CN114735447A

CN114735447A - Chuck circulating moving mechanism

Info

Publication number: CN114735447A
Application number: CN202210532225.6A
Authority: CN
Inventors: 陈盈宏; 黎昊昇; 阙石男
Original assignee: Suzhou Aifangxindong Automation Equipment Co ltd
Current assignee: Suzhou Aifangxindong Automation Equipment Co ltd
Priority date: 2022-05-10
Filing date: 2022-05-10
Publication date: 2022-07-12
Anticipated expiration: 2042-05-10
Also published as: CN114735447B

Abstract

The application relates to the field of metal tray movement for bearing wafers, in particular to a chuck circulating movement mechanism, which comprises a machine base, a first tray moving assembly and a second tray moving assembly, wherein the machine base is provided with a first guide seat and a second guide seat which are arranged face to face, the first tray moving assembly is arranged on the first guide seat and comprises a first moving module, a first carrying seat, a first lifting module and a first chuck group, the first chuck group can be in a horizontal shape or a descending inclined shape and is driven by the first moving module to move in the first guide seat, the second tray moving assembly is arranged on the second guide seat and comprises a second moving module, a second carrying seat, a second lifting module and a second chuck group, the second chuck group can also be in a horizontal shape or a descending inclined shape and is driven by the second moving module to move in the second guide seat, and therefore the first chuck group and the second chuck group are staggered in the movement process, the waiting or idle time is shortened, which is beneficial to improving the transferring efficiency of the wafer.

Description

Chuck circulating movement mechanism

Technical Field

The present application relates to the field of metal tray movement for carrying wafers, and more particularly to a chuck circulation movement mechanism for clamping a metal tray.

Background

When the wafer is tested at high pressure and three temperatures (such as high temperature, room temperature and low temperature), a plurality of wafers must be carried by the metal tray, and after the test is completed, the wafers on the metal tray must be transferred to a plastic tray capable of carrying a larger number of wafers, so as to facilitate the subsequent collection, transfer and transportation. In the wafer transferring process, the metal tray with the wafers placed thereon must be frequently taken down from the first material rack and moved to a fixed point along the horizontal direction, then the plastic tray is filled with the wafers by the taking and placing mechanism, and then the empty metal tray after the wafers are taken out is moved to the second material rack along the horizontal direction for collection. However, if the single set of transferring mechanism sequentially shifts, unloads and collects the metal trays to the empty tray, too much waiting time or idle time is easily consumed, and transferring efficiency cannot be effectively improved.

Disclosure of Invention

In order to improve the transfer efficiency of the wafer under the condition of limited space on a machine table, the application provides a chuck circulating movement mechanism.

The application provides a (holding) chuck circulation moving mechanism adopts following technical scheme:

a chuck cycle moving mechanism comprising:

the engine base comprises a first guide seat and a second guide seat which are arranged oppositely, a first guide wall facing downwards is arranged at the upper edge of the first guide seat, and a second guide wall facing downwards is arranged at the upper edge of the second guide seat;

the first tray moving assembly is arranged on the first guide seat and comprises a first moving module, a first carrying seat, a first lifting module and a first clamping tray assembly; the first moving module is arranged on the outer wall of the first guide seat and controls the first carrier seat to linearly move on the inner side of the first guide seat; the first carrier seat is provided with a first sliding seat capable of moving up and down, and the bottom of the first chuck set is pivoted with the first sliding seat; the first lifting module is used for controlling the first sliding seat to lift, and when the first lifting module is operated to drive the first sliding seat to lift to the highest point, one side of the first clamping disc group, which faces the first guide seat, can be in contact with the first guide wall to enable the first clamping disc group to be horizontal; when the first lifting module is operated to drive the first sliding seat to descend to the lowest point, the position of the first clamping disc group also descends and is inclined;

the second tray moving assembly is arranged on the second guide seat and comprises a second moving module, a second carrying seat, a second lifting module and a second clamping tray assembly; the second moving module is arranged on the outer wall of the second guide seat and controls the second carrier seat to linearly move on the inner side of the second guide seat; the second carrier seat is provided with a second sliding seat capable of moving up and down, and the bottom of the second chuck set is pivoted with the second sliding seat; the second lifting module is used for controlling the second sliding seat to lift, and when the second lifting module is operated to drive the second sliding seat to lift to the highest point, one side of the second chuck group facing the second guide seat can be in contact with the second guide wall to enable the second chuck group to be horizontal; when the second lifting module is operated to drive the second sliding seat to descend to the lowest point, the position of the second clamping disc group descends and inclines simultaneously.

