CN114718875B - Vacuum pump gas filtering device with parts anti-corrosion function - Google Patents

Abstract

A vacuum pump gas filtering device with a part anti-corrosion function belongs to the technical field of vacuum pumps and aims to solve the problems that the impurity content in partial gas is high, some particles can damage parts in the vacuum pump when passing through the vacuum pump, and process gas can accelerate corrosion of parts in the vacuum pump when meeting high temperature; according to the invention, gas is extracted through the gas inlet pipe in the rotating process of the compression impellers on the driving shaft and the driven shaft, the gas passes through the fixing ring through the gas inlet pipe and enters the upper shell and the lower shell, the rotating ring drives the filtering component to rotate through the fixing ring when rotating, and the gas passes through the through holes in the fixing ring and is filtered by the filter cotton.

Description

Vacuum pump gas filtering device with parts anti-corrosion function

Technical Field

The invention relates to the technical field of vacuum pumps, in particular to a vacuum pump gas filtering device with an anti-corrosion function of parts.

Background

The vacuum pump is a device or equipment for obtaining vacuum by pumping a pumped container by using mechanical, physical, chemical or physical-chemical methods, generally speaking, the vacuum pump is a device for improving, generating and maintaining vacuum in a certain closed space by using various methods, and according to the working principle of the vacuum pump, the vacuum pump can be basically divided into two types, namely a gas capture pump and a gas transmission pump, and is widely applied to industries such as metallurgy, chemical engineering, food, electronic coating and the like.

Multistage roots pump vacuum pump is carrying out the in-process that extracts to gas, can be because impurity content is more in the partial gas, can cause the damage to vacuum pump internals when some particulate matters pass through the vacuum pump, and in the in-service use process, different process gas can be taken out to the vacuum pump, some process gas can lead to the fact the corruption that is difficult to avoid to the spare part in the vacuum pump, the vacuum pump can produce a large amount of heats at the power of doing of bleeding, lead to the temperature rise of cavity and axle, axle position temperature can be higher, partial process gas can accelerate the corruption to spare part in the vacuum pump when meetting high temperature.

To solve the above problems. Therefore, a vacuum pump gas filtering device with a part anti-corrosion function is provided.

Disclosure of Invention

The invention aims to provide a vacuum pump gas filtering device with a part anti-corrosion function, which solves the problems that in the background technology, the impurity content in part of gas is high, some particles can damage the internal parts of the vacuum pump when passing through the vacuum pump, in the actual use process, the vacuum pump can pump different process gases, some process gases can cause inevitable corrosion to the parts in the vacuum pump, the vacuum pump can generate a large amount of heat during pumping and doing work, so that the temperature of a cavity and a shaft is increased, the temperature of the shaft position is higher, and the corrosion to the parts in the vacuum pump can be accelerated when part of the process gases meet high temperature.

In order to achieve the purpose, the invention provides the following technical scheme: a vacuum pump gas filtering device with a part anti-corrosion function comprises a vacuum pump main body, a filtering mechanism and a gas adjusting mechanism, wherein the filtering mechanism and the gas adjusting mechanism are arranged on the vacuum pump main body;

the linkage assembly comprises a fixing ring fixedly connected to the top of the first supporting block, the inner side of the fixing ring is provided with a rotating groove, a filtering component is arranged inside the fixing ring and comprises a rotating ring rotatably connected inside the fixing ring, filter cotton is filled inside the rotating ring, through holes which penetrate through the rotating ring are uniformly distributed in the front and at the back of the rotating ring, the outer side of the rotating ring is fixedly connected with a fixing ring, the fixing ring penetrates through the rotating groove and is fixedly connected with the inner wall of the filtering component, helical tooth grooves are uniformly distributed on the inner wall of the rotating ring, and the helical tooth grooves are meshed and connected with the first helical gear and the second helical gear;

the subassembly that admits air still includes the gomphosis setting at the fixed casing at last shell top including setting up the intake pipe at solid fixed ring front end, and fixed casing is connected through communicating pipe and solid fixed ring rear end, and fixed casing runs through the shell and extends to the inside the place ahead of supreme casing through the tubular metal resonator.

