津大学 Ultraprecise turning method of optical lens with incline
CN108051880B (en) * 2017-12-08 2020-01-21 苏州大学 Method for processing metal multi-face scanning prism
CN108050959B (en) * 2017-12-12 2020-01-21 苏州大学 On-line detection system for metal multi-surface scanning prism processing
CN110842476B (en) * 2019-11-19 2021-09-24 中国船舶重工集团公司第七0七研究所 Method for manufacturing pentahedron reflector applied to high-speed scanning system
CN114749705A (en) * 2022-03-25 2022-07-15 广东省天傲精工科技有限责任公司 Prism surface processing technology and processing device

Also Published As

Publication number Publication date
CN1293089A (en) 2001-05-02

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