By adopting the technical scheme, the first clamping disc group and the second clamping disc group can conveniently perform staggered and cyclic operation in spaces with different heights, for example, when the metal tray on the first clamping disc group is used for transferring the wafer, the second clamping disc group can move an empty tray to a fixed point, can descend or can move to another standby position, so that after the previous metal tray is used for transferring the wafer, another full-load metal tray can also be quickly moved to the fixed point for carrying, the waiting or idle time of equipment is reduced, and the transferring efficiency of the wafer is improved.

In a specific embodiment, two first grooves are additionally arranged on two sides of the position of the first guide seat of the machine base, and two second grooves are additionally arranged on two sides of the position of the second guide seat; the two first grooves are used for the first load bearing seat to pass through and serve as a channel for the first load bearing seat to move, and the two second grooves are used for the second load bearing seat to pass through and serve as a channel for the second load bearing seat to move.

Through adopting above-mentioned technical scheme, be convenient for first year seat and the second carry the connection and the installation of seat, be favorable to reducing the volume of whole equipment.

In a specific implementation manner, the first moving module is composed of a structure of a first screw, a first servo motor and a first moving block, and the second moving module is composed of a structure of a second screw, a second servo motor and a second moving block.

In a specific embodiment, the first lifting module is configured to drive a first guide rail to lift and lower inside the first guide seat, the first sliding seat is provided with a first guide wheel facing the first guide seat, the first guide wheel is located in the first guide rail and can move in the first guide rail, and a side of the first guide rail facing the first guide wall is further provided with a first flat wall; the first chuck group is provided with a first roller on one side facing the first guide seat, when the first lifting module is operated to drive the first guide rail to rise to the highest point, the first sliding seat also rises to the highest point, and at the moment, the first roller is positioned between the first guide wall and the first flat wall and enables the first chuck group to be horizontal.

Through adopting above-mentioned technical scheme, first guide pulley is located first guide rail and removes, can ensure that first year seat when horizontal migration, first slide also can steadily horizontal migration. The design that the first roller is positioned between the first guide wall and the first flat wall can ensure that the first clamping disc group is horizontal under the condition that external force is contacted with the first clamping disc group, thereby ensuring the stable operation of the first clamping disc group.

In a specific implementation, the first lifting module includes a first pneumatic cylinder and a first sliding seat, a first inclined rail is disposed on the first sliding seat, a first fixing block capable of sliding is disposed on the first inclined rail, the first fixing block is fixedly connected to the first guide rail, the first guide rail is mounted on the inner wall of the first guide seat and can lift up and down, and when the first pneumatic cylinder is operated to drive the first sliding seat to move horizontally, the first inclined rail is used to enable the first fixing block and the first guide rail to lift up and down synchronously.

Through adopting above-mentioned technical scheme, first inclined rail and the cooperation of first fixed block can drive first guide rail and go up and down in step, realize the lift drive to first guide rail.

In a specific possible embodiment, the second lifting module is configured to drive a second guide rail to lift and lower inside the second guide seat, the second sliding seat is provided with a second guide wheel facing the second guide seat, the second guide wheel is located in the second guide rail and is capable of moving in the second guide rail, and a side of the second guide rail facing the second guide wall is further provided with a second flat wall; and a second roller is arranged on one side of the second chuck group facing the second guide seat, when the second lifting module is operated to drive the second guide rail to rise to the highest point, the second sliding seat also rises to the highest point, and at the moment, the second roller is positioned between the second guide wall and the second flat wall and enables the second chuck group to be horizontal.

Through adopting above-mentioned technical scheme, like first lift module, such structural arrangement can make the second slide also can steadily horizontal migration to can make second chuck group keep the level form under the circumstances that there is external force and second chuck group to contact.

In a specific can implement embodiment, the second lift module includes second pneumatic cylinder and second sliding seat, be equipped with the second inclined rail on the second sliding seat, be equipped with the second fixed block that can slide on the second inclined rail, second fixed block fixed connection in the second guide rail, the second guide rail install in second guide seat inner wall and ability oscilaltion work as the second pneumatic cylinder drives during second sliding seat horizontal migration, utilize the second inclined rail makes the second fixed block reaches the second guide rail is gone up and down in step.