Furthermore, the inner parts of the upper shell and the lower shell are provided with shaft grooves corresponding to the driving shaft and the driven shaft, and the outer walls of the driving shaft and the driven shaft are fixedly connected with compression impellers.

Furthermore, the compression cavities are arranged inside the upper shell and the lower shell, six groups of compression cavities are arranged, the volume of the six groups of compression cavities is gradually reduced, barrier fluid channels are arranged on two sides of the rear end of the top of the lower shell, and the barrier fluid channels are communicated with the shaft grooves.

Furthermore, air inlet grooves are uniformly distributed at the rear end of the top of the upper shell, first air inlet flow channels communicated with the air inlet grooves are uniformly distributed on two sides of the interior of the upper shell, second air inlet flow channels are uniformly distributed on two sides of the interior of the upper shell, the top of each second air inlet flow channel is communicated with the corresponding first air inlet flow channel, and the bottom of each second air inlet flow channel corresponds to the corresponding barrier fluid channel.

Further, gaseous adjustment mechanism includes power component, transmission assembly and adjusting part, and power component is including setting up the sleeve in last shell top, and telescopic one end is linked together with fixed casing is inside.

Further, power component still include with sleeve other end sliding connection's movable rod, the one end fixedly connected with piston plate of movable rod, and piston plate sliding connection is on telescopic inner wall, and the piston plate is divided into first cavity and second cavity with telescopic inside, the first fixed axle of other end fixedly connected with of movable rod.

Furthermore, the transmission assembly comprises a rotating shaft fixedly connected to the top of the upper shell, a straight gear is rotatably connected to the rotating shaft, a transmission rod is fixedly connected to one side of the straight gear, a first groove penetrating through the transmission rod from left to right is formed in the transmission rod, the movable rod penetrates through the first groove, a first sliding groove penetrating through the transmission rod from top to bottom is further formed in the transmission rod, and a first fixing shaft is movably arranged in the first sliding groove.

Further, the transmission assembly further comprises a second sliding groove arranged at the top of the upper shell, a sliding rod is connected to the inside of the second sliding groove in a sliding mode, a tooth groove is formed in the sliding rod and is connected with a straight gear in a meshed mode, second grooves are formed in the sliding rod and are provided with four groups, and second fixing shafts are fixedly connected to the inside of the second grooves.

Further, the adjusting component comprises a circular shell fixedly connected to the top of the upper shell, the position of the circular shell corresponds to the air inlet groove, the adjusting component further comprises a rotating rod penetrating through the second groove, and a third sliding groove corresponding to the second fixing shaft is formed in the top of the rotating rod.

Furthermore, the inside of the circular shell is rotatably connected with a rotating disc, one side of the circular shell is provided with a third groove, the rotating disc penetrates through the third groove and is fixedly connected with the rotating disc, a first air inlet hole which penetrates through the circular shell from top to bottom is formed in the circular shell, a second air inlet hole corresponding to the first air inlet hole is formed in the rotating disc, and the top of the circular shell is fixedly connected with an air inlet funnel.

Compared with the prior art, the invention has the beneficial effects that:

1. a vacuum pump gas filtering device with a part anti-corrosion function is characterized in that a pipeline is connected with a gas inlet pipe and is connected with a container to be vacuumized, when a driving shaft is driven by a driving motor to rotate, a first bevel gear rotates and drives a rotating ring to rotate, the rotating ring drives a driven shaft to rotate through a second bevel gear, gas is pumped through the gas inlet pipe in the rotating process of a compression impeller on the driving shaft and the driven shaft, the gas passes through a fixing ring through the gas inlet pipe and enters the upper shell and the lower shell through a communicating pipe, a fixing shell and a metal pipe, a filtering member is driven to rotate through the fixing ring when the rotating ring rotates, the gas passes through a through hole in the fixing ring and is filtered by filter cotton, when the filtering member rotates, the filter cotton in the fixing ring can rotate to share impurities in the gas, and the rotation of the filter cotton can increase the filtering effect and avoid the filter cotton from being blocked, the replacement frequency of the filter cotton is reduced.