Through adopting above-mentioned technical scheme, the cooperation of second inclined rail and second fixed block has realized the oscilaltion drive to the second guide rail.

In a specific embodiment, each of the first clamping set and the second clamping set comprises a carrying tray and a plurality of clamping members movable on the carrying tray, the clamping members are distributed around the top surface of the carrying tray, and the bottom of each clamping member is further provided with a push wheel; when the push wheel is pushed outwards, the clamping pieces move outwards synchronously, so that the clamping pieces are changed from a clamping state to an opening state.

In a specific embodiment, the first chuck set and the second chuck set each have an opening in the central region, the base is provided with a first rack and a second rack on two sides of the first guide seat and the second guide seat, and a first jacking module and a second jacking module are further mounted at the bottom of the base; the position of the first jacking module corresponds to the first material rack and is responsible for driving a first jacking column to lift, and the position of the second jacking module corresponds to the second material rack and is responsible for driving a second jacking column to lift; when the first clamping disc group or the second clamping disc group moves to a position above one of the top columns, the corresponding push wheel can contact and move with the corresponding guide inclined channel in the ascending process of the top column, and the corresponding clamping piece is opened.

In a specific embodiment, the slope of the guiding chute is a vertical plane after increasing from top to bottom.

Through adopting above-mentioned technical scheme, the linkage cooperation of pushing wheel and fore-set can conveniently lock and the unblock to metal tray.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the chuck circulating moving mechanism is characterized in that a first clamping disc group is installed on a first guide seat, a second clamping disc group is installed on a second guide seat, the overall size is favorably reduced, the first clamping disc group and the second clamping disc group can timely perform staggered circulating operation in spaces with different heights, in the process of transferring wafers to metal trays on one clamping disc group, the other clamping disc group can firstly transfer empty metal trays to a collection position and then to a position ready to receive full-load wafers, and once the previous transferring operation is finished, the full-load metal trays can be immediately transferred to fixed points and then the wafers are transferred, so that the waiting time is shortened, and the wafer transferring efficiency is improved;

2. through the structural design that the guide wheel moves in the guide rail, the corresponding sliding seat can also stably move horizontally when the corresponding loading seat moves horizontally; and through the design that the roller is positioned between the corresponding guide wall and the flat wall, the chuck group can still be ensured to be horizontal under the condition that external force is contacted with the corresponding chuck group, thereby stably operating.

Drawings

Fig. 1 is a perspective view of a chuck circulating movement mechanism according to an embodiment of the present application.

Fig. 2 is a distribution diagram of a first jacking module and a second jacking module according to an embodiment of the present application.

Fig. 3 is a perspective view illustrating an operating position of the second chuck set in a horizontal state according to an embodiment of the present disclosure.

Fig. 4 is a perspective view illustrating an operation position of the second chuck set in an inclined state according to an embodiment of the present application.

Fig. 5 is a longitudinal partial cross-sectional perspective view of a chuck cycle moving mechanism according to an embodiment of the present application.

Fig. 6 is a sectional view of main components for embodying a chuck circulating movement mechanism according to an embodiment of the present application.

Fig. 7 is a perspective view of a first shifting tray assembly according to an embodiment of the present application.

Fig. 8 is a perspective view of a second pan assembly according to an embodiment of the present application.

Fig. 9 is an operation diagram of the metal tray, the first clamping set and the top pillar according to the embodiment of the present application.

Description of reference numerals: 10. a machine base; 101. a first trench; 102. a second trench; 11. a first guide seat; 111. a first guide wall; 12. a second guide seat; 121. a second guide wall; 13. a first material rack; 14. a second rack; 2. a first tray moving assembly; 21. a first moving module; 211. a first screw; 212. a first servo motor; 213. a first moving block; 22. a first carrier seat; 221. a first slider; 222. a first guide wheel; 23. a first lifting module; 231. a first pneumatic cylinder; 232. a first sliding seat; 233. a first ramp; 234. a first fixed block; 24. a first clamping disk group; 241. a first roller; 242. a carrying tray; 243. a clamping member; 2431. a convex column; 2432. a push wheel; 244. an opening; 25. a first guide rail; 251. a first flat wall; 3. a second tray moving assembly; 31. a second moving module; 311. a second screw; 312. a second servo motor; 313. a second moving block; 32. a second carrier seat; 321. a second slide carriage; 322. a second guide wheel; 33. a second lifting module; 331. a second pneumatic cylinder; 332. a second sliding seat; 333. a second ramp; 334. a second fixed block; 34. a second clamping disk group; 341. a second roller; 35. a second guide rail; 351. a second flat wall; 4. a first jacking module; 41. a first top pillar; 42. a guide chute; 5. a second jacking module; 51. a second top pillar; a1, first horizontal position; a2, second horizontal position; a3, third level; b1, first inclined position; b2, second inclined position.

Detailed Description

The present application is described in further detail below with reference to the attached drawings.

The application discloses (holding) chuck circulation moving mechanism. As shown in fig. 1, the chuck circulating moving mechanism includes a base 10, a first tray moving assembly 2 and a second tray moving assembly 3. The base 10 is provided with a first guide seat 11 and a second guide seat 12 which are arranged face to face, the first tray moving assembly 2 is installed on the first guide seat 11, and the second tray moving assembly 3 is installed on the second guide seat 12. The first tray moving assembly 2 includes a first moving module 21, a first loading base 22, a first lifting module 23 and a first clamping set 24, and the first moving module is configured to enable the first clamping set 24 to move horizontally or move in the first guide base 11 in an inclined manner after being lowered. The second tray moving assembly 3 includes a second moving module 31, a second carriage 32, a second lifting module 33 and a second clamping set 34, and the second moving module is configured to enable the second clamping set 34 to move horizontally or move in an inclined manner in the second guide 12 after being lowered. The width between the first guide seat 11 and the second guide seat 12 is only slightly larger than the size of the single clamping disk set. Therefore, the first clamping disk group 24 and the second clamping disk group 34 can timely move in the spaces with different heights between the first guide seat 11 and the second guide seat 12, and continuously and circularly operate and stagger to avoid, so that the idle or waiting time is shortened, and the production efficiency is improved.

In addition, the base 10 is provided with a first rack 13 and a second rack 14 on two sides (left and right positions in the figure) of the first guide seat 11 and the second guide seat 12, respectively, that is, the first rack 13 is arranged at one end (right position in the figure) of the first guide seat 11 and the second guide seat 12 in the same direction, and the second rack 14 is arranged at the other end (left position in the figure) of the first guide seat 11 and the second guide seat 12 in the same direction. In the present embodiment, the first stack 13 is used for receiving metal trays stacked with wafers, and the second stack 14 is used for collecting empty metal trays after the wafers are removed. Referring to fig. 2, the bottom of the base 10 is further provided with a first jacking module 4 and a second jacking module 5, the first jacking module 4 is located at a position corresponding to the first rack 13 and is responsible for driving a first jacking column 41 to lift; the second jacking module 5 is located at a position corresponding to the second rack 14 and is responsible for driving a second jacking pillar 51 thereon to lift.

In practice, after the first prop 41 is lifted, the first clamping set 24 or the second clamping set 34 moving thereto is adjusted from the clamping state to the opening state, then the first prop 41 is continuously lifted and props up the metal tray located in the first material rack 13, then the first prop 41 is continuously lowered in a state of receiving one metal tray, and after the metal tray is received and clamped by the first clamping set 24, the first prop 41 is completely lowered to the lowest position. The second prop 51 is operated in such a way that during the raising process of the second prop 51, the clamping state of the first clamping set 24 or the second clamping set 34 is released to be turned to an open state, then the second prop 51 is continuously raised to move the empty metal tray to the lowest layer of the second material rack 14 for collection, and then the second prop 51 is lowered to the lowest point.

The main point of the embodiment of the present application is to control the moving processes of the first clamping disc set 24 and the second clamping disc set 34, and to avoid mutual interference during the moving process, so as to improve the production efficiency, and the first material frame 13 and the second material frame 14 are not the important points of the present application and are the prior art, and therefore are not described herein again. Since the first clamping disk set 24 and the second clamping disk set 34 operate in the same manner and only have different installation directions, the embodiment of the present application will first describe the second clamping disk set 34.

As shown in fig. 1 and 3, the second clamping set 34 stays at three positions when moving horizontally, and the first horizontal position a1 is located at the first material rest 13 for the metal tray (not shown) to be clamped by the second clamping set 34. And then to a second level a2, where it is used to remove the wafers from the metal tray. The third level a3 is where the second stack 14 is located and is used to remove empty metal trays.