2. In the process of pumping air, the protective gas is externally connected to the air inlet funnel, passes through the second air inlet hole and the first air inlet hole and enters the barrier fluid channel through the first air inlet flow channel and the second air inlet flow channel, and finally enters the shaft groove through the barrier fluid channel to dilute the process gas, so that the corrosion of the process gas to parts in the vacuum pump in a high-temperature state can be effectively reduced.

3. A vacuum pump gas filtering device with a part anti-corrosion function is characterized in that the vacuum pump is influenced by the vacuum degree in a container in the process of vacuumizing, namely, the lower the pressure in the container is, the quantity of gas pumped by the vacuum pump is relatively reduced, when the pressure in the container is reduced, because a second cavity is communicated with the inside of a fixed shell, namely, the pressure in the second cavity is equal to the pressure in the container, a pressure difference is formed between a first cavity and the second cavity, a piston plate is enabled to move towards the fixed shell, the moving distance is related to the pressure, when the piston plate drives a movable rod to move, a straight gear is driven to rotate through a transmission rod, the straight gear is meshed with a sliding rod, the sliding rod moves backwards, when the sliding rod moves backwards, a rotating disc is driven to rotate through a rotating rod, and the area of a second air inlet hole and the first air inlet hole which are intersected is reduced, and then the flow rate of the protective gas is changed, the internal extraction speed of the protective gas is slowed, and the protective gas inlet speed is slowed along with the protective gas, so that the protective gas is saved, meanwhile, the pollution caused by the mixing of the protective gas and the process gas is reduced, and the workload of subsequent gas treatment is reduced.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is an exploded view of the main structure of the vacuum pump of the present invention;

FIG. 3 is a schematic view of the construction of the lower housing of the present invention;

FIG. 4 is a cross-sectional view of the upper housing and upper shell construction of the present invention;

FIG. 5 is a schematic view of the filter mechanism of the present invention;

FIG. 6 is a schematic view of a driving assembly according to the present invention;

FIG. 7 is an exploded view of the air intake assembly and air intake assembly configuration of the present invention;

FIG. 8 is an exploded view of the filter element construction of the present invention;

FIG. 9 is a schematic view of the gas regulating mechanism of the present invention;

FIG. 10 is an exploded view of the power assembly configuration of the present invention;

FIG. 11 is a cross-sectional view of the power assembly configuration of the present invention;

FIG. 12 is a schematic view of the transmission assembly of the present invention;

fig. 13 is an exploded view of the adjustment assembly structure of the present invention.

In the figure: 1. a vacuum pump main body; 11. an upper housing; 111. an air inlet groove; 112. a first intake runner; 12. a lower housing; 13. an upper housing; 131. a second intake runner; 14. a lower housing; 141. a shaft groove; 142. compressing the cavity; 143. a barrier fluid channel; 15. a drive shaft; 151. compressing the impeller; 152. a first helical gear; 16. a driven shaft; 161. a second helical gear; 2. a filtering mechanism; 21. a drive assembly; 211. a first support block; 212. a second support block; 213. a drive motor; 22. a linkage assembly; 221. a fixing ring; 2211. a rotating groove; 222. a filter member; 2221. a rotating ring; 2222. a through hole; 2223. filtering cotton; 223. rotating the ring; 2231. an oblique gullet; 2232. a stationary ring; 23. an air intake assembly; 231. an air inlet pipe; 232. a stationary housing; 233. a metal tube; 234. a communicating pipe; 3. a gas regulating mechanism; 31. a power assembly; 311. a sleeve; 3111. a first cavity; 3112. a second cavity; 312. a movable rod; 313. a piston plate; 314. a first fixed shaft; 32. a transmission assembly; 321. a rotating shaft; 322. a spur gear; 323. a transmission rod; 3231. a first chute; 3232. a first groove; 324. a second chute; 325. a slide bar; 3251. a second groove; 3252. a second fixed shaft; 33. an adjustment assembly; 331. a circular housing; 3311. a first air intake hole; 3312. a third groove; 332. rotating the disc; 3321. a second air intake hole; 333. rotating the rod; 3331. a third chute; 334. an air inlet funnel.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In order to solve the technical problem that when some particulate matters pass through a vacuum pump, the impurities in part of gas are more, and the internal parts of the vacuum pump are damaged, as shown in fig. 1 to 8, the following preferred technical scheme is provided:

vacuum pump gas filtering device with spare part anti-corrosion function, including vacuum pump main part 1 and filter mechanism 2 and the gas adjustment mechanism 3 of setting on vacuum pump main part 1, vacuum pump main part 1 includes shell 11 and the lower shell 12 of installation in last shell 11 bottom, the inside of going up shell 11 is provided with casing 13, the inside of lower shell 12 is provided with down casing 14, it is connected with driving shaft 15 and driven shaft 16 to rotate between casing 13 and the lower shell 14, filter mechanism 2 includes drive assembly 21, linkage assembly 22 and air intake assembly 23, drive assembly 21 includes the first supporting block 211 of fixed connection shell 12 front end down, the front end fixed connection of first supporting block 211 has second supporting block 212, the top fixed connection of second supporting block 212 has driving motor 213, and driving motor 213's output and driving shaft 15 fixed connection.

The first helical gear 152 and the second helical gear 161 are fixedly connected to the driving shaft 15 and the driven shaft 16 respectively, the linkage assembly 22 comprises a fixing ring 221 fixedly connected to the top of the first supporting block 211, a rotating groove 2211 is formed in the inner side of the fixing ring 221, a filtering member 222 is arranged inside the fixing ring 221, the filtering member 222 comprises a rotating ring 2221 rotatably connected to the inside of the fixing ring 221, filter cotton 2223 is filled inside the rotating ring 2221, through holes 2222 penetrating through the rotating ring 2221 are uniformly distributed in the front and at the back of the rotating ring 2221, the linkage assembly 22 further comprises a rotating ring 223, a fixing ring 2232 is fixedly connected to the outer side of the rotating ring 223, the fixing ring 2232 penetrates through the inner wall of the rotating groove 2211 and the filtering member 222, helical tooth grooves 2231 are uniformly distributed on the inner wall of the rotating ring 223, and the helical tooth grooves 2231 are meshed with the first helical gear 152 and the second helical gear 161.

The air intake assembly 23 includes an air intake pipe 231 disposed at the front end of the fixing ring 221, the air intake assembly 23 further includes a fixing housing 232 fitted to the top of the upper housing 11, the fixing housing 232 is connected to the rear end of the fixing ring 221 through a communicating pipe 234, and the fixing housing 232 penetrates the upper housing 11 through a metal pipe 233 and extends to the front inside the upper housing 13.

Specifically, the air inlet pipe 231 is connected with a pipeline and connected with a container to be vacuumized, when the driving shaft 15 is driven by the driving motor 213 to rotate, the first bevel gear 152 rotates and drives the rotating ring 223 to rotate, the rotating ring 223 drives the driven shaft 16 to rotate through the second bevel gear 161, the air is extracted through the air inlet pipe 231 in the process that the compression impellers 151 on the driving shaft 15 and the driven shaft 16 rotate, the air passes through the fixing ring 221 through the air inlet pipe 231 and enters the upper shell 13 and the lower shell 14 through the communicating pipe 234, the fixing shell 232 and the metal pipe 233, the filtering member 222 is driven to rotate through the fixing ring 2232 when the rotating ring 223 rotates, the air passes through the through hole 2222 in the fixing ring 221 and is filtered by the filter cotton 2223, when the filtering member 222 rotates, the filter cotton 2223 in the filtering member also rotates along with the rotation, so as to share impurities in the air, the rotation of the filter cotton 2223 can increase the filtering effect while filtering the gas, so as to prevent the filter cotton 2223 from being blocked and reduce the replacement frequency of the filter cotton 2223.