As shown in fig. 4, after the metal tray is removed, the second chuck set 34 is lowered while being tilted, and this state is mainly stopped at two positions, which are a first tilted position B1 and a second tilted position B2, respectively. Referring to fig. 1, the first inclined position B1 is located below the second stack 14, so as to avoid interference with the operation of the first clamping disk set 24 in the horizontal direction, and facilitate the movement of the second clamping disk set 34 in the second inclined position B2, and the second inclined position B2 is located below the first stack 13. Referring to FIG. 3, the second set of discs 34 is then rotated upward and horizontally, such as at a first horizontal position A1. Similarly, the first clamping set 24 operates in the same manner, and only the time and the position are staggered. In the embodiment of the present application, when the first clamping tray group 24 is at the second horizontal position a2, the residence time is the most so as to facilitate the wafers to be removed from the metal tray, and during this time, the other second clamping tray group 34 can be sequentially switched among the third horizontal position A3, the first inclined position B1, the second inclined position B2, and the first horizontal position a 1. After the first clamping set 24 finishes the wafer moving-out operation, the clamped metal tray can be immediately moved to the second horizontal position A by the second clamping set 34 for wafer transferring, thereby shortening the standby time of other components and improving the transferring efficiency.

The structure of each component of the embodiment of the present application will be described in detail below to describe how the first clamping disk set 24 and the second clamping disk set 34 can move horizontally and move after descending and tilting.

As shown in fig. 5, two first guide seats 11 and two second guide seats 12, which are disposed opposite to each other, on the base 10 are both long, two first grooves 101 are further disposed on two sides of the base 10 where the first guide seats 11 are located, and two second grooves 102 are further disposed on two sides of the base 12 where the second guide seats 12 are located. Referring to fig. 6, two first grooves 101 are used as moving passages for the first carriage 22 to pass through, and two second grooves 102 are used as moving passages for the second carriage 32 to pass through. In addition, a first guide wall 111 facing downward is disposed on the upper edge of the first guide seat 11, and the first guide wall 111 is used for the first clamping set 24 to contact with it in a horizontal manner. The upper edge of the second guide seat 12 is also provided with a downward second guide wall 121, and the second guide wall 121 is used for the second clamping disk set 34 to contact with it in a horizontal state at a proper time.

Since the first tray moving assembly 2 and the second tray moving assembly 3 have the same structure and are only staggered to avoid during operation, the following description of the embodiment of the present application mainly deals with the first tray moving assembly 2.

As shown in fig. 5 and 7, the first tray moving assembly 2 is mounted on the first guide base 11, and includes a first moving module 21, a first carriage 22, a first lifting module 23, and a first clamping tray assembly 24. The first moving module 21 is mounted on the outer wall of the first guide 11, and mainly comprises a first screw 211, a first servomotor 212, and a first moving block 213 mounted on the first screw 211. The first moving module 21 is used for controlling the first carriage 22 to move linearly inside the first guide 11, in this embodiment, the first moving block 213 fixes the first carriage 22 so that the first carriage 22 and the first moving block can move synchronously, so that the first clamping disc set 24 connected to the first carriage 22 can also move together. A slide rail, a slide block and other structures are arranged between the first carrying seat 22 and the inner wall of the first guide seat 11, so that the first carrying seat 22 can smoothly and horizontally slide.

As shown in fig. 6 and 7, a first slide seat 221 capable of moving up and down is disposed on a side of the first carriage 22 facing the second guide seat 12, and is pivoted to the bottom of the first clamping disk set 24 from the top of the first slide seat 221, and limits the first clamping disk set 24 to only move within an angle of horizontal and downward inclination. The first clamping set 24 is provided with a plurality of sets of first rollers 241 on a side facing the first guide 11. The first lifting module 23 is used for controlling the lifting timing of the first sliding seat 221, and referring to fig. 6, when the first lifting module 23 is operated to drive the first sliding seat 221 to rise to the highest point, the first roller 241 will contact with the first guide wall 111 to make the first clamping disc set 24 in a horizontal state, and if the first lifting module 23 drives the first sliding seat 221 to fall to the lowest point, the position of the first clamping disc set 24 will fall simultaneously, and will be influenced by gravity to tilt downwards towards the second guide seat 12 with the pivot joint as the center, and the position of the first roller 241 will be lower than the height of the first clamping disc set 24 in the horizontal state.

In order to control the first sliding seat 221 to ascend and descend more precisely, as shown in fig. 6, the first ascending and descending module 23 mainly drives a first guide rail 25 to ascend and descend inside the first guide seat 11, a first guide wheel 222 is disposed on a side of the first sliding seat 221 facing the first guide seat 11, a longitudinal section of the first guide rail 25 is "ㄈ", the first guide wheel 222 is located in the first guide rail 25 to ensure that the first sliding seat 221 can also move horizontally and stably when the first carriage 22 moves horizontally, and the first guide rail 25 is also responsible for driving the first sliding seat 221 to ascend and descend. In addition, the first guide rail 25 forms a first flat wall 251 partially facing the first guide wall 111, when the first lifting module 23 is operated to drive the first guide rail 25 to rise to the highest point, the first sliding seat 221 also rises to the highest point, and at this time, the first roller 241 is located between the first guide wall 111 and the first flat wall 251 and contacts with both the first guide wall 111 and the first flat wall 251, so as to prevent the first clamping set 24 from being influenced to be horizontal when an external force contacts with the first clamping set 24 and the first clamping set 24 is changed from the clamping state to the opening state.

In this embodiment, the main structure of the first lifting module 23 is disposed on the outer wall of the first guide seat 11, but some components are connected to the first guide rail 25 through the window reserved on the first guide seat 11. This can be done in many different ways, such as driving the first rail 25 directly with a pneumatic cylinder, or driving the first rail 25 with a screw and motor. However, as shown in fig. 6 and 7, in the embodiment of the present invention, the first lifting module 23 is configured such that the first pneumatic cylinder 231 pushes the first sliding seat 232 to move along the horizontal direction, the first sliding seat 232 is provided with a first inclined rail 233, the first fixing block 234 is disposed on the first inclined rail 233 to slide, the first fixing block 234 is fixedly connected to the first guide rail 25, and the first guide rail 25 is connected to the vertical guiding post and can only lift up and down on the inner wall of the first guide seat 11, so when the first pneumatic cylinder 231 is operated to drive the first sliding seat 232 to move horizontally, the first inclined rail 233 can be used to drive the first guide rail 25 to lift up and down, which can refer to fig. 8, and at this time, the second fixing block 334 and the second guide rail 35 have been lifted to the highest point.

As shown in fig. 9, the first clamping set 24 is mainly used for clamping a metal tray 7, and the clamping manner can be various forms, and only one of the forms is provided as an illustration in the embodiment of the present application. In the present embodiment, the first clamping set 24 includes a carrier plate 242 and four clamping members 243 capable of moving horizontally and linearly on the carrier plate 242, wherein the clamping members 243 are disposed at four corners of the top surface of the carrier plate 242. The clamping member 243 is provided with two protruding columns 2431, the clamping member 243 clamps the corner position of the metal tray 7 by the protruding columns 2431, so as to achieve the purpose of clamping and fixing, and the clamping force of the clamping member 243 can be exerted by a spring arranged at the bottom of the carrying tray 242. In addition, a push wheel 2432 is further disposed at the bottom of each clamping member 243, and when the push wheel 2432 is pushed outward, the clamping members 243 are also moved outward simultaneously to release the clamped state, and at this time, the spring accumulates elastic potential energy. In addition, the loading tray 242 has a cross-shaped opening 244 in the center, and the opening 244 is used for the first top pillar 41 of the first jacking module 4 (or the second top pillar 51 of the second jacking module 5) to enter. Four guiding inclined chutes 42 are arranged around the first top pillar 41, each guiding inclined chute 42 corresponds to the push wheel 2432, and the slope surface of each guiding inclined chute 42 is vertical after gradually increasing from top to bottom and outwards.

The operation procedure for clamping or releasing the first clamping disk group 24 is as follows: when the first ejection column 41 is lifted, the top section of the guide chute 42 contacts the push wheel 2432, so that the push wheel 2432 moves away from the opening 244 with the corresponding clamping member 243; as the first prop 41 gradually rises, the four clamping members 243 of the first clamping set 24 are opened after the pushing wheel 2432 contacts the vertical surface; then the first top pillar 41 will continue to rise to contact the metal tray 7, so that the single metal tray 7 is supported by the top of the first top pillar 41; then, as the first top column 41 descends, the metal tray 7 is located on the carrying tray 242; when the first top pillar 41 continuously ascends, the pushing wheel 2432 gradually moves to the top section area of the guiding inclined way 42, and finally the four clamping members 243 clamp the four corners of the metal tray 7 by the plurality of convex pillars 2431, thereby achieving the purpose of fixing. Of course, the second jacking module 5 operates in the same manner as the second jacking column 51, and the second clamping set 34 is linked with the first jacking column 41 and the second jacking column 51 at the first material shelf 13 and the second material shelf 14 in the same manner.