In order to solve the technical problems that the vacuum pump generates a large amount of heat during the air pumping work, the temperature of the cavity and the shaft is increased, the temperature of the shaft is higher, and part of process gas can accelerate the corrosion of parts in the vacuum pump when meeting high temperature, as shown in fig. 1-4 and 9-13, the following preferred technical solutions are provided:

the inner parts of the upper casing 13 and the lower casing 14 are provided with shaft grooves 141 corresponding to the driving shaft 15 and the driven shaft 16, the outer walls of the driving shaft 15 and the driven shaft 16 are fixedly connected with compression impellers 151, the inner parts of the upper casing 13 and the lower casing 14 are provided with compression cavities 142, the compression cavities 142 are provided with six groups, the volumes of the six groups of compression cavities 142 are gradually reduced, barrier fluid channels 143 are respectively arranged on two sides of the rear end of the top of the lower shell 14, the barrier fluid channels 143 are communicated with the shaft groove 141, air inlet grooves 111 are uniformly distributed on the rear end of the top of the upper shell 11, first air inlet channels 112 communicated with the air inlet grooves 111 are uniformly distributed on two sides of the interior of the upper shell 11, second air inlet channels 131 are uniformly distributed on two sides of the interior of the upper shell 13, the top of each second air inlet channel 131 is communicated with the corresponding first air inlet channel 112, and the bottom of each second air inlet channel 131 corresponds to the corresponding barrier fluid channel 143.

The gas adjusting mechanism 3 comprises a power assembly 31, a transmission assembly 32 and an adjusting assembly 33, wherein the power assembly 31 comprises a sleeve 311 arranged above the upper shell 11, one end of the sleeve 311 is communicated with the inside of the fixed shell 232, the power assembly 31 further comprises a movable rod 312 which is connected with the other end of the sleeve 311 in a sliding manner, one end of the movable rod 312 is fixedly connected with a piston plate 313, the piston plate 313 is connected on the inner wall of the sleeve 311 in a sliding manner, the piston plate 313 divides the inside of the sleeve 311 into a first cavity 3111 and a second cavity 3112, the other end of the movable rod 312 is fixedly connected with a first fixed shaft 314, the transmission assembly 32 comprises a rotating shaft 321 which is fixedly connected with the top of the upper shell 11, a spur gear 322 is rotatably connected on the rotating shaft 321, one side of the spur gear 322 is fixedly connected with a transmission rod 323, a first groove 3232 which penetrates through the transmission rod 323 from left to right is arranged on the transmission rod 323, and the movable rod 312 penetrates through the first groove 3232, the driving rod 323 is further provided with a first sliding slot 3231 penetrating up and down, and the first fixed shaft 314 is movably arranged in the first sliding slot 3231.

The transmission assembly 32 further includes a second sliding slot 324 disposed at the top of the upper housing 11, a sliding rod 325 is slidably connected inside the second sliding slot 324, a tooth space is disposed on the sliding rod 325, the sliding rod 325 is engaged with the spur gear 322, a second groove 3251 is disposed on the sliding rod 325, four sets of second grooves 3251 are disposed, a second fixed shaft 3252 is fixedly connected inside each second groove 3251, the adjustment assembly 33 includes a circular housing 331 fixedly connected to the top of the upper housing 11, the circular housing 331 is located at a position corresponding to the air inlet slot 111, the adjustment assembly 33 further includes a rotating rod 333 penetrating through the second groove 3251, a third sliding slot 3331 corresponding to the second fixed shaft 3252 is disposed at the top of the rotating rod 333, a rotating disc 332 is rotatably connected inside the circular housing 331, a third groove 3312 is disposed at one side of the circular housing 331, 333 penetrates through the third groove 3312 and is fixedly connected to the rotating disc 3312, a first air inlet 3311 penetrating up and down is provided on the circular housing 331, a second air inlet 3321 corresponding to the first air inlet 3311 is provided on the rotary plate 332, and an air inlet funnel 334 is fixedly connected to the top of the circular housing 331.

Specifically, by externally connecting the shielding gas to the air inlet funnel 334, the shielding gas passes through the second air inlet hole 3321 and the first air inlet hole 3311 and enters the barrier fluid channel 143 through the first air inlet flow channel 112 and the second air inlet flow channel 131, and finally enters the shaft groove 141 through the barrier fluid channel 143 to dilute the process gas, corrosion of the process gas to components in the vacuum pump in a high temperature state can be effectively reduced, the vacuum pump will be affected by the vacuum degree in the container during the vacuum pumping process, that is, the pressure in the container is lower, the amount of the gas pumped by the vacuum pump will also be relatively reduced, when the pressure in the container is reduced, because the second cavity 3112 is in a communication state with the inside of the fixed housing 3112, that is, the pressure in the second cavity 3112 is equal to the pressure in the container, a pressure difference is formed between the first cavity 3111 and the second cavity 3112, so as to urge the piston plate 313 to move to the fixed housing 232, and the moving distance is related to the pressure intensity, when the piston plate 313 drives the movable rod 312 to move, the straight gear 322 is driven to rotate through the transmission rod 323, the straight gear 322 is meshed with the sliding rod 325 and enables the sliding rod 325 to move backwards, when the sliding rod 325 moves backwards, the rotating disc 332 is driven to rotate through the rotating rod 333, the area of the second air inlet hole 3321, which is intersected with the area of the first air inlet hole 3311, is reduced, the flow rate of the shielding gas is changed, the internal extraction speed of the shielding gas is reduced, the entering speed of the shielding gas is reduced along with the slow speed, meanwhile, the pollution caused by the mixing of the shielding gas and the process gas is reduced, and the workload of subsequent gas treatment is reduced.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered as the technical solutions and the inventive concepts of the present invention within the technical scope of the present invention.

Claims (7)

1. Vacuum pump gas filtering device with spare part anti-corrosion function, including vacuum pump main part (1) and filter mechanism (2) and gas adjustment mechanism (3) of setting on vacuum pump main part (1), its characterized in that: the vacuum pump main body (1) comprises an upper shell (11) and a lower shell (12) installed at the bottom of the upper shell (11), an upper shell (13) is arranged inside the upper shell (11), a lower shell (14) is arranged inside the lower shell (12), a driving shaft (15) and a driven shaft (16) are rotatably connected between the upper shell (13) and the lower shell (14), the filtering mechanism (2) comprises a driving component (21), a linkage component (22) and an air inlet component (23), the driving component (21) comprises a first supporting block (211) fixedly connected to the front end of the lower shell (12), a second supporting block (212) is fixedly connected to the front end of the first supporting block (211), a driving motor (213) is fixedly connected to the top of the second supporting block (212), and the output end of the driving motor (213) is fixedly connected with the driving shaft (15);

a first helical gear (152) and a second helical gear (161) are respectively and fixedly connected to the driving shaft (15) and the driven shaft (16), the linkage assembly (22) comprises a fixing ring (221) fixedly connected to the top of the first supporting block (211), a rotating groove (2211) is formed in the inner side of the fixing ring (221), a filtering member (222) is arranged in the fixing ring (221), the filtering member (222) comprises a rotating ring (2221) rotatably connected to the inner portion of the fixing ring (221), filter cotton (2223) is filled in the rotating ring (2221), through holes (2222) which penetrate through the inside and the outside are uniformly distributed in the front and at the back of the rotating ring (2221), the linkage assembly (22) further comprises a rotating ring (223), a fixing ring (2232) is fixedly connected to the outer side of the rotating ring (223), the fixing ring (2232) penetrates through the rotating groove (2211) and is fixedly connected with the inner wall of the filtering member (222), oblique tooth grooves (2231) are uniformly distributed on the inner wall of the rotating ring (223), and the helical tooth groove (2231) is in meshed connection with the first helical gear (152) and the second helical gear (161);

the air inlet assembly (23) comprises an air inlet pipe (231) arranged at the front end of the fixing ring (221), the air inlet assembly (23) further comprises a fixing shell (232) which is embedded at the top of the upper shell (11), the fixing shell (232) is connected with the rear end of the fixing ring (221) through a communicating pipe (234), and the fixing shell (232) penetrates through the upper shell (11) through a metal pipe (233) and extends to the front inside the upper shell (13);