In addition, referring to fig. 8, the second tray moving assembly 3 also includes a second moving module 31, a second carriage 32, a second lifting module 33 and a second clamping tray assembly 34. The second moving module 31 also includes a second screw 311, a second servomotor 312, and a second moving block 313. The second carriage 32 also includes a second slide 321 and a second guide wheel 322. The second lifting module 33 also includes a second pneumatic cylinder 331, a second sliding seat 332, a second inclined rail 333, and a second fixing block 334. The second nip set 34 also includes a second roller 341. The second guide rail 35 also includes a second flat wall 351. The structure and operation are the same as those of the first tray moving assembly 2, and therefore, the detailed description thereof is omitted.

To sum up, the chuck circulating movement mechanism disclosed in the embodiment of the present application can precisely control the first chuck set 24 and the second chuck set 34 to precisely move or lift between the first guide seat 11 and the second guide seat 12, continuously and circularly operate according to the sequence and avoid in a staggered manner, so as to shorten the waiting or idle time, thereby improving the transfer efficiency of the wafer, and the occupied volume of the whole structure is small, thereby being beneficial to the effective utilization of the space of the machine.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. A chuck cycle moving mechanism, comprising:

the engine base (10) comprises a first guide seat (11) and a second guide seat (12) which are arranged face to face, a first guide wall (111) facing downwards is arranged on the upper edge of the first guide seat (11), and a second guide wall (121) facing downwards is arranged on the upper edge of the second guide seat (12);

the first tray moving assembly (2) is arranged on the first guide seat (11) and comprises a first moving module (21), a first carrying seat (22), a first lifting module (23) and a first clamping disc set (24); the first moving module (21) is mounted on the outer wall of the first guide seat (11) and controls the first carrying seat (22) to move linearly inside the first guide seat (11); a first sliding seat (221) capable of moving up and down is arranged on the first carrying seat (22), and the bottom of the first clamping disc group (24) is pivoted to the first sliding seat (221); the first lifting module (23) is used for controlling the first sliding seat (221) to lift, when the first lifting module (23) is operated to drive the first sliding seat (221) to ascend to the highest point, one side of the first clamping disc set (24) facing the first guide seat (11) is contacted with the first guide wall (111) to enable the first clamping disc set (24) to be horizontal; when the first lifting module (23) is operated to drive the first sliding seat (221) to descend to the lowest point, the position of the first clamping disc group (24) also descends and is inclined;

the second tray moving assembly (3) is arranged on the second guide seat (12) and comprises a second moving module (31), a second carrying seat (32), a second lifting module (33) and a second clamping tray set (34); the second moving module (31) is mounted on the outer wall of the second guide seat (12) and controls the second carrying seat (32) to move linearly inside the second guide seat (12); a second sliding seat (321) capable of moving up and down is arranged on the second carrying seat (32), and the bottom of the second clamping disc group (34) is pivoted to the second sliding seat (321); the second lifting module (33) is used for controlling the second sliding seat (321) to lift, when the second lifting module (33) is operated to drive the second sliding seat (321) to ascend to the highest point, one side of the second clamping disc set (34) facing the second guide seat (12) is contacted with the second guide wall (121) to enable the second clamping disc set (34) to be horizontal; when the second lifting module (33) is operated to drive the second sliding seat (321) to descend to the lowest point, the position of the second clamping disc group (34) descends and is inclined at the same time.

2. The chuck ring moving mechanism according to claim 1, wherein the base (10) further comprises two first grooves (101) on both sides of the first guide seat (11), and two second grooves (102) on both sides of the second guide seat (12); the two first grooves (101) are used for the first load bearing seat (22) to pass through and serve as a passage for the first load bearing seat (22) to move, and the two second grooves (102) are used for the second load bearing seat (32) to pass through and serve as a passage for the second load bearing seat (32) to move.

3. The chuck circulating movement mechanism according to claim 1, wherein the first moving module (21) is composed of a first screw (211), a first servomotor (212) and a first moving block (213), and the second moving module (31) is composed of a second screw (311), a second servomotor (312) and a second moving block (313).

4. The chuck circulating moving mechanism as claimed in claim 1, wherein the first lifting module (23) is configured to drive a first guide rail (25) to lift inside the first guide seat (11), the first sliding seat (221) is provided with a first guide wheel (222) facing the first guide seat (11), the first guide wheel (222) is located in the first guide rail (25) and can move in the first guide rail (25), and a side of the first guide rail (25) facing the first guide wall (111) is further provided with a first flat wall (251); a first roller (241) is arranged on one side of the first clamping disc set (24) facing the first guide seat (11), when the first lifting module (23) is operated to drive the first guide rail (25) to rise to the highest point, the first sliding seat (221) also rises to the highest point, and at the moment, the first roller (241) is located between the first guide wall (111) and the first flat wall (251) and enables the first clamping disc set (24) to be horizontal.

5. The chuck circulating moving mechanism according to claim 4, wherein the first lifting module (23) comprises a first pneumatic cylinder (231) and a first sliding seat (232), the first sliding seat (232) is provided with a first inclined rail (233), the first inclined rail (233) is provided with a first fixing block (234) capable of sliding, the first fixing block (234) is fixedly connected to the first guide rail (25), the first guide rail (25) is installed on the inner wall of the first guide seat (11) and can be lifted up and down, and when the first pneumatic cylinder (231) is operated to drive the first sliding seat (232) to move horizontally, the first inclined rail (233) is used to synchronously lift the first fixing block (234) and the first guide rail (25).

6. The chuck circulating mechanism as claimed in claim 1, wherein the second lifting module (33) is configured to drive a second guide rail (35) to lift inside the second guide seat (12), the second slide (321) has a second guide wheel (322) facing the second guide seat (12), the second guide wheel (322) is located in the second guide rail (35) and can move in the second guide rail (35), and a second flat wall (351) is further provided on a side of the second guide rail (35) facing the second guide wall (121); a second roller (341) is disposed on a side of the second clamping disc set (34) facing the second guide seat (12), and when the second lifting module (33) is operated to drive the second guide rail (35) to ascend to a highest point, the second sliding seat (321) also ascends to the highest point, and at this time, the second roller (341) is located between the second guide wall (121) and the second flat wall (351) and makes the second clamping disc set (34) horizontal.

7. The chuck circulating moving mechanism as claimed in claim 6, wherein the second lifting module (33) comprises a second pneumatic cylinder (331) and a second sliding seat (332), a second inclined rail (333) is disposed on the second sliding seat (332), a second fixed block (334) capable of sliding is disposed on the second inclined rail (333), the second fixed block (334) is fixedly connected to the second guide rail (35), the second guide rail (35) is mounted on the inner wall of the second guide seat (12) and can be lifted up and down, and when the second pneumatic cylinder (331) drives the second sliding seat (332) to move horizontally, the second fixed block (334) and the second guide rail (35) are lifted up and down synchronously by using the second inclined rail (333).

8. The circulating chuck movement mechanism according to claim 1, wherein the first and second chuck sets (24, 34) each comprise a carrier plate (242) and a plurality of clamping members (243) movable on the carrier plate (242), the clamping members (243) are distributed around the top surface of the carrier plate (242), and the bottom of the clamping members (243) are further provided with push wheels (2432); when the push wheel (2432) is pushed outwards, the clamping pieces (243) move outwards synchronously, so that the clamping pieces (243) change from a clamping state to an opening state.

9. The chuck circulating mechanism according to claim 8, wherein the first chuck set (24) and the second chuck set (34) each have an opening (244) in the central region, the base (10) is provided with a first rack (13) and a second rack (14) on two sides of the first guide seat (11) and the second guide seat (12), and a first jacking module (4) and a second jacking module (5) are further mounted on the bottom of the base (10); the position of the first jacking module (4) corresponds to the first material rack (13) and is responsible for driving a first jacking column (41) to ascend and descend, and the position of the second jacking module (5) corresponds to the second material rack (14) and is responsible for driving a second jacking column (51) to ascend and descend; and a plurality of guide chutes (42) are arranged around each top column, and when the first clamping disc group (24) or the second clamping disc group (34) moves above one top column, the corresponding push wheel (2432) can contact and move with the corresponding guide chute (42) and open the corresponding clamping piece (243) in the lifting process of the top column.

10. The mechanism of claim 9 wherein the ramp surfaces of the guide ramps (42) increase from top to bottom and then are vertical.