shaft grooves (141) corresponding to the driving shaft (15) and the driven shaft (16) are formed in the upper shell (13) and the lower shell (14), barrier fluid channels (143) are formed in the two sides of the rear end of the top of the lower shell (14), and the barrier fluid channels (143) are communicated with the shaft grooves (141);

the rear end of the top of the upper shell (11) is uniformly distributed with air inlet grooves (111), two sides of the interior of the upper shell (11) are uniformly distributed with first air inlet channels (112) communicated with the air inlet grooves (111), two sides of the interior of the upper shell (13) are uniformly distributed with second air inlet channels (131), the top of each second air inlet channel (131) is communicated with the corresponding first air inlet channel (112), and the bottom of each second air inlet channel (131) corresponds to the corresponding barrier fluid channel (143);

the gas adjusting mechanism (3) comprises a power assembly (31), a transmission assembly (32) and an adjusting assembly (33), the transmission assembly (32) comprises a second sliding groove (324) formed in the top of the upper shell (11), a sliding rod (325) is connected to the inside of the second sliding groove (324) in a sliding mode, a second groove (3251) is formed in the sliding rod (325), four groups of second grooves (3251) are arranged, and a second fixed shaft (3252) is fixedly connected to the inside of each second groove (3251);

the adjusting component (33) comprises a circular shell (331) fixedly connected to the top of the upper shell (11), the position of the circular shell (331) corresponds to the air inlet groove (111), the inside of the circular shell (331) is rotatably connected with a rotating disc (332), a first air inlet hole (3311) penetrating through the circular shell (331) from top to bottom is formed in the circular shell (331), a second air inlet hole (3321) corresponding to the first air inlet hole (3311) is formed in the rotating disc (332), and an air inlet funnel (334) is fixedly connected to the top of the circular shell (331).

2. The gas filtering device for a vacuum pump having an anticorrosion function of parts according to claim 1, wherein: the outer walls of the driving shaft (15) and the driven shaft (16) are fixedly connected with compression impellers (151), compression cavities (142) are arranged inside the upper shell (13) and the lower shell (14), six groups of compression cavities (142) are arranged, and the volume of the compression cavities (142) is gradually reduced.

3. The gas filtering device for a vacuum pump having an anticorrosion function of parts according to claim 1, wherein: the power assembly (31) comprises a sleeve (311) arranged above the upper shell (11), and one end of the sleeve (311) is communicated with the inside of the fixed shell (232).

4. A gas filtering device for a vacuum pump having a function of preventing corrosion of parts according to claim 3, wherein: power component (31) still include with sleeve (311) other end sliding connection's movable rod (312), the one end fixedly connected with piston plate (313) of movable rod (312), and piston plate (313) sliding connection is on the inner wall of sleeve (311), piston plate (313) divide into first cavity (3111) and second cavity (3112) with the inside of sleeve (311), the other end fixedly connected with first fixed axle (314) of movable rod (312).

5. The vacuum pump gas filtering device with corrosion prevention of parts according to claim 4, wherein: the transmission assembly (32) further comprises a rotating shaft (321) fixedly connected to the top of the upper shell (11), a spur gear (322) is rotatably connected to the rotating shaft (321), a transmission rod (323) is fixedly connected to one side of the spur gear (322), a first groove (3232) penetrating left and right is formed in the transmission rod (323), the movable rod (312) penetrates through the first groove (3232), a first sliding groove (3231) penetrating up and down is further formed in the transmission rod (323), and the first fixing shaft (314) is movably arranged in the first sliding groove (3231);

the sliding rod (325) is provided with a tooth groove, and the sliding rod (325) is meshed and connected with the straight gear (322).

6. The gas filtering device for a vacuum pump having an anticorrosion function of parts according to claim 5, wherein: the adjusting assembly (33) further comprises a rotating rod (333) penetrating through the second groove (3251), and a third sliding groove (3331) corresponding to the second fixing shaft (3252) is formed in the top of the rotating rod (333).

7. The gas filtering device for a vacuum pump having an anticorrosion function of parts according to claim 6, wherein: a third groove (3312) is formed in one side of the circular housing (331), and the rotating rod (333) penetrates through the third groove (3312) and is fixedly connected with the rotating disc (332).

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